Liquid material collecting device for chlorine trifluoride condensation and purification equipment

Abstract

The utility model discloses a liquid material collecting device for chlorine trifluoride condensation and purification equipment, which comprises a liquid material collecting container, the upper part of the liquid material collecting container is connected to a liquid material outlet of the chlorine trifluoride condensation and purification equipment through a corresponding feed pipe, and the top of the liquid material collecting container is upwards communicated with a corresponding exhaust pipe; the gas pumping and discharging mechanism comprises a siphon three-way pipe which is fixedly arranged at a gas material feeding port of the chlorine trifluoride condensation and purification equipment, the siphon three-way pipe comprises a gas inlet section and a gas outlet section which are used for circulation of chlorine trifluoride gas, and a siphon section arranged between the gas inlet section and the gas outlet section, one end, which is not connected to the liquid material collecting container, of the exhaust pipe is connected to a siphon section of the siphon three-way pipe; and the liquid material discharging mechanism is used for conveying the liquid material in the liquid material collecting container to the feeding end of the next purification equipment. The device can assist in improving the condensation purification effect of a product.

Description

Technical Field

[0001] The utility model relates to a liquid material collecting device for chlorine trifluoride condensation purification equipment, which can effectively and conveniently collect chlorine trifluoride liquid material after condensation and purification, and in the collection process, timely remove gas entrained in the liquid material to improve the condensation purification degree of the product. Background Art

[0002] Chlorine trifluoride also has extremely strong oxidizing properties, so it can be used in the fields of special advanced materials and special major equipment manufacturing.

[0003] When the purity of chlorine trifluoride products is low, they can only be used in the cleaning process of chip deposition equipment, but cannot be used in core processes such as chip etching, resulting in the inability to fully apply and reflect the performance and value of chlorine trifluoride products. In order to improve the purity of chlorine trifluoride products, many manufacturers have invested heavily in research. To this end, chlorine trifluoride condensation purification equipment, that is, condensers, which use the difference in boiling points between substances to preliminarily purify the products after the synthesis reaction by condensation, began to be put into use. In the process of preliminary purification of chlorine trifluoride products by chlorine trifluoride condensation purification equipment, there is a relatively obvious defect: the condensed chlorine trifluoride liquid material is prone to gas entrainment during the discharge and collection process, which greatly reduces the purification effect of the product and is very troublesome.

[0004] Therefore, the purpose of the present invention is to design a liquid material collection device for chlorine trifluoride condensation purification equipment that can effectively improve the convenience of collecting chlorine trifluoride liquid materials and timely extract the gas entrained in the chlorine trifluoride liquid materials back into the tank for re-condensation, thereby effectively improving the purification effect of the product. Summary of the invention

[0005] In view of the technical problems existing in the above-mentioned prior art, the utility model provides a liquid material collecting device for chlorine trifluoride condensation purification equipment, which can effectively solve the technical problems existing in the above-mentioned prior art.

[0006] The technical solution of the utility model is:

[0007] A liquid material collecting device for chlorine trifluoride condensation purification equipment, comprising:

[0008] A liquid material collecting container, the upper part of which is connected to the liquid material discharge port of the chlorine trifluoride condensation purification device through a corresponding feed pipe, and the top of the liquid material collecting container is connected upwardly with a corresponding exhaust pipe;

[0009] A gas extraction mechanism, comprising a siphon tee fixedly mounted at a gas material feed port of a chlorine trifluoride condensation purification device, the siphon tee comprising an air inlet section and an air outlet section for the circulation of chlorine trifluoride gas, and a siphon section disposed between the air inlet section and the air outlet section, and an end of the air extraction pipe not connected to the liquid material collection container is connected to the siphon section of the siphon tee;

[0010] The liquid material discharge mechanism is used to transport the liquid material in the liquid material collection container to the feed end of the next purification equipment.

[0011] The liquid material discharge mechanism comprises a discharge pipe arranged at the bottom of the liquid material collecting container, and a corresponding discharge valve is fixedly arranged on the discharge pipe.

