Mems device with connecting elements

Abstract

The present invention relates to a MEMS device (1) particularly for sound generation and / or sound detection, having a diaphragm (2) deflectable along a lifting axis (3), and a MEMS unit (7) comprising at least one cantilever (8) for generating and / or detecting lifting motion of the diaphragm (2), the cantilever being spaced apart from the diaphragm (2) along the lifting axis (3) to form a cavity (9) between the cantilever (8) and the diaphragm (2); a lifting structure (12) disposed in the cavity (9) and connected to the diaphragm (2); and a connecting element (14) movably connecting the cantilever (8) to the lifting structure (12). According to the invention, the connecting element (14) narrows and / or widens in at least one section in the direction toward the lifting structure (12) and / or has at least one notch (24, 25). The invention also relates to a MEMS unit for a corresponding MEMS device and an electronic device having a corresponding MEMS device.

Description

Technical Field

[0001] This invention relates to a MEMS device, particularly for generating and / or detecting sound (preferably audible and / or ultrasonic sounds), having a diaphragm deflectable along a lifting axis and a MEMS unit. The MEMS unit includes: at least one, particularly piezoelectric, cantilever for generating and / or detecting the lifting motion of the diaphragm, the cantilever being spaced apart from the diaphragm along the lifting axis to form a cavity between the cantilever and the diaphragm; a lifting structure disposed in the cavity and connected to the diaphragm; and a connecting element movably connecting the cantilever to the lifting structure. The invention also relates to a MEMS unit for a corresponding MEMS device. Background Technology

[0002] A MEMS is known from WO 2016 / 034665 A1, comprising a diaphragm, a lifting structure coupled to the diaphragm, and at least two piezoelectric actuators connected to a plurality of spaced-apart contact points of the lifting structure via a plurality of spaced-apart connecting elements. The at least two piezoelectric actuators are configured to cause lifting movement of the lifting structure, thereby deflecting the diaphragm. Furthermore, each of the at least two piezoelectric actuators is connected to at least two spaced-apart contact points of the lifting structure via at least two spaced-apart connecting elements. Practice has shown that the connecting elements and contact points are susceptible to damage from external forces. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art, and in particular to provide a MEMS device and a MEMS unit that are not easily damaged under external forces.

[0004] The solution of the present invention to achieve the above-mentioned objectives is a MEMS device and a MEMS unit having the features of the independent claims.

[0005] This invention proposes a MEMS device, particularly for sound generation and / or sound detection, preferably for audible sound and / or ultrasound. The MEMS device specifically refers to a MEMS speaker, MEMS microphone, and / or MEMS sensor. The MEMS device includes a diaphragm deflectable along a lifting axis. The MEMS device also includes a MEMS unit. The MEMS unit includes at least one cantilever, particularly a piezoelectric cantilever, for generating and / or detecting the lifting motion of the diaphragm. The cantilever is spaced from the diaphragm along the lifting axis, thereby forming a cavity between the cantilever and the diaphragm. The MEMS unit also includes a lifting structure disposed within the cavity and connected to the diaphragm. Therefore, the lifting structure vibrates along the lifting axis together with the diaphragm during normal use. Furthermore, the MEMS unit also has a connecting element that movably connects the cantilever to the lifting structure.

[0006] Advantageously, the connecting element narrows in at least one section and / or widens in at least one section in the direction toward the lifting structure. By correspondingly widening the connecting element, sections subjected to particularly high loads can be reinforced. As a supplement or alternative, areas subjected to lower loads can be narrowed to improve the elasticity and / or flexibility of the connecting element.

[0007] As a supplement or alternative, the connecting element advantageously has at least one notch. This reduces the weight of the connecting element, thereby reducing the force acting on it. Furthermore, the elasticity and / or flexibility of the connecting element can be improved in the area where the notch is provided. Thus, for example, a section of the connecting element can be widened to make it more robust. Simultaneously, the necessary elasticity and / or flexibility can be ensured by the corresponding notch in this area.

[0008] Advantageously, the cantilever is connected to the lifting structure via a single connecting element. This makes the connecting element very robust, as virtually all available installation space can be devoted to such a single element.

