Impurity removal and purification furnace for silicon production
By designing the accelerated removal structure and active structure of the impurity removal furnace for silicon production, the problem of manual screening of impurity precipitation of quartz crucibles in the prior art is solved, and timely screening and collection of impurities is realized, and the efficiency of impurities is improved. The quality of silicon single crystal.
Patent Information
- Application Number
- CN202323420789.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-14
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2033-12-14
AI Technical Summary
After removing impurities, impurities precipitate at the bottom of the existing quartz crucibles require manual screening, which increases the process workload and affects the quality and production efficiency of silicon single crystals.
A decontamination and purification furnace for silicon production is designed, including decontamination and purification device, collection box, side frame and base. It adopts an accelerated decontamination structure and movable structure to generate a pinch through the motor driving the rotating shaft and the rotating block to make the screening. The box shaking irregularly, and impurities fall into the collection box in time through the bottom air outlet to avoid accumulation.
Timely screening and collection of impurities is achieved, the labor work of manual screening is reduced, and the impurity removal efficiency and the quality of silicon single crystal are improved.
Smart Images
Figure CN222159762U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon production, in particular to an impurity removal and purification furnace for silicon production. Background Art
[0002] Quartz block, also known as silica, is a non-metallic element, a mineral composed of silicon dioxide. It is a semiconductor material that can be used to make semiconductor devices and integrated circuits. In the silicon production process, it is usually necessary to use a device to remove impurities and purify silicon crystals. Quartz crucible is the only material that is in direct contact with silicon solution, and impurity removal and purification are usually carried out in quartz crucible.
[0003] The quality of the quartz crucible has a great influence on the quality of silicon single crystals. It is usually a columnar structure with an open top. After the existing quartz crucible is decontaminated, the precipitated impurities are deposited at the bottom of the quartz crucible. This method requires personnel to further screen the materials in the quartz crucible, increasing the workload in the process. Utility Model Content
[0004] 1. Technical issues to be solved
[0005] In order to solve the above technical problems, the utility model provides an impurity removal and purification furnace for silicon production.
[0006] (II) Technical solution
[0007] Based on this, the utility model provides the following technical solution: a silicon production impurity removal and purification furnace, comprising an impurity removal and purification device, a collecting box, a side frame and a base, wherein the upper end of the side frame is welded to the outer side end surfaces of the impurity removal and purification device, the collecting box is located below the impurity removal and purification device and is internally connected, and the base is embedded and connected to the lower end of the side frame;
[0008] The impurity removal and purification device includes a box frame, a front door panel, an accelerated impurity removal structure, a handle, a motor, a movable structure and a drop hopper. The front door panel is snap-fitted and installed on the front side of the box frame. The accelerated impurity removal structure is located inside the box frame. The upper end of the accelerated impurity removal structure passes through the top of the box frame. The handle and the front door panel are an integrated structure and are located on the front end surface thereof. The motor is installed at a lower front position of the front door panel. The output end of the motor is connected to the movable structure and rotatably cooperates with it. The drop hopper is located below the box frame.
[0009] Preferably, the accelerated impurity removal structure includes a quartz clamp pot, a reaction chamber, a screening box, a rotating wheel, a first connecting block, a spring, a second connecting block, a clasp and a hook; the quartz clamp pot is arranged on the top of the reaction chamber, the screening box is located below the reaction chamber, the second connecting block is embedded in the outer bottom of the screening box, the rotating wheel is hingedly connected to the first connecting block, the first connecting block is located below the second connecting block, the spring is wound around the first connecting block and the second connecting block and movably cooperates, the clasp is connected to the hook, and the clasp is fixedly mounted on the outer peripheral surface of the screening box.
[0010] Preferably, the movable structure comprises a rotating shaft, a rotating block and a bearing seat, the end of the rotating shaft is connected to the bearing seat and rotatably engaged, and the rotating shaft and the rotating block penetrate and movably engage with each other.
[0011] Preferably, the lower end of the drop hopper is connected to the collecting box and the interior is communicated with each other, and the two side end surfaces of the box frame are embedded and fixedly connected to the upper end of the side frame.
