Electrostatic chuck adhesive dispensing apparatus

Abstract

This invention relates to the field of mixing equipment technology, specifically to an electrostatic chuck bonding adhesive mixer, comprising: a tank body having an inlet and an outlet; a stirring mechanism disposed within the tank body for stirring the medium within the tank; and an isolation mechanism disposed within the tank body and slidably connected to the stirring mechanism for isolating the liquid surface of the medium within the tank from the upper space within the tank. By providing the isolation mechanism, the surface of the adhesive within the tank can be isolated and shielded during adhesive mixing, reducing fluctuations during mixing and minimizing the contact area between air and adhesive within the tank, thus reducing the amount of air bubbles incorporated into the adhesive.

Description

Technical Field

[0001] This invention relates to the field of mixing equipment technology, and more specifically to an electrostatic chuck bonding adhesive mixer. Background Technology

[0002] Electrostatic chucks are key components in semiconductor wafer manufacturing equipment (such as etching and CVD), and their performance directly affects the temperature uniformity and process stability of the wafer. During manufacturing, the ceramic dielectric layer, internal heater, and aluminum cooling base are typically bonded together as a single unit using adhesives (high-temperature epoxy resin, such as Aremco 631 A / B).

[0003] In the current technology, when bonding and mixing A / B adhesives, excessive air or moisture from the air is easily mixed into the A / B adhesive, forming bubbles and affecting the quality of the adhesive. This often requires more subsequent production processes for defoaming treatment, resulting in a decrease in overall production efficiency and quality. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention proposes an electrostatic chuck bonding adhesive mixer to solve the technical problems of low quality adhesive after mixing, excessive air bubbles, and long defoaming time in existing technologies.

[0005] The technical solution adopted in this invention is an electrostatic chuck bonding adhesive mixing device, comprising: The tank body is provided with an inlet and an outlet; A stirring mechanism, located inside the tank, is used to stir the medium inside the tank. An isolation mechanism is provided inside the tank and is slidably connected to the stirring mechanism to isolate the liquid level of the medium inside the tank from the upper space inside the tank.

[0006] This structure, through the adjustment of the isolation mechanism to adapt to the glue level in the tank, can reduce the amount of air mixed into the upper part of the tank during the stirring process, improve the overall quality of the glue after stirring, and reduce the time and difficulty of post-processing.

[0007] The stirring mechanism includes a motor, a stirring shaft, and stirring blades. The motor is fixedly mounted on the upper end of the tank. The stirring shaft is coaxially rotatably mounted inside the tank and is connected to the rotating shaft of the motor. Several stirring blades are evenly arranged on the stirring shaft. The motor can drive the stirring shaft to rotate through the rotating shaft and stir the medium inside the tank through the stirring blades.

[0008] This structure, driven by a motor, allows the stirring shaft to move and the stirring blades to achieve a uniform and effective mixing of the adhesive in the tank.

[0009] The tank body is provided with a spiral jacket on the side, and the upper and lower sides of the tank body are respectively provided with an inlet pipe and an outlet pipe that are connected to the liquid passage of the spiral jacket. The spiral jacket, the inlet pipe and the outlet pipe are used to input cooling water to cool the medium in the tank body.

[0010] This structure allows cooling water to be introduced into the spiral jacket through the inlet pipe, and forms a water circulation system with the outlet pipe. This system can cool and control the temperature inside the tank, making it more suitable for production and processing.

[0011] The isolation mechanism includes: a telescopic device and an isolation float. The isolation float is slidably connected to the stirring shaft along its axial direction, and the stirring shaft can rotate relative to the isolation float. The inner side wall of the tank is fixedly provided with guide ribs that are fitted and slidably engaged with the isolation float. The telescopic device is fixedly located at the upper end of the tank, and its telescopic shaft is connected to the isolation float.

