A coating equipment with a sealing protection structure

Abstract

The application relates to the technical field of evaporation machines, and particularly discloses a film coating equipment with a sealing protection structure, which comprises a positioning sleeve, a plurality of rotating arms are equidistantly arranged on the outer side of the positioning sleeve in the circumferential direction, rotating support rings are arranged on the outer sides of the rotating arms, a hanger is arranged at the bottom of each of the rotating arms, a locking ring is arranged at the bottom of each of the hangers, a plating pot is arranged on the locking ring, a positioning and clamping assembly is arranged on the dome-shaped top of the plating pot, an upper protection assembly is detachably arranged on the plating pot, and a bottom protection assembly is detachably arranged at the bottom of the plating pot. The film coating equipment with the sealing protection structure is characterized in that the bottoms of a plurality of upper protection covers in the upper protection assembly are attracted to the magnetic suction seats on the locking ring through magnets, the lateral magnets are attracted to the magnetic suction seats of the adjacent cover bodies, and a continuous locking chain is formed, so that quick fixing and splicing can be realized without tools, and the gap is prevented from being opened.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition equipment technology, specifically to a coating equipment with a sealed protective structure. Background Technology

[0002] The core of coating equipment is the vapor deposition machine, which contains a coating pot for holding the glass substrate. The coating material is evaporated and deposited onto the surface of the glass substrate by heating, thus completing the coating operation.

[0003] For example, Chinese utility model patent application number CN202122689890.X discloses a positioning fixture for glass sheet coating, including a fan-shaped fixture with uniformly spaced positioning holes. A collar is installed on the positioning holes, and a shrinkage slit is provided on the collar. This is used to avoid problems such as jamming and damage caused by the expansion of the glass sheet during the coating process, thereby improving the product yield and facilitating the fixing and handling of the glass sheet.

[0004] However, the positioning fixture for glass sheet coating in the aforementioned patent has the following shortcomings: First, in existing coating equipment, the glass substrate is placed on the coating pot only by cooperating with the positioning post on the coating pot through the positioning hole on it. When the coating pot rotates, it is easy to shake or even fall off, resulting in a decrease in coating quality or damage to the substrate. Second, after long-term use, the existing coating equipment is prone to film accumulation and falling off from the rotating frame and the dome of the coating pot, which contaminates the glass substrate. Furthermore, when the entire equipment is shut down for maintenance, the bottom of the coating pot is easily bumped accidentally, which affects the coating quality and the life of the equipment. Summary of the Invention

[0005] The purpose of this invention is to provide a coating device with a sealed protective structure to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a coating device with a sealed protective structure, comprising a positioning sleeve, wherein a plurality of rotating arms are equidistantly arranged on the outer side of the positioning sleeve along the circumferential direction, a rotating support ring is provided on the outer side of the plurality of rotating arms, a hanging component is provided at the bottom of the plurality of rotating arms, a locking ring is provided at the bottom of the plurality of hanging components, a coating pot is provided on the locking ring, a positioning clamping assembly is provided on the dome of the coating pot, an upper protective assembly is detachably provided on the coating pot, and a bottom protective assembly is detachably provided at the bottom of the coating pot; The positioning and clamping assembly includes an array of positioning posts. The array of positioning posts is equidistantly distributed along the circumferential direction on the dome of the plating pot and is divided into two rings, one ring being close to the edge of the plating pot and the other ring being close to the center of the plating pot. Each set of positioning posts carries a glass substrate. Each glass substrate has several positioning holes corresponding to the positioning posts. The plating pot has a pair of plating openings corresponding to the areas of each glass substrate to be coated.

[0007] Using the above technical solution, the positioning sleeve provides the installation base for the rotating arm, the rotating support ring enhances rigidity to reduce swaying, the hanging component suspends the locking ring below the rotating arm to stabilize the center of gravity of the plating pot, the locking ring is used to install the plating pot, the dome structure of the plating pot facilitates the uniform distribution of the glass substrate, and the deposition area is defined by the coating opening. Secondly, the glass substrate is matched with the positioning post on the plating pot through the positioning hole to achieve repeated loading and unloading, ensuring that the area to be coated is accurately aligned with the coating opening, the coating material is deposited on the glass substrate through the coating opening, avoiding contamination of non-coating areas, and achieving selective coating.

[0008] Preferably, each of the edges of the plating pot is provided with a mounting box 1 corresponding to the position of the glass substrate. A bottom clamp is slidably disposed inside the mounting box 1. The bottom clamp is used to press the bottom of the corresponding glass substrate. A pair of wave springs 1 are provided between the inner bottom surface of each mounting box 1 and the bottom clamp 1. A pair of guide rails 1 are symmetrically disposed on the inner walls of both sides of the mounting box 1. The bottom clamp is slidably disposed on the guide rails 1.

