An adjustment mechanism

Abstract

The present application provides an adjustment mechanism, which relates to the technical field of optical equipment, and includes a first lens barrel, a second lens barrel, a main bracket, an adjustment bracket, and a mounting bracket connected in sequence along an axis, wherein the mounting bracket is used to fix a workpiece; the mounting bracket and the adjustment bracket are connected by a first connecting component to adjust the rotation angle of the workpiece relative to the adjustment bracket; the adjustment bracket and the main bracket are connected by a second connecting component to adjust the position of the workpiece relative to the main bracket in a first direction perpendicular to the axis direction; a third connecting component is arranged between the main bracket, the second lens barrel, and the first lens barrel to adjust the position of the workpiece relative to the first lens barrel in the axis direction. The rotation angle of the workpiece, the position of the workpiece in the first direction perpendicular to the axis direction, and the position of the workpiece in the axis direction are adjusted respectively, so as to realize online adjustment of the workpiece, with high adjustment efficiency and adjustment accuracy, simple structure, small occupied space, and convenient adjustment; when applied to a system, the precise displacement of the workpiece is ensured, and the system performance is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of optical equipment, and in particular to an adjustment mechanism. Background Art

[0002] In the field of precision manufacturing, optical inspection equipment and instruments are playing an increasingly important role, effectively promoting the advancement of precision manufacturing production processes. Especially with the development of the 3C electronics and semiconductor industries, high-precision optical inspection equipment and instruments are effectively driving the upgrading of semiconductor process technology. Among them, optical path debugging plays a decisive role in the performance of optical instruments. The quality of optical-mechanical alignment directly affects the performance of the optical path. Especially in high-precision inspection instruments or equipment, the quality of optical-mechanical alignment determines the resolution and accuracy of the instrument.

[0003] In high-precision optical inspection instruments, most optical paths require optical components with excellent positioning accuracy to ensure that the optical system can perform optical path inspection according to design requirements. For example, in spectral confocal measurement displacement sensors, the positioning accuracy of the confocal slit must reach the micron level. This positioning accuracy is difficult to achieve through the machining accuracy of mechanical parts, so optical and mechanical alignment is required to position the optical components at the specified design position.

[0004] Based on the above problems, the industry generally uses three-dimensional precision displacement worktables or six-dimensional precision displacement worktables to assist in manual adjustment of the slit, and then fixes the slit with glue or tightens it with screws after the adjustment is achieved. However, this manual adjustment can only be performed offline, which means that once the optical system starts working, if the optical system's performance deteriorates due to stress or other reasons, it cannot be corrected in time by adjusting the slit. Utility Model Content

[0005] The purpose of the embodiments of the present application is to provide an adjustment mechanism that can adjust the position of a workpiece online in an actual use environment, with high adjustment accuracy and efficiency to ensure the performance of the system.

[0006] In one aspect of an embodiment of the present application, an adjustment mechanism is provided, comprising a first lens barrel, a second lens barrel, a main bracket, an adjustment bracket, and a mounting bracket connected in sequence along an axis, wherein the mounting bracket is used to fix a workpiece; the mounting bracket and the adjustment bracket are connected by a first connecting component to adjust the rotation angle of the workpiece relative to the adjustment bracket; the adjustment bracket and the main bracket are connected by a second connecting component to adjust the position of the workpiece relative to the main bracket in a first direction perpendicular to the axial direction; a third connecting component is provided between the main bracket, the second lens barrel, and the first lens barrel to adjust the position of the workpiece relative to the first lens barrel in the axial direction.

[0007] Optionally, the first connecting component includes a first positioning pin and a first fixing screw, the mounting bracket cooperates with the axial hole of the adjustment bracket, and a plurality of mounting holes are provided on the mounting bracket, and the plurality of mounting holes are arranged in a direction perpendicular to the axial line. The first positioning pin passes through the adjustment bracket and is connected to different mounting holes so that the workpiece can rotate relative to the adjustment bracket at an angle; the first fixing screw passes through the adjustment bracket and abuts against the outer wall of the mounting bracket to lock the workpiece.

[0008] Optionally, a limiting groove is provided on the adjustment bracket, and the first positioning pin passes through the limiting groove and is connected to the mounting hole to limit the first positioning pin along the axial direction.

[0009] Optionally, the second connecting assembly includes a second fixing screw, an adjusting screw, and a compression spring sleeved on the adjusting screw. The adjusting bracket is arranged in the main bracket. The adjusting screw and the second fixing screw pass through the main bracket and the adjusting bracket in sequence along the first direction. The position of the adjusting bracket relative to the main bracket in the first direction is adjusted by the adjusting screw and the compression spring, and is locked by the second fixing screw.

