A traveling wave electrode and a method of commissioning the same, electro-optic modulator

Abstract

This invention relates to the field of silicon photonics technology, and in particular to a traveling-wave electrode and its debugging method, as well as an electro-optic modulator, comprising a load resistor and a temperature control component. The load resistor is disposed at the terminal of the traveling-wave electrode to prevent the reflection of radio frequency signals in the traveling-wave electrode. The load resistor is a thermistor. The temperature control component is used to adjust the operating ambient temperature of the load resistor, so that the resistance value of the load resistor changes according to the operating ambient temperature. This invention ensures that the resistance value of the load resistor does not deviate from a preset resistance range during operation, significantly improving the working stability of the traveling-wave electrode. Furthermore, this invention improves the load at the terminal of the traveling-wave electrode to a load with a certain adjustable range. Only the operating ambient temperature of the load resistor needs to be changed to achieve testing of different load resistance values ​​on a single traveling-wave electrode, reducing debugging costs and increasing debugging speed.

Description

Technical Field

[0001] This invention relates to the field of silicon photonics technology, and in particular to a traveling wave electrode and its tuning method, and an electro-optic modulator. Background Technology

[0002] An electro-optic modulator is a high-speed modulator based on silicon photonics technology, widely used in data centers and optical communications. When working, the electro-optic modulator needs to use traveling wave electrodes to increase the modulation bandwidth. The traveling wave electrodes enable the radio frequency signal and the optical signal to be transmitted synchronously in the modulator, thereby maximizing the modulation efficiency. In order to avoid the reflection of the radio frequency signal, the terminal of the traveling wave electrode needs to be connected to an external load (usually a resistor).

[0003] However, in actual design, to ensure that the load's impact on the RF signal in the traveling wave electrode meets expectations, it is usually necessary to conduct multiple rounds of experiments on the resistance value of the terminal's load before formal production, continuously adjusting it until the optimal value is obtained. Since various loads with different resistance values ​​need to be designed, this process is time-consuming and costly, and in severe cases, can even slow down the production schedule. Furthermore, changes in the operating time and voltage of the traveling wave electrode will cause changes in the operating environment temperature, which will further lead to temperature drift in the terminal's load, causing the corresponding resistance value to deviate from the original design, thus affecting the operational stability of the electro-optic modulator.

[0004] Therefore, how to reduce the debugging cost of traveling wave electrodes in the design stage, shorten the debugging time, and avoid the decrease in working stability caused by temperature drift during the operation of traveling wave electrodes are problems that urgently need to be solved by those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide a traveling wave electrode and its debugging method, as well as an electro-optic modulator, to solve the problems of high debugging cost and long debugging time in the design stage of the traveling wave electrode in the prior art, and poor stability of the traveling wave electrode due to temperature drift during operation.

[0006] To solve the above-mentioned technical problems, the present invention provides a traveling wave electrode, including a load resistor and a temperature control component;

[0007] The load resistor is disposed at the end of the traveling wave electrode to prevent the radio frequency signal in the traveling wave electrode from being reflected; the load resistor is a thermistor.

[0008] The temperature control component is used to adjust the operating ambient temperature of the load resistor, so that the resistance value of the load resistor changes according to the operating ambient temperature.

[0009] Optionally, in the traveling wave electrode, the resistance of the load resistor increases with the increase of the ambient temperature.

[0010] Optionally, in the traveling wave electrode, the load resistor is a first-doped silicon resistor.

[0011] Optionally, in the traveling wave electrode, the temperature control component is a heater.

[0012] Optionally, in the traveling wave electrode, the heater includes a second doped silicon resistor and a power supply.

[0013] The second heavily doped silicon resistor and the applied power supply form a closed loop.

[0014] Optionally, in the traveling wave electrode, the traveling wave electrode includes alternately arranged ground lines and signal lines;

[0015] The load resistance between adjacent ground lines and signal lines has a room temperature resistance R0 at room temperature, and R0 satisfies 10 ohms ≤ R0 ≤ 30 ohms.

[0016] Optionally, in the traveling wave electrode, the operating ambient temperature corresponding to the load resistor is T, where T satisfies 25℃≤T≤300℃.

[0017] Optionally, in the traveling wave electrode, the load resistance between adjacent ground lines and signal lines has an operating resistance R1 at the operating ambient temperature, wherein R1 satisfies 30 ohms ≤ R1 ≤ 50 ohms.

