A probe failure test fixture

Abstract

The utility model provides a probe failure test fixture, comprising a fixing device, a test device and an adjusting device; the fixing device is used for detachably installing the probe, and the needle head of the probe is arranged opposite to the test device, and the test device is electrically connected to an external test module; the adjusting device comprises a base and an adjusting component, and the adjusting component is movably installed on the base, and is used for pushing the test device to form an electrical connection with the needle head, so as to form a test path with the probe and the external test module. The utility model probe is easy to replace, the position of the probe is easy to fix during the test to reduce random errors, the compression distance of the probe can be freely controlled, and the impedance data of the probe can be obtained by rapid and large-scale repeated testing under the same conditions.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor process equipment, and in particular relates to a probe failure test fixture. Background Art

[0002] With the rapid development of my country's semiconductor industry in recent years, 8-inch and 12-inch factories have become the mainstream production systems. Large-sized wafers are difficult to use in high-end processes and have extremely high requirements for process flow. Therefore, the high cost of wafer production has also become a problem that the semiconductor industry must face. Improving product yield and timely troubleshooting related production equipment failures have become important tasks in semiconductor chip production. Wafer Acceptance Tester (WAT) is an essential step in the acceptance process after wafer preparation is completed. It can test the electrical parameters of the wafer to determine whether it meets the design value, thereby obtaining product yield to improve the process. The WAT tester is a widely used electrical test equipment, usually composed of a test head (Tester) and a probe station (Prober). The probe (Prober Pin) is the only medium connecting the Tester and the probe card (Prober Card).

[0003] The probe looks like a metal cylinder, with a spring in the center to control the compression of the needles on both sides. As a precision tool, the quality of the probe and the compression of the needle spring will directly affect its physical properties, and thus affect the accuracy of the WAT test. Usually, the WAT machine will run continuously in the production line, and the test volume is huge. In the high-load production process, the probe will inevitably be worn or contaminants will be attached. In the subsequent testing process, the deformation of the probe due to wear may cause the probe to have problems such as increased impedance, poor consistency or occasional failure. These problems will easily cause relevant personnel to misjudge the electrical parameters of the wafer and increase the cost of chip preparation. Therefore, when the WAT test data is abnormal, the impact of the probe problem on it is also one of the important considerations. At present, there is no perfect method and tool to quantitatively complete the test of probe impedance, which will become a difficult problem for WAT test machine problem troubleshooting.

[0004] After the WAT test data is abnormal, it is particularly important to promptly and reasonably troubleshoot the impact of the probe. The impedance of the WAT machine's probe is usually between 3mΩ and 10mΩ, and it is difficult to verify the small impedance of this magnitude; in addition, the tester does not have a standard test method and tool for the impedance change caused by different compression amounts of the probe. Therefore, effectively controlling the many influencing factors of the probe impedance and performing high-precision small impedance testing to improve the troubleshooting efficiency of the WAT machine are difficult problems that still need to be solved. Utility Model Content

[0005] The utility model is to solve all or part of the problems of the above-mentioned prior art. The utility model provides a probe failure test fixture, which has the advantages of easy replacement of probes, easy fixation of probe positions during testing to reduce random errors, free controllable probe compression distance, test probe impedance reaching the order of 1e-3, and rapid and large-scale repeated testing under the same conditions to obtain probe impedance data.

[0006] In order to achieve the purpose of the above utility model, the utility model provides the following technical solutions:

[0007] A probe failure test fixture, characterized in that it includes a fixing device, a test device and an adjusting device; the fixing device is used to detachably install the probe, and the needle of the probe is arranged opposite to the test device, and the test device is electrically connected to an external test module; the adjusting device includes a base and an adjusting component, and the adjusting component is movably mounted on the base, and is used to push the test device to form an electrical connection with the needle, so as to form a test path with the probe and the external test module. The probe of the present application is arranged on the fixing device, and is located in the middle position of the test device and the adjusting device. The adjusting device is connected to the test device and enables the test device to move left and right to form an electrical connection with the needle, so that the test device, the probe, and the external test module are connected to form a path, the probe impedance is measured, and the large question data is quickly collected through the peripheral test module.

[0008] The fixing device is divided into an upper module and a lower module. The lower module is used to install the fixing device on the base, and the upper module is used to install and fix the probe.

[0009] The base is provided with a moving structure, and the lower module is moved and fixed by the moving structure. The lower module and the base are fixedly installed by a fixing member, ensuring that the physical position of the probe is not moved during the test process, thereby ensuring the accuracy of the measurement work.

