flexible unit

Abstract

The flexible unit (10) includes a base component (12), a worktable support (14), a flexible mechanism (16), and a worktable unit (18). In the base component, a second fluid pressure cylinder (112) is provided. The second fluid pressure cylinder (112) presses the second pressing part (114) toward the worktable unit by means of the first fluid pressure cylinder (94) to reset the worktable unit from the tilted posture of the worktable plate (82) relative to the XY plane to the original posture of the worktable plate along the XY plane.

Description

Technical Field

[0001] This disclosure relates to a flexible unit. Background Technology

[0002] For example, Japanese Patent Application Publication No. 2002-172582 discloses a flexible unit comprising a base member, a table support, a flexible mechanism, and a table unit. The table support is movable relative to the base member in the X and Y directions. The flexible mechanism is installed between the base member and the table support to be movable relative to both the base member and the table support in the X and Y directions. The table unit is configured to tilt relative to the table support. Summary of the Invention

[0003] The goal is to provide a better flexible cell.

[0004] The purpose of this invention is to solve the above-mentioned problems.

[0005] This disclosure describes a flexible unit comprising: a base member; a table support configured to move relative to the base member along an XY plane with the Y direction orthogonal to the X direction; a flexible mechanism mounted between the base member and the table support in a manner movable relative to the base member and the table support in the X and Y directions; and a table unit disposed on the table support in a manner rotatable about an imaginary line extending along the X or Y direction, on the base member. The device includes: a first fluid pressure cylinder that resets the worktable support to its origin position relative to the base member by pressing a first pressing part toward the worktable support; and a second fluid pressure cylinder that resets the worktable unit from an inclined posture with the worktable plate tilted relative to the XY plane to an origin posture along the XY plane by pressing a second pressing part toward the worktable unit with the worktable support in the state of being reset to the origin position relative to the base member by means of the first fluid pressure cylinder.

[0006] According to the present invention, a better flexible unit can be provided.

[0007] The aforementioned objectives, features, and advantages will be readily understood through the following description of embodiments with reference to the accompanying drawings. Attached Figure Description

[0008] Figure 1 This is a 3D diagram of a flexible unit.

[0009] Figure 2 This is a three-dimensional exploded view of the flexible unit.

[0010] Figure 3 This is a three-dimensional exploded view of the flexible unit.

[0011] Figure 4 This is a longitudinal sectional view of the flexible unit.

[0012] Figure 5 It is along Figure 4 A cross-sectional view of the VV line.

[0013] Figure 6 This is a diagram illustrating the operation of the flexible unit.

[0014] Figure 7 This is a diagram illustrating the operation of the flexible unit.

[0015] Figure 8 This is a diagram illustrating the operation of the flexible unit. Detailed Implementation

[0016] In the flexible unit, a first fluid pressure cylinder and a second fluid pressure cylinder may be provided in the base component. The first fluid pressure cylinder resets the worktable support to its original position relative to the base component by pressing a first pressing part toward the worktable support. The second fluid pressure cylinder resets the worktable unit from an inclined position to its original position by pressing a second pressing part toward the worktable unit.

[0017] In this flexible unit, the worktable unit is provided in the worktable support. Therefore, when the worktable support is offset from its origin position relative to the base member, if the second pressing part is pressed relative to the worktable unit by means of the second fluid pressure cylinder, it is possible that the worktable support cannot be reset to its origin position relative to the base member. In this disclosure, the goal is to reliably reset the worktable support to its origin position relative to the base member.

[0018] The flexible unit 10 according to one embodiment of the present invention will be described with reference to the figures. The flexible unit 10 is, for example, a device for correcting positional offset (center offset) during the assembly of a workpiece. Specifically, as... Figure 1 As shown, in the flexible unit 10, for example, a robot arm (not shown) is connected to the base component 12, and a clamping component (not shown) for holding the workpiece is mounted on the worktable unit 18.

[0019] The worktable unit 18 is movable relative to the base member 12 along the XY plane. Furthermore, the worktable unit 18 is tiltable relative to the worktable support 14 about a first axis Ax1 along the X direction. Additionally, the worktable unit 18 is tiltable relative to the worktable support 14 about a second axis Ax2 along the Y direction.

