front opening interface mechanical standard system

Abstract

This invention provides a front-opening interface mechanical standard system, including a body, a transfer module, a drive assembly, a door / cover opening / closing module, and a control module. The body has a front side, a rear side, and an opening, with the opening connecting the front and rear sides. The transfer module is movably disposed on the body and located on the rear side. A substrate receiving box is adapted to be carried on the transfer module and is driven by the transfer module to move to or away from the opening. The drive assembly is disposed on the front side of the body. The door / cover opening / closing module is located on the front side and connected to the drive assembly. The door / cover opening / closing module is driven by the drive assembly to move to or away from the opening. The control module is electrically connected to the transfer module, the door / cover opening / closing module, and the drive assembly. The substrate receiving box and the door / cover opening / closing module, respectively moved to the opening, are opposite each other across the opening and form an airtight space with the opening.

Description

Technical Field

[0001] This invention relates to a front-opening interface mechanical standard system. Background Technology

[0002] In semiconductor manufacturing or panel manufacturing, the substrate needs to be processed through several workstations. While waiting between workstations, the substrate is usually placed in a container to keep it in a dust-free environment and avoid external contamination. The lid of the container can be opened and closed using a loading and unloading device, and gas is used to keep the inside of the container dust-free during the opening and closing process.

[0003] However, the opening and closing device usually uses slide rails, pneumatic cylinders and connecting components to move and open and close the container (and its cover). These structures or components are mostly exposed to the environment, and it is impossible to avoid the volatile gases and dust that may be generated during their operation, which may lead to the risk of contamination of the substrate. Summary of the Invention

[0004] The present invention relates to a front-opening interface mechanical standard system that provides a structure with associated drive components that are sufficiently isolated from the environment to avoid contamination of the housing and its inner substrate.

[0005] According to an embodiment of the present invention, a front-opening interface mechanical standard system includes a body, a transfer module, a drive assembly, a door / cover opening / closing module, and a control module. The body has a front side, a rear side, and an opening, the opening connecting the front and rear sides. The transfer module is movably disposed on the body and located on the rear side. A substrate receiving box is adapted to be carried on the transfer module and is driven by the transfer module to move to or away from the opening. The drive assembly is disposed on the front side of the body. The door / cover opening / closing module is located on the front side and connected to the drive assembly. The door / cover opening / closing module is driven by the drive assembly to move to or away from the opening. The control module is electrically connected to the transfer module, the door / cover opening / closing module, and the drive assembly. The substrate receiving box and the door / cover opening / closing module, respectively moved to the opening, are opposite each other across the opening and form an airtight space with the opening.

[0006] In the front opening interface mechanical standard system according to an embodiment of the present invention, the aforementioned front opening interface mechanical standard system is used to connect between the substrate accommodating storage system and the loading area, with the front side located in the loading area and the rear side located in the substrate accommodating storage system.

[0007] In the front-opening interface mechanical standard system according to an embodiment of the present invention, the aforementioned body is provided with an airtight component surrounding the opening on the rear side.

[0008] In the front-opening interface mechanical standard system according to an embodiment of the present invention, a fixing module is also included, which is disposed on the rear side of the body, electrically connected to the control module, and located above the opening.

[0009] In the front-opening interface mechanical standard system according to an embodiment of the present invention, the aforementioned drive assembly includes a base, a rotating shaft, a pneumatic cylinder, and a crank. One end of the rotating shaft is pivotally mounted to the base, and the other end of the rotating shaft is fixedly connected to the side plate of the door opening / closing module. The pneumatic cylinder is electrically connected to the control module. One end of the crank is sleeved on the rotating shaft, and the other end of the crank is pivotally connected to the push rod of the pneumatic cylinder. The control module drives the crank through the push rod of the pneumatic cylinder, causing the crank to rotate the rotating shaft and drive the door opening / closing module to rotate relative to the body to move towards or away from the opening.

[0010] In the front-opening interface mechanical standard system according to an embodiment of the present invention, the above-mentioned drive component further includes a linear slide rail, and the base is disposed on the linear slide rail so that the base and the rotating shaft are driven by the linear slide rail to move along an axial direction, the axial direction being parallel to or consistent with the rotating shaft.