[0009] Using the above technical solution, the mounting box provides a mounting base for the wave spring and the bottom clamp. The wave spring provides elastic force to drive the bottom clamp to adaptively press the bottom of the glass substrate at the edge of the plating pot. The guide rail provides guidance for the vertical sliding of the bottom clamp, preventing the glass substrate from moving accidentally when the plating pot rotates and avoiding rigid impact damage to the glass substrate.

[0010] Preferably, a mounting box II is provided between two adjacent glass substrates at the edge of the plating pot, and a T-shaped clamp is slidably disposed in several mounting boxes II. The T-shaped clamp is used to press the glass substrates on both sides of the box. A pair of wave springs II is provided between the inner bottom surface of each mounting box II and the T-shaped clamp. A pair of guide rails II are symmetrically disposed on the inner walls of the front and rear sides of the mounting box II, and the T-shaped clamp is slidably disposed on the guide rails II.

[0011] Using the above technical solution, the mounting box 2 provides a mounting base for the T-shaped clip and the wave spring 2. The wave spring 2 provides elastic restoring force, so that the T-shaped clip adaptively presses the glass substrates on both sides and buffers vibration. Using one T-shaped clip to fix two glass substrates can reduce the number of parts and simplify the structure. The guide rail 2 provides guidance for the vertical sliding of the T-shaped clip, ensuring that its two sides fit the sides of the adjacent glass substrates.

[0012] Preferably, a pair of mounting boxes 3 are symmetrically arranged on both sides of the glass substrate in the center of the plating pot. Each mounting box 3 has a side clamp slidably arranged inside it, and the side clamps on both sides are arranged opposite each other to press the glass substrate located in the center of the plating pot from both sides. A pair of wave springs 3 are arranged between the inner bottom surface of each mounting box 3 and the side clamp. A pair of guide rails 3 are symmetrically arranged on the inner walls of the front and rear sides of the mounting box 3, and the side clamp is slidably arranged on the guide rails 3.

[0013] Using the above technical solution, the mounting box three provides a mounting base for the wave spring three and the side clamps. The wave spring three provides elastic force to press the side clamps on both sides tightly against the glass substrate, preventing the glass substrate from shifting during rotation and avoiding warping of the glass substrate due to unilateral force, thus ensuring uniform pressure distribution. The guide rail three guides the side clamps to slide vertically, ensuring that the side clamps stably hold the glass substrate.

[0014] Preferably, the upper protective assembly includes several upper protective covers placed on the plating pot, each of the upper protective covers being provided with an operating handle, and each of the upper protective covers being provided with a bottom magnet for attracting a corresponding magnetic seat on the locking ring.

[0015] Using the above technical solution, several upper protective covers can be spliced ​​together to cover the top of the plating pot, serving as a sacrificial shielding layer to prevent the film material splashed during the deposition process from peeling off under thermal stress and forming particles after long-term plating. This is achieved by the rotating frame consisting of the rotating arm, rotating support ring, hanging parts, and locking ring, as well as the dome of the plating pot. This also prevents particles from falling onto the glass substrate and causing pinholes or impurities. Furthermore, the detachable design facilitates regular replacement or cleaning of the upper protective covers, ensuring that the dome of the plating pot remains film-free without affecting the rapid start-up of the plating process. The bottom magnet of the upper protective cover engages with the magnetic seat on the locking ring, enabling quick fixation without tools. The operating handle provides a force point for disassembly or installation.

[0016] Preferably, each of the upper protective covers is provided with a lateral magnet on one side, and a magnetic base is provided on the side of the upper protective cover away from the lateral magnet. Several upper protective covers are spliced ​​together in sequence, and the lateral magnet is used to attract the magnetic base of the adjacent upper protective cover. Each upper protective cover is provided with a sealing strip on its side wall and bottom surface to fill the gaps between adjacent upper protective covers and between the upper protective cover and the locking ring.

[0017] Using the above technical solution, the lateral magnet on one side of the upper protective cover attracts the magnetic seat of the adjacent upper protective cover to achieve horizontal fixation and form a continuous locking chain to prevent the splicing gap from opening. The sealing strip on the side wall of the upper protective cover fills the gap between the covers, and the sealing strip at the bottom is used to fill the gap between the upper protective cover and the locking ring, together preventing the film material from seeping into the plating pot from the gap and contaminating it.

[0018] Preferably, the plating pot has several positioning posts equidistantly arranged at the center along the circumferential direction, and each of the upper protective covers has an alignment hole at the position corresponding to the positioning post 2.

[0019] Using the above technical solution, the second positioning post in the center of the plating pot is used to cooperate with the alignment hole on the top of the upper protective cover to guide the upper protective cover to be placed accurately and achieve circumferential positioning.

