Wide-range electric field measurement method, device and equipment of liquid metal probe, and medium

By employing differential capacitance detection and compensation electrode control, the problem of liquid droplets touching the wall under a strong electric field in liquid metal probes was solved, achieving accuracy and continuity in wide-range electric field measurement, which is suitable for electric field measurement systems.

CN122430618APending Publication Date: 2026-07-21CHINA ELECTRONICS RELIABILITY AND ENVIRONMENTAL TESTING INSTITUTE ((THE FIFTH INSTITUTE OF ELECTRONICS MINISTRY OF INDUSTRY AND INFORMATION TECHNOLOGY) (CHINA SAIBAO LABORATORY)
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHINA ELECTRONICS RELIABILITY AND ENVIRONMENTAL TESTING INSTITUTE ((THE FIFTH INSTITUTE OF ELECTRONICS MINISTRY OF INDUSTRY AND INFORMATION TECHNOLOGY) (CHINA SAIBAO LABORATORY)
Filing Date
2026-06-24
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Existing liquid metal probes are prone to droplet saturation under strong electric fields, resulting in poor measurement accuracy and repeatability, making it difficult to simultaneously achieve sensitive measurement in weak electric fields and wide-range measurement in strong electric fields.

Method used

Droplet displacement is detected by differential capacitance, and a DC control bias voltage is applied by a compensation electrode to suppress droplet contact with the wall and calculate the electric field strength. A dielectric isolation structure and a compensation electrode are used to control droplet displacement.

Benefits of technology

Without increasing the size of the elastic cavity, droplet contact with the wall is suppressed, enabling wide-range electric field measurement and improving the accuracy and continuity of the measurement.

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Abstract

The application discloses a wide-range electric field measurement method, device, equipment and medium of a liquid metal probe, and relates to the technical field of electric field measurement. The method comprises the following steps: acquiring a real-time differential capacitance signal output by a differential capacitance detection electrode; obtaining a real-time displacement and an offset direction of a liquid metal droplet relative to an initial equilibrium position according to a pre-labeled capacitance-displacement corresponding relationship; combining the real-time displacement obtained through continuous sampling to obtain a real-time displacement change rate along the current offset direction; when the absolute value of the real-time displacement reaches a preset displacement threshold value or the predicted wall-touching time is not greater than a preset time threshold value, determining an application mode of a compensation electrode and a direct-current control bias voltage according to a bias compensation relationship; applying the voltage and acquiring a controlled residual differential capacitance; and finally calculating an electric field intensity measurement value in the sensitive axis direction. The application can inhibit the saturation of the liquid metal droplet touching the wall under a strong electric field and realize wide-range electric field measurement without increasing the size of the elastic cavity of the liquid metal probe.
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