[0011] In the front-opening interface mechanical standard system according to an embodiment of the present invention, the aforementioned drive assembly further includes a flexible airtight element located between the side plate and the crank. When the rotating shaft moves axially to move the door opening / closing module away from the opening, the flexible airtight element unfolds and the rotating shaft is housed within the flexible airtight element. When the rotating shaft moves axially to move the door opening / closing module toward the opening, the flexible airtight element folds back and a portion of the rotating shaft moves away, exposing the flexible airtight element.

[0012] In the front-opening interface mechanical standard system according to an embodiment of the present invention, the aforementioned drive assembly further includes a housing that houses the base, the pneumatic cylinder, the crank, and the linear slide rail. The linear slide rail and the pneumatic cylinder are assembled on the inner wall of the housing. A flexible airtight component is connected between the housing and the side plate so that when the door opening and closing module moves away from the opening, the portion of the rotating shaft that moves out of the housing is contained within the flexible airtight component.

[0013] Based on the above, the front-opening interface mechanical standard system, through the corresponding design of the transfer module and the drive component relative to the main body, allows the control module to move the substrate housing to the rear of the main body via the transfer module, and to move the door opening and closing module to the front of the main body via the drive component. This allows the substrate housing and the door opening and closing module to face each other across the opening, and to form an airtight space with the opening. This enables the control module to drive the door opening and closing module to install and remove the door of the substrate housing without contaminating the substrate inside. Attached Figure Description

[0014] Figure 1 This is a simplified schematic diagram of a storage system and a front-opening interface mechanical standard system according to an embodiment of the present invention;

[0015] Figure 2A This is a partial structural diagram of the front-opening interface mechanical standard system and the receiving box;

[0016] Figure 2BThis is a diagram showing the electrical relationships of some components in the front-opening interface mechanical standard system;

[0017] Figure 3A This is a schematic diagram of the front-opening interface mechanical standard system in one state;

[0018] Figure 3B Showing it from another perspective Figure 3A Front-opening interface mechanical standard system;

[0019] Figure 4 This is a schematic diagram of the front-opening interface mechanical standard system in another state;

[0020] Figure 5 Showing it from another perspective Figure 4 A partial schematic diagram of the front-opening interface mechanical standard system;

[0021] Figures 6 to 10 The opening process of the front-opening interface mechanical standard system is shown;

[0022] Figure 11 Show Figure 10 A three-dimensional schematic diagram of the front-opening interface mechanical standard system;

[0023] Figure 12A and Figure 12B This is a schematic diagram of the operation of a front-opening interface mechanical standard system according to another embodiment of the present invention. Detailed Implementation

[0024] Reference will now be made in detail to exemplary embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same component reference numerals are used in the drawings and description to denote the same or similar parts.

[0025] Figure 1 This is a simplified schematic diagram of a storage system and a front-opening interface mechanical standard system according to an embodiment of the present invention. Please refer to... Figure 1 In this embodiment, the front-opening interface mechanical standard system (FIMS) 100 is used between the substrate cassette storage system 10 and the loading area 20 for the transfer of the substrate cassette 40. Figure 1As shown, the substrate cassette 40 contains the substrate 50. It is first transported to the transfer port 11 of the substrate cassette storage system 10 by the suspended transport module 30, and then the substrate cassette 40 is transported into the storage space 13 by the transport robot 12 of the substrate cassette storage system 10. When the substrate cassette 40 needs to be removed from the substrate cassette storage system 10, the transport robot 12 first transports the substrate cassette 40 into the front opening interface mechanical standard system 100, and removes the door cover 41 of the substrate cassette 40. Then, the transport robot 12A removes the substrate 50 from the substrate cassette 40 and places it into the storage compartment 21 of the loading area 20, ready for use by the workstation of the next process.

[0026] Figure 2A This is a partial structural diagram of the front-opening interface mechanical standard system and the housing box. Figure 2B This is a diagram showing the electrical relationships of some components in the front-opening interface mechanical standard system. Please also refer to... Figure 1 , Figure 2A and Figure 2B In this embodiment, the front opening interface mechanical standard system 100 includes a body 110, a transfer module 120, a drive assembly 150, a door opening / closing module 140, and a control module CM. The body 110 has a front side 111, a rear side 112, and an opening 113, with the opening 113 connecting the front side 111 and the rear side 112. The transfer module 120 is movably disposed on the body 110 and located on the rear side 112. A substrate receiving box 40 is adapted to be carried on the transfer module 120 and is driven by the transfer module 120 to move to or away from the opening 113. The drive assembly 150 is disposed on the front side 111 of the body 110. The door opening / closing module 140 is located on the front side 111 and connected to the drive assembly 150. The door opening / closing module 140 is driven by the drive assembly 150 to move to or away from the opening 113. The control module CM is electrically connected to the transfer module 120, the door opening / closing module 140, and the drive assembly 150. Here, the substrate housing 40 is an example of a front-opening unified pod (FOUP), but it is not limited thereto.

