A secondary electron detection device and method of detection

By setting up pole piece electrodes and voltage adjustment units in a scanning electron microscope to control the trajectory of secondary electrons, the problems of low secondary electron collection efficiency and insufficient detection accuracy in the prior art are solved, achieving efficient secondary electron collection and high-quality imaging.

CN122348165APending Publication Date: 2026-07-07HUIRAN TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HUIRAN TECH CO LTD
Filing Date
2026-04-09
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

In existing scanning electron microscopes, secondary electron detection devices suffer from low collection efficiency and insufficient detection accuracy. This is mainly due to the limited ability of the grid electric field to control, making it difficult to effectively guide secondary electrons to the detector. Furthermore, the low energy and wide emission direction of secondary electrons result in poor imaging signal-to-noise ratio and morphology reproduction.

Method used

By setting a pole piece electrode below the objective lens pole piece and applying an adjustable voltage between the pole piece electrode and the sample stage using a voltage regulation unit, an adjustable electric field is formed to actively regulate the trajectory of secondary electrons. Combined with a feedback control unit to optimize the electric field distribution, the collection efficiency of secondary electrons and the imaging quality are improved.

Benefits of technology

It improves the collection efficiency of secondary electrons, enhances the signal-to-noise ratio and morphology reproduction of imaging, and is low-cost, highly compatible, and suitable for the modification of existing scanning electron microscopes.

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Abstract

This application discloses a secondary electron detection device and method. The device includes a sample stage, an electron beam emitting unit, an objective lens, a pole piece electrode, a voltage adjustment unit, and at least one detector. The pole piece electrode is disposed below the pole piece of the objective lens and has a central opening aligned with the electron beam axis, allowing the electron beam to pass through completely. The voltage adjustment unit is electrically connected to the pole piece electrode and the sample stage and is configured to apply an adjustable voltage between the pole piece electrode and the sample stage to form a controllable electric field between the pole piece electrode, the sample stage, and the detector, thereby controlling the trajectory of the secondary electrons. The detector is used to collect and detect the secondary electrons after the electric field control. The secondary electron detection device of this application can control the trajectory of secondary electrons, improving the collection efficiency and detection accuracy of secondary electrons.
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