[0009] The lifting structure can be constructed as a single unit or a composite structure. When a composite lifting structure is used, at least two parts of the lifting structure can be directly connected. Alternatively, the at least two parts can also be indirectly connected by additional elements arranged therebetween. These additional elements may, for example, refer to a diaphragm, particularly a rigid reinforcing element of the diaphragm, or an additional coupling element extending between the two parts of the lifting structure. The connection between the at least two parts of the lifting structure can be constructed as rigid or movable.

[0010] Advantageously, the two opposite longitudinal sides of the connecting element and / or the basic shape of the connecting element gradually narrow in a trapezoidal shape toward the lifting structure.

[0011] Also advantageously, the connecting element has at least one protruding section, in which the connecting element has at least one protrusion that extends laterally toward one of the two longitudinal sides of the connecting element and / or protrudes laterally outwards in the connecting element.

[0012] Advantageously, the at least one protrusion is perpendicular to the longitudinal axis of the connecting element. Alternatively, the two opposing longitudinal sides of the protrusion are parallel to the transverse axis of the connecting element.

[0013] Furthermore, advantageously, the free protruding end of the at least one protrusion is inclined toward the lifting structure. Thus, the connecting element gradually narrows toward the lifting structure within the region of the protrusion section.

[0014] Furthermore, advantageously, the protruding section has two opposing protrusions, wherein preferably, the first protrusion extends to a first longitudinal side of the connecting element and the second protrusion extends to a second longitudinal side of the connecting element.

[0015] According to another advantageous embodiment, the connecting element is axisymmetric about its longitudinal central axis.

[0016] Furthermore, advantageously, the at least one notch completely penetrates the connecting element in the direction of the lifting shaft. Thus, the notch has two opposing openings, one located on the top side of the connecting element and the other on the bottom side. Alternatively, advantageously, the at least one notch is circumferentially closed.

[0017] Advantageously, the notch is constructed as a lateral slot extending laterally in the direction of the connecting element. Preferably, the lateral slot is perpendicular to the longitudinal central axis of the connecting element.

[0018] Furthermore, advantageously, the at least one notch is arranged in the at least one protruding section, wherein the notch preferably extends into the first and / or second protrusion.

[0019] Advantageously, the connecting element is connected to the cantilever, particularly within a preferred single first contact area extending laterally along the cantilever. In devices disclosed in the prior art, the contact point is highly susceptible to breakage under heavy loads. A contact area extending over a wider range exhibits higher compressive strength.

[0020] Furthermore, advantageously, the cantilever is supported on the carrier of the MEMS unit, particularly on the carrier substrate, and has a free cantilever end away from the carrier.

[0021] Advantageously, the first contact area is arranged on the free cantilever end and / or is narrower than the free cantilever end in the lateral direction of the cantilever.

[0022] Also advantageously, the connecting element is connected to the lifting structure, particularly in a preferred single second contact area only along the lateral extension of the cantilever.

[0023] Furthermore, advantageously, the second contact area is arranged on the side wall of the lifting structure and / or extends entirely on the side wall along the transverse direction of the cantilever.

[0024] Furthermore, advantageously, in the lateral direction of the cantilever, the first contact area is wider than the second contact area.

[0025] Furthermore, advantageously, the connecting element has at least one bridging section, which preferably connects the at least one protruding section to the first contact area, the second contact area, or another adjacent protruding section.

[0026] Advantageously, the at least one bridging section is centered in the transverse direction of the connecting element and / or has a smaller width compared to the at least one protruding section.

[0027] Also advantageously, the connecting element has a plurality of bridging sections spaced apart from each other in the longitudinal direction of the connecting element. In this regard, it is advantageous that the closer the bridging section is to the lifting structure, the smaller its width, wherein preferably, the cantilever-side bridging section has a wider width in the transverse direction of the connecting element than the lifting structure-side bridging section.

[0028] Furthermore, advantageously, the connecting element has a basic cedar tree shape.

[0029] Furthermore, advantageously, the connecting element has a plurality of protruding sections spaced apart from each other in the longitudinal direction of the connecting element, wherein at least one protruding section is constructed according to the foregoing description, wherein the aforementioned features may exist individually or in any combination.

[0030] Also advantageously, the closer the extension section is to the lifting structure, the smaller its width, wherein preferably, the cantilever-side extension section has a wider width in the transverse direction of the connecting element than the lifting structure-side extension section.