[0027] like Figure 1 As shown, a front-opening interface mechanical standard system 100, serving as a transfer intermediary, is connected between the substrate cassette storage system 10 and the loading area 20, wherein the front side 111 is located in the loading area 20, and the rear side 112 is located in the substrate cassette storage system 10. The main body 110 also includes a lifting platform 114, electrically connected to a control module CM, to facilitate receiving the substrate cassette 40 transferred by the handling robot 12 and delivering it to the opening 113 to facilitate subsequent opening of the door cover 41 and related operations before transfer.

[0028] Figure 3AThis is a schematic diagram of the front-opening interface mechanical standard system in one state. Figure 3B Showing it from another perspective Figure 3A The front-opening interface mechanical standard system. Figure 4 This is a schematic diagram of the front-opening interface mechanical standard system in another state. Please also refer to... Figure 3A , Figure 3B and Figure 4 In this embodiment, the drive assembly 150 includes a housing 158 and a linear slide rail 151, a base 152, a pneumatic cylinder 153, a rotating shaft 154, a flexible airtight component 155, a crank 156, and a bearing 157 housed therein. The track of the linear slide rail 151 is assembled to the inner wall of the housing 158, and the slider of the linear slide rail 151 is movably disposed on the track. Similarly, the pneumatic cylinder 153 and the bearing 157 are also assembled to the inner wall of the housing 158 to achieve a fixed position. The control module CM is electrically connected to the linear slide rail 151 and the pneumatic cylinder 153.

[0029] Furthermore, one end of the rotating shaft 154 is pivotally mounted on the base 152, and the other end of the rotating shaft 154 is fixedly connected to the side plate 143a of the door cover opening and closing module 140. The base 152 is assembled on the slider of the aforementioned linear slide rail 151. Therefore, by actuating the linear slide rail 151, the base 152 and the rotating shaft 154 mounted thereon can be driven to move relative to the housing 158. The rotating shaft 154, after passing through the bearing 157, movably passes through and extends out of the housing 158, thereby moving the door cover opening and closing module 140 away from or closer to the opening 113. In addition, Figure 5 Showing it from another perspective Figure 4 A partial schematic diagram of the front-opening interface mechanical standard system. Please also refer to... Figure 4 and Figure 5 In this embodiment, one end of the crank 156 is sleeved on the rotating shaft 154, and the other end of the crank 156 is pivotally connected to the push rod 153a of the pneumatic cylinder 153 along the shaft C2. The control module CM drives the crank 156 through the push rod 153a of the pneumatic cylinder 153, so that the crank 156 rotates the rotating shaft 154, and drives the door cover opening and closing module 140 to rotate relative to the body 110 about the shaft C1 and move to or away from the opening 113.

[0030] Simply put, simultaneous comparison Figure 3A and Figure 4It is clear that the base 152 and rotating shaft 154 of the drive assembly 150 reciprocate along axis C1 due to the linear guide rail 151, enabling the door opening / closing module 140 to be horizontally moved away from or into the opening 113. Furthermore, the pneumatic cylinder 153, via the crank 156, rotates the rotating shaft 154 along axis C1, causing the door opening / closing module 140 to rotate relative to the body 110 and move to or away from the opening 113. Accordingly, the drive assembly 150 generates relative movement of the door opening / closing module 140 relative to the body 110 (the opening 113) through two different driving methods.

