Silicon rod cutting and grinding all-in-one machine
By designing a cutting and grinding integrated machine that integrates silicon rod square and grinding functions, the problems of complex operation and inefficiency of existing equipment are solved, efficient silicon rod processing is achieved, and product quality and production efficiency are improved.
Patent Information
- Application Number
- CN202421350692.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2023-07-14
- Filing Date
- 2024-06-13
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2034-06-13
AI Technical Summary
The existing silicon rod processing equipment is complex, inconvenient to operate, poor cutting quality and low efficiency, making it difficult to meet the demand for high-quality silicon wafers in the field of photovoltaic solar power generation.
A silicon rod cutting and grinding integrated machine is designed, including silicon rod square cutting equipment and silicon rod grinding equipment. Through mutually connected equipment, the silicon rod with round cross-section is square cutting, grinding surface and chamfering operations are achieved to achieve multi-process integrated operation.
It improves production efficiency, reduces costs, improves the quality of product processing operations, and solves the problems of complex equipment, inconvenient operation and low cutting quality.
Smart Images

Figure CN222779814U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of silicon workpiece processing, and in particular to a silicon rod cutting and grinding machine and a cutting and grinding method thereof, a silicon rod squaring device, and a silicon rod grinding device. Background Art
[0002] With society's increasing emphasis on and openness to the use of green and renewable energy, the photovoltaic solar power generation sector is gaining increasing attention and development. Within this sector, crystalline silicon solar cells are typically manufactured on high-quality silicon wafers. These wafers are cut from pulled or cast silicon ingots using a multi-wire saw and subsequently processed.
[0003] The existing silicon wafer production process, taking single crystal silicon products as an example, can generally include the following operating procedures: first, use a silicon rod cutting machine to cut long silicon rods with a circular cross-section (the silicon rod is cylindrical as a whole) to form multiple short silicon rods; after cutting, use a silicon rod squaring machine to square the cut short silicon rods to form square silicon rods with a rectangular cross-section; then, perform surface grinding, rounding / chamfering and other grinding operations on the square silicon rods to ensure that the surface of the silicon rods meets the corresponding flatness and dimensional tolerance requirements; and then slice the square silicon rods to obtain silicon wafers.
[0004] The silicon wafers obtained from the slicing process can be used to make photovoltaic modules, which convert sunlight into electricity. With the advancement of battery technology, the demand for smaller silicon wafers is increasing, and the demand for thinner wafers is also relatively large. Silicon wafer thickness has been reduced from 180 microns to 150 microns. The mass production process for 120-micron and 110-micron silicon wafers has been finalized, and even silicon wafers of 100 microns and below are foreseeable. However, the thinner the silicon wafer, the more difficult it is to cut, and the more difficult it is to ensure cutting quality. For example, slicing on larger square silicon ingots increases the risk of damage and defects in the cross-section of the silicon wafer. Summary of the Invention
[0005] In view of the various deficiencies of the above-mentioned related technologies, the purpose of this application is to disclose a silicon rod cutting and grinding machine to solve the problems existing in the existing related technologies such as complex equipment, inconvenient operation, poor cutting quality and low efficiency.
[0006] To achieve the above-mentioned and other related purposes, the present application discloses a silicon rod cutting and grinding machine, comprising: a silicon rod squaring device for squaring silicon rods with a circular cross-section to form square silicon rods with a rectangular cross-section, comprising: a cutting machine base and first and second silicon rod cutting devices arranged on the cutting machine base; the first silicon rod cutting device is used to perform a first cutting operation on the silicon rod with a circular cross-section, so that the silicon rod forms two parallel first side sections; the second silicon rod cutting device is used to perform a second cutting operation on the silicon rod with the two first side sections , so that the silicon rod is obtained into a square silicon rod with a rectangular cross-section after forming two parallel second side sections, and the second side sections are perpendicular to the first side sections; and a silicon rod grinding device, connected to the silicon rod squaring device, is used to grind and chamfer the square silicon rod transferred from the silicon rod squaring device, including: a grinding processing platform provided with a grinding area and a chamfering area, a grinding device for grinding the side surfaces of the square silicon rod located at the grinding area, and a chamfering device for chamfering the edges of the square silicon rod located at the chamfering area.
