Multi-stage coupled gas chamber type adaptive pneumatic vibration isolation device and control method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIHANG UNIV
- Filing Date
- 2026-02-11
- Publication Date
- 2026-06-26
Smart Images
Figure CN122280987A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of aerodynamic vibration and its control technology, and more specifically to a multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device and its control method. Background Technology
[0002] With the development of high-tech fields such as precision manufacturing, optical measurement, semiconductor processing, and biological experiments, equipment is becoming increasingly sensitive to vibration environments. Even minor ground vibrations or structural disturbances can severely affect system performance and measurement accuracy. Therefore, high-performance vibration isolation platforms have become a key supporting component to ensure the stable operation of precision equipment.
[0003] Currently, passive pneumatic vibration isolators are widely used due to their advantages such as low natural frequency, no oil pollution, and high load-bearing capacity. Traditional pneumatic vibration isolation devices typically employ a single main air chamber structure, relying on gas compression to achieve elastic support and providing limited damping through throttling orifices or damping holes. However, such devices have significant technical bottlenecks: in the low-frequency range (<5 Hz), due to the fixed stiffness, they are prone to resonance with environmental vibrations (such as ground pulsation and foot traffic), leading to a sharp decline in vibration isolation performance; while in the high-frequency range (>100 Hz), the compressibility of the gas decreases, and vibrations propagate in the form of sound waves. Traditional single-chamber structures lack effective energy dissipation mechanisms, making it difficult to achieve good high-frequency attenuation effects.
[0004] To overcome these shortcomings, existing research has attempted to adjust system stiffness by introducing active control or additional tuned mass blocks (ATMDs). However, these methods often require additional electromagnetic actuators or complex mechanical structures, leading to problems such as high power consumption, large size, and poor reliability. In addition, although some multi-chamber air chamber designs can achieve a certain degree of stiffness adjustment through connecting valves, they lack coordinated control strategies for vibration characteristics in different frequency bands, and cannot achieve full-frequency adaptive optimization.
[0005] Therefore, how to achieve active stiffness adjustment in the low-frequency band to avoid resonance peaks and enhanced distributed damping to dissipate energy in the high-frequency band of a pneumatic vibration isolation system without increasing the complexity of the mechanical structure has become a key challenge in the field of high-precision vibration isolation technology. There is an urgent need for a novel pneumatic vibration isolation device and its control method that is simple in structure, has a fast response, excellent energy efficiency, and full-frequency adaptive capability. Summary of the Invention
[0006] In view of this, the present invention provides a multi-stage coupled air chamber type adaptive pneumatic vibration isolation device and its control method, which solves the long-standing problems of low-frequency resonance amplification, high-frequency vibration isolation failure and insufficient dynamic adaptability in the field of vibration isolation for precision equipment.
[0007] To achieve the above objectives, the present invention adopts the following technical solution:
[0008] A multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device includes a three-stage coupled air chamber structure, a sensing module, an execution module, and a controller; The three-stage coupled gas chamber structure includes a main gas chamber, a tuning gas chamber, and a group of micro gas chambers. The main gas chamber is used to bear the load and provide the basic gas spring stiffness. The tuning gas chamber changes the equivalent stiffness of the system through adjustable pressure. The group of micro gas chambers generates distributed viscous damping through the flow channels between multiple micro gas chambers. The sensing module is used to collect the vibration time-domain signal of the equipment platform and the pressure data of the main air chamber, the tuning air chamber and the micro-air chamber group; The controller receives real-time data from the sensing module, analyzes the vibration spectrum characteristics through the vibration time-domain signal, and generates control decisions based on the pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group, as well as the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, it outputs a tuning air chamber pressure adjustment command; if it is high-frequency vibration, it outputs a micro-air chamber piezoelectric valve opening command. The execution module responds to commands to adjust the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection state between the micro-air chambers in the micro-air chamber group, so as to achieve dynamic matching of system stiffness and damping and complete adaptive vibration isolation.
[0009] Preferably, the execution module includes a proportional pressure valve, a piezoelectric valve array driver, and an overload protection solenoid valve. The proportional pressure valve is used to adjust the pressure of the main gas chamber and the tuning gas chamber. The piezoelectric valve array driver is used to control the connection state between the micro-gas chambers in the micro-gas chamber group. The overload protection solenoid valve is used to release gas when the main gas chamber is overpressurized.
