Method and device for testing laser beam optical axis eccentricity and tilt

Abstract

The application provides a laser beam optical axis eccentricity and inclination testing method and device, wherein the method comprises: starting a target laser, making the outgoing beam along a laser output channel, and reaching a measuring mechanism, wherein the measuring mechanism is coaxially installed with the laser output channel; after a preset time length, collecting temperature change data at different positions of the measuring mechanism through a plurality of temperature sensors arranged at different positions of the measuring mechanism; and determining the eccentricity and the inclination angle of the outgoing beam based on all the temperature change data. The eccentricity of the beam is calculated through the different temperature rises of the measuring mechanism at different positions after the beam is deflected. The method can measure lasers of various types including Gaussian beams and uniform energy beams. For the eccentricity of a large-size laser beam, only the beam receiving structure needs to be replaced for measurement, and the method is universal. The method can directly test a high-power laser beam without filtering, and does not need to consider the error caused by wavefront deformation in the filtering process, and does not need complex optical path adjustment, and the measurement speed is fast.

Description

Technical Field

[0001] This application relates to the field of laser technology, and in particular to a method and apparatus for testing the optical axis eccentricity and tilt of a laser emitted beam. This application also relates to a computing device and a computer-readable storage medium. Background Technology

[0002] In high-power laser applications such as industrial laser processing and laser weapons, it is necessary to accurately assess the eccentricity and tilt angle of the emitted beam. The current mainstream detection method is the CCD camera imaging method, which involves inserting a beam splitter to guide weak light into the camera, and then calculating the eccentricity and tilt of the emitted beam through image processing.

[0003] However, existing measurement methods have certain limitations. For CCD camera imaging, the camera can only receive mW of light. Therefore, when measuring high power, a beam splitter is needed to split a weak beam for testing. However, the beam splitter is prone to thermal distortion under strong laser light, resulting in image distortion. For laser beams with large divergence angles, the spot size will change significantly after passing through a certain optical path after being split by the beam splitter. Therefore, it is limited to measuring collimated beams. The camera method is limited by the sensor size. For example, the diagonal of a typical CMOS sensor is <35mm, which requires a complex beam-shrinking optical path. Summary of the Invention

[0004] In view of this, embodiments of this application provide a method for testing the optical axis eccentricity and tilt of a laser emitted beam, thereby overcoming the technical deficiencies existing in the prior art. Embodiments of this application also provide a device for testing the optical axis eccentricity and tilt of a laser emitted beam, a computing device, and a computer-readable storage medium.

[0005] According to a first aspect of the embodiments of this application, a method for testing the optical axis eccentricity and tilt of a laser emitted beam is provided, including: The target laser is activated, and the emitted beam travels along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel. After a preset time period, multiple temperature sensors arranged at different locations of the measuring mechanism are used to collect temperature change data at different locations of the measuring mechanism. Based on all the temperature change data, the eccentricity and tilt angle of the emitted beam are determined.

[0006] Optionally, the center position of the measuring mechanism is a light-passing area, the size of which is determined by the size and power of the emitted light beam, wherein the size of the light-passing area is positively correlated with the size and power of the emitted light beam.

[0007] Optionally, the measuring mechanism is equally divided into multiple beam receiving areas in a centrally symmetrical manner. For any beam receiving area, a temperature sensor is arranged at a position opposite to the emitted beam. The temperature sensors are geometrically equal in the corresponding beam receiving areas, and a heat insulation area is arranged between any two beam receiving areas.

[0008] Optionally, a heat equalization unit is arranged on the measuring mechanism to adjust the initial temperature of all beam receiving areas to be uniform before the step of starting the target laser.

[0009] Optionally, determining the eccentricity and tilt angle of the emitted beam based on all the temperature change data includes: Based on the temperature change data, the absorbed heat of each of the beam receiving areas is determined; Construct a light intensity distribution model corresponding to the emitted beam, and calculate the eccentricity by combining the absorbed heat; The tilt angle is calculated based on the optical path length of the emitted beam reaching the measuring mechanism and the eccentricity.

[0010] Optionally, determining the absorbed heat of each beam receiving area based on the temperature change data includes: Determine the mass and specific heat capacity corresponding to all of the beam receiving regions; For any of the beam receiving regions, the corresponding absorbed heat is calculated by constructing a heat balance equation based on the corresponding mass and specific heat capacity, combined with the corresponding temperature change data.

[0011] Optionally, the measuring mechanism includes an adjustment mechanism. After determining the eccentricity and tilt angle corresponding to the emitted beam, the measuring mechanism adjusts the emitted beam so that the center of the emitted beam is aligned with the center of the measuring mechanism. The initial temperature of all beam receiving areas is adjusted to be consistent through the heat equalization unit. The step of starting the target laser is then executed to verify the measurement result of the eccentricity.

[0012] According to a second aspect of the embodiments of this application, a device for testing the optical axis eccentricity and tilt of a laser emitted beam is provided, comprising: The startup module is configured to start the target laser, causing the emitted beam to travel along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel; The acquisition module, after being configured for a preset time, acquires temperature change data at different locations of the measuring mechanism through multiple temperature sensors arranged at different locations of the measuring mechanism. The calculation module is configured to determine the eccentricity and tilt angle of the emitted beam based on all the temperature change data.

[0013] According to a third aspect of the embodiments of this application, a computing device is provided, comprising: Memory and processor; The memory is used to store computer-executable instructions, and when the processor executes the computer-executable instructions, it implements the steps of the laser beam eccentricity and tilt test method.

[0014] According to a fourth aspect of the present application, a computer-readable storage medium is provided that stores computer-executable instructions, which, when executed by a processor, implement the steps of the laser beam eccentricity and tilt test method.