[0007] In summary, the integrated silicon rod cutting and grinding disclosed in the present application is achieved by setting up a silicon rod squaring device and a silicon rod grinding device that are connected to each other. The silicon rod squaring device is used to square the silicon rods with a circular cross-section to form square silicon rods with a rectangular cross-section. The silicon rod grinding device is used to grind and chamfer the silicon rods, thereby completing the integrated operation of squaring, grinding, chamfering and other multiple processes of silicon rods with a circular cross-section. The overall equipment has high integration and simple structure, which improves production efficiency, saves costs, and improves the quality of product processing operations. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] The specific features of the present application are set forth in the appended claims. The features and advantages of the present invention can be better understood by referring to the exemplary embodiments described in detail below and the accompanying drawings. A brief description of the drawings is as follows:
[0009] Figure 1 Shown is a schematic structural diagram of a silicon rod cutting and grinding machine according to one embodiment of the present application.
[0010] Figure 2 and Figure 3 Display as Figure 1 Schematic diagram of the structure of the silicon rod squaring equipment.
[0011] Figure 4 FIG. 1 is a schematic structural diagram of a first wire cutting unit in a first silicon rod cutting device in one embodiment.
[0012] Figure 5 Shown is a schematic structural diagram of a first silicon rod transfer device and a first edge skin collapse prevention device in one embodiment.
[0013] Figure 6 Display as Figure 5 A schematic structural diagram of the edge skin clamp of the first edge skin anti-collapse device in one embodiment.
[0014] Figures 7 to 9 Display as Figure 5 Schematic diagram of the middle edge skin anti-collapse device clamping a silicon rod in one embodiment.
[0015] Figure 10 and Figure 11 Shown is a schematic structural diagram of a first silicon rod cutting device, a first edge skin collapse prevention device, and an edge skin unloading and conveying mechanism in one embodiment.
[0016] Figure 12 Display as Figure 1 Schematic diagram of the structure of the silicon rod grinding equipment.
[0017] Figure 13 Shown is a schematic structural diagram of a first square silicon rod clamping device in one embodiment.
[0018] Figure 14 Display as Figure 12 A schematic structural diagram of an edge skin supporting device and a chamfering device located at the chamfering area in one embodiment. DETAILED DESCRIPTION
[0019] The relevant processing technology for silicon rods involves several steps such as squaring, grinding, rounding / chamfering, etc.
[0020] Generally, existing silicon rods are mostly cylindrical in structure. Silicon rod squaring equipment is used to square the rods, resulting in a quasi-rectangular (including quasi-square) cross-section after squaring. The squared rods are then quasi-cuboid (or cube-like) in shape overall. Quasi-rectangular shapes include rectangles with orthogonal adjacent sides or angles within a predetermined range, rectangles with rounded corners between adjacent sides, and rectangles with connecting short sides between adjacent sides.
[0021] Taking single crystal silicon rods as an example, in certain related technologies, the process for forming single crystal silicon rods may include: first, using a silicon rod cutter to cut the original long silicon rod to form multiple short silicon rods; after cutting, using a silicon rod squarer to square the short silicon rods to form single crystal silicon rods with a substantially rectangular cross-section. The specific implementation method of using a silicon rod cutter to cut the original long silicon rod to form multiple short silicon rods can be found in patent publications such as CN105856445A, CN105946127A, and CN105196433A. The specific implementation method of using a silicon rod squarer to square the short silicon rods to form single crystal silicon rods with a substantially rectangular cross-section can be found in patent publications such as CN105818285A. However, the process for forming a single crystal silicon rod is not limited to the aforementioned technology. In an alternative embodiment, the process for forming a single crystal silicon rod may further include: first, using a full silicon rod squaring machine to square the original long silicon rod to form a long single crystal silicon rod with a substantially rectangular cross-section; and after the square-cutting is completed, using a silicon rod cutting machine to cut the squared long single crystal silicon rod to form short silicon rods. The specific implementation method of using a full silicon rod squaring machine to square the original long silicon rod to form a substantially rectangular long single crystal silicon rod can be found in patent publications such as CN106003443A.
