Support device and surface shape monitoring system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF ADVANCED SCI FACILITIES SHENZHEN
- Filing Date
- 2026-04-28
- Publication Date
- 2026-07-17
AI Technical Summary
In precision optical systems, the linearity of the probe array can change due to environmental factors such as jitter, temperature drift, and mechanical vibration, affecting the accuracy of surface shape monitoring data.
A support device is adopted, including a support base, a fixing mechanism and two supporting hinges. The fixing mechanism can rotate around the central axis of the supporting hinges through the hinge structure, releasing local rotational degrees of freedom, avoiding deformation transmission and maintaining the straightness of the probe array.
This reduces the impact of factors such as shaking, temperature drift, and mechanical vibration on the straightness of the probe array, ensuring the accuracy of surface shape monitoring data.
Smart Images
Figure CN122408655A_ABST