A water circulation cooling control device for heat treatment annealing furnace

Abstract

The utility model provides a water circulation temperature reduction control device for a heat treatment annealing furnace, comprising a power supply circuit, a segmented temperature control circuit, a switching circuit and a PID adjustment circuit. The utility model provides a safety protection power supply through the power supply circuit, and cuts off the power supply when the equipment is overloaded or dangerous. The temperature control switch in the segmented temperature control circuit is used to detect the temperature, and provides a high-level signal to a time relay at a set temperature. The time relay is used to maintain the set temperature for a period of time during the temperature reduction process by setting the time. The switching circuit is used to switch whether the segmented temperature control circuit is enabled in the device. If the segmented temperature control circuit is not enabled, the device performs normal temperature reduction. The PID adjustment circuit performs PID adjustment on the annealing furnace by setting the temperature and utilizing a PID adjustor to reduce the temperature of the annealing furnace, thereby ensuring that the annealing furnace is accurately cooled. The signal of the segmented temperature control circuit is introduced into the PID adjustment circuit, and PID adjustment of the temperature segment is realized during the temperature reduction process.

Description

Technical Field

[0001] The utility model relates to the technical field of signal acquisition, in particular to a water circulation temperature reduction control device for a heat treatment annealing furnace. Background Art

[0002] Annealing furnace is an important equipment in the semiconductor industry, which is widely used in the preparation and process development of various semiconductor materials. Annealing furnace heats semiconductor materials to a certain temperature to improve the crystal structure, electrical properties and mechanical properties of the materials. When the semiconductor materials are cooled quickly, the crystal structure may be abnormal, and problems such as grains being too large or too small, grain boundary dislocation, etc. may occur. Therefore, it is necessary to cool down in stages during the cooling process. Through a reasonable temperature gradient, the growth rate and grain size of the crystal can be controlled, thereby affecting the crystal structure and grain boundary distribution of the wafer. In the existing technology, for the cooling annealing stage, most of the time, the system is left to cool automatically, which cannot meet the requirements of different production processes.

[0003] Announcement No. CN216585072U provides a bell-shaped bright annealing furnace multi-stage annealing control system, including a plurality of temperature sensors arranged on the bell-shaped bright annealing furnace, used to detect the temperature data of each part of the bell-shaped bright annealing furnace respectively, and its output end is connected to the input end of the PLC controller, and the output end of the PLC controller is connected to the human-computer interaction module for realizing data entry and human-computer operation; the output end of the PLC controller is connected to the frequency converter, and the frequency converter is connected to the heating module, which is used to control the current of the heating module to realize the stable operation of the heating module. However, the system is cooled by air, not only the cooling speed is slow, the cooling range is subject to the ambient temperature, but also the PID adjustment is lacking in the cooling process, and accurate temperature adjustment cannot be performed at the same time, and the system is applied to the copper production technology field, and is not suitable for the semiconductor equipment technology field.

[0004] Based on the above problems, there is an urgent need in the art for a water circulation cooling control device for a heat treatment annealing furnace that can accurately adjust the temperature, has a fast cooling speed, and has a large cooling range. Utility Model Content

[0005] The utility model aims to provide a water circulation cooling control device for a heat treatment annealing furnace to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A water circulation cooling control device for a heat treatment annealing furnace, comprising:

[0008] A power supply circuit, the power supply circuit includes a positive power supply L terminal, a circuit breaker QF1, an emergency stop button S3 and a negative power supply N terminal, one end of the circuit breaker QF1 is electrically connected to the positive power supply L terminal, and the other end is electrically connected to one end of the emergency stop button S3;

[0009] A segmented temperature control circuit, the segmented temperature control circuit includes a temperature control switch S1, a delay relay KT1 and a relay KA1, the delay relay KT1 includes a coil, a delayed normally open contact and a normally closed contact, one end of the temperature control switch S1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the delay relay KT1, the other end of the coil of the delay relay KT1 is electrically connected to the negative terminal N of the power supply, one end of the delayed normally open contact of the delay relay KT1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the relay KA1, the other end of the coil of the relay KA1 is electrically connected to the negative terminal N of the power supply, and the normally closed contact of the delay relay KT1 is connected in parallel with the delayed normally open contact of the delay relay KT1;

[0010] A switching circuit, the switching circuit includes a button SB1, a button SB2 and a contactor KM1, one end of the button SB1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the normally open contact of the relay KA1, the other end of the normally open contact of the relay KA1 is electrically connected to one end of the coil of the contactor KM1, the other end of the coil of the contactor KM1 is electrically connected to the negative terminal N of the power supply, and the button SB2 is connected in parallel with the button SB1 and the normally open contacts of the relay KA1;