[0012] This structure, through the extension and retraction of the telescopic device, controls the raising and lowering height of the isolation float within the tank. This allows the isolation float to conform to the surface liquid level of the adhesive within the tank, thereby reducing the contact between the adhesive and air within the tank and improving the quality of the mixed adhesive.

[0013] Several stirring shafts are evenly distributed along their axial direction and are all located below the isolation float. The stirring blades include: a sliding sleeve, blades, and an elastic element. The sliding sleeve is slidably connected to the stirring shaft along its axial direction, and a guide rib is provided between them. The guide rib can restrict the sliding sleeve from rotating circumferentially relative to the stirring shaft. The blades are located on the side of the sliding sleeve. The elastic element is sleeved on the outer wall of the stirring shaft, and one end is connected to the lower end of the upper adjacent sliding sleeve. The other end of the elastic element is connected to the upper end of the lower adjacent sliding sleeve. The elastic element can push two adjacent sliding sleeves away from each other.

[0014] This structure allows the stirring blades and the isolation float to be synchronized, achieving the effect of automatically adjusting the position and density of the stirring blades. This avoids obstruction between components and matches the liquid level of the adhesive in the tank, meeting the need for uniform mixing.

[0015] The isolation float is also equipped with an air pumping assembly, which is connected to an external air passage and is used to deliver inert gas into the tank and discharge air from the tank.

[0016] The air pumping assembly includes: an air inlet pipe, a nozzle, an air collecting ring, and a return pipe. The air inlet pipe and the return pipe are both located at the upper end of the tank. The nozzle is located on the isolation float plate with the spray end facing downwards. The nozzle is connected to the air inlet pipe through a first flexible hose. The isolation float has a downwardly recessed cap-like structure. The gas collecting ring is located on the upper inner side of the isolation float and works with the isolation float to form a closed space inside the tank. The gas collecting ring has an air hole that communicates with the space inside the tank. The gas collecting ring is connected to the return air pipe through a second flexible hose.

[0017] This structure, through the cooperation of the air inlet pipe, nozzle, air collection ring, and air return pipe, can effectively expel air from the tank before mixing and form a gas barrier on the surface of the adhesive liquid, further preventing air from mixing with the adhesive and improving quality.

[0018] The upper end of the isolation float is also provided with an expansion airbag. The expansion airbag is annular and embedded in the isolation float and is connected to the air inlet pipe. The isolation float is connected to an abutment ring that slides and seals against the inner wall of the tank through an extension arm. The abutment ring is located above the gas collection ring. After inflation, the expansion airbag can expand towards the abutment ring and form a seal by sticking to the abutment ring.

[0019] This structure, through the cooperation of the inflatable air bladder and the abutment ring to form spatial isolation, can significantly improve the filling efficiency and effect of inert gas, while reducing the amount of inert gas required, thus lowering production costs and time.

[0020] A sprayer located on the upper side of the isolation float is also provided between the air inlet pipe and the nozzle. The sprayer includes a storage tank and a venturi tube. The storage tank is used to store modified alumina. The throat of the venturi tube is connected to the storage tank, and the air inlet end of the venturi tube is connected to the air inlet pipe. The exhaust end of the venturi tube is connected to the air inlet end of the nozzle. The venturi tube can draw out the modified alumina in the storage tank when inert gas passes through and spray it into the tank medium through the nozzle.

[0021] This structure replenishes the inert gas environment inside the tank by introducing inert gas, and simultaneously extracts and disperses the packing material through the transport of inert gas. This achieves both intermittent, small-volume feeding and automatic feeding, which is more conducive to production.

[0022] An ultrasonic probe is installed on the lower side of the tank.

[0023] This structure allows for direct cooling water input via a spiral jacket for ice bath ultrasonic dispersion after the filler and epoxy resin are mixed, thus improving processing convenience.

