A method for detecting a lifting pin and related apparatus

Abstract

This application discloses a method and related apparatus for detecting lifting needles, relating to the field of semiconductor technology. The method includes: acquiring real-time infrared images of a lifting needle assembly; performing contour matching between the real-time infrared images of the lifting needle assembly and the infrared images of each sample in the infrared image set of the lifting needle assembly; wherein the infrared image set of the lifting needle assembly includes multiple sample infrared images of the lifting needle assembly under normal operating conditions; if no contour-matching image exists in the infrared image set of the lifting needle assembly, an abnormality warning command is generated, where the contour-matching image is the sample infrared image whose contour matches the real-time infrared image of the lifting needle assembly; the abnormality warning command is used to indicate that the lifting needle assembly is in an abnormal operating state. Therefore, this solution utilizes the strong correlation between the component shape and temperature distribution within a vacuum chamber, and identifies the abnormal state of the lifting needle assembly based on infrared imaging technology, improving the real-time performance and accuracy of lifting needle detection.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method and apparatus for detecting a rising needle. Background Technology

[0002] Within the vacuum chamber of a coating equipment, lift pins are primarily used for precise control and movement of wafers or other substrates. The lifting and lowering of the lift pins is typically controlled by a sophisticated drive mechanism to achieve accurate height adjustment and positioning. Abnormal lift pin operation within the coating chamber can lead to wafer process failure or even wafer breakage. However, manual observation of lift pin operation suffers from low accuracy and real-time performance. Therefore, an automatic detection method for lift pins is urgently needed to monitor the real-time status of each lift pin within the coating chamber during equipment operation, ensuring the safe operation of the equipment. Summary of the Invention

[0003] In view of the above problems, this application provides a method and related apparatus for detecting lifting needles, so as to improve the accuracy and real-time performance of lifting needle detection. The specific solution is as follows:

[0004] The first aspect of this application provides a method for detecting a lifting pin, comprising:

[0005] The infrared imaging set of the lifting needle group is obtained. The lifting needle group is composed of multiple lifting needles. The infrared imaging set of the lifting needle group includes multiple infrared imaging samples of the lifting needle group at multiple operating positions when the lifting needle group is in normal operating condition.

[0006] Acquire real-time infrared images of the lifting needle assembly;

[0007] The real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly;

[0008] If the contours do not match, a first anomaly warning is generated; the first anomaly warning is used to indicate that the lifting needle assembly is in an abnormal operating state.

[0009] In one possible implementation, if the contour comparison is inconsistent, a first anomaly warning is generated, including:

[0010] If the infrared imaging set of the lifting needle group does not contain the real-time infrared imaging of the lifting needle group, the real-time infrared imaging and infrared imaging set of each lifting needle are obtained respectively; wherein, the infrared imaging set of the lifting needle includes multiple infrared imaging samples of the lifting needle at multiple operating positions when the lifting needle is in normal operating state.

[0011] For each of the lifting pins, the real-time infrared image of the lifting pin is compared with the infrared image set of the lifting pins in terms of contour.

[0012] If the contour comparison is inconsistent, it is determined that the lifting pin is broken, and the first abnormal warning is used to indicate that the lifting pin is broken.

[0013] In one possible implementation, for each of the rising pins, after performing a contour comparison between the real-time infrared image of the rising pin and the set of infrared images of the rising pins, the method for detecting the rising pins further includes:

[0014] If the contours match, the lifting needle chuck is identified, and the first abnormal warning is used to indicate the lifting needle chuck.

[0015] In one possible implementation, the detection method for the rising / falling pin also includes:

[0016] The real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly in terms of temperature range.

[0017] If the temperature zones do not match, a second abnormality warning is generated, which indicates that the lifting needle assembly is in an abnormal temperature state.

[0018] In one possible implementation, the real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly in terms of temperature range, including:

[0019] If the real-time infrared image of the lifting needle group matches the outline of the infrared image set of the lifting needle group, a target infrared image sample is obtained. The target infrared image sample is the infrared image sample of the lifting needle group that matches the real-time infrared image of the lifting needle group in the infrared image set of the lifting needle group.

[0020] Obtain the temperature range of the real-time infrared imaging of the lifting needle assembly;

[0021] Obtain the temperature range of the target infrared imaging sample;

[0022] Compare whether the temperature range of the real-time infrared imaging and the temperature range of the target infrared imaging sample are consistent. If they are consistent, the detection of the lifting needle group is determined to be successful.

[0023] If there is a discrepancy, a third abnormality warning is generated, which is used to indicate that the lifting needle assembly is in an abnormal temperature state.

[0024] In one possible implementation, the detection method for the rising / falling pin also includes:

[0025] When the lifting needle assembly is in normal operation and the operating speed is a preset first speed, the first image sample of the lifting needle assembly is acquired at a preset first sampling frequency within a preset first acquisition cycle, and multiple first image samples constitute the infrared imaging set of the lifting needle assembly.

[0026] In one possible implementation, the detection method for the rising / falling pin also includes:

[0027] When the lifting needle assembly is in normal operation and the operating speed is a preset second speed, a second image sample of a single lifting needle is acquired at a preset second sampling frequency within a preset second acquisition period, and multiple second image samples constitute the infrared imaging set of the lifting needle.

[0028] A second aspect of this application provides a detection device for a lifting needle, comprising: an imaging acquisition unit, configured to acquire an infrared imaging set of a lifting needle group, wherein the lifting needle group is composed of multiple lifting needles, and the infrared imaging set of the lifting needle group includes multiple infrared imaging samples of the lifting needle group at multiple operating positions when the lifting needle group is in normal operating condition; configured to acquire real-time infrared imaging of the lifting needle group.

[0029] A contour comparison unit is used to perform contour comparison between the real-time infrared image of the lifting needle assembly and the infrared image set of the lifting needle assembly.