[0011] PID regulation circuit, the PID regulation circuit includes a temperature sensor TP, a PID regulator, a frequency converter VF and a water-cooled circulating pump M, the power input L1 end of the PID regulator is electrically connected to the other end of the emergency stop button S3, the power output L2 end is electrically connected to the negative power supply N end, the input C1 end is electrically connected to the temperature sensor TP, the output C2 end is electrically connected to the input AI1 end of the frequency converter VF, and is used to receive temperature data from the temperature sensor TP and issue control instructions. The temperature sensor TP is installed in the annealing furnace and is used to The temperature data in the annealing furnace is detected and sent to the PID regulator. The power input L1 end of the frequency converter VF is electrically connected to the other end of the emergency stop button S3, and the power output L2 end is electrically connected to one end of the normally closed contact of the contactor KM1, which is used to receive the control instruction of the PID regulator and adjust the voltage frequency. The other end of the normally closed contact of the contactor KM1 is electrically connected to one end of the water-cooling circulation pump M, and the other end of the water-cooling circulation pump M is electrically connected to the negative terminal N of the power supply, which is used to receive the frequency-modulated voltage and change the speed of the water-cooling circulation pump.

[0012] Furthermore, the temperature sensor TP is electrically connected to the analog input interface of the PID regulator via an analog interface.

[0013] Furthermore, the segmented temperature control circuit is provided in plurality and is used to control the temperature of a plurality of temperature segments.

[0014] Furthermore, the temperature control switch S1 includes a temperature detection probe and a conversion switch. The temperature detection probe is installed in the annealing furnace and is used to detect the temperature data in the annealing furnace and convert it into a switch signal.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The utility model provides a safety protection power supply through a power supply circuit, cuts off the power supply when the equipment is overloaded or dangerous, the temperature control switch in the segmented temperature control circuit is used to detect the temperature, and provides a high-level signal to the time relay at the set temperature. The time relay is used to maintain the set temperature for a period of time during the cooling process by setting the time, the switching circuit is used to switch whether the segmented temperature control circuit is enabled for the device, if the segmented temperature control circuit is not enabled, the device performs normal cooling, the PID adjustment circuit performs PID adjustment on the annealing furnace by setting the temperature, and ensures that the annealing furnace is accurately cooled, the signal of the segmented temperature control circuit is introduced into the PID adjustment circuit, and the PID adjustment of the temperature segment is realized during the cooling process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the circuit structure of the utility model. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Example:

[0020] See also Figure 1 , the utility model provides a technical solution:

[0021] A water circulation cooling control device for a heat treatment annealing furnace, comprising a power supply circuit, a segmented temperature control circuit, a switching circuit and a PID adjustment circuit, wherein;

[0022] The power supply circuit includes a positive power supply L terminal, a circuit breaker QF1, an emergency stop button S3 and a negative power supply N terminal. The circuit breaker QF1 is an air circuit breaker of model DZ47S-20A. One end of the circuit breaker QF1 is electrically connected to the positive power supply L terminal, and the other end is electrically connected to one end of the emergency stop button S3. The emergency stop button S3 is a self-locking emergency stop button of model LA38-11ZS.

[0023] The circuit breaker QF1 and the emergency stop button S3 are connected in series in the positive power line. When the circuit is overloaded or short-circuited, the circuit breaker QF1 disconnects the power supply to protect the circuit. In dangerous situations, you can press the emergency stop button S3 to cut off the power supply in an emergency to protect the circuit safety.

[0024] The segmented temperature control circuit includes a temperature control switch S1, a time delay relay KT1 and a relay KA1. The time delay relay KT1 includes a coil, a time delay normally open contact and a normally closed contact. The temperature control switch S1 is a KTS011 temperature mechanical switch installed in the annealing furnace. One end of the temperature control switch S1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the time delay relay KT1. The time delay relay KT1 is an H3Y-2-C power-on delay relay. The other end of the coil of the delay relay KT1 is electrically connected to the negative terminal N of the power supply, one end of the delayed normally open contact of the delay relay KT1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the relay KA1. The relay KA1 model is an AC intermediate relay of MY2NJMY4NJ. The other end of the coil of the relay KA1 is electrically connected to the negative terminal N of the power supply, and the normally closed contact of the delay relay KT1 is connected in parallel with the delayed normally open contact of the delay relay KT1.

