A method and structure for intelligent chuck adjustment

Abstract

This invention discloses a method and structure for intelligently adjusting a chuck. The chuck used in this method has one fixed position and two adjustable positions, wherein the lines connecting the fixed and adjustable positions form a triangle. The method includes: locating the relative positional relationship between the two adjustable positions and the fixed position; determining the current tilt of the chuck relative to the horizontal plane; calculating the adjustment height corresponding to each of the two adjustable positions based on the located relative positional relationship between the two adjustable positions and the fixed position, the current tilt, and the target tilt set for the chuck; and adjusting the two adjustable positions according to their respective adjustment heights to achieve the target tilt of the chuck. This method can control the chuck more accurately and intelligently, and can improve the efficiency of chuck control.

Description

Technical Field

[0001] This invention relates to a method and structure for intelligently adjusting a chuck. Background Technology

[0002] In the field of semiconductor manufacturing technology, wafers are typically fixed in place by a chuck, which then rotates the wafer. For example, the rotation of the chuck works in conjunction with a grinding stone on top of the chuck. The grinding stone smooths the surface of the wafer placed on the chuck or makes the wafer surface tilt to a certain degree. Therefore, the chuck needs to be leveled or adjusted to a certain tilt.

[0003] Currently, adjusting the chuck is mainly done manually, and requires continuous testing with equipment such as a level. The chuck is then manually adjusted based on the results, and the whole process takes a relatively long time. Summary of the Invention

[0004] In view of this, the present invention provides a method and structure for intelligent chuck adjustment, which can intelligently and accurately control the chuck and effectively improve the adjustment efficiency of the chuck.

[0005] Specifically, the present invention provides the following technical solutions: In a first aspect, the present invention provides a method for intelligently adjusting a chuck, wherein the chuck is provided with one fixed position and two adjustable positions, wherein the lines connecting the fixed position and the two adjustable positions form a triangle, and the method includes: Determine the relative positional relationship between the two adjustable sites and the fixed site; Determine the current tilt of the chuck relative to the horizontal plane; Based on the relative positional relationship between the two adjustable points and the fixed point, the current tilt, and the target tilt set for the chuck, calculate the adjustment height corresponding to the two adjustable points respectively. Adjust the two adjustable points according to the adjustment height corresponding to the two adjustable points respectively, so that the chuck reaches the target tilt angle.

[0006] Secondly, embodiments of the present invention provide a structure for an intelligent adjusting chuck, comprising: a chuck body, a fixed support mechanism, a first movable support mechanism, a second movable support mechanism, and a controller, wherein... The fixed support mechanism, the first movable support mechanism, and the second movable support mechanism are disposed on the back of the chuck body; The fixed support mechanism is fixedly connected to the chuck body; The first movable support mechanism and the second movable support mechanism are movably connected to the chuck body, wherein the line connecting the fixed point corresponding to the fixed connection and the two adjustable points corresponding to the two movable connections forms a triangle; The controller is used to execute the intelligent chuck adjustment method provided in the first aspect embodiment above.

[0007] The technical solution of the first aspect of the above invention has the following advantages or beneficial effects: The intelligent chuck adjustment method provided in this invention calculates the adjustment height corresponding to each of the two adjustable points by using the relative positional relationship between the two adjustable points and the fixed point, and the current tilt of the chuck relative to the horizontal plane. Based on this adjustment height, the two adjustable points are directly adjusted to achieve the target tilt of the chuck. The entire adjustment process only requires determining the current tilt of the chuck relative to the horizontal plane before adjustment, and does not require continuous detection of the chuck tilt during the entire adjustment process, making the chuck adjustment more efficient. Furthermore, since the entire adjustment process comprehensively considers the relative positional relationship between the two adjustable points and the fixed point, as well as the current tilt of the chuck relative to the horizontal plane, to calculate the adjustment height, the entire process can be completed intelligently without manual intervention, and the adjustment accuracy can be improved. Attached Figure Description

[0008] Figure 1 This is a cross-sectional schematic diagram of the first relative relationship between the chuck, grinding stone, and wafer provided according to an embodiment of the present invention; Figure 2 This is a cross-sectional schematic diagram of a second relative relationship between the chuck, grinding stone, and wafer according to an embodiment of the present invention; Figure 3 This is a planar schematic diagram showing the relative relationship between the chuck and the adjustable and fixed positions according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the main process of the intelligent chuck adjustment method provided in the embodiment of the present invention; Figure 5 This is a schematic diagram of the first detection position of the detection device on the chuck according to an embodiment of the present invention; Figure 6 This is a schematic diagram of a second detection position of the detection device on the chuck provided according to an embodiment of the present invention; Figure 7 This is a schematic diagram of a three-dimensional coordinate system constructed for a chuck according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the decomposition vector of the vector connecting the fixed point and the adjustable point according to an embodiment of the present invention. Figure 9This is a schematic diagram illustrating the relationship between various parameters involved in chuck adjustment according to an embodiment of the present invention; Figure 10 This is a partial structural side view of the intelligent adjustment chuck provided according to an embodiment of the present invention; Figure 11 This is a schematic cross-sectional view of a partial structure passing through two adjustable sites according to an embodiment of the present invention; Figure 12 This is a schematic cross-sectional view of a portion of the structure through a fixed point, provided according to an embodiment of the present invention.

[0009] The attached figures are labeled as follows: 10-Chuck body; 11-Fixed position; 12-First adjustable position; 13-Second adjustable position; 20-Fixed support mechanism; 30-First movable support mechanism; 31-First support rod; 32-First support ball; 33-First motor; 40-Second movable support mechanism; 41-Second support rod; 42-Second support ball; 43-Second motor; 50-Detection device; 60-Wafer; 70-Grinding stone. Detailed Implementation