[0030] A first early warning unit is used to generate a first abnormality warning if the contour comparison is inconsistent; the first abnormality warning is used to indicate that the lifting pin assembly is in an abnormal operating state. A third aspect of this application provides a computer program product including computer-readable instructions, which, when executed on an electronic device, cause the electronic device to implement the lifting pin detection method of the first aspect or any implementation thereof.

[0031] A fourth aspect of this application provides an electronic device, including at least one processor and a memory connected to the processor, wherein:

[0032] The memory is used to store computer programs;

[0033] The processor is used to execute the computer program so that the electronic device can implement the detection method of the rising and falling needle in the first aspect or any implementation thereof.

[0034] The fifth aspect of this application provides a computer storage medium carrying one or more computer programs, which, when executed by an electronic device, enable the electronic device to perform a method for detecting the rising and falling pins as described in the first aspect or any implementation thereof.

[0035] By employing the above technical solution, this application provides a method and related apparatus for detecting lifting needles. This method pre-establishes an infrared imaging set covering multiple operating positions of the lifting needle assembly under normal operating conditions, and captures real-time infrared images of the lifting needle assembly during equipment operation. The real-time infrared images are then compared with the pre-established infrared imaging set to determine their contours, and an anomaly warning is automatically generated based on the comparison results. Compared to existing technologies that rely on manual observation, this solution automatically performs image acquisition, comparison, and judgment through detection equipment. It enables continuous, online, real-time monitoring of the lifting needle status during equipment operation. Once an anomaly is detected, an immediate warning is issued, reducing the workload for manual labor. Furthermore, based on infrared imaging and contour comparison technology, this solution can objectively and quantitatively assess the operating status of the lifting needle, avoiding misjudgments and delays caused by manual observation. This significantly improves the accuracy and real-time performance of the detection, ensuring the safe and stable operation of the equipment. Attached Figure Description

[0036] The above and other features, advantages, and aspects of the embodiments of this disclosure will become more apparent from the accompanying drawings and the following detailed description. Throughout the drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the originals and elements are not necessarily drawn to scale.

[0037] Figure 1 This is a schematic diagram of the structure of a detection system for a lifting needle provided in an embodiment of this application;

[0038] Figure 2 A flowchart illustrating a method for detecting a lifting needle provided in an embodiment of this application;

[0039] Figure 3 A flowchart illustrating another method for detecting a lifting needle provided in an embodiment of this application;

[0040] Figure 4 A schematic diagram illustrating the operating state of the coating equipment provided in the embodiments of this application;

[0041] Figure 5 A flowchart illustrating another method for detecting a lifting needle provided in an embodiment of this application;

[0042] Figure 6 A flowchart illustrating the specific implementation of a method for detecting a lifting needle provided in an embodiment of this application;

[0043] Figure 7 This is a schematic diagram of the structure of a detection device for a lifting needle provided in an embodiment of this application;

[0044] Figure 8 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0045] The embodiments of this application are described below with reference to the accompanying drawings. The terminology used in the implementation section of this application is for explaining specific embodiments only and is not intended to limit the scope of this application.

[0046] The embodiments of this application will now be described with reference to the accompanying drawings. Those skilled in the art will recognize that, with technological advancements and the emergence of new scenarios, the technical solutions provided in the embodiments of this application are equally applicable to similar technical problems.

[0047] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms are interchangeable where appropriate; this is merely a way of distinguishing objects with the same attributes in the embodiments of this application. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion, so that a process, method, system, product, or apparatus that comprises a series of elements is not necessarily limited to those elements, but may include other elements not explicitly listed or inherent to those processes, methods, products, or apparatuses.

[0048] This application can be applied to a detection system for lift pins in coating equipment. Figure 1 This is a schematic diagram of the structure of a detection system provided in an embodiment of this application, as shown below. Figure 1 As shown, the detection system includes a thermal imaging sensor and detection equipment, wherein the thermal imaging sensor (i.e., a thermal imager) is installed in the vacuum cavity on the side of the Lift Pin. Figure 1 Taking the lifting pin assembly (including three lifting pins: Pin1, Pin2, and Pin3) as an example, the viewing window position is used to obtain a clear side view image. To ensure effective penetration of infrared light, the glass of the viewing window is made of matching germanium glass. The detection device communicates with the thermal imaging sensor for data exchange (imaging signals or control commands, etc.) with the thermal imager. The detection device can be a local control computer, a remote server in the cloud, or other dedicated equipment with data processing capabilities.

[0049] Figure 2 A flowchart illustrating a method for detecting a lifting needle provided in an embodiment of this application is shown below. Figure 2 As shown in the figure, the detection method for a lifting needle provided in this application includes steps S201 to S204, which are described in detail below.

[0050] S201. Obtain the infrared image set of the lifting needle group.

[0051] In this embodiment, the lifting pin group consists of multiple lifting pins. For example, in a typical semiconductor device, three lifting pins (Pin1, Pin2, Pin3) work together to support and move the wafer.

[0052] In this embodiment, the infrared imaging set of the lifting needle assembly includes multiple infrared imaging samples of the lifting needle assembly at multiple operating positions when the lifting needle assembly is in normal operating condition. Normal operating condition refers to a healthy working condition where all equipment parameters are normal, there are no fault alarms, and the lifting needle assembly can successfully complete the expected actions after manual confirmation.

[0053] In this embodiment, the infrared imaging set of the lifting pin group is a standard database pre-collected and established using an infrared imager during the equipment debugging or calibration phase. The multiple operating positions can cover several preset positions traversed by the lifting pin group during the execution of the complete process flow, such as the position carrying the wafer for transfer, the position where the top edge is close to the heating plate for process preparation, and several positions during the rising and falling processes.

[0054] S202. Obtain real-time infrared imaging of the lifting needle assembly.