[0025] By setting the temperature of the temperature control switch S1 in stages, when the temperature drops to the set stage temperature, the internal contacts of the temperature control switch S1 close and send a voltage signal to the delay relay KT1. First, set the time of the delay relay KT1. When the delay relay KT1 receives the voltage signal, the internal coil is energized to control the normally closed contact to open immediately, and the delayed normally open contact is attracted after the delay setting time. During the process of the normally closed contact of the delay relay KT1 being immediately opened and the delayed normally open contact being closed, the relay KA1 coil is powered on again after a delay. Therefore, when the relay KA1 reaches the set stage temperature, a pause control signal is generated.

[0026] Furthermore, the segmented temperature control circuit is provided with a plurality of them, and is used to control the temperature of a plurality of temperature segments. By setting the temperature drop gradient in segments for different temperature control switches S1, a plurality of pause control signals are generated at different segmented temperature settings.

[0027] Furthermore, the temperature control switch S1 includes a temperature detection probe and a conversion switch. The temperature detection probe is installed in the annealing furnace and is used to detect the temperature data in the annealing furnace and convert it into a switch signal.

[0028] The switching circuit includes a button SB1, a button SB2 and a contactor KM1. The button SB1 is a flat-head self-locking button with a model number of XB2BA31C. One end of the button SB1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the normally open contact of the relay KA1. The other end of the normally open contact of the relay KA1 is electrically connected to one end of the coil of the contactor KM1. The contactor KM1 is an AC contactor with a model number of CJX2-0910. The other end of the coil of the contactor KM1 is electrically connected to the negative terminal N of the power supply. The button SB2 is a flat-head self-locking button with a model number of XB2BA31C. The button SB2 is connected in parallel with the button SB1 and the normally open contacts of the relay KA1.

[0029] When button SB1 is pressed, contactor KM1 is energized under the control of relay KA1, and the circuit is automatically controlled. When button SB2 is pressed, contactor KM1 can be directly controlled, thereby realizing the switching between manual and automatic control.

[0030] A PID regulation circuit, the PID regulation circuit includes a temperature sensor TP, a PID regulator, a frequency converter VF and a water-cooled circulation pump M. The PID regulator model is a temperature controller of AI-207. The power input L1 end of the PID regulator is electrically connected to the other end of the emergency stop button S3, the power output L2 end is electrically connected to the negative power supply N end, the input C1 end is electrically connected to the temperature sensor TP, and the output C2 end is electrically connected to the input AI1 end of the frequency converter VF, which is used to receive temperature data from the temperature sensor TP and issue control instructions. The temperature sensor TP model is a probe-type thermocouple of WRNK-191, which is installed in the annealing furnace and is used to detect the temperature data in the annealing furnace and send it to the PID regulator. Further, the temperature sensor TP is electrically connected to the analog input interface of the PID regulator through an analog interface.

[0031] The inverter VF model is an inverter of XMZG120. The power input L1 end of the inverter VF is electrically connected to the other end of the emergency stop button S3, and the power output L2 end is electrically connected to one end of the normally closed contact of the contactor KM1, which is used to receive the control instruction of the PID regulator and adjust the voltage frequency. The other end of the normally closed contact of the contactor KM1 is electrically connected to one end of the water-cooled circulating pump M. The water-cooled circulating pump M is a vertical circulating pump of NANFTD32-40D. The water-cooled circulating pump M includes two parts, a motor and a pump head. The other end of the motor part of the water-cooled circulating pump M is electrically connected to the negative electrode N end of the power supply, which is used to receive the voltage after frequency modulation and change the speed of the water-cooled circulating pump. The pump head part is connected to the circulating water pipe, which is used to draw circulating water to the annealing furnace for cooling.

[0032] When the heat treatment annealing furnace is annealing and cooling, the cooling target temperature is first set for the PID regulator, and the temperature sensor TP collects the temperature data in the annealing furnace in real time, and then sends it to the PID regulator. The PID regulator sends a PID control instruction to the frequency converter VF according to the real-time temperature data. The frequency converter VF changes the voltage frequency according to the PID control instruction and sends it to the water-cooled circulating pump M. The water-cooled circulating pump M adjusts the pump head speed according to the voltage frequency, changes the flow rate of circulating water, and plays a role in adjusting the cooling speed of the annealing furnace. Since the normally closed contact of the contactor KM1 is connected in series between the frequency converter VF and the water-cooled circulating pump M, the contactor KM1 generates a pause control signal at the temperature setting value when the segmented temperature control circuit generates an electric control signal, and the coil of the contactor KM1 is energized to control the normally closed contact to be disconnected, so the water-cooled circulating pump M is powered off and stopped, thereby realizing segmented cooling control at the cooling setting temperature.

