A device system and detection method for appearance detection of PVA sponge brush
By working together with 2D and 3D scanning components, combined with rotary clamping and motion adjustment, high-precision, all-round automated inspection of PVA sponge brushes is achieved, solving the problems of low accuracy and poor repeatability of traditional inspection equipment and meeting the inspection requirements of advanced semiconductor processes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- MUKE HENGYI (JIANGSU) ELECTRONIC MANUFACTURING CO LTD
- Filing Date
- 2026-05-13
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies cannot meet the high-precision, multi-dimensional, and automated requirements of advanced semiconductor manufacturing processes for the appearance inspection of PVA sponge brushes. Traditional inspection equipment suffers from low inspection accuracy, poor repeatability, and inability to adapt to micron-level requirements.
The system employs a 2D scanning component, a 3D scanning component, a rotating clamping component, and a motion adjustment component working together, in conjunction with a signal processing module, to achieve simultaneous acquisition and processing of two-dimensional surface images and three-dimensional depth signals of PVA sponge brushes, enabling omnidirectional, blind-spot-free scanning and automated detection.
It achieves high-precision, all-around scanning and high consistency in the appearance inspection of PVA sponge brushes, reduces human error, improves inspection efficiency and accuracy, and adapts to the inspection needs of sponge brushes of different specifications.
Smart Images
Figure CN122409657A_ABST