A PVD vertical double-sided deposition carrier plate

Abstract

This invention relates to a carrier plate for PVD vertical double-sided deposition, specifically in the field of physical vapor deposition. The PVD vertical double-sided deposition carrier plate includes: a frame body; a magnetic guide end disposed at the top of the frame body; and a conveying end disposed at the bottom of the frame body. The magnetic guide end includes: a first magnetic rail disposed at the top of the frame and a second magnetic rail disposed on the main body of the PVD equipment; the first and second magnetic rails are connected by a gap via magnetic force. The carrier plate provided by this invention, through its magnetic guide design, avoids the influence of particles and vibrations generated by traditional mechanical guide structures on the deposition process, significantly improving the stability of the deposition and ensuring efficient and continuous deposition.

Description

Technical Field

[0001] This invention relates to the field of physical vapor deposition, and more specifically to a PVD vertical double-sided deposition substrate. Background Technology

[0002] Physical vapor deposition (PVD) refers to the process of using low-voltage, high-current arc discharge technology under vacuum conditions to evaporate the target material and ionize both the evaporated material and the gas. The ionization is then achieved by using an electric field to accelerate the deposition of the evaporated material and its reaction products onto the workpiece.

[0003] In physical vapor deposition (PVD), a carrier plate is typically used to ensure the workpiece maintains the correct position and orientation during the coating process, allowing the coating material to be deposited uniformly on the workpiece surface. The carrier plate serves to fix and support the workpiece, and throughout the coating process, it also carries the workpiece into cavities with different process conditions. For example, in the glass coating process, the carrier plate carries the glass through a conveyor system into the coating equipment to complete the coating.

[0004] For example, CN114990514A discloses a double-sided coating carrier for physical vapor deposition, belonging to the field of vacuum coating technology. It includes multiple substrate placement areas formed by hollowing out the carrier, with openings on both the upper and lower surfaces of each substrate placement area; a through hole passing through the carrier is provided between at least two of the substrate placement areas; a blocking member is provided at the end of the through hole adjacent to one side of the substrate placement area, the blocking member extending outward from the surface of the carrier to block electrons and / or ions and / or atoms and / or plasma sputtered during coating.

[0005] However, PVD coating requires the carrier to pass through the coating area at an extremely constant and stable speed. However, existing carriers are mechanically driven to start and stop. At the same time, the non-roundness of the rollers and the meshing of the gears introduce micro-vibrations and speed fluctuations, resulting in uneven film thickness and poor film stress distribution, which affects product performance and consistency. Summary of the Invention

[0006] In view of the problems existing in the prior art, the purpose of the present invention is to provide a PVD vertical double-sided deposition carrier to solve the defects of the current carrier, such as uneven film thickness and poor film stress distribution caused by wear particles and vibration.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] The present invention provides a PVD vertical double-sided deposition carrier plate, the PVD vertical double-sided deposition carrier plate comprising: a frame body;

[0009] A magnetic guide end is provided at the top of the frame body;

[0010] A conveying end is provided at the bottom of the frame body;

[0011] The magnetic guide end includes: a first magnetic rail disposed on the top of the frame and a second magnetic rail disposed on the main body of the PVD device; the first magnetic rail and the second magnetic rail are connected by a gap through magnetic force.

[0012] The carrier plate provided by this invention, through its magnetic guidance design, avoids the impact of particles and vibrations generated by traditional mechanical guidance structures on the coating process, thus significantly improving the stability of the coating and ensuring efficient and continuous coating.

[0013] As a preferred embodiment of the present invention, the second magnetic track includes: a planar magnetic track or a concave magnetic track.

[0014] As a preferred embodiment of the present invention, the second magnetic track is a planar magnetic track, and the magnetic poles of the opposite surfaces on the first and second magnetic tracks are opposite.

[0015] As a preferred technical solution of the present invention, the magnetic material used in the first magnetic track includes: samarium cobalt magnet.

[0016] Preferably, the magnetic material used in the second magnetic track includes samarium cobalt magnets.

[0017] Preferably, the distance between the first magnetic rail and the second magnetic rail is 10-20 mm.

[0018] As a preferred embodiment of the present invention, the second magnetic track is a concave magnetic track, and the first magnetic track is disposed in the concave groove of the concave magnetic track.