[0020] This flexible unit 10 can easily correct center offset, for example, when a center offset occurs during the assembly of a workpiece inserted into a designated hole. Furthermore, the application of the flexible unit 10 is not limited to the example of inserting a workpiece into a hole. The configuration of the flexible unit 10 will be described in detail below.

[0021] like Figures 1-4 As shown, the flexible unit 10 includes a base component 12, a worktable support 14, a pair of flexible mechanisms 16, a worktable unit 18, a first origin reset mechanism 20, and a second origin reset mechanism 22.

[0022] The base component 12 includes a first base 24, a second base 26, and a support plate 28. The first base 24 is a plate-shaped component extending in the X and Y directions. The first base 24 is circular when viewed from the Z direction. A mounting hole 30 (see reference 26) is formed in the first base 24 for mounting the first base 24 to a robot arm (not shown). Figure 1 and Figure 2 The shape and size of the first base 24 can be appropriately set.

[0023] like Figure 3 and Figure 4 As shown, the second base 26 protrudes in the Z1 direction from the Z1-oriented surface of the first base 24. The second base 26 includes a central base portion 32, three side protrusions 34, and a central protrusion 36. The central base portion 32 is connected to the central portion of the first base 24. The three side protrusions 34 protrude radially outward from the central base portion 32. The three side protrusions 34 are arranged circumferentially around the central base portion 32 at equal angular intervals. The second base 26 may also have one, two, or more than four side protrusions 34. The central protrusion 36 protrudes in the Z1 direction from the central base portion 32. The central protrusion 36 has a circular outer peripheral surface.

[0024] The support plate 28 is formed in an annular shape. The support plate 28, together with the second cover member 120 forming the second origin reset mechanism 22, is mounted to the protruding end face of the central protrusion 36 via a plurality of connecting members 38. In other words, the support plate 28 is clamped from the Z direction via the central protrusion 36 and the second cover member 120. The connecting members 38 are, for example, screw members.

[0025] like Figures 2-4As shown, the worktable support 14 is formed in an annular shape. That is, a through hole 40 is formed in the center of the worktable support 14. The central protrusion 36 of the base member 12 (see reference) is inserted into the through hole 40. Figure 4 The inner diameter (aperture) of the through hole 40 is larger than the outer diameter of the central protrusion 36.

[0026] The workbench support 14 includes a first plate 42, a pressing member 44, an intermediate member 46, a second plate 48, and a support body 50. The first plate 42, intermediate member 46, second plate 48, and support body 50 are stacked in this order facing the Z1 direction. The first plate 42 is a flat plate extending along the XY plane. On the Z2-facing surface of the first plate 42, a plurality of bearing members 98 constituting the first origin reset mechanism 20 are provided (see reference). Figure 2 and Figure 4 The pressing member 44 is disposed on the Z2-oriented surface of the first plate 42. The pressing member 44 fixes the plurality of bearing members 98 relative to the first plate 42.

[0027] The intermediate component 46 is disposed on the Z1-oriented surface of the first plate 42. The thickness of the intermediate component 46 along the Z direction is greater than the thickness of the first plate 42 along the Z direction. The inner diameter of the intermediate component 46 is greater than the inner diameter of the first plate 42.

[0028] The second plate 48 is a flat plate extending along the XY plane. The second plate 48 is disposed on the Z1-oriented surface of the intermediate member 46. The inner diameter of the second plate 48 is the same as the inner diameter of the first plate 42. That is, a space 52 for disposing of the support plate 28 is formed between the first plate 42 and the second plate 48.

[0029] like Figure 3 and Figure 4 As shown, the support body 50 has a connecting plate portion 54 and a pair of connecting protrusions 56. The connecting plate portion 54 is disposed on the Z1-oriented surface of the second plate 48. The pair of connecting protrusions 56 protrude from the outer periphery of the Z1-oriented surface of the connecting plate portion 54 in the Z1 direction. The pair of connecting protrusions 56 are spaced apart and arranged side by side in the X direction. The pair of connecting protrusions 56 support the worktable unit 18.