[0055] In this embodiment, during the real-time operation of the device, the detection device uses a thermal imager to capture infrared images of the lifting needle assembly in real time at a preset frequency (e.g., once every 0.5 seconds or 1 second, or the frequency can be higher or lower), as real-time infrared imaging.

[0056] S203. Compare the real-time infrared image of the lifting needle assembly with the infrared image set of the lifting needle assembly.

[0057] In this embodiment, the real-time infrared image of the captured lifting needle group is compared with the contours of each image sample in the pre-established infrared image set of the lifting needle group to determine whether the overall shape of the multiple lifting needles and the relative positional relationship between each lifting needle in the real-time infrared image match at least one sample image in the infrared image set.

[0058] S204. If the contours do not match, generate the first anomaly warning.

[0059] In this embodiment, the first abnormality warning is used to indicate that the lifting needle assembly is in an abnormal operating state.

[0060] In this embodiment, the contour matching is inconsistent, that is, the overall contour of the real-time infrared imaging does not match the contours of all image samples in the infrared imaging set.

[0061] It should be noted that abnormal operating states encompass a variety of abnormal conditions that may lead to process failure or equipment damage. Optionally, abnormal operating states include positional anomalies caused by factors such as broken lifting pins or chucks. For example, if a lifting pin breaks, its original outline will disappear or become misaligned, causing the overall image to not match any normal image sample. If a lifting pin is chuckled, remaining at an abnormal height, it will also disrupt the standard geometric outline formed by the three lifting pins, resulting in inconsistent outline comparisons.

[0062] As can be seen from the above technical solution, the method for detecting rising needles provided in this application pre-establishes an infrared imaging set covering multiple operating positions of the rising needle assembly under normal operating conditions, and captures real-time infrared images of the rising needle assembly during equipment operation. Then, it compares the real-time infrared images with the pre-established infrared imaging set to identify contours, and automatically generates an anomaly warning based on the comparison results. Compared to the existing technology that relies on manual observation, this solution automatically performs image acquisition, comparison, and judgment through the detection equipment. It can continuously and online monitor the status of the rising needles in real time during equipment operation. Once an anomaly is detected, an immediate warning can be issued without manual intervention. Furthermore, based on infrared imaging and contour comparison technology, this solution can objectively and quantitatively evaluate the operating status of the rising needles, avoiding misjudgments and delays caused by manual observation, significantly improving the accuracy and real-time performance of detection, and ensuring the safe and stable operation of the equipment.

[0063] See Figure 3 , Figure 3 This is a flowchart illustrating another method for detecting a lifting needle provided in an embodiment of this application. Figure 3 This illustrates the specific implementation process for further distinguishing between fracture and chuck abnormality through single-needle contour comparison when the overall contour comparison is inconsistent. For example... Figure 3 As shown, this method specifically includes:

[0064] S301. If the infrared imaging set of the lifting needle group does not contain the real-time infrared imaging of the lifting needle group, obtain the real-time infrared imaging and infrared imaging set of each lifting needle respectively.

[0065] In this embodiment, the absence of real-time infrared imaging of the lifting needle group in the infrared imaging set indicates that the overall contour comparison of the real-time infrared imaging of the lifting needle group is inconsistent, suggesting that the lifting needle group as a whole is in an abnormal operating state.

[0066] Furthermore, the detection equipment acquires real-time infrared images of each lifting pin, as well as a pre-established set of infrared images of each independent lifting pin. The set of infrared images of the lifting pin includes multiple infrared image samples of the lifting pin at various operating positions when it is in normal operation, i.e., second image samples.

[0067] S302. For each lifting pin, perform a contour comparison between the real-time infrared image of the lifting pin and the set of infrared images of the lifting pin.

[0068] In this embodiment, the real-time infrared image of each lifting pin is compared with the contours of each infrared image sample in the infrared image set of that lifting pin. It can be understood that the contour comparison in this step focuses on whether the shape of a single lifting pin is complete and whether it matches its standard contour in its normal state.

[0069] S303. If the contour comparison is inconsistent, it is determined that the lifting needle is broken. The first abnormal warning is used to indicate the breakage of the lifting needle.

[0070] In this embodiment, for any given lifting pin, if the contour of its real-time infrared imaging does not match the contours of all infrared imaging samples in the lifting pin's infrared imaging set, then the lifting pin is determined to have broken. For example, after the lifting pin breaks, its upper part may tilt onto the surface of the heating plate, or its lower part may fall off its original position, causing its contour features to be completely different from the normal state, thus making it impossible to match any infrared imaging sample.

[0071] At this point, the first abnormal warning generated is specifically used to indicate that the lifting needle has broken.

[0072] S304. If the contours match, the lifting needle chuck is identified. The first abnormal warning is used to indicate the lifting needle chuck.

[0073] In this embodiment, for any single lifting pin, if its real-time infrared imaging profile can be successfully matched with the infrared imaging sample in the infrared imaging set of that lifting pin, but the overall image of the lifting pin group cannot be matched, then it is determined that the lifting pin has jammed. This is because jamming usually manifests as the lifting pin being stuck at an abnormal height position (such as protruding from the upper surface of the heating plate), causing its own shape to remain intact, but its relative positional relationship with other lifting pins to change, thereby disrupting the matching of the overall image.

[0074] At this point, the first abnormal warning generated is specifically used to indicate that the lifting needle has jammed.

[0075] As can be seen from the above technical solutions, the method for detecting lifting pins provided in this application, based on the discovery of anomalies through overall contour comparison, further distinguishes between two different anomaly types—lifting pin breakage and lifting pin jamming—by performing individual contour comparison and analysis on each lifting pin separately. It also precisely locates the lifting pin where the anomaly occurred. Based on this, the solution achieves refined identification of anomaly types and precise location of anomalies, providing clearer and more instructive fault information. This helps shorten troubleshooting time, improve equipment maintenance efficiency, and further ensures the safe and stable operation of the equipment.

