Gate valve device and rapid thermal processing apparatus

Abstract

This disclosure provides a valve device and a rapid thermal processing apparatus, relating to the field of semiconductor equipment technology. The valve device includes: a frame for mounting to a chamber; a first drive member and a sealing plate seat, the first drive member being mounted to the frame and used to drive the sealing plate seat to move relative to the frame along a first direction; a second drive member and a sealing plate, the second drive member being mounted to the sealing plate seat and used to drive the sealing plate to move relative to the sealing plate seat along a second direction; the second direction being perpendicular to the first direction; a first detection member mounted to one of the first drive member, the sealing plate seat, and the frame; and a control unit communicatively connected to the first drive member, the first detection member, and the second drive member, used to control the first drive member to stop working and control the second drive member to drive the sealing plate to close the opening of the chamber when the sealing plate seat is determined to have moved to a first target position based on the detection result of the first detection member.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment technology, and more particularly to a valve device and a rapid thermal processing device. Background Technology

[0002] Rapid Thermal Processing (RTP) equipment can heat an entire semiconductor workpiece to a temperature range of 400~1300℃ in a short time. RTP equipment plays a crucial role in the semiconductor manufacturing process. Through rapid heating and cooling, it can effectively control the diffusion and activation of impurities, thereby improving the performance and reliability of semiconductor workpieces. Summary of the Invention

[0003] This disclosure provides a valve device and a rapid heat treatment apparatus.

[0004] According to one aspect of this disclosure, a valve device for a chamber is provided, comprising: a frame for mounting to the chamber; a first drive member and a sealing plate seat, the first drive member being mounted to the frame and connected to the sealing plate seat, the first drive member being used to drive the sealing plate seat to move relative to the frame along a first direction; the first direction being parallel to the axial direction of the chamber; a second drive member and a sealing plate, the second drive member being mounted to the sealing plate seat and connected to the sealing plate, the second drive member being used to drive the sealing plate to move relative to the sealing plate seat along a second direction; the second direction being perpendicular to the first direction; a first detection member for mounting to one of the first drive member, the sealing plate seat, and the frame; and a control unit communicatively connected to the first drive member, the first detection member, and the second drive member, for controlling the first drive member to stop working and controlling the second drive member to drive the sealing plate to close the opening of the chamber when the sealing plate seat is determined to have moved to a first target position based on the detection result of the first detection member.

[0005] In some embodiments, the valve device further includes: a third detection element, installed to one of the sealing plate and the chamber, communicatively connected to the control unit, for detecting whether the sealing plate has moved to a sealing position in the direction toward the chamber.

[0006] In some embodiments, the frame is provided with at least one first guide shaft extending along the first direction; the sealing plate seat is slidably connected to the first guide shaft.

[0007] In some embodiments, the first driving member includes: a first cylinder, the inlet end of the first cylinder being provided with a first inlet speed regulating valve, the outlet end of the first cylinder being provided with a first outlet speed regulating valve, the first inlet speed regulating valve and the first outlet speed regulating valve being communicatively connected to the control unit; the valve device further includes: a first elastic element for providing a buffering force when the piston of the first cylinder extends to a first limit position; and / or, a second elastic element for providing a buffering force when the piston of the first cylinder retracts to a second limit position.

[0008] In some embodiments, the first detection element is installed on the first driving element to detect whether the output end of the first driving element has moved to a first limit position; wherein, when the output end of the first driving element moves to the first limit position, the sealing plate seat moves to a first target position.

[0009] In some embodiments, the valve device further includes: a second detection element, installed on the first drive element, for detecting whether the output end of the first drive element moves to a second limit position in a direction away from the first limit position; the second detection element is communicatively connected to the control unit.

[0010] In some embodiments, the valve device further includes: a second guide shaft extending along the second direction, fixedly connected to one of the sealing plate seat and the sealing plate, and slidably connected to the other of the sealing plate seat and the sealing plate.

[0011] In some embodiments, the second driving member includes: a mounting cavity disposed in the sealing plate seat, an end cap sealedly mounted in the mounting cavity facing the opening end of the sealing plate, and a piston slidably mounted in the mounting cavity; the piston of the second driving member passes through the end cap and is connected to the sealing plate; a second intake speed regulating valve is provided at the air inlet end of the second driving member, and a second outlet speed regulating valve is provided at the air outlet end of the second driving member, the second intake speed regulating valve and the second outlet speed regulating valve being communicatively connected to the control unit; the valve device further includes: a third elastic member, sleeved outside the piston of the second driving member and abutting against the end cap, for driving the piston of the second driving member to reset in a direction away from the chamber, and for providing a buffering force when the piston of the second cylinder drives the sealing plate to move toward the chamber to a sealing position.

[0012] In some embodiments, the valve device further includes: a pin having opposing threaded ends and a head; the threaded end of the pin passing through a clearance hole on the sealing plate seat and engaging with a threaded hole on the sealing plate; the axial direction of the pin being parallel to the second direction; and a fourth elastic member sleeved on the pin and abutting between the head of the pin and the wall of the clearance hole, for driving the sealing plate to reset in a direction away from the chamber.

[0013] In some embodiments, the valve device further includes: a third detection element, installed to one of the sealing plate and the chamber, communicatively connected to the control unit, for detecting whether the sealing plate has moved to a sealing position in the direction toward the chamber.

