Thinning positioning clamp and vacuum adsorption equipment

Abstract

The utility model provides a thinning positioning fixture and vacuum adsorption equipment, and relates to the technical field of substrate thinning, the thinning positioning fixture comprises a fixture body and a plurality of clamping columns, the middle part of the fixture body is provided with an assembly opening used for accommodating a substrate slice, the plurality of clamping columns are arranged on the fixture body and surround the assembly opening, and the clamping columns are used for clamping the substrate slice. The multiple clamping columns are arranged along the same circumference, and the diameter of the circumference is configured to be matched with the diameter of the vacuum jig table so that the multiple clamping columns can be buckled to the vacuum jig. The substrate slice can be assembled in the assembly opening and adsorbed on the vacuum jig through the assembly opening in a vacuum mode, the clamp body is buckled on the vacuum jig through the multiple clamping columns to achieve fixation, and accurate placement of the substrate slice can be achieved. Compared with the prior art, the thinning positioning fixture provided by the utility model has the advantages that the substrate slices can be positioned and placed, the positions of the substrate slices placed each time are ensured to be in the same circle center position, the deviation is reduced, and the consistency is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate thinning, in particular to a thinning positioning fixture and a vacuum adsorption device. Background Art

[0002] In the semiconductor manufacturing process, it is often necessary to perform a thinning process on the substrate. During thinning, the substrate sheet can first be vacuum adsorbed on a vacuum fixture to be fixed, and then thinning processes such as grinding can be performed.

[0003] The inventors have found through investigation that when thinning the substrate sheet, the vacuum jig places the substrate sheet visually, that is, the substrate sheet is placed on the vacuum jig by manual alignment. It is impossible to place the substrate sheet at the center of the circle every time. If it is not placed at the center of the circle, data instability and increased TTV are likely to occur during processing, affecting the quality of the substrate sheet. Utility Model Content

[0004] The utility model aims to provide a thinning positioning fixture and a vacuum adsorption device, which can realize the positioning and placement of a substrate sheet, ensure that the substrate sheet is placed at the same center position each time, reduce deviation, and ensure consistency.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In the first aspect, the utility model provides a thinning positioning fixture, including a fixture body and a plurality of clamping columns, wherein an assembly opening for accommodating a substrate sheet is opened in the middle of the fixture body, and the plurality of clamping columns are arranged on the fixture body and around the assembly opening, and the plurality of clamping columns are arranged along the same circumference, and the diameter of the circumference is configured to match the diameter of a vacuum jig table so that the plurality of clamping columns can be snapped onto the vacuum jig.

[0007] In an optional embodiment, an angle formed by at least two of the clamping columns and the center of the circle is greater than 90°.

[0008] In an optional embodiment, the number of the plurality of clamping columns is three, and the three clamping columns are arranged in an equilateral triangle.

[0009] In an optional embodiment, the clamp body is circular, the assembly opening is circular and is arranged concentrically with the clamp body, and a plurality of clamping columns are arranged on the edge of the clamp body, and each of the clamping columns is cylindrical.

[0010] In an optional embodiment, the plurality of clamping posts are located on the same side of the clamp body, and a rounded corner structure is formed on an edge of one end of each clamping post away from the clamp body.

[0011] In an optional embodiment, the protrusion height of each clamping column relative to the clamp body is between 6-10 mm.

[0012] In an optional embodiment, a stop ring is further provided on the edge of the fixture body, the stop ring is arranged concentrically with the assembly opening, and is used to cooperate with and surround the periphery of the vacuum fixture.

[0013] In an optional embodiment, the protrusion thickness of the stop ring relative to the clamp body is between 1.2-2 mm.

[0014] In an optional embodiment, the inner diameter of the stop ring is 170.015±0.002 mm, and the opening diameter of the assembly opening is 150.00±0.002 mm.

[0015] In a second aspect, the utility model provides a vacuum adsorption device, comprising a vacuum jig and a thinning and positioning fixture as described in any one of the aforementioned embodiments, wherein the fixture body is placed on the vacuum jig, and a plurality of the clamping columns are buckled around the vacuum jig.