[0010] One application scenario of chucks in semiconductor manufacturing technology is as follows: Figure 1 and Figure 2 As shown, specifically, wafer 60 is placed on chuck 10, and then the chuck is controlled to move along... Figure 1 and Figure 2 The direction F1 is shown, and the grinding stone 70 above the chuck 10 contacts the surface of the wafer 60. Figure 1 and Figure 2 While F2 rotates in the direction shown, it also rotates along... Figure 1 and Figure 2 The direction D1 is moved horizontally (this horizontal movement means that the height of the grinding stone 70 relative to the horizontal ground remains unchanged during the horizontal movement), so that the grinding stone 70 grinds the surface of the wafer 60 flat. Figure 1 The upper surface of the chuck 10 shown is kept horizontal, which allows the surface of the wafer 60, after being ground smooth by the grinding stone 70, to remain on a horizontal plane. Once the chuck 10 experiences such... Figure 2As shown in the diagram, the wafer 60 placed on it is also tilted. When the grinding stone 70 moves along the horizontal plane L, the pressure applied by the grinding stone 70 to the wafer 60 changes continuously due to the wafer's tilt. This pressure variation causes a slope to form on the wafer 60 surface during the grinding process, resulting in a wafer that does not meet production requirements. Therefore, to ensure that the surface of the wafer 60 is on the same horizontal plane, the chuck 10 is typically adjusted to align all positions of the wafer 60 with the same thickness on the same horizontal plane. Currently, the chuck 10 is mainly adjusted manually. During manual adjustment, the levelness of the chuck 10 needs to be continuously checked using a detection device. The entire adjustment process takes a relatively long time and has poor accuracy.

[0011] It is worth noting that the above scenario is only an example. In other application scenarios of the chuck 10, the chuck 10 can be tilted at a specific angle to meet the needs of other application scenarios. Understandably, in any application scenario, whether the chuck 10 needs to be kept horizontal or tilted, the state of the chuck 10 needs to be controlled relatively precisely. Uncontrolled arbitrary tilting of the chuck 10 obviously does not meet production requirements.

[0012] This invention provides a method and structure for intelligently adjusting the chuck 10, which can intelligently adjust the chuck 10, avoiding manual adjustment and effectively improving the accuracy and reliability of the adjustment. It should be noted that the method and structure for intelligently adjusting the chuck 10 provided in this invention are not limited to... Figure 1 and Figure 2 The scenario shown is also applicable to other scenarios involving adjusting the chuck 10.

[0013] It should be noted that the terms "first," "second," "third," "fourth," "fifth," and "sixth," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first," "second," "third," "fourth," "fifth," and "sixth," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0014] Specifically, embodiments of the present invention provide a method for intelligently adjusting a chuck. For example... Figure 3As shown, the chuck 10 targeted by this intelligent adjustment method is provided with one fixed position 11 and two adjustable positions (the first adjustable position 12 and the second adjustable position 13, respectively). The lines connecting the fixed position 11 and the two adjustable positions (the lines connecting the fixed position 11 and the first adjustable position 12, the fixed position 11 and the second adjustable position 13, and the first adjustable position 12 and the second adjustable position 13, respectively) form a triangle. Preferably, this triangle is an isosceles triangle (where the two equal legs of the isosceles triangle are the lines connecting the fixed position 11 and the first adjustable position 12, and the fixed position 11 and the second adjustable position 13, respectively). More preferably, the triangle is an equilateral triangle. By controlling the triangle formed by the lines connecting the fixed position 11 and the two adjustable positions, the chuck 10 can remain stable during adjustment. Preferably, by designing an isosceles triangle, particularly an equilateral triangle, formed by a fixed site 11 and two adjustable sites, the accuracy and reliability of the control can be effectively improved.

[0015] More specifically, such as Figure 4 As shown, the method for intelligently adjusting the chuck may include the following steps: Step S401: Locate the relative positional relationship between the two adjustable sites and the fixed site 11.

[0016] The relative positional relationship between the two adjustable sites and the fixed site 11 refers to, Figure 3 The relative positional relationship between the first adjustable point 12 and the fixed point 11, and the relative positional relationship between the second adjustable point 13 and the fixed point 11 are shown. This relative positional relationship can be represented by the coordinate positions of the two adjustable points (the first adjustable point 12 and the second adjustable point 13) and the fixed point 11, or by the distance between the two adjustable points and the fixed point 11.

[0017] Step S402: Determine the current tilt of the chuck relative to the horizontal plane.

[0018] The current tilt angle can be detected by a device or apparatus for detecting tilt angles (such as a level, gyroscope, laser device, tilt sensor, etc.), or it can be obtained by converting the detection result. The current tilt angle can be the tilt angle in any direction on the surface of the chuck 10; that is, the current tilt angle can be represented by the tilt angle in any direction on the surface of the chuck 10. Alternatively, the current tilt angle can be the tangent of the tilt angle in one or more directions, or the tilt angle converted based on the tangent value.

[0019] Additionally, in this step, the first tilt angle on the surface of the chuck 10 parallel to the line connecting the two adjustable points and the second tilt angle on the surface of the chuck 10 perpendicular to the line connecting the two adjustable points can be calculated from the detected tilt angles in any direction on the surface of the chuck 10. The current tilt of the chuck relative to the horizontal plane is then represented by the combination of the first and second tilt angles. Furthermore, in this step, the third tilt angle on the surface of the chuck 10 parallel to the line connecting the first adjustable point 12 and the fixed point 11 and the fourth tilt angle on the surface of the chuck 10 parallel to the line connecting the second adjustable point 13 and the fixed point 11 can also be estimated from the tilt angles in any direction. The current tilt of the chuck relative to the horizontal plane is then represented by the combination of the third and fourth tilt angles.

[0020] Preferably, the first and second tilt angles can be directly detected by a detection device, and the third and fourth tilt angles can also be directly detected by a detection device. By detecting the first and second tilt angles or the third and fourth tilt angles, the accuracy of the subsequently calculated adjustment height can be effectively improved. For example, as... Figure 5 and Figure 6 As shown, on the surface of the chuck 10, the detection device 50 is placed along a direction perpendicular to Line 1, the line connecting the first adjustable point 12 and the second adjustable point 13, to detect the second tilt angle. Alternatively, the detection device 50 is placed along a direction parallel to Line 1, the line connecting the first adjustable point 12 and the second adjustable point 13, to detect the first tilt angle. Furthermore, as... Figure 6 As shown, on the surface of the chuck 10, the detection device 50 is placed along the direction parallel to Line 3, the line connecting the first adjustable point 12 and the fixed point 11, to detect the third tilt angle. On the surface of the chuck 10, the detection device 50 is placed along the direction parallel to Line 2, the line connecting the second adjustable point 13 and the fixed point 11, to detect the fourth tilt angle.