[0031] It is worth noting that since the flexible airtight component 155 of the drive assembly 150 is located between the side plate 143a and the crank 156, and more specifically, the flexible airtight component 155 is connected between the housing 158 and the side plate 143a, when the rotating shaft 154 moves along the shaft C1 and causes the door opening and closing module 140 to move away from the opening 113, the flexible airtight component 155 is in an unfolded state and the rotating shaft 154 is housed within the flexible airtight component 155. That is, at this time, a portion of the rotating shaft 154 will protrude through the housing 158, but the portion of the rotating shaft 154 that moves out of the housing 158 is contained within the flexible airtight component 155. Conversely, when the pivot 154 moves along axis C1, causing the door opening / closing module 140 to move toward the opening 113, the flexible airtight component 155 will be converted to a folded state, and part of the pivot 154 will move away, exposing the flexible airtight component 155. However, the part of the flexible airtight component 155 that is not exposed is housed within the housing 158. Accordingly, due to the presence of the flexible airtight component 155, the drive assembly 150 can provide an airtight environment to protect the related components, that is, prevent these drive-related components from being exposed to the environment in which the drive assembly 150 is located, thereby avoiding the pollution of the environment by volatile gases and dust that may be generated during the operation of the components.

[0032] Figures 6 to 10 This illustrates the opening process of the front-opening interface mechanical standard system. Figure 11 Show Figure 10 A three-dimensional schematic diagram of the front-opening interface mechanical standard system. Please refer to [the diagram first]. Figure 6 and Figure 7 And compare Figure 1 When the substrate receiving box 40 is moved from the substrate receiving box storage system 10 to the front opening interface mechanical standard system 100 by the handling robot 12, it is placed on the transfer module 120 of the lifting platform 114. The positioning recess 43 at the bottom of the substrate receiving box 40 engages with the positioning protrusion 121 of the transfer module 120 to stabilize the substrate receiving box 40. After being moved to the corresponding height of the opening 113 by the lifting platform 114, the transfer module 120 can then move the substrate receiving box 40 to the opening 113. Here, as... Figure 2AAs shown, the main body 110 is also provided with an airtight component 115 surrounding the opening 113 on the rear side 112, thus ensuring... Figure 7 The control module CM drives the door cover opening and closing module 140 to allow the sealing cover 143 to cover the opening 113 of the body 110, opposite to the door cover 41 of the substrate receiving box 40. Similarly, the sealing cover 143 can also maintain the required airtightness through an airtight component (not shown).

[0033] Next, as Figure 8 As shown, the front-opening interface mechanical standard system 100 also includes a fixing module 130, which is disposed on the rear side 112 of the body 110 and electrically connected to the control module CM (such as...). Figure 2B As shown), and located above the opening 113. When the substrate receiving box 40 aligns with the opening 113, the control module CM can drive the fixing module 130 to fix it to the fixing part 42 of the substrate receiving box 40.

[0034] Next, as Figure 9 As shown, the control module CM drives the door cover opening and closing module 140 to allow the opening and closing mechanism 144 inside the sealing cover 143 to enter the opening 113 and move towards the door cover 41. At this time, please refer to... Figure 2A In this embodiment, the door cover opening and closing module 140 is provided with a suction sealing member 141 and a latching key 142 on its opening and closing mechanism 144, while the door cover 41 of the substrate receiving box 40 has a suction hole 41a and a latching keyway 41b. Therefore Figure 9 The diagram shows that the suction sealing member 141 of the opening and closing mechanism 144 and the latch key 142 are respectively placed into the suction hole 41a and the latch key groove 41b to prepare for the subsequent opening and closing of the door cover 41.

[0035] like Figure 2A As shown, the front opening interface mechanical standard system 100 of this embodiment also includes a pneumatic unit 160, and the body 110 also has a plurality of air holes 113a located on the side wall of the opening 113, and these air holes 113a are connected to the pneumatic unit 160. As mentioned above, when the substrate receiving box 40 moves to the opening 113 (located on the rear side 112) and the sealing cover 143 of the door opening and closing module 140 moves to the opening 113 (located on the front side 111), it is essentially to make the substrate receiving box 40 and the door opening and closing module 140 face each other across the opening 113 and form an airtight space with the opening 113.

[0036] Next, once the airtight space is completed, the control module CM can drive the pneumatic unit 160 to replace the gas in the airtight space through the air vent 113a, for example, by discharging the original gas and injecting the same gas as the loading area 20. After the gas replacement is completed, the control module CM can drive the door opening and closing module 140, causing the latch key 142 to release the latched state of the door cover 41, and using the suction sealing member 141 (e.g., by vacuum adsorption) to adsorb the door cover 41 onto the opening and closing mechanism 144.