[0010] The structure for installing and fixing the probe in the upper module includes a tightening assembly and a horizontal opening. The horizontal opening runs horizontally through the upper module and is used to place the probe. The tightening assembly is used to fix the probe in the horizontal opening. The tightening assembly includes a tightening plate and a tightening module for limiting the movement of the tightening plate. The tightening plate is provided with an upper positioning groove opposite to the horizontal opening on one side of the horizontal opening. The tightening module is configured as a lifting structure for controlling the lifting and lowering of the tightening plate. The horizontal opening and the upper positioning groove are configured in an arc shape.

[0011] The adjustment assembly includes an adjustment block and a first adjustment drive unit. The adjustment block is mounted on the side of the needle head and the other side is connected to the first adjustment drive unit. The first adjustment drive unit drives the adjustment block to move on the base. Two adjustment assemblies are arranged on both sides of the probe and move on the base to contact and compress the needle head of the probe. The transmission distances of the two adjustment assemblies are the same, so that the compression amount of the adjustment assembly and the needle head is the same, ensuring the accuracy of the measurement work and reducing random errors.

[0012] A guide groove is provided on the base along the probe placement direction, and a guide block is provided at the lower end of the adjustment block and moves in the guide groove, so as to limit the movement of the adjustment block along the direction in which the guide groove is provided.

[0013] The testing device includes an electrode plate, an electrode is arranged at a position opposite to the needle tip of the probe, and a transmission unit connected to the internal wire of the electrode plate is also arranged on the electrode plate. The transmission unit is used to form a path between the electrode, the probe and the external test module.

[0014] The transmission unit includes two internal connection ports arranged on the upper part of the electrode plate and an external connection port arranged correspondingly thereto, the external connection port is electrically connected to an external test module through a transmission wire, the two internal connection ports and the two external connection ports form a passage, and a passage is formed when the two needles of the probe simultaneously contact the electrodes on both sides.

[0015] The electrode plate is provided with a grounding through hole.

[0016] The base is provided with a ruler, which can record the compression distance of the needle compressed by the adjustment block. Both adjustment blocks can be quantitatively moved in physical position. During the test, the probe is fixed in the middle of the adjustment block of the compression distance by the probe fixing device. The compression amount of the springs at both ends of the probe can be accurately recorded by a vernier caliper, which solves the problem that the existing tools cannot test the influence of the compression amount on the probe impedance. The compression amount of the springs at both ends of the probe can be accurately controlled to obtain the relationship between the compression amount and the failure of the probe; thereby better judging the correlation between wear, pressure and impedance during the long-term use of the probe.

[0017] The upper module and the lower module are made of insulating material.

[0018] The utility model has the following advantages: 1. A stable probe fixture ensures that the physical position of the probe is not moved during the test, reducing the random errors caused by manually touching the two ends of the probe; 2. Both ends of the compression distance adjustment fixture can be quantitatively moved physically. During the test, the probe is fixed in the middle of the compression distance adjustment fixture by the probe fixture. The compression of the springs at both ends of the probe can be accurately recorded by a vernier caliper, solving the problem that existing tools cannot test the effect of compression on probe impedance; 3. It can be connected to high-precision external test equipment, and a large amount of data collection under the same conditions can be completed at high speed through the corresponding test software to observe whether the probe has occasional failures. 4. The utility model can simulate the pressure of the tester on the probe in the actual work of the WAT machine by reducing the distance adjustment fixture, and find the most stable state of the probe impedance by controlling the variable method. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 1 is a schematic diagram of the structure of a probe failure test fixture provided by an embodiment of the utility model patent;

[0020] Figure 2 This is a schematic diagram of a probe compression distance adjustment fixture structure provided by an embodiment of the utility model patent;

[0021] Figure 3 It is a structural schematic diagram of a fixing device provided in an embodiment of the utility model patent;

[0022] Figure 4 This is a schematic diagram of the structure of the fixing device in the open state provided by an embodiment of the utility model patent;

[0023] Figure 5 This is a schematic diagram of the structure of the test electrode plate provided in an embodiment of the utility model patent;

[0024] Figure 6 This is a schematic diagram of the probe structure provided by an embodiment of the utility model patent;

[0025] Figure 7 It is a cross-sectional schematic diagram of the probe being compressed during the use of the WAT test machine probe failure test equipment provided by an embodiment of the utility model patent. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] A probe failure test fixture includes a fixing device 100, a testing device 200 and an adjusting device 300;

[0028] The fixing device 100 is used to detachably install the probe 400, and the needle 410 of the probe 400 is arranged opposite to the testing device 200, and the testing device 200 is electrically connected to the external testing module;

[0029] The adjusting device 300 includes a base 320 and an adjusting assembly 310 , which is movably mounted on the base and used to push the testing device 200 to form an electrical connection with the needle 410 , so as to form a test path with the probe 400 and an external testing module.

