Metrology tool and method

By employing a multi-exposure technique within a single frame using a detector array, and utilizing a controller to read out the total radiation dose of the detector elements over multiple discrete time intervals, the throughput and reproducibility issues of existing measurement tools during wavelength switching are resolved. This achieves efficient radiation attenuation and averaging of dynamic effects, thereby improving the performance of the measurement tool.

CN122341933APending Publication Date: 2026-07-03ASML NETHERLANDS BV
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Patent Information

Application Number
CN202480077102.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-12-07
Filing Date
2024-11-14
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

Existing measurement tools struggle to maintain reasonable throughput when switching between different wavelengths using broadband radiation sources, potentially leading to reproducibility issues and system dynamics, especially in low-k1 lithography processes where current technologies struggle to effectively attenuate radiation to avoid wavelength variations and improve throughput.

Method used

By employing a detector array and using multiple exposures within a single frame, the total radiation dose of the detector elements is read out by the controller over multiple discrete time intervals. Combined with a switch and capacitor structure, this achieves effective attenuation of radiation and averaging of dynamic effects.

Benefits of technology

It improves the throughput of measurement tools, reduces the impact of system dynamic effects, prevents wavelength variations, and improves the reproducibility and efficiency of measurements.

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Abstract

Embodiments of this disclosure relate to a measurement tool for inspecting structures on an object, the measurement tool comprising: a projection optics; a detection optics; a detector array; and a controller. The projection optics are arranged to project radiation onto the structure, and the detection optics are arranged to receive radiation scattered by the structure. The detector array includes a plurality of detector elements. The controller is operable to: control the detector array to determine at least one image; and determine one or more parameters of interest based on the at least one determined image. The controller can be configured such that each pixel of the at least one determined image indicates the total dose of radiation received by one of the detector elements during a plurality of discrete time intervals during a measurement time interval, the pixel value being read from the corresponding detector element at the end of the measurement time interval.
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Citation Information

Patent Citations

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