Vacuum monitoring structure, rigid vacuum structure

Abstract

This application relates to a vacuum monitoring structure for monitoring the vacuum level within a vacuum chamber. The vacuum monitoring structure includes: a tube; a flexible sealing membrane connected in a sealed manner to one end of the tube; an observation cover covering the other end of the tube, the observation cover having an extraction port, and the observation cover being partially or entirely made of transparent material, allowing the flexible sealing membrane to be observed from the outside; and a sealing structure for sealing the extraction port. The vacuum chamber includes a chamber wall, the outer surface of the tube is used for a sealed connection with the chamber wall, one end of the tube is disposed within the vacuum chamber, and the observation cover is used for a sealed connection with the chamber wall. This application allows direct observation of the deformation of the flexible sealing membrane through the observation cover, thereby determining the air pressure within the vacuum chamber.

Description

Technical Field

[0001] This application relates to vacuum insulation materials, and more particularly to vacuum degree monitoring of vacuum insulation materials. Background Technology

[0002] Vacuum insulation structures, typically vacuum insulation panels, usually consist of a membrane bag formed by a barrier film and a core material filled inside the bag. The core material is usually prepared by laminating micro- and nano-materials. Commonly used micro- and nano-materials include fumed silica, nanoparticles, and glass fibers. After the core material is packaged in the membrane bag and then evacuated, the bag is sealed with adhesive, resulting in a vacuum insulation structure with high vacuum and low thermal conductivity, which can be below 3 mW / mK. However, this type of vacuum insulation structure has relatively low strength and cannot be directly used as a structural component in the final product. It requires composite polyurethane rigid foam materials and metal structural components to improve processing strength and molding capability, thus inevitably resulting in structural thermal bridges, which reduces its insulation performance. At the same time, the thickness and dimensions of the above-mentioned vacuum insulation structure are controlled by the overall strength of the core material and the air pressure, making precise design impossible and increasing the difficulty of structural component design.

[0003] Currently, there is a process for infusing micro / nano materials into the cavity of a rigid, sealed structural component, followed by vacuuming to create an insulating structure. This reduces processing difficulty and thermal bridging effects. These insulating structures typically require secondary evacuation to lower the vacuum level during use to maintain long-term effectiveness. However, because the rigid structure with an internal vacuum does not deform in the atmosphere, changes in the internal vacuum level are difficult to observe externally, making it impossible to effectively monitor its remaining insulation capacity. Adding vacuum measuring equipment to these structures introduces additional connection ports, increasing the risk of leakage, and also incurs additional costs. Alternatively, vacuum levels can be detected using methods such as ionization gauges, but this also requires additional equipment and increases testing and maintenance costs. Summary of the Invention

[0004] This application provides a vacuum degree monitoring structure and a rigid vacuum structural component to solve the technical problem that it is difficult to monitor the vacuum degree of a rigid thermal insulation structural component that is being evacuated.

[0005] In a first aspect, embodiments of this application provide a vacuum monitoring structure, wherein the vacuum monitoring mechanism is used to monitor the vacuum level within a vacuum cavity, and the vacuum monitoring structure includes:

[0006] tube body;

[0007] A flexible sealing membrane material is sealed to one end of the tube body;

[0008] An observation cover is provided to cover the other end of the tube. The observation cover is provided with an air extraction hole. Part or all of the material of the observation cover is transparent, so that the flexible sealing membrane can be observed from the outside of the observation cover.

[0009] A sealing structure is used to block the air extraction port.

[0010] The vacuum chamber includes a chamber wall, the outer surface of the tube is used to be sealed to the vacuum chamber wall, one end of the tube is disposed inside the vacuum chamber, and the observation cover is used to be sealed to the chamber wall.

[0011] The vacuum monitoring structure described in this application includes a tube body. A flexible sealing membrane is provided at one end of the tube body, and an observation cover is provided at the other end of the tube body. After the tube body, the flexible sealing membrane, and the observation cover are installed in accordance with the method described in this application, an observation cavity is formed between the observation cover, the cavity wall, the tube body, and the flexible sealing membrane. When there is a pressure difference between the observation cavity and the vacuum cavity, the flexible sealing membrane will deform, and the deformation of the flexible sealing membrane can be directly observed through the observation cover, thereby determining the air pressure status in the vacuum cavity.