[0010] Preferably, the sensing module includes a triaxial accelerometer and a barometric pressure sensor array. The triaxial accelerometer is used to acquire the vibration time-domain signal of the equipment platform, and the barometric pressure sensor array is used to acquire the pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group.
[0011] Preferably, the controller includes an FPGA module and an ARM module. The FPGA module is used to perform a fast Fourier transform on the vibration time-domain signal to obtain the power spectral density, and thereby identify the frequency band where the current dominant vibration frequency is located. It also calculates the current total system stiffness and equivalent natural frequency based on the pressure in the main air chamber and the tuning air chamber, and converts the updated piezoelectric valve opening into a PWM waveform signal, which is then sent to the piezoelectric valve array driver via the FPGA. The ARM module is used to execute a frequency-domain divide-and-conquer strategy to generate corresponding control decisions based on the power spectral density and equivalent natural frequency. If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, it is determined that there is a risk of low-frequency resonance. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is output to the proportional pressure valve to dynamically adjust the pressure of the tuning air chamber to change the overall stiffness of the system and make the equivalent natural frequency deviate from the resonance zone. If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, the high-frequency damping adjustment mode is entered: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the valve opening of the piezoelectric valve is updated using a feedback control law.
[0012] Preferably, the main air chamber has an operating pressure range of 0.3–0.8 MPa and a volume accounting for 60% of the total volume of the three-stage coupling air chamber; The operating pressure range of the tuning chamber is 0.1–0.5 MPa, and its volume accounts for 30% of the total volume of the three-stage coupling chamber. The working pressure range of the micro-chamber group is 0.05–0.1 MPa, and its volume accounts for 10% of the total volume of the three-stage coupling chamber.
[0013] A control method for a multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device, characterized by comprising the following steps: S1: Collect vibration time-domain signals, pressure data of the main air chamber, tuning air chamber and micro-air chamber group of the equipment platform through the sensing module; S2: The controller performs vibration spectrum analysis on the vibration time domain signal and generates control decisions based on the pressure data of the main air chamber, tuning air chamber and micro-air chamber group and the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, the tuning air chamber pressure adjustment command is output; if it is high-frequency vibration, the micro-air chamber piezoelectric valve opening command is output. S3: By executing module response commands, the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection state between the micro-air chambers in the micro-air chamber group are adjusted to achieve dynamic matching of system stiffness and damping, and complete adaptive vibration isolation.
[0014] Preferably, S2 specifically includes: S201: The vibration time-domain signal is subjected to fast Fourier transform by the FPGA module to obtain the power spectral density, and the frequency band where the current dominant vibration frequency is located is identified accordingly. S202: Calculate the total stiffness and equivalent natural frequency of the current system based on the pressure in the main air chamber and the pressure in the tuning air chamber; S203: Based on the power spectral density and equivalent natural frequency, the ARM module executes a frequency domain divide-and-conquer strategy to generate corresponding control decisions: If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, it is determined that there is a risk of low-frequency resonance. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is output to the proportional pressure valve to dynamically adjust the pressure of the tuning air chamber to change the overall stiffness of the system and make the equivalent natural frequency deviate from the resonance zone. If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, it enters the high-frequency damping adjustment mode: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the valve opening of the piezoelectric valve is updated using a feedback control law. S204: In low-frequency resonance suppression mode, the pressure required for the tuning chamber is calculated based on the target natural frequency and converted into an analog voltage signal, which is then output to the proportional pressure valve via the ARM module. In the high-frequency damping adjustment mode, the updated piezoelectric valve opening is converted into a PWM waveform signal and sent to the piezoelectric valve array driver via the FPGA module to control the connection state between the micro-chambers in the micro-chamber group.
[0015] Preferably, the formula for calculating the total stiffness of the system is:
[0016]
[0017]
[0018] in, The pressure in the main air chamber, The effective area of the main air chamber The volume of the main air chamber To adjust the pressure variable in the air chamber, To adjust the effective area of the air chamber, The volume of the main air chamber The total stiffness of the system; The formula for calculating the equivalent natural frequency is:
[0019] in, Indicates the equivalent natural frequency. m Indicates the load quality.
[0020] Preferred total damping coefficient:
[0021] in, Aerodynamic viscosity, , These are the length and diameter of the i-th flow channel, respectively. For the area of a single micro-cell, This is a function of the piezoelectric valve opening degree. N Indicates the total number of flow channels. This represents the total damping coefficient.