[0020] Preferably, the bottom protection assembly includes a lower protective shell disposed at the bottom of the locking ring, and the inner wall of the locking ring is provided with several mounting seats at equal intervals along the circumferential direction, and each mounting seat is provided with a mounting sleeve on the side facing the center of the locking ring.

[0021] The above technical solution involves installing the lower protective shell at the bottom of the locking ring. This shell, in conjunction with the upper protective assembly, protects the plating pot when the coating equipment is not in operation. It prevents accidental bumps or impacts to the pot by operators during maintenance, target replacement, or cleaning within the chamber, thus avoiding deformation or damage. Furthermore, the lower protective shell can be quickly disassembled and removed without affecting the normal coating process. The mounting base on the inner wall of the locking ring provides a foundation for the mounting sleeve, which in turn provides a foundation for the disc, wave spring, and round rod, and guides the movement of the disc.

[0022] Preferably, a disc is slidably disposed inside each of the mounting sleeves, and a wave spring is disposed between the disc and the inner side of the mounting sleeve facing the center of the locking ring. A round rod is disposed on the side of the disc facing the center of the locking ring, and a knob is connected to the end of the round rod away from the disc after passing through the mounting sleeve. A pair of limiting posts are disposed on the side of the knob facing the disc.

[0023] Using the above technical solution, the disc slides within the mounting sleeve, providing a mounting base for the round rod and knob. The elastic force of the wave spring four is transmitted to the round rod. When the lower protective shell is disassembled, the wave spring four provides a restoring force to the disc, allowing the knob and round rod to exit through the elongated hole on the fixing seat and release the locked state. When the lower protective shell is installed, the limiting post on one side of the knob engages with the limiting hole on the fixing seat, and the wave spring four provides a restoring force to the disc, ensuring the stability of the mechanical engagement between the limiting post and the limiting hole and preventing the lower protective shell from accidentally falling off due to loosening.

[0024] Preferably, the inner wall of the lower protective shell is provided with a fixing seat at the position corresponding to the mounting sleeve. Each fixing seat has an elongated hole for the round rod and the knob to pass through. Limiting holes are provided on the fixing seats on the upper and lower sides of the elongated hole. The limiting holes are used to cooperate with the limiting post on the knob side to lock the lower protective shell. A sealing ring is provided on the outer edge of the top of the lower protective shell. The sealing ring is used to fill the gap between the top of the lower protective shell and the locking ring.

[0025] Using the above technical solution, the elongated hole on the fixing base allows the round rod and the knob to pass through, and the limiting hole on the fixing base is used to cooperate with the limiting post on one side of the knob to lock the knob, thereby realizing the quick disassembly and locking of the lower protective shell. The sealing ring on the outer edge of the top of the lower protective shell presses against the bottom surface of the locking ring to fill the gap and form a bottom seal, thereby achieving full sealing protection of the plating pot when it is not in use with the upper protective component, preventing dust from entering or being contaminated, and extending the equipment maintenance cycle and service life.

[0026] Compared with the prior art, the beneficial effects of the present invention are: the coating equipment with a sealed protective structure: 1. By precisely engaging the two rings of positioning posts on the plating pot with the positioning holes on the glass substrate in the positioning clamping assembly, the area to be coated can be accurately aligned with the coating opening, avoiding coating deviation. Secondly, the bottom clamping piece at the bottom of the material loading position at the edge of the plating pot, guided by wave spring one and guide rail one, adaptively presses the bottom of the glass substrate. At the same time, the T-shaped clamping piece between adjacent glass substrates, under the action of wave spring two and guide rail two, simultaneously presses the glass substrates on both sides. Using one clamping piece to fix two substrates can reduce the number of parts and buffer vibration. In addition, the side clamping pieces on both sides of the material loading position at the center of the plating pot, guided by wave spring three and guide rail three, press the two sides of the glass substrate, avoiding warping caused by unilateral force on the glass substrate. The entire assembly can avoid rigid impact damage to the glass substrate and ensure the stability of the glass substrate during coating, thereby ensuring coating uniformity. 2. The bottom magnets of several upper protective covers in the upper protective assembly are used to engage with the magnetic seats on the locking rings, while the side magnets are used to form a continuous locking chain with the magnetic seats of adjacent covers. This allows for quick fixing and splicing without tools, preventing gaps from opening. Secondly, the sealing strips on the side walls of the upper protective covers can fill the gaps between the covers, and the sealing strips on the bottom can fill the gaps between the covers and the locking rings. In addition, the positioning pins on the top of the plating pot are used to engage with the alignment holes on the top of the upper protective cover, ensuring accurate installation of the upper protective cover. The upper protective cover acts as a sacrificial shielding layer to prevent the film material from splashing during the deposition process, and prevents particulate contamination caused by the film falling off from the rotating frame consisting of the rotating arm, rotating support ring, hanging parts, and locking ring, as well as the plating pot dome, thereby protecting the plating pot and the glass substrate. 3. The elongated holes and limiting holes on the fixing base of the bottom protective assembly are used to cooperate with the knob and limiting post to realize the quick disassembly and locking of the lower protective shell. At the same time, the wave spring provides the reset force for the disc to ensure the mechanical engagement of the limiting post and the limiting hole is stable and prevents accidental loosening, thereby ensuring the stability of the lower protective shell during use. In addition, the sealing ring on the top of the lower protective shell presses against the bottom surface of the locking ring to form a bottom seal. Through the cooperation of the lower protective shell and the upper protective cover, a fully enclosed protection is formed. When the equipment is stopped for maintenance, target replacement or cleaning of the chamber, it prevents the operator from accidentally bumping or hitting the plating pot, protects the plating pot from damage, and extends the service life of the equipment. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the positioning and clamping component structure of the present invention; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 for Figure 2 Enlarged view of point B in the middle; Figure 5 This is a schematic diagram of the T-shaped clamping piece structure in the positioning and clamping assembly of the present invention; Figure 6 for Figure 5 Enlarged view of point C in the middle; Figure 7 This is a schematic diagram of the side clamping piece structure in the positioning and clamping assembly of the present invention; Figure 8 for Figure 7 Enlarged view of point D; Figure 9 This is a schematic diagram of the plating pot structure of the present invention; Figure 10 This is a schematic diagram of the upper protective component structure of the present invention; Figure 11 This is a schematic diagram of the upper protective cover structure in the upper protective assembly of the present invention; Figure 12 This is a schematic diagram of the bottom protective component structure of the present invention; Figure 13 for Figure 12 Enlarged view of point E in the middle; Figure 14 This is a schematic diagram of the lower protective shell structure in the bottom protective assembly of the present invention.