[0076] It should be noted that the pre-established infrared imaging set is the foundation for accurate comparison. By collecting infrared imaging samples at different operating positions, it can be ensured that the infrared imaging set fully covers the contour features and temperature distribution of the lifting needle assembly during healthy operation, providing a reliable basis for real-time comparison. Based on this, the lifting needle detection method provided in this application embodiment also includes at least one of the following infrared imaging set sampling methods:

[0077] In one alternative embodiment, the sampling method for the infrared imaging set includes:

[0078] When the lifting needle assembly is in normal operation and its operating speed is a preset first speed, first image samples of the lifting needle assembly are acquired within a preset first acquisition cycle at a preset first sampling frequency. Multiple first image samples constitute the infrared imaging set of the lifting needle assembly.

[0079] Specifically, the sampling process of the infrared imaging array can be performed when the equipment is operating under vacuum. First, the lifting pin assembly is adjusted to the film transfer position and calibrated to ensure that the shooting angle and position of the thermal imaging sensor are fixed. Figure 4 This is a schematic diagram illustrating the operating state of the coating equipment provided in the embodiments of this application. Figure 4 The diagram shows a side view of the lifting pin assembly in the transfer position. After calibration, keeping the thermal imaging position unchanged, thermal images containing all lifting pins (e.g., Pin1, Pin2, Pin3) are acquired from the same angle at a sampling frequency of once per second (i.e., the preset first sampling frequency). These are the first image samples, primarily showing the scene between the heating plate and the base. Multiple acquisitions are performed, encompassing actions from multiple process cycles, until there are no significant differences between the acquired thermal images. The acquired first image samples are then processed to form an infrared imaging set containing multiple first image samples of the lifting pin assembly, which is used for subsequent monitoring of the overall operating status of the lifting pin assembly.

[0080] In another alternative embodiment, the sampling method for the infrared imaging set includes:

[0081] When the lifting needle assembly is in normal operation and its operating speed is a preset second speed, a second image sample of a single lifting needle is acquired within a preset second acquisition cycle at a preset second sampling frequency. Multiple second image samples constitute an infrared imaging set of the lifting needle.

[0082] Specifically, the sampling process for the infrared imaging set can be performed while the device is running slowly. The device is adjusted to operate at a low speed, and after manual monitoring confirms that there are no abnormalities in the lifting pins, thermal imaging images containing all lifting pins are acquired at a sampling frequency of once every 0.5 seconds (i.e., the preset second sampling frequency). Acquisition continues for a preset time period, such as 60 minutes (i.e., the preset second acquisition period). The acquired thermal imaging images are then processed, and individual images of each lifting pin (e.g., Pin1, Pin2, Pin3) are extracted, forming the second image sample. These individual infrared imaging sets for each lifting pin are then used to accurately determine which lifting pin is malfunctioning.

[0083] In another alternative embodiment, the first sampling frequency and the second sampling frequency can be the same.

[0084] See 5. Figure 5 This is a flowchart illustrating another method for detecting a lifting needle provided in an embodiment of this application. Figure 5 This illustrates the specific implementation process of identifying temperature anomalies through temperature zone comparison, specifically monitoring and judging the thermal state of the lifting needle assembly based on infrared imaging temperature information. For example... Figure 5 As shown, this method specifically includes:

[0085] S501, Acquire target infrared imaging sample.

[0086] In this embodiment, the target infrared imaging sample is the infrared imaging sample of the lifting needle group that matches the real-time infrared imaging of the lifting needle group in the infrared imaging set of the lifting needle group, that is, the image sample that has the same or similar contour features as the current real-time infrared imaging.

[0087] It should be noted that S501 can be executed after the real-time infrared image of the lifting needle group matches the outline of the infrared image set of the lifting needle group, in order to conduct a deeper health status check. In this case, the target infrared image sample is the infrared image sample of the lifting needle group that matches the real-time infrared image of the lifting needle group, determined from the infrared image set of the lifting needle group based on the outline comparison result.

[0088] In addition, S501 can also be executed in parallel with the contour comparison process to achieve multi-dimensional and synchronous status monitoring. In this case, the target infrared imaging sample can be an infrared imaging sample selected from the infrared imaging set of the lifting needle group based on preset matching rules. For example, an infrared imaging sample corresponding to the current real-time infrared imaging in the time dimension can be selected, or a standard temperature sample of the lifting needle group under the same process step and the same operating position can be selected. It can be understood that the parallel temperature zone comparison can be used as a temperature monitoring method independent of the contour status and can be carried out synchronously with the contour comparison to achieve multi-dimensional and real-time status monitoring.

[0089] S502, Obtain the temperature range of the real-time infrared imaging of the lifting needle assembly.

[0090] In this embodiment, based on the working principle of the thermal imaging sensor, different temperatures are represented by different colors or grayscale values ​​in the image. Therefore, the detection device analyzes the real-time infrared image, extracts the temperature information of each lifting pin area in the image, and determines its corresponding temperature range. For example, the heating plate temperature is approximately 550-600℃ (corresponding to the red area), the lifting pin temperature is approximately 300-400℃ (corresponding to the blue area), and the cavity temperature is approximately 100℃ (corresponding to the black area). The corresponding temperature range can be determined by the color distribution of the image.

[0091] S503, Obtain the temperature range of the target infrared imaging sample.

[0092] In this embodiment, the detection device analyzes the target infrared imaging sample and extracts the temperature information of the area where each lifting needle is located in the target infrared imaging sample in order to determine its standard temperature range under normal operating conditions.

[0093] S504. Compare whether the temperature range of the real-time infrared imaging and the temperature range of the target infrared imaging sample are consistent.