[0019] As a preferred embodiment of the present invention, the concave magnetic track includes: a concave groove, a first magnet disposed on a first side of the concave groove, and a second magnet disposed on a second side of the concave groove, wherein the first side and the second side are opposite to each other.

[0020] As a preferred embodiment of the present invention, the magnetic poles of the opposing surfaces of the first magnetic track and the first magnet are the same.

[0021] Preferably, the magnetic poles of the opposing surfaces of the first magnetic track and the second magnet are the same.

[0022] Preferably, the magnetic poles of the opposing surfaces of the first magnet and the second magnet are opposite.

[0023] As a preferred technical solution of the present invention, the magnetic material used in the first magnet includes: samarium cobalt magnet.

[0024] Preferably, the magnet material used in the second magnet includes samarium cobalt magnets.

[0025] Preferably, the distance between the first magnetic track and the side of the concave groove is 5-7 mm.

[0026] As a preferred embodiment of the present invention, the transmitting end includes: a mechanically connected transmitting end or a magnetically connected transmitting end.

[0027] Preferably, the mechanical connection conveying end includes: a connector disposed at the bottom of the frame body; the connector is connected to a conveyor rail disposed on the PVD equipment body.

[0028] Preferably, the magnetic connection transmission end includes: a third magnetic rail disposed at the bottom of the frame body and a fourth magnetic rail disposed on the PVD device body.

[0029] Preferably, the magnetic poles of the opposite faces on the third and fourth magnetic rails are opposite.

[0030] As a preferred technical solution of the present invention, the frame body includes: a first side frame, a second side frame, a bottom frame, and a top frame;

[0031] The first side border is connected to the bottom border and the top border, respectively;

[0032] The second side border is connected to the bottom border and the top border respectively;

[0033] The bottom frame is provided with a transmission end;

[0034] The top frame is provided with a magnetic guide end.

[0035] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0036] (1) The PVD vertical double-sided deposition carrier provided by the present invention can achieve absolutely clean production with "zero particle contamination", replace all mechanical transmission parts that generate friction (such as rollers and bearings), eliminate particles generated by mechanical contact and wear from the physical source, thereby greatly improving product yield and meeting the manufacturing requirements of cutting-edge products such as Micro-LEDs that have "zero tolerance" for particle defects.

[0037] (2) The PVD vertical double-sided deposition carrier provided by the present invention can achieve ultra-stable and ultra-uniform transmission. The non-contact support of magnetic levitation eliminates mechanical vibration, ensuring that the carrier reaches a uniform speed and absolute stability when passing through the PVD coating area, thereby depositing a perfect thin film with uniform film thickness and consistent stress on the entire large-area carrier.

[0038] (3) The PVD vertical double-sided deposition carrier provided by the present invention can achieve extremely high equipment reliability and utilization. Through wear-free design, it can significantly reduce the failure rate and maintenance frequency of the transmission system, reduce or even avoid downtime and vacuum breakage caused by maintenance, thereby significantly improving the normal operation time of the equipment and the overall production efficiency, and reducing long-term operating costs. Attached Figure Description

[0039] Figure 1 This embodiment of the invention provides a PVD vertical double-sided deposition carrier plate, and the second magnetic track is a front view of a planar magnetic track;

[0040] Figure 2 This is a front view of a PVD vertical double-sided deposition carrier provided in an embodiment of the present invention, wherein the second magnetic track is a concave magnetic track;

[0041] Figure 3 This embodiment of the invention provides a carrier plate for PVD vertical double-sided deposition, and the second magnetic track is a partial isometric view of a planar magnetic track;

[0042] Figure 4 This embodiment of the invention provides a carrier plate for PVD vertical double-sided deposition, and the second magnetic track is a partial side view of a planar magnetic track;

[0043] Figure 5 This is a partial isometric view of a PVD vertical double-sided deposition carrier provided in an embodiment of the present invention, wherein the second magnetic track is a concave magnetic track;

[0044] Figure 6 This is a partial side view of a PVD vertical double-sided deposition carrier provided in an embodiment of the present invention, wherein the second magnetic track is a concave magnetic track.

[0045] In the diagram: 100 - top border, 200 - bottom border, 300 - first side border, 400 - second side border, 110 - magnetic guide end, 111 - first magnetic track, 112 - planar magnetic track, 113 - concave magnetic track, 210 - transmission end.