[0030] By placing the probe 400 on the fixing device 100, the needle 410 of the probe 400 is arranged opposite to the testing device 200, and the testing device 200 is moved closer to the needle 410 by starting the adjusting device 300, and finally the needle 410 is compressed to the required length as required to achieve electrical connection.

[0031] The adjusting device 300 includes a base 320 and an adjusting component 310, and the adjusting component 310 is movably mounted on the base 320 to push the testing device 200 to move; the fixing device 100 is divided into upper and lower modules, the upper module 110 and the lower module 170 are made of insulating materials and can also be integrally formed, the lower module 170 is used to install the fixing device 100 on the base 320, and the upper module 110 is used to install and fix the probe 400, and the thickness of the upper module 110 does not exceed the length of the needle tube 420 of the probe 400.

[0032] The present application is to realize the "four-terminal method" test, so the test device 200 is set at the position of the needle 410 on both sides of the probe 400, so there are two groups of test devices 200, which are respectively located on both sides of the fixing device 100. In this embodiment, the test device 200 is set on the adjustment device 300 and at least one group can be moved relative to the adjustment device 300 or the probe 400 fixing device 100, so that the probe 400 forms a passage through the test device 200 and the external test module. The adjustment device of the present application is connected to the test device and the test device is moved left and right, so that the test device, the needle, and the external test module are connected to form a passage, the probe impedance is measured, and a large amount of data is quickly collected through the peripheral test module. Two adjustment components are set on both sides of the probe, and move on the base to contact and compress the needle of the probe. The transmission distance of the two adjustment components is the same, so that the compression amount of the adjustment component and the needle is the same, ensuring the accuracy of the measurement work and reducing random errors.

[0033] In one embodiment, a movable structure 330 is provided on the base 320, and the lower module 170 is moved and fixed by the movable structure 330. The lower module 170 and the base 320 are fixedly installed by a fixing member to ensure that the physical position of the probe is not moved during the test, thereby ensuring the accuracy of the measurement work. Specifically, the movable structure 330 is a guide groove provided on the base 320. The fixing member can be a latch structure or a detachable fixing method such as a screw, for example, a positioning hole 150 with the same diameter is provided on the lower module 170 and the base 320, and a positioning rod is installed in the positioning hole 150 to fix the lower module 170 and the base 320.

[0034] The structure for installing and fixing the probe 400 in the upper module 110 includes a tightening assembly 140 and a horizontal opening 160 . The horizontal opening 160 horizontally passes through the upper module 110 and is used to place the probe 400 . The tightening assembly 140 is used to fix the probe 400 in the horizontal opening 160 .

[0035] Specifically, the clamping assembly 140 includes a clamping plate 130 and a clamping module for limiting the movement of the clamping plate 130. The clamping module is configured as a lifting structure to control the lifting and lowering of the clamping plate (130). The clamping plate 130 is provided with an upper positioning groove 162 opposite to the horizontal opening 160 on one side of the horizontal opening 160, and the horizontal opening 160 and the upper positioning groove 162 are configured to be arc-shaped or semicircular.

[0036] In one embodiment, the tightening assembly 140 is a lifting screw, and an adjusting window hole 120, such as a rectangle, which is adapted to the shape of the tightening plate 130 is opened on the upper module 110, and is used for the tightening plate 130 to move up and down along the adjusting window hole 120. The upper module 110 is provided with a threaded through hole connected to the adjusting window hole 120 at the upper part of the adjusting window hole 120. The lifting screw is threadedly installed in the threaded through hole, and the bottom end of the lifting screw is rotatably connected to the tightening plate 130. When the lifting screw is rotated, the tightening plate 130 cannot rotate due to the restriction of the adjusting window hole 120, and the lifting screw is rotatably connected to the tightening plate 130, so the rotation of the lifting screw will not be restricted. Finally, the tightening plate 130 will follow the lifting screw to move up and down to achieve a lifting effect.