[0010] Optionally, the adjustment accuracy of the adjustment screw is between 0.5um / degree and 1.3um / degree.

[0011] Optionally, a sliding groove is provided on the main bracket along the first direction, and the adjustment bracket is clamped in the sliding groove of the main bracket.

[0012] Optionally, the third connecting component includes a tension spring, the second lens barrel is sleeved in the first lens barrel and threadedly connected to the first lens barrel, the main bracket is connected to the axial holes of the first lens barrel and the second lens barrel respectively, and the main bracket and the second lens barrel are connected through the tension spring.

[0013] Optionally, the third connecting assembly further includes a second positioning pin, the end portion of the main bracket is disposed in the first lens barrel, and the second positioning pin passes through the first lens barrel and is connected to the main bracket to limit the rotation of the main bracket.

[0014] Optionally, a first opening is circumferentially provided on the circumferential outer wall of the first lens barrel, and a second opening is provided on the circumferential outer wall of the second lens barrel along the axial direction. The second opening is exposed through the first opening, and a tool is inserted into the second opening to drive the second lens barrel to rotate along the first lens barrel through the second opening.

[0015] Optionally, a first pillar is provided on the first lens barrel, a second pillar is provided on the main support, and two ends of the tension spring are respectively connected to the first pillar and the second pillar.

[0016] The adjustment mechanism provided in the embodiment of the present application comprises a first lens barrel, a second lens barrel, a main support, an adjustment support, and a mounting support connected in sequence along an axis, with a workpiece fixed to the mounting support; a first connecting assembly is provided between the mounting support and the adjustment support, a second connecting assembly is provided between the adjustment support and the main support, and a third connecting assembly is provided between the main support, the second lens barrel, and the first lens barrel; the first connecting assembly, the second connecting assembly, and the third connecting assembly are used to adjust the rotation angle of the workpiece, the position of the workpiece in a first direction perpendicular to the axis, and the position of the workpiece in the axis direction, respectively. In this way, the adjustment mechanism can realize online adjustment of the workpiece, with high adjustment efficiency and adjustment precision, simple structure, small space occupation, and convenient adjustment; when the adjustment mechanism is applied to a system, the precise displacement of the workpiece can be guaranteed, thereby ensuring the performance of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic diagram of the exploded structure of the regulating mechanism provided in this embodiment;

[0019] Figure 2 Schematic diagram of the structure of the adjustment mechanism provided in this embodiment;

[0020] Figure 3 This is one of the structural diagrams of the adjustment mechanism provided in this embodiment;

[0021] Figure 4 yes Figure 3 AA cross-sectional diagram;

[0022] Figure 5 This is the second structural diagram of the adjustment mechanism provided in this embodiment;

[0023] Figure 6 yes Figure 5 BB cross-section diagram.

[0024] Icon: 1-first lens barrel; 1a-first opening; 2-second lens barrel; 2a-second opening; 3-main bracket; 3a-sliding groove; 4-adjusting bracket; 4a-limiting groove; 4b-mounting slot; 5-mounting bracket; 5a-mounting hole; 6-first positioning pin; 7-compression spring; 8-adjusting screw; 9-second fixing screw; 10-first fixing screw; 11-second pillar; 12-tension spring; 13-first pillar; 14-second positioning pin; A-axial direction; F1-first direction. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application.

[0026] In the description of this application, it should be noted that the terms "inner" and "outer" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended solely to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" and the like are used solely for distinction and should not be construed as indicating or implying relative importance.

[0027] It should also be noted that, unless otherwise expressly specified or limited, the terms "disposed" and "connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0028] For the precise position adjustment of the confocal slit in the spectral confocal measurement displacement sensor, the positioning accuracy of the slit often needs to reach the micron level. In this case, it cannot be guaranteed by processing and assembly precision. Therefore, the slit needs to be manually adjusted to meet the system usage requirements.