[0014] In some embodiments, the valve device further includes: a fourth detection element, installed on one of the sealing plate and the sealing plate seat, communicatively connected to the control unit, for detecting whether the sealing plate has moved to the open position in a direction away from the chamber; wherein the control unit is used to control the first driving member to drive the sealing plate seat to move when the sealing plate moves to the open position in a direction away from the chamber based on the detection result of the fourth detection element.

[0015] In some embodiments, the sealing plate has a protective layer on its surface facing the chamber, and the protective layer is made of a material including polytetrafluoroethylene.

[0016] In some embodiments, the sealing plate is provided with a cooling channel for the flow of a cooling medium.

[0017] In some embodiments, the cooling channel is positioned near the orthographic projection of the sealing plate onto the surface of the chamber, close to the orthographic projection of the sealing ring onto the surface of the sealing plate onto the chamber; when the sealing plate is in the sealed position, it abuts against the chamber via the sealing ring.

[0018] According to another aspect of this disclosure, a rapid heat treatment apparatus is provided, comprising: a chamber, and a valve device as described in any of the preceding claims.

[0019] This embodiment can achieve automatic sealing (or automatic closing) of the opening on the side of the chamber, and the structure is relatively simple and compact.

[0020] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this disclosure, nor is it intended to limit the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description

[0021] The accompanying drawings are provided to better understand this solution and do not constitute a limitation of this disclosure. Wherein: Figure 1 This is a schematic diagram of the structure of a valve device provided according to an embodiment of the present disclosure. Figure 1 ; Figure 2 This is a schematic diagram of the structure of a valve device provided according to an embodiment of the present disclosure. Figure 2 ; Figure 3 This is a partial cross-sectional schematic diagram of a valve device provided according to an embodiment of the present disclosure. Figure 1 ; Figure 4 This is a partial cross-sectional schematic diagram of a valve device provided according to an embodiment of the present disclosure. Figure 2 ; Figure 5 This is a partial cross-sectional schematic diagram of a valve device provided according to an embodiment of the present disclosure. Figure 3 ; Figure 6 This is a cross-sectional schematic diagram of a sealing plate provided according to an embodiment of the present disclosure; Figure 7 This is a schematic diagram of the electrical connections of a valve device provided according to an embodiment of the present disclosure.

[0022] Explanation of reference numerals: 10-Frame; 11-First guide shaft; 20-First drive component; 30-Sealing plate seat; 40-Second drive component; 50-Sealing plate; 50a-Cooling channel; 51-Second guide shaft; 52-Third elastic component; 53-Pin; 54-Fourth elastic component; 60-Pipeline seat; 91-First detection component; 92-Second detection component; 93-Third detection component; 94-Fourth detection component; 95-Control unit. Detailed Implementation

[0023] The exemplary embodiments of this disclosure are described below with reference to the accompanying drawings, including various details of the embodiments to aid understanding, and should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this disclosure. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0024] This embodiment provides a rapid heat treatment apparatus, including a chamber and a valve device. The chamber may include at least one of the following: a process chamber and a transfer chamber. At least one side of the chamber has an opening, at which a valve device is installed. The valve device is switchable between an open state and a sealed state (also known as a closed state). During the heat treatment process, the valve device is in a sealed state; during the preparation stage before the heat treatment process or after the heat treatment process, the valve device can be switched to an open state to allow the loading and unloading of semiconductor workpieces, such as wafers, through the opening.

[0025] The structure, function, and implementation process of the valve device are illustrated below with reference to the accompanying drawings.

[0026] Please refer to Figures 1 to 7 The valve device provided in this embodiment includes: a frame 10 for mounting the valve device to a chamber; a first drive member 20 and a sealing plate seat 30, wherein the first drive member 20 is mounted to the frame 10 and connected to the sealing plate seat 30, and the first drive member 20 is used to drive the sealing plate seat 30 relative to the frame 10 along a first direction ( Figure 1 and Figure 2 The first direction is parallel to the axial direction of the chamber; the second driving member 40 and the sealing plate 50 are mounted on the sealing plate seat 30 and connected to the sealing plate 50. The second driving member 40 is used to drive the sealing plate 50 relative to the sealing plate seat 30 along the second direction (vertical direction); the second driving member 40 is used to drive the sealing plate 50 relative to the sealing plate seat 30 along the second direction (vertical direction). Figure 1 and Figure 2 The first direction is perpendicular to the first direction; the second direction is perpendicular to the first direction; the first detection element 91 is installed on one of the first drive element 20, the sealing plate seat 30, and the frame 10; the control unit 95 is communicatively connected to the first drive element 20, the first detection element 91, and the second drive element 40, and is used to control the first drive element 20 to stop working and control the second drive element 40 to drive the sealing plate 50 to close the opening of the chamber when the sealing plate seat 30 moves to the first target position according to the detection result of the first detection element 91.

[0027] The shape of the frame 10 can be adapted to the shape of the opening on the side of the chamber. For example, if the opening on the side of the chamber is circular, then the frame 10 is also circular; or, for another example, if the opening on the side of the chamber is rectangular, then the frame 10 is also rectangular. Of course, in other examples, if the opening on the side of the chamber is circular, then the frame 10 may also be rectangular; or, if the opening on the side of the chamber is rectangular, then the frame 10 may also be circular.

[0028] For ease of description, the following explanation uses a rectangular frame 10 as an example. Frame 10 may include two opposing horizontal beams and two opposing vertical beams, with the two vertical beams connecting the two horizontal beams. The horizontal beams are... Figure 1 and Figure 2 The left and right directions in the middle.