[0028] In the diagram: 1. Positioning sleeve; 2. Rotating arm; 3. Rotating support ring; 4. Hanging component; 5. Locking ring; 6. Plating pot; 7. Positioning clamping assembly; 71. Glass substrate; 72. Positioning post one; 73. Positioning hole; 74. Coating opening; 75. Mounting box one; 76. Wave spring one; 77. Guide rail one; 78. Bottom clamp; 79. Mounting box two; 710. Wave spring two; 711. Guide rail two; 712. T-shaped clamp; 713. Mounting box three; 714. Wave spring three. 4; Guide rail 3 715; Side clamp 716; Upper protective assembly 8; Upper protective cover 81; Operating handle 82; Bottom magnet 83; Side magnet 84; Positioning post 2 85; Bottom protective assembly 9; Lower protective shell 91; Mounting base 92; Mounting sleeve 93; Disc 94; Wave spring 4 95; Round rod 96; Limiting post 97; Fixing base 98; Long strip hole 99; Limiting hole 910; Sealing ring 911; Knob 912. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figures 1-14 The present invention provides a technical solution: a coating equipment with a sealed protection structure, including a positioning sleeve 1, a plurality of rotating arms 2 are equidistantly arranged on the outer side of the positioning sleeve 1 along the circumferential direction, a rotating support ring 3 is arranged on the outer side of the plurality of rotating arms 2, a hanging component 4 is arranged at the bottom of the plurality of rotating arms 2, a locking ring 5 is arranged at the bottom of the plurality of hanging components 4, a coating pot 6 is arranged on the locking ring 5, a positioning clamping component 7 is arranged on the dome of the coating pot 6, an upper protective component 8 is detachably arranged on the coating pot 6, and a bottom protective component 9 is detachably arranged at the bottom of the coating pot 6; The positioning and clamping assembly 7 includes an array of positioning posts 72, which are equidistantly distributed along the circumferential direction on the dome of the plating pot 6 and divided into two rings, one ring being close to the edge of the plating pot 6 and the other ring being close to the center of the plating pot 6. Each set of positioning posts 72 carries a glass substrate 71, and each glass substrate 71 has several positioning holes 73 corresponding to the positioning posts 72. The plating pot 6 has a pair of plating openings 74 corresponding to the area to be coated on each glass substrate 71. Referring to the attached diagrams in the instruction manual Figures 1-14 As shown, firstly, the positioning sleeve 1 provides the mounting base for the rotating arm 2, the rotating support ring 3 enhances rigidity to reduce swaying, and the hanging part 4 suspends the locking ring 5 below the rotating arm 2 to stabilize the center of gravity of the plating pot 6. The locking ring 5 is used to install the plating pot 6. The dome structure of the plating pot 6 facilitates the uniform distribution of the glass substrate 71 and defines the deposition area through the coating opening 74. Secondly, the glass substrate 71 is matched with the positioning post 72 on the plating pot 6 through the positioning hole 73, so that it can be repeatedly loaded and unloaded. This ensures that the area to be coated is accurately aligned with the coating opening 74. The coating material is deposited on the glass substrate 71 through the coating opening 74, avoiding contamination of non-coating areas and achieving selective coating.