[0037] The adjustment assembly 310 includes an adjustment block 311 and a first adjustment drive unit 312. The adjustment block 311 is connected to the test device 200. The test device 200 is installed on the side of the adjustment block 311 facing the needle, and the other side is connected to the first adjustment drive unit 312. The first adjustment drive unit 312 drives the adjustment block 311 to move on the base 320. The lower end of the adjustment block 311 is provided with a guide block located in the guide groove for movement, which is used to limit the adjustment block (311) from moving along the direction in which the guide groove is opened. The specific implementation of the adjustment assembly 310 is as follows:

[0038] like Figure 2 As shown, a threaded through hole is provided on the base 320 along the left-right direction, and the first adjustment drive unit 312 is matched to be installed with an adjustment screw and the threaded through hole, and the adjustment screw is rotatably connected to the adjustment block 311. The implementation of the adjustment assembly of the present application includes the above implementation but is not limited to the above implementation. A through hole can also be provided on the adjustment block, the first adjustment drive unit adopts a drive motor, the end of the drive motor is connected to the adjustment rod, and the front end of the adjustment rod is connected to the test device. As long as the structure that moves the test device is achieved, it is within the protection scope of the present application.

[0039] The testing device 200 includes an electrode plate 211, an electrode 212 is arranged in the middle of the electrode plate 211, and a transmission unit connected to the internal wire of the electrode plate 211 is also arranged on the electrode plate 211, and the transmission unit is used to form a path between the electrode 212, the probe 400 and the external test module.

[0040] The transmission unit includes two internal connection ports 214 disposed on the upper portion of the electrode plate 211 and an external connection port 221 disposed corresponding thereto. The external connection port 221 is electrically connected to an external test module via a transmission wire 222 , and the electrode plate 211 is provided with a grounding through hole 215 .

[0041] The base 320 is provided with a vernier caliper. The compression distance of the needle compressed by the adjustment block can be recorded. Both adjustment blocks can be quantitatively moved in physical position. During the test, the probe is fixed in the middle of the adjustment block of the compression distance by the probe fixing device. The compression amount of the springs at both ends of the probe can be accurately recorded by the vernier caliper, which solves the problem that the existing tools cannot test the influence of the compression amount on the probe impedance. The compression amount of the springs at both ends of the probe can be accurately controlled to obtain the relationship between the compression amount and the failure of the probe; in this way, the correlation between wear, pressure and impedance can be better judged during the long-term use of the probe.

[0042] The operation sequence of using the probe failure test fixture of the WAT test machine provided in this embodiment is as follows:

[0043] S1, installing and fixing the probe 400 on the upper module 110 of the fixture 100, and installing the lower module 170, the adjustment assembly 310 and two sets of test devices 200 on the base 320;

[0044] S2, adjusting the distance between the fixing device 100 and the testing device 200 so that the electrodes 212 of the two groups of testing devices 200 touch the needles 410 at both ends of the probe 400, thereby generating a compression amount of the needles 410;

[0045] S3, the transmission wire 222 is connected to the external test module to form a path, and the impedance of the probe 400 between the two electrode plates 211 is measured by a four-terminal method;

[0046] S4. Repeat S2 for multiple times to adjust and control the compression amount of the needle 410 at both ends of the probe 400, record the impedance of the probe 400 between the two electrode plates 211 for measurement each time, and take the final average value as the final data.

[0047] More specifically:

[0048] S1. Turn the lifting screw counterclockwise to raise the top plate 130, place the probe 400 on the horizontal opening 160, and after both ends of the needle tube 420 of the probe 400 are flush with the upper module 110, tighten the lifting screw clockwise, and the probe 400 is fixed on the upper module 110;

[0049] S2, placing the lower module 170 in the guide groove on the base 320 and passing the positioning rod through the positioning hole 150;

[0050] S3. Rotate the adjustment screws on both sides simultaneously to move the electrode plate 211 toward the probe 400, so that the electrode 212 on the electrode plate 211 just contacts both sides of the probe 400. At this time, use a vernier caliper to record the distance between the electrode plates as the original needle length. The external connection port 221 of the electrode plate 211 is connected to a high-resolution SMU through the other end of the transmission wire 222.

[0051] S4. First, completely compress the probe spring by adjusting the screw, and use a vernier caliper to record the distance between the electrode plates as the maximum compression of the probe. At the same time, re-test the probe impedance data in this state 10 times through the test system. Turn the adjusting screw to adjust the probe compression distance at equal intervals, and record it with a vernier caliper. Re-test the probe impedance data more than 10 times for each distance, and use the final average value as the final data.