[0012] In some embodiments of this application, the flexible sealing membrane is disposed at the end of the tube body away from the observation cover.

[0013] In some embodiments of this application, the vacuum monitoring structure further includes a protective cover, which is disposed on the flexible sealing membrane material and has a breathable structure.

[0014] In some embodiments of this application, the protective cover is a mesh structure.

[0015] In some embodiments of this application, the flexible sealing membrane material is a composite membrane material of flexible polymer membrane and aluminum membrane.

[0016] In some embodiments of this application, the flexible polymer membrane comprises at least one layer of polymer material.

[0017] In some embodiments of this application, the material of the flexible polymer membrane includes at least one of polyethylene terephthalate, polyethylene, and polyimide.

[0018] In some embodiments of this application, the thickness of the flexible polymer film is 5–100 μm; and / or,

[0019] The thickness of the aluminum film is 10–200 nm.

[0020] In some embodiments of this application, the thickness of the flexible polymer film is 10–50 μm; and / or,

[0021] The thickness of the aluminum film is 20–100 nm.

[0022] In some embodiments of this application, the thickness of the aluminum film is 50–80 nm.

[0023] Secondly, embodiments of this application provide a rigid vacuum structure, the rigid vacuum structure comprising:

[0024] A rigid structural component having a vacuum cavity, the vacuum cavity including a cavity wall;

[0025] In any embodiment of the first aspect, the outer surface of the tube body is sealed to the wall of the vacuum chamber, and the observation cover is sealed to the wall of the chamber.

[0026] In some embodiments of this application, the vacuum cavity is filled with a vacuum insulation core material.

[0027] In some embodiments of this application, the material of the vacuum insulation core material includes glass fiber, polymer fiber, and powder material. Attached Figure Description

[0028] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of a rigid vacuum structure provided in an embodiment of this application;

[0031] Figure 2 For this application Figure 1 Enlarged view of area A in the middle;

[0032] Figure 3 For this application Figure 1 A schematic diagram of the deformation of the flexible sealing membrane material described in area A. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] Unless otherwise specified, the terminology used herein should be understood as having the meaning commonly used in the art. Therefore, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. In case of any conflict, this specification shall prevail.

[0035] Unless otherwise specified, all raw materials, reagents, instruments and equipment used in this application can be purchased from the market or prepared by existing methods.

[0036] There is a technical problem that the vacuum level of existing rigid thermal insulation structural components is difficult to monitor.

[0037] The technical solution provided in this application is to solve the above-mentioned technical problems, and the general idea is as follows:

[0038] Firstly, this application provides a vacuum monitoring structure 3, please refer to... Figure 1 , Figure 2 , Figure 3 The vacuum monitoring mechanism is used to monitor the vacuum level inside the vacuum chamber 1, and the vacuum monitoring structure 3 includes:

[0039] Tube body 31;

[0040] A flexible sealing membrane 32 is sealed to one end of the tube body 31.

[0041] An observation cover 33 is used to cover the other end of the tube 31. The observation cover 33 is provided with an air extraction hole 331. Part or all of the material of the observation cover 33 is transparent, so that the flexible sealing membrane 32 can be observed from the outside of the observation cover 33.

[0042] A sealing structure is provided to block the air extraction port 331.

[0043] The vacuum chamber 1 includes a chamber wall 2, the outer surface of the tube 31 is used to be sealed to the wall of the vacuum chamber 1, one end of the tube 31 is disposed inside the vacuum chamber 1, and the observation cover 33 is used to be sealed to the chamber wall 2.