[0031] Advantageously, the free protruding ends of at least two longitudinally adjacent protruding sections of the connecting element are aligned with each other.

[0032] Furthermore, advantageously, the connecting element, particularly in the bridging section, has at least one lateral cut that extends into the connecting element from one of its two longitudinal sides.

[0033] Also advantageously, within the first contact area, the protruding or bridging section of the connecting element is connected to the free cantilever end. Alternatively, advantageously, within the second contact area, the protruding or bridging section of the connecting element is connected to the lifting structure.

[0034] Advantageously, the cantilever has an elastic carrier layer and / or at least one piezoelectric layer.

[0035] To enable very low-cost manufacturing, especially in the region far from the diaphragm at the end of the lifting structure, the cantilever's carrier layer, connecting elements, and the lifting structure's base are all composed of a common (particularly monolithic) layer.

[0036] Furthermore, advantageously, the cantilever has a trapezoidal shape that gradually narrows toward the lifting structure. As a supplement or alternative, advantageously, the connecting element continues the trapezoidal shape in the direction toward the lifting structure.

[0037] Advantageously, the MEMS unit has multiple, particularly six, cantilever arms, each of which is connected to the lifting structure via a single, preferably individual, connecting element, wherein the connecting element is preferably constructed according to the foregoing description, and the aforementioned features may exist individually or in any combination.

[0038] Furthermore, advantageously, the connecting element narrows and / or widens in at least one section in the direction toward the lifting structure and / or the connecting element has at least one notch.

[0039] This invention proposes a MEMS cell, particularly for use in the aforementioned MEMS device, comprising: at least one cantilever, particularly a piezoelectric cantilever, for generating and / or detecting lifting motion of a diaphragm; a lifting structure connected to the diaphragm during normal use; and a connecting element movably connecting the cantilever to the lifting structure. Advantageously, the connecting element narrows and / or widens in at least one section in the direction toward the lifting structure. As a supplement or alternative, advantageously, the connecting element has at least one notch.

[0040] Advantageously, the MEMS unit is constructed based on the MEMS unit of the aforementioned MEMS device, wherein the aforementioned features may exist individually or in any combination.

[0041] This invention proposes the application of MEMS units in the aforementioned MEMS devices, wherein the aforementioned features may exist individually or in any combination.

[0042] The present invention proposes an electronic device, particularly a headset, glasses, mobile phone, tablet computer and / or wearable device, having the aforementioned MEMS device, wherein the aforementioned features may exist individually or in any combination. Attached Figure Description

[0043] Further advantages of the present invention are described in the embodiments below. Wherein:

[0044] Figure 1 This is a cross-sectional view of a MEMS device with MEMS cells.

[0045] Figure 2 for Figure 1 A top view of the MEMS unit of the MEMS device shown.

[0046] Figure 3 for Figure 2The diagram shows a detailed cutaway view of a single cantilever of the MEMS unit, along with connecting elements and the lifting structure.

[0047] Figure 4 for Figure 2 The diagram shows an uncut detail of the MEMS unit within its lifting structure and connecting elements. Detailed Implementation

[0048] Figure 1-4 An embodiment of the invention is shown in which the device has a plurality of cantilever arms 8. Alternatively, the device may also have only one cantilever arm 8, as described below.

[0049] Figure 1 This is a cross-sectional view of a MEMS device 1, specifically for generating and / or detecting sound. The MEMS device 1 is particularly capable of generating and / or detecting audible sound and / or ultrasound. The MEMS device 1 preferably refers to a MEMS speaker, MEMS microphone, and / or MEMS sensor. The MEMS device 1 is intended for an electronic device not shown. This electronic device is preferably designed to be worn on the head or body. Specifically, the electronic device can be a headset, glasses, helmet, headband, mobile phone, tablet, watch, or wristband. Alternatively, the electronic device can also be designed to be installed in other devices, such as vehicles.

[0050] like Figure 1 As shown, the MEMS device 1 includes a diaphragm 2, which is deflectable along a lifting shaft 3. The diaphragm 2 includes an elastic diaphragm layer 4, which is fastened to a diaphragm carrier 5 with its edge region. The diaphragm 2 also has a rigid reinforcing element 6, which is indirectly connected to the diaphragm carrier 5 through the diaphragm layer 4.