[0029] The existing technology generally adopts the following two methods: First, experienced personnel perform manual fine-tuning. This method requires extremely high experience and quality of the adjuster. Ordinary personnel generally cannot reach this level, and is greatly affected by the performance of the adjuster. This adjustment method is unstable and difficult to adjust; Second, use external auxiliary adjustment jigs for fine-tuning. For example, the slit to be adjusted is connected to the precision six-dimensional workbench through a jig. In an optical system with limited space, this method may not be able to place the six-dimensional table. After the six-dimensional table adjusts the slit to the appropriate position, it needs to be fixed by glue. Position offset may occur during the glue dispensing process. After the glue is cured, position offset may also occur due to stress and other reasons. After curing, if the optical system performance deteriorates due to system stress and temperature changes, it is impossible to readjust the optical system by adjusting the position of the slit. This process of using a six-dimensional table to assist in adjustment and then glue dispensing is quite unstable.

[0030] Therefore, the existing technology has great difficulty and instability in adjusting the slit. Since the slit adjustment accuracy needs to reach the micron level to meet the requirements of optical system adjustment, the existing technology has low adjustment efficiency and accuracy.

[0031] To address the aforementioned issues, embodiments of the present application provide an adjustment mechanism for adjusting the position of a slit during optical path alignment in optical devices and instruments. This mechanism allows for precise adjustment of the slit's front-to-back position (axial direction A), left-to-right position (first direction F1), and rotation angle. This adjustment mechanism allows for online adjustment of the slit's position, enabling optimal optical system performance in the product's actual operating environment, rather than in the idealized laboratory environment.

[0032] For details, please refer to Figure 1 、 Figure 2 As shown, an embodiment of the present application provides an adjustment mechanism, comprising: a first lens barrel 1, a second lens barrel 2, a main bracket 3, an adjustment bracket 4, and a mounting bracket 5 connected in sequence along an axis, the mounting bracket 5 being used to fix a workpiece; the mounting bracket 5 and the adjustment bracket 4 are connected by a first connecting component to adjust the rotation angle of the workpiece relative to the adjustment bracket 4; the adjustment bracket 4 and the main bracket 3 are connected by a second connecting component to adjust the position of the workpiece relative to the main bracket 3 in a first direction F1 perpendicular to the axial direction A; a third connecting component is provided between the main bracket 3, the second lens barrel 2 and the first lens barrel 1 to adjust the position of the workpiece relative to the first lens barrel 1 in the axial direction A.

[0033] When used in a spectral confocal displacement sensor, the adjustment mechanism of the present application can be used to precisely adjust the position of an optical slit. In addition, it can also be used to precisely adjust the position of optical components such as pinholes, lenses or lens groups, filters, and beam splitters.

[0034] The workpiece of the present application is fixed to the mounting bracket 5, generally by dispensing glue, and the mounting bracket 5 and the workpiece can be considered as one. The mounting bracket 5 is connected to the adjustment bracket 4. A first connecting component is provided between the mounting bracket 5 and the adjustment bracket 4. The first connecting component can be used to adjust the rotational position of the mounting bracket 5 relative to the adjustment bracket 4, that is, to adjust the rotation angle of the workpiece relative to the adjustment bracket 4.

[0035] The adjusting bracket 4 is connected to the main bracket 3, and a second connecting component is set between the two. The second connecting component is used to adjust the position of the adjusting bracket 4 relative to the main bracket 3 in the first direction F1. The first direction F1 in this application is Figure 1 Since the workpiece and the mounting bracket 5 are fixed, and the mounting bracket 5 is connected to the adjustment bracket 4, the workpiece, the mounting bracket 5, and the adjustment bracket 4 can be regarded as a whole to achieve the adjustment of the position of the workpiece relative to the main bracket 3 in the first direction F1.

[0036] Similarly, the main bracket 3 is connected to the second lens barrel 2, and the second lens barrel 2 is connected to the first lens barrel 1. At this time, the workpiece, the mounting bracket 5, the adjustment bracket 4, the main bracket 3, and the second lens barrel 2 are integrated. The position of the second lens barrel 2 relative to the first lens barrel 1 in the axial direction A is adjusted by the third connecting component, which is equivalent to adjusting the position of the workpiece relative to the first lens barrel 1 in the axial direction A. The first lens barrel 1 is generally fixed; the axial direction A is the axis direction of this application. Figure 1 The front-to-back direction.

[0037] It can be seen that the adjustment mechanism of the present application can realize translation adjustment of the workpiece in the axial direction A and the first direction F1, as well as rotation adjustment of the workpiece.