[0022] Preferably, the formula for calculating the valve opening degree of the piezoelectric valve is:
[0023] in, For power spectral density, , These are the low-frequency and high-frequency energy thresholds, respectively. This refers to the valve opening degree of the piezoelectric valve. This is the damping gain coefficient.
[0024] As can be seen from the above technical solution, compared with the prior art, the present invention discloses a multi-stage coupled air chamber adaptive aerodynamic vibration isolation device and its control method. The three-stage air chamber cooperative design and frequency domain divide-and-conquer strategy of the present invention have two significant advantages: 1) Improved vibration isolation performance across the entire frequency band: In the low-frequency range (0.2–5 Hz), the active stiffness adjustment of the tuned air chamber eliminates the risk of resonance and improves the vibration isolation capability in the low-frequency range. In the high-frequency range (>100 Hz), distributed damping of micro-chamber groups is used, which improves the solid-like characteristics of traditional single-chamber vibration isolation units at high frequencies.
[0025] 2) Energy efficiency and reliability optimization: No additional mechanical mechanisms are required, thus reducing power consumption; The overload protection mechanism avoids the risk of air chamber overpressure. Attached Figure Description
[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0027] Figure 1 This is a schematic diagram of the multi-stage coupled air chamber adaptive aerodynamic vibration isolation device provided by the present invention.
[0028] Figure 2 The flowchart shows the control method of the multi-stage coupled air chamber adaptive pneumatic vibration isolation device provided by the present invention.
[0029] Figure 3 The schematic diagram shows the control method of the multi-stage coupled air chamber type adaptive pneumatic vibration isolation device provided by the present invention. Detailed Implementation
[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0031] This invention discloses a multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device, such as... Figure 1 As shown, it includes a three-stage coupled air chamber structure, a sensing module, an execution module, and a controller; The three-stage coupled gas chamber structure includes a main gas chamber, a tuning gas chamber, and a group of micro gas chambers. The main gas chamber is used to bear the load and provide the basic gas spring stiffness. The tuning gas chamber changes the equivalent stiffness of the system through adjustable pressure. The group of micro gas chambers generates distributed viscous damping through the flow channels between multiple micro gas chambers. The sensing module is used to collect vibration time-domain signals of the equipment platform and pressure data of the main air chamber, tuning air chamber and micro-air chamber group; The controller receives real-time data from the sensing module, analyzes the vibration spectrum characteristics through the vibration time-domain signal, and generates control decisions based on the pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group, as well as the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, it outputs a tuning air chamber pressure adjustment command; if it is high-frequency vibration, it outputs a micro-air chamber piezoelectric valve opening command. The execution module responds to commands, adjusting the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection status between the micro-air chambers in the micro-air chamber group, to achieve dynamic matching of system stiffness and damping, and complete adaptive vibration isolation.
[0032] In this embodiment, the execution module includes a proportional pressure valve, a piezoelectric valve array driver, and an overload protection solenoid valve. The proportional pressure valve is used to regulate the pressure of the main gas chamber and the tuning gas chamber. The piezoelectric valve array driver is used to control the connection state between the micro-gas chambers in the micro-gas chamber group. The overload protection solenoid valve is used to release gas when the main gas chamber is overpressurized.
[0033] In this embodiment, the sensing module includes a triaxial accelerometer and a barometric pressure sensor array. The triaxial accelerometer is used to acquire the vibration time-domain signal of the equipment platform, and the barometric pressure sensor array is used to acquire pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group. It may also include a displacement laser rangefinder for detecting equipment tilting and settling.
[0034] The controller includes an FPGA module and an ARM module. The FPGA module performs a Fast Fourier Transform on the vibration time-domain signal to obtain the power spectral density, and identifies the frequency band of the current dominant vibration frequency. Based on the pressure in the main air chamber and the tuning air chamber, it calculates the current total system stiffness and equivalent natural frequency, and converts the updated piezoelectric valve opening into a PWM waveform signal, which is then sent to the piezoelectric valve array driver via the FPGA. The ARM module executes a frequency-domain divide-and-conquer strategy to generate corresponding control decisions based on the power spectral density and equivalent natural frequency. If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, it is determined that there is a risk of low-frequency resonance. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is output to the proportional pressure valve to dynamically adjust the pressure of the tuning air chamber to change the overall stiffness of the system and make the equivalent natural frequency deviate from the resonance zone. If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, the high-frequency damping adjustment mode is entered: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the valve opening of the piezoelectric valve is updated using a feedback control law.