[0018] Optionally, in the traveling wave electrode, the temperature control component is a cooler.

[0019] An electro-optic modulator, the electro-optic modulator comprising any of the traveling wave electrodes described above.

[0020] A method for adjusting a traveling wave electrode, the method being used for any of the traveling wave electrodes described above, comprising:

[0021] Receives multiple load resistance information and target current information;

[0022] The multiple load resistance information to be tested are input into the pre-stored correspondence between the resistance value of the load resistance and the working environment temperature to obtain the test temperature information corresponding to each load resistance information to be tested.

[0023] The temperature control component is driven according to the test temperature information corresponding to each of the load resistance information to be tested, so that the traveling wave electrode operates at the operating temperature corresponding to each of the test temperature information, and the test operating current information corresponding to each of the test temperature information is obtained.

[0024] The target operating environment temperature is determined based on the test operating current information and the target current information.

[0025] The traveling wave electrode provided by this invention includes a load resistor and a temperature control component. The load resistor is disposed at the terminal of the traveling wave electrode to prevent radio frequency signal reflection from the traveling wave electrode. The load resistor is a thermistor. The temperature control component is used to adjust the operating ambient temperature of the load resistor, so that the resistance value of the load resistor changes according to the operating ambient temperature. Based on the load resistor of the traveling wave electrode, this invention adds a temperature control component. The temperature control component can induce changes in the operating ambient temperature around the load resistor. By adjusting the operating ambient temperature, the resistance value of the load resistor is controlled, ensuring that the resistance value of the load resistor does not deviate from a preset resistance range during operation, significantly improving the working stability of the traveling wave electrode. Furthermore, this invention improves the load at the terminal of the traveling wave electrode to a load with a certain adjustable range. This eliminates the need for repeated testing with multiple different fixed load values ​​during the initial debugging of the traveling wave electrode. Only the operating ambient temperature of the load resistor needs to be changed to test different load resistance values ​​on a single traveling wave electrode, greatly reducing debugging costs and increasing debugging speed. This invention also provides a debugging method for a traveling wave electrode with the above-mentioned beneficial effects and an electro-optic modulator. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 A schematic diagram of a specific embodiment of the traveling wave electrode provided by the present invention;

[0028] Figure 2 A schematic diagram of another specific embodiment of the traveling wave electrode provided by the present invention;

[0029] Figure 3 This is a flowchart illustrating a specific implementation of the debugging method for the traveling wave electrode provided by the present invention.

[0030] The diagram includes 11-ground line, 12-signal line, 13-load resistor, 20-temperature control component, 21-power supply, and 22-second doped silicon resistor. Detailed Implementation

[0031] To enable those skilled in the art to better understand the present invention, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] The core of this invention is to provide a traveling wave electrode, the structural schematic diagram of one specific embodiment of which is shown below. Figure 1 As shown, this is referred to as Specific Implementation Method 1, which includes a load resistor 13 and a temperature regulating component 20;

[0033] The load resistor 13 is disposed at the end of the traveling wave electrode to prevent the radio frequency signal in the traveling wave electrode from being reflected; the load resistor 13 is a thermistor.

[0034] The temperature control component 20 is used to adjust the operating ambient temperature of the load resistor 13, so that the resistance value of the load resistor 13 changes according to the operating ambient temperature.

[0035] Please refer to Figure 1 , Figure 1 The diagram shows a cross-sectional view of the traveling wave electrode, which typically includes alternating ground lines 11 and signal lines 12. The ground lines 11 are generally grounded and do not receive alternating current signals. The signal lines 12 are supplied with DC voltage to put the device into operation, and then an alternating (RF) voltage signal is applied through a bias electrode to complete the modulation.

[0036] In a preferred embodiment, the load resistor 13 is a first heavily doped silicon resistor.

[0037] Since the other structures in the traveling wave electrode are silicon-based structures, in this preferred embodiment, the load resistor 13 is set as a first heavily doped silicon resistor, that is, the load resistor 13 is obtained by directly performing heavy doping at the corresponding position on the silicon substrate. This can significantly reduce the difficulty of process manufacturing, facilitate on-chip integration, and help to reduce production costs while miniaturizing the device.

[0038] Furthermore, the temperature control component 20 is a heater.

[0039] Considering that the traveling wave electrode itself occupies little space, the temperature control component 20 should also be miniaturized as much as possible. For miniaturized, or even on-chip integrated temperature control component 20, heaters have a simpler structure and higher reliability than coolers, and the corresponding hardware costs are lower. Of course, the temperature control component 20 can also be a cooler, or a component that combines heating and cooling. This invention does not limit it here.

