Sample fixing mold for scanning probe microscope

Abstract

The utility model provides a sample fixing mould for a scanning probe microscope, which comprises a supporting surface for bearing a sample, the supporting surface is provided with a plurality of clamping pieces which can be opened and closed on the supporting surface and are used for pressing the sample on the supporting surface, and the mould is used for fixing the sample when the sample is tested by using the scanning probe microscope. And the sample is simple and easy to mount, fix, dismount and replace. Preferably, the mold is provided with a reflective mirror, a light guide groove and a groove capable of containing a heating piece and / or a magnetic field applying piece, multi-mode sample microscopic testing of the sample under illumination, heat and magnetization adjustment can be achieved, application scenes of the scanning probe microscope under different testing conditions are expanded, and the mold has good application prospects.

Description

Technical Field

[0001] The utility model belongs to the technical field of scanning probe microscopes, in particular to a scanning probe microscope sample fixing mold. Background Art

[0002] A scanning probe microscope is an instrument for observing the surface morphology of materials and various physical signals at the nanoscale. It is mainly composed of a control station, an optical positioning system, an optical microscope system, a scanning probe, a probe, and a sample stage. During the test, the probe measures the changes in the physical signal to obtain a signal image of the corresponding area of ​​the sample. Since the size of the test area is usually micrometer or nanometer, the micro-movement of the sample will affect the accuracy of the signal. The sample is usually fixed with adhesives, etc. However, the adhesive directly contacts the sample, which poses a risk of contamination to the sample, and the curing time is long. In addition, additional processing is required when replacing the sample, which reduces the detection efficiency.

[0003] In addition, the performance of the sample may be affected by factors such as heat, light, and magnetic fields. Using a scanning probe microscope to test the sample under conditions such as illumination, heating, and application of a magnetic field can reveal the effects of these external conditions on the sample performance. However, due to the precise structure of the scanning probe microscope and the small sample stage space, it is difficult to effectively integrate the illumination device, heating device, and magnetic field application device, especially when some working condition tests require illumination from the back of the sample, which makes the operation difficult. Utility Model Content

[0004] In view of the above technical status, the utility model provides a scanning probe microscope sample fixing mold. When the scanning probe microscope is used to test the sample, the mold can ensure that the sample is well fixed, the replacement is simple, and the test is stable.

[0005] The technical solution provided by the utility model is: a scanning probe microscope sample fixing mold, comprising a supporting surface for carrying the sample, wherein the supporting surface is provided with a plurality of clamps which can be opened and closed on the supporting surface and are used for pressing the sample on the supporting surface.

[0006] During the test, the sample is placed on the support surface, the sample is fixed by a clamp, and the mold is placed on the sample stage of a scanning probe microscope so that the area to be tested faces the probe.

[0007] The source of the sample is not limited, and may be, for example, a semiconductor material sample.

[0008] As an implementation method, the clamp includes a clip and an opening and closing mechanism, the clip is connected to the support surface through the opening and closing mechanism, and when the end of the clip is pressed, the front end of the clip is lifted up and leaves the support surface, becoming open. When the pressure on the end of the clip is removed, the end of the clip is lifted up, and the front end of the clip falls down and closes with the support surface.

[0009] The opening and closing mechanism is not limited. For example, the opening and closing mechanism includes a spring, which can be a compression spring or a torsion spring. The front end of the clip is opened and closed under the elastic force of the spring.

[0010] The shape of the sample is not limited, for example, it is a plane sample, etc., and the horizontal dimension of the plane sample is preferably less than or equal to 30 mm. When the thickness of the sample is small and the distance between the probe and the support surface is limited, the opening height of the clip and the height of the opening and closing device are limited, otherwise the movement of the probe on the support surface will be hindered. For this reason, as a preference, a limit column is used to limit the opening height of the clip, for example, the limit column passes through the clip and is fixed on the support surface, and the opening height of the clip is limited by the height of the limit column. Preferably, the end of the clip is connected to the supporting surface via a spring, and when the end of the clip is pressed, the spring is compressed, and the front end of the clip is tilted up and away from the supporting surface, in an open state, and a limiting column is used to limit the opening height of the clip, that is, the limiting column is fixed to the supporting surface, and the clip passes through the limiting column, or the clip is movably connected to the limiting column and the clip can move in the height direction of the limiting column; when the end of the clip is pressed, the spring is compressed, and the front end of the clip is tilted up and away from the supporting surface, in an open state, and the tilting height depends on the height of the limiting column; when the pressure on the end of the clip is removed, the spring returns to its natural state, the end of the clip is lifted, and the front end of the clip falls and closes with the supporting surface.

