Load lock apparatus including a microwave heater and substrate processing apparatus

Abstract

This disclosure relates to a load-locking device and a substrate processing apparatus including the load-locking device. The load-locking device includes a load-locking chamber body defining a load-locking chamber, a substrate holder for holding one or more substrates in the load-locking chamber, and a microwave heater for desorbing adsorbed moisture from one or more substrates.

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