[0040] Of course, if the temperature control component 20 is a heater, the load resistor 13 should be a resistor with a large resistance at room temperature but whose resistance decreases as the temperature rises, or a resistor with a small resistance at room temperature but whose resistance increases as the temperature rises.

[0041] Preferably, the resistance value of the load resistor 13 increases with the increase of the ambient temperature.

[0042] There are two possible scenarios for heater malfunction: one is that the heater cannot stop working, causing the temperature to rise continuously; the other is that the heater stops working, causing the temperature to drop back to room temperature. Using a load resistor 13 whose resistance increases with the ambient temperature can prevent further damage in both scenarios. For example, if the heater cannot stop working, causing the temperature to rise continuously, the resistance of the load resistor 13 will increase. In the worst case, the load resistor 13 might become too large, causing current cutoff and a break in the traveling wave electrode, without endangering other circuit structures. Conversely, if the heater stops working and the temperature drops back to room temperature, the resistance of the load resistor 13 at room temperature is still large enough to act as a protective resistor, ensuring that the circuit containing the traveling wave electrode does not short-circuit, thus preventing widespread damage.

[0043] Furthermore, the heater includes a second doped silicon resistor 22 and a power supply 21;

[0044] The second heavily doped silicon resistor 22 and the power supply 21 form a closed loop.

[0045] For reference Figure 2 In this preferred embodiment, a specific structure of the heater is provided, namely a closed loop composed of the second heavily doped silicon resistor 22 and the power supply 21. Figure 2 The dashed line indicates that the second heavily doped silicon resistor 22 is electrically connected to the power supply 21 (this is for illustrative purposes only and does not represent the actual circuit wiring). The second heavily doped silicon resistor 22 is also a thermal resistor, which generates heat by the current flowing through a closed loop to achieve temperature regulation. Similar to the first heavily doped silicon resistor, the second heavily doped silicon resistor 22 can significantly reduce manufacturing difficulty and facilitate on-chip integration, thus promoting device miniaturization and reducing production costs. Furthermore, the heater in this preferred embodiment has a simple structure, further reducing manufacturing complexity. The closed loop is not electrically connected to the load resistor 13 and only serves a temperature regulation function.

[0046] In one specific embodiment, the traveling wave electrode includes alternating ground lines 11 and signal lines 12;

[0047] The load resistor 13 between adjacent ground line 11 and signal line 12 has a room temperature resistance R0 at room temperature (generally 25°C in this field), where R0 satisfies 10 ohm ≤ R0 ≤ 30 ohm, such as any one of 10.0 ohm, 22.1 ohm, or 30.0 ohm; the operating ambient temperature corresponding to the load resistor 13 is T, where T satisfies 25°C ≤ T ≤ 300°C, such as any one of 25.0°C, 121.8°C, or 300.0°C; the load resistor 13 between adjacent ground line 11 and signal line 12 has an operating resistance R1 at the operating ambient temperature, where R1 satisfies 30 ohm ≤ R1 ≤ 50 ohm, such as any one of 30.0 ohm, 44.8 ohm, or 50.0 ohm.

[0048] Please refer to Figure 1 and Figure 2 In the diagram, a block-shaped load resistor 13 is placed between adjacent ground line 11 and signal line 12. Since the resistance of the load resistor 13 increases with temperature, at room temperature, its room temperature resistance R0 is usually set far from the working resistance R1 at the actual operating temperature T to allow sufficient adjustment space. The above parameter range represents the preferred implementation after extensive theoretical calculations and practical testing. Of course, adjustments can be made according to actual conditions, and this invention does not limit this. If the load resistor 13 is a resistor whose resistance decreases with increasing operating temperature, then the corresponding room temperature resistance R0 should be higher than the working resistance R1. For example, if the R1 range remains unchanged, R0 can be selected as 50 ohms ≤ R0 ≤ 80 ohms.