[0037] Then, as Figure 10 As shown, the control module CM rotates the shaft 154 (shown in the diagram) via the drive assembly 150, particularly via the pneumatic cylinder 153 and the crank 156. Figure 5 (See previous attached diagram), allowing the sealing cap 143 to be removed from the opening 113. Here Figure 10 What is shown is Figure 11 As shown, therefore, a simultaneous comparison is necessary. Figure 11 and Figure 3A It can be seen that the control module CM can then use the drive component 150 to move the door cover opening / closing module 140, which holds the door cover 41, away from the outlet 113 and away from the main body 110. Subsequently, the substrate receiving box 40, having completed the opening and removal of the door cover 41, then... Figure 1 As shown, the substrate 50 inside is moved to the loading area 20 and stored in the storage compartment 21 by the handling robot 12A.

[0038] Figure 12A and Figure 12B This is a schematic diagram illustrating the operation of a front-opening interface mechanical standard system according to another embodiment of the present invention. Please also refer to... Figure 12A and Figure 12B This is equivalent to performing the door opening and closing action as described in the previous embodiment using another implementation method. Therefore, this embodiment only shows the relevant components, and those not shown will not be described again as in the aforementioned embodiments.

[0039] Similar to the above Figure 3A , Figures 3B to 4 ,as well as Figures 6 to 10In this embodiment, the door opening / closing module 240 is moved towards the opening 113 by the drive assembly 250. Similar to the previous embodiment, the door opening / closing module 240 in this embodiment also includes a sealing cover 243 and an opening / closing mechanism 244 inside it. The drive assembly 250 in this embodiment also includes a housing 258 and a linear slide rail 251, a base 252, a pneumatic cylinder 253, a rotating shaft 254, a flexible airtight component 255, a crank 256, and a bearing 257 housed therein. The track of the linear slide rail 251 is assembled to the inner wall of the housing 258, and the slider of the linear slide rail 251 is movably disposed on the track. Similarly, the pneumatic cylinder 253 and the bearing 257 are also assembled to the inner wall of the housing 258 to obtain a fixed position. The other end of the rotating shaft 254 is fixed to the side plate 243a of the door opening / closing module 240, and is also electrically connected to the linear slide rail 251 and the pneumatic cylinder 253 by a control module CM. Unlike the previous embodiments, the drive component 250 in this embodiment is located below the door opening and closing module 240, thus providing a driving mode for the door opening and closing module 240 to rise or fall. This reduces the footprint of the front opening interface mechanical standard system, which is beneficial for production line configuration.

[0040] Figures 12A to 12B The process is that the drive assembly 250 moves the door opening / closing module 240 toward the opening 113, which is the same as the aforementioned Figure 3A (or Figure 3B Convert to Figure 4 The process is similar. The base 252 and rotating shaft 254 of the drive assembly 250 reciprocate along axis C3 due to the linear guide rail 251, enabling the door opening / closing module 240 to be vertically moved away from or into the opening 113. Furthermore, the pneumatic cylinder 253, via the crank 256, rotates the rotating shaft 254 along axis C3, causing the door opening / closing module 240 to rotate relative to the body 110 and move to or away from the opening 113. Figure 12B The rotation process is shown, with the arrow next to pneumatic cylinder 253 indicating its rotation from... Figure 12A Switch to Figure 12B The direction of movement, which in turn causes the rotation of shaft 254 (the arrow next to shaft 254 indicates its direction of rotation). Figure 12A Switch to Figure 12B (The direction of rotation). Based on this, Figure 12A The tilted door opening and closing module 240 is rotated to the correct position and correspondingly covers the opening 113.

[0041] However, contrary to the above, when the rotating shaft 254 moves along the shaft C3, causing the door cover opening and closing module 240 to move away from the opening 113 ( Figure 12B Switch to Figure 12ADuring the process, the flexible airtight component 255 will be converted into a folded state and a portion of the pivot 254 will move away, exposing the flexible airtight component 255. However, the portion of the flexible airtight component 255 that is not exposed is contained within the housing 258. Conversely, when the pivot 254 moves along the axis C3, causing the door opening / closing module 140 to move toward the opening 113, the flexible airtight component 255 is in an unfolded state and the pivot 254 is contained within the flexible airtight component 255. That is, at this time, a portion of the pivot 254 will protrude through the housing 258, but the portion of the pivot 254 that protrudes from the housing 258 is contained within the flexible airtight component 255. Accordingly, the drive assembly 250 provides an airtight environment to protect the related components due to the presence of the flexible airtight component 255, that is, it prevents these drive-related components from being exposed to the environment in which the drive assembly 250 is located, so as to avoid the pollution of the environment by volatile gases and dust that may be generated during the operation of the components.