[0038] Thus, in the adjustment mechanism provided by the embodiment of the present application, the first lens barrel 1, the second lens barrel 2, the main support 3, the adjustment support 4, and the mounting support 5 are connected in sequence along the axis, and the workpiece is fixed on the mounting support 5; a first connecting component is provided between the mounting support 5 and the adjustment support 4, a second connecting component is provided between the adjustment support 4 and the main support 3, and a third connecting component is provided between the main support 3, the second lens barrel 2, and the first lens barrel 1; through the first connecting component, the second connecting component, and the third connecting component, the rotation angle of the workpiece, the position of the workpiece in the first direction F1 perpendicular to the axial direction A, and the position of the workpiece in the axial direction A can be adjusted respectively. In this way, the online adjustment of the workpiece can be achieved through the adjustment mechanism, and the structure is simple, the space occupied is small, and the adjustment is convenient; when the adjustment mechanism is applied to the system, the precise displacement of the workpiece can be guaranteed, thereby ensuring the performance of the system.

[0039] Specifically, if Figure 2As shown, the first connecting component includes a first positioning pin 6 and a first fixing screw 10, the mounting bracket 5 cooperates with the axial hole of the adjusting bracket 4, and a plurality of mounting holes 5a are provided on the mounting bracket 5. The plurality of mounting holes 5a are arranged perpendicular to the axial direction A. The first positioning pin 6 passes through the adjusting bracket 4 and is connected to different mounting holes 5a so that the workpiece can rotate relative to the adjusting bracket 4; the first fixing screw 10 passes through the adjusting bracket 4 and abuts against the outer wall of the mounting bracket 5 to lock the workpiece.

[0040] Mounting bracket 5 is mounted on adjustment bracket 4 via a axial hole. For example, in this application, mounting bracket 5 is a circular bracket with multiple mounting holes 5a disposed on its outer wall, distributed circumferentially. Adjustment bracket 4 is provided with mounting grooves 4b that match the shape of mounting bracket 5, and mounting bracket 5 is positioned within mounting grooves 4b. When first locating pins 6 pass through adjustment bracket 4 and connect with different mounting holes 5a, mounting bracket 5 can be rotated, thereby changing the rotation angle of the workpiece.

[0041] After adjustment is in place, the first fixing screw 10 is used to fix it. After the first fixing screw 10 passes through the adjustment bracket 4 and abuts against the outer wall of the mounting bracket 5, the mounting bracket 5 can be locked, and the workpiece is also locked.

[0042] In addition, a limiting groove 4 a is provided on the adjustment bracket 4 , and the first positioning pin 6 passes through the limiting groove 4 a and is connected to the mounting hole 5 a to limit the first positioning pin 6 along the axial direction A.

[0043] Adjustment bracket 4 has a retaining groove 4a for front and rear position control. A first locating pin 6 passes through this retaining groove 4a and connects with a different mounting hole 5a on mounting bracket 5. First locating pin 6 can rotate left and right within retaining groove 4a. The forward and backward position of first locating pin 6 within this retaining groove 4a effectively defines the front and rear position of the workpiece relative to adjustment bracket 4, allowing the workpiece to rotate only relative to adjustment bracket 4.

[0044] Adjusting the first positioning pin 6 can change the rotation angle of the workpiece without changing the front and rear position. At the same time, the mounting bracket 5 is mounted on the adjustment bracket 4 through the shaft hole, and does not interfere with the adjustment of the X-axis (axial direction A) and the Z-axis (first direction F1).

[0045] like Figure 3 、 Figure 4 As shown, the second connecting assembly includes a second fixing screw 9, an adjusting screw 8, and a compression spring 7 sleeved on the adjusting screw 8. The adjusting bracket 4 is arranged in the main bracket 3. The adjusting screw 8 and the second fixing screw 9 pass through the main bracket 3 and the adjusting bracket 4 in sequence along the first direction F1. The position of the adjusting bracket 4 relative to the main bracket 3 in the first direction F1 is adjusted by the adjusting screw 8 and the compression spring 7, and is locked by the second fixing screw 9.

[0046] The adjustment bracket 4 is installed in the main bracket 3. A sliding groove 3a is provided on the main bracket 3 along the first direction F1. The adjustment bracket 4 is clamped in the sliding groove of the main bracket 3, so that the adjustment bracket 4 can slide left and right relative to the main bracket 3 during the adjustment process and limit the movement of the front and rear position of the adjustment bracket 4.

[0047] The main bracket 3 is provided with a through groove 3b corresponding to the limiting groove 4a of the adjustment bracket 4, and the first positioning pin 6 passes through the through groove 3b, the limiting groove 4a and the mounting hole 5a in sequence; the through groove 3b has the same function as the limiting groove 4a, which is to limit the first positioning pin 6 along the axial direction A.