[0051] Figure 1 The illustrated MEMS device 1 also includes a MEMS unit 7. This MEMS unit 7 has at least one cantilever 8, particularly a piezoelectric cantilever 8, for generating and / or detecting the lifting motion of the diaphragm 2 along the lifting axis 3. The term "cantilever" refers to a flexible element supported on one side, having a deflectable free end. The MEMS unit 7 also includes a carrier 10, particularly a carrier substrate, on which the at least one cantilever 8 is supported. Thus, the cantilever 8 has a free cantilever end 11 remote from the carrier 10, which is deflectable along the lifting axis 3.

[0052] The at least one cantilever 8 is spaced apart from the diaphragm 2 along the lifting shaft 3, thereby forming a cavity 9 between the cantilever 8 and the diaphragm 2. Here, the cavity 9 is at least partially constructed in or constrained by the carrier 10.

[0053] like Figure 1As shown, the MEMS unit 7 also includes a lifting structure 12, which is at least partially arranged in the cavity 9. The lifting structure 12 is connected to the diaphragm 2. According to this embodiment, the lifting structure 12 is bonded to the reinforcing element 6 of the diaphragm 2 by an adhesive 13. The lifting structure 12 and the carrier 10 are preferably made of the same material (especially silicon) in terms of manufacturing. The lifting structure 12 can be constructed as a single unit or a composite unit. When a composite lifting structure 12 is used, at least two parts of the lifting structure 12 can be directly connected. Alternatively, the at least two parts can also be indirectly connected by an additional element arranged therebetween. This additional element may refer, for example, to the diaphragm 2, especially the rigid reinforcing element 6 of the diaphragm 2, or an additional coupling element (not shown) extending between the two parts of the lifting structure 12. The connection between the at least two parts of the lifting structure 12 can be constructed as rigid or movable.

[0054] The at least one cantilever 8 is indirectly and movably connected to the lifting structure 12 via a connecting element 14. Figure 2 , 3 The construction scheme of this connecting element 14 is illustrated and described in detail in section 4. During normal use, the free cantilever end 11 deflects towards the lifting shaft 3. To prevent the lifting structure 12 and / or the diaphragm 2 from tilting during this bending deflection of the cantilever end 11, the cantilever 8 is indirectly connected to the lifting structure 12 via the connecting element 14 within the region of its free cantilever end 11. For this purpose, the connecting element 14 employs an elastic and / or flexible construction scheme.

[0055] The cantilever end 11 of the cantilever 8 is connected to the connecting element 14 within the first contact area 15. Furthermore, the lifting structure 12 is connected to the connecting element 14 within the second contact area 16. Specifically, as... Figure 1 As shown, the connecting element 14 is connected to the side wall 17 of the lifting structure 12.

[0056] The cantilever 8 is constructed as a multi-layer structure. The cantilever 8 includes an elastic carrier layer 18. The cantilever 8 also has a piezoelectric layer 19. The piezoelectric layer 19 is disposed between two electronic layers (not shown here). Figure 1 As shown, the piezoelectric layer 19 can be located below the carrier layer 18. Alternatively, the piezoelectric layer can also be arranged on the carrier layer 18 as shown in the figure.

[0057] In this embodiment, the MEMS unit 7 includes multiple cantilever arms 8, each cantilever arm 8 being connected to the lifting structure 12 via a respective connecting element 14. For clarity, only one cantilever arm 8 and its corresponding connecting element 14 are fully indicated by reference numerals. To ensure low-cost and rapid manufacturing, the carrier layer 18 of the cantilever arm 8, the connecting element 14, and the lifting structure substrate 20 of the lifting structure 12 are advantageously constructed from a common (particularly monolithic) layer. The lifting structure substrate 20 is preferably located in the region away from the lifting structure end side 21 of the diaphragm 2.

[0058] like Figure 1 As shown, the MEMS device 1 also includes a printed circuit board 22 on which MEMS units 7 are arranged. The printed circuit board 22 has a printed circuit board cavity 23, which connects to the cavity 9 of the MEMS unit 7. Thus, the cavity 9 of the MEMS unit 7 and the printed circuit board cavity 23 form a common acoustic cavity for the MEMS device 1. The cantilever 8 and the lifting structure 12 can be moved into the printed circuit board cavity 23 along the lifting shaft 3. In addition to the MEMS unit 7, the diaphragm carrier 5 can also be connected to the printed circuit board 22.