[0012] Preferably, the reaction chamber passes through the top of the box frame, the reaction chamber and the screening box are embedded in the interior of the box frame, the screening box cooperates with the movable structure through a rotating wheel, the hook is connected to the inner wall of the box frame, the reaction chamber is a columnar structure made of quartz material, and a through hole is provided at the bottom thereof, and a through hole is provided at the bottom of the screening box, so that impurities at the reaction site can be screened out in time and fall into the collection box through the drop hopper for collection.
[0013] Preferably, the bearing seat is mounted on a wall surface at a lower position inside the box frame, the rotating shaft moves at a lower position inside the box frame, and one end of the rotating shaft is connected to the motor.
[0014] Preferably, the rotating block is movably matched below the accelerated impurity removal structure, the rotating block is provided at two locations, and is an irregularly shaped structure.
[0015] (III) Beneficial effects
[0016] Compared with the prior art, the utility model provides a silicon production impurity removal and purification furnace, which has the following
[0017] Beneficial effects:
[0018] 1. A silicon production impurity removal and purification furnace is provided, wherein the silicon crystal block with impurity removal and purification is placed in a reaction chamber, reaction materials required for silicon impurity removal and purification are added, and a motor is started to make a movable structure generate external force under movement to assist in accelerating the impurity removal structure, and the impurity removal product is accelerated to be discharged into a collection box through a drop hopper. By setting an accelerated impurity removal structure and connecting the buckle and the hook, the position of the screening box can be changed to a minimum, and the hollow structure at the lower end of the reaction chamber allows impurities and essential oil produced after the reaction to fall into the screening box through the empty opening.
[0019] 2. The impurity removal and purification furnace for silicon production is connected by a rotating shaft and an output end of a motor to drive the rotating block to rotate. The irregular shape of the rotating block itself can produce different degrees of pushing on the wheel, causing the wheel to move up and down, and with the elastic cooperation of the spring, the pushing force generated by the displacement is transmitted to the bottom of the screening box. The screening box can therefore shake irregularly to activate the substances inside it, so that the impurities loaded inside can fall through the empty opening at the bottom of the screen box in time, thereby not easily causing the accumulation of impurities in the screening box and affecting the impurity removal efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 This is a schematic diagram of the overall structure of the impurity removal and purification furnace for silicon production of the utility model;
[0021] Figure 2 It is a side view structural schematic diagram of the impurity removal and purification device of the utility model;
[0022] Figure 3 This is a front view structural schematic diagram of the accelerated impurity removal structure of the utility model;
[0023] Figure 4 It is a side view structural diagram of the active structure of the utility model;
[0024] Figure 5 It is a front view structural schematic diagram of the rotating block of the utility model.
[0025] In the figure: impurity removal and purification device-1, collecting box-2, side frame-3, base-4, box frame-11, front door panel-12, accelerated impurity removal structure-13, handle-14, motor-15, movable structure-16, drop hopper-17, quartz clamp pot-a1, reaction chamber-a2, screening box-a3, rotating wheel-a4, first connecting block-a5, spring-a6, second connecting block-a7, buckle-a8, hook-a9, rotating shaft-q1, rotating block-q2, bearing seat-q3. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] See also Figure 1-2A silicon production impurity removal and purification furnace comprises an impurity removal and purification device 1, a collecting box 2, a side frame 3 and a base 4. The upper end of the side frame 3 is welded to the outer side end surfaces of the impurity removal and purification device 1. The collecting box 2 is located below the impurity removal and purification device 1 and is internally connected. The base 4 is embedded and connected to the lower end of the side frame 3. The impurity removal and purification device 1 comprises a box frame 11, a front door plate 12, an accelerated impurity removal structure 13, a handle 14, a motor 15, a movable structure 16 and a drop hopper 17. The front door plate 12 is snap-fitted and installed on the front side of the box frame 11. The accelerated impurity removal structure 13 is located inside the box frame 11. The upper end of the accelerated impurity removal structure 13 passes through the top of the box frame 11. The handle 14 is integrated with the front door plate 12. The motor 15 is installed at the lower front side of the front door panel 12, the output end of the motor 15 is connected to the movable structure 16 and rotates together, the drop hopper 17 is located below the box frame 11, the reaction chamber a2 passes through the top of the box frame 11, the reaction chamber a2 and the screening box a3 are embedded in the inside of the box frame 11, the screening box a3 is movably matched with the movable structure 16 through the rotating wheel a4, the hook a9 is connected to the inner wall of the box frame 11, the reaction chamber a2 is a columnar structure made of quartz material, and a through hole is provided at the bottom thereof, and a through hole is provided at the bottom of the screening box a3, so that the impurities at the reaction site can be screened out in time and fall into the collecting box 2 through the drop hopper 17 to be collected.