[0024] As can be seen from the above technical solution, the beneficial technical effects of the present invention are as follows: 1. By setting up an isolation mechanism, the surface of the glue in the tank can be isolated and shielded during the mixing and stirring of the glue, reducing the fluctuation of the glue during stirring, reducing the contact area between the air and the glue in the tank, and reducing the amount of air bubbles mixed into the glue.

[0025] 2. The floating design between several stirring blades can match the movement and adjustment of the isolation float in the isolation mechanism, and synchronously contract or expand to achieve the effect of matching the position of the isolation float and the liquid level in the tank, which is more conducive to mixing and processing.

[0026] 3. The air pump assembly can create an inert gas positive pressure environment inside the tank before mixing and processing, forcing the air inside the tank to be expelled, thereby further avoiding the influence of air bubbles mixed with glue.

[0027] 4. The expansion air bladder, in conjunction with the abutment ring, creates a small enclosed space between the adhesive and the expansion air bladder before the inert gas is introduced into the tank. This improves the filling speed and effect of the inert gas, reduces the amount of inert gas required, increases production efficiency, and lowers production costs.

[0028] 5. The sprayer is designed to work in conjunction with the input of inert gas to disperse and intermittently introduce nano-modified alumina filler into the tank, further improving the mixing effect and efficiency, and reducing the phenomenon of filler clumping and flocculent formation in epoxy resin. Attached Figure Description

[0029] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0030] Figure 1 This is a schematic diagram of the overall structure of an electrostatic chuck bonding adhesive mixer according to the present invention. Figure 2 This is a schematic diagram of the internal structure of an electrostatic chuck bonding adhesive mixer according to the present invention. Figure 3 This is a cross-sectional view of the structure of an electrostatic chuck bonding adhesive mixer according to the present invention. Figure 4 This is a schematic diagram of the stirring mechanism and isolation mechanism of an electrostatic chuck bonding adhesive mixer according to the present invention; Figure label: Tank body 1, inlet 11, outlet 12, spiral jacket 13, water inlet pipe 14, water outlet pipe 15, ultrasonic probe 16; 2. Stirring mechanism; 21. Motor; 22. Stirring shaft; 23. Stirring blade; 231. Sliding sleeve; 232. Blade; 233. Elastic element; 3. Isolation mechanism, 31. Telescopic device, 32. Isolation float, 33. Guide rib, 34. Pump assembly, 341. Air inlet pipe, 342. Nozzle, 343. Air collection ring, 344. Air return pipe, 35. Inflatable airbag, 36. Extension arm, 37. Abutment ring, 38. First hose, 39. 4. Sprayer 41. Storage tank 42. Venturi tube 42. Detailed Implementation

[0031] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the technical solution of the present invention and are therefore intended to limit the scope of protection of the present invention.

[0032] It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0033] Example 1: like Figure 1-4 As shown, this embodiment provides an electrostatic chuck bonding adhesive mixing device, including: a tank 1, a stirring mechanism 2, and an isolation mechanism 3; the tank 1 is provided with an inlet 11 and an outlet 12; the stirring mechanism 2 is located inside the tank 1 and is used to stir the medium inside the tank 1; the isolation mechanism 3 is located inside the tank 1 and is slidably connected to the stirring mechanism 2, and is used to isolate the liquid surface of the medium inside the tank 1 from the upper space inside the tank 1.

[0034] The tank body 1 is equipped with a tank cover on the upper side. The tank cover is connected to the tank body 1 by bolts to form a closed space with an inner wall, and can be opened during later maintenance.

[0035] In this application, in order to improve the overall performance of the A / B adhesive, and to distinguish it from the existing technology that uses a single Aremco 631 A / B adhesive for bonding, which has problems such as limited thermal conductivity and high internal stress in the bonding layer, spherical nano-alumina (Al2O3) powder modified with silane coupling agent is introduced as a functional filler. Through orthogonal experimental design, the bonding formulation is based on factors such as filler addition amount, A / B adhesive mixing ratio, and stepped temperature rise curve, with the thermal conductivity and shear strength of the bonding layer as evaluation indicators.

