Microcavity gap configuration spectrum line modulation structure based on lead zirconate titanate thin film

CN122449786APending Publication Date: 2026-07-24HANGZHOU INST FOR ADVANCED STUDY UCAS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HANGZHOU INST FOR ADVANCED STUDY UCAS
Filing Date
2026-05-09
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

In existing microcavity spectral line modulation structures, the waveguide length between microcavities is fixed, which makes it impossible to flexibly adjust the coupling strength between optical modes. This results in limited modulation capabilities and a lack of additional tunable dimensions, making it difficult to achieve dynamic and continuous control of the resonant peak position and line shape. Consequently, it cannot meet the requirements of high-precision optical sensing and reconfigurable optical filtering.

Method used

Using lead zirconate titanate thin film as the substrate material, by setting an optical gap in the microring resonator and depositing metal electrodes on both sides of the coupled waveguide, the high electro-optic coefficient of lead zirconate titanate thin film is utilized to control the optical phase in the coupled waveguide by applying an external voltage, thereby achieving two-dimensional dynamic continuous control.

Benefits of technology

It achieves two-dimensional dynamic continuous control of spectral lines, improving the freedom and flexibility of control, with fast response speed and low power consumption, and is suitable for high-precision optical sensing, reconfigurable optical filtering and optical signal processing.

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Abstract

The application relates to the technical field of micro-nano photon devices, and provides a spectrum line regulation structure based on a zirconium titanate lead film on-chip microcavity gap configuration, which comprises a zirconium titanate lead film base, a first micro-ring resonant cavity and a second micro-ring resonant cavity, a first optical gap is arranged in the first micro-ring resonant cavity, and a second optical gap is arranged in the second micro-ring resonant cavity; a coupling waveguide is arranged on the same side of the first micro-ring resonant cavity and the second micro-ring resonant cavity; an upper metal electrode and a lower metal electrode are respectively deposited above and below the coupling waveguide and are located in the region between the first micro-ring resonant cavity and the second micro-ring resonant cavity; the first optical gap and the second optical gap are configured to adjust the reflection coefficients of the first optical gap and the second optical gap by changing the gap lengths, and the phase regulation of the upper metal electrode and the lower metal electrode is used for jointly regulating the output resonant spectrum line in a dynamic and continuous manner. The application realizes the dynamic and continuous regulation of the spectrum line in two dimensions through the optical gap and the metal electrode.
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