[0028] See also Figure 3-4 , a silicon production impurity removal and purification furnace, the accelerated impurity removal structure 13 includes a quartz clamp pot a1, a reaction chamber a2, a screening box a3, a rotating wheel a4, a first connecting block a5, a spring a6, a second connecting block a7, a hook a8 and a hook a9, the quartz clamp pot a1 is arranged on the top of the reaction chamber a2, the screening box a3 is located below the reaction chamber a2, the second connecting block a7 is embedded and connected to the outer bottom of the screening box a3, the rotating wheel a4 is hingedly connected to the first connecting block a5, the first connecting block a5 is located below the second connecting block a7, the spring a6 is wound between the first connecting block a5 and the second connecting block a7 and movably cooperates, the hook a8 is connected with the hook a9, and the hook a8 is fixedly installed on the outer peripheral surface of the screening box a3, the movable structure 16 includes a rotating shaft q1, a rotating block q2 and a bearing seat q3, the end of the rotating shaft q1 is connected with the bearing seat q3 and rotates, and the rotating shaft q1 and the rotating block q2 penetrate and movably cooperate.
[0029] See also Figure 5 A silicon production impurity removal and purification furnace, the lower end of the hopper 17 is connected to the collecting box 2 and the interior is communicated, the two side end surfaces of the box frame 11 are embedded and connected with the upper end of the side frame 3, the bearing seat q3 is installed on the wall surface of the lower inner part of the box frame 11, the rotating shaft q1 moves at the lower inner part of the box frame 11, one end of the rotating shaft q1 is connected to the motor 15, the rotating block q2 is movably matched below the accelerating impurity removal structure 13, the rotating block q2 is provided with two places, and it is an irregular structure.
[0030] In summary, the personnel remove the quartz clamp pot a1 from the top of the reaction chamber a2, put the silicon crystal block with impurity removal and purification into the reaction chamber a2, add the reaction materials required for silicon impurity removal and purification, and then cover the quartz clamp pot a1 to make the reaction chamber a2 a sealed reaction space, and then install the front door plate 12 on the front side of the box frame 11, start the motor 15, so that the movable structure 16 generates external force under the activity to assist in accelerating the impurity removal structure 13 to accelerate the impurity removal product to be discharged into the collection box 2 through the drop hopper 17. By setting the accelerated impurity removal structure 13 and the connection method of the buckle a8 and the hook a9, the screening box a3 can have a small position change, and the hollow structure at the lower end of the reaction chamber a2, on the contrary The impurities generated after the reaction fall into the screening box a3 through the empty hole of the essential oil, and are connected to the output end of the motor 15 by the rotating shaft q1. The rotating shaft q1 can be driven by the motor 15 to rotate, and drive the rotating block q2 to turn. The irregular shape of the rotating block q2 itself can produce different degrees of pushing on the rotating wheel a4 during the turning, so that the rotating wheel a4 is displaced up and down, and with the elastic cooperation of the spring a6, the pushing force generated by the displacement is transmitted to the bottom of the screening box a3. Therefore, the screening box a3 can shake irregularly to activate the substances inside it, so that the impurities loaded inside can pass through the empty hole at the bottom of it and fall down in time, so that it is not easy to cause the accumulation of impurities in the screening box a3 and affect the impurity removal efficiency.