[0021] Step S403: Based on the relative positional relationship between the two adjustable points and the fixed point 11, the current tilt, and the target tilt set for the chuck, calculate the adjustment height corresponding to the two adjustable points respectively.

[0022] The target tilt angle set for the chuck 10 generally refers to the tilt angle of the chuck 10 relative to the horizontal plane during use. This target tilt angle can be determined according to the usage scenario of the chuck 10. For example, for situations where it is necessary to ensure that the chuck 10 is on a horizontal plane, the target tilt angle is 0°. Generally, the target tilt angle above the horizontal plane is defined as a positive value, and the target tilt angle below the horizontal plane is defined as a negative value.

[0023] Furthermore, to facilitate calculation and height control, the adjustment height is defined as positive when the adjustable point of the height indicator moves upward, and as negative when it moves downward. For example, when both adjustable points of the chuck 10 move downward, the corresponding adjustment heights are both negative. If one adjustable point moves downward and the other moves upward, the adjustment height corresponding to the one adjustable point is negative, and the adjustment height corresponding to the other adjustable point is positive.

[0024] Step S404: Adjust the two adjustable points according to the adjustment height corresponding to the two adjustable points respectively, so that the chuck reaches the target tilt.

[0025] against Figure 4 The provided technical solution, by determining the relative positional relationship between the two adjustable points and the fixed point 11, and the current tilt of the chuck 10 relative to the horizontal plane, can calculate the adjustment height corresponding to each of the two adjustable points. Based on this adjustment height, the two adjustable points are directly adjusted to bring the chuck 10 to the target tilt. The entire adjustment process only requires determining the current tilt of the chuck 10 relative to the horizontal plane before adjustment, and does not require continuous monitoring of the tilt of the chuck 10 during the entire adjustment process, making the adjustment of the chuck 10 more efficient. Furthermore, since the entire adjustment process comprehensively considers the relative positional relationship between the two adjustable points and the fixed point 11, as well as the current tilt of the chuck relative to the horizontal plane, to calculate the adjustment height, the entire process can be completed intelligently without manual intervention, thus improving adjustment accuracy. In addition, since the adjustment height is determined throughout the adjustment process, a uniform adjustment speed can be controlled based on the adjustment height, which helps to improve adjustment stability.

[0026] In this embodiment of the invention, there are two specific implementations of step S401 described above.

[0027] Specifically, the first implementation of step S401 above mainly involves locating the coordinates of the two adjustable sites and the fixed site 11. It is worth noting that the coordinates of the two adjustable sites and the fixed site 11 generally refer to the coordinates of the centers of the two adjustable sites and the center of the fixed site 11.

[0028] Furthermore, to facilitate the use of coordinate positioning for the two adjustable points and the fixed point 11, the intelligent adjustment chuck method provided in this embodiment of the invention may further include: constructing a three-dimensional coordinate system for the chuck with the fixed point 11 as the origin, wherein the X-axis of the three-dimensional coordinate system is parallel to the line connecting the two adjustable points, the Y-axis forms a horizontal plane with the X-axis (i.e., when the chuck 10 is on the horizontal plane, the Y-axis passes through the fixed point 11 and the line connecting the two adjustable points), and the Z-axis is perpendicular to the horizontal plane, as shown in the figure. Figure 7As shown. Based on this, the first specific implementation of step S401 above may include: in the three-dimensional coordinate system XYZ, locating two adjustable points (first adjustable point 12 and second adjustable point 13) corresponding to the first coordinate value of the X-axis respectively. x 1 and x 2, and the two adjustable points (the first adjustable point 12 and the second adjustable point 13) respectively correspond to the second coordinate values ​​of the Y-axis. y 1 and y 2.

[0029] There are two ways to obtain the first and second coordinate values.

[0030] Specifically, in the first method of obtaining the first and second coordinate values, when the tilt of the chuck 10 is relatively small (e.g., less than a preset threshold), the two adjustable points (first adjustable point 12 and second adjustable point 13) respectively correspond to the first coordinate values ​​of the X-axis. x 1 and x 2, and the two adjustable points (the first adjustable point 12 and the second adjustable point 13) respectively correspond to the second coordinate values ​​of the Y-axis. y 1 and y 2. With the chuck 10 in a horizontal position, the two adjustable points calibrated by the device correspond to the horizontal coordinate of the X-axis and the vertical coordinate of the Y-axis, respectively. These are used as the first coordinate values ​​of the two adjustable points corresponding to the X-axis and the second coordinate values ​​of the two adjustable points corresponding to the Y-axis.

[0031] Alternatively, a second method for obtaining the first and second coordinate values ​​can be used to calculate the first coordinate value based on the position coordinates of the two adjustable points when the chuck 10 is on a horizontal plane and the tilt angle of the chuck 10. x 1 and x 2 and the second coordinate value y 1 and y 2. Specifically, the first coordinate value can be calculated using the following set of calculation formulas (1) and (2). x 1 and x 2 and the second coordinate value y 1 and y 2.

[0032] (1) (2) in, This indicates that the first adjustable point 12 of the chuck 10 at the current tilt angle corresponds to the first coordinate value of the X-axis; This indicates that the second adjustable point 13 of the chuck 10 corresponds to the first coordinate value of the X-axis at the current tilt angle; This indicates the tilt angle of the detected chuck 10 in the direction of the line connecting the first adjustable point 12 and the fixed point 11; This indicates the current tilt angle of the detected chuck 10 in the direction of the line connecting the second adjustable point 13 and the fixed point 11; This indicates that the first adjustable point 12, calibrated when the chuck 10 is in a horizontal plane, corresponds to the reference abscissa of the X-axis; This indicates that the second adjustable point 13, calibrated when the chuck 10 is in a horizontal plane, corresponds to the reference horizontal coordinate of the X-axis; This indicates that the first adjustable point 12 of the chuck 10 at the current tilt angle corresponds to the second coordinate value of the Y-axis; This indicates that the second adjustable point 13 of the chuck 10 corresponds to the second coordinate value of the Y-axis at the current tilt angle; This indicates that the first adjustable point 12, calibrated when the chuck 10 is in a horizontal plane, corresponds to the reference ordinate of the Y-axis. This indicates that the second adjustable point 13, calibrated when the chuck 10 is in a horizontal plane, corresponds to the reference ordinate of the Y-axis. Wherein, with Figure 7 Taking the three-dimensional coordinate system shown as an example, the tilt angle of the chuck 10 in the direction of the line connecting the first adjustable point 12 and the fixed point 11 is essentially the angle between the line connecting the first adjustable point 12 and the fixed point 11 and the plane containing XOY. The tilt angle of the chuck 10 in the direction of the line connecting the second adjustable point 13 and the fixed point 11 is essentially the angle between the line connecting the first adjustable point 12 and the fixed point 11 and the plane containing XOY.