[0011] Preferably, the mold further comprises a reflector and a light guide groove, the support surface is provided with a hole, the light guide groove is connected to the hole, the light beam enters the light guide groove, is reflected by the reflector surface, and then passes through the hole to irradiate the sample. In this structure, the sample is preferably supported on the surface of a light-transmitting substrate such as glass. Further preferably, the mold is provided with a reflector groove, the reflector is fixed by the reflector groove, and the reflector is preferably provided with a fixing part for matching with the reflector groove and fixing the reflector. More preferably, the reflector includes a connecting part for assisting in conveniently installing the reflector, for example, the connecting part can be held by hand to install the reflector.

[0012] Preferably, the mold further comprises a heating element for heating the sample. As an implementation, the heating element is a thermistor heating sheet. Further preferably, the mold further comprises a groove for accommodating the heating element, and more preferably, the groove wall of the groove is provided with a perforation for connecting the wire connected to the heating element through the perforation. In this structure, the heating element can be replaced and installed by itself, and its heating temperature and time can also be adjusted by itself, so as to realize the test of providing different thermal environments for the sample, such as microscopic test of sample difference before and after constant heating conditions, microscopic test of sample difference before and after variable temperature heating conditions, microscopic test of sample change over time under heating conditions, etc. Further preferably, the heating temperature and heating time of the sample are controlled by changing the voltage applied to the heating element. As an implementation, an end cap is provided at the open end of the groove for sealing the groove. In addition, the probe will be affected in a hot environment, so the mold, the bottom plate and the periphery of the sample fixing surface are all made of heat-insulating materials to minimize the occurrence of thermal drift in the test.

[0013] Preferably, the mold further comprises a magnetic field applying member for applying a magnetic field to the sample. As an implementation mode, the magnetic field applying member is an electromagnet sheet. Preferably, the groove can accommodate the magnetic field applying member, and further preferably, the wire connected to the magnetic field applying member can be connected through the perforation. In this structure, the magnetic field applying member can be replaced and installed by itself, and its magnetization direction and intensity can be adjusted according to the current, so as to realize functional testing of providing different magnetization environments for the sample.

[0014] Compared with the prior art, the utility model provides a mold to fix the sample when testing the sample using a scanning probe microscope. The mold has a simple structure, and the sample can be easily installed, fixed, disassembled and replaced. The mold can not only be used to fix the sample, but also provide one or more of heating, lighting, and magnetic field for the sample, so as to realize multi-mode sample microscopic testing under one or more of lighting, heat, and magnetization, which expands the application scenarios of scanning probe microscopes under different test conditions and has important practical significance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a front view of the schematic diagram of the scanning probe microscope sample fixing mold structure in Example 1.

[0016] Figure 2 yes Figure 1 Structural diagram of the middle clip.

[0017] Figure 3 yes Figure 2 Top view of the .

[0018] Figure 4 This is a front view of the schematic diagram of the scanning probe microscope sample fixing mold structure in Example 2.

[0019] Figure 5 It is the right side view in the schematic diagram of the scanning probe microscope sample fixing mold structure in Example 2.

[0020] Figure 6 It is a top view of the schematic diagram of the scanning probe microscope sample fixing mold structure in Example 2.

[0021] Figure 7 Schematic diagram of the structure of the reflector in Example 2.

[0022] Figure 8 It is the right side view in the schematic diagram of the scanning probe microscope sample fixing mold structure in Example 3.

[0023] Attached Figure 1-8 The numbers in the figure are: supporting surface 1, clip 2, front end of clip 3, end of clip 4, limiting column 5, reflector 6, light guide groove 7, hole 8, reflector groove 9, fixing part 10, connecting part 11, groove 12, through hole 13, end cover 14, spring 15. DETAILED DESCRIPTION

[0024] The present invention is further described in detail below in conjunction with the embodiments and drawings. It should be pointed out that the embodiments described below are intended to facilitate the understanding of the present invention and do not have any limiting effect on the present invention.