[0029] The frame 10 can be mounted to the side of the chamber. The frame 10 is detachably mounted to the side of the chamber by a plurality of fasteners. These fasteners may include at least one of the following: screws and bolts. For example, the frame 10 is provided with a plurality of through holes spaced apart circumferentially along the frame 10. For instance, each of the two crossbeams and / or two vertical beams of the frame 10 is provided with at least one through hole; a bolt passes through this through hole, passes through the side wall of the chamber, and engages with a nut. Alternatively, the frame 10 is provided with a plurality of through holes and a plurality of threaded holes, the through holes being distributed in the two vertical beams (or crossbeams), and the threaded holes being distributed in the two crossbeams (or vertical beams); wherein a bolt passes through this through hole, passes through the side wall of the chamber, and engages with a nut; a screw passes through the side wall of the chamber and engages with a threaded hole on the frame 10.

[0030] The first drive component 20 is mounted on the frame 10, for example, to one of the crossbeams of the frame 10, to improve the overall integrity of the valve assembly and enhance the ease of assembly and disassembly of the valve assembly. Figure 1 As shown, the first drive component 20 is mounted to the lower crossbeam. Exemplarily, to facilitate assembly and disassembly of the first drive component 20, the first drive component 20 is detachably mounted to the crossbeam of the frame 10. For example, the first drive component 20 is mounted to the crossbeam of the frame 10 by a plurality of bolts and / or screws, or the first drive component 20 is threadedly connected or snap-fitted to the crossbeam of the frame 10. The first drive component 20 may include at least one of the following: a first linear motor, a first cylinder.

[0031] The sealing plate holder 30 is used to mount the sealing plate 50 onto the frame 10. The shape of the sealing plate holder 30 can be adapted to the shape of the opening on the side of the chamber. For example, if the opening on the side of the chamber is circular, the sealing plate holder 30 is also circular; or, for example, if the opening on the side of the chamber is rectangular, the sealing plate holder 30 is also rectangular. Of course, in other examples, if the opening on the side of the chamber is circular, the sealing plate holder 30 can also be rectangular; or, if the opening on the side of the chamber is rectangular, the sealing plate holder 30 can also be circular.

[0032] For ease of description, the following explanation uses a rectangular sealing plate seat 30 as an example. The length direction of the sealing plate seat 30 is parallel to the length direction of the frame 10.

[0033] The sealing plate seat 30 can be a frame structure or a plate structure, whichever can be selected according to actual needs, as long as it can achieve its corresponding function.

[0034] The sealing plate seat 30 is slidably connected to the frame 10, so that under the driving force of the first driving member 20, the sealing plate seat 30 can drive the sealing plate 50 along the axial direction of the chamber. Figure 1 and Figure 2The movement is in the vertical direction. The axial direction of the chamber is vertical. Taking the valve device switching from the open state to the sealed state with the sealing plate seat 30 moving upward as an example, the valve device switching from the sealed state to the open state with the sealing plate seat 30 moving downward.

[0035] The second drive element 40 is mounted on the sealing plate seat 30. The second drive element 40 is detachably mounted on the sealing plate seat 30. For example, the second drive element 40 is mounted on the sealing plate seat 30 by a plurality of bolts and / or screws. The second drive element 40 may include at least one of the following: a second linear motor, a second cylinder. Wherein, when the first drive element 20 uses a first cylinder, the second drive element 40 uses a second cylinder. When the first drive element 20 uses a first linear motor, the second drive element 40 uses a second linear motor.

[0036] The sealing plate 50 can cover the side opening of the chamber to seal it. The shape of the sealing plate 50 can be adapted to the shape of the side opening of the chamber. For example, if the side opening of the chamber is circular, the sealing plate 50 is also circular; or if the side opening of the chamber is rectangular, the sealing plate 50 is also rectangular. Optionally, the frame 10, the sealing plate seat 30, and the sealing plate 50 are all rectangular.

[0037] Of course, in other examples, if the opening on the side of the chamber is circular, then the sealing plate 50 can also be rectangular; or, if the opening on the side of the chamber is rectangular, then the sealing plate 50 can also be circular.

[0038] When the valve device is in a sealed state, the sealing plate 50 is in a sealed position (or closed position). The surface of the sealing plate 50 facing the chamber abuts against the side wall of the chamber through a sealing ring to improve the sealing effect. The sealing ring is installed into the chamber or onto the surface of the sealing plate 50 facing the chamber.

[0039] The sealing plate 50 is slidably connected to the sealing plate seat 30, so that under the driving force of the second driving member 40, the sealing plate 50 can move back and forth. Figure 1 and Figure 2 The movement is in the forward and backward direction. Here, the forward and backward direction is the thickness direction of the sealing plate 50. Taking the direction of the sealing plate 50 toward the cavity as the forward direction, the direction of the sealing plate 50 away from the cavity is the backward direction.

[0040] The first detection element 91 is used to detect whether the sealing plate seat 30 has moved upward to the correct position. The position where the sealing plate seat 30 moves upward to the correct position is the first target position.

[0041] The first detection element 91 may include a proximity switch, such as a magnetic proximity switch. The magnetic proximity switch may be mounted on the first drive element 20, the sealing plate base 30, or the frame 10.

