Chemical adding device for silicon wafer cleaning

Abstract

The utility model discloses a silicon wafer cleaning and dosing device, which comprises one or more medicament barrels, one or more dosing devices and one or more dosing devices, the diluent barrel is filled with a diluent; the raw medicament and the diluent are mixed in the mixing barrel to obtain a diluted medicament; the first pipeline group is arranged between the medicament barrel and the mixing barrel, and the raw medicament in the medicament barrel flows into the mixing barrel through the first pipeline group; the second pipeline group is arranged between the diluent barrel and the mixing barrel, and the diluent in the diluent barrel flows into the mixing barrel through the second pipeline group; the third pipeline group is arranged between the mixing barrel and the terminal medication equipment, and the diluted medicament in the mixing barrel flows into the terminal medication equipment through the third pipeline group; flowmeters and water pumps are arranged on the first pipeline set, the second pipeline set and the third pipeline set. The dosing device can be used for preparing chemicals according to different proportions and automatically dosing multiple terminal devices at the same time, so that the labor cost is reduced, the dosing precision is improved, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a silicon wafer cleaning and dosing device. Background Art

[0002] The photovoltaic silicon wafer cleaning workshop can realize the degumming, inserting and cleaning operations after silicon wafer slicing. The main equipment is the silicon wafer degumming machine and the silicon wafer inserting cleaning-in-one machine, or the fully automatic degumming inserting cleaning all-in-one machine. Different agents need to be added during the equipment cleaning process to achieve the cleaning effect. A production workshop is often equipped with dozens of equipment, and each equipment has multiple dosing points for different agents. At present, there are two types of manual dosing and automatic dosing of undiluted stock solution.

[0003] Manual dosing requires manpower and the dosing process cannot be recorded and traced.

[0004] To automatically add undiluted stock solution, the liquid in the raw material barrel must first be pumped into the reagent metering box equipped with the equipment through a pump, and then measured by the liquid level meter installed in the reagent box, and the stock solution is pumped into the corresponding reagent tank through pipes and valves. The accuracy of dosing is affected by the measurement accuracy of the liquid level meter, which has a greater impact on the error.

[0005] In addition, both manual dosing and automatic dosing of undiluted raw materials require the equipment to be shut down, and production can only be started after the chemicals are evenly mixed in the tank, which affects the normal production rhythm of the equipment.

[0006] The above information disclosed in the background technology is only used to increase the understanding of the background technology of the present application, and therefore, it may include information that does not constitute the prior art known to ordinary technicians in the field. Summary of the invention

[0007] In view of the problems pointed out in the background technology, the utility model proposes a silicon wafer cleaning and dosing device, which can prepare medicines according to different ratios and automatically dosing to multiple terminal devices at the same time, thereby reducing labor costs, improving dosing accuracy, and improving cleaning efficiency.

[0008] In order to achieve the above-mentioned utility model purpose, the utility model adopts the following technical solutions:

[0009] The utility model provides a silicon wafer cleaning and dosing device, comprising:

[0010] There are one or more medicine barrels, wherein the medicine barrels contain the original medicine;

[0011] A diluent barrel, which contains diluent;

[0012] A mixing barrel, in which the original agent and the diluent are mixed to obtain a diluted agent;

[0013] A first pipeline group is arranged between the medicine barrel and the mixing barrel, and the original medicine in the medicine barrel flows into the mixing barrel through the first pipeline group;

[0014] A second pipeline group is arranged between the diluent barrel and the mixing barrel, and the diluent in the diluent barrel flows into the mixing barrel through the second pipeline group;

[0015] A third pipeline group is arranged between the mixing barrel and the terminal medication device, and the diluted medicine in the mixing barrel flows into the terminal medication device through the third pipeline group;

[0016] The first pipeline group, the second pipeline group and the third pipeline group are provided with flow meters and water pumps.

[0017] In some embodiments, the first pipeline group includes a first pipeline and an original drug pump assembly, one end of the first pipeline is connected to the liquid outlet end of the original drug pump assembly, and the other end is connected to the first liquid filling port of the mixing barrel;

[0018] The medicine barrel includes a plurality of medicine sub-barrels, and the plurality of medicine sub-barrels are connected to the first pipeline through the raw medicine pump assembly, and a switching valve is arranged on the connecting pipeline between the medicine sub-barrels and the raw medicine pump assembly.