[0049] The traveling wave electrode provided by this invention includes a load resistor 13 and a temperature control component 20. The load resistor 13 is disposed at the terminal of the traveling wave electrode to prevent radio frequency signal reflection in the traveling wave electrode. The load resistor 13 is a thermistor. The temperature control component 20 is used to adjust the operating ambient temperature of the load resistor 13, so that the resistance value of the load resistor 13 changes according to the operating ambient temperature. Based on the load resistor 13 of the traveling wave electrode, this invention adds a temperature control component 20. The temperature control component 20 can induce changes in the operating ambient temperature around the load resistor 13. By adjusting the operating ambient temperature, the resistance value of the load resistor 13 is adjusted, ensuring that the resistance value of the load resistor 13 does not deviate from the preset resistance range during operation, significantly improving the working stability of the traveling wave electrode. Furthermore, this invention improves the load at the terminal of the traveling wave electrode to a load with a certain adjustment range, so that the initial debugging of the traveling wave electrode no longer requires setting multiple different fixed loads for repeated testing. Only the operating ambient temperature of the load resistor 13 needs to be changed to achieve testing of different load resistance values ​​on a single traveling wave electrode, greatly reducing debugging costs and improving debugging speed.

[0050] The present invention also provides an electro-optic modulator, which includes any of the traveling-wave electrodes described above. The traveling-wave electrode provided by the present invention includes a load resistor 13 and a temperature control component 20; the load resistor 13 is disposed at the terminal of the traveling-wave electrode to prevent the reflection of radio frequency signals in the traveling-wave electrode; the load resistor 13 is a thermistor; the temperature control component 20 is used to adjust the operating ambient temperature of the load resistor 13, so that the resistance value of the load resistor 13 changes according to the operating ambient temperature. Based on the load resistor 13 of the traveling wave electrode, this invention adds a temperature control component 20. The temperature control component 20 can cause changes in the ambient temperature around the load resistor 13. By adjusting the ambient temperature, the resistance value of the load resistor 13 is controlled, ensuring that the resistance value of the load resistor 13 does not deviate from the preset resistance range during operation, thus significantly improving the working stability of the traveling wave electrode. On the other hand, this invention improves the load at the end of the traveling wave electrode to a load with a certain adjustment range. This eliminates the need to set multiple different fixed loads for repeated testing during the initial debugging of the traveling wave electrode. Only the ambient temperature of the load resistor 13 needs to be changed to test different load resistance values ​​on a single traveling wave electrode, greatly reducing debugging costs and improving debugging speed.

[0051] This invention also provides a method for debugging a traveling wave electrode, and a flowchart of one specific embodiment is shown below. Figure 3 As shown, referred to as Specific Implementation Method Two, the debugging method of the traveling wave electrode is used for any of the traveling wave electrodes described above, including:

[0052] S101: Receives multiple load resistance information and target current information.

[0053] Before testing the traveling wave electrode, the operator usually sets multiple available values ​​for the load resistance 13 of the traveling wave electrode and finds the best value that matches the target current information among these available values. The information of the load resistance 13 to be tested also corresponds to these available values. For example, in order to achieve the target current Ia, the load resistances 13 Ra, Rb, Rc and Rd to be tested are selected in advance.

[0054] S102: Input the multiple load resistance information to the pre-stored correspondence between the resistance value of the load resistance and the working environment temperature to obtain the test temperature information corresponding to each load resistance information.

[0055] Since the hardware parameters of the traveling wave electrode are known, the resistance values ​​of the load resistor 13 in the traveling wave electrode at what temperatures are also known: Ra, Rb, Rc, and Rd. Through this step, it can be obtained that the resistance value of the load resistor 13 is Ra at temperature Ta, Rb at temperature Tb, Rc at temperature Tc, and Rd at temperature Td, which means determining the test temperature information corresponding to each of the load resistors 13 to be tested.

[0056] S103: Drive the temperature control component according to the test temperature information corresponding to each of the test load resistance information, so that the traveling wave electrode operates at the operating temperature corresponding to each of the test temperature information, and obtain the test operating current information corresponding to each of the test temperature information.

[0057] After determining the test temperature information corresponding to each of the load resistors 13 under test in the previous step, it is only necessary to adjust the temperature control component 20 so that the traveling wave electrode operates on Ta, Tb, Tc and Td respectively, and then obtain the test operating currents I1, I2, I3 and I4 when the load resistors 13 of the traveling wave electrode are Ra, Rb, Rc and Rd.

[0058] S104: Determine the target operating environment temperature based on the test operating current information and the target current information.