[0015] According to a fifth aspect of the present application, a chip is provided that stores a computer program, which, when executed by the chip, implements the steps of the laser beam eccentricity and tilt test method.

[0016] The laser beam eccentricity and tilt testing method provided in this application involves activating a target laser, causing the emitted beam to travel along the laser output channel to a measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel. After a preset time, multiple temperature sensors positioned at different locations on the measuring mechanism collect temperature change data at these locations. Based on all the temperature change data, the eccentricity and tilt angle of the emitted beam are determined. The eccentricity of the beam is calculated by measuring the different temperature rises at different locations on the measuring mechanism after beam deflection. This method can measure various types of lasers, including Gaussian beams and uniform energy beams. For eccentricity of laser beams of different sizes, only the beam receiving structure needs to be replaced for measurement. It is universally applicable, can directly test high-power laser beams without filtering, does not need to consider errors caused by wavefront deformation during the filtering process, and requires no complex optical path adjustment, resulting in fast measurement speed. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a flowchart of a laser beam eccentricity and tilt test method provided in one embodiment of this application; Figure 2This is a schematic diagram of the measurement mechanism structure of a laser beam eccentricity and tilt test method provided in an embodiment of this application; Figure 3 This is a schematic diagram of the temperature sensor position in a laser beam eccentricity and tilt testing method provided in one embodiment of this application. Figure 4 This is a schematic diagram of the received spot area before and after beam deviation, provided in an embodiment of this application, regarding a method for testing the optical axis eccentricity and tilt of a laser emitted beam. Figure 5 This is a schematic diagram of the construction of a rectangular coordinate system for a laser beam eccentricity and tilt test method provided in an embodiment of this application; Figure 6 This is a schematic diagram of the optical path of a laser beam eccentricity and tilt test method provided in an embodiment of this application; Figure 7 This is a schematic diagram of the structure of a laser beam eccentricity and tilt testing device according to an embodiment of this application; Figure 8 This is a structural block diagram of a computing device provided in one embodiment of this application. Detailed Implementation

[0019] Many specific details are set forth in the following description to provide a full understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this application; therefore, this application is not limited to the specific embodiments disclosed below.

[0020] The terminology used in one or more embodiments of this application is for the purpose of describing particular embodiments only and is not intended to limit the scope of one or more embodiments of this application. The singular forms “a,” “the,” and “the” used in one or more embodiments of this application and in the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” used in one or more embodiments of this application refers to and includes any or all possible combinations of one or more associated listed items.

[0021] It should be understood that although the terms first, second, etc., may be used to describe various information in one or more embodiments of this application, such information should not be limited to these terms. These terms are only used to distinguish information of the same type from one another. For example, first may also be referred to as second without departing from the scope of one or more embodiments of this application, and similarly, second may also be referred to as first.

[0022] This application provides a method for testing the optical axis eccentricity and tilt of a laser emitted beam. This application also relates to a device for testing the optical axis eccentricity and tilt of a laser emitted beam, a computing device, and a computer-readable storage medium, which will be described in detail in the following embodiments.

[0023] Figure 1 The flowchart illustrates a method for testing the optical axis eccentricity and tilt of a laser emitted beam according to an embodiment of this application, specifically including the following steps: Step S102: Activate the target laser to make the emitted beam travel along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel; Step S104: After a preset time, temperature change data at different locations of the measuring mechanism are collected by multiple temperature sensors arranged at different locations of the measuring mechanism. Step S106: Based on all the temperature change data, determine the eccentricity and tilt angle corresponding to the emitted beam.

[0024] The target laser refers to the laser whose emitted beam axis eccentricity and tilt need to be tested. Its type is not limited and can include solid-state lasers, gas lasers, semiconductor lasers, etc. The power, wavelength, and spot size of its emitted beam can be determined according to actual testing requirements. The emitted beam refers to the laser beam emitted from the laser output end after the target laser is activated. It has characteristics such as coherence, monochromaticity, and directionality. The eccentricity and tilt of its optical axis are the core indicators of the test. The laser output channel refers to the preset propagation path of the emitted beam from the target laser, usually a straight channel. Its axis is the ideal propagation axis of the laser beam designed and is the benchmark for judging whether the beam is eccentric or tilted. The measuring mechanism refers to the core component used to receive the emitted beam and collect temperature change data. Its material must have good heat absorption and thermal conductivity stability, and be able to convert the absorbed laser energy into temperature changes, providing a basis for subsequent data calculations. Its structural design must match the laser output channel.

[0025] Furthermore, coaxial installation means that the central axis of the measuring mechanism coincides with the axis of the laser output channel, ensuring that the measuring mechanism can accurately receive the emitted beam and avoid test errors caused by installation deviations. This is a basic installation requirement to ensure test accuracy. The preset duration refers to the time interval from the start of the target laser to the start of collecting temperature change data. Its duration needs to be determined according to the power of the laser, the material of the measuring mechanism, and the thermal response speed to ensure that the measuring mechanism can fully absorb laser energy and produce detectable and distinguishable temperature changes. Its specific value is determined by the actual use scenario. The power of the emitted beam is negatively correlated with the preset duration.