[0035] This invention features a multi-level collaborative working domain: Low-frequency region (<5 Hz): The core issue in this frequency range is that environmental vibrations (such as ground pulsation and foot traffic) can easily trigger system resonance. Coordination mechanism: The first step is to close the tuning chamber valve to physically isolate the main chamber from the tuning chamber; Secondly, the air chamber is pressurized, that is, the pressure is increased. To improve the overall stiffness of the system Move away from the resonance point.
[0036] By using two-level coordination, the resonant frequency can avoid common interfering resonance points.
[0037] Mid-frequency range (5Hz~100 Hz): Traditional aerodynamic vibration isolation works well in this frequency range, so it is sufficient to avoid actively introducing noise. Coordination mechanism: The pressure in the tuning chamber is kept stable to maintain the reference state, and the vibration energy is directly attenuated by the gas spring in the main chamber.
[0038] It can be completed with just a single main air chamber, so no active intervention is needed in other stages.
[0039] High frequency region ( 100 Hz): The core issue in this frequency domain is the loss of gas compressibility; vibrations are transmitted in wave form, requiring distributed energy dissipation. Cooperative mechanism: Opening the micro-chamber valve increases the distributed damping. Dissipate energy.
[0040] This frequency domain mainly relies on the damping of the micro-chamber group to dissipate the energy of high-frequency vibrations.
[0041] More specifically, the main gas chamber operates at a pressure range of 0.3–0.8 MPa and accounts for 60% of the total volume of the three-stage coupled gas chambers; its stiffness is determined by the polytropic gas process, expressed as:
[0042] in, Main chamber pressure; The effective area of the main air chamber; The volume of the main air chamber.
[0043] The tuning chamber operates at a pressure range of 0.1–0.5 MPa and occupies 30% of the total volume of the three-stage coupling chamber. It adjusts the internal pressure to change the overall system stiffness, thereby achieving active shifting of the low-frequency resonance point. The expression for the overall system stiffness is:
[0044]
[0045] in, To adjust the pressure variable of the air chamber; To adjust the effective area of the air chamber; The volume of the main air chamber.
[0046] The micro-chamber group consists of 64 micro-chambers, with an operating pressure range of 0.05–0.1 MPa, and a volume accounting for 10% of the total volume of the three-stage coupled chambers. Viscous damping is generated in the flow channels between the micro-chambers, with a total damping coefficient of:
[0047] in, Aerodynamic viscosity; Let the length and diameter of the i-th flow channel be denoted as ; The area of a single micro-cell; This is the piezoelectric valve opening function.
[0048] Table 1. Definition of air chamber layers and functions of each layer.
[0049] In this embodiment, the multi-level coupled dynamic equation is a second-order differential equation:
[0050] The Laplace transform of the above differential equation yields the multi-chamber transfer function:
[0051] in, denoted as , where m is the external excitation force; m is the load mass; and x is the vibration signal measured by the accelerometer.
[0052] This invention discloses a control method for a multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device, such as... Figure 2 and Figure 3 As shown, it includes the following steps: S1: Collect vibration time-domain signals, pressure data of the main air chamber, tuning air chamber and micro-air chamber group of the equipment platform through the sensing module; S2: The controller performs vibration spectrum analysis on the vibration time domain signal and generates control decisions based on the pressure data of the main air chamber, tuning air chamber and micro-air chamber group and the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, the tuning air chamber pressure adjustment command is output; if it is high-frequency vibration, the micro-air chamber piezoelectric valve opening command is output. S3: By executing module response commands, the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection state between the micro-air chambers in the micro-air chamber group are adjusted to achieve dynamic matching of system stiffness and damping, and complete adaptive vibration isolation.
[0053] More specifically, S2 includes: S201: The FPGA module performs a fast Fourier transform on the vibration time-domain signal to obtain the power spectral density, and identifies the frequency band where the current dominant vibration frequency is located. S202: Calculate the total stiffness and equivalent natural frequency of the current system based on the pressure in the main air chamber and the pressure in the tuning air chamber; S203: Based on the power spectral density and equivalent natural frequency, the ARM module executes a frequency-domain divide-and-conquer strategy to generate corresponding control decisions: If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, a low-frequency resonance risk is identified. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is sent to the proportional pressure valve to dynamically adjust the tuning air chamber pressure to change the overall system stiffness, causing the equivalent natural frequency to deviate from the resonance region. The formula for calculating the overall system stiffness is:
[0054]
[0055]
[0056] in, The pressure in the main air chamber, The effective area of the main air chamber The volume of the main air chamber To adjust the pressure variable in the air chamber, To adjust the effective area of the air chamber, The volume of the main air chamber The total stiffness of the system; The formula for calculating the equivalent natural frequency is:
[0057] in, Indicates the equivalent natural frequency. m Indicates the load quality.