[0019] In some embodiments, the raw drug pump assembly includes a main pipeline, the drug barrels are connected to the first pipeline through the main pipeline, a metering pump and a first flow transmitter are arranged on the main pipeline, the first flow transmitter is located downstream of the metering pump, and a pulse damper is arranged on the outlet pipeline of the metering pump.

[0020] In some embodiments, the raw drug pump assembly includes a pressure relief bypass, one end of which is connected to the outlet pipeline of the metering pump, and the other end is connected to the inlet pipeline of the metering pump. A pressure relief valve and a first pressure transmitter are arranged on the pressure relief bypass, and the first pressure transmitter is arranged upstream of the pressure relief valve.

[0021] In some embodiments, the second pipeline group includes a second pipeline, one end of which is connected to the liquid outlet of the diluent barrel, and the other end is connected to the second liquid filling port of the mixing barrel, and a first water pump, a second pressure transmitter and a second flow transmitter are arranged on the second pipeline.

[0022] In some embodiments, a heater is disposed on the second pipeline, and the heater is configured to heat the liquid flowing through the second pipeline.

[0023] In some embodiments, the second pipeline group includes an auxiliary pipeline, one end of which is connected to the outlet pipeline of the heater, and the other end of which is connected to the liquid return port of the diluent barrel.

[0024] In some embodiments, the third pipeline group includes a third pipeline, one end of which is connected to the liquid outlet of the mixing barrel, and at least one dosing pipeline is connected to the third pipeline, and the dosing pipeline is configured to add medicine to the terminal medication device.

[0025] In some embodiments, an agitator is disposed in the mixing barrel, and the agitator is configured to stir the diluent and the original agent in the mixing barrel.

[0026] In some embodiments, the plurality of medicine barrels contain different raw medicines.

[0027] Compared with the prior art, the advantages and positive effects of the utility model are:

[0028] The dosing device disclosed in the present application can quantitatively meter and add one or more groups of drugs, prepare them and automatically deliver them to the terminal dosing port at multiple points according to the requirements of silicon wafer cleaning and different drug formulas in a specified order. The system has a self-calibration function for metering accuracy, and uses the original drug metering pump, flow meter, and liquid level meter to interlock the flow accuracy, and can provide real-time feedback on metering accuracy. The dosing device can realize dosing at any time during the production process without the need for equipment shutdown or production suspension.

[0029] After reading the specific embodiments of the present invention in conjunction with the accompanying drawings, other features and advantages of the present invention will become more clear. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 A structural diagram of a silicon wafer cleaning and dosing device according to some embodiments;

[0032] Figure 2 is a structural diagram of an original drug pump assembly according to some embodiments;

[0033] Reference numerals:

[0034] 100. Drug barrels;

[0035] 200, dilution liquid barrel; 210, third liquid filling port; 220, first observation port; 230, first sewage outlet;

[0036] 300, mixing barrel; 310, first liquid adding port; 320, second liquid adding port; 330, second observation port; 340, stirrer; 350, second sewage outlet;

[0037] 400, first pipeline group; 410, first pipeline; 420, original drug pump assembly; 421, main pipeline; 422, pressure relief bypass; 423, pulse damper; 424, metering pump; 425, tee; 426, union; 4271, first flow transmitter; 4272, first pressure transmitter; 4273, first valve; 4274, second valve; 4275, third valve; 4276, fourth valve; 4277, pressure relief valve; 430, switching valve;

[0038] 500, second pipeline group; 510, second pipeline; 520, heater; 530, auxiliary pipeline; 541, first water pump; 542, second pressure transmitter; 543, second flow transmitter;

[0039] 600, third pipeline group; 610, third pipeline; 611, second water pump; 612, third pressure transmitter; 613, third flow transmitter; 620, dosing pipeline. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0041] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0042] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0043] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0045] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are merely examples, and the purpose is not to limit the utility model. In addition, the utility model may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and / or the use of other materials.