[0022] After a cylindrical single crystal silicon rod is squared and cut using a squaring device to form a rectangular cross-section, the square silicon rod can be subjected to surface grinding, rounding, and chamfering operations using a grinding device. The specific implementation of surface grinding, rounding, and chamfering operations on rectangular silicon rods using the grinding device can be found in patent publications such as CN105835247A.
[0023] The inventors of this application have discovered that the squaring and grinding equipment involved in related silicon ingot processing technologies is complex and has poor scalability. They can only square or chamfer a single or a small number of silicon ingots, resulting in low efficiency. Furthermore, the squaring and grinding equipment are typically separate and independent, requiring multiple steps for unloading, transporting, loading, and commissioning the silicon ingots, increasing labor costs and impacting processing efficiency.
[0024] In view of this, the present application proposes a silicon rod cutting and grinding machine and its silicon rod cutting and grinding method, silicon rod squaring equipment and silicon rod grinding equipment, wherein the silicon rod cutting and grinding machine includes a silicon rod squaring equipment and a silicon rod grinding equipment connected to each other, and the silicon rod squaring equipment is used to perform square cutting operations on silicon rods with circular cross-sections to form square silicon rods with rectangular cross-sections, and the silicon rod grinding equipment is used to perform grinding and chamfering operations on the square silicon rods, thereby completing the integrated operation of squaring and grinding and chamfering of silicon rods with circular cross-sections. The equipment has high overall integration and simple structure, which improves production efficiency and saves costs, and improves the quality of product processing operations.
[0025] In the embodiments disclosed herein, to clarify the definition of directions and the manner in which different structures operate, a three-dimensional space is defined by a first direction, a second direction, and a third direction. The first, second, and third directions are all linear directions and are mutually perpendicular. The depth extension direction of the silicon ingot cutting and grinding machine, i.e., the length direction of the silicon ingot when placed thereon, is defined as the first direction (i.e., the front-to-back direction or the transfer direction). The width extension direction of the silicon ingot cutting and grinding machine, i.e., the left-to-right direction, is defined as the second direction (i.e., the left-to-right direction or the transposition direction). The vertical direction, i.e., the vertical direction, the perpendicular line direction, the up-down direction, or the lifting direction, is defined as the third direction.
[0026] The present application discloses a silicon rod cutting and grinding method, comprising the following steps: squaring a silicon rod with a circular cross-section to form a square silicon rod with a rectangular cross-section; and grinding and chamfering the square silicon rod.
[0027] Among them, the step of squaring the silicon rod with a circular cross-section to form a square silicon rod with a rectangular cross-section includes: performing a first cutting operation on the silicon rod with a circular cross-section along the length direction of the silicon rod, so that the silicon rod forms two parallel first side sections; performing a second cutting operation on the silicon rod with two first side sections along the length direction of the silicon rod, so that the silicon rod forms a square silicon rod with a rectangular cross-section by forming two parallel second side sections and at least one dividing section located between the two second side sections, the second side section being perpendicular to the first side section, and the dividing section being parallel to the second side section.
[0028] The steps of grinding and chamfering the square silicon rod include: grinding two first side surfaces of the square silicon rod; grinding two second side surfaces of the square silicon rod; and chamfering four edges of the square silicon rod.