[0059] Figure 2 This is a top view of MEMS unit 7. As shown, the carrier 10 is constructed as a closed loop and / or a polygonal loop. Cantilever arms 8 are distributed circumferentially on the carrier 10 and extend radially inward. A lifting structure 12 is arranged in the center. The lifting structure 12 has a shape corresponding to the carrier 10, that is, it is polygonal in this case. Thus, the lifting structure 12 has multiple sidewalls 17, each corresponding to a cantilever arm 8. The cantilever arm 8 is trapezoidal, gradually narrowing towards the lifting structure 12. This trapezoidal shape is continued towards the lifting structure 12 by corresponding connecting elements 14, such that the connecting elements 14 also have a basic trapezoidal shape.

[0060] Figure 3 for Figure 2 The diagram shows a detailed cutaway view of the MEMS unit 7 of the MEMS device 1 within the cantilever end 11 region of one of the cantilever arms 8. Embodiments with only a single cantilever 8 can employ a similar construction scheme. As previously described, the free cantilever end 11 of each cantilever 8 is movably connected to the lifting structure 12 via a corresponding connecting element 14. Figure 3 As shown, the cantilever 8 is connected to the lifting structure 12 via a single connecting element 14. This maximizes the use of the available installation space of the single connecting element 14.

[0061] like Figure 3 As shown in the plan view, the connecting element 14 narrows in at least one section toward the lifting structure 12. Conversely, the connecting element 14 widens in at least one section. By correspondingly widening the connecting element 14, sections subjected to particularly high loads can be reinforced. Furthermore, sections subjected to lower loads can be narrowed to improve the elasticity and / or flexibility of the connecting element 14.

[0062] Furthermore, the connecting element 14 has at least one notch 24, 25. This reduces the weight of the connecting element 14, thereby reducing the force acting on it. Additionally, the elasticity and / or flexibility of the connecting element 14 can be improved in the areas where the notches 24, 25 are provided. Thus, for example, a section of the connecting element 14 can be widened to make it more robust. Simultaneously, the necessary elasticity and / or flexibility can be ensured by the corresponding notches 24, 25 in this area.

[0063] The at least one notch 24, 25 completely penetrates the connecting element 14 in the direction of the lifting shaft 3. Thus, the notches 24, 25 have two openings arranged on two opposite sides of the connecting element 14. Furthermore, the at least one notch 24, 25 is closed annularly in its longitudinal direction, thereby ensuring extremely high stability. According to this embodiment, the notches 24, 25 are constructed as transverse slots extending in the transverse direction of the connecting element 14.

[0064] according to Figure 3 As shown in the plan view, the two opposing longitudinal sides 26 and 27 of the connecting element 14 gradually narrow towards the lifting structure 12. The connecting element 14 is connected to the cantilever 8 only within a single first contact area 15. The first contact area 15 is located on the free cantilever end 11. Figure 3 As shown, in the lateral direction of the cantilever 8, the first contact area 15 is narrower than the free cantilever end 11.

[0065] like Figure 3 As shown, the connecting element 14 is connected to the lifting structure 12 only within a single second contact area 16. The second contact area 16 extends laterally in the cantilever 8. As previously described, the second contact area 16 is constructed on the side wall 17 of the lifting structure 12. To ensure the most secure connection possible, as... Figure 3 As shown, the second contact area 16 extends over more than half the width of the corresponding sidewall 17 of the lifting structure 12. In the lateral direction of the cantilever 8, the first contact area 15 is wider than the second contact area 16.

[0066] like Figure 3 As shown, the connecting element 14 has at least one protruding section 28, 29, 30, wherein in this embodiment, the connecting element 14 has three protruding sections 28, 29, 30. In each of these protruding sections 28, 29, 30, the connecting element 14 has at least one protrusion 31, 32. This at least one protrusion 31, 32 extends laterally toward one of the two longitudinal sides 26, 27 of the connecting element 14. Thus, this at least one protrusion 31, 32 protrudes outwardly in the lateral direction of the connecting element 14. This at least one protrusion 31, 32 is perpendicular to the longitudinal axis of the connecting element 14. Figure 3In the plan view shown, the protrusions 31 and 32 have two opposing longitudinal sides 33 and 34. These two longitudinal sides 33 and 34 of the at least one protrusion 31 and 32 are parallel to each other and / or both parallel to the transverse axis of the connecting element 14. The at least one protrusion 31 and 32 has a free protruding end 35. The free protruding end 35 of the at least one protrusion 31 and 32 is inclined. This inclined portion is constructed such that the connecting element 14 gradually narrows towards the lifting structure 12. Furthermore, this inclined portion is aligned with the longitudinal sides 36 and 37 of the cantilever 8.