[0012] The liquid material collecting container is fixedly mounted on the corresponding electronic scale assembly.

[0013] A corresponding switching valve is fixedly installed on the air extraction pipe, and when the discharge valve is opened, the switching valve is closed.

[0014] The discharge valve and the switching valve are both solenoid valves, and the electronic scale assembly, the discharge valve and the switching valve are electrically connected to corresponding electric controllers respectively.

[0015] Advantages of the utility model:

[0016] 1) During the condensation and purification of chlorine trifluoride, the chlorine trifluoride gas flows through the siphon tee into the chlorine trifluoride condensation and purification equipment to condense into liquid, and the material that has not been condensed into liquid is discharged along the exhaust port of the chlorine trifluoride condensation and purification equipment, thereby achieving condensation and purification of chlorine trifluoride. In this process, the chlorine trifluoride gas flowing through the siphon tee can form a siphon effect on the exhaust pipe, so that the liquid material collection container is in a certain negative pressure state, so that the chlorine trifluoride liquid material at the bottom of the chlorine trifluoride condensation and purification equipment can be more smoothly pumped into the liquid material collection container for collection, thereby improving the convenience of collecting chlorine trifluoride liquid materials.

[0017] The most important thing is that under the negative pressure suction state of the exhaust pipe, a small amount of gas mixed in the chlorine trifluoride liquid material can be pumped into the chlorine trifluoride condensation purification equipment for re-condensation and impurity removal, so as to greatly reduce the amount of gas entrainment in the liquid material, thereby greatly improving the purification effect of the chlorine trifluoride product.

[0018] 2) The liquid material collection container of the utility model is fixedly installed on the corresponding electronic scale assembly. When the chlorine trifluoride liquid material in the liquid material collection container reaches a set weight value, the discharge valve is opened to transport the chlorine trifluoride liquid material to the feed end of the next purification process; when the discharge valve is opened, the switching valve fixedly installed on the exhaust pipe is closed to ensure that the chlorine trifluoride liquid material is smoothly and stably transported to the next purification process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the utility model.

[0020] Figure 2 This is a cross-sectional view of a siphon tee.

[0021] In the attached drawings: liquid material collection container 1, feed pipe, chlorine trifluoride condensation purification equipment 3, exhaust pipe 4, siphon tee 5, air inlet section 501, air outlet section 502, siphon section 503, discharge pipe 601, discharge valve 602, electronic scale assembly 7, switching valve 8. DETAILED DESCRIPTION

[0022] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the accompanying drawings:

[0023] refer to Figure 1-2 , a liquid material collecting device for chlorine trifluoride condensation purification equipment, comprising

[0024] A liquid material collecting container 1, the upper part of which is connected to the liquid material outlet of the chlorine trifluoride condensation purification device 3 through a corresponding feed pipe 2, and a corresponding air extraction pipe 4 is arranged upwardly connected to the top of the liquid material collecting container 1;

[0025] A gas extraction mechanism, comprising a siphon tee 5 fixedly mounted at a gas material feed port of a chlorine trifluoride condensation and purification device 3, wherein the siphon tee 5 comprises an air inlet section 501 and an air outlet section 502 for the circulation of chlorine trifluoride gas, and a siphon section 503 disposed between the air inlet section 501 and the air outlet section 502, and an end of the air extraction pipe 4 not connected to the liquid material collection container 1 is connected to the siphon section 503 of the siphon tee 5;

[0026] The liquid material discharge mechanism is used to transport the liquid material in the liquid material collection container 1 to the feed end of the next purification equipment.