[0016] The beneficial effects of the embodiments of the utility model include:

[0017] The thinning positioning fixture and vacuum adsorption device provided by the embodiment of the utility model have an assembly opening for accommodating the substrate sheet in the middle of the fixture body. The substrate sheet can be assembled in the assembly opening and vacuum adsorbed on the vacuum fixture through the assembly opening, and the fixture body is fixed on the vacuum fixture through multiple clamping columns, which can realize the precise placement of the substrate sheet. Compared with the prior art, the thinning positioning fixture provided by the utility model can realize the positioning and placement of the substrate sheet, ensure that the substrate sheet is placed at the same center position each time, reduce deviation, and ensure consistency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of the thinning and positioning fixture provided by the first embodiment of the utility model at a first viewing angle;

[0020] Figure 2 A schematic diagram of the structure of the thinning and positioning fixture provided by the first embodiment of the utility model at a second viewing angle;

[0021] Figure 3 A schematic structural diagram of the thinning and positioning fixture provided in the first embodiment of the utility model at a third viewing angle;

[0022] Figure 4 This is a schematic structural diagram of the vacuum adsorption equipment provided in the second embodiment of the utility model.

[0023] icon:

[0024] 100 - thinning and positioning fixture; 110 - fixture body; 130 - clamping column; 150 - assembly opening; 170 - stop ring; 200 - vacuum adsorption equipment; 210 - vacuum fixture; 211 - vacuum adsorption table; 300 - substrate sheet. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] As described in the background technology, in the prior art, when a substrate sheet is subjected to a thinning process, the substrate sheet is usually placed directly on a vacuum jig for adsorption. Since the vacuum jig usually only has a vacuum adsorption table, it is necessary to manually align the substrate sheet to the center of the vacuum jig. However, it is impossible to place it accurately at the center of the circle every time during manual placement. If the error is too large, data instability and increased TTV will occur during processing, thereby affecting the quality of the substrate sheet.

[0032] In order to solve the above problems, the utility model provides a novel thinning positioning fixture, which can assist in placing a substrate sheet.

[0033] First embodiment

[0034] Please refer to Figures 1 to 4 This embodiment provides a thinning positioning fixture 100, which can realize the positioning and placement of the substrate sheet 300, ensuring that the substrate sheet 300 is placed at the same center position each time, reducing deviation and ensuring consistency.

[0035] The thinning and positioning fixture 100 provided in this embodiment includes a fixture body 110 and a plurality of clamping columns 130. An assembly opening 150 for accommodating a substrate sheet 300 is opened in the middle of the fixture body 110. The plurality of clamping columns 130 are arranged on the fixture body 110 and surrounded by the assembly opening 150. The plurality of clamping columns 130 are arranged along the same circumference, and the diameter of the circumference is configured to match the diameter of the vacuum jig 210 so that the plurality of clamping columns 130 can be snapped onto the vacuum jig 210.

[0036] It should be noted that the thinning positioning fixture 100 in this embodiment is used to be detachably buckled on the vacuum fixture 210, and the vacuum fixture 210 has a vacuum adsorption table 211, and the vacuum adsorption table 211 is provided with a plurality of vacuum adsorption holes. The thinning positioning fixture 100 can be buckled on the vacuum fixture 210 through a plurality of clamping columns 130, and the assembly opening 150 exposes the vacuum adsorption table 211 with vacuum adsorption holes. At this time, the substrate sheet 300 is directly placed. Due to the accommodation and positioning of the assembly opening 150, it can be ensured that the substrate sheet 300 is placed at the center of the vacuum adsorption table 211. Therefore, the positioning and placement of the substrate sheet 300 can be achieved, and the substrate sheet 300 is ensured to be placed at the same center position each time, thereby reducing deviation and ensuring consistency.

[0037] In this embodiment, a plurality of clamping posts 130 are arranged to protrude downward and can be buckled onto the peripheral wall of the vacuum fixture 210 , thereby achieving self-positioning of the thinning and positioning fixture 100 .

[0038] In this embodiment, the angle formed by at least two clamping columns 130 and the center of the circle is greater than 90°. Specifically, when multiple clamping columns 130 are used, two of the clamping columns 130 are far apart, which can achieve a larger range of snap fit and ensure the positioning effect with the vacuum fixture 210. Preferably, there are at least three clamping columns 130, and the angle formed by the line connecting the two clamping columns 130 and the center of the circle is greater than 90°, so that the self-positioning of the thinning and positioning fixture 100 can be achieved through multiple clamping columns 130.

[0039] It should be noted that the angle formed by the two clamping columns 130 and the center of the circle in this embodiment refers to the angle formed by the line connecting the two clamping columns 130 and the center of the circle. In this embodiment, there are multiple clamping columns 130, preferably greater than or equal to 3, and when there are two clamping columns 130, the two clamping columns 130 need to be pressed tightly in actual use, which can also make the center of the assembly opening 150 coincide with the center of the vacuum adsorption table 211.