[0044] It is easy to understand that since the flexible sealing membrane 32 is sealed to one end of the tube 31, the vacuum chamber 1 does not exchange gas with the outside through the tube 31, making the vacuum chamber 1 a sealed cavity. The observation cover 33 is used to seal to the cavity wall 2. After the evacuation port 331 is blocked by the sealing structure, another sealed chamber is formed between the observation cover 33, the cavity wall 2, the tube 31, and the flexible sealing membrane 32, which is here named the observation chamber. Because the flexible sealing membrane 32 is flexible, it will deform accordingly when there is a pressure difference between the vacuum chamber 1 and the observation chamber. Furthermore, since part or all of the material of the observation cover 33 is transparent, the flexible sealing membrane 32 can be observed from the outside of the observation cover 33. Therefore, the deformation of the flexible sealing membrane 32 can be directly observed with the naked eye, allowing for the estimation of whether there is a pressure difference between the vacuum chamber 1 and the observation chamber, and which pressure is greater.

[0045] The inspector can evacuate air from the observation chamber through the evacuation port 331, thereby controlling the air pressure in the observation chamber to be the same as the originally preset air pressure of the vacuum chamber 1, and thus determining whether the air pressure of the vacuum chamber 1 deviates from the originally preset air pressure. As an example, a product has the vacuum chamber 1, and the preset air pressure inside the vacuum chamber 1 when the product leaves the factory is 1 Pa. After evacuating air from the observation chamber through the evacuation port 331, its internal air pressure also reaches 1 Pa. Please refer to... Figure 2 At this point, since the air pressure inside the observation chamber and the vacuum chamber 1 is equal, the flexible sealing membrane 32 does not deform. After a period of use, the product with the vacuum chamber 1 is observed through the observation cover 33 to check the shape of the flexible sealing membrane 32. If the flexible sealing membrane 32 still does not deform, it indicates that the air pressure inside the vacuum chamber 1 is still maintained at 1 Pa, and there is no need for secondary evacuation; please refer to... Figure 3 If the flexible sealing membrane 32 protrudes significantly to one side of the observation cover 33, it indicates that the air pressure inside the vacuum chamber 1 has increased to a certain extent. In this case, it is necessary to consider performing a secondary evacuation process on the product with the vacuum chamber 1.

[0046] The material of the tube body 31 can be any airtight material, as long as the material of the tube body 31 prevents air from permeating between the vacuum cavity 1 and the observation cavity.

[0047] The observation cover 33 is made of a material that has a certain degree of rigidity, can withstand atmospheric pressure, and is transparent. It can be a transparent material such as glass or a transparent polymer. The transparent polymer can be, for example, at least one of polyethylene terephthalate, polymethyl methacrylate, polystyrene, polycarbonate, transparent MS plastic, and transparent nylon.

[0048] The sealing structure is typically directly disposed in the vent 331, and automatically seals after the venting operation through the vent 331 is completed. The sealing structure can be a conventional mechanical seal structure in the art, such as the structure of a bicycle valve.

[0049] The vacuum monitoring structure 3 described in this application includes a tube 31. A flexible sealing membrane 32 is provided at one end of the tube 31, and an observation cover 33 is provided at the other end of the tube 31. After the tube 31, the flexible sealing membrane 32, and the observation cover 33 are installed in the manner described in this application, an observation cavity is formed between the observation cover 33, the cavity wall 2, the tube 31, and the flexible sealing membrane 32. When there is a pressure difference between the observation cavity and the vacuum cavity 1, the flexible sealing membrane 32 will deform, and the deformation of the flexible sealing membrane 32 can be directly observed through the observation cover 33, thereby determining the air pressure status inside the vacuum cavity 1.

[0050] In some embodiments of this application, the flexible sealing membrane 32 is disposed at the end of the tube 31 away from the observation cover 33.

[0051] The flexible sealing membrane 32 is disposed at the end of the tube body 31 away from the observation cover 33, which allows the flexible sealing membrane 32 to be far away from the observation cover 33, thereby allowing the flexible sealing membrane 32 to have a larger deformation space.

[0052] In some embodiments of this application, the vacuum monitoring structure 3 further includes a protective cover 34, which covers the flexible sealing membrane 32 and has a breathable structure.

[0053] The vacuum chamber 1 may be filled with certain filling materials. The protective cover 34 can prevent the filling materials from contacting the flexible sealing membrane 32, thereby affecting its deformation. The protective cover 34 does not need to withstand atmospheric pressure and can be made of general rigid materials, such as ordinary plastics, ceramics, or metals.