[0094] In this embodiment, the detection device compares the temperature range of the real-time infrared imaging with the temperature range of the target infrared imaging sample to determine whether the distribution of the temperature range is consistent. For example, if the area of ​​the rising and falling needle that should be displayed as blue in the real-time infrared imaging turns purple, it indicates that the temperature exceeds the normal range, and the temperature range is determined to be inconsistent.

[0095] S505. If the temperature range of the real-time infrared imaging is consistent with the temperature range of the target infrared imaging sample, the detection of the lifting needle group is confirmed to be successful.

[0096] S506. If the real-time infrared image of the lifting needle group is inconsistent with the infrared image set of the lifting needle group in terms of temperature range, an abnormal temperature warning will be generated.

[0097] In this embodiment, when the temperature zone comparison results are inconsistent, a temperature abnormality warning is generated and issued to indicate that the lifting pin group is in an abnormal temperature state, indicating that the lifting pin group has a temperature abnormality and needs to be dealt with in time to avoid process failure or equipment damage.

[0098] In this embodiment, the temperature abnormality warning includes a second abnormality warning and a third abnormality warning. Both the second and third abnormality warnings are used to indicate that the lifting needle assembly is in an abnormal temperature state.

[0099] Specifically, if the real-time infrared imaging of the lifting needle group and the infrared imaging set contour comparison process of the lifting needle group are executed simultaneously in steps S501~S504, and it is determined that the temperature range of the real-time infrared imaging and the temperature range of the target infrared imaging sample are inconsistent, then a second abnormal warning is generated to indicate that the lifting needle group is in an abnormal temperature state.

[0100] After the real-time infrared image of the lifting needle group matches the outline of the infrared image set of the lifting needle group, execute S501~S504 to determine that the temperature range of the real-time infrared image and the temperature range of the target infrared image sample are inconsistent. Then, generate a third abnormal warning to indicate that the lifting needle group is in a state of normal outline but abnormal temperature.

[0101] As can be seen from the above technical solutions, the lifting pin detection method provided in this application introduces a temperature zone comparison mechanism on the basis of contour comparison, thereby achieving more comprehensive and detailed monitoring of the operating status of the lifting pin assembly. Temperature zone comparison can identify situations where the contour appears normal but the temperature has become abnormal, promptly detecting potential heating faults or heat conduction problems and avoiding process failures due to temperature anomalies. Simultaneously, by setting differentiating between second and third anomaly warnings, the comprehensiveness and accuracy of lifting pin status monitoring are further improved, providing a more reliable guarantee for the safe and stable operation of the equipment.

[0102] Based on the above embodiments, Figure 6 This application provides a specific implementation flow of a method for detecting a lifting needle, as follows: Figure 6 As shown, the specific testing method for the lifting needle includes:

[0103] The first step is to obtain the overall infrared imaging set of the lifting needle group consisting of multiple first image samples and the individual infrared imaging set of the lifting needle consisting of multiple second image samples, in order to construct a standard contour image library.

[0104] In this embodiment, during the equipment debugging or calibration phase, infrared images of the lifting needle assembly under normal operating conditions are pre-acquired to construct a standard contour image library. This standard contour image library includes two types of samples: first image samples and second image samples. Specifically, when the lifting needle assembly is in normal operating condition and its operating speed is a preset first speed, first image samples of the lifting needle assembly are acquired within a preset first acquisition period at a preset first sampling frequency. Multiple first image samples constitute the infrared imaging set of the lifting needle assembly. When the lifting needle assembly is in normal operating condition and its operating speed is a preset second speed, second image samples of a single lifting needle are acquired within a preset second acquisition period at a preset second sampling frequency. Multiple second image samples constitute the infrared imaging set of the lifting needle.

[0105] The second step is to determine whether the overall outline is consistent.

[0106] During real-time operation of the equipment, the detection equipment captures real-time infrared images of the lifting needle group through a thermal imager and compares them with the pre-established overall infrared image set of the lifting needle group to determine whether the overall contour composed of multiple lifting needles matches at least one sample image in the infrared image set.

[0107] For example, during normal operation, in the real-time infrared image captured at the transfer position, the outlines of the three rising pins, Pin1, Pin2, and Pin3, are clear and complete, and their positional relationships conform to the standard. The detection equipment compares this real-time infrared image with a pre-established set of overall infrared images. If an image sample with consistent outline features can be found, the outline comparison is determined to be consistent; if the outline of Pin2 is missing or its position is significantly offset in the real-time infrared image, and it cannot be matched with any image sample, the outline comparison is determined to be inconsistent.

[0108] If the overall profile matches, proceed to the fourth step for a more in-depth health status check.

[0109] If the overall contour comparison is inconsistent, that is, the overall contour of the real-time infrared imaging does not match the contours of all image samples in the overall infrared imaging set, it indicates that the entire lifting needle assembly is in an abnormal operating state, and proceeds to the third step to distinguish the specific abnormality type.

[0110] It should be noted that abnormal operating states encompass a variety of abnormal conditions that may lead to process failure or equipment damage. Optionally, abnormal operating states include positional anomalies caused by factors such as broken lifting pins or chucks. For example, if a lifting pin breaks, its original outline will disappear or become misaligned, causing the overall image to mismatch with any image sample. If a lifting pin chucks, it will remain at an abnormal height position, which will also disrupt the standard geometric outline formed by the three lifting pins, resulting in inconsistent outline comparisons.

[0111] The third step is to determine whether the individual pin outlines are consistent.

