Wide-range electric field measurement method, device and equipment of liquid metal probe, and medium
By employing differential capacitance detection and compensation electrode control, the problem of liquid droplets touching the wall under a strong electric field in liquid metal probes was solved, achieving accuracy and continuity in wide-range electric field measurement, which is suitable for electric field measurement systems.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- CHINA ELECTRONICS RELIABILITY AND ENVIRONMENTAL TESTING INSTITUTE ((THE FIFTH INSTITUTE OF ELECTRONICS MINISTRY OF INDUSTRY AND INFORMATION TECHNOLOGY) (CHINA SAIBAO LABORATORY)
- Filing Date
- 2026-06-24
- Publication Date
- 2026-07-21
AI Technical Summary
Existing liquid metal probes are prone to droplet saturation under strong electric fields, resulting in poor measurement accuracy and repeatability, making it difficult to simultaneously achieve sensitive measurement in weak electric fields and wide-range measurement in strong electric fields.
Droplet displacement is detected by differential capacitance, and a DC control bias voltage is applied by a compensation electrode to suppress droplet contact with the wall and calculate the electric field strength. A dielectric isolation structure and a compensation electrode are used to control droplet displacement.
Without increasing the size of the elastic cavity, droplet contact with the wall is suppressed, enabling wide-range electric field measurement and improving the accuracy and continuity of the measurement.
Smart Images

Figure CN122430618A_ABST