Photoresist high viscosity quantitative glue supply pump

Abstract

This invention discloses a high-viscosity photoresist metering pump, including a mounting frame with electric push rods installed on the inner wall of the frame. A pressure frame is used to bond and fix the rubber ring, and the electric push rods create a stable pushing and pressurizing effect on the pressure frame, providing pressure assistance for the delivery of high-viscosity photoresist inside the metering tube. This effectively achieves assisted pressurized metering of photoresist. Paraffin blocks are injected and filled into the internal cavity of the main delivery shaft. The heating tube is fitted into the inner wall of the main delivery shaft in a snap-fit ​​manner. Based on the centrally located structure of the main delivery shaft, the photoresist flowing through it can be uniformly and constantly heated, effectively preventing the high-viscosity photoresist from cooling and solidifying, thus preventing blockage of the flow channel. Simultaneously, the built-in paraffin blocks can utilize their phase change characteristics to store and slowly release the heat generated by the heating tube, stably maintaining the internal temperature of the cavity and reducing heat loss.

Description

Technical Field

[0001] This invention relates to the technical field of semiconductor manufacturing equipment, specifically to a high-viscosity quantitative photoresist supply pump. Background Technology

[0002] With the development of integrated circuit manufacturing technology towards nodes below 7nm and the widespread application of advanced packaging technologies, the use of high-viscosity photoresists is becoming increasingly common. In the photolithography process, the accuracy of the quantitative supply of photoresist directly determines the uniformity of the film thickness on the wafer surface. Therefore, we need a high-viscosity photoresist metering pump.

[0003] Currently used high-viscosity photoresist metering pumps lack targeted positioning and guiding assembly structures, making it difficult to achieve precise alignment and rapid guidance installation of various internal drive components. This results in significant inconvenience for assembly, disassembly, and subsequent maintenance. Furthermore, the lack of a pressure-assisted discharge structure adapted to high-viscosity media prevents the smooth discharge of high-viscosity photoresist through pressure, limiting the metering effect. Additionally, the pump body lacks integrated heating and temperature control components, failing to maintain a constant temperature for the photoresist within the pump chamber and flow channels. This hinders effective anti-coagulation protection, easily leading to photoresist stagnation, clumping, and pipeline blockage. Moreover, the lack of phase-change heat storage structures makes it difficult to store and release heat generated during operation or from the heating system in a balanced manner. This results in heat loss and an inability to maintain a stable internal temperature environment, further exacerbating photoresist coagulation and reducing dispensing accuracy. Summary of the Invention

[0004] The purpose of this invention is to provide a high-viscosity metering pump for photoresist to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A high-viscosity photoresist metering pump includes a mounting frame. Electric push rods are mounted on the inner wall of the mounting frame. A pressure frame is mounted at one end of each electric push rod. Rubber rings are mounted on the outer wall of each pressure frame. A glue cylinder is located at the lower end of the pressure frame. A metering glue supply tube is welded to one end of the glue cylinder. A main conveying shaft is mounted on the inner wall of the metering glue supply tube. A secondary conveying shaft is mounted on the outer wall of the main conveying shaft. Movable seals are mounted at both ends of the secondary conveying shaft. Paraffin blocks are mounted on the inner wall of the main conveying shaft. A sealing sleeve is mounted at one end of the main conveying shaft. A heating tube is installed inside the main conveying shaft. A connector is welded to the other end of the main conveying shaft. A clamp is mounted on one side of the connector. A drive motor is welded to one side of the clamp. Positioning rods are mounted on the inner wall of each drive motor. A discharge head is located on the outer wall of the metering glue supply tube.

[0006] Preferably, the electric push rod is engaged with the pressure frame, and the electric push rod is symmetrically arranged about the central axis of the pressure frame.

[0007] Preferably, the outer wall of the pressure frame is tightly fitted to the inner wall of the rubber ring, and the rubber rings are arranged at equal intervals on the outer wall of the pressure frame.

[0008] Preferably, the inner wall of the main conveying shaft is in close contact with the outer wall of the paraffin block, and the inner diameter of the main conveying shaft is larger than the outer diameter of the paraffin block.

[0009] Preferably, the main conveying shaft is threadedly connected to the sealing sleeve, and the inner wall of the sealing sleeve is threaded.

[0010] Preferably, the heating tube is engaged with the main conveyor shaft, and the inner wall of the main conveyor shaft has a slotted design.