[0046] The present embodiment provides a silicon wafer cleaning and dosing device, which is used to automatically add cleaning agents to the silicon wafer cleaning equipment. The added agent is the agent diluted by mixing the original agent with the diluent, that is, the silicon wafer cleaning and dosing device of the present embodiment mixes the original agent with the diluent to obtain the diluted agent, and the dosing device automatically adds the diluted agent to the silicon wafer cleaning equipment, thereby realizing the automatic addition of the diluted agent. The silicon wafer cleaning equipment does not need to be shut down during the dosing process, thereby improving the operating efficiency and ensuring the silicon wafer cleaning effect.

[0047] The silicon wafer cleaning equipment can be a silicon wafer degumming machine, a silicon wafer cleaning machine, a silicon wafer insertion and cleaning machine, a silicon wafer chip cutting machine, etc.

[0048] Reference Figure 1The dosing device includes a medicine barrel, and the medicine barrel has one or more medicine barrels. The medicine barrel contains raw medicine. The medicine barrel contains different types of raw medicine. According to the silicon wafer cleaning requirements, the required types of raw medicine are added to the mixing barrel 300 through different medicine barrels.

[0049] The dosing device comprises a diluent barrel 200, and the diluent barrel 200 contains a diluent. The diluent is, for example, water.

[0050] The dosing device includes a mixing barrel 300, and the original medicine and the diluent are mixed in the mixing barrel 300 to obtain the diluted medicine. That is, the medicine barrel adds the original medicine into the mixing barrel 300, and the diluent barrel 200 adds the diluent into the mixing barrel 300, and the original medicine and the diluent are mixed in the mixing barrel 300 to obtain the diluted medicine.

[0051] The dosing device includes a first pipeline group 400, which is arranged between the medicine barrel and the mixing barrel 300. The original medicine in the medicine barrel flows into the mixing barrel 300 through the first pipeline group 400.

[0052] The dosing device includes a second pipeline group 500, which is disposed between the diluent barrel 200 and the mixing barrel 300. The diluent in the diluent barrel 200 flows into the mixing barrel 300 through the second pipeline group 500.

[0053] The dosing device includes a third pipeline group 600, which is placed between the mixing barrel 300 and the terminal drug-using equipment. The diluent in the mixing barrel 300 flows into the terminal drug-using equipment through the third pipeline group 600. The terminal drug-using equipment is, for example, the silicon wafer cleaning equipment mentioned above.

[0054] Flow meters and water pumps are provided on the first pipeline group 400 , the second pipeline group 500 and the third pipeline group 600 .

[0055] The water pump on the first pipeline group 400 is used to provide flow power for the original medicine in the first pipeline group 400. The flow meter on the first pipeline group 400 is used to measure the flow rate of the original medicine flowing through the first pipeline group 400 and detect the amount of the original medicine added to the mixing barrel 300.

[0056] The water pump on the second pipeline group 500 is used to provide flow power for the diluent in the second pipeline group 500. The flow meter on the second pipeline group 500 is used to measure the flow rate of the diluent flowing through the second pipeline group 500 and detect the amount of the diluent added to the mixing barrel 300.

[0057] The water pump on the third pipeline group 600 is used to provide flow power for the diluent in the third pipeline group 600. The flow meter on the third pipeline group 600 is used to measure the flow of the diluent flowing through the third pipeline group 600, detect the amount of diluent added to the terminal medication device, meet the silicon wafer cleaning requirements, and ensure the silicon wafer cleaning effect.

[0058] By adjusting the amount of the original reagent and the diluent added to the mixing barrel 300, the diluent with different ratios can be obtained to meet the different cleaning requirements of the silicon wafer.

[0059] In some embodiments, multiple medicine barrels contain different raw medicines.

[0060] Figure 1 Take the example that the dosing device includes two medicine barrels, which are respectively denoted as medicine barrel A and medicine barrel B. Medicine barrel A contains medicine A, and medicine barrel B contains medicine B, and medicine barrel B is omitted and not shown. Medicine barrel A is connected to the mixing barrel 300 through a first pipeline group 400. Medicine barrel B is connected to the mixing barrel 300 through another first pipeline group 400 of the same structure. The top of the mixing barrel 300 is provided with a liquid addition port for medicine A and a liquid addition port for medicine B, which are respectively denoted as a first liquid addition port 310A and a first liquid addition port 310B. The medicine A in the medicine barrel A flows into the mixing barrel 300 through the first liquid addition port 310A, and the medicine B in the medicine barrel B flows into the mixing barrel 300 through the first liquid addition port 310B.