[0054] In some embodiments of this application, the protective cover 34 is a mesh structure.

[0055] It is easy to understand that the protective cover 34 has a mesh structure, which allows it to be fully breathable, thereby enabling the flexible sealing membrane 32 to respond sensitively to changes in air pressure inside the vacuum chamber 1.

[0056] In some embodiments of this application, the flexible sealing membrane 32 is a composite membrane material of flexible polymer membrane and aluminum membrane.

[0057] It's easy to understand that aluminum alone has good sealing properties, but poor flexibility and toughness. Polymer alone has good flexibility and toughness, but its sealing properties are not as good as aluminum. The flexible sealing membrane 32 is a composite material of a flexible polymer membrane and an aluminum membrane, which combines flexibility, toughness, and excellent sealing properties.

[0058] In some embodiments of this application, the flexible polymer membrane comprises at least one layer of polymer material.

[0059] It is easy to understand that the flexible polymer membrane can be a composite membrane material formed by combining multiple layers of different polymer materials, thereby combining the advantages of different polymer materials.

[0060] In some embodiments of this application, the material of the flexible polymer membrane includes at least one of polyethylene terephthalate, polyethylene, and polyimide.

[0061] Polyethylene phthalate is typically a milky white or light yellow, highly crystalline polymer with excellent mechanical properties and chemical stability. It also exhibits low gas and water vapor permeability, providing excellent gas and water barrier properties. Polyethylene can be made into highly flexible films with good toughness and chemical stability. Polyimide possesses excellent flexibility, toughness, and strength, along with good chemical stability. Using at least one of these materials means that flexible polymer films can be made from a single material, a mixture of these materials, or a laminated structure. This flexibility allows designers to tailor the film's performance to specific needs.

[0062] In some embodiments of this application, the thickness of the flexible polymer film is 5–100 μm; and / or,

[0063] The thickness of the aluminum film is 10–200 nm.

[0064] Thickness of the flexible polymer membrane: The thickness of this membrane is set between 5 and 100 micrometers (μm). A micrometer is a unit of length, and 1 micrometer equals one-thousandth of a millimeter. This thickness selection has several advantages: High strength: Thickness within this range ensures that the membrane is not easily broken when subjected to external forces or deformation, possessing sufficient strength to withstand the pressure or stretching of daily use. High flexibility: At the same time, this thickness also allows the membrane to maintain high flexibility, easily deforming, such as bending or stretching, without becoming stiff. Sensitive response to pressure changes: Due to the membrane's flexibility, when the pressure inside the vacuum chamber it surrounds (referring to "within vacuum chamber 1") changes, the membrane can quickly and sensitively reflect this change through deformation. Thickness of the aluminum membrane: The thickness of another key material is set between 10 and 200 nanometers (nm). A nanometer is a smaller unit of length, and 1 nanometer equals one-billionth of a meter. This ensures both the sealing and flexibility of the aluminum membrane.

[0065] In this embodiment, by carefully selecting the thicknesses of the flexible polymer film and the aluminum film, the strength, flexibility and other possible performance requirements of the materials can be taken into account, thereby optimizing the overall product performance, especially the sensitivity and reliability in reflecting changes in gas pressure within the vacuum chamber.

[0066] As an example, the thickness of the flexible polymer film can be 5μm, 10μm, 20μm, 50μm, or 100μm.

[0067] As an example, the thickness of the aluminum film can be 10nm, 50nm, 100nm, 150nm, or 200nm.

[0068] In some embodiments of this application, the thickness of the flexible polymer film is 10–50 μm; and / or,

[0069] The thickness of the aluminum film is 20–100 nm.

[0070] The beneficial effect of having a thickness of 10-50 μm in the flexible polymer membrane is that it can ensure that the flexible polymer membrane has high strength and is not easy to break when the deformation is large; at the same time, it can maintain high flexibility, so that it can undergo very obvious deformation and thus very sensitively reflect the pressure changes in the vacuum chamber 1.