[0067] In this embodiment, the at least one protruding section 28, 29, 30 has two opposing protrusions 31, 32. The first protrusion 31 extends laterally to the first longitudinal side 26 of the connecting element 14. The second protrusion 32 is in the opposite direction to the first protrusion 31. Therefore, the second protrusion 32 extends to the second longitudinal side 27 of the connecting element 14.

[0068] Especially as Figure 3 As shown, the at least one notch 24, 25 is arranged in the at least one protruding section 28, 29. The notches 24, 25 corresponding to the protruding sections 28, 29 extend into the first and second protrusions 31, 32 of the protruding sections 28, 29. Advantageously, at least one of the protruding sections 28, 29 is constructed as a closed loop.

[0069] exist Figure 3 In the illustrated embodiment, the connecting element 14 includes first and second protruding sections 28 and 29 constructed according to the aforementioned scheme. Therefore, the first protruding section 28 and the second protruding section 29 each have two opposing protrusions 31 and 32. Furthermore, the first protruding section 28 has a first recess 24, and the second protruding section 29 has a second recess 25. The cantilever-side first protruding section 28 has a larger width laterally compared to the lifting structure-side second protruding section 29. Consequently, the greater the distance between the protruding sections 28, 29, and 30 and the free cantilever end 11, the smaller their width. Figure 3 It can also be seen that the free extension ends 35 of the first and second extension sections 28 and 29 are aligned with each other. In addition, these free extension ends are also aligned with the corresponding longitudinal sides 36 and 37 of the cantilever 8. Thus, the two extension sections 28 and 29 of the connecting element 14, together with the longitudinal sides 36 and 37 of the cantilever 8, form a basic trapezoidal shape that gradually narrows toward the lifting structure 12.

[0070] In addition Figure 3In the illustrated embodiment, the connecting element 14 has a third protruding section 30. This third protruding section 30 also includes two protrusions 31 and 32, which extend toward one of the two longitudinal sides 26 and 27 of the connecting element 14, respectively. However, unlike the first and second protruding sections 28 and 29, this third protruding section 30 widens toward the lifting structure 12. The second contact area 16 is constructed between the third protruding section 30 and the lifting structure 12, thus achieving a maximum width of the second contact area 16. Another difference between the third protruding section 30 adjacent to the lifting structure 12 and the other protruding sections 28 and 29 is that the third protruding section 30 does not have a notch, but is completely closed. This also improves the stability of the third protruding section 30 adjacent to the lifting structure 12.

[0071] like Figure 3 As shown, the connecting element 14 has at least one bridging section 38, 39, 40. This at least one bridging section 38, 39, 40 connects one of the protruding sections 28, 29, 30 to the cantilever-side first contact area 15 or a longitudinally adjacent protruding section 28, 29, 30. The at least one bridging section 38, 39, 40 is centrally located in the transverse direction of the connecting element 14. Furthermore, the width of the at least one bridging section 38, 39, 40 is smaller than that of the at least one adjacent protruding section 28, 29, 30. The at least one bridging section 38, 39, 40 has a longitudinally curved side, preferably concave.

[0072] exist Figure 3 In the illustrated embodiment, the connecting element 14 has lateral cutouts 41. These lateral cutouts 41 extend into the connecting element 14 from one of its two longitudinal sides 26, 27. The cutouts 41 are arranged longitudinally along the connecting element 14 within the regions of the bridging sections 38, 39, 40. Thus, the bridging sections 38, 39, 40 each have an adjacent cutout 41 on each of their two longitudinal sides.