[0040] In this embodiment, there are three clamping columns 130, and the three clamping columns 130 are arranged in an equilateral triangle. Specifically, the three clamping columns 130 are arranged in an equilateral triangle, and the angle formed by each two adjacent clamping columns 130 and the center of the circle is 120°, and the three clamping columns 130 can be firmly buckled on the peripheral wall of the vacuum fixture 210. Of course, in other preferred embodiments of the utility model, the clamping columns 130 can also be 4 or 5, etc., which is not specifically limited here.

[0041] In this embodiment, the fixture body 110 is circular, the assembly opening 150 is circular and is arranged concentrically with the fixture body 110, and a plurality of clamping columns 130 are arranged at the edge of the fixture body 110, and each clamping column 130 is cylindrical. Specifically, the vacuum fixture 210 is cylindrical, its vacuum adsorption table 211 is circular, and the assembly opening 150 is also circular. The assembly opening 150, the assembly opening 150, the fixture body 110 and the vacuum adsorption table 211 are all arranged concentrically, which can further ensure that the substrate sheet 300 is located at the center of the vacuum adsorption table 211 and is uniformly stressed during adsorption. At the same time, the use of the cylindrical clamping column 130 is also conducive to quickly snapping the thinning and positioning fixture 100 onto the vacuum fixture 210.

[0042] Of course, in other preferred embodiments of the present invention, the clamping column 130 may also be in other shapes such as a prismatic column or an elliptical column, which is not specifically limited here.

[0043] In this embodiment, a plurality of clamping columns 130 are located on the same side of the clamp body 110, and a rounded structure is formed on the edge of one end of each clamping column 130 away from the clamp body 110. Specifically, the plurality of clamping columns 130 are located on the bottom side of the clamp body 110 and protrude downward, and the end surface edge of each clamping column 130 is rounded, so that the initial clamping column 130 and the vacuum fixture 210 that are buckled together can be quickly self-positioned, which is convenient for assembly and avoids assembly jamming.

[0044] In this embodiment, the protrusion height of each clamping column 130 relative to the clamp body 110 is between 6-10 mm. Preferably, the heights of the plurality of clamping columns 130 are the same, and the height of each clamping column 130 is 8 mm, which can ensure the snap-fit ​​effect and facilitate removal. Of course, the height of the clamping column 130 here is only an example, and its specific height can be changed according to the size of the clamp body 110 and the substrate sheet 300.

[0045] Furthermore, a stop ring 170 is also provided at the edge of the fixture body 110, the stop ring 170 is concentrically arranged with the assembly opening 150, and the stop ring 170 is used to cooperate with the periphery of the vacuum fixture 210. Specifically, the stop ring 170 is integrally arranged at the edge of the fixture body 110, and the stop ring 170 is also arranged at the bottom side of the fixture body 110, and can be matched with the top edge of the fixture body 110, thereby further improving the positioning effect of the fixture body 110.

[0046] In this embodiment, the protrusion thickness of the stop ring 170 relative to the clamp body 110 is between 1.2-2 mm. Preferably, the protrusion thickness of the stop ring 170 relative to the clamp body 110 can be 1.5 mm, which can ensure the limiting effect while being easy to remove.

[0047] In this embodiment, the inner diameter of the stop ring 170 is 170.015±0.002mm, and the opening diameter of the assembly opening 150 is 150.00±0.002mm. The size of the stop ring 170 is adapted to the size of the vacuum fixture 210, and the size of the assembly opening 150 is adapted to the size of the substrate sheet 300, which is adapted to a 6-inch substrate sheet 300. Of course, the sizes of the assembly opening 150 and the stop ring 170 are merely examples. In other preferred embodiments of the utility model, when the size of the substrate sheet 300 changes, the sizes of the assembly opening 150 and the stop ring 170 also change accordingly.

[0048] In summary, the thinning positioning fixture 100 and the vacuum adsorption device 200 provided in this embodiment have an assembly opening 150 for accommodating the substrate sheet 300 in the middle of the fixture body 110. The substrate sheet 300 can be assembled in the assembly opening 150 and vacuum adsorbed on the vacuum fixture 210 through the assembly opening 150, while the fixture body 110 is fastened to the vacuum fixture 210 through a plurality of clamping columns 130 to achieve fixation, and can achieve accurate placement of the substrate sheet 300. Compared with the prior art, the thinning positioning fixture 100 provided by the utility model can achieve the positioning and placement of the substrate sheet 300, ensure that the substrate sheet 300 is placed at the same center position each time, reduce deviation, and ensure consistency.