[0071] The advantage of having an aluminum film thickness of 20-100 nm is that it ensures both high sealing performance and high flexibility.

[0072] As an example, the thickness of the flexible polymer film can be 10μm, 20μm, 30μm, 40μm, or 50μm.

[0073] As an example, the thickness of the aluminum film can be 20nm, 40nm, 60nm, 80nm, or 100nm.

[0074] In some embodiments of this application, the thickness of the aluminum film is 50–80 nm.

[0075] The advantage of having an aluminum film thickness of 50-80 nm is that it provides excellent sealing and flexibility.

[0076] As an example, the thickness of the aluminum film can be 50nm, 60nm, 70nm, or 80nm.

[0077] Secondly, embodiments of this application provide a rigid vacuum structure, the rigid vacuum structure comprising:

[0078] A rigid structural component, the rigid structural component having a vacuum cavity 1, the vacuum cavity 1 including a cavity wall 2;

[0079] In any embodiment of the first aspect, the vacuum monitoring structure 3 has the outer surface of the tube 31 sealed to the wall of the vacuum chamber 1, and the observation cover 33 sealed to the chamber wall 2.

[0080] This application provides a rigid vacuum structure, which mainly consists of two core parts: a rigid structure and a vacuum monitoring structure. The rigid structure has one or more vacuum chambers, formed within a rigid material using a specific process. Vacuum chamber 1 is surrounded by a chamber wall 2. The chamber wall 2 is part of the rigid structure and ensures the integrity and sealing of the vacuum chamber. The vacuum monitoring structure 3 is used to monitor the vacuum level within vacuum chamber 1, ensuring the vacuum condition meets expectations. The outer surface of the vacuum monitoring structure 3 is sealed to the wall (chamber wall 2) of vacuum chamber 1. This connection ensures a seal between the tube 31 and the vacuum chamber, preventing gas or liquid leakage. An observation hood 33 is sealed to the chamber wall 2 and may be used to observe the state within the vacuum chamber, such as whether there is material deposition or changes in vacuum level.

[0081] Both the tube body 31 and the observation hood 33 are sealed to the cavity wall 2. This design ensures that the vacuum state of the vacuum chamber 1 is not affected by external factors. Considering the characteristics of the vacuum chamber and the needs of the monitoring structure, the materials of the rigid structural components, the tube body 31, and the observation hood 33 may need to have specific properties, such as good sealing performance, corrosion resistance, and high temperature resistance.

[0082] The rigid vacuum structure is implemented based on the vacuum degree vacuum structure described in any embodiment of the first aspect. The specific implementation of the rigid vacuum structure can be referred to the above embodiments and common knowledge in the art. Since the rigid vacuum structure adopts some or all of the technical solutions of the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0083] In some embodiments of this application, the vacuum cavity 1 is filled with a vacuum insulation core material 11.

[0084] It is easy to understand that the vacuum cavity 1 is filled with a vacuum insulation core material 11, and the rigid vacuum structural component can be used as a vacuum insulation structural product. Vacuum insulation core materials typically have extremely low thermal conductivity, meaning they can effectively insulate against heat transfer. This material may be composed of porous structures, fibrous materials, or other substances with high thermal resistance. By filling with the vacuum insulation core material 11, the insulation performance of the vacuum structural component is significantly improved, which helps reduce heat conduction through the vacuum cavity walls, thereby maintaining the stability of the temperature inside the vacuum cavity. In some cases, the vacuum insulation core material can also enhance structural stability by increasing the mechanical support of the cavity walls to prevent deformation caused by external pressure or temperature changes.

[0085] In some embodiments of this application, the material of the vacuum insulation core 11 includes glass fiber, polymer fiber, and powder material.