[0046] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0047] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0048] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0049] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0050] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0051] Currently, PVD coating requires the carrier plate to pass through the coating area at an extremely constant and stable speed. However, existing carrier plates rely on mechanical transmission for starting and stopping. Furthermore, the out-of-roundness of the rollers and the meshing of gears introduce micro-vibrations and speed fluctuations, resulting in uneven film thickness and poor stress distribution, affecting product performance and consistency. Therefore, this invention optimizes the carrier plate structure and utilizes a magnetic guiding design to avoid the impact of particles and vibrations generated by traditional mechanical guiding structures on the coating process. This significantly improves coating stability and ensures efficient and continuous coating, as detailed below:

[0052] I. This embodiment provides a PVD vertical double-sided deposition carrier plate, such as Figure 1 and Figure 2 As shown, the PVD vertical double-sided deposition carrier plate includes: a frame body;

[0053] A magnetic guide end 110 is provided at the top of the frame body;

[0054] A conveying end 210 is provided at the bottom of the frame body;

[0055] The magnetic guide end 110 includes: a first magnetic rail 111 disposed on the top of the frame and a second magnetic rail disposed on the main body of the PVD device; the first magnetic rail 111 and the second magnetic rail are connected by a gap through magnetic force.

[0056] In this invention, the first magnetic track 111 and the second magnetic track include: a magnet and a base for placing the magnet, which are assembled and then mounted on a carrier plate and the main body of the device by fasteners.

[0057] In this invention, the magnets in the first magnetic track 111 and the second magnetic track can be selected as permanent magnets or electromagnets, and the specific selection is reasonably determined based on the control requirements and costs in the field.

[0058] The second magnetic track includes: a planar magnetic track 112 or a concave magnetic track 113, such as... Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown.

[0059] The second magnetic track is a planar magnetic track 112, and the magnetic poles of opposite surfaces on the first magnetic track 111 and the second magnetic track are opposite, such as... Figure 3 and Figure 4 As shown.

[0060] The magnetic material used in the first magnetic track 111 includes samarium cobalt magnets.

[0061] The magnetic material used in the second magnetic track includes samarium cobalt magnets.

[0062] The distance between the first magnetic track 111 and the second magnetic track is 10-20mm, for example, it can be 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0063] In this invention, when the second magnetic track is a planar magnetic track 112, the first magnetic track 111 is also a planar magnetic track. At this time, the first magnetic track 111 is mounted on the carrier plate and used in conjunction with the second magnetic track on the host device.

[0064] Wherein, the second magnetic track is a concave magnetic track 113, and the first magnetic track 111 is disposed within the concave groove of the concave magnetic track 113, such as Figure 5 and Figure 6 As shown.

[0065] The concave magnetic track 113 includes: a concave groove, a first magnet disposed on a first side of the concave groove, and a second magnet disposed on a second side of the concave groove, wherein the first side and the second side are opposite to each other.

[0066] The magnetic poles of the opposite surfaces of the first magnetic track 111 and the first magnet are the same.

[0067] The magnetic poles of the opposing surfaces of the first magnetic track 111 and the second magnet are the same.

[0068] In this case, the magnetic poles of the opposing surfaces of the first magnet and the second magnet are opposite.

[0069] The magnetic material used in the first magnet includes samarium cobalt magnets.

[0070] The magnetic material used in the second magnet includes samarium cobalt magnets.

[0071] The distance between the first magnetic track 111 and the side of the concave groove is 5-7mm, for example, it can be 5mm, 5.2mm, 5.4mm, 5.6mm, 5.8mm, 6mm, 6.2mm, 6.4mm, 6.6mm, 6.8mm or 7mm, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0072] In this invention, when the second magnetic track is a concave magnetic track 113, the first magnetic track 111 is a planar magnetic track. The first magnetic track 111 and the concave magnetic track 113 work together to achieve positioning and guiding effects.

[0073] The transmission end 210 includes: a mechanically connected transmission end or a magnetically connected transmission end.

[0074] The mechanical connection conveying end includes: a connector disposed at the bottom of the frame body; the connector is connected to a conveyor rail disposed on the PVD equipment body.

[0075] The magnetic connection transmission end includes a third magnetic rail disposed at the bottom of the frame body and a fourth magnetic rail disposed on the PVD device body.

[0076] In this invention, the conveyor rail on the main body of the PVD equipment is used to convey the carrier plate through the machine guide wheels.

[0077] The magnetic poles of the opposite faces on the third and fourth magnetic rails are opposite.