[0042] In summary, in the above embodiments of the present invention, the front-opening interface mechanical standard system, through the corresponding design of the transfer module and the drive component relative to the main body, allows the control module to move the substrate housing to the rear side of the main body via the transfer module, and to move the door opening and closing module to the front side of the main body via the drive component. This allows the substrate housing and the door opening and closing module to face each other across the opening, forming an airtight space. This enables the control module to drive the door opening and closing module to install and remove the door of the substrate housing without contaminating the substrate inside. Simultaneously, once the airtight space is formed, the front-opening interface mechanical standard system can replace the gas within the airtight space, that is, to expel the original gas and inject the gas required for subsequent processes, thereby facilitating the replacement of the substrate's environment.

[0043] Furthermore, the drive assembly maintains airtightness by housing most of its components within the housing and avoiding exposure to the environment through the combination of the housing and flexible airtight components. At the same time, a flexible airtight component is provided between the door opening and closing module and the housing for the pivot that moves out of the housing. Its ability to expand and fold ensures that the pivot that moves out of the housing can still be housed within the flexible airtight component, thus preventing the volatile gases or dust that may be generated by the drive-related components during operation from polluting the environment.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A front-opening interface mechanical standard system, characterized in that, include: The body has a front side, a rear side, and an opening, the opening connecting the front side and the rear side; A transfer module is movably disposed on the body and located on the rear side. A substrate receiving box is adapted to be carried on the transfer module and is driven by the transfer module to move to or away from the opening. A drive component is disposed on the front side of the main body; A door opening and closing module is located on the front side and connected to the drive assembly. The door opening and closing module is driven by the drive assembly to move to or away from the opening. as well as The control module is electrically connected to the transfer module, the door opening and closing module and the drive assembly, wherein the substrate receiving box and the door opening and closing module, which are respectively moved to the opening, are opposite to each other through the opening and form an airtight space with the opening.

2. The front-opening interface mechanical standard system according to claim 1, characterized in that, Used to connect between the substrate cassette storage system and the loading area, the front side is located in the loading area and the rear side is located in the substrate cassette storage system.

3. The front-opening interface mechanical standard system according to claim 1, characterized in that, The main body is provided with an airtight component surrounding the opening on the rear side.

4. The front-opening interface mechanical standard system according to claim 1, characterized in that, It also includes a fixing module, which is disposed on the rear side of the main body, electrically connected to the control module, and located above the opening.

5. The front-opening interface mechanical standard system according to claim 1, characterized in that, The driving component includes: Base; A rotating shaft, one end of which is pivotally mounted on the base, and the other end of which is fixedly connected to the side plate of the door opening and closing module; The pneumatic cylinder is electrically connected to the control module; and A crank, one end of which is sleeved on the shaft, and the other end of which is pivotally connected to the push rod of the pneumatic cylinder. The control module drives the crank through the push rod of the pneumatic cylinder to rotate the shaft and drive the door opening and closing module to rotate relative to the body to move to or away from the opening.

6. The front-opening interface mechanical standard system according to claim 5, characterized in that, The driving component also includes: A linear slide rail, wherein the base is disposed on the linear slide rail so that the base and the rotating shaft are driven by the linear slide rail to move along an axial direction, the axial direction being parallel to or consistent with the rotating shaft.

7. The front-opening interface mechanical standard system according to claim 6, characterized in that, The drive assembly also includes a flexible airtight element located between the side plate and the crank. When the rotating shaft moves along the axial direction to move the door opening / closing module away from the opening, the flexible airtight element unfolds and the rotating shaft is housed within the flexible airtight element. When the rotating shaft moves along the axial direction to move the door opening / closing module toward the opening, the flexible airtight element folds and a portion of the rotating shaft moves away, exposing the flexible airtight element.

8. The front-opening interface mechanical standard system according to claim 7, characterized in that, The drive assembly also includes a housing that houses the base, the pneumatic cylinder, the crank, and the linear guide rail. The linear guide rail and the pneumatic cylinder are assembled to the inner wall of the housing. The flexible airtight element is connected between the housing and the side plate so that when the door opening / closing module moves away from the opening, the portion of the pivot that moves out of the housing is contained within the flexible airtight element.

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