[0025] Embodiment 1:

[0026] like Figure 1 As shown, the scanning probe microscope sample fixing mold includes a support surface 1 for carrying the sample, and the support surface 1 is provided with a plurality of clamps 2 that can be opened and closed on the support surface 1 for pressing the sample onto the support surface 1.

[0027] In this embodiment, there are four clips, which are arranged around the supporting surface 1 .

[0028] In this embodiment, the sample is a planar thin film sample, and the thickness of the sample is less than or equal to 2 mm.

[0029] In this embodiment, Figure 2-3 As shown, each clip 2 is connected to the supporting surface 1 via a spring 15. By pressing the end 4 of the clip 2, the spring 15 is compressed, and the front end 3 of the clip 2 is tilted upward and away from the supporting surface 1, presenting an open state. A limiting column 5 is used to limit the opening height of the clip 2. The limiting column 5 passes through the clip 2 and is fixed to the supporting surface 1. The tilted height of the front end 3 of the clip depends on the height of the limiting column 5. When the pressure on the end 4 of the clip 2 is removed, the spring 15 returns to its natural state, the end 4 of the clip 2 is lifted, and the front end 3 of the clip 2 falls and closes with the supporting surface 1.

[0030] During the test, the end 4 of the clamp 2 is pressed, and the front end 3 of the clamp is opened from the support surface 1, and the sample is placed on the support surface 1. Then, the end 4 of the clamp 2 is removed, and the front end 3 of the clamp 2 presses the sample on the support surface 1. Then, the mold is placed on the sample stage of the scanning probe microscope so that the area to be tested faces the probe. During the test, the pressing position of the front end of the clamp can also be adjusted by pressing the end of the clamp.

[0031] Embodiment 2:

[0032] In this embodiment, the mold structure is basically the same as that of embodiment 1, except that: Figure 4-7 As shown, the mold further includes a reflector 6 and a light guide groove 7. The support surface 1 is provided with a hole 8, and the light guide groove 7 is connected to the hole 8. The light beam enters the light guide groove 7, is reflected by the reflector 6, and then irradiates the sample through the hole 8. The mold is also provided with a reflector groove 9, and the reflector 6 is fixed by the reflector groove 9. Figure 7 As shown, in this embodiment, the reflector 7 is provided with a fixing member 10, which is used to match the reflector groove 9 and fix the reflector 6. The reflector also includes a connecting member 11, which is used to assist in conveniently installing the reflector 6, for example, the reflector 6 can be installed by holding the connecting member.

[0033] Embodiment 3:

[0034] In this embodiment, the mold structure is basically the same as that of embodiment 2, except that: Figure 8 As shown, the mold further comprises a groove 12, a groove wall of the groove 12 is provided with a through hole 13, the groove 12 can accommodate a heating element, and a wire connected to the heating element can be connected through the through hole 13. The heating element is used to heat the sample, and in this embodiment, the heating element is a thermistor heating sheet.

[0035] In this structure, the heating element can be replaced and installed by itself, and its heating temperature and time can also be adjusted by itself, so as to provide different thermal environment tests for the sample, such as microscopic test of sample difference before and after constant heating condition, microscopic test of sample difference before and after variable temperature heating condition, microscopic test of sample change over time under heating condition, etc. The heating temperature and heating time of the sample are controlled by changing the voltage applied to the heating element.

[0036] In this embodiment, an end cap 14 is provided at the open end of the groove 12 to seal the groove 12. In addition, the probe will be affected in a hot environment, so heat insulation materials are used around the mold, the bottom plate and the periphery of the sample fixing surface to minimize thermal drift during testing.

[0037] Embodiment 4:

[0038] In this embodiment, the mold structure is basically the same as that in Embodiment 3, except that the mold further includes a magnetic field applying member for applying a magnetic field to the sample. In this embodiment, the magnetic field applying member is an electromagnet sheet, the groove 12 can accommodate the electromagnet sheet, and the wire connecting the electromagnet sheet is connected through the through hole 13. In this structure, the magnetic field applying member can be replaced and installed by itself, and its magnetization direction and intensity can be adjusted by itself according to the current, so as to realize the functional test of providing different magnetization environments for the sample.