[0059] The target operating environment temperature is the temperature at which the current in the traveling wave electrode reaches the target current Ia. There are many specific implementation methods for this step, such as comparing all the test operating currents with the target current and selecting the temperature of the test operating current closest to the target current as the target operating environment temperature; or taking the closest value of the test operating current for both the test operating current higher than the target current and the test operating current lower than the target current, and using the average of their corresponding test temperatures as the target environment temperature; or after obtaining the test operating current closest to the target current, continuing to adjust the temperature until the test operating current equals the target current, and then using the temperature at this time as the target operating environment temperature. This invention does not limit the specific implementation.

[0060] The present invention provides a method for debugging a traveling wave electrode, which is used for any of the traveling wave electrodes described above. The method includes receiving information on multiple load resistors 13 to be tested and target current information; inputting the information on the multiple load resistors 13 to be tested into a pre-stored correspondence between the resistance value of the load resistor 13 and the operating environment temperature to obtain test temperature information corresponding to each load resistor 13; driving the temperature control component 20 according to the test temperature information corresponding to each load resistor 13 to make the traveling wave electrode operate at the operating temperature corresponding to each test temperature information, and acquiring test operating current information corresponding to each test temperature information; and determining the target operating environment temperature based on the test operating current information and the target current information. Based on the load resistor 13 of the traveling wave electrode, this invention adds a temperature control component 20. The temperature control component 20 can cause changes in the ambient temperature around the load resistor 13. By adjusting the ambient temperature, the resistance value of the load resistor 13 is controlled, ensuring that the resistance value of the load resistor 13 does not deviate from the preset resistance range during operation, thus significantly improving the working stability of the traveling wave electrode. On the other hand, this invention improves the load at the end of the traveling wave electrode to a load with a certain adjustment range. This eliminates the need to set multiple different fixed loads for repeated testing during the initial debugging of the traveling wave electrode. Only the ambient temperature of the load resistor 13 needs to be changed to test different load resistance values ​​on a single traveling wave electrode, greatly reducing debugging costs and improving debugging speed.

[0061] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to in the method section.

[0062] It should be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0063] The traveling-wave electrode and its debugging method, as well as the electro-optic modulator provided by this invention, have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this invention. It should be noted that those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this invention.

Claims

1. A traveling wave electrode, characterized in that, Including load resistors and temperature control components; The load resistor is disposed at the end of the traveling wave electrode to prevent the radio frequency signal in the traveling wave electrode from being reflected; the load resistor is a thermistor. The temperature control component is used to adjust the operating ambient temperature of the load resistor, so that the resistance value of the load resistor changes according to the operating ambient temperature.

2. The traveling wave electrode as described in claim 1, characterized in that, The resistance value of the load resistor increases as the ambient temperature of the operating environment increases.

3. The traveling wave electrode as described in claim 2, characterized in that, The load resistor is a first-doped silicon resistor.

4. The traveling wave electrode as described in claim 2, characterized in that, The temperature control component is a heater.

5. The traveling wave electrode as described in claim 4, characterized in that, The heater includes a second doped silicon resistor and a power supply. The second heavily doped silicon resistor and the applied power supply form a closed loop.

6. The traveling wave electrode as described in claim 2, characterized in that, The traveling wave electrode includes alternating ground lines and signal lines; The load resistance between adjacent ground lines and signal lines has a room temperature resistance R0 at room temperature, and R0 satisfies 10 ohms ≤ R0 ≤ 30 ohms.

7. The traveling wave electrode as described in claim 6, characterized in that, The operating ambient temperature corresponding to the load resistor is T, where T satisfies 25℃≤T≤300℃.

8. The traveling wave electrode as described in claim 7, characterized in that, The load resistance between adjacent ground lines and signal lines has an operating resistance R1 at the operating ambient temperature, where R1 satisfies 30 ohms ≤ R1 ≤ 50 ohms.

9. An electro-optic modulator, characterized in that, The electro-optic modulator includes a traveling-wave electrode as described in any one of claims 1 to 8.

10. A method for adjusting a traveling wave electrode, characterized in that, The method for adjusting the traveling wave electrode is used for the traveling wave electrode as described in any one of claims 1 to 8, comprising: Receives multiple load resistance information and target current information; The multiple load resistance information to be tested are input into the pre-stored correspondence between the resistance value of the load resistance and the working environment temperature to obtain the test temperature information corresponding to each load resistance information to be tested. The temperature control component is driven according to the test temperature information corresponding to each of the load resistance information to be tested, so that the traveling wave electrode operates at the operating temperature corresponding to each of the test temperature information, and the test operating current information corresponding to each of the test temperature information is obtained. The target operating environment temperature is determined based on the test operating current information and the target current information.

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