[0033] The principle underlying the above calculation formulas (1) and (2) is as follows: Within the adjustment range set by the chuck 10, regardless of how the tilt of the chuck 10 changes, the projection of the first adjustable point 12 on the plane is always on the same line segment (this line segment is the line connecting the first adjustable point 12 and the fixed point 11 when the chuck 10 is placed horizontally). Regardless of how the tilt of the chuck 10 changes, the distance between the projection of the first adjustable point 12 on the plane and the fixed point 11 is... Furthermore, when the right triangle formed by the projection of the first adjustable point 12 onto the plane, the fixed point 11, and the perpendicular line from the projection of the first adjustable point 12 onto the plane to the X-axis is similar to the right triangle formed by the chuck 10 on the horizontal plane, the first adjustable point 12, the fixed point 11, and the perpendicular line from the first adjustable point 12 to the X-axis can be used to derive the following equation based on the proportionality of corresponding sides of similar triangles: Similarly, the second adjustable point 13 can also be obtained from the equation. Based on these two equations, the above calculation formula set (1) and (2) can be obtained, where, This indicates the distance between the first adjustable point 12 and the fixed point 11; This indicates the distance between the second adjustable site 13 and the fixed site 11.

[0034] The above process can accurately locate the precise position of each adjustable point.

[0035] Furthermore, a second specific implementation of step S401 above may include: determining the distances between the two adjustable sites and the fixed site 11. For example, as shown... Figure 9 As shown, the distance between the first adjustable point 12 and the fixed point 11 is... The distance between the second adjustable site 13 and the fixed site 11 is Understandably, regardless of how the chuck 10 is tilted, the distance between the first adjustable point 12 and the fixed point 11, as well as the distance between the second adjustable point 13 and the fixed point 11, remains unchanged. Therefore, the distance between the first adjustable point 12 and the fixed point 11, as well as the distance between the second adjustable point 13 and the fixed point 11, can be calibrated during the production process of the chuck 10 and can be provided to the user of the chuck 10 as parameters of the chuck 10.

[0036] There are two possible implementation schemes for step S402.

[0037] Specifically, based on the first specific implementation scheme of step S401 above, the first specific implementation scheme of step S402 may include: determining the first tilt angle of the chuck 10 relative to the horizontal plane in the first direction and the second tilt angle of the chuck 10 relative to the horizontal plane in the second direction, wherein the first direction is parallel to the line connecting the two adjustable points (i.e., parallel to...). Figure 7 The direction of the X-axis (as shown) is the second direction, which is perpendicular to the line connecting the two adjustable points (i.e., parallel to). Figure 7 (The direction of the Y-axis is shown).

[0038] Furthermore, based on the second specific implementation scheme of step S401 described above, the second specific implementation scheme of step S402 may include: determining a third tilt angle relative to the horizontal plane of the line connecting an adjustable point (e.g., the first adjustable point 12) and the fixed point 11, and a fourth tilt angle relative to the horizontal plane of the line connecting another adjustable point (e.g., the second adjustable point 13) and the fixed point 11. For example, as... Figure 9 As shown, the third tilt angle is the angle between the line connecting the first adjustable point 12 and the fixed point 11 and the horizontal plane. The fourth tilt angle is the angle between the line connecting the second adjustable point 13 and the fixed point 11 and the horizontal plane. .

[0039] Furthermore, based on any specific implementation scheme of step S401 and any specific implementation scheme of step S402, the first specific implementation scheme of step S403 may include: using the following set of calculation formulas (3) to calculate the adjustment height corresponding to the two adjustable points respectively; (3) in, This corresponds to the first coordinate value. x 1 and second coordinate values y The adjustment height corresponding to the first adjustable point 12 of 1; This corresponds to the second coordinate value. x 2 and second coordinate values y The adjustment height corresponding to the second adjustable point 13 of 2; This indicates that the target tilt is in the first direction (i.e., parallel to). Figure 7 The tangent of the first target tilt angle (shown in the X-axis direction); This represents the tangent of the second target tilt angle in the second direction; This represents the tangent of the first tilt angle; This represents the tangent value of the second tilt angle; This indicates that the first adjustable point 12 of the chuck on the target plane corresponding to the target tilt corresponds to the third coordinate value of the X-axis; This indicates that the second adjustable point 13 of the chuck on the target plane corresponding to the target tilt corresponds to the third coordinate value of the X-axis; This indicates that the first adjustable point 12 of the chuck on the target plane corresponding to the target tilt corresponds to the fourth coordinate value of the Y-axis; This indicates that the second adjustable point 13 of the chuck on the target plane corresponding to the target tilt corresponds to the fourth coordinate value of the Y-axis.

[0040] The target tilt angle in the first direction is essentially the angle between the line connecting the projection point of the first adjustable point 12 on the XOZ plane and the origin, and the X-axis. The target tilt angle in the second direction is the angle between the line connecting the projection point of the first adjustable point 12 on the YOZ plane and the origin, and the Y-axis. The first tilt angle is essentially the angle between the chuck 10 and the first direction (i.e., the first tilt angle is the angle between the projection point of the first adjustable point 12 on the YOZ plane and the origin, and the Y-axis.) Figure 7 The tilt angle of the chuck 10 relative to the second direction (i.e., the X-axis direction shown). The second tilt angle is essentially the tilt angle of the chuck 10 relative to the second direction (i.e., the X-axis direction shown). Figure 7 The tilt angle (shown in the Y-axis direction).

[0041] Specifically, based on the first specific implementation scheme of step S401 above, , , , That is, the two adjustable points calibrated by the device correspond to the horizontal coordinate of the X-axis and the vertical coordinate of the Y-axis, respectively. It can be transformed into: ; It can be transformed into: .

