Hybrid mode pressure probe with integrated temperature detector and method of making same
By integrating a temperature detector and hybrid operating modes into pressure sensors, the sensitivity and linearity issues of traditional pressure sensors are solved, enabling pressure sensors with a wide linear measurement range and high sensitivity, and real-time temperature detection, thus improving the stability and reliability of design and manufacturing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ZHONGBEI UNIV
- Filing Date
- 2026-06-12
- Publication Date
- 2026-07-17
AI Technical Summary
Existing pressure sensors have an inherent trade-off between sensitivity and linearity, making it difficult to achieve a balance between a wide linear measurement range and high sensitivity, and they also lack the ability to accurately detect temperature.
A hybrid-mode pressure sensing device with an integrated temperature detector combines CMUTs (Combined Temperature Detectors) and a resistive temperature sensor. The CMUTs operate as capacitive or resonant pressure sensors in different pressure ranges and extend the measurement range through hybrid mode, while the integrated resistive temperature sensor performs real-time temperature detection.
This invention achieves a pressure sensor with a wide linear measurement range and high sensitivity, and can accurately detect temperature in real time, improving the stability and reliability of design and manufacturing, and reducing complexity and cost.
Smart Images
Figure CN122408892A_ABST