[0042] For example, a magnetic proximity switch is installed on the upper part of the output end of the first driving member 20, and a magnetic element is provided at a corresponding position on the frame 10. When the output end of the first driving member 20 moves upward to the upper limit position, the magnetic proximity switch can detect the magnetic element and generate an electrical signal to be sent to the control unit 95. When the output end of the first driving member 20 moves upward to the upper limit position, the sealing plate seat 30 moves to the first target position. Of course, the magnetic proximity switch can also be installed on the upper part of the sealing plate seat 30, and a magnetic element can be provided at a corresponding position on the frame 10; or, a magnetic switch can be installed on the frame 10, and a magnetic proximity switch can be provided at the output end of the first driving member 20 or at a corresponding position on the sealing plate seat 30.

[0043] In other examples, the first detection element 91 may also include a camera for acquiring images. The control unit 95 determines whether the output of the first drive element 20 has moved upward to its upper limit position based on the image acquired by the camera.

[0044] The control unit 95 can be a standalone piece of hardware or a module integrated into the control system of the rapid heat treatment equipment, as long as it can perform its corresponding functions.

[0045] The valve device provided in this embodiment, by configuring a first driving component 20, a sealing plate seat 30, a second driving component 40, a sealing plate 50, a first detection component 91, and a control unit 95, can achieve automatic sealing (or automatic closing) of the opening on the side of the chamber, and has a relatively simple and compact structure.

[0046] In some embodiments, the frame 10 is provided with at least one element along a first direction ( Figure 1 and Figure 2 The first guide shaft 11 extends in the vertical direction; the sealing plate seat 30 is slidably connected to the first guide shaft 11. The first guide shaft 11 not only guides and ensures that the sealing plate seat 30 slides in the first direction to avoid uneven wear, but also improves the structural strength of the frame 10; moreover, when the wear is severe, only the first guide shaft 11 needs to be replaced without replacing the entire frame 10.

[0047] For example, there are two first guide shafts 11, and the two ends of the first guide shafts 11 are respectively connected to two crossbeams of the frame 10. The two first guide shafts 11 can be respectively set close to the two vertical beams.

[0048] The first guide shaft 11 can be detachably connected to the crossbeam. For example, the first guide shaft 11 can be fastened to the crossbeam via a flange, or the first guide shaft 11 can be keyed to the crossbeam, or the first guide shaft 11 can be threaded to the crossbeam.

[0049] The sealing plate seat 30 is provided with sliding holes that mate with the two first guide shafts 11. Optionally, in order to reduce frictional loss, a sliding bearing can be provided in the sliding holes of the sealing plate seat 30.

[0050] In some examples, the sealing plate seat 30 includes a main body and a split portion. The split portion and the main body together form a sliding hole that mates with the first guide shaft 11. For example, the split portion and the main body are each provided with a semi-circular hole, and when the split portion and the main body are connected, the two semi-circular holes form a circular sliding hole that mates with the first guide shaft 11. The split portion and the main body are detachably connected. For example, the split portion is connected to the main body by screws and / or bolts. This facilitates the removal of the sealing seat for inspection or replacement without disassembling the entire valve assembly.

[0051] In other examples, the first guide shaft 11 may also have one or more.

[0052] In other embodiments, grooves may be provided on the two vertical beams of the frame 10, and the corresponding two sides of the sealing plate seat 30 may be slidably installed in the grooves.

[0053] In some embodiments, the first driving member 20 includes a first cylinder, the piston of which can be threadedly connected to the sealing plate seat 30. The inlet end of the first cylinder is provided with a first inlet speed regulating valve, and the outlet end of the first cylinder is provided with a first outlet speed regulating valve. The first inlet speed regulating valve and the first outlet speed regulating valve are respectively communicatively connected to the control unit 95.

[0054] For example, the first intake speed control valve is used to regulate the intake speed of the first cylinder, thereby regulating the piston speed of the first cylinder. When the first intake speed control valve adjusts the intake speed to 0, the intake passage of the first cylinder is closed. The first exhaust speed control valve is used to regulate the exhaust speed of the first cylinder, thereby regulating the piston speed of the first cylinder. When the first exhaust valve adjusts the exhaust speed to 0, the exhaust passage of the first cylinder is closed. Both the first intake speed control valve and the first exhaust speed control valve are electrically controlled valves, facilitating automatic control.

[0055] In some examples, the valve assembly further includes a first elastic element for providing a buffering force when the piston of the first cylinder extends to a first limit position (i.e., the upper limit position), to buffer the travel speed of the piston of the first cylinder at the end of its upward stroke, reduce vibrations and abnormal noises caused by the piston of the first cylinder and the sealing plate seat 30 colliding with other components, and ensure the smooth operation of the sealing plate 50. The first elastic element may be a spring, a rubber column, or other components with elastic buffering function.

[0056] The first elastic element can be disposed above the piston of the first cylinder, and the upper end of the first elastic element can abut against the frame 10 or a structure mounted on the frame 10 when the piston of the first cylinder moves upward to near the upper limit position. Alternatively, the first elastic element can be mounted on the frame 10 or a structure mounted on the frame 10, and when the piston of the first cylinder moves upward to near the upper limit position, the first elastic element abuts against the upper end of the piston of the first cylinder.

[0057] In some examples, the valve assembly further includes a second elastic element for providing a buffering force when the piston of the first cylinder retracts to the second limit position (i.e., the lower limit position), to buffer the travel speed of the piston of the first cylinder at the end of its downward stroke, reduce vibrations and abnormal noises caused by the piston of the first cylinder and the sealing plate seat 30 colliding with other components, and ensure smooth operation of the sealing plate 50. The second elastic element can be a spring, a rubber column, or other components with elastic buffering function.