[0030] like Figure 4 As shown, a pair of flexible mechanisms 16 are mounted between the base member 12 and the worktable support 14 in a manner that allows them to move relative to the base member 12 and the worktable support 14 in the X and Y directions. One flexible mechanism 16 is mounted between the first plate 42 and the support plate 28. The other flexible mechanism 16 is mounted between the second plate 48 and the support plate 28. Hereinafter, one flexible mechanism 16 will sometimes be referred to as "first flexible mechanism 16a" and the other flexible mechanism 16 as "second flexible mechanism 16b".

[0031] The first flexible mechanism 16a has a plurality of balls 58 and a plate-shaped cage 60. The balls 58 are, for example, steel balls. The balls 58 are in contact with the plane of the first plate 42 facing the Z1 direction and the plane of the support plate 28 facing the Z2 direction.

[0032] The cage 60 supports a plurality of balls 58 in a rolling manner. The cage 60 is formed in an annular shape. The outer diameter of the cage 60 is smaller than the inner diameter of the intermediate member 46. The inner diameter of the cage 60 is larger than the inner diameter of the first plate 42.

[0033] The movement of the first flexible mechanism 16a along the XY plane is restricted by a first limiter 62. The first limiter 62 is mounted on the plane of the support plate 28 facing the Z2 direction by a connecting member (not shown). The first limiter 62 is formed in annular shape. The first limiter 62 is located inside the retainer 60 of the first flexible mechanism 16a.

[0034] The second flexible mechanism 16b has the same configuration as the first flexible mechanism 16a. Therefore, a detailed description of the configuration of the second flexible mechanism 16b is omitted. Furthermore, the plurality of balls 58 of the second flexible mechanism 16b are in contact with the plane of the second plate 48 facing the Z2 direction and the plane of the support plate 28 facing the Z1 direction.

[0035] The movement of the second flexible mechanism 16b along the XY plane is restricted by the second limiter 64. The second limiter 64 is mounted on the plane of the support plate 28 facing the Z1 direction by a connecting member (not shown). The second limiter 64 is formed in annular shape. The second limiter 64 is located inside the retainer 60 of the second flexible mechanism 16b.

[0036] like Figures 2-5 As shown, the worktable unit 18 has a first worktable portion 66 and a second worktable portion 68. The first worktable portion 66 is formed in a ring shape. The first worktable portion 66 extends in the Y direction. The first worktable portion 66 is disposed between a pair of connecting protrusions 56 of the worktable support portion 14. That is, the pair of connecting protrusions 56 are located on both sides of the first worktable portion 66 in the X direction.

[0037] like Figure 5 As shown, the first worktable portion 66 is supported on a pair of connecting protrusions 56 in a tilting manner by a pair of first pins 70. The first pins 70 are inserted in such a way that they pass through the first connecting hole 72 of the connecting protrusion 56 and the first through hole 74 of the first worktable portion 66.

[0038] The first connecting hole 72 passes through the connecting protrusion 56 in the X direction. The first insertion hole 74 is formed in the portion of the first worktable portion 66 adjacent to the first connecting hole 72. The first pin 70 passes through the first fixing member 78 (see reference). Figure 4The first pin 70 is fixed to the connecting protrusion 56. The first worktable 66 is not fixed to the first worktable portion 66. The first worktable portion 66 tilts about the first axis (first imaginary line) Ax1 of the first pin 70. The first axis Ax1 extends along the X direction.

[0039] The second worktable portion 68 has a connecting portion 80, a worktable plate 82, and a supporting plate 85. The connecting portion 80 is inserted into the inside of the first worktable portion 66. The connecting portion 80 is supported on the first worktable portion 66 in a tilting manner by a pair of second pins 84. The second pins 84 are inserted across the second through hole 86 of the first worktable portion 66 and the second connecting hole 88 of the connecting portion 80.