[0058] If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, the high-frequency damping adjustment mode is entered: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the piezoelectric valve opening is updated using a feedback control law; Total damping coefficient:
[0059] in, Aerodynamic viscosity, , These are the length and diameter of the i-th flow channel, respectively. For the area of a single micro-cell, This is a function of the piezoelectric valve opening degree. N Indicates the total number of flow channels. This is the total damping coefficient; The formula for calculating the valve opening degree of a piezoelectric valve is:
[0060] in, For power spectral density, , These are the low-frequency and high-frequency energy thresholds, respectively. This refers to the valve opening degree of the piezoelectric valve.
[0061] S204: In low-frequency resonance suppression mode, the pressure required for the tuning chamber is calculated based on the target natural frequency and converted into an analog voltage signal, which is then output to the proportional pressure valve via the ARM module. In the high-frequency damping adjustment mode, the updated piezoelectric valve opening is converted into a PWM waveform signal and sent to the piezoelectric valve array driver via the FPGA to control the connection state between the micro-chambers in the micro-chamber group.
[0062] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.
[0063] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device, characterized in that, It includes a three-stage coupled air chamber structure, a sensing module, an execution module, and a controller; The three-stage coupled gas chamber structure includes a main gas chamber, a tuning gas chamber, and a group of micro gas chambers. The main gas chamber is used to bear the load and provide the basic gas spring stiffness. The tuning gas chamber changes the equivalent stiffness of the system through adjustable pressure. The group of micro gas chambers generates distributed viscous damping through the flow channels between multiple micro gas chambers. The sensing module is used to collect the vibration time-domain signal of the equipment platform and the pressure data of the main air chamber, the tuning air chamber and the micro-air chamber group; The controller receives real-time data from the sensing module, analyzes the vibration spectrum characteristics through the vibration time-domain signal, and generates control decisions based on the pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group, as well as the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, it outputs a tuning air chamber pressure adjustment command; if it is high-frequency vibration, it outputs a micro-air chamber piezoelectric valve opening command. The execution module responds to commands to adjust the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection state between the micro-air chambers in the micro-air chamber group, so as to achieve dynamic matching of system stiffness and damping and complete adaptive vibration isolation.
2. The multi-stage coupled air chamber adaptive aerodynamic vibration isolation device according to claim 1, characterized in that, The execution module includes a proportional pressure valve, a piezoelectric valve array driver, and an overload protection solenoid valve. The proportional pressure valve is used to adjust the pressure of the main gas chamber and the tuning gas chamber. The piezoelectric valve array driver is used to control the connection state between the micro-gas chambers in the micro-gas chamber group. The overload protection solenoid valve is used to release gas when the main gas chamber is overpressurized.
3. The multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device according to claim 1, characterized in that, The sensing module includes a triaxial accelerometer and a barometric pressure sensor array. The triaxial accelerometer is used to acquire the vibration time-domain signal of the equipment platform, and the barometric pressure sensor array is used to acquire the pressure data of the main air chamber, the tuning air chamber, and the micro-air chamber group.
4. The multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device according to claim 2, characterized in that, The controller includes an FPGA module and an ARM module. The FPGA module performs a Fast Fourier Transform on the vibration time-domain signal to obtain the power spectral density, and identifies the frequency band of the current dominant vibration frequency. Based on the pressure in the main air chamber and the tuning air chamber, it calculates the current total system stiffness and equivalent natural frequency. It also converts the updated piezoelectric valve opening into a PWM waveform signal and sends it to the piezoelectric valve array driver via the FPGA. The ARM module executes a frequency-domain divide-and-conquer strategy to generate corresponding control decisions based on the power spectral density and equivalent natural frequency. If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, it is determined that there is a risk of low-frequency resonance. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is output to the proportional pressure valve to dynamically adjust the pressure of the tuning air chamber to change the overall stiffness of the system and make the equivalent natural frequency deviate from the resonance zone. If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, the high-frequency damping adjustment mode is entered: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the valve opening of the piezoelectric valve is updated using a feedback control law.