[0026] Temperature sensors are devices that collect temperature change data at different locations of a measuring mechanism. Types include thermocouple sensors, thermistor sensors, and infrared temperature sensors. They need to have high temperature measurement accuracy and fast response speed to capture temperature changes in the measuring mechanism in real time. Temperature change data refers to the temperature difference between corresponding locations of the measuring mechanism collected by the temperature sensor before and after a preset time period, i.e., the temperature rise after the measuring mechanism absorbs laser energy. This data directly reflects the amount of laser energy absorbed at the corresponding location and is the core raw data for calculating eccentricity and tilt angle. Eccentricity refers to the distance between the center of the emitted beam and the center of the laser output channel, i.e., the center of the measuring mechanism. It is a quantitative indicator of the degree of beam eccentricity; the larger the eccentricity, the more severely the beam deviates from the ideal propagation axis. Tilt angle refers to the angle between the propagation direction of the emitted beam and the axis of the laser output channel. It is a quantitative indicator of the degree of beam tilt, usually measured in degrees or radians. The larger the tilt angle, the more severely the beam propagation direction deviates from the ideal direction.

[0027] Based on this, the target laser is fixed on the test platform, and the position of the laser is adjusted so that the laser output channel is in the preset ideal propagation axis position. The measuring mechanism is installed at the end of the laser output channel, and the position of the measuring mechanism is adjusted by the positioning device to ensure that the central axis of the measuring mechanism is completely coincident with the axis of the laser output channel, so as to achieve coaxial installation and avoid test errors caused by installation deviation. The target laser is started so that the laser beam emitted by the laser beam propagates along the laser output channel and successfully reaches the measuring mechanism, ensuring that the beam can be effectively received by the measuring mechanism.

[0028] After the target laser is activated, a preset time is allowed to allow the measuring mechanism to fully absorb laser energy and generate a significant temperature change. Multiple temperature sensors pre-positioned at different locations on the measuring mechanism simultaneously collect temperature data from each location. This temperature data represents the real-time temperature of the measuring mechanism after absorbing laser energy. Simultaneously, the initial temperature of each temperature sensor before laser activation is recorded. The difference between the real-time temperature and the initial temperature is used to obtain the temperature change data for each location, ensuring that the temperature change data accurately reflects the amount of laser energy absorbed at the corresponding location. In practical applications, to ensure data reliability, temperature change data can be collected multiple times, and the average value is taken as the final temperature change data to reduce random errors.

[0029] All collected temperature change data are preprocessed to remove outliers and ensure data accuracy. Based on the distribution pattern of temperature change data, the energy distribution of the emitted beam on the measuring mechanism is analyzed. Since the higher the beam energy, the more heat is absorbed at the corresponding position of the measuring mechanism, and the greater the temperature change, the distribution of temperature change data is positively correlated with the energy distribution of the beam. Based on this correlation, the temperature change data is analyzed and calculated using a preset algorithm to determine the center position of the emitted beam, and then the distance between the beam center and the center of the measuring mechanism is calculated to obtain the eccentricity. At the same time, combined with the optical path of the beam propagation, the angle between the beam propagation direction and the axis of the laser output channel is calculated through geometric relationships to obtain the tilt angle, thus achieving simultaneous measurement of eccentricity and tilt angle.

[0030] Therefore, by collecting temperature change data at different locations of the measuring mechanism using a temperature sensor, the temperature change data can accurately reflect the energy distribution of the laser beam. This data is then used to calculate precise eccentricity and tilt angles through algorithms, resulting in high testing accuracy that meets the testing requirements of high-precision lasers. No complex equipment debugging or specialized operating skills are required; operators can complete the test after simple training. The preset duration can be flexibly adjusted according to actual conditions, resulting in a short testing time and improved efficiency. Furthermore, no additional attenuation device is needed, allowing direct testing of both low-power and high-power lasers, further simplifying the operation and improving efficiency. Both the measuring mechanism and the temperature sensor are conventional, inexpensive components, resulting in low testing costs. The temperature sensor has a long lifespan, eliminating the need for frequent replacements and further reducing long-term testing costs. This method is also suitable for testing environments with low temperature sensitivity. With low requirements and unaffected by ambient light, vibration, dust, etc., it can operate normally in various environments such as industrial sites and laboratories, making it suitable for testing various types of lasers and extremely versatile. By analyzing temperature change data, it can simultaneously calculate eccentricity and tilt angle without the need for other testing methods, reducing testing steps and complexity. It also provides more comprehensive data support for laser debugging and calibration, facilitating operators to quickly locate beam deviation problems and improving debugging efficiency. The measuring mechanism uses materials with good thermal absorption and conductivity stability, enabling stable absorption of laser energy and consistent temperature change patterns. The temperature sensor uses high-precision, fast-response devices to accurately capture temperature changes, reducing data errors and ensuring the stability and reliability of test results, providing reliable data support for long-term laser performance monitoring.

[0031] Furthermore, the center position of the measuring mechanism is a light-passing area, the size of which is determined by the size and power of the emitted beam. The size of the light-passing area is positively correlated with the size and power of the emitted beam.

[0032] The light-passing area refers to the central area of ​​the measuring mechanism used to allow the emitted laser beam to pass through. Its shape matches the shape of the laser beam spot, and it is usually circular, but can be adjusted to be square, elliptical, etc., depending on the shape of the beam. The emitted laser beam passes through the light-passing area, reducing the rate of heat accumulation on the measuring mechanism, avoiding damage to the measuring mechanism caused by high-power lasers, and increasing the test range of laser power. The size of the emitted laser beam refers to the spot size of the emitted laser beam from the target laser. For circular spots, it is usually expressed as the spot diameter, and for non-circular spots, it is expressed as the major and minor axis dimensions. Its size is determined by factors such as the output power of the laser, the resonant cavity structure, and the parameters of optical components, and is one of the key parameters affecting the design of the light-passing area size. The power of the emitted laser beam refers to the energy transferred by the emitted laser beam from the target laser per unit time. It is one of the core performance parameters of the laser, and its size directly determines the amount of energy absorbed by the measuring mechanism, thus affecting the clarity and test accuracy of temperature change data. It is also one of the key parameters in the design of the light-passing area size.