[0040] A pair of second through holes 86 are provided in the portion of the first worktable 66 that is opposite to each other in the Y direction (see reference). Figure 2 That is, the second through hole 86 penetrates the first worktable portion 66 in the Y direction. The second connecting hole 88 is formed in the portion of the connecting portion 80 adjacent to the second through hole 86. The second pin 84 passes through the second fixing member 89 (see reference). Figure 3 The second pin 84 is fixed to the connecting part 80. The second pin 84 is not fixed to the first worktable part 66. The second worktable part 68 tilts about the second axis (second imaginary line) Ax2 of the second pin 84. The second axis Ax2 extends along the Y direction. The second axis Ax2 extends in a direction orthogonal to the first axis Ax1.

[0041] like Figure 3 and Figure 4 As shown, the worktable 82 is located at the Z1 end of the connecting portion 80. The worktable 82 protrudes further outward than the connecting portion 80. Multiple mounting holes 90 (see reference numerals) are formed on the worktable 82 for mounting clamping components (not shown). Figure 3 ).like Figure 2 and Figure 4 As shown, the support plate 85 is disposed on the surface of the connecting portion 80 facing the Z2 direction. The support plate 85 is located at the center of the second worktable portion 68.

[0042] like Figure 3 and Figure 4 As shown, the first origin reset mechanism 20 resets the worktable support 14 to the origin position while simultaneously locking the worktable support 14 relative to the base component 12. The first origin reset mechanism 20 has three origin reset sections 92 (see reference 12). Figure 3 Three origin reset parts 92 are arranged circumferentially on the base member 12 at equal intervals (e.g., 120° intervals).

[0043] The origin reset unit 92 includes a first fluid pressure cylinder 94, a first pressing part 96, and a receiving member 98. The first fluid pressure cylinder 94 is, for example, an air cylinder that operates by means of air pressure. The same applies to the second fluid pressure cylinder 112, which will be described later. The configuration of the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 can be suitably configured.

[0044] The first fluid pressure cylinder 94 is provided for each of the three side protrusions 34. For example... Figure 4 As shown, the first fluid pressure cylinder 94 has a first cylinder bore 100, a first piston portion 102, a first cover portion 104, and a first force-applying portion 106. The first cylinder bore 100 is formed in a side protrusion 34 extending in the Z direction. The first cylinder bore 100 opens toward the Z1-oriented surface of the side protrusion 34.

[0045] The first piston portion 102 slides in the Z direction on the inner surface of the first cylinder bore 100. The first piston portion 102 divides the first cylinder bore 100 into a first chamber 108 and a second chamber 110. The first chamber 108 is located in the Z2 direction of the first piston portion 102. The second chamber 110 is located in the Z1 direction of the first piston portion 102. The first cover member 104 is mounted on the side protrusion 34 to block the opening in the Z1 direction of the first cylinder bore 100.

[0046] The first force-applying component 106 is installed between the first piston portion 102 and the first cover portion 104. The first force-applying component 106 applies force to the first piston portion 102 (first pressing portion 96) in the Z2 direction. The first force-applying component 106 is, for example, a compression coil spring. The first force-applying component 106 may also be a rubber component, etc.

[0047] The first pressing part 96 protrudes from the first piston part 102 in the Z1 direction. The first pressing part 96 penetrates the first cover part 104. At the end of the first pressing part 96 in the protruding direction (Z1 direction), a first pressing surface 96a is provided. The first pressing surface 96a is a conical convex surface.

[0048] The bearing member 98 is mounted on the first plate 42 opposite to the first pressing part 96. The bearing member 98 forms part of the worktable support part 14. The bearing member 98 has a concave first bearing surface 98a that can contact the Z1 direction end of the first pressing part 96. The first bearing surface 98a is a conical concave surface.

[0049] like Figure 3 and Figure 4As shown, the second origin reset mechanism 22 can be locked in a state where the worktable unit 18 is reset from the tilted position to the origin position. The second origin reset mechanism 22 is provided in the central part of the second base 26 (the central part of the base 32 and the central protrusion 36). The second origin reset mechanism 22 includes a second fluid pressure cylinder 112 and a second pressing part 114.

