Cover plate unit for large silicon wafer cleaning tank

By designing a cover unit combining cylinders, rotary frames, reinforcement tubes and reinforcement ribs, the problem of excessive height of the cover structure of large silicon wafer cleaning tanks is solved, the effect of opening at a smaller height is achieved, and the strength and sensitivity of the structure are improved.

CN222642785UActive Publication Date: 2025-03-21KUNSHAN SHENGCHENG PHOTOELECTRIC TECH CO LTD
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Patent Information

Application Number
CN202421136193.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-23
Publication Date
2025-03-21
Estimated Expiration
2034-05-23

AI Technical Summary

Technical Problem

The cover structure of existing large silicon wafer cleaning tanks occupies a large height when opened, which is difficult to meet the operating needs of the equipment when the width of the tank increases.

Method used

A cover unit for large silicon wafer cleaning tank was designed. Through the combination of cylinder mounting seat, cylinder and cover assembly, a structure of a rotating frame, reinforcement tube and reinforcement rib is adopted to enable the cover assembly to be opened at a small height and maintain structural strength.

Benefits of technology

In the case of large silicon wafer cleaning tanks, the opening height of the cover plate assembly is reduced, the equipment can operate normally with the increase in the width of the groove body, and the strength and sensitivity of the cover plate assembly are improved.

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Abstract

The utility model belongs to the technical field of cleaning equipment, and relates to a cover plate unit for a large silicon wafer cleaning tank, which comprises an air cylinder mounting seat, two air cylinders and two cover plate components, the cover plate assembly comprises a cover plate body, two rotating frameworks located at the two ends of the length direction of the cover plate body respectively, a plurality of reinforcing pipes and a plurality of reinforcing ribs, the reinforcing ribs are fixed to the outer side of the cover plate body in parallel in the width direction of the cover plate body, and the reinforcing pipes penetrate through the reinforcing ribs in the length direction of the cover plate body. The two ends of the reinforcing pipe are fixed to the two rotating frameworks respectively, and rotating shafts of the rotating frameworks are lower than the edge of an opening of the cleaning tank. According to the cover plate unit, through the combination of the rotating framework, the reinforcing pipes and the reinforcing ribs, the cover plate body cannot be seriously deformed under the condition that the size is large, the position of the rotating shaft is lower than the opening face of the cleaning tank, and therefore the occupied height is smaller when the cover plate assembly is opened.
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