[0031] Mounting boxes 75 are provided at the edges of the plating pot 6 corresponding to the positions of the glass substrates 71. Bottom clamps 78 are slidably arranged inside the mounting boxes 75. The bottom clamps 78 are used to press the bottom of the corresponding glass substrates 71. A pair of wave springs 76 are provided between the inner bottom surface of each mounting box 75 and the bottom clamps 78. A pair of guide rails 77 are symmetrically arranged on the inner walls of both sides of the mounting boxes 75. The bottom clamps 78 are slidably arranged on the guide rails 77. Mounting box 2 79 is provided between two adjacent glass substrates 71 on the edge of the plating pot 6. T-shaped clamps 712 are slidably arranged in several mounting boxes 2 79. The T-shaped clamps 712 are used to press the glass substrates 71 on both sides. A pair of wave springs 2 710 are provided between the inner bottom surface of each mounting box 2 79 and the T-shaped clamps 712. A pair of guide rails 2 711 are symmetrically arranged on the inner walls of the front and rear sides of the mounting box 2 79. The T-shaped clamps 712 are slidably arranged on the guide rails 2 711. Referring to the attached diagrams in the instruction manual Figures 1-14 As shown, firstly, the mounting box 75 provides a mounting base for the wave spring 76 and the bottom clamp 78. The wave spring 76 provides elastic force to drive the bottom clamp 78 to adaptively press the bottom of the glass substrate 71 at the edge of the plating pot 6. The guide rail 77 provides guidance for the vertical sliding of the bottom clamp 78, preventing the glass substrate 71 from moving accidentally when the plating pot 6 rotates, and avoiding rigid impact damage to the glass substrate 71. Secondly, mounting box 79 provides a mounting base for T-shaped clip 712 and wave spring 710. Wave spring 710 provides elastic restoring force, allowing T-shaped clip 712 to adaptively press against the glass substrates 71 on both sides and buffer vibration. Using one T-shaped clip 712 to fix two glass substrates 71 can reduce the number of parts and simplify the structure. Guide rail 711 provides guidance for the vertical sliding of T-shaped clip 712, ensuring that its two sides fit against the sides of adjacent glass substrates 71.

[0032] A pair of mounting boxes 713 are symmetrically arranged on both sides of the glass substrate 71 at the center of the plating pot 6. Each mounting box 713 has a side clamp 716 slidably arranged inside it, and the side clamps 716 on both sides are arranged opposite to each other to press the glass substrate 71 located at the center of the plating pot 6 from both sides. A pair of wave springs 714 are arranged between the inner bottom surface of each mounting box 713 and the side clamp 716. A pair of guide rails 715 are symmetrically arranged on the inner walls of the front and rear sides of the mounting box 713, and the side clamps 716 are slidably arranged on the guide rails 715. Referring to the attached diagrams in the instruction manual Figures 1-14 As shown, mounting box 3 713 provides a mounting base for wave spring 3 714 and side clamps 716. Wave spring 3 714 provides elastic force to press the side clamps 716 on both sides against the glass substrate 71, preventing the glass substrate 71 from shifting during rotation and avoiding warping of the glass substrate 71 due to unilateral force, thus ensuring uniform pressure distribution. Guide rail 3 715 guides the side clamps 716 to slide vertically, ensuring that the side clamps 716 stably clamp the glass substrate 71.