[0112] For cases where the overall contour comparison is inconsistent, a separate contour comparison is performed for each lifting pin. Specifically, real-time infrared images of each lifting pin are acquired, and the real-time infrared image of each lifting pin is compared with the contours of each infrared image sample in the individual infrared image set of that lifting pin. Based on the comparison results, the following two cases can be distinguished:

[0113] If a single pin profile mismatch exists, meaning the real-time profile of the rising pin does not match the profiles of any infrared imaging samples in its independent infrared imaging set, then the rising pin is determined to be broken. For example, if comparing the real-time infrared image of Pin2 with the independent infrared imaging set of Pin2 reveals that no image samples can be matched, while the real-time infrared images of Pin1 and Pin3 can be successfully matched with their respective image samples, then Pin2 is determined to be broken. For example, after the rising pin breaks, its upper part may tilt onto the surface of the heating plate, or its lower part may fall off its original position, causing its profile characteristics to be completely different from the normal state, thus making it impossible to match any infrared imaging samples. In this case, a first anomaly warning is generated, specifically to indicate that Pin2 is broken.

[0114] If the contours of all the lifting pins are consistent, meaning that the real-time infrared imaging contour of each lifting pin can be successfully matched with the infrared imaging sample in its independent infrared imaging set, but the overall image of the lifting pin group cannot be matched, then it is determined that the lifting pin has jammed. For example, by comparing the real-time infrared images of Pin1, Pin2, and Pin3 with their respective independent infrared imaging sets, and determining that the contours of the three lifting pins can be successfully matched with the image samples, it is determined that jamming has occurred. At this time, a first anomaly warning is generated, specifically to indicate that the lifting pin is jammed.

[0115] Step 4: Determine if the temperature zones are consistent.

[0116] For lifting pin assemblies with consistent overall contours, further temperature zone comparison is performed. Specifically, target infrared imaging samples are obtained, and the temperature ranges of the real-time infrared imaging of the lifting pin assembly and the target infrared imaging samples are acquired separately. Further, the temperature ranges of the real-time infrared imaging and the target infrared imaging samples are compared to determine if they are consistent. The temperature ranges of the real-time infrared imaging and the target infrared imaging samples are compared using a detection device to determine if the temperature range distribution is consistent. For example, in the target infrared imaging sample, Pin1, Pin2, and Pin3 all appear as normal blue (300-400℃). However, in the real-time infrared imaging, the Pin1 area appears purple, indicating that the temperature exceeds the normal range, thus determining that the temperature ranges are inconsistent. Based on the comparison results, the following two situations can be distinguished:

[0117] If the temperature ranges match, meaning the temperature range of the real-time infrared imaging matches the temperature range of the target infrared imaging sample, then the lifting needle assembly has passed the test and is considered to be operating normally. For example, if Pin1, Pin2, and Pin3 are all displayed as blue in the real-time infrared imaging, which is completely consistent with the color distribution of the target sample, then the temperature ranges match, and the lifting needle assembly is operating normally.

[0118] If the temperature range mismatch occurs, meaning the temperature range of the real-time infrared imaging differs from the temperature range of the target infrared imaging sample, a temperature anomaly warning is generated to indicate that the lifting pin assembly is in a state where the outline is normal but the temperature is abnormal. For example, in the real-time infrared imaging, the outlines of Pin1, Pin2, and Pin3 are complete and the positions are correct, but the Pin1 area is displayed as purple, while Pin1 in the target sample is displayed as blue. This indicates a temperature range mismatch, and the generated temperature anomaly warning is the third anomaly warning, used to indicate that the lifting pin assembly is in a state where the outline is normal but the temperature is abnormal, suggesting a possible hidden problem such as a heating malfunction or poor heat conduction.

[0119] As can be seen from the above technical solution, the embodiments of this application achieve multi-level and refined monitoring of the operating status of the riser pin assembly. This process adopts a coarse-to-fine detection strategy, quickly screening for anomalies through overall contour comparison, then precisely locating the type and location of anomalies through single-pin contour comparison, and finally identifying hidden temperature anomalies through temperature zone comparison based on the confirmed normal contour, forming a complete detection closed loop. Based on this, the process achieves comprehensive anomaly coverage, capable of simultaneously detecting three different types of faults: breakage, jamming, and abnormal temperature rise, covering the main abnormal situations that may occur during the operation of the riser pin. Simultaneously, precise fault location is achieved through single-pin contour comparison, not only determining whether an anomaly has occurred but also accurately identifying which riser pin has broken or jammed, providing clear guidance for equipment maintenance. Furthermore, temperature zone comparison performed after contour comparison can identify hidden problems where the contour appears normal but the temperature has already become abnormal, providing early warning of potential heating faults and avoiding process failures due to temperature anomalies. This multi-dimensional and hierarchical detection strategy significantly improves the comprehensiveness, accuracy, and real-time performance of riser pin status monitoring, providing a reliable guarantee for the safe and stable operation of semiconductor equipment.

[0120] The above describes a method for detecting a lifting needle according to an embodiment of this application. The following describes the apparatus for performing the above-described method for detecting a lifting needle.

[0121] Please see Figure 7 , Figure 7 This is a schematic diagram of a detection device for a lifting needle provided in an embodiment of this application. Figure 7 As shown, the detection device 700 for the lifting needle includes:

[0122] The first imaging acquisition unit 701 is used to acquire the infrared imaging set of the lifting needle group, the lifting needle group is composed of multiple lifting needles, and the infrared imaging set of the lifting needle group includes multiple infrared imaging samples of the lifting needle group at multiple operating positions when the lifting needle group is in normal operating state.

[0123] The second imaging acquisition unit 702 is used to acquire real-time infrared images of the lifting needle assembly.

[0124] The contour comparison unit 703 is used to perform contour comparison between the real-time infrared image of the lifting needle group and the infrared image set of the lifting needle group.

[0125] The first early warning unit 704 is used to generate a first abnormal warning if the contour comparison is inconsistent; the first abnormal warning is used to indicate that the lifting needle assembly is in an abnormal operating state.

[0126] In another embodiment, the imaging acquisition unit can be a single unit, which can be used during the debugging phase to acquire the infrared imaging set of the lifting needle group, which consists of multiple lifting needles, and the infrared imaging set of the lifting needle group includes multiple infrared imaging samples of the lifting needle group at multiple operating positions when the lifting needle group is in normal operation, and can also be used during the production phase to acquire real-time infrared imaging of the lifting needle group.