[0058] The second elastic element can be disposed at the lower part of the piston of the first cylinder. The lower end of the second elastic element can abut against the cylinder body of the first cylinder or a structure mounted on the cylinder body when the piston of the first cylinder moves downward to near the lower limit position. Alternatively, the second elastic element can be mounted on the cylinder body of the first cylinder or a structure mounted on the cylinder body, and when the piston of the first cylinder moves downward to near the lower limit position, the second elastic element abuts against the lower end of the piston of the first cylinder.

[0059] In the specific implementation process, when the valve device switches from the open state to the sealed state (or closed state), compressed gas is introduced into the rodless side of the first cylinder. The piston of the first cylinder moves upward with the sealing plate seat 30 and the sealing plate 50. When the piston of the first cylinder moves to the upper limit position, the sealing plate 50 also moves to the first target position. The first detection element 91 sends a detection signal to the control unit 95. The control unit 95 determines that the sealing plate 50 has moved upward to the correct position. Then, the control unit 95 controls the sealing plate 50 to move.

[0060] In some embodiments, the first detection element 91 is mounted to the first driving element 20 to detect whether the output end of the first driving element 20 has moved to a first limit position. When the output end of the first driving element 20 moves to the first limit position, the sealing plate seat 30 moves to a first target position.

[0061] For example, a first detection element 91 is mounted to, for example, the upper end of the piston of a first cylinder. The first detection element 91 may include a magnetic proximity switch. The magnetic proximity switch may be mounted on the upper end of the piston of the first cylinder, with a magnetic element disposed at a corresponding position on the frame 10; when the piston of the first cylinder moves upward to its upper limit position, the magnetic proximity switch detects the magnetic element and generates an electrical signal sent to the control unit 95. When the piston of the first cylinder moves upward to its upper limit position, the sealing plate seat 30 moves to a first target position.

[0062] In some examples, the valve device further includes: a second detection element 92, mounted to the first drive element 20, for detecting whether the output end of the first drive element 20 has moved to a second limit position in a direction away from the first limit position; the second detection element 92 is communicatively connected to the control unit 95.

[0063] The second detection component 92 can be installed at the lower end of the movable component in the first drive component 20, for example, at the lower end of the piston of the first cylinder.

[0064] The second detection element 92 may include a proximity switch, such as a magnetic proximity switch. The magnetic proximity switch may be installed at the lower end of the piston of the first cylinder; a magnetic element is provided at a corresponding position on the cylinder body of the first cylinder; when the piston of the first cylinder moves downward to its lower limit position, the magnetic proximity switch can detect the magnetic element on the cylinder body and generate an electrical signal sent to the control unit 95. When the output end of the first drive element 20 moves downward to its lower limit position, the sealing plate seat 30 moves to the second target position. Alternatively, the magnetic proximity switch may also be installed on the cylinder body of the first cylinder, with a magnetic element provided at a corresponding position on the piston of the first cylinder.

[0065] In other examples, the second detection element 92 may also include a camera for acquiring images. The control unit 95 determines whether the output of the first drive element 20 has moved downward to its lower limit position based on the image acquired by the camera.

[0066] In some embodiments, the valve device further includes a second guide shaft 51 extending along a second direction, fixedly connected to one of the sealing plate seat 30 and the sealing plate 50, and slidably connected to the other of the sealing plate seat 30 and the sealing plate 50. The second guide shaft 51 is used to guide and ensure that the sealing plate 50 moves along the second direction, i.e., the back-and-forth direction, to avoid uneven wear.

[0067] In some examples, the sealing plate 50 is fixedly connected to at least one second guide shaft 51. For example, there are two second guide shafts 51, spaced apart. The second guide shafts 51 may be pins. One end of the pin is fixedly connected to the sealing plate 50, for example, one end of the pin is threaded to the sealing plate 50, and the other end of the pin is slidably connected to the sealing plate seat 30 via a sliding bearing. In other examples, there may be only one second guide shaft 51.

[0068] In other examples, at least one second guide shaft 51 extending in a second direction is fixedly disposed in the sealing plate seat 30; the sealing plate 50 is slidably connected to the second guide shaft 51.

[0069] In some embodiments, to improve the structural compactness of the valve device, the second drive member 40 includes: a mounting cavity disposed in the sealing plate seat 30, an end cap sealedly mounted on the opening end of the mounting cavity facing the sealing plate 50, and a piston 40a slidably mounted in the mounting cavity; the piston 40a of the second drive member passes through the end cap and is connected to the sealing plate 50, for example, by a threaded connection. In other examples, the second cylinder may also be mounted directly on the sealing plate seat 30.

[0070] To ensure the reliable movement of the sealing plate 50, the sealing plate seat 30 is provided with two mounting cavities. Each mounting cavity has an end cap sealed at its opening end, and the end caps are fixedly connected to the sealing plate seat 30 by at least two bolts or screws. A piston 40a is provided in each of the two mounting cavities.

[0071] In order to control the running speed of the piston 40a of the second driving member, a second intake speed regulating valve is provided at the intake end of the second driving member 40, and a second exhaust speed regulating valve is provided at the exhaust end of the second driving member 40. The second intake speed regulating valve and the second exhaust speed regulating valve are respectively connected to the control unit 95 for communication.