[0048] A compression spring 7 is sleeved on the adjusting screw 8, and the adjusting screw 8 passes through the main bracket 3 from the first direction F1 and is connected to the adjusting bracket 4. The adjusting bracket 4 is adjusted left and right on the main bracket 3 by the compression spring 7 and the adjusting screw 8. After adjusting to the appropriate position, the second fixing screw 9 is rotated to support the adjusting bracket 4 and lock it.

[0049] Adjusting the position of the adjusting screw 8 along the first direction F1 can compress the compression amount of the compression spring 7. The adjusting screw 8 is fixed to the adjusting bracket 4 through the thread on the adjusting screw 8, and the left and right position of the adjusting bracket 4 on the main bracket 3 is changed, thereby changing the left and right position of the workpiece.

[0050] To achieve precise adjustment, the adjustment accuracy of adjustment screw 8 is generally between 0.5um / degree and 1.3um / degree. The pitch within this range is considered fine, and the pitch of optical fine threads is generally between 0.2mm and 0.5mm. 0.2mm / 360 degrees = 0.5um / degree, and 0.5mm / 360 degrees = 1.3um / degree. High-precision position adjustment is achieved by combining the high-precision fine threads of adjustment screw 8 with the internal threads of main bracket 3, effectively solving the problems of poor adjustment accuracy and low efficiency during manual adjustment.

[0051] The left and right positions of the workpiece can be changed by adjusting the adjusting screw 8 without interfering with the Z-axis adjustment.

[0052] Please refer to Figure 1 、 Figure 4 The third connecting component includes a tension spring 12, the second lens barrel 2 is sleeved in the first lens barrel 1 and is threadedly connected to the first lens barrel 1, the main bracket 3 is connected to the axial holes of the first lens barrel 1 and the second lens barrel 2 respectively, and the main bracket 3 and the second lens barrel 2 are connected through the tension spring 12.

[0053] The first lens barrel 1 is connected to the second lens barrel 2 through a thread, and the position of the second lens barrel 2 relative to the first lens barrel 1 can be adjusted by rotating the thread; the first lens barrel 1 is connected to the main bracket 3 through an axis hole, and the second lens barrel 2 is also connected to the main bracket 3 through an axis hole.

[0054] A first support column 13 is provided on the first lens barrel 1 , a second support column 11 is provided on the main support 3 , and both ends of a tension spring 12 are respectively connected to the first support column 13 and the second support column 11 , so that the first support column 13 and the second support column 11 are connected together through the tension spring 12 .

[0055] For example, Figure 4 As shown, the first support 13 is arranged along a direction perpendicular to the peripheral wall of the first lens barrel 1 , and the second support 11 is arranged along the axial direction A.

[0056] The tension spring 12 fixes the main support 3 and the second lens barrel 2 together under the action of tension, and connects them through the shaft hole.

[0057] like Figure 5 、 Figure 6 As shown, the third connecting assembly further includes a second positioning pin 14 . The end of the main bracket 3 is disposed in the first lens barrel 1 . The second positioning pin 14 passes through the first lens barrel 1 and is connected to the main bracket 3 to limit the rotation of the main bracket 3 .

[0058] When the angle of the second lens barrel 2 relative to the first lens barrel 1 is changed by rotating the thread, the main bracket 3 does not change its rotation angle under the limitation of the second positioning pin 14. At this time, changing the rotation angle of the second lens barrel 2 can change the front-back position of the workpiece relative to the first lens barrel 1.

[0059] A first opening 1a is circumferentially provided on the circumferential outer wall of the first lens barrel 1, and a second opening 2a is provided on the circumferential outer wall of the second lens barrel 2 along the axial direction A. The second opening 2a is exposed through the first opening 1a, and a tool is inserted into the second opening 2a to drive the second lens barrel 2 to rotate along the first lens barrel 1 through the second opening 2a.

[0060] Figure 1 In the figure, a transverse first opening 1a is provided on the first lens barrel 1, and a longitudinal second opening 2a is provided on the second lens barrel 2. When the second lens barrel 2 is inserted into the first lens barrel 1, the positions of the second opening 2a and the first opening 1a are matched, and the second opening 2a can be exposed through the first opening 1a.

[0061] The first opening 1a and the second opening 2a are both long holes. A tool can be inserted into the second opening 2a on the second lens barrel 2 and rotated along the first opening 1a on the first lens barrel 1 to rotate the second lens barrel 2 so that the second lens barrel 2 extends or retracts relative to the first lens barrel 1, that is, the position of the second lens barrel 2 along the front-to-back direction is changed.