[0042] Understandably, based on the second specific implementation scheme of step S401 above, , , and It can also be calculated based on the above calculation formulas (1) and (2). Specifically, it can be calculated using the target tilt and the reference abscissa of the first adjustable point 12 corresponding to the X-axis. The target tilt and the reference ordinate of the first adjustable point 12 corresponding to the Y-axis are calculated to obtain... The target tilt and the reference abscissa of the calibrated second adjustable point 13 corresponding to the X-axis are calculated to obtain The target tilt and the reference ordinate of the second adjustable point 13 corresponding to the Y-axis are calculated to obtain... .

[0043] Specifically, the implementation principle of the first specific implementation scheme for step S403 is as follows: For example, based on the above calculation formulas (1) and (2), the first coordinate of the first adjustable point 12 corresponding to the X-axis can be obtained. The first coordinate corresponding to the X-axis of the second adjustable point 13 The second coordinate corresponding to the Y-axis of the first adjustable point 12 The second adjustable point 13 corresponds to the second coordinate of the Y-axis. Based on this, the equation M1 of the first projection line of the line connecting the fixed point 11 and the first adjustable point 12 on the plane formed by the X-axis and Z-axis can be obtained: The equation M2 of the second projection line of the line connecting the fixed point 11 and the second adjustable point 13 onto the plane formed by the Y-axis and Z-axis is as follows: .in, This represents the tangent of the tilt angle of the chuck 10 in the X-axis direction detected by the level instrument in a direction parallel to the X-axis. This represents the tangent of the tilt angle of the chuck 10 in the Y-axis direction, detected by the level in the direction perpendicular to the X-axis. The plane formed by the first and second projection lines is the plane where the chuck 10 is currently located. Therefore, for a vector of the linear equation M1... (1,0, ) and a vector of the equation of line M2 (0,1, The normal vector of the plane where the chuck 10 is currently located is calculated based on the following formula (4). : × - (4) Therefore, the plane equation of the plane containing chuck 10 is obtained as follows:

[0044] Based on the plane equation of the plane where the chuck 10 is located, the coordinates of the first adjustable point 12 in the XYZ coordinate system are obtained. , , ); the coordinates of the second adjustable point 13 in the XYZ coordinate system ( , , Thus, the control height of the first adjustable site 12 relative to the horizontal plane is -( The second adjustable site 13 has a regulatory height relative to the horizontal plane of -( ).

[0045] That is: based on the height of regulation - ( ) Regulation of the first tunable site 12 and based on the regulation height-( Adjusting the second adjustable point 13 can adjust the chuck 10 to the horizontal plane.

[0046] Furthermore, with Figure 8 For example, OP represents the target tilt angle that chuck 10 wants to adjust from the horizontal plane to, and the vector... Decompose into vectors in the plane formed by the Y-axis and Z-axis. (0, 1, ), vectors in the plane formed by the X-axis and Z-axis (1, 0, ),in, The tangent of the tilt angle of the target in the direction parallel to the Y-axis; This represents the tangent of the target tilt angle in the direction parallel to the X-axis. Therefore, this and It can be calculated based on the tilt angle of the target tilt in the direction parallel to the Y-axis and the tilt angle of the target tilt in the direction parallel to the X-axis.

[0047] That is, we get: after passing through the vector The equation of the line to which the line belongs is M3: After passing through vector The equation of the line to which the line belongs is M4: Based on this, a vector is obtained for the equation of the line M3. (0,1, ) and a vector for the equation of line M4 (1,0, Based on the following formula (5), the normal vector of the target plane corresponding to the target tilt angle of the chuck 10 is calculated. (- , - ,1): × - (5) Therefore, the plane equation corresponding to the target tilt angle is obtained as follows: That is, after the chuck 10 is adjusted to the target plane, the coordinates of the first adjustable point 12 in the XYZ coordinate system can be obtained. , , ); the coordinates of the second adjustable point 13 in the XYZ coordinate system ( , , Thus, the chuck 10 is adjusted to the target plane, and the adjustment height of the first adjustable point 12 relative to the horizontal plane is ( ). The second adjustable site 13 has a regulatory height relative to the horizontal plane of ( ), Understandably, the , , as well as It can also be calculated using the above calculation formulas (1) and (2).

[0048] That is: based on the height of regulation ( ) regulates the first tunable site 12 and based on the regulatory height ( By adjusting the second adjustable point 13, the chuck 10 can be adjusted from the horizontal plane to the target plane.

[0049] Based on the above process, it can be seen that adjusting the chuck 10 from its current tilt to the target tilt can be divided into two processes, with the adjustment height of the first adjustable point 12 relative to the horizontal plane being -( The regulatory height of the second adjustable site 13 relative to the horizontal plane is -( First, the chuck 10 can be adjusted from its current tilt to a horizontal plane. Then, the adjustment height of the first adjustable point 12 relative to the horizontal plane is ( The second adjustable site 13 has a regulatory height relative to the horizontal plane of ( ), Adjust the chuck 10 from the horizontal plane to the target tilt angle. When the target tilt angle is 0 (i.e., the chuck 10 is essentially adjusted to the horizontal plane), , =0.

[0050] In addition, the two control processes mentioned above can be combined into one control process given by the calculation formula group (3): that is, based on the calculation results obtained by the calculation formula group (3), the chuck 10 is directly adjusted from the current tilt to the target tilt.

[0051] By adjusting the height as described above, the chuck 10 can be directly adjusted from the current tilt to the target tilt. The entire adjustment process is simple and easy to operate.

[0052] Furthermore, based on the second specific implementation scheme of step S401 and the second specific implementation scheme of step S402, the second specific implementation scheme of step S403 may include: using the following set of calculation formulas (6) to calculate the adjustment height corresponding to the two adjustable points respectively; (6) in, This indicates the third target tilt angle in the direction of the line connecting the first adjustable point 12 and the fixed point 11; The fourth target tilt angle represents the target tilt angle along the line connecting the first adjustable point 12 and the fixed point 11. This indicates the fifth target tilt angle in the direction of the line connecting the second adjustable point 13 and the fixed point 11; The sixth target tilt angle represents the target tilt angle along the line connecting the second adjustable point 13 and the fixed point 11. This indicates the first distance between the first adjustable point 12 and the fixed point 11; This indicates the second spacing between the second adjustable site 13 and the fixed site 11; This indicates the adjustment height corresponding to the first adjustable point 12; This indicates the adjustment height corresponding to the second adjustable point 13. Understandably, if the adjustment height obtained based on the calculation formula group (6) is negative, it means that the height of the chuck 10 needs to be lowered, and the adjustable point of the chuck 10 needs to be adjusted towards the horizontal plane. If the adjustment height obtained based on the calculation formula group (6) is positive, it means that the height of the chuck 10 needs to be raised, and the adjustable point of the chuck 10 needs to be adjusted away from the horizontal plane.