[0033] The upper protective assembly 8 includes several upper protective covers 81 covering the plating pot 6. Each of the upper protective covers 81 is provided with an operating handle 82, and each of the upper protective covers 81 is provided with a bottom magnet 83 for attracting the corresponding magnetic seat on the locking ring 5. Each upper protective cover 81 is provided with a lateral magnet 84 on one side, and a magnetic base is provided on the side of the upper protective cover 81 away from the lateral magnet 84. Several upper protective covers 81 are spliced ​​together in sequence, and the lateral magnet 84 is used to attract the magnetic base of the adjacent upper protective cover 81. Each upper protective cover 81 is provided with a sealing strip on its side wall and bottom surface to fill the gaps between adjacent upper protective covers 81 and between the upper protective cover 81 and the locking ring 5. Several positioning posts 85 are equidistantly arranged at the center of the plating pot 6 along the circumferential direction, and each upper protective cover 81 has an alignment hole corresponding to the position of the positioning post 85. Referring to the attached diagrams in the instruction manual Figures 1-14 As shown, firstly, several upper protective covers 81 are spliced ​​together to cover the top of the plating pot 6, serving as a sacrificial shielding layer to prevent the film material splashed during the deposition process from peeling off under thermal stress and forming particles after long-term plating. This prevents the thick film layer accumulated on the rotating frame consisting of the rotating arm 2, rotating support ring 3, hanging parts 4, and locking ring 5, as well as the dome of the plating pot 6, from falling onto the glass substrate 71 and causing pinholes or impurity defects. Furthermore, the detachable design facilitates the periodic replacement or cleaning of the upper protective covers 81, ensuring that the dome of the plating pot 6 is always free of film, while not affecting the rapid start-up of the plating process. The bottom magnet 83 at the bottom of the upper protective cover 81 is attracted to the magnetic seat on the locking ring 5, enabling rapid fixation without tools. The operating handle 82 provides a force point for disassembly or installation. Secondly, the lateral magnet 84 on one side of the upper protective cover 81 attracts the magnetic seat of the adjacent upper protective cover 81 to achieve horizontal fixation and form a continuous locking chain to prevent the splicing gap from opening. The sealing strip on the side wall of the upper protective cover 81 fills the gap between the covers, and the sealing strip at the bottom is used to fill the gap between the upper protective cover 81 and the locking ring 5, together preventing the film material from seeping into the gap and contaminating the plating pot 6. In addition, the positioning post 85 at the center of the plating pot 6 is used to cooperate with the alignment hole at the top of the upper protective cover 81 to guide the upper protective cover 81 to be accurately placed and achieve circumferential positioning.

[0034] The bottom protection assembly 9 includes a lower protective shell 91 disposed at the bottom of the locking ring 5. Several mounting seats 92 are equidistantly disposed on the inner wall of the locking ring 5 along the circumferential direction. Each mounting seat 92 is provided with a mounting sleeve 93 on the side facing the center of the locking ring 5. Each mounting sleeve 93 has a disc 94 slidably installed inside it. A wave spring 95 is installed between the disc 94 and the inner side of the mounting sleeve 93 facing the center of the locking ring 5. A round rod 96 is installed on the side of the disc 94 facing the center of the locking ring 5. The end of the round rod 96 away from the disc 94 passes through the mounting sleeve 93 and is connected to a knob 912. A pair of limit posts 97 are installed on the side of the knob 912 facing the disc 94. The inner wall of the lower protective shell 91 is provided with a fixing seat 98 at the position corresponding to the mounting sleeve 93. Each fixing seat 98 has an elongated hole 99 for the round rod 96 and the knob 912 to pass through. Limiting holes 910 are provided on the fixing seats 98 on both the upper and lower sides of the elongated hole 99. The limiting holes 910 are used to cooperate with the limiting post 97 on the side of the knob 912 to lock the lower protective shell 91. A sealing ring 911 is provided on the outer edge of the top of the lower protective shell 91. The sealing ring 911 is used to fill the gap between the top of the lower protective shell 91 and the locking ring 5. Referring to the attached diagrams in the instruction manual Figures 1-14 As shown, firstly, the lower protective shell 91 is installed at the bottom of the locking ring 5. It is used to protect the plating pot 6 in conjunction with the upper protective component when the coating equipment is not in operation. This prevents the operator from accidentally bumping or hitting the plating pot 6 when performing maintenance, target replacement, or cleaning operations in the chamber, thus avoiding deformation or damage to the plating pot 6. Furthermore, the lower protective shell 91 can be quickly disassembled and removed when coating is required without affecting the normal coating process. The mounting base 92 on the inner wall of the locking ring 5 provides the mounting base for the mounting sleeve 93. The mounting sleeve 93 provides the mounting base for the disc 94, the wave spring 95, and the round rod 96, and provides guidance for the movement of the disc 94. Secondly, the disc 94 slides within the mounting sleeve 93, providing a mounting base for the round rod 96 and the knob 912. The elastic force of the wave spring 95 is transmitted to the round rod 96. When the lower protective shell 91 is disassembled, the wave spring 95 provides a restoring force to the disc 94, causing the knob 912 and the round rod 96 to exit through the elongated hole 99 on the fixing seat 98 and release the locked state. When the lower protective shell 91 is installed, the limiting post 97 on one side of the knob 912 is engaged with the limiting hole 910 on the fixing seat 98. The wave spring 95 provides a restoring force to the disc 94, ensuring the stability of the mechanical engagement between the limiting post 97 and the limiting hole 910, and preventing the lower protective shell 91 from accidentally falling off due to loosening. In addition, the elongated hole 99 on the mounting base 98 allows the round rod 96 and the knob 912 to pass through. The limiting hole 910 on the mounting base 98 is used to cooperate with the limiting post 97 on one side of the knob 912 to lock the knob 912, thereby realizing the quick disassembly and locking of the lower protective shell 91. The sealing ring 911 on the top outer edge of the lower protective shell 91 presses against the bottom surface of the locking ring 5 to fill the gap and form a bottom seal, thereby achieving full sealing protection of the plating pot 6 when it is not in use with the upper protective assembly 8, preventing dust from entering or being contaminated, and extending the equipment maintenance cycle and service life.