[0073] In this embodiment, the connecting element 14 has a first bridging section 38, which is arranged longitudinally between the free cantilever end 11 and the first protruding section 28. Thus, the connecting element 14 and the free cantilever end 11 are connected via the first bridging section 38. Consequently, a first contact area 15 is formed between the free cantilever end 11 and the first bridging section 38. The width of the first bridging section 38 in the lateral direction of the connecting element 14 is smaller than that of the free cantilever end 11.

[0074] A second bridging section 39 is constructed between the first and second protruding sections 28 and 29. Thus, the first and second protruding sections 28 and 29 are spaced apart longitudinally in the connecting element 14 and connected by the second bridging section 39. The width of the second bridging section 39, which is closer to the lifting structure 12, in the lateral direction of the connecting element 14 is smaller than that of the first bridging section 38. Furthermore, the connecting element 14 has a third bridging section 40. The third bridging section 40 is arranged longitudinally between the second protruding section 29 and the third protruding section 30 in the connecting element 14. Thus, the second protruding section 29 is also spaced apart longitudinally from the third protruding section 30 in the connecting element 14 and connected to it by the third bridging section 40. The width of the third bridging section 40 in the lateral direction of the connecting element 14 is smaller than that of the second bridging section 39. Therefore, the greater the distance from the free cantilever end 11, the smaller the width of the bridging sections 38, 39, and 40.

[0075] In summary, the width of the connecting element 14 alternately decreases in the bridging sections 38, 39, and 40, and increases in the extending sections 28, 29, and 30. Thus, the connecting element 14 has a basic cedar-shaped form, which preferably gradually narrows in the longitudinal direction of the connecting element 14 toward the lifting structure 12.

[0076] Figure 4 for Figure 2 The diagram shows an uncut detail of the MEMS unit 7 within its lifting structure 12, which is connected to corresponding cantilever 8 via connecting elements 14. As can be seen from this top view, the connecting elements 14 and their corresponding cantilever 8 extend radially outward from the central, hexagonal lifting structure 12 in a star-shaped configuration. Each cantilever 8 corresponds to a single connecting element 14. Furthermore, each connecting element 14 has a single first contact area 15 leading to its corresponding cantilever 8. Similarly, each connecting element 14 has a single second contact area 16 leading to the lifting structure 12. Each connecting element 14 and cantilever 8 is separated from its adjacent connecting element 14 and adjacent cantilever 8 by a gap 42, preventing any connection between them.

[0077] This invention is not limited to the embodiments shown and described. Variations within the scope of the claims may be employed, and features may be combined, even if these features are disclosed and described in different embodiments.

[0078] Appendix Label Table

[0079] 1 MEMS device

[0080] 2 membranes

[0081] 3 lifting shafts

[0082] 4 membrane layers

[0083] 5. Membrane carrier

[0084] 6 reinforcement components

[0085] 7 MEMS unit

[0086] 8 cantilever

[0087] 9 cavity

[0088] 10 carriers

[0089] 11 Free cantilever end

[0090] 12 Lifting Structure

[0091] 13 Adhesives

[0092] 14 Connecting elements

[0093] 15 First Contact Area

[0094] 16 Second Contact Area

[0095] 17. Side walls of the lifting structure

[0096] 18 carrier layers

[0097] 19 piezoelectric layers

[0098] 20 Lifting Structure Base

[0099] 21 Lifting Structure End Side

[0100] 22 Printed Circuit Boards

[0101] 23 Printed Circuit Board Cavity

[0102] 24 First notch

[0103] 25 Second notch

[0104] 26 Connecting elements first longitudinal side

[0105] 27. The second longitudinal side of the connecting element

[0106] 28 First Extending Section

[0107] 29 Second Extending Section

[0108] 30 Third Extended Section

[0109] 31 First protrusion

[0110] 32 Second extension

[0111] 33 The first longitudinal side of the protrusion

[0112] 34 The second longitudinal side of the protrusion

[0113] 35 protruding end

[0114] The first longitudinal side of the 36 cantilever

[0115] The second longitudinal side of the 37 cantilever

[0116] 38 First Bridge Section

[0117] 39 Second Bridge Section

[0118] 40 Third Bridge Section

[0119] 41 incisions

[0120] 42 gaps

Claims

1. A MEMS unit (7) specifically for use in MEMS loudspeakers. It has at least one cantilever (8) for generating and / or detecting the lifting motion of the diaphragm (2). It has a lifting structure (12) that connects to the diaphragm (2) during normal use, and It has a connecting element (14) that movably connects the cantilever (8) to the lifting structure (12).