[0029] The present application also discloses a silicon rod cutting machine that can complete the integrated operation of squaring, grinding, and chamfering silicon rods with circular cross-sections. The following is a detailed description of the silicon rod cutting and grinding machine of the present application.
[0030] See also Figure 1 , which is a schematic diagram of the structure of the silicon rod cutting and grinding machine in one embodiment of the present application. Figure 1 As shown, the silicon rod cutting and grinding machine of the present application includes: a silicon rod squaring device 1 and a silicon rod grinding device 2 connected to each other, wherein the silicon rod squaring device 1 is used to square silicon rods with circular cross-sections to form square silicon rods with rectangular cross-sections, and the silicon rod grinding device 2 is used to grind and chamfer the square silicon rods transferred from the silicon rod squaring device 1.
[0031] See also Figure 2 , displayed as Figure 1 The structural diagram of the silicon rod squaring equipment. Figure 1 and Figure 2 The silicon rod squaring device 1 includes: a cutting machine base 11, a first silicon rod transferring device 12, a first silicon rod cutting device 13, a second silicon rod transferring device 14, and a second silicon rod cutting device 15.
[0032] It should be noted that in Figure 1 In the embodiment shown, the first direction, the second direction, and the third direction are arranged as shown in the figure. The first direction is Figure 1 The middle X axis, the second direction is Figure 1 The middle Y axis, the third direction is Figure 1 Middle Z axis.
[0033] The cutting machine base is the main component of the silicon rod squaring equipment and is used to provide a processing platform. In actual applications, the cutting machine base is large in size and weight to provide a large installation surface and firm stability of the entire machine. It should be understood that the cutting machine base can be used as a base for different structures or components that perform processing operations in the silicon rod squaring equipment, and the specific structure of the cutting machine base can be changed based on different functional requirements or structural requirements. In some examples, the cutting machine base includes a fixed structure or a limiting structure for receiving different components in the silicon rod squaring equipment, such as a base, a column, a frame, etc., which are all the cutting machine bases described in this application.
[0034] Meanwhile, in some examples, the cutting machine base may be an integrated base, and in some examples, the cutting machine base may include a plurality of independent bases.
[0035] The cutting machine base has a cutting processing platform, which can be divided into multiple functional areas according to the specific work content of the silicon rod processing operation. In some embodiments, the cutting processing platform is provided with one or more cutting station groups, each of which includes a first cutting station and a second cutting station arranged in parallel. Therefore, in the case of Figure 1 and Figure 2In the embodiment shown, the cutting processing platform is provided with a cutting station group, and the cutting station group includes a first cutting station and a second cutting station arranged in parallel along the second direction, wherein each cutting station includes a loading and unloading area and a cutting area, that is, the first cutting station includes a first loading and unloading area and a first cutting area, and the second cutting station includes a second loading and unloading area and a second cutting area. However, this is not limited to this. In certain embodiments, the cutting processing platform of the silicon rod squaring equipment is provided with two or more cutting station groups, wherein each cutting station group includes a first cutting station and a second cutting station arranged in parallel along the second direction. In the example Figure 1 and Figure 2 In the illustrated embodiment, a first silicon rod transfer device 12 and a first silicon rod cutting device 13 are configured corresponding to the first cutting station, and a second silicon rod transfer device 14 and a second silicon rod cutting device 15 are configured corresponding to the second cutting station.
[0036] The first cutting station includes a first loading and unloading area and a first cutting area. A first silicon rod transfer device is configured at the first cutting station. The first silicon rod transfer device is used to carry silicon rods with circular cross-sections and transfer them along a transfer direction between the first loading and unloading area and the first cutting area. The first silicon rod cutting device is located in the first cutting area and is equipped with at least one first cutting wire saw. The at least one first cutting wire saw is located in a vertical plane and arranged vertically or at an angle to the vertical. The first silicon rod cutting device and the first silicon rod transfer device move relative to each other along the transfer direction, so that the at least one first cutting wire saw performs a first cutting operation on the silicon rod with circular cross-section, thereby forming two parallel first side cut surfaces on the silicon rod. The vertical plane is formed by the first direction and a third direction.