[0072] For example, the second intake speed control valve is used to regulate the intake speed of the second drive member 40, thereby regulating the speed of the piston 40a of the second drive member. When the second intake speed control valve adjusts the intake speed to 0, the intake passage of the second drive member 40 is closed. The second exhaust speed control valve is used to regulate the exhaust speed of the second drive member 40, thereby regulating the speed of the piston 40a of the second drive member. When the second exhaust valve adjusts the exhaust speed to 0, the exhaust passage of the second drive member 40 is closed. Both the second intake speed control valve and the second exhaust speed control valve are electrically controlled valves.

[0073] In some examples, the valve device further includes a third elastic element 52, sleeved over the piston 40a of the second drive member and abutting against the end cap, for example, between the piston 40a and the side of the end cap away from the chamber, for driving the piston 40a of the second drive member to reset in a direction away from the chamber. The third elastic element 52 may be a spring, a rubber column, or other components with elastic cushioning function.

[0074] Furthermore, the third elastic element 52 provides a buffering force when the piston 40a of the second drive member moves the sealing plate 50 towards the chamber to the sealing position. This buffers the travel speed of the piston 40a at the end of its forward stroke, reducing vibrations and abnormal noises caused by collisions between the piston 40a and the sealing plate 50 and other components, ensuring smooth operation of the sealing plate 50. In addition, in the event of abnormal conditions such as gas interruption, the third elastic element 52 can also automatically move the sealing plate 50 backward to ensure equipment safety.

[0075] In some embodiments, the valve device further includes: a pin 53 having opposing threaded ends and a head; the threaded end of the pin 53 passes through a clearance hole on the sealing plate seat 30 and engages with a threaded hole on the sealing plate 50; the axial direction of the pin 53 is parallel to a second direction. For example, there are two pins 53, each disposed near one of the two wide edges of the sealing plate seat 30. Alternatively, there are four pins 53 arranged in a rectangular pattern. The pins 53 can be threadedly connected to the sealing plate 50. The clearance hole is a stepped hole, the diameter of the portion of the stepped hole near the sealing plate 50 being smaller than the diameter of the portion of the stepped hole away from the sealing plate 50, and the connection between the two portions has a connecting surface.

[0076] The valve device further includes a fourth elastic element 54, sleeved around the pin 53 and abutting between the head of the pin 53 and the connecting surface, for driving the sealing plate 50 to reset in a direction away from the chamber. During the movement of the sealing plate 50 toward the chamber, the pin 53 moves with the sealing plate 50 and compresses the fourth elastic element 54; when the compressed gas supply to the second drive member 40 is cut off, the fourth elastic element 54 and the third elastic element 52 can drive the sealing plate 50 to reset in a direction away from the chamber.

[0077] The fourth elastic element 54 can be a spring, a rubber column, or other components with elastic cushioning function. A fourth elastic element 54 is fitted over each of the multiple pins 53.

[0078] The compressive force of the fourth elastic element 54 is less than that of the third elastic element 52. The fourth elastic element 54 is also used to provide a buffering force when the sealing plate 50 moves away from the chamber to the open position, so as to buffer the running speed of the piston 40a of the second drive member at the end of the backward stroke, reduce the vibration and abnormal noise caused by the piston 40a of the second drive member and the sealing plate 50 colliding with other components, and ensure the smooth operation of the sealing plate 50.

[0079] In this embodiment, by setting a pin 53 on the sealing plate seat 30 and sleeve a fourth elastic member 54 on the pin 53, it is possible to achieve a buffering effect on the sealing plate 50 at the end of its stroke, and also to improve the structural compactness of the valve device.

[0080] In other embodiments, the fourth elastic member 54 may also be disposed at the rear end of the piston 40a of the second drive member, and when the sealing plate 50 moves away from the chamber to the open position, it can abut against the wall of the mounting cavity at the opening end.

[0081] In some embodiments, the valve device further includes a third detection element 93, which is installed in one of the sealing plate 50 and the chamber, and is communicatively connected to the control unit 95, for detecting whether the sealing plate 50 has moved to a sealing position in the direction toward the chamber.

[0082] The third detection element 93 may include a proximity switch, such as a magnetic proximity switch. The magnetic proximity switch may be mounted on the front side of the sealing plate 50, with a magnetic element disposed at a corresponding position on the side wall of the chamber. When the piston of the first cylinder moves forward to its front limit position, the magnetic proximity switch detects the magnetic element on the chamber and generates an electrical signal sent to the control unit 95. When the piston 40a of the second driving member moves forward to its front limit position, the sealing plate 50 moves to the sealing position. Alternatively, the magnetic proximity switch may also be mounted on the front end of the piston 40a of the second driving member, with a magnetic element disposed at a corresponding position on the side wall of the chamber; or, the magnetic proximity switch may be mounted on the side wall of the chamber, with a magnetic element disposed at a corresponding position on the piston 40a of the second driving member or the sealing plate 50.

[0083] In other examples, the third detection element 93 may also include a camera for acquiring images. The control unit 95 determines, based on the images acquired by the camera, whether the piston 40a of the second drive element has moved forward to its front limit position, that is, whether the sealing plate 50 has moved forward to the open position.

[0084] In some embodiments, the valve device further includes: a fourth detection element 94, which is installed on one of the sealing plate 50 and the sealing plate seat 30 and is communicatively connected to the control unit 95, for detecting whether the sealing plate 50 has moved to the open position in the direction away from the chamber; wherein, the control unit 95 is used to control the first driving element 20 to drive the sealing plate seat 30 to move when the sealing plate 50 moves to the open position in the direction away from the chamber according to the detection result of the fourth detection element 94.