[0127] In another embodiment, two or more imaging acquisition units are used, which can acquire infrared images in different directions in the circumferential direction of the vacuum cavity, thereby overcoming possible situations such as pins being blocked by internal components or overlapping in a single direction due to a large number of pins.

[0128] In one possible implementation, the first warning unit is used to generate a first anomaly warning if the contour comparison is inconsistent, specifically for:

[0129] If the infrared imaging set of the lifting needle group does not contain the real-time infrared imaging of the lifting needle group, the real-time infrared imaging and infrared imaging set of each lifting needle are obtained respectively; wherein, the infrared imaging set of the lifting needle includes multiple infrared imaging samples of the lifting needle at multiple operating positions when the lifting needle is in normal operating state.

[0130] For each of the lifting pins, the real-time infrared image of the lifting pin is compared with the infrared image set of the lifting pins in terms of contour.

[0131] If the contour comparison is inconsistent, it is determined that the lifting pin is broken, and the first abnormal warning is used to indicate that the lifting pin is broken.

[0132] In one possible implementation, the first early warning unit is also used for:

[0133] For each of the rising pins, after performing a contour comparison between the real-time infrared image of the rising pin and the infrared image set of the rising pin, if the contour comparison matches, the rising pin chuck is determined, and the first abnormal warning is used to indicate the rising pin chuck.

[0134] In one possible implementation, the detection method for the rising pin also includes a temperature zone comparison unit, used for:

[0135] The real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly in terms of temperature range.

[0136] If the temperature zones do not match, a second abnormality warning is generated, which indicates that the lifting needle assembly is in an abnormal temperature state.

[0137] In one possible implementation, the temperature zone comparison unit is used to perform a temperature zone comparison between the real-time infrared image of the lifting needle assembly and the infrared image set of the lifting needle assembly, specifically for:

[0138] If the real-time infrared image of the lifting needle group matches the outline of the infrared image set of the lifting needle group, a target infrared image sample is obtained. The target infrared image sample is the infrared image sample of the lifting needle group that matches the real-time infrared image of the lifting needle group in the infrared image set of the lifting needle group.

[0139] Obtain the temperature range of the real-time infrared imaging of the lifting needle assembly;

[0140] Obtain the temperature range of the target infrared imaging sample;

[0141] Compare whether the temperature range of the real-time infrared imaging and the temperature range of the target infrared imaging sample are consistent. If they are consistent, the detection of the lifting needle group is determined to be successful.

[0142] If there is a discrepancy, a third abnormality warning is generated, which is used to indicate that the lifting needle assembly is in an abnormal temperature state.

[0143] In one possible implementation, the detection device for the rising needle further includes a first sampling unit for:

[0144] When the lifting needle assembly is in normal operation and the operating speed is a preset first speed, the first image sample of the lifting needle assembly is acquired at a preset first sampling frequency within a preset first acquisition cycle, and multiple first image samples constitute the infrared imaging set of the lifting needle assembly.

[0145] In one possible implementation, the detection device for the rising needle further includes a second sampling unit for:

[0146] When the lifting needle assembly is in normal operation and the operating speed is a preset second speed, a second image sample of a single lifting needle is acquired at a preset second sampling frequency within a preset second acquisition period, and multiple second image samples constitute the infrared imaging set of the lifting needle.

[0147] This application also provides an electronic device, which includes at least one processor and a memory connected to the processor, wherein: the memory is used to store a computer program; the processor is used to execute the computer program to enable the electronic device to implement any one of the methods for detecting a rising or falling needle. Specifically, Figure 8This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. The electronic device in this embodiment may include, but is not limited to, fixed terminals such as mobile phones, laptops, PDAs (personal digital assistants), PADs (tablet computers), desktop computers, etc. Figure 8 The electronic device shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments of this application.

[0148] like Figure 8 As shown, the electronic device may include a processing unit (e.g., a central processing unit, a graphics processing unit, etc.) 801, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 802 or a program loaded from a storage device 808 into a random access memory (RAM) 803. When the electronic device is powered on, the RAM 803 also stores various programs and data required for the operation of the electronic device. The processing unit 801, ROM 802, and RAM 803 are interconnected via a bus 804. An input / output (I / O) interface 805 is also connected to the bus 804.

[0149] Typically, the following devices can be connected to I / O interface 805: input devices 806 including, for example, touchscreens, touchpads, keyboards, mice, cameras, microphones, accelerometers, gyroscopes, etc.; output devices 807 including, for example, liquid crystal displays (LCDs), speakers, vibrators, etc.; storage devices 808 including, for example, memory cards, hard drives, etc.; and communication devices 809. Communication device 809 allows electronic devices to communicate wirelessly or wiredly with other devices to exchange data. Although Figure 8 Electronic devices with various devices are shown, but it should be understood that it is not required to implement or have all of the devices shown. More or fewer devices may be implemented or have alternatively.

[0150] This application also provides a computer program product including computer-readable instructions, which, when executed on an electronic device, cause the electronic device to implement any of the rising needle detection methods provided in this application.

[0151] This application also provides a computer-readable storage medium carrying one or more computer programs. When the one or more computer programs are executed by an electronic device, the electronic device can implement any of the rising and falling needle detection methods provided in this application.

[0152] It should also be noted that the device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. In addition, in the device embodiment drawings provided in this application, the connection relationship between modules indicates that they have a communication connection, which can be implemented as one or more communication buses or signal lines.