[0036] The working principle of Example 1 is explained in detail below: Before preparing the bonding adhesive, the modified nano-modified alumina filler and Aremco 631 A / B adhesive matrix are prepared. Then, the filler and Aremco 631 A colloid are loaded into tank 1 through inlet 11 for initial mixing and stirring. The mixture is mechanically stirred at high speed at 1000 rpm for 30 minutes, and then ultrasonically dispersed (power 600W) under ice-water bath conditions for 30 minutes to obtain a uniform premixed slurry of component A.

[0037] Add component B (curing agent) according to the A / B ratio, stir and mix at 500 rpm for 5 minutes, and then degas under vacuum for 3 minutes to obtain the composite bonding adhesive.

[0038] Before mixing, the position of the isolation mechanism 3 inside the tank 1 is adjusted so that the lower end of the isolation mechanism 3 is in contact with the upper liquid surface of the mixing medium inside the tank 1. The liquid level height can be detected by using an existing liquid level sensor. After the isolation mechanism 3 initially isolates the liquid surface from the upper space of the tank 1, the mixing mechanism 2 is then turned on to mix the medium inside the tank 1. During the mixing process, due to the obstruction and leveling of the liquid surface by the isolation mechanism 3, phenomena such as swirling and medium fluctuations generated during the mixing process will be limited, thereby reducing the degree of fluctuation of the medium during the mixing process. This reduces the possibility of the medium coming into contact with the air in the space inside the tank 1, which could generate bubbles or mix in water vapor, thus affecting the quality of the adhesive. Simultaneously, since the isolation mechanism 3 can also shield the liquid surface, the contact area between the liquid surface and the air inside the tank 1 can be reduced to the greatest extent, further improving the mixing effect and quality. Compared with conventional glue mixing equipment, less air, water vapor and other impurities are mixed into the glue during the mixing process, resulting in higher quality glue after mixing and less time and difficulty in defoaming and post-processing.

[0039] The stirring mechanism 2 includes a motor 21, a stirring shaft 22, and stirring blades 23. The motor 21 is fixedly mounted on the upper end of the tank 1. The stirring shaft 22 is coaxially rotatably mounted inside the tank 1 and is connected to the rotating shaft of the motor 21. Several stirring blades 23 are evenly arranged on the stirring shaft 22. The motor 21 can drive the stirring shaft 22 to rotate through the rotating shaft and stir the medium inside the tank 1 through the stirring blades 23.

[0040] In this first embodiment, the motor 21 is used to provide rotational power and drives the stirring shaft 22 through its own rotating shaft, thereby using the stirring blade 23 to stir the glue in the tank 1.

[0041] The tank body 1 has a spiral jacket 13 on its side, and the upper and lower sides of the tank body 1 are respectively provided with a water inlet pipe 14 and a water outlet pipe 15 that are connected to the liquid passage of the spiral jacket 13. The spiral jacket 13, the water inlet pipe 14 and the water outlet pipe 15 are used to input cooling water to cool the medium in the tank body 1.

[0042] In this first embodiment, the spiral jacket 13, together with the water inlet pipe 14 and the water outlet pipe 15, allows cooling water to be introduced into the spiral jacket 13 through the water inlet pipe 14. After the cooling water passes through the spiral area of ​​the spiral jacket 13 and cools the medium in the tank 1, it is discharged from the water outlet pipe 15. This can significantly reduce the temperature of the medium in the tank 1 during the stirring and mixing process and the ultrasonic dispersion process. By controlling the temperature, the quality of glue production can be improved.

[0043] The isolation mechanism 3 includes: a telescopic device 31 and an isolation float 32. The isolation float 32 is slidably connected to the stirring shaft 22 along the axial direction of the stirring shaft 22, and the stirring shaft 22 can rotate relative to the isolation float 32. The inner side wall of the tank body 1 is fixedly provided with a guide rib 33 that is fitted and slidably engaged with the isolation float 32. The telescopic device 31 is fixedly provided at the upper end of the tank body 1, and its telescopic shaft is connected to the isolation float 32.