[0061] When the terminal medication device needs medicine A, the first pipeline group 400 between the medicine barrel A and the mixing barrel 300 is opened, and the first pipeline group 400 between the medicine barrel B and the mixing barrel 300 is closed.

[0062] When the terminal medication device needs medicine B, the first pipeline group 400 between the medicine barrel A and the mixing barrel 300 is closed, and the first pipeline group 400 between the medicine barrel B and the mixing barrel 300 is opened.

[0063] In some embodiments, reference Figure 1 and Figure 2 The first pipeline group 400 includes a first pipeline 410 and a raw drug pump assembly 420. One end of the first pipeline 410 is connected to the liquid outlet of the raw drug pump assembly 420, and the other end is connected to the first liquid filling port 310 at the top of the mixing barrel 300.

[0064] The medicine barrel includes a plurality of medicine sub-barrels 100 , which are connected to the first pipeline 410 through the original medicine pump assembly 420 , and a switching valve 430 is arranged on the connecting pipeline between the medicine sub-barrels 100 and the original medicine pump assembly 420 .

[0065] The same type of raw medicine is contained in multiple medicine sub-barrels 100. Multiple medicine sub-barrels 100 add raw medicine to the mixing barrel 300 at the same time; or, raw medicine is added to the mixing barrel 300 one by one, and when the raw medicine in one of the medicine sub-barrels 100 is used up, another medicine sub-barrel 100 adds raw medicine to the mixing barrel 300.

[0066] exist Figure 1 and Figure 2In the specific embodiment shown, the medicine barrel A includes two medicine sub-barrels 100A, which are respectively recorded as medicine sub-barrel 100A-1 and medicine sub-barrel 100A-2, and the medicine sub-barrel 100A-1 and the medicine sub-barrel 100A-2 are connected to the original medicine pump assembly 420 through a tee 425. Switching valves 430 are respectively provided on the connecting pipelines between the medicine sub-barrel 100A-1 and the tee 425, and between the medicine sub-barrel 100A-2 and the tee 425.

[0067] A plurality of reagent sub-barrels 100 are provided to realize continuous dosing of the original reagent without stopping the machine, thereby improving dosing efficiency.

[0068] In some embodiments, reference Figure 2 The original medicine pump assembly 420 includes a main pipeline 421, and the medicine sub-barrel 100 is connected to the first pipeline 410 through the main pipeline 421. A metering pump 424 and a first flow transmitter 4271 are arranged on the main pipeline 421, and the first flow transmitter 4271 is located downstream of the metering pump 424. A pulse damper 423 is arranged on the outlet pipeline of the metering pump 424.

[0069] A first valve 4273 is provided on the main pipeline 421, and the first valve 4273 is located downstream of the first flow transmitter 4271. A second valve 4274 is provided on the pipeline of the pulse damper 423.

[0070] In some embodiments, the tee 425 is connected to the main pipe 421 via a flexible joint 426 to facilitate quick disassembly and replacement.

[0071] In some embodiments, the original drug pump assembly 420 includes a pressure relief bypass 422, one end of the pressure relief bypass 422 is connected to the outlet pipeline of the metering pump 424, and the other end is connected to the inlet pipeline of the metering pump 424. A pressure relief valve 4277 and a first pressure transmitter 4272 are arranged on the pressure relief bypass 422, and the first pressure transmitter 4272 is arranged upstream of the pressure relief valve 4277.

[0072] In a specific embodiment, one end of the pressure relief bypass 422 is connected to the connecting pipe section between one of the reagent sub-barrels 100 and the main pipe 421 .

[0073] The first pressure transmitter 4272 is interlocked with the switching valve 430. By detecting the pressure change in the pipeline, the system automatically determines that the medicine in the medicine barrel 100 is exhausted, completes the automatic switching, and alarms to remind the user to add the original medicine to the empty medicine barrel 100 in time.