[0153] Through the above description of the embodiments, those skilled in the art can clearly understand that this application can be implemented by means of software plus necessary general-purpose hardware, or it can be implemented by special-purpose hardware including application-specific integrated circuits, special-purpose CPUs, special-purpose memory, special-purpose components, etc. Generally, any function performed by a computer program can be easily implemented by corresponding hardware, and the specific hardware structure used to implement the same function can also be diverse, such as analog circuits, digital circuits, or special-purpose circuits. However, for this application, software program implementation is more often the preferred implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a readable storage medium, such as a computer floppy disk, USB flash drive, mobile hard disk, ROM, RAM, magnetic disk, or optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, training equipment, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0154] In the above embodiments, implementation can be achieved, in whole or in part, through software, hardware, firmware, or any combination thereof. When implemented in software, it can be implemented, in whole or in part, as a computer program product.

[0155] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions may be transmitted from one website, computer, training device, or data center to another website, computer, training device, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that a computer can store or a data storage device such as a training device or data center that integrates one or more available media. The available media may be magnetic media (e.g., floppy disks, hard disks, magnetic tapes), optical media (e.g., DVDs), or semiconductor media (e.g., solid-state drives (SSDs)).

Claims

1. A method for detecting a lifting needle, characterized in that, include: The infrared imaging set of the lifting needle group is obtained. The lifting needle group is composed of multiple lifting needles. The infrared imaging set of the lifting needle group includes multiple infrared imaging samples of the lifting needle group at multiple operating positions when the lifting needle group is in normal operating condition. Acquire real-time infrared images of the lifting needle assembly; The real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly; If the contours do not match, a first anomaly warning is generated; the first anomaly warning is used to indicate that the lifting needle assembly is in an abnormal operating state.

2. The method for detecting the lifting needle according to claim 1, characterized in that, If the contour comparison is inconsistent, a first anomaly warning is generated, including: If the infrared imaging set of the lifting needle group does not contain the real-time infrared imaging of the lifting needle group, the real-time infrared imaging and infrared imaging set of each lifting needle are obtained respectively; wherein, the infrared imaging set of the lifting needle includes multiple infrared imaging samples of the lifting needle at multiple operating positions when the lifting needle is in normal operating state. For each of the lifting pins, the real-time infrared image of the lifting pin is compared with the infrared image set of the lifting pins in terms of contour. If the contour comparison is inconsistent, it is determined that the lifting pin is broken, and the first abnormal warning is used to indicate that the lifting pin is broken.

3. The method for detecting the lifting needle according to claim 2, characterized in that, For each of the rising pins, after performing a contour comparison between the real-time infrared image of the rising pin and the infrared image set of the rising pins, the method for detecting the rising pins further includes: If the contours match, the lifting needle chuck is identified, and the first abnormal warning is used to indicate the lifting needle chuck.

4. The method for detecting the lifting needle according to claim 1, characterized in that, The method for detecting the lifting needle also includes: The real-time infrared image of the lifting needle assembly is compared with the infrared image set of the lifting needle assembly in terms of temperature range. If the temperature zones do not match, a second abnormality warning is generated, which indicates that the lifting needle assembly is in an abnormal temperature state.

5. The method for detecting the lifting needle according to claim 4, characterized in that, The step of comparing the real-time infrared image of the lifting needle assembly with the infrared image set of the lifting needle assembly in terms of temperature range includes: If the real-time infrared image of the lifting needle group matches the outline of the infrared image set of the lifting needle group, a target infrared image sample is obtained. The target infrared image sample is the infrared image sample of the lifting needle group that matches the real-time infrared image of the lifting needle group in the infrared image set of the lifting needle group. Obtain the temperature range of the real-time infrared imaging of the lifting needle assembly; Obtain the temperature range of the target infrared imaging sample; Compare whether the temperature range of the real-time infrared imaging and the temperature range of the target infrared imaging sample are consistent. If they are consistent, the detection of the lifting needle group is determined to be successful. If there is a discrepancy, a third abnormality warning is generated, which is used to indicate that the lifting needle assembly is in an abnormal temperature state.

6. The method for detecting the lifting needle according to claim 1, characterized in that, The method for detecting the lifting needle also includes: When the lifting needle assembly is in normal operation and the operating speed is a preset first speed, the first image sample of the lifting needle assembly is acquired at a preset first sampling frequency within a preset first acquisition cycle, and multiple first image samples constitute the infrared imaging set of the lifting needle assembly.

7. The method for detecting the lifting needle according to claim 3, characterized in that, The method for detecting the lifting needle also includes: When the lifting needle assembly is in normal operation and the operating speed is a preset second speed, a second image sample of a single lifting needle is acquired at a preset second sampling frequency within a preset second acquisition period, and multiple second image samples constitute the infrared imaging set of the lifting needle.

8. A detection device for a lifting needle, characterized in that, include: An imaging acquisition unit is used to acquire an infrared imaging set of a lifting needle assembly, wherein the lifting needle assembly consists of multiple lifting needles, and the infrared imaging set of the lifting needle assembly includes multiple infrared imaging samples of the lifting needle assembly at multiple operating positions when the lifting needle assembly is in normal operating condition; and is used to acquire real-time infrared imaging of the lifting needle assembly. A contour comparison unit is used to perform contour comparison between the real-time infrared image of the lifting needle assembly and the infrared image set of the lifting needle assembly. The first early warning unit is used to generate a first abnormality warning if the contour comparison is inconsistent; the first abnormality warning is used to indicate that the lifting needle assembly is in an abnormal operating state.

9. A computer program product, characterized in that, Includes computer-readable instructions that, when executed on an electronic device, cause the electronic device to implement the detection method for the rising needle as described in any one of claims 1 to 7.

10. An electronic device, characterized in that, It includes at least one processor and a memory connected to the processor, wherein: The memory is used to store computer programs; The processor is used to execute the computer program to enable the electronic device to implement the detection method of the rising needle as described in any one of claims 1 to 7.

11. A computer storage medium, characterized in that, The storage medium carries one or more computer programs that, when executed by an electronic device, enable the electronic device to implement the detection method for the rising and falling needle as described in any one of claims 1 to 7.

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