[0050] like Figure 4 As shown, the second fluid pressure cylinder 112 has a second cylinder bore 116, a second piston portion 118, a second cover portion 120, and a second force-applying portion 122. The second cylinder bore 116 is formed in the central portion of the second base 26 in a manner that extends in the Z direction. The second cylinder bore 116 opens to the end face in the protruding direction (Z1 direction) of the central protrusion 36.

[0051] The second piston portion 118 slides in the Z direction on the inner surface of the second cylinder bore 116. The second piston portion 118 divides the second cylinder bore 116 into a first chamber 124 and a second chamber 126. The first chamber 124 is located in the Z2 direction of the second piston portion 118. The second chamber 126 is located in the Z1 direction of the second piston portion 118. The second cover member 120 is mounted on the central protrusion 36 to block the opening in the Z1 direction of the second cylinder bore 116.

[0052] The second force-applying component 122 is installed between the second piston portion 118 and the second cover component 120. The second force-applying component 122 applies force to the second piston portion 118 (second pressing portion 114) in the Z2 direction. The second force-applying component 122 is, for example, a compression coil spring. The second force-applying component 122 may also be a rubber component, etc. In the initial state where the compressed fluid (fluid for cylinder drive) is not supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load applied to the second piston portion 118 (second pressing portion 114) by the second force-applying component 122 is greater than the load applied to the first piston portion 102 (first pressing portion 96) by the first force-applying component 106.

[0053] The second pressing part 114 includes a rod portion 128 and a pressing body 130. The rod portion 128 protrudes from the second piston portion 118 in the Z1 direction. The rod portion 128 passes through the second cover member 120. The pressing body 130 is mounted to the protruding end of the rod portion 128 via a connecting member 131. The connecting member 131 is, for example, a screw member. The pressing body 130 is formed in a flat plate shape. The pressing body 130 has a flat second pressing surface 114a in the Z1 direction. The second pressing surface 114a is capable of pressing the second bearing surface 85a of the bearing plate 85 in the Z2 direction toward the Z1 direction. The second bearing surface 85a is flat.

[0054] The base component 12 is provided with a first flow path 132, a second flow path 134, and a throttling orifice 136. The first flow path 132 connects to the first chamber 108 of each of the first fluid pressure cylinders 94. The first flow path 132 is capable of introducing fluid into each of the first chambers 108 of the plurality of first fluid pressure cylinders 94. The first flow path 132 is formed in the first base 24.

[0055] The first flow path 132 communicates with a first port 138 that opens on the outer surface of the first base 24. In this embodiment, a first port 138 is formed in the base member 12. A hose (not shown) is connected to the first port 138. Compressed fluid (compressed air) can be supplied to the first port 138 via an air supply device (not shown). The second chamber 110 of the first fluid pressure cylinder 94 communicates with the external space of the base member 12 via a second port 140 formed in the side protrusion 34.

[0056] The second flow path 134 branches off from the middle of the first flow path 132. The second flow path 134 connects to the first chamber 124 of the second fluid pressure cylinder 112. The second chamber 126 of the second fluid pressure cylinder 112 connects to the external space via a third port 142 formed in the central protrusion 36.

[0057] A throttling orifice 136 is disposed in the second flow path 134. The throttling orifice 136 restricts the flow rate of fluid flowing through the second flow path 134. The flow path of the throttling orifice 136 is smaller than the flow path of the first flow path 132. In other words, the cross-sectional area of ​​the flow path of the throttling orifice 136 is smaller than the cross-sectional area of ​​the flow path of the first flow path 132.

[0058] Next, the operation of the flexible unit 10 will be explained. For example... Figure 4 As shown, the flexible unit 10 can be used, for example, with the Z1 direction oriented towards the direction of gravity. Furthermore, the configuration direction of the flexible unit 10 can be appropriately set.

[0059] like Figure 4 As shown, in the flexible unit 10, when compressed fluid is not supplied to the first port 138, the first piston portion 102 of the first fluid pressure cylinder 94 is pushed towards the Z2 direction by the first force-applying member 106, and thus located at the Z2 direction end of the first cylinder bore 100. In this state, the first pressing surface 96a of the first pressing portion 96 is located at the Z2 direction end of the concave surface formed by the first bearing surface 98a of the bearing member 98. Thus, as Figure 6 As shown, the worktable support 14 is movable relative to the base member 12 in the X and Y directions (along the XY plane).