[0044] In this first embodiment, the telescopic device 31 adopts an electrically controlled telescopic rod, which can be controlled to extend and retract through a device such as a control panel or a computer. In turn, the extension length of its telescopic shaft drives the isolation float 32 to move up and down within the tank 1, so as to meet the adjustment requirements of the liquid level of the medium in the tank 1. In other embodiments, the telescopic device 31 can also adopt a hydraulic cylinder.

[0045] An ultrasonic probe 16 is installed on the lower side of the tank body 1.

[0046] In this embodiment, an ultrasonic probe 16 is installed on the lower side of the tank 1, which can be used to perform ice bath ultrasonic dispersion with cooling water input in conjunction with the spiral jacket 13 after the filler and epoxy resin are initially mixed, thereby further improving the uniformity of the mixture.

[0047] Example 2: like Figure 2-4 As shown, the only technical feature that differs from Embodiment 1 is that several stirring shafts 22 are evenly distributed along their axial direction and are all located below the isolation float 32. The stirring blade 23 includes: a sliding sleeve 231, a blade 232, and an elastic element 233. The sliding sleeve 231 is slidably connected to the stirring shaft 22 along its axial direction, and a guide rib is provided between them. The guide rib can restrict the sliding sleeve 231 from rotating circumferentially relative to the stirring shaft 22. The blade 232 is located on the side of the sliding sleeve 231. The elastic element 233 is sleeved on the outer wall of the stirring shaft 22, and one end is connected to the lower end of the upper adjacent sliding sleeve 231. The other end of the elastic element 233 is connected to the upper end of the lower adjacent sliding sleeve 231. The elastic element 233 can push two adjacent sliding sleeves 231 away from each other.

[0048] Apart from that, all other structures are identical.

[0049] The working principle of Example 2 is explained in detail below: In this second embodiment, when the isolation mechanism 3 is adjusted to match the liquid level of the medium in the tank 1, the stirring blade 23 can be adjusted synchronously with the lifting and lowering movement of the isolation mechanism 3 to achieve the effect of obstacle avoidance and adjustment of the stirring area. In the static state, the elastic elements 233 in several stirring blades 23 remain stretched and form a separation push with each other, that is, several stirring blades 23 are dispersed on the stirring shaft 22, and the stirring area is large at this time. When the isolation float 32 descends to adjust to the appropriate liquid level, the uppermost sliding sleeve 231 is squeezed by the isolation float 32 and moves downward. Through the transmission of force, the sliding sleeves 231 in several stirring blades 23 will move downward at the same time and squeeze the elastic element 233. In this way, the interval between the blades 232 on two adjacent sliding sleeves 231 will be reduced, so as to achieve the effect of reducing the stirring area.

[0050] In this second embodiment, the elastic element 233 is a spring. In other embodiments, the elastic element 233 may also be a sheet or any device with elasticity.

[0051] Furthermore, in order to improve the mixing effect, the planar projections of the blades 232 on adjacent sliding sleeves 231 are staggered and set to match the rotation direction of the stirring shaft 22. The lower end face after tilting faces the forward direction of the rotation of the stirring shaft 22. After the blades 232 in several stirring blades 23 are staggered in the same direction, the whole is distributed in a spiral structure. Moreover, there can be multiple blades 232 on a single sliding sleeve 231. In this way, macroscopically, the blades 232 on several sliding sleeves 231 cooperate with each other to form the overall structure of a spiral stirring blade, thereby improving the mixing effect.

[0052] Example 3: like Figure 2-4 As shown, the only technical feature that differs from Embodiment 1 is that the isolation float 32 is also provided with an air pumping assembly 34, which is connected to an external air passage and is used to deliver inert gas into the tank 1 and discharge the air in the tank 1.