[0037] The first silicon rod transfer device is used to carry the silicon rod and transfer it between the first loading and unloading area and the first cutting area of the first cutting station along the transfer direction, wherein the silicon rod (circular in cross section) is placed horizontally on the first silicon rod transfer device and the axis of the silicon rod is consistent with the transfer direction, and the transfer direction is consistent with the first direction.
[0038] The first silicon rod transfer device may include: a first transfer channel, a first carrying platform, and a first transfer driving mechanism.
[0039] The first transfer channel is arranged along the transfer direction. In certain implementations, the first transfer channel includes a first transfer guide rail. The length of the first transfer channel in the transfer direction is greater than the length of the silicon rod to be cut.
[0040] The first carrying platform is provided on the first transfer channel for carrying silicon rods. The silicon rods are placed horizontally on the first carrying platform, that is, the axis of the silicon rods is aligned with the transfer direction (ie, the first direction).
[0041] The first transfer drive mechanism is used to drive the first carrying platform and the silicon rods carried thereon to move along the transfer direction on the first transfer channel.
[0042] In some embodiments, the first carrying platform includes at least two first carrying members spaced apart along the transfer direction.
[0043] In some embodiments, the first supporting member includes: a first supporting bracket and a first supporting structure, wherein the first supporting bracket is arranged on the first transfer guide rail of the first transfer channel, and the first supporting structure is used to support the silicon rod to be cut and contact the arc surface of the silicon rod to be cut.
[0044] In some implementations, see Figure 5 , which is a schematic diagram showing a structure including a first silicon rod transfer device. Figure 5 As shown, the first carrier 121 is a Y-shaped carrier structure as a whole. The first carrier can adopt a Y-shaped carrier structure. The bottom of the Y-shaped carrier structure serves as a carrier bracket, and the upper fork of the Y-shaped carrier structure serves as a first carrier structure, wherein the inner inclined surface of the upper fork contacts the arc surface of the silicon rod to be cut. The top of the upper fork of the Y-shaped carrier structure may also have a certain width. When the Y-shaped carrier structure is used to carry the silicon rod to be cut placed horizontally, the upper fork of the Y-shaped carrier structure (i.e., the V-shaped part) carries the silicon rod to be cut, and the two inner inclined surfaces of the upper fork contact the arc surface of the silicon rod to be cut. In this way, the silicon rod to be cut with a circular cross-section can also be centered, that is, the axis of the silicon rod to be cut corresponds to the center of the upper intersection (i.e., the bottom groove of the V-shaped part).
[0045] As mentioned above, the first carrying platform includes at least two first carrying members spaced apart along the transfer direction, and the carrying surface formed by these first carrying members is adapted to the length of the silicon rods to be carried.
[0046] In some embodiments, the first carrying platform further includes: a first carrying member driving mechanism for driving at least one first carrying member to move along a transfer direction to adjust a carrying distance between the two first carrying members to accommodate silicon rods of different lengths.
[0047] In some embodiments, the first carrier driving mechanism includes: a first carrier moving guide rail arranged along the transfer direction; and a first carrier driving unit for driving at least one first carrier to move along the first carrier moving guide rail.
[0048] In some embodiments, the first carrier drive unit may include: an adjustment rack disposed along the transfer direction; an adjustment gear associated with the first carrier to be moved, wherein the adjustment gear engages with the adjustment rack; and an adjustment drive source configured to drive the adjustment gear to rotate so as to move the associated first carrier along the transfer direction. When at least two first carriers in the first carrier platform are to be configured with the carrier drive unit, the adjustment rack may be shared. For example, when two first carriers are to be configured with the first carrier drive unit, the first adjustment gear and the first adjustment drive source may be shared, and a second adjustment gear and the second adjustment drive source may be associated with the second first carrier.