[0060] The worktable unit 18 is provided on the worktable support 14. Therefore, the worktable unit 18 moves along the XY plane relative to the base member 12 and the worktable support 14.

[0061] In addition, such as Figure 4 As shown, when compressed fluid is not supplied to the first port 138, the second piston portion 118 of the second fluid pressure cylinder 112 is pushed toward the Z2 direction by the second force-applying member 122, and thus is located at the Z2 direction end of the second cylinder bore 116. In this state, the second pressing surface 114a of the second pressing portion 114 is in a position separated from the second bearing surface 85a toward the Z2 direction.

[0062] Therefore, as Figure 6 As shown, the first worktable portion 66 of the worktable unit 18 can be tilted relative to the worktable support portion 14 about the first axis Ax1. Furthermore, the second worktable portion 68 of the worktable unit 18 can be tilted relative to the first worktable portion 66 about the second axis Ax2. That is, the worktable unit 18 can be changed from an origin position to a tilted position. The origin position of the worktable unit 18 refers to the position of the worktable unit 18 along the XY plane. The tilted position of the worktable unit 18 refers to the position of the worktable unit 18 with the worktable plate 82 tilted relative to the XY plane.

[0063] In the flexible unit 10, when compressed fluid is supplied to the first port 138, the compressed fluid flows into the first chamber 108 of the first fluid pressure cylinder 94 via the first flow path 132 and into the first chamber 124 of the second fluid pressure cylinder 112 via the second flow path 134 and the throttle orifice 136. In this embodiment, a relatively large pressure difference can be obtained between the upstream and downstream sides of the throttle orifice 136. In other words, the pressure of the fluid downstream of the throttle orifice 136 is less than the pressure of the fluid upstream of the throttle orifice 136. Furthermore, the greater the flow rate (volume flow rate) of the compressed fluid through the throttle orifice 136, the greater this pressure difference. As a result, the start timing of the operation of the second fluid pressure cylinder 112 can be delayed compared to the start timing of the operation of the first fluid pressure cylinder 94.

[0064] Furthermore, in this embodiment, in the initial state where compressed fluid is not supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load applied to the second pressing part 114 by the second force-applying member 122 is greater than the load applied to the first pressing part 96 by the first force-applying member 106. Therefore, even when the flow rate of compressed fluid through the throttle orifice 136 is relatively low and the pressure difference between the upstream and downstream sides of the throttle orifice 136 is relatively small, the timing of the start of the action of the second piston part 118 of the second fluid pressure cylinder 112 can be moderately delayed compared to the start of the action of the first piston part 102 of the first fluid pressure cylinder 94.

[0065] Specifically, firstly, through the compressed fluid supplied to the first chamber 108 of the first fluid pressure cylinder 94, the first piston portion 102 moves in the Z1 direction while pressing the first force-applying member 106. Thus, the first pressing surface 96a of the first pressing portion 96 pushes the first bearing surface 98a of the bearing member 98 in the Z1 direction, therefore, as... Figure 7 As shown, the worktable support 14 is reset to its original position relative to the base member 12. Consequently, the central portion of the second bearing surface 85a is located in the Z1 direction of the central portion of the second pressing surface 114a. That is, the central portion of the second bearing surface 85a and the central portion of the second pressing surface 114a are opposite to each other.

[0066] Subsequently, through the compressed fluid supplied to the first chamber 124 of the second fluid pressure cylinder 112, the second piston portion 118 presses against the second force-applying member 122 while moving towards the Z1 direction in the second cylinder bore 116. Thus, the second pressing surface 114a of the second pressing portion 114 pushes the second bearing surface 85a of the worktable unit 18 towards the Z1 direction, therefore, as... Figure 8 As shown, the worktable unit 18 resets from the tilted position to the origin position.

