Liquid nitrogen filling device for cold trap

Abstract

The utility model discloses a cold trap liquid nitrogen filling device which comprises a containing box, a safety pad, a liquid nitrogen tank, a sealing cover, a low-temperature-resistant electric heating wire, a low-temperature-resistant valve and a conveying pipeline, the safety pad is installed in the containing box, the liquid nitrogen tank is placed in a containing groove formed in the safety pad, and the sealing cover is installed on the liquid nitrogen tank. A sealing cover is installed on the placing box, a conveying pipeline is installed on the sealing cover, a low-temperature-resistant heating wire is wrapped in the outer wall of the conveying pipeline, a conveying head is installed at one end of the conveying pipeline, a placing box is installed on the placing box, a placing cavity is formed in the placing box, a plug is installed in the placing cavity, and the plug is matched with a hole head of the conveying head. According to the liquid nitrogen filling device, the outer wall of the liquid nitrogen tank can be protected, the problem of safety risk caused by collision with the liquid nitrogen tank is solved, the pipeline is protected, the phenomenon that water in the pipeline is frozen and blocked when liquid nitrogen is filled again when the pipeline is not used for a long time is prevented, and the influence on the use of the liquid nitrogen filling device is avoided.

Description

Technical Field

[0001] The utility model relates to the relevant field of cold trap liquid nitrogen filling devices, in particular to a cold trap liquid nitrogen filling device. Background Art

[0002] Cold traps are frequently used equipment in semiconductor production processes and are widely used in the evaporation process of semiconductor production processes. Liquid nitrogen is usually manually filled into cold traps to improve the performance of the cold pump in the cold trap. Liquid nitrogen is an inert, colorless, odorless, non-corrosive, non-flammable, and extremely low-temperature liquid. If the human body comes into contact with liquid nitrogen without protective measures, the skin will be in danger of severe frostbite, so a liquid nitrogen filling device is required when filling the cold trap with liquid nitrogen.

[0003] The existing device has the following shortcomings when in use: the liquid nitrogen tank lacks a protective structure, which is easy to bump into the liquid nitrogen tank, causing safety risks; there is a lack of protection devices for the pipeline. When it is not used for a long time, the moisture in the pipeline will freeze and block when the liquid nitrogen is refilled, affecting the use of the liquid nitrogen filling device. Utility Model Content

[0004] The utility model aims to provide a cold trap liquid nitrogen filling device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cold trap liquid nitrogen filling device, comprising a placement box, a safety mat, a liquid nitrogen tank, a sealing cover, a low-temperature resistant electric heating wire, a low-temperature resistant valve and a delivery pipeline, wherein a safety mat is installed in the placement box, a liquid nitrogen tank is placed in a placement groove provided on the safety mat, a sealing cover is installed on the liquid nitrogen tank, a delivery pipeline is installed on the sealing cover, a low-temperature resistant heating wire is wrapped in the outer wall of the delivery pipeline, an antifreeze sleeve is provided on the outer wall of the delivery pipeline, a delivery head is installed at one end of the delivery pipeline, a placement box is installed on the placement box, a placement cavity is provided on the placement box, a plug is installed in the placement cavity, the plug is matched with the hole head of the delivery head, the liquid nitrogen tank is placed in the placement groove on the safety mat installed in the placement box, and the sealing cover is provided on the sealing cover. The combined placement box and safety pad can protect the outer wall of the liquid nitrogen tank to avoid safety risks caused by bumping into the liquid nitrogen tank. The antifreeze sleeve installed on the outer wall of the delivery pipeline can prevent frostbite caused by the staff's skin contacting the delivery pipeline. After the liquid nitrogen is filled, the low-temperature resistant valve is closed, and then the low-temperature resistant heating wire wrapped in the outer wall of the delivery pipeline is started to heat the delivery pipeline to evaporate the moisture on its inner wall. Then the delivery head is inserted into the placement cavity opened on the placement box, so that the hole head of the delivery head fits with the plug to block the hole of the delivery head to prevent moisture in the air from entering the delivery pipeline when not in use. By protecting the pipeline, the moisture in the pipeline can be prevented from freezing and blocking when liquid nitrogen is infused again when it is not used for a long time, thereby avoiding affecting the use of the liquid nitrogen filling device.