[0053] The air pumping assembly 34 includes: an air inlet pipe 341, a nozzle 342, an air collecting ring 343, and a return pipe 344. The air inlet pipe 341 and the return pipe 344 are both located at the upper end of the tank body 1. The nozzle 342 is located on the isolation float 32, and the spray end faces downward. The nozzle 342 is connected to the air inlet pipe 341 through the first hose 38. The isolation float 32 is a cap-shaped structure with a downward-recessed center. The gas collection ring 343 is located on the upper side inside the isolation float 32 and works with the isolation float 32 to form a closed space inside the tank 1. The gas collection ring 343 is provided with a vent that communicates with the space inside the tank 1. The gas collection ring 343 is connected to the return gas pipe 344 through the second hose 39.

[0054] Apart from that, all other structures are identical.

[0055] The working principle of Example 3 is explained in detail below: In this third embodiment, in order to further reduce the influence of the air in the upper layer of the tank 1 on the adhesive during the mixing of the adhesive, when the isolation float 32 is attached to the upper surface of the adhesive, an inert gas such as nitrogen or argon is introduced through the air inlet pipe 341. The inert gas passes through the first hose 38 and is finally output to the upper layer of adhesive liquid through the nozzle 342. As the gas is continuously pumped, the inert gas detaches from the adhesive and is output upwards from the gap between the isolation float 32 and the tank 1, gradually filling the upper space inside the tank 1 and creating a positive pressure state inside the tank 1. The air inside the tank 1 is then forced into the gas collecting ring 343, which has vent holes on its side. Finally, the gas is discharged from the tank 1 through the second hose 39 and the return air pipe 344 connected to the gas collecting ring 343. This creates an inert gas environment inside the tank 1, squeezing out the air and reducing the possibility of air mixing into the adhesive during the mixing process. At the same time, this inert gas input method can be directly matched to the liquid level of the adhesive inside the tank 1, which can effectively improve the filling effect and efficiency.

[0056] Example 4: like Figure 2-4 As shown, the only technical feature that differs from Embodiment 3 is that the upper end of the isolation float 32 is also provided with an expansion airbag 35. The expansion airbag 35 is annular and embedded in the isolation float 32, and is connected to the air passage of the air inlet pipe 341. The isolation float 32 is connected to an abutment ring 37 that slides and seals against the inner wall of the tank 1 through an extension arm 36. The abutment ring 37 is located above the gas collection ring 343. The expansion airbag 35 is in the direction of the inner ring side of the abutment ring 37. After inflation, the expansion airbag 35 can expand towards the abutment ring 37 and form a seal after sticking to the abutment ring 37.

[0057] Apart from that, all other structures are identical.

[0058] The working principle of Example 4 is explained in detail below: In this fourth embodiment, in order to further improve the filling efficiency and effect of inert gas and reduce the amount of inert gas, specifically, the air inlet pipe 341 is an electrically controlled three-way pipe, one opening is the inert gas inlet, the other is connected to the first hose 38, and the last one is connected to the expansion bladder 35. Before the inert gas is introduced into the tank 1, the air passage between the air inlet pipe 341 and the expansion bladder 35 is connected first. At this time, the introduced inert gas will fill the expansion bladder 35 and cause it to expand until the entire expansion bladder 35 is sealed against the abutment ring 37. Then, the inert gas is introduced through the air passage connecting the air inlet pipe 341 and the first hose 38. When the expansion bladder 35 and the isolation ring 37 form a seal, the space between the liquid level on the upper surface of the adhesive and the expansion bladder 35 becomes relatively closed and small. At this time, the inert gas introduced into the tank 1 will flow into this space. This not only allows for the efficient filling of inert gas, but also significantly reduces the amount of inert gas required, thereby reducing production costs. At the same time, it also makes the mixing environment of the adhesive relatively closed, preventing the adhesive from splashing upwards and falling into the isolation float 32 during the mixing process, further reducing the difficulty of equipment maintenance, and making production activities more convenient.