[0035] Working principle: When using this coating equipment with a sealed protective structure, the glass substrate 71 is first loaded. For the loading position at the edge of the coating pot 6, the corresponding bottom clamp 78 and the adjacent T-shaped clamps 712 on both sides are manually pried open. Then, the positioning hole 73 of the glass substrate 71 is aligned with the corresponding positioning post 72 on the coating pot 6, so that the area to be coated is directly opposite the coating opening 74. After being released, the bottom clamp 78 slides down along the guide rail 77 under the drive of a pair of wave springs 76 and presses the bottom of the glass substrate 71. At the same time, the T-shaped clamps 71 on both sides... 2. Driven by a pair of wave springs 710, the glass substrate 71 slides along the guide rail 711, pressing the left and right sides of the glass substrate 71 respectively. For the loading position in the center of the plating pot 6, first manually pry open the side clamps 716 on both sides, then align the positioning hole 73 of the glass substrate 71 with the corresponding positioning post 72 and place it. After releasing, the side clamps 716 on both sides descend along the guide rail 715 under the drive of a pair of wave springs 714, pressing the left and right sides of the glass substrate 71, thereby achieving adaptive elastic pressing, avoiding damage to the glass substrate 71, and ensuring accurate positioning of the coating.

[0036] After all glass substrates 71 are loaded, the upper protective assembly 8 is installed. The upper protective covers 81 are assembled sequentially. The alignment holes on the top of the upper protective cover 81 are aligned with the positioning posts 85 on the top of the plating pot 6. The bottom magnet 83 engages with the magnetic seat on the locking ring 5, and the side magnet 84 engages with the magnetic seats of adjacent upper protective covers 81. The sealing strips on the side walls of the upper protective covers 81 fill the gaps between the covers, and the bottom sealing strip fills the gap between the cover and the locking ring 5. After all this is completed, vapor deposition can begin, using the rotating arm 2 and the rotary... The rotating frame, consisting of the rotating support ring 3, the hanging part 4, and the locking ring 5, is connected to the drive shaft of the rotating drive structure at the top of the coating equipment through the positioning sleeve 1, thereby driving the glass substrate 71 to rotate and start the vapor deposition. The upper protective component 8 acts as a sacrificial shielding layer to prevent the film material splashed during the deposition process from falling off the rotating frame and the dome of the coating pot 6, causing particulate contamination. After the vapor deposition is completed, the operator can first remove the upper protective component 8, and then remove the coated glass substrate 71 from the coating pot 6.

[0037] When the equipment needs to be shut down for maintenance, target replacement, or chamber cleaning, install the bottom protective assembly 9, place the lower protective shell 91 against the bottom of the locking ring 5, and pull the knob 912 outward. The knob 912 drives the disc 94 through the round rod 96 to compress the wave spring 95. After the knob 912 and the round rod 96 pass through the elongated hole 99, rotate the knob 912 90 degrees, and then insert the limiting post 97 on the knob 912 into the limiting hole 910 on the fixing seat 98, thereby locking the lower protective shell 91. At this time, the sealing ring 911 on the lower protective shell 91 is pressed against the bottom surface of the locking ring 5. The bottom protective assembly 9 cooperates with the upper protective assembly 8 to prevent the operator from accidentally bumping or hitting the plating pot when working in the chamber. When the next coating is needed, the bottom protective assembly 9 can be quickly removed by operating in the reverse manner of the above steps.

[0038] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A coating apparatus with a sealed protective structure, comprising: Positioning sleeve (1), with several rotating arms (2) evenly spaced along the circumferential direction on the outer side of the positioning sleeve (1), a rotating support ring (3) on the outer side of the several rotating arms (2), a hanging part (4) on the bottom of each of the several rotating arms (2), a locking ring (5) on the bottom of each of the several hanging parts (4), and a plating pot (6) on the locking ring (5); The features are as follows: a positioning clamping component (7) is provided on the dome of the plating pot (6), an upper protective component (8) is detachably provided on the plating pot (6), and a bottom protective component (9) is detachably provided on the bottom of the plating pot (6). The positioning clamping assembly (7) includes an array of positioning posts (72). The array of positioning posts (72) is equidistantly distributed along the circumferential direction on the dome of the plating pot (6) and is divided into two rings, one ring being close to the edge of the plating pot (6) and the other ring being close to the center of the plating pot (6). Each set of positioning posts (72) carries a glass substrate (71). Each glass substrate (71) has several positioning holes (73) corresponding to the positioning posts (72). The plating pot (6) has a pair of plating openings (74) corresponding to the areas to be coated on each glass substrate (71).