[0011] Preferably, the connector and the clip are engaged, and the clip has a tapered structure.

[0012] Preferably, the drive motor is threadedly connected to the positioning rod, and the positioning rod is symmetrically arranged about the central axis of the drive motor.

[0013] Compared with the prior art, the beneficial effects of the present invention are: The system utilizes a pressure frame to bond and fix the rubber ring, and then an electric push rod to create a stable pushing and pressurizing effect on the pressure frame. This provides pressure assistance for the delivery of high-viscosity photoresist inside the metering tube, effectively achieving auxiliary pressurized metering of photoresist. The main delivery shaft's internal cavity is filled with paraffin blocks, and the heating tube is fitted into the inner wall of the main delivery shaft in a snap-fit ​​manner. Relying on the centrally positioned structure of the main delivery shaft, the photoresist flowing through it can be uniformly and constantly heated, effectively preventing the high-viscosity photoresist from cooling and solidifying and clogging the flow channel. At the same time, the built-in paraffin blocks can utilize their own phase change characteristics to store and slowly release the heat generated by the heating tube, stably maintaining the internal temperature of the cavity and reducing heat loss. In addition, the connector adopts a funnel-shaped slotted structure, which can provide good guidance and limitation for the tapered clamp at the end of the drive motor, facilitating quick alignment and snap-fit ​​assembly of the tapered clamp and the connector, realizing rapid guidance and installation of the device's drive components, and greatly improving the convenience of assembly and subsequent disassembly and maintenance. Attached Figure Description

[0014] Figure 1 This is a front view structural diagram of a high-viscosity photoresist metering pump according to the present invention. Figure 2 This is a rear view structural diagram of a high-viscosity photoresist metering pump according to the present invention. Figure 3 This is a split-section view of the high-viscosity photoresist metering pump of the present invention. Figure 4 This invention relates to a high-viscosity photoresist metering pump. Figure 3 Enlarged structural diagram of section A in the middle; Figure 5 This invention relates to a high-viscosity photoresist metering pump. Figure 1 Enlarged structural diagram of section B.

[0015] In the diagram: 1. Mounting frame; 2. Electric push rod; 3. Pressure frame; 4. Rubber ring; 5. Glue cylinder; 6. Quantitative glue supply tube; 7. Main conveyor shaft; 8. Auxiliary conveyor shaft; 9. Movable seal; 10. Paraffin block; 11. Sealing sleeve; 12. Heating tube; 13. Connector; 14. Clamp; 15. Drive motor; 16. Positioning rod; 17. Discharge head. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Please see Figure 1-5 This invention provides a technical solution for a high-viscosity quantitative photoresist supply pump: A high-viscosity photoresist metering pump includes a mounting frame 1. Electric push rods 2 are mounted on the inner wall of the mounting frame 1. A pressure frame 3 is mounted on one end of each electric push rod 2. Rubber rings 4 are mounted on the outer wall of each pressure frame 3. A glue cylinder 5 is located at the lower end of the pressure frame 3. A metering glue supply tube 6 is welded to one end of the glue cylinder 5. A main conveying shaft 7 is mounted on the inner wall of the metering glue supply tube 6. A secondary conveying shaft 8 is mounted on the outer wall of the main conveying shaft 7. Movable seals 9 are mounted at both ends of the secondary conveying shaft 8. Paraffin blocks 10 are mounted on the inner wall of the main conveying shaft 7. A sealing sleeve 11 is mounted on one end of the main conveying shaft 7. A heating tube 12 is installed inside the main conveying shaft 7. A connector 13 is welded to the other end of the main conveying shaft 7. A clamp 14 is mounted on one side of the connector 13. A drive motor 15 is welded to one side of the clamp 14. Positioning rods 16 are mounted on the inner wall of each drive motor 15. A discharge head 17 is located on the outer wall of the metering glue supply tube 6.

[0018] The electric push rod 2 is engaged with the pressure frame 3, and the electric push rod 2 is symmetrically arranged about the central axis of the pressure frame 3.

[0019] The outer wall of the pressure frame 3 is tightly fitted to the inner wall of the rubber ring 4, and the rubber ring 4 is evenly spaced on the outer wall of the pressure frame 3.

[0020] The inner wall of the main conveying shaft 7 is in close contact with the outer wall of the paraffin block 10, and the inner diameter of the main conveying shaft 7 is larger than the outer diameter of the paraffin block 10.