[0033] Furthermore, the light-passing zone is positioned at the center of the measuring mechanism, coaxial with the laser output channel, ensuring that the emitted beam can accurately enter the light-passing zone. The size of the light-passing zone is determined by both the size and power of the emitted beam, and is positively correlated with both. In the specific design, the actual size and power of the emitted beam from the target laser are first measured; then, the size of the light-passing zone is determined according to a preset scaling factor.

[0034] For example, consider a circular light spot emitted as an example, such as... Figure 2 A schematic diagram of the measurement mechanism structure for a laser beam eccentricity and tilt test method is provided. The size of the central light passage area can be adjusted according to the size 2R and power P of the measured laser beam. When both the laser beam and power are large, the central light passage area is large, and vice versa.

[0035] Furthermore, the measuring mechanism is equally divided into multiple beam receiving areas in a centrally symmetrical manner. For any beam receiving area, a temperature sensor is arranged at a position opposite to the emitted beam. The geometric positions of any temperature sensor in the corresponding beam receiving area are equal, and a heat insulation area is arranged between any two beam receiving areas.

[0036] The measuring mechanism's light-passing area and surrounding effective area are divided into multiple equally sized and identical regions according to the principle of central symmetry. Each region has the same area, geometry, and distance from the center, ensuring that the conditions for receiving beam energy are the same in each region and avoiding temperature data deviations caused by uneven region division. The beam receiving region refers to each area of ​​the equally divided measuring mechanism used to receive the emitted beam energy and generate temperature changes. Each beam receiving region is an independent heat-absorbing unit, and its number can be determined according to the required testing accuracy; the more regions, the higher the testing accuracy. In each beam receiving region, the temperature sensor is placed on the side furthest from the incident direction of the emitted beam. This avoids the laser beam directly irradiating the temperature sensor, preventing overheating. The temperature sensor is damaged by the laser, but it is ensured that the temperature sensor can accurately measure the temperature change after the laser energy is absorbed in the beam receiving area. Each temperature sensor is positioned identically within its corresponding beam receiving area. For example, if each beam receiving area is fan-shaped, the temperature sensors are all located at the apex of the fan, ensuring consistent temperature measurement conditions for each sensor and comparability of the collected temperature data. The heat insulation zone refers to the area between any two adjacent beam receiving areas. Its material is heat-insulating, such as ceramic, asbestos, or air, and has good heat insulation properties. It can prevent heat conduction between adjacent beam receiving areas, avoiding temperature data interference caused by heat diffusion, and ensuring that the temperature change of each beam receiving area is determined solely by the beam energy absorbed by that area.

[0037] Continuing with the previous example, taking four beam receiving areas as an example, such as... Figure 2 A schematic diagram of a measurement mechanism for a method to test the eccentricity and tilt of a laser beam output axis is provided. Figure 3 A schematic diagram of the temperature sensor position for a laser beam eccentricity and tilt testing method is provided. The measuring mechanism, coaxially mounted with the laser output channel, is divided into four beam receiving areas, namely beam receiving areas 1-4. There is a very small air insulation zone between each beam receiving area to prevent the heat transfer between the receiving areas from affecting the accuracy of the measurement results. A ±0.1℃ precision thermocouple is embedded on the back of each beam receiving area to monitor the temperature rise ΔT in real time. The relative eccentricity of the beam is calculated based on the temperature difference ΔT between each beam receiving area.

[0038] Therefore, by dividing the area into equal, centrally symmetrical sections, the heat absorption conditions of each beam receiving area are ensured to be consistent, avoiding temperature deviations caused by uneven area division. By setting up heat insulation zones, heat conduction between adjacent areas is prevented, ensuring that the temperature change in each area is determined solely by the beam energy it absorbs, eliminating interference from heat diffusion, and enabling temperature change data to accurately reflect the beam energy distribution in each area. Simultaneously, the temperature sensor is positioned away from the beam, avoiding interference from direct laser radiation, further improving temperature measurement accuracy. Compared to methods without heat insulation zones or with improperly arranged sensors, this reduces testing errors and enables higher precision measurements of eccentricity and tilt angle.

[0039] By positioning the temperature sensors away from the emitted laser beam, direct laser beam exposure to the sensors is avoided, preventing damage from laser radiation. This also reduces the impact of high temperatures on sensor performance, extends the lifespan of the temperature sensors, and lowers the maintenance costs of the testing equipment. The equal geometric positions of each temperature sensor within its corresponding area ensure consistent temperature measurement conditions and comparable temperature data, facilitating subsequent comparative analysis of temperature changes in different areas to determine the beam's energy distribution. Furthermore, with one temperature sensor corresponding to each beam receiving area, comprehensive temperature changes across all locations of the measuring mechanism are captured, preventing data loss and ensuring accurate measurement. To ensure data integrity, comprehensive and reliable raw data are provided for the calculation of eccentricity and tilt angle, reducing calculation errors caused by missing data. The principles for dividing the beam receiving area, the requirements for the placement of temperature sensors, and the standards for setting up the heat insulation zone are clarified, providing a unified standard for the design and testing operation of the measurement mechanism and ensuring testing consistency in different testing scenarios. At the same time, the number of beam receiving areas can be flexibly adjusted according to the testing accuracy requirements. For example, for scenarios with lower accuracy requirements, four areas can be divided, while for scenarios with higher accuracy requirements, eight or more areas can be divided, balancing testing accuracy and testing efficiency, and improving the flexibility and applicability of the method.