[0062] The front-back position of the workpiece can be changed by rotating the angle of the second lens barrel 2 , without interfering with the adjustment of the X-axis position and the rotation angle of the workpiece.

[0063] In summary, the adjustment mechanism provided in the embodiment of the present application adopts positioning pins, springs, screws and spiral rotating structures to simultaneously adjust the precise displacement in the X and Z directions and the position of the rotation angle. The positioning is guided by the positioning pins, and the springs and high-precision fine threads are combined with the spiral rotating structure to perform high-precision position adjustment. This can effectively solve the problems of poor manual adjustment accuracy and low efficiency. At the same time, it also does not require a six-dimensional stage for external auxiliary adjustment and gluing process fixation. More importantly, it can perform online fine-tuning in the actual use environment to ensure the maximum efficiency of the optical system.

[0064] The above description is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, various modifications and variations of the present application are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. An adjustment mechanism, characterized in that: include: A first lens barrel, a second lens barrel, a main bracket, an adjustment bracket, and a mounting bracket are connected in sequence along an axis, wherein the mounting bracket is used to fix a workpiece; the mounting bracket and the adjustment bracket are connected via a first connecting component to adjust the rotation angle of the workpiece relative to the adjustment bracket; the adjustment bracket and the main bracket are connected via a second connecting component to adjust the position of the workpiece relative to the main bracket in a first direction perpendicular to the axis direction; a third connecting component is provided between the main bracket, the second lens barrel, and the first lens barrel to adjust the position of the workpiece relative to the first lens barrel in the axis direction.

2. The adjustment mechanism according to claim 1, characterized in that: The first connecting component includes a first positioning pin and a first fixing screw. The mounting bracket cooperates with the axial hole of the adjusting bracket. The mounting bracket is provided with a plurality of mounting holes, and the plurality of mounting holes are arranged in a direction perpendicular to the axial line. The first positioning pin passes through the adjusting bracket and is connected to different mounting holes so that the workpiece can rotate relative to the adjusting bracket at an angle; the first fixing screw passes through the adjusting bracket and abuts against the outer wall of the mounting bracket to lock the workpiece.

3. The adjustment mechanism according to claim 2, characterized in that: The adjusting bracket is provided with a limiting groove, and the first positioning pin passes through the limiting groove and is connected with the mounting hole to limit the first positioning pin along the axial direction.

4. The adjustment mechanism according to claim 1, characterized in that: The second connecting component includes a second fixing screw, an adjusting screw, and a compression spring sleeved on the adjusting screw. The adjusting bracket is arranged in the main bracket. The adjusting screw and the second fixing screw sequentially penetrate the main bracket and the adjusting bracket along the first direction. The position of the adjusting bracket relative to the main bracket in the first direction is adjusted by the adjusting screw and the compression spring, and is locked by the second fixing screw.

5. The adjustment mechanism according to claim 4, characterized in that: The adjustment accuracy of the adjustment screw is between 0.5um / degree and 1.3um / degree.

6. The adjustment mechanism according to claim 4 or 5, characterized in that: The main bracket is provided with a sliding groove along the first direction, and the adjusting bracket is clamped in the sliding groove of the main bracket.

7. The adjustment mechanism according to claim 1, characterized in that: The third connecting component includes a tension spring, the second lens barrel is sleeved in the first lens barrel and threadedly connected to the first lens barrel, the main bracket is connected to the first lens barrel and the second lens barrel axial holes respectively, and the main bracket and the second lens barrel are connected through the tension spring.

8. The adjustment mechanism according to claim 7, characterized in that: The third connecting assembly also includes a second positioning pin. The end of the main bracket is arranged in the first lens barrel. The second positioning pin passes through the first lens barrel and is connected to the main bracket to limit the rotation of the main bracket.

9. The adjustment mechanism according to claim 7, characterized in that: A first opening is circumferentially arranged on the circumferential outer wall of the first lens barrel, and a second opening is circumferentially arranged on the circumferential outer wall of the second lens barrel along the axial direction. The second opening is exposed through the first opening, and a tool is inserted into the second opening to drive the second lens barrel to rotate along the first lens barrel through the second opening.

10. The adjustment mechanism according to any one of claims 7 to 9, characterized in that: The first lens barrel is provided with a first support column, the main support is provided with a second support column, and two ends of the tension spring are respectively connected to the first support column and the second support column.

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