[0053] It is worth noting that the tilt angles involved in the embodiments of the present invention are all tilt angles relative to the horizontal plane.

[0054] For example, such as Figure 9As shown, the distance between the first adjustable point 12 and the fixed point 11 is... The distance between the second adjustable site 13 and the fixed site 11 is ; In essence, it is the angle between the line connecting the first adjustable point 12 and the fixed point 11 of the chuck 10 at the current tilt angle and the horizontal plane. In essence, it is the angle between the line connecting the first adjustable point 12 and the fixed point 11 when the chuck 10 is on the target plane and the horizontal plane. In essence, it is the angle between the line connecting the second adjustable point 12 and the fixed point 11 of the chuck 10 at the current tilt angle and the horizontal plane. Essentially, it is the angle between the line connecting the second adjustable point 13 and the fixed point 11 when the chuck 10 is on the target plane and the horizontal plane.

[0055] It is worth noting that the included angle above the horizontal plane is a positive value, and the included angle below the horizontal plane is a negative value. Furthermore, regarding the technical solutions provided in any of the above embodiments, the measurement direction of the tilt (such as parallel to the line connecting the first adjustable point 12 and the fixed point 11, parallel to the line connecting the second adjustable point 12 and the fixed point 11, parallel to the line connecting the two adjustable points, and perpendicular to the line connecting the two adjustable points, etc.) can be pre-marked on the surface of the chuck 10. During the measurement process using the detection device, the tilt is measured based on the marked measurement direction, thereby improving the accuracy of the results.

[0056] Furthermore, based on the technical solutions provided in any of the above embodiments, the above-described intelligent chuck adjustment method may further include: constructing a mapping relationship between motor pulses and height. Accordingly, a specific implementation of step S404 may include: determining the target pulses corresponding to the adjustment heights of the two adjustable positions according to the mapping relationship; driving the motors that respectively regulate the two adjustable positions, and adjusting the adjustable positions corresponding to the corresponding target pulses.

[0057] Specifically, a concrete implementation scheme for constructing the mapping relationship between motor pulses and height may include: determining the pulse I required for one rotation of the motor and the lead ratio W of the support rod corresponding to the adjustable position (lead W is the height the chuck 10 rises with one rotation of the support rod), thus constructing the mapping relationship: ,in, Indicates the number of pulses; Indicates the adjustment height corresponding to the adjustable point; This indicates the number of pulses required for the motor to rotate one revolution. This indicates the guide. For example, the adjustment height for the first adjustable point 12. The corresponding number of pulses is R1= Adjustment height for the second adjustable point 13 The corresponding number of pulses is R2= Thus, the motor corresponding to the first adjustable position 12 can be controlled according to the number of pulses R1 corresponding to the first adjustable position 12, and the motor corresponding to the second adjustable position 13 can be controlled according to the number of pulses R2 corresponding to the second adjustable position 13.

[0058] In addition, the above mapping relationship can also be a preset mapping table containing multiple pulses, multiple pulse counts, and multiple adjustment heights.

[0059] It should be noted that the first technical solution formed by the combination of the first specific implementation scheme of step S401, the first specific implementation scheme of step S402, the first specific implementation scheme of step S403, and step S404, and the second technical solution formed by the combination of the second specific implementation scheme of step S401, the second specific implementation scheme of step S402, the second specific implementation scheme of step S403, and step S404, can all be implemented by a program mounted on a computer-readable medium or a smart hardware device (such as a controller, computer, etc.). The first and second technical solutions can be independently packaged in different computer-readable media or smart hardware devices, or they can be simultaneously packaged in the same computer-readable medium or smart hardware device, allowing users to choose one to adjust the chuck 10, increasing the flexibility of chuck 10 adjustment and improving the user experience. Furthermore, users can also choose to use the two technical solutions in combination, for example, initially choosing the second technical solution and subsequently using the first technical solution when the required tilt angle is small.

[0060] Furthermore, embodiments of the present invention also provide a structure for an intelligent adjusting chuck. Wherein, Figure 10 A partial structural side view showing the structure of the intelligent adjustment chuck; Figure 11 A schematic diagram of a partial structural cross-section passing through two adjustable sites is shown. Figure 12 A schematic cross-sectional view of a portion of the structure passing through fixed point 11 is shown.

[0061] Specifically, such as Figures 10 to 12As shown, the structure of the intelligent adjusting chuck may include: a chuck body 10, a fixed support mechanism 20, a first movable support mechanism 30, a second movable support mechanism 40, and a controller (not shown in the figure). The fixed support mechanism 20, the first movable support mechanism 30, and the second movable support mechanism 40 are disposed on the back of the chuck body 10. The fixed support mechanism 20 is fixedly connected to the chuck body 10. The first movable support mechanism 30 and the second movable support mechanism 40 are movably connected to the chuck body 10. The fixed point 11 corresponding to the fixed connection and the line connecting the two adjustable points corresponding to the two movably connected points form a triangle. The controller is used to execute the intelligent adjusting chuck method provided in any of the above embodiments.

[0062] The fixed point 11 corresponding to the fixed connection can refer to the center point of the contact area between the fixed support mechanism 20 and the back of the chuck 10, or it can refer to the sphere embedded in the back of the chuck 10 in the fixed support mechanism 20. Figure 12 The center of the ball (shown). The two adjustable points corresponding to the two movable connections can refer to the center point of the contact area between the first movable support mechanism 30 and the back of the chuck 10, and the center point of the contact area between the second movable support mechanism 40 and the back of the chuck 10. In addition, the two adjustable points corresponding to the two movable connections can also refer to the center of the first support ball 32 (shown in the diagram) embedded in the back of the chuck 10 in the first movable support mechanism 30. Figure 11 The center of the ball (shown) and the second support ball 42 (shown) embedded in the back of the chuck 10 in the first movable support mechanism 40. Figure 11 (shown) the center of the ball.