[0040] Furthermore, a heat equalization unit is arranged on the measuring mechanism to adjust the initial temperature of all the beam receiving areas to be uniform before the step of starting the target laser.

[0041] The heat equalization unit refers to a device installed on the measuring mechanism to adjust and maintain the initial temperature of each beam receiving area of ​​the measuring mechanism to be consistent. Its type may include heating elements, cooling elements, constant temperature modules, etc. It has temperature regulation function and can adjust the temperature of each beam receiving area to the same level according to the preset temperature and keep it stable, providing a unified reference for the acquisition of temperature change data. The initial temperature refers to the temperature of each beam receiving area of ​​the measuring mechanism before the target laser is started. It is the reference temperature for calculating temperature change data. The consistency of the initial temperature directly affects the accuracy of the temperature change data.

[0042] Uneven temperature distribution in the testing environment can result from factors such as localized temperature differences on the testing platform and the influence of ambient airflow, leading to variations in the initial temperature of different beam-receiving areas within the measurement mechanism. Furthermore, slight differences in the thermal conductivity of the measurement mechanism itself can cause deviations in the initial temperature of different areas, even under the same ambient temperature. Additionally, residual heat absorbed in previous tests can contribute to inconsistent initial temperatures across different areas. This inconsistency in initial temperature directly leads to deviations in temperature change data. Even if different areas absorb the same laser energy, areas with higher initial temperatures will have higher real-time temperatures, resulting in larger calculated temperature change data. This, in turn, leads to errors in beam energy distribution analysis and increased errors in calculating eccentricity and tilt angle. In severe cases, initial temperature deviations can mask actual differences in beam temperature changes, making it impossible to accurately determine beam eccentricity and tilt, and even leading to erroneous test results. Moreover, inconsistent initial temperatures result in poor repeatability of test results; multiple tests using the same laser yield significantly different results, compromising the reliability of the test.

[0043] Therefore, to maintain the same initial temperature T0 in all beam receiving areas of the measurement mechanism, a heat homogenization unit is installed within the holding frame of the measurement mechanism. When the heat homogenization unit is activated, it eliminates the influence of ambient temperature fluctuations and intermittent laser heating on each beam receiving structure, providing a unified basis for temperature measurement of each module. The heat homogenization unit employs a hot water cooling circulation structure, with an external cooling circulator providing constant-temperature cooling water. The beam receiving structures are made of lightweight, high thermal conductivity materials, enabling temperature homogenization of each beam receiving structure within a preset time.

[0044] Therefore, by using a heat equalization unit to adjust the initial temperature of all beam receiving areas to be consistent, the error is controlled within a preset temperature range, preferably within ±0.1℃ in practical applications. This ensures that the temperature change in each area is determined solely by the absorbed laser energy, avoiding temperature change data deviations caused by initial temperature deviations. This allows the temperature change data to accurately reflect the beam energy distribution in each area, thereby improving the calculation accuracy of eccentricity and tilt angle, and further reducing the error in the test results. The stable and consistent initial temperature ensures that the initial temperature reference is the same for each area when testing the same laser multiple times, significantly improving the repeatability of temperature change data. The differences in results from multiple tests are small, ensuring the reliability and consistency of the test, and facilitating long-term monitoring of the laser performance by operators. Compared to conventional analysis, this provides more reliable data support for laser debugging and calibration. Uneven temperature distribution and airflow interference in the testing environment can lead to inconsistent initial temperatures. The heat spreader actively adjusts the initial temperature of each area, unaffected by changes in ambient temperature. This allows the testing method to operate normally in different temperature environments, further improving its environmental adaptability and expanding its application range, especially suitable for scenarios with unstable ambient temperatures, such as industrial sites. The heat spreader's temperature regulation function prevents thermal stress on the measuring mechanism due to initial temperature differences, reducing deformation and damage. Simultaneously, restoring the temperature to the preset initial temperature after testing avoids the impact of residual temperature on the measuring mechanism's material, extending its service life and reducing maintenance costs. Furthermore, the heat spreader's insulation function reduces the impact of ambient temperature changes on the measuring mechanism, ensuring stable initial temperatures during testing and further improving test reliability.

[0045] Furthermore, in step S106, the process of determining the eccentricity and tilt angle of the emitted beam based on all temperature change data is specifically implemented as follows in this embodiment: Based on the temperature change data, the absorbed heat of each beam receiving area is determined; a light intensity distribution model corresponding to the emitted beam is constructed, and the eccentricity is calculated in combination with the absorbed heat; based on the optical path of the emitted beam to the measuring mechanism, and in combination with the eccentricity, the tilt angle is calculated.

[0046] Furthermore, in the above steps, the process of determining the absorbed heat of each beam receiving area based on temperature change data is specifically implemented as follows in this embodiment: Determine the mass and specific heat capacity of all the beam receiving areas; for any beam receiving area, calculate the corresponding absorbed heat by constructing a heat balance equation based on the corresponding mass and specific heat capacity and the corresponding temperature change data.

[0047] Following the previous example, in the actual measurement process, the heat spreader is first turned on. The temperature sensor on the back of the beam receiving structure is observed to determine if the temperature deviation of each structural module is controlled to ±0.1℃, and the initial value T0 is recorded. Then, the heat spreader is turned off. The laser is then turned on, with a known beam size of 2R, and emitted at a fixed power P for Δt. It should be noted that Δt is generally taken to be within 3 seconds, at which point the influence of heat conduction, convection, and other factors on temperature can be ignored. The temperature of each beam receiving structure begins to rise. During this period, the heat spreader is turned off to avoid interfering with the temperature change process of the beam receiving structure. The temperature rise curve of each beam receiving structure within the time Δt is recorded, and the steady-state temperature value T is recorded. s1 T s2 T s3 T s4 .