[0086] Glass fiber is a high-performance inorganic non-metallic material with many varieties. It possesses excellent insulation, strong heat resistance, good corrosion resistance, and high mechanical strength. As a vacuum insulation core material, glass fiber provides good support, preventing the vacuum cavity walls from collapsing under vacuum conditions. Simultaneously, its low thermal conductivity helps reduce heat transfer, improving the insulation effect. Polymer fibers typically refer to fibers made from polymer compounds, such as polyester and nylon fibers. They are lightweight, high-strength, wear-resistant, and chemically stable. As a vacuum insulation core material, polymer fibers can fill vacuum cavities, reducing heat conduction and radiation through their porous structure. Furthermore, the flexibility and plasticity of polymer fibers allow them to adapt to vacuum cavities of different shapes and sizes. Powder materials refer to solid materials in powder form. They can be made of metals, non-metals, or compounds. Powder materials are characterized by easy filling and adjustable thermal conductivity. As vacuum insulation core materials, powder materials can reduce heat transfer through the tiny pores between their particles. At the same time, the thermal conductivity of powder materials can be controlled by adjusting the particle size, shape, and composition to meet the needs of different application scenarios. For example, commonly used powder materials include perlite, silica aerogel, and diatomaceous earth.

[0087] All of the aforementioned materials have low thermal conductivity, effectively isolating heat transfer and improving the thermal insulation performance of vacuum structural components. These materials maintain a stable shape and structure under vacuum conditions, preventing collapse and deformation of the vacuum chamber walls. Different materials can be selected based on the specific application requirements to meet diverse thermal insulation and structural needs.

[0088] The present application is further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the application. Experimental methods in the following embodiments that do not specify specific conditions are generally determined according to industry standards. If there is no corresponding industry standard, then common international standards, conventional conditions, or conditions recommended by the manufacturer are followed.

[0089] Example

[0090] First, this application provides a rigid vacuum structural component, please refer to... Figure 1 , Figure 2 , Figure 3 The rigid vacuum structure includes:

[0091] A rigid structural component, the rigid structural component having a vacuum cavity 1, the vacuum cavity 1 including a cavity wall 2;

[0092] Vacuum degree monitoring structure 3.

[0093] The vacuum monitoring mechanism is used to monitor the vacuum level inside the vacuum chamber 1, and the vacuum monitoring structure 3 includes:

[0094] Tube body 31;

[0095] A flexible sealing membrane 32 is sealed to one end of the tube body 31.

[0096] An observation cover 33 is provided, which covers the other end of the tube body 31. The observation cover 33 is sealed to the cavity wall 2. An air extraction hole 331 is provided on the observation cover 33. Part or all of the material of the observation cover 33 is transparent, so that the flexible sealing membrane 32 can be observed from the outside of the observation cover 33.

[0097] A sealing structure is provided to block the air extraction port 331.

[0098] The outer surface of the tube 31 is sealed to the wall of the vacuum chamber 1, and one end of the tube 31 is disposed inside the vacuum chamber 1.

[0099] The flexible sealing membrane 32 is disposed at the end of the tube 31 away from the observation cover 33.

[0100] The vacuum monitoring structure 3 also includes a protective cover 34, which is placed over the flexible sealing membrane 32 and has a mesh structure.

[0101] The flexible polymer membrane comprises layers stacked together:

[0102] First polymer layer;

[0103] Second polymer layer;

[0104] Aluminum foil.

[0105] The first polymer layer is made of polyethylene terephthalate, and the second polymer layer is made of polyethylene.

[0106] The thickness of the first polymer layer is 10 μm, the thickness of the second polymer layer is 10 μm, and the thickness of the aluminum film is 70 nm.

[0107] The vacuum chamber 1 is filled with a vacuum insulation core material 11. The material of the vacuum insulation core material 11 is glass fiber.

[0108] Various embodiments of this application may exist in the form of a range; it should be understood that the description in the form of a range is merely for convenience and brevity and should not be construed as a hard limitation on the scope of this application; therefore, it should be considered that the range description has specifically disclosed all possible sub-ranges and single numerical values ​​within that range. For example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., and single numbers within the range, such as 1, 2, 3, 4, 5, and 6, regardless of the range. Furthermore, whenever a numerical range is referred to herein, it means including any referenced number (fraction or integer) within the referred range.