[0052] In summary, the utility model has the following advantages: 1. A stable probe fixing device to ensure that the physical position of the probe is not moved during the test, reducing the random errors caused by manually touching the two ends of the probe; 2. Both ends of the compression distance adjustment fixture can be quantitatively moved physically. During the test, the probe is fixed in the middle of the compression distance adjustment fixture by the probe fixture. The compression of the springs at both ends of the probe can be accurately recorded by a vernier caliper, solving the problem that existing tools cannot test the effect of compression on probe impedance; 3. It can be connected to high-precision external test equipment, and a large amount of data collection under the same conditions can be completed at high speed through the corresponding test software to observe whether the probe has occasional failures. 4. The utility model can simulate the pressure of the tester on the probe during the actual operation of the WAT machine by reducing the distance adjustment fixture, and find the most stable state of the probe impedance by controlling the variable method.

[0053] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned implementation modes, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned implementation modes, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various implementation modes of the present application.

Claims

1. A probe failure test fixture, characterized in that: It comprises a fixing device (100), a testing device (200) and an adjusting device (300); The fixing device (100) is used for detachably mounting a probe (400), and a needle head (410) of the probe (400) is arranged opposite to a testing device (200), and the testing device (200) is electrically connected to an external testing module; The adjusting device (300) comprises a base (320) and an adjusting component (310), wherein the adjusting component (310) is movably mounted on the base and is used to push the testing device (200) to form an electrical connection with the needle (410) so as to form a testing path with the probe (400) and an external testing module.

2. A probe failure test fixture according to claim 1, characterized in that: The fixing device (100) is divided into an upper module (110) and a lower module (170), wherein the lower module (170) is used to install the fixing device (100) on the base (320), and the upper module (110) is used to install and fix the probe (400).

3. A probe failure test fixture according to claim 2, characterized in that: A movable structure (330) is provided on the base (320), and the lower module (170) is moved and fixed by means of the movable structure (330).

4. The probe failure test fixture according to claim 2, characterized in that: The structure for installing and fixing the probe (400) in the upper module (110) comprises a tightening assembly (140) and a horizontal opening (160); the horizontal opening (160) passes through the upper module (110) horizontally and is used for placing the probe (400); the tightening assembly (140) is used for fixing the probe (400) in the horizontal opening (160).

5. The probe failure test fixture according to claim 4, characterized in that: The clamping assembly (140) comprises a clamping plate (130) and a clamping module for limiting the movement of the clamping plate (130); the clamping plate (130) is provided with an upper positioning groove (162) opposite to the horizontal opening (160) on one side of the horizontal opening (160).

6. The probe failure test fixture according to claim 5, characterized in that: The clamping module is configured as a lifting structure for controlling the lifting and lowering of the clamping plate (130).

7. The probe failure test fixture according to claim 5, characterized in that: The horizontal opening (160) and the upper positioning groove (162) are arranged in an arc shape.

8. The probe failure test fixture according to claim 1, characterized in that: The adjustment assembly (310) comprises an adjustment block (311) and a first adjustment drive unit (312); the adjustment block (311) is mounted on the side of the needle (410) to install the test device (200); and the first adjustment drive unit (312) drives the adjustment block (311) to move on the base (320).

9. The probe failure test fixture according to claim 8, characterized in that: A guide groove is provided on the base (320) along the placement direction of the probe (400), and a guide block is provided at the lower end of the adjustment block (311) and moves in the guide groove, so as to limit the movement of the adjustment block (311) along the direction in which the guide groove is provided.

10. The probe failure test fixture according to claim 1, characterized in that: The testing device (200) comprises an electrode plate (211), an electrode (212) being arranged at a position of the electrode plate (211) opposite to a needle head (410) of the probe (400), and a transmission unit connected to an internal wire (213) of the electrode plate (211) being arranged on the electrode plate (211), the transmission unit being used to form a path between the electrode (212), the probe (400) and an external testing module.

11. The probe failure test fixture according to claim 10, characterized in that: The transmission unit comprises two internal connection ports (214) arranged on the electrode plate (211) and an external connection port (221) arranged corresponding thereto, and the external connection port (221) is electrically connected to an external test module via a transmission wire (222).

12. The probe failure test fixture according to claim 10, characterized in that: The electrode plate (211) is provided with a grounding through hole (215).

13. The probe failure test fixture according to claim 1, characterized in that: A scale is arranged on the base (320).

14. The probe failure test fixture according to claim 2, characterized in that: The upper module (110) and the lower module (170) are made of insulating material.

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