[0074] A third valve 4275 and a fourth valve 4276 are provided on the pressure relief bypass 422 . The third valve 4275 is located downstream of the pressure relief valve 4277 , and the fourth valve 4276 is located upstream of the first pressure transmitter 4272 .

[0075] In some embodiments, the second pipeline group 500 includes a second pipeline 510, one end of the second pipeline 510 is connected to the bottom liquid outlet of the diluent barrel 200, and the other end is connected to the second liquid filling port 320 at the top of the mixing barrel 300. The second pipeline 510 is provided with a first water pump 541, a second pressure transmitter 542 and a second flow transmitter 543.

[0076] A first sewage outlet 230 is provided at the bottom of the dilution liquid barrel 200 , and the first sewage outlet 230 is connected to the sewage pipe network of the factory area.

[0077] A third liquid filling port 210 is disposed on the top of the diluent barrel 200 , and the third liquid filling port 210 is connected to the diluent pipe network in the factory area.

[0078] In some embodiments, a heater 520 is disposed on the second pipeline 510, and the heater 520 is configured to heat the liquid flowing through the second pipeline 510. The heater 520 is disposed between the second pressure transmitter 542 and the second flow transmitter 543.

[0079] The diluent flowing out of the diluent barrel 200 flows into the mixing barrel 300 via the second pipe 510 . When the diluent flows through the second pipe 510 , the heater 520 heats the diluent. The heated diluent then flows into the mixing barrel 300 .

[0080] When it is not necessary to heat the diluent, the heater 520 is turned off.

[0081] In some embodiments, the second pipeline group 500 includes an auxiliary pipeline 530 , one end of which is connected to the outlet pipeline of the heater 520 , and the other end of which is connected to the top liquid return port of the diluent barrel 200 .

[0082] When there is no need to add diluent to the mixing barrel 300 , the connecting pipeline between the heater 520 and the mixing barrel 300 is closed, the auxiliary pipeline 530 is opened, and the diluent flowing out of the heater 520 flows back into the diluent barrel 200 .

[0083] Valves (not shown) are respectively provided on the pipeline between the outlet end of the heater 520 and the mixing barrel 300 and the pipeline between the outlet end of the heater 520 and the diluent barrel 200 to control the opening or closing of the corresponding pipelines.

[0084] In some embodiments, the third pipeline group 600 includes a third pipeline 610, one end of which is connected to the bottom liquid outlet of the mixing barrel 300, and at least one dosing pipeline 620 is connected to the third pipeline 610, and the dosing pipeline 620 is configured to add medicine to the terminal medication device.

[0085] The third pipeline 610 is provided with a second water pump 611 , a third pressure transmitter 612 and a third flow transmitter 613 .

[0086] The second water pump 611 is used as a distribution pump to perform constant pressure control and automatically matches the delivery pressure in the pipeline according to the distance of the terminal dosing port, the number of dosing ports opened, etc.

[0087] A second sewage outlet 350 is provided at the bottom of the mixing barrel 300, and the second sewage outlet 350 is connected to the sewage pipe network of the factory area.

[0088] In some embodiments, the mixing barrel 300 is configured with external dimensions according to the required volume of the device, and its cross section is generally circular, but may also be square, circular, or other forms that are easy to manufacture and use.

[0089] An agitator 340 is disposed in the mixing barrel 300 , and the agitator 340 is configured to agitate the diluent and the original agent in the mixing barrel 300 .

[0090] A second observation port 330 is provided on the top of the mixing barrel 300 to facilitate observation of the liquid in the mixing barrel 300 .

[0091] A liquid level gauge is provided on the top of the mixing barrel 300 to measure the liquid level in the barrel.

[0092] In some embodiments, the diluent barrel 200 is configured with dimensions according to the required volume of the device, and its cross section is generally circular, but may also be square, circular or other forms that are easy to manufacture and use.

[0093] A first observation port 220 is disposed on the top of the diluent barrel 200 to facilitate observation of the liquid in the diluent barrel 200 .

[0094] A liquid level gauge is provided on the top of the dilution liquid barrel 200 to measure the liquid level in the barrel.

[0095] In some embodiments, the liquid inlets at the tops of the diluent barrel 200 and the mixing barrel 300 are arranged close to the circumferential wall of the barrel body.