[0063] The structure of the aforementioned intelligent adjustment chuck 10, through the cooperation of the fixed support mechanism 20, the first movable support mechanism 30 and the second movable support mechanism 40, can stably support and stabilize the chuck 10, and also ensure the stability of the chuck 10 during the adjustment process, preventing the chuck 10 from shaking, thereby reducing the equipment error of the chuck 10 adjustment.

[0064] Furthermore, by executing the intelligent chuck adjustment method provided in any of the above embodiments through the controller, the first movable support mechanism 30 and the second movable support mechanism 40 are controlled to achieve the purpose of adjusting the chuck 10. The entire process reduces manual intervention and realizes intelligent adjustment. Since the adjustment height can be directly determined and precisely controlled, the above structure can effectively improve the adjustment efficiency of the chuck 10.

[0065] Preferably, the lines connecting the fixed point 11 corresponding to the fixed connection and the two adjustable points corresponding to the two movable connections form an isosceles triangle; more preferably, the lines connecting the fixed point 11 corresponding to the fixed connection and the two adjustable points corresponding to the two movable connections form an equilateral triangle. This allows the fixed support mechanism 20, the first movable support mechanism 30, and the second movable support mechanism 40 to cooperate, better supporting and stabilizing the chuck 10, and further reducing the equipment error in adjusting the chuck 10.

[0066] Furthermore, such as Figure 11 As shown, the first movable support mechanism 30 may include: a first support rod 31, a first support ball 32 disposed at one end of the first support rod 31, and a first motor 33 connected to the first support rod 31, wherein the first support ball 32 is embedded in the back of the chuck body 10 and is movably connected to the chuck body 10; the second movable support mechanism 40 may include: a second support rod 41, a second support ball 42 disposed at one end of the second support rod 41, and a second motor 43 connected to the second support rod 41, wherein the second support ball 42 is embedded in the back of the chuck body 10 and is movably connected to the chuck body 10; the first motor 33 and the second motor 43 are respectively driven by a controller (not shown in the figure).

[0067] Understandably, the first support rod 31 and the second support rod 41 can be telescopic rods with adjustable lengths. Driven by the rotation of the first motor 33, the telescopic rod of the first support rod 31 extends or retracts; driven by the rotation of the second motor 43, the telescopic rod of the second support rod 41 extends or retracts. Furthermore, based on the extension or retraction of the telescopic rod of the first support rod 31 controlled by the first motor 33, the first support rod 31 is slidably connected to the first motor 33, allowing the first support rod 31 to move relative to the first motor 33 in the horizontal plane. That is, the first motor 33 can also control the first support rod 31 in the horizontal direction (i.e., parallel to the horizontal plane). Figure 7 The second support rod 41 moves relative to the first motor 33 on the XOY plane. Based on the extension or retraction of the telescopic rod of the second support rod 41 controlled by the second motor 43, the second support rod 41 is slidably connected to the second motor 43, allowing the second support rod 41 to move relative to the second motor 43 in the horizontal plane. That is, the second motor 43 can also control the second support rod 41 to move in the horizontal direction (i.e., parallel to the XOY plane). Figure 7The first support rod 31 moves relative to the second motor 43 on its XOY plane. The connection structure between the motor and the telescopic rod is a common mechanical structure and will not be described in detail here. The extension or retraction of the first support rod 31 causes the first support ball 32 at its top to move up and down, while the extension or retraction of the second support rod 41 causes the second support ball 42 at its top to move up and down, thereby moving the chuck 10 up and down to achieve the purpose of adjusting the chuck 10. Furthermore, by moving the first support rod 31 horizontally relative to the first motor 33 and the second support rod 41 horizontally relative to the second motor 43, the chuck 10 can be adjusted within a relatively large range.

[0068] In addition, by embedding the first support ball 32 and the second support ball 42 into the back of the chuck 10, the first support ball 32 and the second support ball 42 can move automatically in the groove on the back of the chuck 10 during the adjustment process, thereby preventing the chuck 10 from getting stuck due to changes in tilt.

[0069] In addition, ball sleeves can be fitted onto the first support ball 32 and the second support ball 42. By configuring ball sleeves, the friction between the first support ball 32 and the second support ball 42 and the chuck 10 can be further reduced, making the adjustment process smoother.

[0070] Furthermore, the structure of the aforementioned intelligent adjustment chuck may also include: a detection device (not shown in the figure), which is used to detect the current tilt of the chuck relative to the horizontal plane and provide the current tilt to the controller.

[0071] In addition, the aforementioned detection device can also exist independently of the intelligent adjustment chuck structure. For example, if the detection device is a level independent of the intelligent adjustment chuck structure, the level can detect the current tilt of the chuck 10, and then the current tilt can be manually input into the controller. Alternatively, through a communication connection established between the level and the controller, the level can directly send the detection result to the controller.

[0072] It's worth noting that the current tilt detected by the level can be the tilt angle in one direction (such as the direction parallel to the line connecting the two adjustable points, or perpendicular to the line connecting the two adjustable points), or it can be the tangent of the tilt angle in one direction. For example, each graduation on the level corresponds to 0.02 mm / m, which means that the tangent of the angle between the long side of the level and the horizontal plane is 2 × 10⁻⁶. -5 .

[0073] The above steps are provided only to help understand the method, structure, and core ideas of this invention. Those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the scope of protection of the claims.

Claims

1. A method for intelligently adjusting a chuck, characterized in that, The method targets a chuck with one fixed position and two adjustable positions, wherein the lines connecting the fixed position and the two adjustable positions form a triangle, and the method includes: Determine the relative positional relationship between the two adjustable sites and the fixed site; Determine the current tilt of the chuck relative to the horizontal plane; Based on the relative positional relationship between the two adjustable points and the fixed point, the current tilt, and the target tilt set for the chuck, calculate the adjustment height corresponding to the two adjustable points respectively. Adjust the two adjustable points according to the adjustment height corresponding to the two adjustable points respectively, so that the chuck reaches the target tilt angle.

2. The method of intelligently adjusting a chuck as claimed in claim 1, wherein, Determining the current tilt of the chuck relative to the horizontal plane includes: Determine a first tilt angle of the chuck relative to the horizontal plane in a first direction and a second tilt angle of the chuck relative to the horizontal plane in a second direction, wherein the first direction is parallel to the line connecting the two adjustable points and the second direction is perpendicular to the line connecting the two adjustable points.