[0085] The fourth detection element 94 may include a proximity switch, such as a magnetic proximity switch. The magnetic proximity switch may be installed on the rear side of the sealing plate 50, with a magnetic element provided at a corresponding position on the sealing plate seat 30. When the piston of the first cylinder moves to its rearmost position, the magnetic proximity switch detects the magnetic element on the sealing plate seat 30 and generates an electrical signal sent to the control unit 95. When the piston 40a of the second drive unit moves to its rearmost position, the sealing plate 50 moves to the open position. Alternatively, the magnetic proximity switch may be installed at the rear end of the piston 40a of the second drive unit, with a magnetic element provided at a corresponding position on the sealing plate seat 30; or, the magnetic proximity switch may be installed on the sealing plate seat 30, with a magnetic element provided at a corresponding position on the piston 40a of the second drive unit or the sealing plate 50.

[0086] In other examples, the fourth detection element 94 may also include a camera for acquiring images. The control unit 95 determines, based on the images acquired by the camera, whether the piston 40a of the second drive element has moved backward to its rearmost position, that is, whether the sealing plate 50 has moved backward to the open position.

[0087] In the specific implementation process, when the valve device switches from the open state to the sealed state, compressed gas is introduced into the rodless side of the mounting cavity, and the piston 40a of the second driving component drives the sealing plate 50 to move forward until it abuts against the cavity.

[0088] When the valve device switches from the sealed state to the open state, the compressed gas supply to the second drive member 40 is cut off, the third elastic member 52 retracts the piston 40a of the second drive member away from the chamber, and the fourth elastic member 54 drives the sealing plate 50 to move away from the chamber. When the sealing plate 50 moves to the open position away from the chamber, air is supplied to the rod side of the first cylinder, the piston rod of the first cylinder retracts and drives the sealing plate seat 30 and the sealing plate 50 to move downward, opening the side opening of the chamber, at which point the robot arm can pick up and place wafers.

[0089] In some embodiments, the lower crossbeam of the frame 10 also allows the conduit seat 60 to pass through, the conduit seat 60 being used to install conduits, which are connected to the first cylinder and the second drive member 40 respectively.

[0090] In some embodiments, a protective layer is provided on the surface of the sealing plate 50 facing the chamber, and the protective layer is made of polytetrafluoroethylene (PTFE). The protective layer has a relatively smooth surface and provides thermal insulation, preventing the sealing plate 50 from sticking to the sealing ring after prolonged operation. A connecting layer may be provided between the sealing plate 50 and the protective layer to improve the reliability of the connection between them.

[0091] In some examples, the sealing plate 50 is provided with a cooling channel 50a for the flow of a cooling medium. The cooling medium can be a liquid, a gas, or a gas-liquid mixture.

[0092] The inlet and outlet ends of the cooling channel 50a can be close to the two opposite wide edges of the sealing plate 50, or the two opposite long edges of the sealing plate 50, respectively, to extend the flow path of the cooling medium.

[0093] In some examples, the cooling channel 50a is positioned close to the orthographic projection of the sealing plate 50 onto the surface of the sealing plate 50 facing the chamber; when the sealing plate 50 is in the sealed position, it abuts against the chamber via the sealing ring. This prevents overheating of the sealing plate 50 and the sealing ring during prolonged high-temperature operation within the chamber, thus avoiding sealing ring failure due to overheating.

[0094] In some examples, the cooling channel 50a includes a first sub-channel, a second sub-channel, and a third sub-channel. The second sub-channel extends along the length of the sealing plate 50, while the first and third sub-channels extend vertically and are connected to both ends of the second sub-channel. The second sub-channel may be located near the upper edge of the sealing plate 50, while the first and third sub-channels are located near the two wide edges of the sealing plate 50. The end of the first sub-channel away from the second sub-channel can serve as an inlet end, and the end of the third sub-channel away from the second sub-channel can serve as an outlet end.

[0095] In other examples, one end of the second sub-channel extends to the wide edge of the sealing plate 50, and this end serves as an inlet or outlet end; when the sealing plate 50 is in the sealed position, the first and third sub-channels can communicate with channels on the sidewall of the chamber.

[0096] In some other examples, the cooling channel 50a further includes a fourth sub-channel, which is arranged parallel to the first sub-channel and communicates with both the first and third sub-channels. The fourth and second sub-channels are respectively located near the two long edges of the sealing plate 50. Specifically, the end of the second sub-channel near the first sub-channel extends to the corresponding wide edge of the sealing plate 50, and this end serves as the inlet end; the end of the fourth sub-channel near the third sub-channel extends to the corresponding wide edge of the sealing plate 50, and this end serves as the outlet end.

[0097] Of course, the specific structure of cooling channel 50a is not limited to this. This embodiment is just an example, and the specific configuration can be set according to actual needs.

[0098] Other components of the rapid heat treatment equipment described in the above embodiments can be derived from various technical solutions that are now and will be known to those skilled in the art, and will not be described in detail here.

[0099] This embodiment also provides a valve device, including the valve device in any of the foregoing embodiments.