[0021] The main conveyor shaft 7 is threadedly connected to the sealing sleeve 11, and the inner wall of the sealing sleeve 11 is threaded.

[0022] The heating tube 12 is engaged with the main conveyor shaft 7, and the inner wall of the main conveyor shaft 7 is designed with a slotted shape.

[0023] The connector 13 and the locking head 14 engage and connect, and the locking head 14 has a tapered structure.

[0024] The drive motor 15 is threadedly connected to the positioning rod 16, and the positioning rod 16 is symmetrically arranged about the central axis of the drive motor 15.

[0025] It should be noted that this invention is a high-viscosity quantitative photoresist supply pump. In use, the device is removed and placed in the designated position. Then, the clamp 14 at one end of the drive motor 15 is inserted into the connector 13. The positioning rod 16 is threaded onto the drive motor 15. The paraffin block 10 is heated and injected into the main conveyor shaft 7. The sealing sleeve 11 is then threaded onto the main conveyor shaft 7. The heating tube 12 is engaged and fixed onto the main conveyor shaft 7. The adhesive is then injected into the adhesive cartridge 5. The electric push rod 2 is opened and pressed down on the pressure frame 3, forcing the adhesive into the quantitative supply tube 6. The heating tube 12 is opened and heats the interior. Finally, the drive motor 15 is turned on, driving the main conveyor shaft 7 to rotate. The main conveyor shaft 7 drives the auxiliary conveyor shaft 8 to rotate synchronously, discharging the adhesive from the discharge head 17. This completes the high-viscosity photoresist quantitative supply pump.

[0026] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-viscosity photoresist metering pump, characterized in that: The system includes a mounting frame (1), on the inner wall of which are installed electric push rods (2). One end of each electric push rod (2) is fitted with a pressure frame (3). The outer wall of each pressure frame (3) is fitted with rubber rings (4). A rubber cylinder (5) is provided at the lower end of the pressure frame (3). A metering supply tube (6) is welded to one end of the rubber cylinder (5). A main conveying shaft (7) is installed on the inner wall of the metering supply tube (6). A secondary conveying shaft (8) is installed on the outer wall of the main conveying shaft (7). Movable seals (9) are installed at both ends of the secondary conveying shaft (8). The inner wall of the main conveying shaft (7) is fitted with a paraffin block (10), a sealing sleeve (11) is fitted at one end of the main conveying shaft (7), a heating tube (12) is fitted inside the main conveying shaft (7), a connector (13) is welded to the other end of the main conveying shaft (7), a clamp (14) is fitted on one side of the connector (13), a drive motor (15) is welded to one side of the clamp (14), a positioning rod (16) is fitted on the inner wall of the drive motor (15), and a discharge head (17) is provided on the outer wall of the metering glue supply tube (6).

2. The high-viscosity metering pump for photoresist according to claim 1, characterized in that: The electric push rod (2) is engaged with the pressure frame (3), and the electric push rod (2) is symmetrically arranged about the central axis of the pressure frame (3).

3. The high-viscosity metering pump for photoresist according to claim 1, characterized in that: The outer wall of the pressure frame (3) is tightly fitted to the inner wall of the rubber ring (4), and the rubber ring (4) is arranged at equal intervals on the outer wall of the pressure frame (3).

4. The high-viscosity metering pump for photoresist according to claim 1, characterized in that: The inner wall of the main conveying shaft (7) is closely fitted with the outer wall of the paraffin block (10), and the inner diameter of the main conveying shaft (7) is larger than the outer diameter of the paraffin block (10).

5. The high-viscosity photoresist metering pump according to claim 1, characterized in that: The main conveying shaft (7) is threadedly connected to the sealing sleeve (11), and the inner wall of the sealing sleeve (11) is threaded.

6. The high-viscosity photoresist metering pump according to claim 1, characterized in that: The heating tube (12) is engaged with the main conveying shaft (7), and the inner wall of the main conveying shaft (7) is designed with a slot.

7. The high-viscosity metering pump for photoresist according to claim 1, characterized in that: The connector (13) engages with the locking head (14), and the locking head (14) is a tapered structure.

8. The high-viscosity photoresist metering pump according to claim 1, characterized in that: The drive motor (15) is threadedly connected to the positioning rod (16), and the positioning rod (16) is symmetrically arranged with respect to the central axis of the drive motor (15).

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