3. The method of intelligently adjusting a chuck as claimed in claim 1, wherein, Determining the current tilt of the chuck relative to the horizontal plane includes: Determine a third tilt angle relative to the horizontal plane for the line connecting one of the adjustable points and the fixed point, and a fourth tilt angle relative to the horizontal plane for the line connecting the other adjustable point and the fixed point.

4. The method of intelligently adjusting a chuck as claimed in claim 2, wherein, Also includes: Using the fixed position as the origin, a three-dimensional coordinate system is constructed for the chuck, wherein the X-axis of the three-dimensional coordinate system is parallel to the line connecting the two adjustable positions, the Y-axis forms a horizontal plane with the X-axis, and the Z-axis is perpendicular to the horizontal plane; Locating the relative positional relationship between the two adjustable points and the fixed point includes: in the three-dimensional coordinate system, locating the first coordinate values ​​of the two adjustable points corresponding to the X-axis. x 1 and x 2, and the two adjustable points respectively correspond to the second coordinate values ​​of the Y-axis. y 1 and y 2.

5. The method for intelligently adjusting the chuck according to claim 3, characterized in that, The positioning of the relative positional relationship between the two adjustable sites and the fixed site includes: Determine the distances between the two adjustable sites and the fixed site.

6. The method of intelligently adjusting a chuck as claimed in claim 4, wherein, The calculation of the adjustment height corresponding to the two adjustable points includes: Using the following first set of calculation formulas, calculate the adjustment height corresponding to each of the two adjustable points; First set of calculation formulas: in, The tangent of the first target tilt angle in the first direction represents the target tilt angle. The tangent of the second target tilt angle in the second direction represents the target tilt angle. This represents the tangent value of the first tilt angle; This represents the tangent value of the second tilt angle; This corresponds to the first coordinate value. x 1 and second coordinate values y The adjustment height corresponding to the first adjustable point of 1; This corresponds to the second coordinate value. x 2 and second coordinate values y The adjustment height corresponding to the second adjustable point of 2; This indicates that the first adjustable point of the chuck on the target plane corresponding to the target tilt corresponds to the third coordinate value of the X-axis; This indicates that the third coordinate value of the X-axis corresponds to the second adjustable point of the chuck on the target plane corresponding to the target tilt. This indicates that the first adjustable point of the chuck on the target plane corresponding to the target tilt corresponds to the fourth coordinate value of the Y-axis; This indicates that the second adjustable point of the chuck on the target plane corresponding to the target tilt corresponds to the fourth coordinate value of the Y-axis.

7. The method for intelligently adjusting the chuck according to claim 5, characterized in that, The calculation of the adjustment height corresponding to the two adjustable points includes: Using the second set of calculation formulas below, calculate the adjustment height corresponding to each of the two adjustable points; Second set of calculation formulas: in, The current tilt angle represents the third target tilt angle along the line connecting the first adjustable point and the fixed point. The fourth target tilt angle represents the target tilt angle along the line connecting the first adjustable point and the fixed point. This represents the fifth target tilt angle in the direction of the line connecting the second adjustable point and the fixed point; The sixth target tilt angle represents the target tilt angle along the line connecting the second adjustable point and the fixed point. This represents the first distance between the first adjustable site and the fixed site; This indicates the second distance between the second adjustable site and the fixed site; This indicates the adjustment height corresponding to the first adjustable point; This indicates the adjustment height corresponding to the second adjustable point.

8. The method for intelligently adjusting the chuck according to any one of claims 1 to 7, characterized in that, The method further includes: constructing a mapping relationship between motor pulses and height; The adjustment of the two adjustable sites includes: Based on the mapping relationship, the target pulses corresponding to the adjustment heights of the two adjustable positions are determined respectively; The motors that drive the two adjustable positions respectively adjust the adjustable positions according to the corresponding target pulse adjusters; Preferably, the mapping relationship between the pulses of the motor and the height includes: The number of pulses required for one revolution of the motor and the lead ratio of the support rod corresponding to the adjustable position are determined. Based on the number of pulses required for one revolution of the motor and the lead ratio, a calculation relationship between the number of pulses and the adjustable height is constructed.

9. A structure of an intelligent adjustment chuck, characterized by, include: The chuck body (10), fixed support mechanism (20), first movable support mechanism (30), second movable support mechanism (40), and controller, wherein, The fixed support mechanism (20), the first movable support mechanism (30) and the second movable support mechanism (40) are disposed on the back of the chuck body (10); The fixed support mechanism (20) is fixedly connected to the chuck body (10); The first movable support mechanism (30) and the second movable support mechanism (40) are movably connected to the chuck body (10), wherein the fixed point (11) corresponding to the fixed connection and the line connecting the two adjustable points corresponding to the two movable connections form a triangle; The controller is used to perform the intelligent chuck adjustment method according to any one of claims 1 to 8.

10. The structure of the intelligent adjusting chuck according to claim 9, characterized in that, The first movable support mechanism (30) includes: a first support rod (31), a first support ball (32) disposed at one end of the first support rod (31), and a first motor (33) connected to the first support rod (31), wherein, The first support ball (32) is embedded in the back of the chuck body (10) and is movably connected to the chuck body (10); The second movable support mechanism (40) includes: a second support rod (41), a second support ball (42) disposed at one end of the second support rod (41), and a second motor (43) connected to the second support rod (41), wherein, The second support ball (42) is embedded in the back of the chuck body (10) and is movably connected to the chuck body (10); The first motor (33) and the second motor (43) are respectively driven by the controller; Optionally, the first support rod (31) is slidably connected to the first motor (33), so that the first support rod (31) moves relative to the first motor (33) in the horizontal plane; the second support rod (41) is slidably connected to the second motor (43), so that the second support rod (41) moves relative to the second motor (43) in the horizontal plane; And / or, The line connecting the fixed point (11) corresponding to the fixed connection and the two adjustable points corresponding to the two movable connections forms an isosceles triangle. Preferably, the line connecting the fixed point (11) corresponding to the fixed connection and the two adjustable points corresponding to the two movable connections forms an equilateral triangle. And / or, The structure of the intelligent adjustment chuck also includes: a detection device. The detection device is used to detect the current tilt of the chuck relative to the horizontal plane and provide the current tilt to the controller.

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