[0078] In this invention, the arrangement of magnets in the magnetic track can be carried out in accordance with conventional requirements in the art, ensuring that the first magnetic track 111 and the second magnetic track can generate good attraction to ensure the guiding effect, that the first magnetic track 111 can maintain a limited distance from the side wall in the concave groove, and that the attraction of the third magnetic track and the fourth magnetic track can ensure transmission.

[0079] The frame body includes: a first side frame 300, a second side frame 400, a bottom frame 200, and a top frame 100; the first side frame 300 is connected to the bottom frame 200 and the top frame 100 respectively; the second side frame 400 is connected to the bottom frame 200 and the top frame 100 respectively; the bottom frame 200 is provided with a conveying end 210; and the top frame 100 is provided with a magnetic guiding end 110.

[0080] In this invention, the frame body is used to support and fix the workpiece (such as glass substrate, silicon wafer, plastic film, etc.) to be coated. Specifically, the workpiece is fixed between the first side frame 300, the second side frame 400, the bottom frame 200 and the top frame 100. The frames can be connected by fasteners such as bolts, pins, buckles, tenon and mortise structures, etc. The specific structure of each frame can be freely selected and designed according to the shape and requirements of the workpiece. After the workpiece is assembled in the frame body, the frame body is vertically set on the PVD equipment body for double-sided sputtering coating. During the process, it is guided by the top magnetic guide end 110 and transported by the bottom conveyor end.

[0081] II. To illustrate the effects of the PVD vertical double-sided deposition carrier provided by this invention, the following example is used for explanation:

[0082] Example 1

[0083] This embodiment provides a PVD vertical double-sided deposition carrier plate, which includes: a frame body;

[0084] The frame body has a magnetic guide end at the top and a conveying end at the bottom. The frame body includes a first side frame, a second side frame, a bottom frame, and a top frame. The first side frame is connected to the bottom frame and the top frame, respectively. The second side frame is connected to the bottom frame and the top frame, respectively. The bottom frame has a conveying end. The top frame has a magnetic guide end.

[0085] The magnetic guide end includes: a first magnetic rail disposed on the top of the frame and a second magnetic rail disposed on the main body of the PVD device; the first magnetic rail and the second magnetic rail are connected by a gap through magnetic force;

[0086] The second magnetic track is a planar magnetic track, and the magnetic poles of opposite surfaces on the first and second magnetic tracks are opposite.

[0087] The magnetic material used in the first magnetic track is a samarium cobalt magnet;

[0088] The magnet material used in the second magnetic track is a samarium cobalt magnet;

[0089] The distance between the first magnetic rail and the second magnetic rail is 10 mm;

[0090] The conveying end includes: a mechanically connected conveying end; the mechanically connected conveying end includes: a connector disposed at the bottom of the frame body; the connector is connected to a conveying rail disposed on the PVD equipment body.

[0091] Example 2

[0092] This embodiment provides a PVD vertical double-sided deposition carrier plate, which includes: a frame body;

[0093] The frame body has a magnetic guide end at the top and a conveying end at the bottom. The frame body includes a first side frame, a second side frame, a bottom frame, and a top frame. The first side frame is connected to the bottom frame and the top frame, respectively. The second side frame is connected to the bottom frame and the top frame, respectively. The bottom frame has a conveying end. The top frame has a magnetic guide end.

[0094] The magnetic guide end includes: a first magnetic rail disposed on the top of the frame and a second magnetic rail disposed on the main body of the PVD device; the first magnetic rail and the second magnetic rail are connected by a gap through magnetic force;

[0095] The second magnetic track is a concave magnetic track, and the first magnetic track is disposed in the concave groove of the concave magnetic track; the concave magnetic track includes: a concave groove, a first magnet disposed on a first side of the concave groove, and a second magnet disposed on a second side of the concave groove, with the first side and the second side facing each other;

[0096] The magnetic poles of the opposing surfaces of the first magnetic track and the first magnet are the same; the magnetic poles of the opposing surfaces of the first magnetic track and the second magnet are the same; the magnetic poles of the opposing surfaces of the first magnet and the second magnet are opposite.

[0097] The first magnet uses a samarium cobalt magnet as its magnetic material;

[0098] The second magnet uses a samarium cobalt magnet.

[0099] The distance between the first magnetic track and the side of the concave groove is 5mm.