[0048] In calculating the laser power absorbed by each beam receiving structure, the thermal balance equation for the laser-irradiated structure is as follows: , Where x takes values ​​from 1 to 4, corresponding to beam receiving regions 1 to 4 respectively, and P sx Corresponding P s1 The heat absorbed by beam receiving structure 1, P sx Corresponding P s2 The heat absorbed by beam receiving structure 2, P sx Corresponding P s3 The heat absorbed by beam receiving structure 3, P sx Corresponding P s4 The heat absorbed by the beam receiving structure 4; c p Let m be the specific heat capacity, and m be the mass of each beam receiving structure. If beryllium bronze is chosen as the material for the beam receiving structure, its c... p =420J / kg·K, with a relatively fast thermal response speed, and in order to obtain high-precision measurement, the difference between the mass m of the beam receiving structure needs to be controlled to ±0.1g.

[0049] like Figure 4 The schematic diagram of the receiving spot area before and after beam deviation is provided in a laser beam eccentricity and tilt test method. When the beam is not eccentric, the area of ​​the heat-absorbing part on the beam receiving structure 4 is S1+S4. When the beam is eccentric, the area of ​​the heat-absorbing part on the beam receiving structure 4 is S4. The energy-absorbing area that is shifted to the beam receiving area 3 is S2, and the energy-absorbing area that is shifted to the beam receiving area 1 is S3.

[0050] The subsequent process of establishing the beam receiving structure and beam energy coupling model, i.e., the beam intensity distribution model, begins by establishing a Cartesian coordinate system based on the unbiased beam state, such as... Figure 5The provided diagram illustrates the construction of a rectangular coordinate system for a method of testing the eccentricity and tilt of a laser output beam. Here, Δx represents the horizontal component of the eccentricity, Δy represents the vertical component of the eccentricity, O is the origin of the rectangular coordinate system (corresponding to the center of the output beam in the un-offset state), O' corresponds to the center of the output beam in the offset state, and R is 1 / e 2 The radius of the light spot at the intensity point, r 0 Let be the radius of the area through which light passes.

[0051] Taking a Gaussian beam as an example, for a fundamental Gaussian beam, the intensity distribution equation along the radial direction is: , Where I(r) is the light intensity distribution, r is the distance from the center of the emitted beam, and I0 is the intensity at the center of the beam.

[0052] The rectangular coordinate equation of the region circle through which the intermediate light passes is: , Where x is the abscissa and y is the ordinate, the rectangular coordinate equation of the beam spot circle after eccentricity is: (x Δx) 2 + (y Δy) 2 =R 2 , The light energy received by the beam receiving structure region can be obtained through triple integration. , For any beam receiving region, construct the light intensity distribution equation as described above, the rectangular coordinate equation of the circle through which the light passes, the rectangular coordinate equation of the beam spot circle after eccentricity, and the light energy received by the beam receiving structure region, and then solve for the eccentricity (Δx, Δy).

[0053] After that, as Figure 6 The provided optical path diagram illustrates a method for testing the eccentricity and tilt of a laser beam's output axis. The optical path is L. After obtaining the eccentricity, the tilt angle α of the laser beam can be calculated from the laser optical path. .

[0054] Therefore, when the laser beam is eccentric / tilted, the spot illuminates the coaxially mounted measuring mechanism. The area of ​​the measuring mechanism receiving the spot will generate different temperature rises, thereby indirectly measuring the eccentricity / tilt of the laser beam. Specifically, by combining the Gaussian beam energy distribution model and the different temperature rises in the area of ​​the measuring device receiving the spot, the eccentricity of the spot can be deduced, and then the tilt angle of the emitted laser can be calculated by combining the laser optical path.

[0055] Furthermore, the measuring mechanism includes an adjustment mechanism. After determining the eccentricity and tilt angle corresponding to the emitted beam, the measuring mechanism adjusts the emitted beam so that the center of the emitted beam is aligned with the center of the measuring mechanism. The initial temperature of all beam receiving areas is adjusted to be consistent through the heat equalization unit. The step of starting the target laser is then executed to verify the measurement result of the eccentricity.

[0056] Among them, such as Figure 2 A schematic diagram of the measurement mechanism for a laser beam eccentricity and tilt testing method is provided. The adjustment mechanism includes screw adjustment mechanisms 1-4, which adjust the temperature rise of each beam receiving area to be equal. At this point, the receiving spot area and the laser spot are concentric. By reading the adjustment reading of the adjustment mechanism, the eccentricity of the beam can be obtained. Combined with the laser optical path, the laser tilt angle can be calculated. By comparing the adjustment reading of the adjustment mechanism with the calculated eccentricity, the system can be calibrated, thereby increasing the accuracy of the measurement.

[0057] Specifically, after calculating the eccentricity (Δx, Δy) of the beam, the heat equalization function of the holding frame is activated to adjust the temperature of each beam receiving area to the same temperature; then, the screw adjustment mechanism is adjusted so that the offset of the internal beam receiving structure is (Δx, Δy), so that the new center of the measuring mechanism coincides with the actual center of the emitted beam; the laser is turned on to irradiate the measuring mechanism, and the temperature rise of each beam receiving area is observed to be the same. When the temperature rise of each beam area is the same, the center of the device coincides with the center of the beam.