[0006] In a further embodiment, a low-temperature resistant heating wire is provided in the inner wall layer of the liquid nitrogen tank, and a pressure valve is installed on the sealing cover. The low-temperature resistant heating wire heats the liquid nitrogen and gasifies it to increase the pressure in the liquid nitrogen tank. The low-temperature resistant valve is opened, and under the action of pressure, the liquid nitrogen passes through the transport pipeline and the delivery pipeline from the delivery head into the cold trap. When the pressure in the liquid nitrogen tank is too high, the nitrogen can be discharged through the pressure valve, thereby ensuring the safety of the device.

[0007] In a further embodiment, a transport pipeline is installed on the sealing cover, one end of the transport pipeline is connected to the delivery pipeline, and the other end of the transport pipeline is located at the bottom of the liquid nitrogen tank. A low-temperature resistant valve is installed on the transport pipeline. When the low-temperature resistant valve is opened, liquid nitrogen passes through the transport pipeline and the delivery pipeline from the delivery head into the cold trap under the action of pressure, thereby avoiding tilting the liquid nitrogen tank for liquid nitrogen filling operations.

[0008] In a further embodiment, a control panel is installed on the sealing cover, and the control panel is connected to the low-temperature resistant heating wire, the low-temperature resistant valve and the low-temperature resistant heating wire. The control panel controls the opening and closing of the low-temperature resistant heating wire, the opening and closing of the low-temperature resistant heating wire, and the opening and closing of the low-temperature resistant valve.

[0009] In a further embodiment, the delivery head is slidably connected to the placement chamber, and a hand grip ring is installed on the delivery pipe. The sliding connection between the delivery head and the placement chamber facilitates the placement of the delivery head, and the hand grip ring installed on the delivery pipe makes it convenient for the staff to hold the delivery head.

[0010] In a further embodiment, a universal wheel is installed at the bottom of the placement box, a brake structure is provided on the universal wheel, and a handle is installed on the placement box. The universal wheel and handle installed at the bottom of the placement box can facilitate the movement of the liquid nitrogen tank to the cold trap equipment that needs to be added with liquid nitrogen.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. It can protect the outer wall of the liquid nitrogen tank to avoid safety risks caused by bumping into the liquid nitrogen tank.

[0013] 2. By protecting the pipeline, it can prevent the moisture in the pipeline from freezing and clogging when liquid nitrogen is injected again when it is not used for a long time, so as to avoid affecting the use of the liquid nitrogen filling device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;

[0016] Figure 3 This is a schematic diagram of the placement structure of the utility model;

[0017] Figure 4 It is an enlarged schematic diagram of the placement structure of the utility model.

[0018] In the figure: 1. Placement box; 2. Universal wheel; 3. Handle; 4. Safety mat; 5. Liquid nitrogen tank; 6. Sealing cover; 7. Low-temperature resistant heating wire; 8. Air pressure valve; 9. Control panel; 10. Transport pipeline; 11. Low-temperature resistant valve; 12. Transport pipeline; 13. Antifreeze sleeve; 14. Low-temperature resistant heating wire; 15. Transport head; 16. Hand grip ring; 17. Placement box; 18. Placement cavity; 19. Plug. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] See also Figure 1-4, the utility model provides an embodiment: a cold trap liquid nitrogen filling device, comprising a placement box 1, a safety mat 4, a liquid nitrogen tank 5, a sealing cover 6, a low-temperature resistant electric heating wire 7, a low-temperature resistant valve 11 and a delivery pipeline 12, wherein the placement box 1 is installed with a safety mat 4, the placement groove opened on the safety mat 4 is placed with a liquid nitrogen tank 5, the liquid nitrogen tank 5 is installed with a sealing cover 6, the delivery pipeline 12 is installed on the sealing cover 6, the outer wall of the delivery pipeline 12 is wrapped with a low-temperature resistant heating wire 14, the outer wall of the delivery pipeline 12 is covered with an antifreeze sleeve 13, one end of the delivery pipeline 12 is installed with a delivery head 15, the placement box 1 is installed with a placement box 17, the placement box 17 is provided with a placement cavity 18, a plug 19 is installed in the placement cavity 18, the plug 19 is matched with the hole head of the delivery head 15, and the liquid nitrogen tank 5 is placed on the placement box 1 on the safety mat 4 installed in the placement box 1 In the placement slot, the placement box 1 and the safety pad 4 can protect the outer wall of the liquid nitrogen tank 5 to avoid the problem of safety risks caused by bumping into the liquid nitrogen tank 5. The antifreeze sleeve 13 on the outer wall of the delivery pipe 12 can prevent the staff's skin from frostbite when it contacts the delivery pipe 12. After the liquid nitrogen is filled, the low-temperature resistant valve 11 is closed, and then the low-temperature resistant heating wire 14 wrapped in the outer wall of the delivery pipe 12 is started to heat the delivery pipe 12 to evaporate the moisture on its inner wall. Then, the delivery head 15 is inserted into the placement cavity 18 opened on the placement box 17, so that the hole head of the delivery head 15 fits with the plug 19 to block the hole of the delivery head 15 to prevent moisture in the air from entering the delivery pipe 12 when not in use. By protecting the pipeline, it is prevented that the moisture in the pipeline will be frozen and blocked when the liquid nitrogen is infused again when it is not used for a long time, so as to avoid affecting the use of the liquid nitrogen filling device.