[0067] According to this embodiment, when the worktable support 14 is reset to its original position relative to the base member 12 by means of the first fluid pressure cylinder 94, the second pressing part 114 is pressed onto the worktable unit 18 by means of the second fluid pressure cylinder 112, thereby resetting the worktable unit 18 from an inclined position to its original position. This prevents the second pressing part 114 from being pressed onto the worktable unit 18 when the worktable support 14 is offset from its original position relative to the base member 12, thus preventing the worktable support 14 from becoming immobile relative to the base member 12. Therefore, the worktable support 14 can be reliably reset to its original position relative to the base member 12. Furthermore, since the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 are provided on the base member 12, the flow path for driving the fluid pressure cylinders can be concentrated in the base member 12. That is, the flexible unit 10 can be simplified. Furthermore, since there is no need to install hoses for supplying compressed fluid to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 on the worktable support 14, these hoses will not obstruct the movement of the worktable support 14 relative to the base member 12. Therefore, the worktable support 14 can move smoothly relative to the base member 12. This allows for a more flexible unit 10.

[0068] This embodiment is not limited to the configuration described above. The flexible unit 10 may also omit the throttle orifice 136. In this case, by making the load applied to the second pressing part 114 by the second force-applying member 122 greater than the load applied to the first pressing part 96 by the first force-applying member 106, the start timing of the operation of the second fluid pressure cylinder 112 can be delayed compared to the start timing of the operation of the first fluid pressure cylinder 94. Alternatively, in the flexible unit 10, the load applied to the second pressing part 114 by the second force-applying member 122 may not be greater than the load applied to the first pressing part 96 by the first force-applying member 106. In this case, the start timing of the operation of the second fluid pressure cylinder 112 can be delayed compared to the start timing of the operation of the first fluid pressure cylinder 94 by means of the throttle orifice 136.

[0069] Regarding the above-described embodiments, the following notes are further disclosed.

[0070] (Note 1)

[0071] The flexible unit 10 disclosed herein includes: a base member 12; a table support 14 configured to move relative to the base member along an XY plane with the Y direction orthogonal to the X direction; a flexible mechanism 16 mounted between the base member and the table support in a manner movable relative to the base member and the table support in the X and Y directions; and a table unit 18 disposed on the table support in a manner rotatable about an imaginary line Ax1, Ax2 extending along the X or Y direction. The base member includes: a... A first fluid pressure cylinder 94, which resets the worktable support to its origin position relative to the base component by pressing a first pressing part 96 toward the worktable support; and a second fluid pressure cylinder 112, which resets the worktable unit from an inclined posture with the worktable plate 82 tilted relative to the XY plane to the origin posture of the worktable plate along the XY plane by pressing a second pressing part 114 toward the worktable unit while the worktable support is reset to its origin position relative to the base component by means of the first fluid pressure cylinder.

[0072] According to this configuration, when the worktable support is reset to its original position relative to the base member by means of the first fluid pressure cylinder, the second pressing part is pressed against the worktable unit by means of the second fluid pressure cylinder, thereby resetting the worktable unit from the tilted position to the original position. This prevents the second pressing part from being pressed against the worktable unit when the worktable support is offset from its original position relative to the base member, thus preventing the worktable support from becoming immobile relative to the base member. Therefore, the worktable support can be reliably reset to its original position relative to the base member. Furthermore, since the first and second fluid pressure cylinders are provided in the base member, the flow path for driving the fluid pressure cylinders can be concentrated in the base member. That is, the flexible unit can be simplified. Moreover, there is no need to install hoses for supplying compressed fluid to the first and second fluid pressure cylinders in the worktable support, so these hoses do not obstruct the movement of the worktable support relative to the base member. Therefore, the worktable support can move smoothly relative to the base member. Thus, a better flexible unit can be provided.

[0073] (Note 2)

[0074] In the flexible unit described in Appendix 1, the base component may include: a first flow path 132, which is capable of introducing fluid for cylinder driving into the first fluid pressure cylinder; a second flow path 134, which communicates with the first flow path and is capable of introducing the fluid into the second fluid pressure cylinder; and a throttling orifice 136, which is located in the second flow path.