[0100] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0101] In the description of this disclosure, it should be understood that the terms “upper,” “lower,” “front,” “rear,” “top,” “bottom,” “inner,” “outer,” “axial,” “longitudinal,” “lateral,” and “vertical” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0102] Furthermore, the terms "first," "second," etc., used in the embodiments of this disclosure are for descriptive purposes only and should not be construed as indicating or implying relative importance, or implicitly specifying the number of technical features indicated in this embodiment. Therefore, features defined with terms such as "first" and "second" in the embodiments of this disclosure can explicitly or implicitly indicate that the embodiment includes at least one of those features. In the description of this disclosure, the word "multiple" means at least two or more, such as two, three, four, etc., unless otherwise explicitly specified in the embodiments.

[0103] In this disclosure, unless otherwise explicitly specified or limited in the embodiments, the terms "installation," "connection," "joining," and "fixing," etc., appearing in the embodiments should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral part; it can also be a mechanical connection, an electrical connection, etc. Of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication between two components, or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure based on the specific implementation.

[0104] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0105] Although embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present disclosure. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present disclosure.

Claims

1. A valve device for a chamber, characterized in that, include: A frame for installation into the chamber; A first driving member and a sealing plate seat are provided. The first driving member is mounted to the frame and connected to the sealing plate seat. The first driving member is used to drive the sealing plate seat to move relative to the frame along a first direction. The first direction is parallel to the axial direction of the chamber. A second driving component and a sealing plate are provided. The second driving component is installed on the sealing plate seat and connected to the sealing plate. The second driving component is used to drive the sealing plate to move relative to the sealing plate seat in a second direction. The second direction is perpendicular to the first direction. The first testing component is installed into one of the first driving component, the sealing plate seat, and the frame; The control unit is communicatively connected to the first driving member, the first detection member, and the second driving member. When the sealing plate seat is determined to have moved to the first target position based on the detection result of the first detection member, the control unit controls the first driving member to stop working and controls the second driving member to drive the sealing plate to close the opening of the chamber.

2. The valve device according to claim 1, wherein, The frame is provided with at least one first guide shaft extending along the first direction; The sealing plate seat is slidably connected to the first guide shaft.

3. The valve device according to claim 1, wherein, The first driving component includes: a first cylinder, the first cylinder having a first intake speed regulating valve at its intake end and a first outlet speed regulating valve at its outlet end, the first intake speed regulating valve and the first outlet speed regulating valve being communicatively connected to the control unit. The valve device further includes: a first elastic element for providing a buffering force when the piston of the first cylinder extends to a first limit position; and / or a second elastic element for providing a buffering force when the piston of the first cylinder retracts to a second limit position.

4. The valve device according to claim 1, wherein, The first detection element is installed on the first driving element and is used to detect whether the output end of the first driving element has moved to the first limit position. When the output end of the first driving member moves to the first limit position, the sealing plate seat moves to the first target position.

5. The valve device according to claim 4, further comprising: The second detection element is installed on the first driving element and is used to detect whether the output end of the first driving element moves to the second limit position in a direction away from the first limit position. The second detection element is communicatively connected to the control unit.

6. The valve device according to claim 1, further comprising: The second guide shaft extends along the second direction and is fixedly connected to one of the sealing plate seat and the sealing plate, and slidably connected to the other of the sealing plate seat and the sealing plate.

7. The valve device according to claim 1, wherein, The second driving member includes: a mounting cavity disposed in the sealing plate seat, an end cap sealedly mounted in the mounting cavity facing the opening end of the sealing plate, and a piston slidably mounted in the mounting cavity; the piston of the second driving member passes through the end cap and is connected to the sealing plate; The second drive unit is provided with a second intake speed regulating valve at its intake end and a second outlet speed regulating valve at its outlet end. The second intake speed regulating valve and the second outlet speed regulating valve are respectively connected to the control unit in communication. The valve device further includes: a third elastic element, sleeved outside the piston of the second drive member and abutting against the end cap, for driving the piston of the second drive member to reset in a direction away from the chamber, and for providing a buffering force when the piston of the second drive member drives the sealing plate to move toward the chamber to the sealing position.

8. The valve device according to claim 1, further comprising: A pin having opposing threaded ends and a head; the threaded end of the pin passes through a clearance hole on the sealing plate seat and mates with a threaded hole on the sealing plate. The axial direction of the pin is parallel to the second direction; The fourth elastic element is sleeved outside the pin and abuts against the head of the pin and the wall of the clearance hole, for driving the sealing plate to reset in a direction away from the cavity.

9. The valve device according to claim 1, further comprising: The third detection component is installed in one of the sealing plate and the cavity, and is communicatively connected to the control unit. It is used to detect whether the sealing plate has moved to the sealing position in the direction toward the cavity. And / or, A fourth detection element, installed on one of the sealing plate and the sealing plate seat, is communicatively connected to the control unit and is used to detect whether the sealing plate has moved to the open position in the direction away from the chamber; wherein, the control unit is used to control the first driving element to drive the sealing plate seat to move when the sealing plate moves to the open position in the direction away from the chamber based on the detection result of the fourth detection element.

10. The valve device according to claim 1, wherein, The sealing plate has a protective layer on its surface facing the chamber, and the material used for the protective layer includes polytetrafluoroethylene.

11. The valve device according to claim 1, wherein, The sealing plate is provided with a cooling channel for the flow of cooling medium.

12. The valve device according to claim 11, wherein, The cooling channel is positioned near the orthographic projection of the sealing plate onto the surface of the chamber. When the sealing plate is in the sealed position, it abuts against the chamber through the sealing ring.

13. A rapid heat treatment apparatus, characterized in that, include: The chamber, and the valve device as described in any one of claims 1 to 12.

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