[0021] See also Figure 1-4The inner wall layer of the liquid nitrogen tank 5 is provided with a low-temperature resistant electric heating wire 7, and the sealing cover 6 is provided with an air pressure valve 8. The low-temperature resistant electric heating wire 7 heats the liquid nitrogen and gasifies it to increase the pressure in the liquid nitrogen tank 5. The low-temperature resistant valve 11 is opened. Under the action of pressure, the liquid nitrogen passes through the transport pipe 10 and the transport pipe 12 from the transport head 15 into the cold trap. When the pressure in the liquid nitrogen tank 5 is too large, the nitrogen can be discharged through the air pressure valve 8, thereby ensuring the safety of the device. The sealing cover 6 is provided with a transport pipe 10, one end of which is connected to the transport pipe 12. The transport pipe 10 The other end is located at the bottom of the liquid nitrogen tank 5, a low-temperature resistant valve 11 is installed on the transport pipe 10, and the sealing cover 6 is installed with a transport pipe 10. One end of the transport pipe 10 is connected to a delivery pipe 12, and the other end of the transport pipe 10 is located at the bottom of the liquid nitrogen tank 5. A low-temperature resistant valve 11 is installed on the transport pipe 10. The control module and liquid nitrogen infusion structure involved in this application are both existing mature technologies, and there are many products on the market. The protection content of this application does not involve improvements to the control software and the liquid nitrogen infusion method, so the process of liquid nitrogen infusion is not described in detail here.

[0022] See also Figure 1-4 A control panel 9 is installed on the sealing cover 6, and the control panel 9 is connected with the low-temperature resistant heating wire 7, the low-temperature resistant valve 11 and the low-temperature resistant heating wire 14. The control panel 9 controls the opening and closing of the low-temperature resistant heating wire 7, and also controls the opening and closing of the low-temperature resistant heating wire 14 and the opening and closing of the low-temperature resistant valve 11. The delivery head 15 is slidably connected with the placement chamber 18, and a hand grip ring 16 is installed on the delivery pipeline 12. The delivery head 15 is slidably connected with the placement chamber 18 to facilitate the placement of the delivery head 15. The hand grip ring 16 installed on the delivery pipeline 12 is convenient for the staff to hold the delivery head 15. A universal wheel 2 is installed at the bottom of the placement box 1, and a brake structure is provided on the universal wheel 2. A handle 3 is installed on the placement box 1. Through the universal wheel 2 and the handle 3 installed at the bottom of the placement box 1, it is convenient to move the liquid nitrogen tank 5 to the cold trap equipment that needs to be added with liquid nitrogen.