[0059] After processing, keep the inflatable airbag 35 connected to the air intake pipe 341. At this time, the inert gas in the inflatable airbag 35 will be depressurized and discharged, and the inflatable airbag 35 will be able to return to its original elastic state.

[0060] Example 5: like Figure 3-4 As shown, the only technical feature that differs from Embodiment 3 is that an injector 4 located on the upper side of the isolation float 32 is provided between the air inlet pipe 341 and the nozzle 342. The injector 4 includes a storage tank 41 and a venturi tube 42. The storage tank 41 is used to store modified alumina. The throat of the venturi tube 42 is connected to the storage tank 41, and the air inlet end of the venturi tube 42 is connected to the air inlet pipe 341. The exhaust end of the venturi tube 42 is connected to the air inlet end of the nozzle 342. The venturi tube 42 can draw out the modified alumina in the storage tank 41 when inert gas passes through, and spray it into the medium in the tank body 1 through the nozzle 342.

[0061] Apart from that, all other structures are identical.

[0062] The working principle of Example 5 is explained in detail below: In this fifth embodiment, to further improve the uniformity of mixing and avoid the formation of clumps or flocs due to the surface tension of the nano-modified alumina filler during the mixing process with epoxy resin, which would lead to problems such as extended mixing time or poor uniformity after mixing, specifically, while the inert gas is introduced into the tank 1, the inert gas with a certain pressure passes through the throat of the venturi tube 42. The alumina powder in the storage tank 41 connected to the throat of the venturi tube 42 will be drawn into the venturi tube 42. At this time, the alumina powder will mix with the inert gas and finally be sprayed into the tank 1 in a relatively dispersed state. In this way, while replenishing the inert gas during the mixing process, the alumina powder can be slowly added to the adhesive by the inert gas for mixing, thereby avoiding the formation of clumps and other phenomena caused by adding a large amount at once.

[0063] The upper side of the storage tank 41 is provided with a gas supply pipe that is connected to an external inert gas storage container to balance the pressure difference change after the alumina in the storage tank 41 is sucked away. In other embodiments, a separate on / off valve can be provided between the storage tank 41 and the venturi tube 42 to meet the needs of feeding and inert gas replenishment.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be covered within the scope of the claims and specification of the present invention.

Claims

1. An electrostatic chuck bonding adhesive mixing device, characterized in that, include: Tank (1), the tank (1) is provided with a feed inlet (11) and a discharge outlet (12); A stirring mechanism (2) is provided inside the tank (1) and is used to stir the medium inside the tank (1); Isolation mechanism (3) is located inside the tank (1) and is slidably connected to the stirring mechanism (2) to isolate the liquid surface of the medium inside the tank (1) from the upper space inside the tank (1).

2. The electrostatic chuck bonding adhesive mixer according to claim 1, characterized in that, The stirring mechanism (2) includes a motor (21), a stirring shaft (22), and stirring blades (23). The motor (21) is fixedly mounted on the upper end of the tank (1). The stirring shaft (22) is coaxially rotatably mounted inside the tank (1) and is connected to the rotating shaft of the motor (21) via a transmission connection. Several stirring blades (23) are evenly mounted on the stirring shaft (22). The motor (21) can drive the stirring shaft (22) to rotate via the rotating shaft and stir the medium inside the tank (1) via the stirring blades (23).

3. The electrostatic chuck bonding adhesive mixing device according to claim 1, characterized in that, The tank (1) is provided with a spiral jacket (13) on its side, and the upper and lower sides of the tank (1) are respectively provided with an inlet pipe (14) and an outlet pipe (15) connected to the liquid path of the spiral jacket (13). The spiral jacket (13), the inlet pipe (14) and the outlet pipe (15) are used to input cooling water to cool the medium in the tank (1).