[0049] Second embodiment

[0050] Please continue to see Figure 4 This embodiment provides a vacuum adsorption device 200, including a vacuum fixture 210 and a thinning positioning fixture 100, wherein the basic structure and principle of the thinning positioning fixture 100 and the technical effect produced are the same as those of the first embodiment. For the sake of brief description, for parts not mentioned in this embodiment, reference may be made to the corresponding contents in the first embodiment.

[0051] In this embodiment, the vacuum adsorption device 200 includes a vacuum fixture 210 and a thinning and positioning fixture 100. The thinning and positioning fixture 100 includes a fixture body 110 and a plurality of clamping columns 130. The middle of the fixture body 110 is provided with an assembly opening 150 for accommodating the substrate sheet 300. The plurality of clamping columns 130 are arranged on the fixture body 110 and are arranged around the assembly opening 150. The plurality of clamping columns 130 are arranged along the same circumference, and the diameter of the circumference is configured to match the diameter of the vacuum fixture 210. The fixture body 110 is placed on the vacuum fixture 210, and the plurality of clamping columns 130 are buckled around the vacuum fixture 210.

[0052] In this embodiment, the vacuum fixture 210 is cylindrical, and the thinning and positioning fixture 100 is used to be detachably buckled on the vacuum fixture 210. The vacuum fixture 210 has a circular vacuum adsorption table 211, and the vacuum adsorption table 211 is provided with a plurality of vacuum adsorption holes. The thinning and positioning fixture 100 can be buckled on the vacuum fixture 210 through a plurality of clamping columns 130, and the assembly opening 150 exposes the vacuum adsorption table 211 with vacuum adsorption holes. At this time, the substrate sheet 300 is directly placed. Due to the accommodation and positioning of the assembly opening 150, the substrate sheet 300 can be placed at the center of the vacuum adsorption table 211. Therefore, the positioning and placement of the substrate sheet 300 can be achieved, and the substrate sheet 300 can be placed at the same center position each time, reducing deviation and ensuring consistency.

[0053] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A thinning and positioning fixture, characterized in that: The invention comprises a fixture body (110) and a plurality of clamping columns (130), wherein an assembly opening (150) for accommodating a substrate sheet (300) is provided in the middle of the fixture body (110), and the plurality of clamping columns (130) are arranged on the fixture body (110) and are arranged around the assembly opening (150), and the plurality of clamping columns (130) are arranged along the same circumference, and the diameter of the circumference is configured to match the diameter of a vacuum fixture (210) platform, so that the plurality of clamping columns (130) can be snapped onto the vacuum fixture (210).

2. The thinning and positioning fixture according to claim 1, characterized in that: The angle formed by at least two of the clamping columns (130) and the center of the circle is greater than 90°.

3. The thinning and positioning fixture according to claim 1 or 2, characterized in that: There are three of the plurality of clamping columns (130), and the three clamping columns (130) are arranged in an equilateral triangle.

4. The thinning and positioning fixture according to claim 1, characterized in that: The clamp body (110) is circular, the assembly opening (150) is circular and is arranged concentrically with the clamp body (110), and a plurality of clamping columns (130) are arranged on the edge of the clamp body (110), and each of the clamping columns (130) is cylindrical.

5. The thinning and positioning fixture according to claim 4, characterized in that: The plurality of clamping columns (130) are located on the same side of the clamp body (110), and a rounded corner structure is formed on an edge of one end of each clamping column (130) away from the clamp body (110).

6. The thinning and positioning fixture according to claim 4, characterized in that: The protrusion height of each clamping column (130) relative to the clamp body (110) is between 6 and 10 mm.

7. The thinning and positioning fixture according to claim 4, characterized in that: A stop ring (170) is also provided on the edge of the fixture body (110); the stop ring (170) is arranged concentrically with the assembly opening (150); and the stop ring (170) is used to cooperate with the periphery of the vacuum fixture (210).

8. The thinning and positioning fixture according to claim 7, characterized in that: The protrusion thickness of the stop ring (170) relative to the clamp body (110) is between 1.2-2 mm.

9. The thinning and positioning fixture according to claim 7, characterized in that: The inner diameter of the stop ring (170) is 170.015±0.002 mm, and the opening diameter of the assembly opening (150) is 150.00±0.002 mm.

10. A vacuum adsorption device (200), characterized in that: It comprises a vacuum jig (210) and a thinning and positioning fixture as described in any one of claims 1 to 9, wherein the fixture body (110) is placed on the vacuum jig (210), and a plurality of clamping columns (130) are buckled around the vacuum jig (210).

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