[0096] The dosing device disclosed in the present application performs quantitative metering addition and preparation of one or more groups of reagents according to the requirements of silicon wafer cleaning, according to different reagent formulas, and in a specified order, and automatically delivers them to the terminal dosing port at multiple points.

[0097] The dosing device disclosed in the present application has a self-calibration function for metering accuracy, and uses an original drug metering pump, a flow meter, and a liquid level meter to interlock flow accuracy, and can provide real-time feedback on metering accuracy.

[0098] The dosing device disclosed in the present application can realize dosing of drugs at any time during the production process without stopping the equipment or production.

[0099] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0100] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited to this. Any changes or substitutions that can be easily thought of by technicians familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A silicon wafer cleaning and dosing device, characterized in that: include: There are one or more medicine barrels, wherein the medicine barrels contain the original medicine; A diluent barrel, which contains diluent; A mixing barrel, in which the original agent and the diluent are mixed to obtain a diluted agent; A first pipeline group is arranged between the medicine barrel and the mixing barrel, and the original medicine in the medicine barrel flows into the mixing barrel through the first pipeline group; A second pipeline group is arranged between the diluent barrel and the mixing barrel, and the diluent in the diluent barrel flows into the mixing barrel through the second pipeline group; A third pipeline group is arranged between the mixing barrel and the terminal medication device, and the diluted medicine in the mixing barrel flows into the terminal medication device through the third pipeline group; The first pipeline group, the second pipeline group and the third pipeline group are provided with flow meters and water pumps.

2. The silicon wafer cleaning and dosing device according to claim 1, characterized in that: The first pipeline group includes a first pipeline and a raw drug pump assembly, one end of the first pipeline is connected to the liquid outlet end of the raw drug pump assembly, and the other end is connected to the first liquid filling port of the mixing barrel; The medicine barrel includes a plurality of medicine sub-barrels, and the plurality of medicine sub-barrels are connected to the first pipeline through the raw medicine pump assembly, and a switching valve is arranged on the connecting pipeline between the medicine sub-barrels and the raw medicine pump assembly.

3. The silicon wafer cleaning and dosing device according to claim 2, characterized in that: The original drug pump assembly includes a main pipeline, the drug barrels are connected to the first pipeline through the main pipeline, a metering pump and a first flow transmitter are arranged on the main pipeline, the first flow transmitter is located downstream of the metering pump, and a pulse damper is arranged on the outlet pipeline of the metering pump.

4. The silicon wafer cleaning and dosing device according to claim 3, characterized in that: The original drug pump assembly includes a pressure relief bypass, one end of which is connected to the outlet pipeline of the metering pump, and the other end is connected to the inlet pipeline of the metering pump. A pressure relief valve and a first pressure transmitter are arranged on the pressure relief bypass, and the first pressure transmitter is arranged upstream of the pressure relief valve.

5. The silicon wafer cleaning and dosing device according to claim 1, characterized in that: The second pipeline group includes a second pipeline, one end of which is connected to the liquid outlet of the diluent barrel, and the other end is connected to the second liquid filling port of the mixing barrel. The second pipeline is provided with a first water pump, a second pressure transmitter and a second flow transmitter.

6. The silicon wafer cleaning and dosing device according to claim 5, characterized in that: A heater is disposed on the second pipeline, and the heater is configured to heat the liquid flowing through the second pipeline.

7. The silicon wafer cleaning and dosing device according to claim 6, characterized in that: The second pipeline group includes an auxiliary pipeline, one end of which is connected to the outlet pipeline of the heater, and the other end of which is connected to the liquid return port of the diluent barrel.

8. The silicon wafer cleaning and dosing device according to claim 1, characterized in that: The third pipeline group includes a third pipeline, one end of which is connected to the liquid outlet of the mixing barrel, and at least one dosing pipeline is connected to the third pipeline, and the dosing pipeline is configured to add medicine to the terminal medication device.

9. The silicon wafer cleaning and dosing device according to any one of claims 1 to 8, characterized in that: A stirrer is arranged in the mixing barrel, and the stirrer is configured to stir the diluent and the original agent in the mixing barrel.

10. The silicon wafer cleaning and dosing device according to any one of claims 1 to 8, characterized in that: The multiple medicine barrels contain different original medicines.

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