[0100] The transmission end includes: a magnetically connected transmission end; the magnetically connected transmission end includes: a third magnetic rail disposed at the bottom of the frame body and a fourth magnetic rail disposed on the PVD device body; the magnetic poles of the opposite surfaces on the third magnetic rail and the fourth magnetic rail are opposite.

[0101] Comparative Example 1

[0102] The only difference from Embodiment 1 is that the magnetic guide end is replaced with a mechanical guide wheel structure, and the guide wheel surface is provided with grooves, and the carrier plate moves along the designed direction under the guidance of the grooves.

[0103] The glass was coated with double-sided physical and chemical deposition using the carrier plates of the above embodiments and comparative examples. The coating results are shown in Table 1 below.

[0104] Table 1

[0105]

[0106] As shown in Table 1, the carrier plate provided by the present invention, by means of magnetic guidance design, avoids the influence of particles and vibrations generated by traditional mechanical guidance structures on the coating process, which can significantly improve the stability of coating, ensure efficient and continuous coating, and significantly improve the thickness uniformity of the film layer to more than 99.8%.

[0107] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0108] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0109] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A PVD vertical double-sided deposition carrier plate, characterized in that, The PVD vertical double-sided deposition carrier plate includes: a frame body; A magnetic guide end is provided at the top of the frame body; A conveying end is provided at the bottom of the frame body; The magnetic guide end includes: a first magnetic rail disposed on the top of the frame and a second magnetic rail disposed on the main body of the PVD device; the first magnetic rail and the second magnetic rail are connected by a gap through magnetic force.

2. The PVD vertical double-sided deposition carrier plate as described in claim 1, characterized in that, The second magnetic track includes: a planar magnetic track or a concave magnetic track.

3. The PVD vertical double-sided deposition carrier plate as described in claim 2, characterized in that, The second magnetic track is a planar magnetic track, and the magnetic poles of the opposite surfaces on the first and second magnetic tracks are opposite.

4. The PVD vertical double-sided deposition carrier plate as described in claim 3, characterized in that, The magnetic material used in the first magnetic track includes: samarium cobalt magnets; Preferably, the magnetic material used in the second magnetic track includes: samarium cobalt magnets; Preferably, the distance between the first magnetic rail and the second magnetic rail is 10-20 mm.

5. The PVD vertical double-sided deposition carrier plate as described in claim 2, characterized in that, The second magnetic track is a concave magnetic track, and the first magnetic track is disposed in the concave groove of the concave magnetic track.

6. The PVD vertical double-sided deposition carrier plate as described in claim 5, characterized in that, The concave magnetic track includes: a concave groove, a first magnet disposed on a first side of the concave groove, and a second magnet disposed on a second side of the concave groove, wherein the first side and the second side are opposite to each other.

7. The PVD vertical double-sided deposition carrier plate as described in claim 6, characterized in that, The magnetic poles of the opposing surfaces of the first magnetic track and the first magnet are the same; Preferably, the magnetic poles of the opposing surfaces of the first magnetic track and the second magnet are the same; Preferably, the magnetic poles of the opposing surfaces of the first magnet and the second magnet are opposite.

8. The PVD vertical double-sided deposition carrier plate as described in claim 6, characterized in that, The magnetic material used in the first magnet includes: samarium cobalt magnet; Preferably, the magnetic material used in the second magnet includes: samarium cobalt magnet; Preferably, the distance between the first magnetic track and the side of the concave groove is 5-7 mm.

9. The PVD vertical double-sided deposition carrier plate as described in claim 1, characterized in that, The transmission end includes: a mechanically connected transmission end or a magnetically connected transmission end; Preferably, the mechanical connection conveying end includes: a connector disposed at the bottom of the frame body; the connector is connected to a conveyor rail disposed on the PVD equipment body; Preferably, the magnetic connection transmission end includes: a third magnetic rail disposed at the bottom of the frame body and a fourth magnetic rail disposed on the PVD device body; Preferably, the magnetic poles of the opposite faces on the third and fourth magnetic rails are opposite.

10. The PVD vertical double-sided deposition carrier plate as described in claim 1, characterized in that, The frame body includes: a first side border, a second side border, a bottom border, and a top border; The first side border is connected to the bottom border and the top border, respectively; The second side border is connected to the bottom border and the top border respectively; The bottom frame is provided with a transmission end; The top frame is provided with a magnetic guide end.

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