2. The MEMS unit according to the preceding claim, characterized in that, The connecting element (14) narrows in at least one section and / or widens in at least one section in the direction toward the lifting structure (12), and / or The connecting element (14) has at least one notch (24, 25).

3. The MEMS unit according to the preceding claims, characterized in that, The cantilever (8) is connected to the lifting structure (12) via a single connecting element (14).

4. The MEMS unit according to any one of the preceding claims, characterized in that, The two opposing longitudinal sides (26, 27) of the connecting element (14) and / or the basic shape of the connecting element (14) gradually narrow in a trapezoidal shape toward the lifting structure (12).

5. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) has at least one protruding section (28, 29, 30), in which the connecting element (14) has at least one protrusion (31, 32) extending laterally toward one of the two longitudinal sides (26, 27) of the connecting element (14).

6. The MEMS unit according to any one of the preceding claims, characterized in that, The extended sections (28, 29, 30) have two opposing extensions (31, 32), wherein preferably, the first extension (31) extends to the first longitudinal side (26) of the connecting element (14) and the second extension (32) extends to the second longitudinal side (27) of the connecting element (14).

7. The MEMS unit according to any one of the preceding claims, characterized in that, The at least one notch (24, 25) completely penetrates the connecting element (14) in the direction of the lifting shaft (3). The at least one notch (24, 25) is closed circumferentially, and / or The at least one notch (24, 25) is arranged in the at least one protruding section (28, 29) and preferably extends into the first and / or second protrusion (31, 32).

8. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) is connected to the cantilever (8) in particular only in a preferred single first contact area (15) extending laterally along the cantilever (8).

9. The MEMS unit according to any one of the preceding claims, characterized in that, The cantilever (8) has a free cantilever end (11) away from the carrier (10) of the MEMS unit (7), and / or The first contact area (15) is arranged on the free cantilever end (11) and / or is narrower than the free cantilever end (11) in the transverse direction of the cantilever (8).

10. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) is connected to the lifting structure (12) in particular only in a preferred single second contact area (16) extending laterally along the cantilever (8).

11. The MEMS unit according to any one of the preceding claims, characterized in that, In the transverse direction of the cantilever (8), the first contact area (15) is wider than the second contact area (16).

12. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) has at least one bridging section (38, 39, 40), which preferably connects the at least one protruding section (28, 29, 30) to the first contact area (15), the second contact area (16), or another adjacent protruding section (28, 29, 30).

13. The MEMS unit according to any one of the preceding claims, characterized in that, The at least one bridging section (38, 39, 40) is centered in the transverse direction of the connecting element (14) and / or has a smaller width compared to the at least one protruding section (28, 29, 30).

14. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) has a basic cedar tree shape and / or The connecting element (14) has a plurality of protruding sections (28, 29, 30) spaced apart from each other in the longitudinal direction of the connecting element (14), wherein at least one protruding section (28, 29, 30) is constructed according to any one or more of the preceding claims.

15. The MEMS unit according to any one of the preceding claims, characterized in that, The closer the extended sections (28, 29, 30) are to the lifting structure (12), the smaller their width.

16. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) has at least one lateral cut (41) in particular in the bridging section (38, 39, 40), the lateral cut (41) extending into the connecting element (14) from one of the two longitudinal sides (26, 27).

17. The MEMS unit according to any one of the preceding claims, characterized in that, The cantilever (8) has a trapezoidal shape that gradually narrows toward the lifting structure (12) and / or the connecting element (14) continues the trapezoidal shape in the direction toward the lifting structure (12).

18. The MEMS unit according to any one of the preceding claims, characterized in that, The MEMS unit (7) has a plurality of, particularly six, cantilever arms (8), each of which is connected to the lifting structure (12) by a single, preferably one, connecting element (14), wherein at least one, particularly all, of the connecting elements (14) are preferably constructed according to any one or more of the preceding claims.

19. The MEMS unit according to any one of the preceding claims, characterized in that, The connecting element (14) and its corresponding cantilever (8) extend radially outward from the central lifting structure (12) in a star shape, wherein the central lifting structure (12) is constructed in a hexagonal shape.

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