[0023] Working principle: The liquid nitrogen tank 5 is placed in the placement groove on the safety mat 4 installed in the placement box 1. The placement box 1 and the safety mat 4 can protect the outer wall of the liquid nitrogen tank 5 to avoid bumping into the liquid nitrogen tank 5 and causing safety risks. The staff holds the handle 3 and cooperates with the universal wheel 2 installed at the bottom of the placement box 1 to move the liquid nitrogen tank 5 to the cold trap equipment that needs to be added with liquid nitrogen. Then the staff holds the grip ring 16 and takes the delivery head 15 out of the placement cavity 18 opened on the placement box 17, and puts the delivery head 15 to the liquid filling port on the cold trap. The low-temperature resistant electric heating wire 7 set in the inner wall layer of the liquid nitrogen tank 5 is controlled by the buttons on the control panel 9. The liquid nitrogen is heated and gasified to increase the pressure in the liquid nitrogen tank 5. The low-temperature resistant valve 11 is opened, and the liquid nitrogen passes through the transport pipeline 10 and the delivery pipeline 12. Enter the cold trap from the delivery head 15, and the antifreeze sleeve 13 on the outer wall of the delivery pipe 12 can prevent the staff from getting frostbite when their skin touches the delivery pipe 12. After the liquid nitrogen is filled, close the low-temperature resistant valve 11, and then start the low-temperature resistant heating wire 14 wrapped in the outer wall of the delivery pipe 12 to heat the delivery pipe 12 to evaporate the moisture on its inner wall. Then insert the delivery head 15 into the placement cavity 18 opened on the placement box 17, so that the hole head of the delivery head 15 fits with the plug 19 to block the hole of the delivery head 15 to prevent moisture in the air from entering the delivery pipe 12 when not in use. By protecting the pipeline, it is prevented that the moisture in the pipeline will not be frozen and blocked when the liquid nitrogen is infused again when it is not used for a long time, so as to avoid affecting the use of the liquid nitrogen filling device.

[0024] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A cold trap liquid nitrogen filling device, comprising a placement box (1), a safety mat (4), a liquid nitrogen tank (5), a sealing cover (6), a low temperature resistant heating wire (7), a low temperature resistant valve (11) and a delivery pipeline (12), characterized in that: A safety mat (4) is installed in the placement box (1), a liquid nitrogen tank (5) is placed in a placement groove provided on the safety mat (4), a sealing cover (6) is installed on the liquid nitrogen tank (5), a delivery pipe (12) is installed on the sealing cover (6), a low-temperature resistant heating wire (14) is wrapped in the outer wall of the delivery pipe (12), an antifreeze sleeve (13) is wrapped on the outer wall of the delivery pipe (12), a delivery head (15) is installed at one end of the delivery pipe (12), a placement box (17) is installed on the placement box (1), a placement cavity (18) is provided on the placement box (17), a plug (19) is installed in the placement cavity (18), and the plug (19) fits with the hole head of the delivery head (15).

2. A cold trap liquid nitrogen filling device according to claim 1, characterized in that: A low-temperature resistant electric heating wire (7) is arranged in the inner wall layer of the liquid nitrogen tank (5), and an air pressure valve (8) is installed on the sealing cover (6).

3. A cold trap liquid nitrogen filling device according to claim 1, characterized in that: A transport pipeline (10) is installed on the sealing cover (6), one end of the transport pipeline (10) is connected to a delivery pipeline (12), the other end of the transport pipeline (10) is located at the bottom of the liquid nitrogen tank (5), and a low-temperature resistant valve (11) is installed on the transport pipeline (10).

4. A cold trap liquid nitrogen filling device according to claim 1, characterized in that: A control panel (9) is installed on the sealing cover (6), and the control panel (9) is connected to the low-temperature resistant electric heating wire (7), the low-temperature resistant valve (11) and the low-temperature resistant heating wire (14).

5. The cold trap liquid nitrogen filling device according to claim 1, characterized in that: The delivery head (15) is slidably connected to the placement chamber (18), and a hand grip ring (16) is installed on the delivery pipeline (12).

6. The cold trap liquid nitrogen filling device according to claim 1, characterized in that: The bottom of the storage box (1) is equipped with a universal wheel (2), a brake structure is arranged on the universal wheel (2), and a handle (3) is installed on the storage box (1).

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