2. The coating equipment with a sealed protection structure according to claim 1, characterized in that: Each of the edges of the plating pot (6) is provided with a mounting box (75) corresponding to the position of the glass substrate (71). A bottom clamp (78) is slidably disposed inside the mounting box (75). The bottom clamp (78) is used to press the bottom of the corresponding glass substrate (71). A pair of wave springs (76) are provided between the inner bottom surface of each mounting box (75) and the bottom clamp (78). A pair of guide rails (77) are symmetrically disposed on the inner walls of both sides of the mounting box (75). The bottom clamp (78) is slidably disposed on the guide rails (77).

3. A coating equipment with a sealed protection structure according to claim 2, characterized in that: Mounting box 2 (79) is provided between two adjacent glass substrates (71) at the edge of the plating pot (6). T-shaped clips (712) are slidably arranged in several mounting boxes 2 (79). The T-shaped clips (712) are used to press the glass substrates (71) on both sides. A pair of wave springs 2 (710) are provided between the inner bottom surface of each mounting box 2 (79) and the T-shaped clips (712). A pair of guide rails 2 (711) are symmetrically arranged on the inner walls of the front and rear sides of the mounting box 2 (79). The T-shaped clips (712) are slidably arranged on the guide rails 2 (711).

4. A coating equipment with a sealed protection structure according to claim 3, characterized in that: A pair of mounting boxes (713) are symmetrically arranged on both sides of the glass substrate (71) at the center of the plating pot (6). Each mounting box (713) has a side clamp (716) slidably arranged inside it, and the side clamps (716) on both sides are arranged opposite to each other to press the glass substrate (71) located at the center of the plating pot (6) from both sides. A pair of wave springs (714) are arranged between the inner bottom surface of each mounting box (713) and the side clamp (716). A pair of guide rails (715) are symmetrically arranged on the inner walls of the front and rear sides of the mounting box (713), and the side clamps (716) are slidably arranged on the guide rails (715).

5. A coating equipment with a sealed protection structure according to claim 1, characterized in that: The upper protective assembly (8) includes several upper protective covers (81) covering the plating pot (6), each of the upper protective covers (81) is provided with an operating handle (82), and each of the upper protective covers (81) is provided with a bottom magnet (83) for attracting the corresponding magnetic seat on the locking ring (5).

6. A coating equipment with a sealed protection structure according to claim 5, characterized in that: Each of the upper protective covers (81) is provided with a lateral magnet (84) on one side, and a magnetic seat is provided on the side of the upper protective cover (81) away from the lateral magnet (84). Several upper protective covers (81) are spliced ​​together in sequence, and the lateral magnet (84) is used to attract the magnetic seat of the adjacent upper protective cover (81). Each upper protective cover (81) is provided with a sealing strip on its side wall and bottom surface to fill the gap between adjacent upper protective covers (81) and between the upper protective cover (81) and the locking ring (5).

7. A coating equipment with a sealed protection structure according to claim 6, characterized in that: The plating pot (6) has several positioning posts (85) equidistantly arranged at the center along the circumferential direction, and each of the upper protective covers (81) has an alignment hole corresponding to the position of the positioning post (85).

8. A coating equipment with a sealed protection structure according to claim 1, characterized in that: The bottom protective assembly (9) includes a lower protective shell (91) disposed at the bottom of the locking ring (5). Several mounting seats (92) are equidistantly arranged on the inner wall of the locking ring (5) along the circumferential direction. Each mounting seat (92) has a mounting sleeve (93) on the side facing the center of the locking ring (5).

9. A coating equipment with a sealed protection structure according to claim 8, characterized in that: Each of the mounting sleeves (93) has a disc (94) slidably disposed inside. A wave spring (95) is disposed between the disc (94) and the inner side of the mounting sleeve (93) facing the center of the locking ring (5). A round rod (96) is disposed on the side of the disc (94) facing the center of the locking ring (5). The end of the round rod (96) away from the disc (94) passes through the mounting sleeve (93) and is connected to a knob (912). A pair of limit posts (97) are disposed on the side of the knob (912) facing the disc (94).

10. A coating equipment with a sealed protection structure according to claim 9, characterized in that: The inner wall of the lower protective shell (91) is provided with a fixing seat (98) at the position corresponding to the mounting sleeve (93). Each fixing seat (98) is provided with an elongated hole (99) for the round rod (96) and the knob (912) to pass through. Limiting holes (910) are provided on the fixing seats (98) on both the upper and lower sides of the elongated hole (99). The limiting holes (910) are used to cooperate with the limiting post (97) on the side of the knob (912) to lock the lower protective shell (91). A sealing ring (911) is provided on the outer edge of the top of the lower protective shell (91). The sealing ring (911) is used to fill the gap between the top of the lower protective shell (91) and the locking ring (5).

Images