Method and system for self-optimization of inner layer etching parameters based on mes data

By using a self-optimization method for inner layer etching parameters based on MES data, the etching risk area is dynamically evaluated and the spray pressure is optimized, which solves the problems of uneven copper thickness and pattern density differences in PCB inner layer etching, and achieves precise control and adaptive protection of etching defects.

CN122411342APending Publication Date: 2026-07-17JIAN MANKUN TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-04
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing PCB inner layer etching processes cannot effectively balance the uneven copper thickness and pattern density differences within the board surface. This results in etching parameter settings that cannot simultaneously protect fine lines from being broken by lateral etching and prevent copper layers from remaining in large copper areas, leading to etching defects.

Method used

The inner layer etching parameter self-optimization method based on MES data dynamically assesses etching risk areas by fusing real-time scanning of board surface copper thickness data with MES data, establishes a differentiated etching optimization model, and optimizes spray pressure parameters by combining feedforward main compensation and feedback micro-correction composite control.

Benefits of technology

It achieves precise and differentiated control over etching defect risks, protecting fine lines from being broken by lateral etching while ensuring clean etching of large copper areas, forming a complete closed loop from data acquisition to anomaly tracing.

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Abstract

本发明涉及PCB制造工艺控制技术领域,具体公开了基于MES数据的内层蚀刻参数自优化方法及系统,包括:实时扫描板面铜厚数据,并与获取的MES数据进行逐点空间对准与融合,构建融合来料动态信息的数字板,动态评估蚀刻风险区域,建立差异化蚀刻优化模型,对批次板件执行前馈主体补偿与反馈微量修正相结合的复合控制,前馈主体补偿采用差异化蚀刻优化模型与蚀刻速率预测模型迭代得到执行喷淋压力参数,反馈微量修正获取并利用线宽量测结果对执行喷淋压力参数进行反馈微调更新,判断是否出现批次性缺陷,若出现,判定缺陷根源并执行匹配缺陷处理,从而实现对蚀刻缺陷风险的精准、差异化、自适应控制。
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