A method for attention residual guided chip defect detection

By using a multi-granularity attention residual module and a dynamic parameter update method, the problems of feature overwhelming and noise accumulation in laser chip defect detection are solved, improving detection accuracy and robustness, and adapting to laser chip defect detection under conditions of few samples.

CN122415602APending Publication Date: 2026-07-17HUNAN NORMAL UNIVERSITY

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HUNAN NORMAL UNIVERSITY
Filing Date
2026-06-15
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing semi-supervised frameworks struggle to distinguish between highly reflective backgrounds and submicron-level defects in laser chip defect detection, leading to feature overload and noise accumulation, which affects detection accuracy and robustness.

Method used

We employ a multi-granularity attention residual module to separate features and perform adaptive aggregation. We also combine the topological dependencies between network layers to dynamically update parameters, suppress noise propagation, and improve detection accuracy and robustness.

Benefits of technology

It effectively separates highly reflective background features, preserves the local edges and fine structures of defects, reduces dependence on pixel-level annotation data, and improves the accuracy and stability of laser chip defect detection.

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Abstract

本发明公开了一种注意力残差引导的芯片缺陷检测方法,涉及计算机视觉与工业图像检测技术领域。该方法构建基于Teacher‑Student架构的半监督模型,利用多粒度注意力残差模块对Token进行信息熵驱动的分组,并通过不对称残差候选范围实现深层特征的自适应聚合,以增强缺陷边缘与细微结构的表征能力;同时,结合监督损失与一致性无监督损失完成模型训练,依据网络层间拓扑依赖关系计算全局利用率,并自适应调整Teacher网络的指数移动平均更新率,从而抑制显微底噪累积与确认偏差。该方法能够实现半监督场景下亚微米级激光芯片图像的稳定检测,并增强模型对复杂缺陷特征的表征能力与噪声抑制能力。
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