[0058] Corresponding to the above method embodiments, this application also provides an embodiment of a laser beam eccentricity and tilt testing device. Figure 7 This illustration shows a schematic diagram of a laser beam eccentricity and tilt testing device according to an embodiment of this application. Figure 7 As shown, the device includes: The startup module 702 is configured to start the target laser, causing the emitted beam to travel along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel; The acquisition module 704 is configured to acquire temperature change data at different locations of the measuring mechanism after a preset time period by using multiple temperature sensors arranged at different locations of the measuring mechanism. The calculation module 706 is configured to determine the eccentricity and tilt angle of the emitted beam based on all the temperature change data.

[0059] In an optional embodiment, the startup module 702 is further configured to: The center of the measuring mechanism is the light-passing area, the size of which is determined by the size and power of the emitted light beam. The size of the light-passing area is positively correlated with the size and power of the emitted light beam.

[0060] In an optional embodiment, the startup module 702 is further configured to: The measuring mechanism is divided into multiple beam receiving areas in a centrally symmetrical manner. For any beam receiving area, a temperature sensor is arranged at a position opposite to the emitted beam. The geometric positions of any temperature sensor in the corresponding beam receiving area are equal, and a heat insulation area is arranged between any two beam receiving areas.

[0061] In an optional embodiment, the laser beam eccentricity and tilt testing device further includes: A heat equalization module is configured such that a heat equalization unit is arranged on the measuring mechanism, and the initial temperature of all the beam receiving areas is adjusted to be uniform through the heat equalization unit before the step of starting the target laser.

[0062] In an optional embodiment, the computing module 706 is further configured to: Based on the temperature change data, the absorbed heat of each beam receiving area is determined; a light intensity distribution model corresponding to the emitted beam is constructed, and the eccentricity is calculated in combination with the absorbed heat; based on the optical path of the emitted beam to the measuring mechanism, and in combination with the eccentricity, the tilt angle is calculated.

[0063] In an optional embodiment, the computing module 706 is further configured to: Determine the mass and specific heat capacity of all the beam receiving areas; for any beam receiving area, calculate the corresponding absorbed heat by constructing a heat balance equation based on the corresponding mass and specific heat capacity and the corresponding temperature change data.

[0064] In an optional embodiment, the laser beam eccentricity and tilt testing device further includes: The verification module is configured such that the measuring mechanism includes an adjustment mechanism. After determining the eccentricity and tilt angle corresponding to the emitted beam, the measuring mechanism adjusts the emitted beam so that the center of the emitted beam aligns with the center of the measuring mechanism. The initial temperature of all beam receiving areas is adjusted to be consistent through the heat equalization unit. The step of starting the target laser is then executed to verify the measurement result of the eccentricity.

[0065] The laser beam eccentricity and tilt testing device provided in this application starts the target laser, causing the emitted beam to travel along the laser output channel to a measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel. After a preset time, multiple temperature sensors arranged at different positions of the measuring mechanism collect temperature change data at different locations. Based on all the temperature change data, the eccentricity and tilt angle of the emitted beam are determined. The eccentricity of the beam is calculated by the different temperature rises at different positions of the measuring mechanism after beam deflection. The device can measure lasers of various types, including Gaussian beams and uniform energy beams. For eccentricity of laser beams of different sizes, only the beam receiving structure needs to be replaced for measurement. It has universality, can directly test high-power laser beams without filtering, does not need to consider errors caused by wavefront deformation during the filtering process, and does not require complex optical path adjustment, resulting in fast measurement speed.

[0066] The above is a schematic scheme of a laser beam eccentricity and tilt testing device according to this embodiment. It should be noted that the technical solution of this laser beam eccentricity and tilt testing device belongs to the same concept as the aforementioned laser beam eccentricity and tilt testing method. Details not described in detail in the technical solution of the laser beam eccentricity and tilt testing device can be found in the description of the aforementioned laser beam eccentricity and tilt testing method. Furthermore, the components in the device embodiment should be understood as functional modules necessary to implement each step of the program flow or each step of the method; these functional modules are not actual functional divisions or separations. A device claim defined by such a set of functional modules should be understood as a functional module architecture that primarily implements the solution through the computer program described in the specification, and not as a physical device that primarily implements the solution through hardware.

[0067] Figure 8 A structural block diagram of a computing device 800 according to an embodiment of this application is shown. The components of the computing device 800 include, but are not limited to, a memory 810 and a processor 820. The processor 820 is connected to the memory 810 via a bus 830, and a database 850 is used to store data.

[0068] The computing device 800 also includes an access device 840, which enables the computing device 800 to communicate via one or more networks 860. Examples of these networks include a Public Switched Telephone Network (PSTN), a Local Area Network (LAN), a Wide Area Network (WAN), a Personal Area Network (PAN), or a combination of communication networks such as the Internet. The access device 840 may include one or more of any type of wired or wireless network interface (e.g., a Network Interface Card (NIC)), such as an IEEE 802.11 Wireless Local Area Network (WLAN) interface, a Wi-MAX interface, an Ethernet interface, a Universal Serial Bus (USB) interface, a cellular network interface, a Bluetooth interface, a Near Field Communication (NFC) interface, and so on.

[0069] In one embodiment of this application, the aforementioned components of the computing device 800 and Figure 8 Other components, not shown, can also be connected to each other, for example, via a bus. It should be understood that... Figure 8 The block diagram of the computing device shown is for illustrative purposes only and is not intended to limit the scope of this application. Those skilled in the art can add or replace other components as needed.

[0070] The computing device 800 can be any type of stationary or mobile computing device, including mobile computers or mobile computing devices (e.g., tablet computers, personal digital assistants, laptop computers, notebook computers, netbooks, etc.), mobile phones (e.g., smartphones), wearable computing devices (e.g., smartwatches, smart glasses, etc.) or other types of mobile devices, or stationary computing devices such as desktop computers or PCs. The computing device 800 can also be a mobile or stationary server.