[0027] During the condensation and purification process of chlorine trifluoride, the chlorine trifluoride gas flows through the siphon tee 5 into the chlorine trifluoride condensation and purification equipment 3 to be condensed into a liquid state, and the material that has not been condensed into a liquid state is discharged along the exhaust port of the chlorine trifluoride condensation and purification equipment 3, thereby achieving condensation and purification of chlorine trifluoride. In this process, the chlorine trifluoride gas flowing through the siphon tee 5 can form a siphon effect on the exhaust pipe 4, so that the liquid material collection container 1 is in a certain negative pressure state, so that the chlorine trifluoride liquid material at the bottom of the chlorine trifluoride condensation and purification equipment 3 can be more smoothly pumped into the liquid material collection container 1 for collection, thereby improving the convenience of collecting the chlorine trifluoride liquid material.

[0028] The most important thing is that under the negative pressure suction state of the exhaust pipe 4, a small amount of gas mixed in the chlorine trifluoride liquid material can be pumped into the chlorine trifluoride condensation purification equipment 3 for re-condensation and impurity removal, so as to greatly reduce the amount of gas entrainment in the liquid material, thereby greatly improving the purification effect of the chlorine trifluoride product.

[0029] The liquid material discharge mechanism comprises a discharge pipe 601 arranged at the bottom of the liquid material collection container, and a corresponding discharge valve 602 is fixedly installed on the discharge pipe 601. The liquid material collection container 1 is fixedly installed on the corresponding electronic scale component 7.

[0030] A corresponding switching valve 8 is fixedly installed on the exhaust pipe 4, and when the discharge valve 602 is opened, the switching valve 8 is closed. The discharge valve 602 and the switching valve 8 are both solenoid valves, and the electronic scale assembly 7, the discharge valve 602 and the switching valve 8 are electrically connected to corresponding electric controllers respectively.

[0031] The liquid material collection container 1 is fixedly mounted on the corresponding electronic scale assembly 7. When the chlorine trifluoride liquid material in the liquid material collection container 1 reaches a set weight value, the discharge valve 602 is opened to transport the chlorine trifluoride liquid material to the feed end of the next purification process; when the discharge valve 602 is opened, the switching valve 8 fixedly mounted on the exhaust pipe 4 is closed to ensure smooth and stable transportation of the chlorine trifluoride liquid material to the next purification process.

[0032] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A liquid material collecting device for chlorine trifluoride condensation purification equipment, characterized in that: include A liquid material collecting container (1), the upper part of which is connected to the liquid material outlet of the chlorine trifluoride condensation purification device (3) via a corresponding feed pipe (2), and the top of the liquid material collecting container (1) is connected upwardly to a corresponding exhaust pipe (4); A gas extraction mechanism, comprising a siphon tee (5) fixedly mounted at a gas material feed port of a chlorine trifluoride condensation purification device (3), the siphon tee (5) comprising an air inlet section (501) and an air outlet section (502) for the circulation of chlorine trifluoride gas, and a siphon section (503) arranged between the air inlet section (501) and the air outlet section (502), and an end of the air extraction pipe (4) not connected to the liquid material collection container (1) is connected to the siphon section (503) of the siphon tee (5); The liquid material discharge mechanism is used to transport the liquid material in the liquid material collection container (1) to the feed end of the next purification equipment.

2. The liquid material collecting device for chlorine trifluoride condensation purification equipment according to claim 1, characterized in that: The liquid material discharge mechanism comprises a discharge pipe (601) arranged at the bottom of the liquid material collecting container, and a corresponding discharge valve (602) is fixedly mounted on the discharge pipe (601).

3. The liquid material collecting device for chlorine trifluoride condensation purification equipment according to claim 2, characterized in that: The liquid material collection container (1) is fixedly mounted on a corresponding electronic scale component (7).

4. The liquid material collecting device for chlorine trifluoride condensation purification equipment according to claim 3, characterized in that: A corresponding switching valve (8) is fixedly installed on the exhaust pipe (4), and when the discharge valve (602) is opened, the switching valve (8) is closed.

5. The liquid material collecting device for chlorine trifluoride condensation purification equipment according to claim 4, characterized in that: The discharge valve (602) and the switching valve (8) are both solenoid valves, and the electronic scale assembly (7), the discharge valve (602) and the switching valve (8) are electrically connected to corresponding electrical controllers, respectively.

Images