[0049] In some embodiments, the first carrier driving unit may include: an adjusting screw, which is arranged along the transfer direction and associated with the first carrier; a screw driving source, which is used to drive the transfer screw to rotate so that the associated first carrier moves along the transposition direction. Wherein, when at least two first carriers in the first carrier platform are to be equipped with the first carrier driving unit, the adjusting screw can be shared. The shared adjusting screw can be, for example, a bidirectional screw. When there are two first carriers to be equipped with the above-mentioned first carrier driving unit, it may include: a bidirectional screw and a screw driving source, wherein both ends of the bidirectional screw are respectively provided with threads and the thread directions are opposite, and the two ends of the bidirectional screw are respectively associated with the two opposite first carriers. In actual application, the bidirectional screw is driven to rotate by a screw driving source (such as a servo motor) so that the two associated opposite first carriers move toward each other (the two first carriers approach each other) or move away from each other (the two first carriers move away from each other) along the bidirectional screw.
[0050] The first transfer drive mechanism is used to drive the first carrying platform and the silicon rods carried thereon to move along the transfer direction on the first transfer channel.
[0051] In some embodiments, the first transfer drive mechanism includes: a first platform transfer guide rail arranged along the transfer direction; and a first transfer drive unit for driving the first carrying platform to move along the first platform transfer guide rail.
[0052] In some embodiments, the first transfer drive unit includes: a transfer rack, a transfer gear, and a gear drive source. The transfer rack is arranged along the transfer direction. The transfer gear is associated with the first carrying platform and meshes with the transfer rack. In some embodiments, the transfer gear is associated with at least two first bearing members in the first carrying platform. The association of the transfer gear with the at least two first bearing members in the first carrying platform can be achieved in the following manner: at least two first bearing members are connected by a connecting structure (such as a frame, a connecting plate, a connecting frame, etc.), and the drive gear is arranged on the connecting structure. The gear drive source is used to drive the transfer gear to rotate so that the associated first carrying platform moves along the transfer direction. The gear drive source can be, for example, a servo motor.
[0053] In some embodiments, the first transfer drive unit includes: a transfer screw and a screw drive source. The transfer screw is arranged along the transfer direction and is associated with the first bearing platform. In some embodiments, the transfer screw is associated with at least two first bearing members in the first bearing platform. The association of the transfer screw with at least two first bearing members in the first bearing platform can be achieved in the following manner: at least two first bearing members are connected by a connecting structure (such as a frame, a connecting plate, a connecting frame, etc.), and the transfer screw is associated with the connecting structure. The screw drive source is used to drive the transfer screw to rotate so that the associated first bearing platform moves along the transfer direction. The screw drive source can be, for example, a servo motor.
[0054] In actual applications, the aforementioned first carrier driving mechanism and the first transfer driving mechanism overlap in some functions. Therefore, in some embodiments, the function of the first carrier driving mechanism for driving at least one first carrier to move along the transfer direction to adjust the bearing spacing between the two first carriers can be completed by the first transfer driving mechanism.
[0055] The first silicon rod cutting device is arranged on the first cutting station, and is used to perform a first cutting operation on the silicon rod to be cut by the first silicon rod transfer device at the first cutting position of the first cutting station, so as to cut off the two opposite sides of the silicon rod to be cut with a circular cross-section, so that the silicon rod forms two parallel first side cut surfaces.
[0056] The first silicon ingot cutting device includes at least one first wire cutting unit, which includes multiple first cutting wheels and a first cutting wire. The first cutting wire is sequentially wound around the multiple first cutting wheels to form at least one first cutting wire saw. The at least one first cutting wire saw is located within a vertical plane and arranged vertically or at an angle to the vertical. The first wire cutting unit moves relative to the first silicon ingot transfer device and the silicon ingots to be cut carried by the first silicon ingot transfer device at the first cutting station, and the at least one first cutting wire saw performs a first cutting operation on the silicon ingots to be cut carried by the first silicon ingot transfer device. In certain embodiments, the first cutting wire is wound between the first cutting wheels in an end-to-end annular winding arrangement. In this case, the first cutting wire can also be referred to as a closed-loop cutting wire.
