Multi-environment adaptive fast mirror comprehensive performance test method and device

By designing a three-channel laser interferometer and probe mounting fixture, the problems of testing accuracy and dynamic performance of fast reflectors under high and low temperature, vibration and vacuum conditions were solved, and high-precision comprehensive performance testing was achieved.

CN122409147APending Publication Date: 2026-07-17BEIJING XUNLAI OPTOELECTRONICS TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING XUNLAI OPTOELECTRONICS TECH CO LTD
Filing Date
2026-05-26
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Traditional fast reflector testing methods are difficult to guarantee measurement accuracy under high and low temperature, vibration and vacuum conditions, and the measurement bandwidth of photoelectric autocollimators is low, which makes it difficult to meet the dynamic performance test requirements, resulting in large errors.

Method used

A three-channel laser interferometer and probe mounting fixture are used to synchronously collect distance data from three measurement points on the surface of the fast reflector under test through the interferometer probe. The pitch and azimuth angles are calculated to generate dynamic and drift characteristic test results. The device is designed so that the probe is in a thermal vacuum environment, while the host and computer are externally connected to ensure the continuity of the measurement link.

Benefits of technology

It improves the testing accuracy and objectivity of dynamic performance evaluation of fast reflectors in multiple environments, reduces the impact of its own sensor error, and meets the testing requirements in vacuum scenarios.

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Abstract

本发明公开了一种多环境适配的快速反射镜综合性能测试方法及装置,涉及光学精密测量技术领域,包括在目标测试环境下,调整干涉仪探头一、干涉仪探头二和干涉仪探头三的位置,获取干涉仪探头一与干涉仪探头二之间的间距L1、干涉仪探头二与干涉仪探头三之间的间距L2,本发明采用三个干涉仪探头同步采集待测快速反射镜镜面三个测量点的距离数据,并通过干涉仪探头一与干涉仪探头二之间的间距L1、干涉仪探头二与干涉仪探头三之间的间距L2,将三路距离变化量转换为待测快速反射镜绕X轴偏转的俯仰角θ和绕Y轴偏转的方位角γ,减少自身传感器误差对测试结果的影响,提高动态性能和静态漂移测试结果的客观性。
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