5. The multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device according to claim 1, characterized in that, The main air chamber operates at a pressure range of 0.3–0.8 MPa and its volume accounts for 60% of the total volume of the three-stage coupling air chamber. The operating pressure range of the tuning chamber is 0.1–0.5 MPa, and its volume accounts for 30% of the total volume of the three-stage coupling chamber. The working pressure range of the micro-chamber group is 0.05–0.1 MPa, and its volume accounts for 10% of the total volume of the three-stage coupling chamber.
6. A control method for a multi-stage coupled air chamber type adaptive pneumatic vibration isolation device as described in any one of claims 1 to 5, characterized in that, Includes the following steps: S1: Collect vibration time-domain signals, pressure data of the main air chamber, tuning air chamber and micro-air chamber group of the equipment platform through the sensing module; S2: The controller performs vibration spectrum analysis on the vibration time domain signal and generates control decisions based on the pressure data of the main air chamber, tuning air chamber and micro-air chamber group and the frequency domain divide-and-conquer strategy: if it is low-frequency vibration, the tuning air chamber pressure adjustment command is output; if it is high-frequency vibration, the micro-air chamber piezoelectric valve opening command is output. S3: By executing module response commands, the pressure of the main air chamber, the pressure of the tuning air chamber, or the connection state between the micro-air chambers in the micro-air chamber group are adjusted to achieve dynamic matching of system stiffness and damping, and complete adaptive vibration isolation.
7. The control method for the multi-stage coupled air chamber type adaptive pneumatic vibration isolation device according to claim 6, characterized in that, S2 specifically includes: S201: The vibration time-domain signal is subjected to fast Fourier transform by the FPGA module to obtain the power spectral density, and the frequency band where the current dominant vibration frequency is located is identified accordingly. S202: Calculate the total stiffness and equivalent natural frequency of the current system based on the pressure in the main air chamber and the pressure in the tuning air chamber; S203: Based on the power spectral density and equivalent natural frequency, the ARM module executes a frequency domain divide-and-conquer strategy to generate corresponding control decisions: If the dominant vibration frequency is below 5Hz and the equivalent natural frequency is close to the excitation frequency, it is determined that there is a risk of low-frequency resonance. The connecting valve between the main air chamber and the tuning air chamber is closed, and a pressure regulation command is output to the proportional pressure valve to dynamically adjust the pressure of the tuning air chamber to change the overall stiffness of the system and make the equivalent natural frequency deviate from the resonance zone. If the vibration frequency is in the range of 5Hz to 100Hz, no active intervention is required, and passive vibration isolation is achieved by relying on the gas spring in the main air chamber. If the dominant vibration frequency is higher than 100Hz, it enters the high-frequency damping adjustment mode: based on the pressure data and flow characteristics of the micro-chamber group, the current total damping coefficient is calculated, and the valve opening of the piezoelectric valve is updated using a feedback control law. S204: In low-frequency resonance suppression mode, the pressure required for the tuning chamber is calculated based on the target natural frequency, and then converted into an analog voltage signal and directly output to the proportional pressure valve via the ARM module. In the high-frequency damping adjustment mode, the updated piezoelectric valve opening is converted into a PWM waveform signal and sent to the piezoelectric valve array driver via the FPGA module to control the connection state between the micro-chambers in the micro-chamber group.
8. The control method for the multi-stage coupled air chamber type adaptive pneumatic vibration isolation device according to claim 7, characterized in that, The formula for calculating the total stiffness of the system is: in, The pressure in the main air chamber, The effective area of the main air chamber The volume of the main air chamber To adjust the pressure variable in the air chamber, To adjust the effective area of the air chamber, The volume of the main air chamber The total stiffness of the system; The formula for calculating the equivalent natural frequency is: in, Indicates the equivalent natural frequency. m Indicates the load quality.
9. The control method for the multi-stage coupled air chamber type adaptive pneumatic vibration isolation device according to claim 7, characterized in that, Total damping coefficient: in, Aerodynamic viscosity, , These are the length and diameter of the i-th flow channel, respectively. For the area of a single micro-cell, This is a function of the piezoelectric valve opening degree. N Indicates the total number of flow channels. This represents the total damping coefficient.
10. The control method for the multi-stage coupled air chamber type adaptive aerodynamic vibration isolation device according to claim 7, characterized in that, The formula for calculating the valve opening degree of a piezoelectric valve is: in, For power spectral density, , These are the low-frequency and high-frequency energy thresholds, respectively. This refers to the valve opening degree of the piezoelectric valve. This is the damping gain coefficient.