[0057] In certain embodiments, as Figure 1 and Figure 2 As shown, the first silicon rod cutting device 13 includes two first wire cutting units 131 arranged in parallel, each first wire cutting unit includes: a plurality of first cutting wheels and a first cutting wire, the first cutting wire is wound behind the plurality of first cutting wheels to form at least one first cutting wire saw, wherein the first cutting wire saw is arranged in the vertical direction or at an angle to the vertical direction.
[0058] See also Figure 4 , which is a schematic structural diagram of the first wire cutting unit in the first silicon rod cutting device in one embodiment. Figure 4 In the illustrated embodiment, the first silicon ingot cutting device 13 includes two first wire cutting units 131. Each first wire cutting unit 131 comprises a plurality of first cutting wheels 132 and a first cutting wire 134. The first cutting wire 134 winds around the plurality of first cutting wheels 132 to form at least one first cutting wire saw 135. The first cutting wire saw 135 is arranged vertically or at an angle to the vertical. Furthermore, the first silicon ingot cutting device 13 may also include a first cutting mounting structure 130, on which the plurality of first cutting wheels 132 are mounted.
[0059] In some embodiments, the multiple first cutting wheels in the first wire cutting unit are connected to the first cutting mounting structure, or the multiple first cutting wheels are arranged on the first cutting mounting structure through a bracket, a connecting plate, or a mounting frame. The first cutting mounting structure serves as a carrier for associating the multiple first cutting wheels in the first wire cutting unit with the first cutting frame or the first cutting seat. The specific form of the first cutting mounting structure can be a beam, a plate frame, a bracket, etc., which is not limited in this application.
[0060] In the silicon rod cutting and grinding machine of the present application, the first silicon rod cutting device includes a first cutting wire saw in a first wire cutting unit, which is arranged along the vertical direction or at an angle to the vertical direction.
[0061] In the first wire cutting unit, the first cutting wheel is provided with at least one first cutting wire groove for winding the cutting wire. The first cutting wire groove defines the position of the first cutting wire, thereby controlling cutting accuracy. Any first cutting wire is formed between two opposing first cutting wheels after the first cutting wire is wound around them. The positions of the two first cutting wheels and the positional relationship between the first cutting wheels can be used to determine the direction of the first cutting wire.
[0062] like Figure 4 As shown, in some embodiments, the first cutting mounting structure 130 is a rectangular frame as a whole, and the first cutting unit includes a plurality of first cutting wheels 132, for example, four first cutting wheels 132, and the four first cutting wheels 132 are respectively arranged near the four corners of the first cutting mounting structure 130, and the wheel surface of each first cutting wheel 132 is located in the vertical plane (the vertical plane is composed of the first direction and the third direction), wherein two first cutting wheels 132 are in the front (relatively closer to the first loading and unloading position) and are arranged in parallel up and down, and the other two first cutting wheels 132 are in the back (relatively farther away from the first loading position) and are arranged in parallel up and down, and the first cutting line 134 is wound around the four first cutting wheels 132 to form at least one first cutting wire saw 135 (for example, the first cutting wire saw 135 is formed between the two first cutting wheels 132 arranged in parallel up and down), and the first cutting wire saw 135 is arranged along the third direction (i.e., vertical). In addition, in order for the first cutting wire saw 135 to effectively cut the silicon rod, the first cutting wire saw 135 must interfere with the silicon rod in the vertical direction.