[0071] The processor 820 is used to execute computer-executable instructions for each step of the laser beam eccentricity and tilt test method.

[0072] The above is a schematic representation of a computing device according to this embodiment. It should be noted that the technical solution of this computing device and the technical solution of the laser beam eccentricity and tilt test method described above belong to the same concept. For details not described in detail in the technical solution of the computing device, please refer to the description of the technical solution of the laser beam eccentricity and tilt test method described above.

[0073] An embodiment of this application also provides a computer-readable storage medium storing computer instructions that, when executed by a processor, are used to implement the steps of the laser beam eccentricity and tilt test method.

[0074] The above is an illustrative scheme of a computer-readable storage medium according to this embodiment. It should be noted that the technical solution of this storage medium belongs to the same concept as the technical solution of the laser beam eccentricity and tilt test method described above. For details not described in detail in the technical solution of the storage medium, please refer to the description of the technical solution of the laser beam eccentricity and tilt test method described above.

[0075] An embodiment of this application also provides a chip that stores a computer program, which, when executed by the chip, implements the steps of the laser beam eccentricity and tilt test method.

[0076] The foregoing has described specific embodiments of this application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims may be performed in a different order than that shown in the embodiments and may still achieve the desired results. Furthermore, the processes depicted in the drawings do not necessarily require the specific or sequential order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0077] The computer instructions include computer program code, which may be in the form of source code, object code, executable file, or certain intermediate forms. The computer-readable medium may include any entity or device capable of carrying the computer program code, recording media, USB flash drives, portable hard drives, magnetic disks, optical disks, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signals, telecommunication signals, and software distribution media, etc. It should be noted that the content included in the computer-readable medium may be appropriately added to or subtracted according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media may not include electrical carrier signals and telecommunication signals.

[0078] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that this application is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to this application. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to this application.

[0079] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0080] The preferred embodiments disclosed above are merely illustrative of this application. The optional embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this application. These embodiments are selected and specifically described in this application to better explain the principles and practical applications of this application, thereby enabling those skilled in the art to better understand and utilize this application. This application is limited only by the claims and their full scope and equivalents.

Claims

1. A method for testing the eccentricity and tilt of a laser beam output from a laser, characterized in that, include: The target laser is activated, and the emitted beam travels along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel. After a preset time period, multiple temperature sensors arranged at different locations of the measuring mechanism are used to collect temperature change data at different locations of the measuring mechanism. Based on all the temperature change data, the eccentricity and tilt angle of the emitted beam are determined.

2. The method according to claim 1, characterized in that, The center of the measuring mechanism is the light-passing area, the size of which is determined by the size and power of the emitted light beam. The size of the light-passing area is positively correlated with the size and power of the emitted light beam.

3. The method according to claim 1, characterized in that, The measuring mechanism is divided into multiple beam receiving areas in a centrally symmetrical manner. For any beam receiving area, a temperature sensor is arranged at a position opposite to the emitted beam. The geometric positions of any temperature sensor in the corresponding beam receiving area are equal, and a heat insulation area is arranged between any two beam receiving areas.

4. The method according to claim 3, characterized in that, A heat equalization unit is arranged on the measuring mechanism to adjust the initial temperature of all beam receiving areas to be consistent before the step of starting the target laser.

5. The method according to claim 3, characterized in that, Determining the eccentricity and tilt angle of the emitted beam based on all the temperature change data includes: Based on the temperature change data, the absorbed heat of each of the beam receiving areas is determined; Construct a light intensity distribution model corresponding to the emitted beam, and calculate the eccentricity by combining the absorbed heat; The tilt angle is calculated based on the optical path length of the emitted beam reaching the measuring mechanism and the eccentricity.

6. The method according to claim 5, characterized in that, The step of determining the absorbed heat of each beam receiving area based on the temperature change data includes: Determine the mass and specific heat capacity corresponding to all of the beam receiving regions; For any of the beam receiving regions, the corresponding absorbed heat is calculated by constructing a heat balance equation based on the corresponding mass and specific heat capacity, combined with the corresponding temperature change data.

7. The method according to claim 4, characterized in that, The measuring mechanism includes an adjustment mechanism. After determining the eccentricity and tilt angle corresponding to the emitted beam, the measuring mechanism adjusts the emitted beam so that the center of the emitted beam is aligned with the center of the measuring mechanism. The initial temperature of all beam receiving areas is adjusted to be consistent through the heat equalization unit. The step of starting the target laser is then executed to verify the measurement result of the eccentricity.

8. A device for testing the eccentricity and tilt of a laser beam output, characterized in that, include: The startup module is configured to start the target laser, causing the emitted beam to travel along the laser output channel to the measuring mechanism, wherein the measuring mechanism is coaxially mounted with the laser output channel; The acquisition module, after being configured for a preset time, acquires temperature change data at different locations of the measuring mechanism through multiple temperature sensors arranged at different locations of the measuring mechanism. The calculation module is configured to determine the eccentricity and tilt angle of the emitted beam based on all the temperature change data.

9. A computing device, characterized in that, include: Memory and processor; The memory is used to store computer-executable instructions, and the processor is used to execute the computer-executable instructions to implement the steps of the laser beam eccentricity and tilt test method according to any one of claims 1 to 7.

10. A computer-readable storage medium storing computer instructions, characterized in that, When executed by the processor, this instruction implements the steps of the laser beam eccentricity and tilt test method according to any one of claims 1 to 7.

Images