[0039] The embodiments described above provide a detailed description of the technical solution of the utility model. It should be understood that the above is only a specific embodiment of the utility model and is not intended to limit the utility model. Any modifications, supplements or similar substitutions made within the scope of the principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A scanning probe microscope sample fixing mold, characterized by: It includes a support surface for carrying the sample, and the support surface is provided with a plurality of clamps that can be opened and closed on the support surface, and is used to press the sample on the support surface; The mold further comprises a reflector and a light guide groove. The support surface is provided with a hole. The light guide groove is connected to the hole. The light beam enters the light guide groove, is reflected by the reflector surface, and then passes through the hole to irradiate the sample.

2. The scanning probe microscope sample fixing mold according to claim 1, characterized in that: The clamp includes a clip and an opening and closing mechanism, the clip is connected to the support surface through the opening and closing mechanism, and when the end of the clip is pressed, the front end of the clip is lifted up and leaves the support surface, presenting an open state, and when the pressure on the end of the clip is removed, the end of the clip is lifted up, and the front end of the clip falls down and closes with the support surface.

3. The scanning probe microscope sample fixing mold according to claim 2, characterized in that: The opening and closing mechanism comprises a spring, and the front end of the clip is opened and closed under the elastic force of the spring.

4. The scanning probe microscope sample fixing mold according to claim 1, characterized in that: Also included is a limiting column for limiting the opening height of the clip.

5. The scanning probe microscope sample fixing mold according to claim 4, characterized in that: The limiting column is fixed on the supporting surface through the clip.

6. The scanning probe microscope sample fixing mold according to claim 1, characterized in that: The sample is a plane sample, and the horizontal dimension thereof is less than or equal to 30 mm.

7. The scanning probe microscope sample fixing mold according to claim 6, characterized in that: The thickness of the sample is less than or equal to 5 mm.

8. The scanning probe microscope sample fixing mold according to claim 7, characterized in that: The thickness of the sample is less than or equal to 2 mm.

9. The scanning probe microscope sample fixing mold according to claim 1, characterized in that: The sample is supported on the surface of a light-transmitting substrate.

10. The scanning probe microscope sample fixing mold according to claim 1, characterized in that: The mold is provided with a reflector groove, and the reflector is fixed by the reflector groove.

11. The scanning probe microscope sample fixing mold according to claim 10, characterized in that: The reflector is provided with a fixing piece, which is used to match with the reflector groove and fix the reflector.

12. The scanning probe microscope sample fixing mold according to claim 11, characterized in that: The reflector comprises a connecting piece for mounting the reflector.

13. The scanning probe microscope sample fixing mold according to any one of claims 1 to 12, characterized in that: The mold further comprises a recess, and the recess can accommodate a heating element for heating the sample and / or a magnetic field applying element for applying a magnetic field to the sample.

14. The scanning probe microscope sample fixing mold according to claim 13, characterized in that: The groove wall of the groove is provided with a through hole, and the wire connected to the heating element and / or the wire connected to the magnetic field applying element can be connected out through the through hole.

15. The scanning probe microscope sample fixing mold according to claim 13, characterized in that: An end cover is provided at the open end of the groove for sealing the groove.

16. The scanning probe microscope sample fixing mold according to claim 13, characterized in that: The heating element is a thermic heating sheet.

17. The scanning probe microscope sample fixing mold according to claim 13, characterized in that: The magnetic field applying member is an electromagnet.

18. The scanning probe microscope sample fixing mold according to claim 14, characterized in that: The heating element is a thermic heating sheet.

19. The scanning probe microscope sample fixing mold according to claim 14, characterized in that: The magnetic field applying member is an electromagnet.

20. The scanning probe microscope sample fixing mold according to claim 15, characterized in that: The heating element is a thermic heating sheet.

21. The scanning probe microscope sample fixing mold according to claim 15, characterized in that: The magnetic field applying member is an electromagnet.

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