[0031] The control method of the present invention is to control by manually starting and closing the switch. The wiring diagram of the power element and the provision of power supply are common knowledge in the field, and the present invention is mainly used to protect mechanical devices, so the present invention will not explain the control method and wiring arrangement in detail.
[0032] The control method of the present invention is automatic control through a controller. The control circuit of the controller can be realized by simple programming by technicians in this field. The provision of power is also common knowledge in this field. The present invention is mainly used to protect mechanical devices, so the present invention will no longer explain the control method and circuit connection in detail.
[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A silicon production impurity removal and purification furnace, characterized in that: The device comprises an impurity removal and purification device (1), a collecting box (2), a side frame (3) and a base (4), wherein the upper end of the side frame (3) is welded to the outer side end surfaces of the impurity removal and purification device (1), the collecting box (2) is located below the impurity removal and purification device (1) and is in communication with the inside thereof, and the base (4) is embedded and connected to the lower end of the side frame (3); The impurity removal and purification device (1) comprises a box frame (11), a front door panel (12), an accelerated impurity removal structure (13), a handle (14), a motor (15), a movable structure (16) and a drop hopper (17). The front door panel (12) is mounted on the front side of the box frame (11), the accelerated impurity removal structure (13) is located inside the box frame (11), the upper end of the accelerated impurity removal structure (13) passes through the top of the box frame (11), the handle (14) and the front door panel (12) are an integrated structure and are located on the front end surface thereof, the motor (15) is mounted at a lower position on the front side of the front door panel (12), the output end of the motor (15) is connected to the movable structure (16) and rotatably cooperates, and the drop hopper (17) is located below the box frame (11).
2. The impurity removal and purification furnace for silicon production according to claim 1, characterized in that: The accelerated impurity removal structure (13) comprises a quartz clamp pot (a1), a reaction chamber (a2), a screening box (a3), a rotating wheel (a4), a first connecting block (a5), a spring (a6), a second connecting block (a7), a hook (a8) and a hook (a9); the quartz clamp pot (a1) is arranged on the top of the reaction chamber (a2); the screening box (a3) is located below the reaction chamber (a2); the second connecting block (a7) is embedded and connected to the outer bottom of the screening box (a3); the rotating wheel (a4) is hingedly connected to the first connecting block (a5); the first connecting block (a5) is located below the second connecting block (a7); the spring (a6) is wound around the first connecting block (a5) and the second connecting block (a7) and movably cooperates; the hook (a8) is connected to the hook (a9); and the hook (a8) is fixedly mounted on the outer peripheral surface of the screening box (a3).
3. The impurity removal and purification furnace for silicon production according to claim 1, characterized in that: The movable structure (16) comprises a rotating shaft (q1), a rotating block (q2) and a bearing seat (q3); the end of the rotating shaft (q1) is connected to the bearing seat (q3) and is rotatably engaged; the rotating shaft (q1) and the rotating block (q2) penetrate each other and are movably engaged.
4. The impurity removal and purification furnace for silicon production according to claim 1, characterized in that: The lower end of the drop hopper (17) is connected to the collection box (2) and communicates with the inside thereof, and the two side end surfaces of the box frame (11) are embedded and fixedly connected to the upper end of the side frame (3).
5. The impurity removal and purification furnace for silicon production according to claim 2, characterized in that: The reaction chamber (a2) passes through the top of the box frame (11); the reaction chamber (a2) and the screening box (a3) are embedded in the interior of the box frame (11); the screening box (a3) is movably coordinated with the movable structure (16) via a rotating wheel (a4); and the hook (a9) is connected to the inner wall surface of the box frame (11).
6. The impurity removal and purification furnace for silicon production according to claim 3, characterized in that: The bearing seat (q3) is installed on the wall surface at a lower position inside the box frame (11), the rotating shaft (q1) moves at a lower position inside the box frame (11), and one end of the rotating shaft (q1) is connected to the motor (15).
7. The impurity removal and purification furnace for silicon production according to claim 3, characterized in that: The rotating block (q2) is movably matched below the accelerating impurity removal structure (13).