[0033] The working principle of the utility model;

[0034] When in use, a safety protection power supply is provided through the power circuit, and the power supply is cut off when the equipment is overloaded or dangerous. The temperature control switch in the segmented temperature control circuit is used to detect the temperature and provide a high-level signal to the time relay at the set temperature. The time relay is used to maintain the set temperature for a period of time during the cooling process by setting the time. The switching circuit is used to switch whether the segmented temperature control circuit is enabled for the device. If the segmented temperature control circuit is not enabled, the device cools down normally. The PID adjustment circuit sets the temperature and uses the PID regulator to cool down the annealing furnace PID to ensure that the annealing furnace is accurately cooled. The signal of the segmented temperature control circuit is introduced into the PID adjustment circuit to realize PID adjustment of the temperature segment during the cooling process.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A water circulation cooling control device for a heat treatment annealing furnace, characterized in that: include: A power supply circuit, the power supply circuit includes a positive power supply L terminal, a circuit breaker QF1, an emergency stop button S3 and a negative power supply N terminal, one end of the circuit breaker QF1 is electrically connected to the positive power supply L terminal, and the other end is electrically connected to one end of the emergency stop button S3; A segmented temperature control circuit, the segmented temperature control circuit includes a temperature control switch S1, a delay relay KT1 and a relay KA1, the delay relay KT1 includes a coil, a delayed normally open contact and a normally closed contact, one end of the temperature control switch S1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the delay relay KT1, the other end of the coil of the delay relay KT1 is electrically connected to the negative terminal N of the power supply, one end of the delayed normally open contact of the delay relay KT1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the coil of the relay KA1, the other end of the coil of the relay KA1 is electrically connected to the negative terminal N of the power supply, and the normally closed contact of the delay relay KT1 is connected in parallel with the delayed normally open contact of the delay relay KT1; A switching circuit, the switching circuit includes a button SB1, a button SB2 and a contactor KM1, one end of the button SB1 is electrically connected to the other end of the emergency stop button S3, and the other end is electrically connected to one end of the normally open contact of the relay KA1, the other end of the normally open contact of the relay KA1 is electrically connected to one end of the coil of the contactor KM1, the other end of the coil of the contactor KM1 is electrically connected to the negative terminal N of the power supply, and the button SB2 is connected in parallel with the button SB1 and the normally open contacts of the relay KA1; PID regulation circuit, the PID regulation circuit includes a temperature sensor TP, a PID regulator, a frequency converter VF and a water-cooled circulating pump M, the power input L1 end of the PID regulator is electrically connected to the other end of the emergency stop button S3, the power output L2 end is electrically connected to the negative power supply N end, the input C1 end is electrically connected to the temperature sensor TP, the output C2 end is electrically connected to the input AI1 end of the frequency converter VF, and is used to receive temperature data from the temperature sensor TP and issue control instructions. The temperature sensor TP is installed in the annealing furnace and is used to The temperature data in the annealing furnace is detected and sent to the PID regulator. The power input L1 end of the frequency converter VF is electrically connected to the other end of the emergency stop button S3, and the power output L2 end is electrically connected to one end of the normally closed contact of the contactor KM1, which is used to receive the control instruction of the PID regulator and adjust the voltage frequency. The other end of the normally closed contact of the contactor KM1 is electrically connected to one end of the water-cooling circulation pump M, and the other end of the water-cooling circulation pump M is electrically connected to the negative terminal N of the power supply, which is used to receive the frequency-modulated voltage and change the speed of the water-cooling circulation pump.

2. A water circulation cooling control device for a heat treatment annealing furnace according to claim 1, characterized in that: The temperature sensor TP is electrically connected to the analog input interface of the PID regulator through an analog interface.

3. A water circulation cooling control device for a heat treatment annealing furnace according to claim 1, characterized in that: The segmented temperature control circuits are provided in plurality and are used for controlling the temperature of a plurality of temperature segments.

4. A water circulation cooling control device for a heat treatment annealing furnace according to claim 3, characterized in that: The temperature control switch S1 includes a temperature detection probe and a conversion switch. The temperature detection probe is installed in the annealing furnace and is used to detect the temperature data in the annealing furnace and convert it into a switch signal.

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