[0109] In this application, unless otherwise stated, directional terms such as "upper" and "lower" specifically refer to the drawing directions in the accompanying drawings. Furthermore, in the description of this application, the terms "comprising," "including," etc., mean "including but not limited to." Moreover, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. In this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. In this document, "and / or" describes the relationship between related objects, indicating that three relationships can exist; for example, A and / or B can represent: A alone, A and B simultaneously, or B alone. For relationships involving three or more related objects described using "and / or", it indicates that any one of the three related objects can exist alone, or at least two of them can exist simultaneously. For example, for A, and / or B, and / or C, it can mean that any one of A, B, and C exists alone, or any two of them exist simultaneously, or all three of them exist simultaneously. In this document, "at least one" means one or more, and "more than one" means two or more. "At least one", "at least one of the following", or similar expressions refer to any combination of these items, including any combination of single or multiple items. For example, "at least one of a, b, or c", or "at least one of a, b, and c", can both mean: a, b, c, ab (i.e., a and b), ac, bc, or abc, where a, b, and c can be single or multiple. The "parts representation" involved in this application, such as parts by weight or parts by mass, indicates the proportional relationship between the components. In the proportional relationships involved in this application, the parameters that need to be described by proportion should be understood as the first term of the proportion in the order of description, and the proportion figures should be understood as the second term of the proportion. For example, if the mass ratio of substance A, substance B and substance C is 1:2:3, then substance A, substance B and substance C should correspond one-to-one with the proportion figures in the proportion in the order of description, that is, the mass of substance A: the mass of substance B: the mass of substance C = 1:2:3.

[0110] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A vacuum degree monitoring structure characterized by comprising: The vacuum monitoring mechanism is used to monitor the vacuum level inside the vacuum chamber, and the vacuum monitoring structure includes: tube body; A flexible sealing membrane material is sealed to one end of the tube body; An observation cover is provided to cover the other end of the tube. The observation cover is provided with an air extraction hole. Part or all of the material of the observation cover is transparent, so that the flexible sealing membrane can be observed from the outside of the observation cover. A sealing structure is used to block the air extraction port. The vacuum chamber includes a cavity wall, the outer surface of the tube is used to be sealed to the vacuum cavity wall, one end of the tube is disposed inside the vacuum cavity, and the observation cover is used to be sealed to the cavity wall.

2. The vacuum monitoring structure according to claim 1, wherein The flexible sealing membrane is disposed at the end of the tube away from the observation cover.

3. The vacuum monitoring structure of claim 1, wherein The vacuum monitoring structure also includes a protective cover, which is placed over the flexible sealing membrane and has a breathable structure.

4. The vacuum monitoring structure according to claim 3, wherein The protective cover has a mesh structure.

5. The vacuum monitoring structure of claim 1, wherein The flexible sealing membrane material is a composite material of flexible polymer membrane and aluminum membrane.

6. The vacuum monitoring structure of claim 5, wherein, The flexible polymer membrane comprises at least one layer of polymer material.

7. The vacuum monitoring structure of claim 5, wherein, The flexible polymer membrane is made of at least one of polyethylene terephthalate, polyethylene, and polyimide.

8. The vacuum monitoring structure of claim 1, wherein, The thickness of the flexible polymer film is 5–100 μm; and / or, The thickness of the aluminum film is 10–200 nm.

9. The vacuum monitoring structure of claim 8, wherein, The thickness of the flexible polymer film is 10–50 μm; and / or, The thickness of the aluminum film is 20–100 nm.

10. The vacuum monitoring structure of claim 9, wherein, The thickness of the aluminum film is 50–80 nm.

11. A rigid vacuum structural component, characterized in that, The rigid vacuum structural component includes: A rigid structural component having a vacuum cavity, the vacuum cavity including a cavity wall; The vacuum monitoring structure according to any one of claims 1 to 10, wherein the outer surface of the tube is sealed to the vacuum cavity wall, and the observation cover is sealed to the cavity wall.

12. The rigid vacuum structural component according to claim 11, characterized in that, The vacuum cavity is filled with vacuum insulation core material.

13. The rigid vacuum structural component according to claim 12, characterized in that, The materials of the vacuum insulation core material include glass fiber, polymer fiber, and powder materials.

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