4. The electrostatic chuck bonding adhesive mixer according to claim 2, characterized in that, The isolation mechanism (3) includes: a telescopic device (31) and an isolation float (32). The isolation float (32) is slidably connected to the stirring shaft (22) along the axial direction of the stirring shaft (22), and the stirring shaft (22) can rotate relative to the isolation float (32). The inner side wall of the tank (1) is fixedly provided with a guide rib (33) that is fitted and slidably with the isolation float (32). The telescopic device (31) is fixedly provided at the upper end of the tank (1), and its telescopic shaft is connected to the isolation float (32).

5. The electrostatic chuck bonding adhesive mixing device according to claim 4, characterized in that, Several stirring shafts (22) are evenly distributed along their axial direction and are all located below the isolation float (32). The stirring blade (23) includes a sliding sleeve (231), a blade (232), and an elastic element (233). The sliding sleeve (231) is slidably connected to the stirring shaft (22) along its axial direction, and a guide rib is provided between them. The guide rib can restrict the sliding sleeve (231) from rotating circumferentially relative to the stirring shaft (22). The blade (232) is located on the side of the sliding sleeve (231). The elastic element (233) is sleeved on the outer wall of the stirring shaft (22), and one end is connected to the lower end of the upper adjacent sliding sleeve (231). The other end of the elastic element (233) is connected to the upper end of the lower adjacent sliding sleeve (231). The elastic element (233) can push two adjacent sliding sleeves (231) away from each other.

6. The electrostatic chuck bonding adhesive mixing device according to claim 4, characterized in that, The isolation float (32) is also provided with a pumping assembly (34), which is connected to an external air passage and is used to deliver inert gas into the tank (1) and discharge the air in the tank (1).

7. The electrostatic chuck bonding adhesive mixing device according to claim 6, characterized in that, The air pump assembly (34) includes: an air inlet pipe (341), a nozzle (342), an air collection ring (343), and a return pipe (344). The air inlet pipe (341) and the return pipe (344) are both located at the upper end of the tank body (1). The nozzle (342) is located on the isolation float (32) and the spray end faces downward. The nozzle (342) is connected to the air inlet pipe (341) through a first hose (38). The isolation float (32) has a downwardly recessed cover-like structure. The gas collecting ring (343) is located on the upper side inside the isolation float (32) and works with the isolation float (32) to form a closed space inside the tank (1). The gas collecting ring (343) has a gas hole that communicates with the space inside the tank (1). The gas collecting ring (343) is connected to the return gas pipe (344) through the second hose (39).

8. The electrostatic chuck bonding adhesive mixing device according to claim 7, characterized in that, The upper end of the isolation float (32) is also provided with an expansion airbag (35). The expansion airbag (35) is annular and embedded in the isolation float (32), and is connected to the air passage of the air inlet pipe (341). The isolation float (32) is connected to an abutment ring (37) that slides and seals with the inner wall of the tank (1) through an extension arm (36). The abutment ring (37) is located on the upper side of the gas collection ring (343). After inflation, the expansion airbag (35) can expand to the abutment ring (37) and form a seal after sticking to the abutment ring (37).

9. An electrostatic chuck bonding adhesive mixing device according to claim 7, characterized in that, A sprayer (4) located on the upper side of the isolation float (32) is also provided between the air inlet pipe (341) and the nozzle (342). The sprayer (4) includes a storage tank (41) and a venturi tube (42). The storage tank (41) is used to store modified alumina. The throat of the venturi tube (42) is connected to the storage tank (41), and the air inlet end of the venturi tube (42) is connected to the air inlet pipe (341). The exhaust end of the venturi tube (42) is connected to the air inlet end of the nozzle (342). The venturi tube (42) can draw out the modified alumina in the storage tank (41) when inert gas passes through, and spray it into the medium in the tank body (1) through the nozzle (342).

10. The electrostatic chuck bonding adhesive mixer according to claim 1, characterized in that, An ultrasonic probe (16) is provided on the lower side of the tank (1).

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