[0075] With this configuration, a pressure difference can be obtained between the upstream and downstream sides of the throttling orifice. Therefore, with this simple configuration, the start timing of the second fluid pressure cylinder's operation can be delayed compared to the start timing of the first fluid pressure cylinder's operation. Thus, with this simple configuration, while the worktable support has been reset to its original position relative to the base member by means of the first fluid pressure cylinder, the second fluid pressure cylinder can press the second pressing part against the worktable unit, thereby resetting the worktable unit from an inclined position to its original position.

[0076] (Note 3)

[0077] In the flexible unit described in Appendix 2, the first flow path may be connected to a port 138 that opens on the outer surface of the base component, and the second flow path may branch off from the middle of the first flow path.

[0078] With this configuration, compressed fluid can be supplied from one port to both the first and second flow paths. This reduces the number of hoses connected to the port, thus preventing interference between hoses and other components and preventing hoses from tangling together.

[0079] (Note 4)

[0080] In any of the flexible units described in Appendices 1 to 3, the first fluid pressure cylinder may have a first force-applying component 106 that applies force to the first pressing part in the direction in which the first pressing part moves away from the worktable support, and the second fluid pressure cylinder may have a second force-applying component 122 that applies force to the second pressing part in the direction in which the second pressing part moves away from the worktable unit.

[0081] This configuration simplifies the construction of flexible units.

[0082] (Note 5)

[0083] In the flexible unit described in Appendix 4, in the initial state where fluid for cylinder driving is not supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load imposed on the second pressing part by the second force-applying component is greater than the load imposed on the first pressing part by the first force-applying component.

[0084] Based on this configuration, with a simple setup, the timing of the start of action of the second fluid pressure cylinder can be made later than that of the start of action of the first fluid pressure cylinder.

[0085] Although this disclosure has been described in detail, it is not limited to the various embodiments described above. Various additions, substitutions, modifications, and partial deletions are possible with respect to these embodiments without departing from the spirit of this disclosure or the main idea derived from the content described in the claimed scope and its equivalents. Furthermore, these embodiments can also be implemented in combination. For example, in the embodiments described above, the order of each action and the order of each process are shown as examples and are not limited to these. Similarly, the use of numerical values ​​or formulas in the description of the embodiments described above also applies.

Claims

1. A flexible unit (10), characterized in that, have: Base component (12); A worktable support (14) is configured to move relative to the base member along an XY plane with the Y direction orthogonal to the X direction. A flexible mechanism (16) is mounted between the base component and the table support in a manner that allows it to move relative to the base component and the table support in the X and Y directions; as well as A worktable unit (18) is provided on the worktable support in a manner that allows it to tilt around an imaginary line (Ax1, Ax2) extending along the X direction or the Y direction. The base component is provided with: A first fluid pressure cylinder (94) resets the worktable support to its original position relative to the base component by pressing a first pressing part (96) toward the worktable support. as well as The second fluid pressure cylinder (112) presses the second pressing part (114) toward the worktable unit by means of the first fluid pressure cylinder, thereby resetting the worktable unit from an inclined posture in which the worktable plate (82) of the worktable unit is tilted relative to the XY plane to the origin posture of the worktable plate along the XY plane.

2. The flexible unit according to claim 1, characterized in that, The base component is provided with: A first flow path (132) is capable of introducing fluid for cylinder driving into the first fluid pressure cylinder; A second flow path (134) is connected to the first flow path and is capable of introducing the fluid into the second fluid pressure cylinder; as well as A throttling orifice (136) is located in the second flow path.

3. The flexible unit according to claim 2, characterized in that, The first flow path communicates with the port (138) that opens on the outer surface of the base component. The second flow path branches off from the middle of the first flow path.

4. The flexible unit according to any one of claims 1 to 3, characterized in that, The first fluid pressure cylinder has a first force-applying component (106) that applies force to the first pressing part in the direction in which the first pressing part moves away from the worktable support. The second fluid pressure cylinder has a second force-applying component (122) that applies force to the second pressing part in the direction in which the second pressing part moves away from the worktable unit.

5. The flexible unit according to claim 4, characterized in that, In the initial state where fluid for cylinder driving is not supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load applied by the second force-applying component to the second pressing part is greater than the load applied by the first force-applying component to the first pressing part.

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