[0063] In some embodiments, the first cutting line is wound between the first cutting wheels in an end-to-end manner to form an annular cutting line (also referred to as a closed-loop cutting line). Figure 2 and Figure 3 In the illustrated embodiment, the first cutting line 134 is wound end-to-end between the plurality of first cutting wheels 132 to form an annular cutting line (also referred to as a closed-loop cutting line).
[0064] The multiple first cutting wheels in the first cutting unit are wound around an annular cutting wire. In this example, the first silicon ingot cutting device can eliminate the need for a wire storage drum. The annular cutting wire, driven by a cutting wire drive, can maintain high-speed operation and maintain a consistent direction during the cutting operation. This allows the first silicon ingot cutting device to achieve high-precision first cutting operations, avoiding issues such as ripples on the cut surface caused by reversing the cutting wire's direction or speed in existing cutting methods. Furthermore, the annular cutting wire effectively reduces the total cutting wire length required by the first wire cutting unit, reducing production costs.
[0065] In certain embodiments, the cutting line drive device is a motor having a power output shaft connected to the first cutting wheel. Thus, the first cutting line can be driven by the wound second cutting wheel to run along the winding direction. Of course, in specific implementations, the cutting line drive device can also be another drive source, such as a hydraulic motor, as long as it can drive the first cutting line. This is not a limitation of the present application.
[0066] The first wire cutting unit in the present application may further include a first transition wheel, which is used to change the direction or guide the first cutting wire, or the first transition wheel can be used to adjust the tension of the first cutting wire. The number of the first transition wheels can be one or more according to layout requirements.
[0067] The first transition wheel, while guiding and pulling the first cutting line, also serves as a tension wheel for adjusting the tension of the first cutting line. The tension wheel is used to adjust the tension of the first cutting line, which can reduce the probability of the first cutting line breaking and thus reduce consumables.
[0068] like Figure 4 As shown, in the first wire cutting unit, the first cutting mounting structure 130 is a rectangular frame as a whole, and each first wire cutting unit 131 includes a plurality of first cutting wheels 132 and a plurality of first transition wheels 133, for example, two first cutting wheels 132 and two first transition wheels 133, which are respectively arranged near the four corners of the first cutting mounting structure 130, and the wheel surfaces of the two first cutting wheels 132 and the two first transition wheels 133 are both located in the vertical plane, wherein the two first cutting wheels 132 are in front and arranged in parallel up and down, and the two first transition wheels 133 are in the back and arranged in parallel up and down, and the first cutting wire 134 is wound around the two first cutting wheels 132 and the two first transition wheels 133 to form at least one first cutting wire saw 135 (for example, a first cutting wire saw 135 is formed between the two first cutting wheels 132), and at least one first cutting wire saw 135 is arranged vertically.
[0069] As mentioned above, the first cutting line 134 is wound around multiple first cutting wheels 132 or multiple first cutting wheels 132 and multiple first transition wheels 133 to form a first cutting line saw 135 between the two preceding first cutting wheels 132. Therefore, to adjust the line length of the first cutting line saw 135, the spacing between the two first cutting wheels 132 can be adjusted, and the implementation method includes changing the position of at least one of the two first cutting wheels 132.
[0070] The first cutting wire saw is located in a vertical plane and is arranged along the vertical direction or at an angle to the vertical direction, and the silicon rod to be cut carried by the first silicon rod transfer device at the corresponding first cutting station is placed horizontally (the axis of the silicon rod to be cut is arranged along the transfer direction). Therefore, in order to achieve the cutting of the silicon rod to be cut, the length of the first cutting wire saw is adapted to the size of the end face of the silicon rod to be cut. For example, the length of the first cutting wire saw must be greater than or equal to the diameter of the silicon rod to be cut or the chord length of the silicon rod to be cut at the cutting position.
[0071] The direction of the first cutting wheel surface corresponds to the direction of the first cutting wire saw. It should be understood that the first cutting wheel surface is parallel to the plane where any first cutting wire groove in the first cutting wheel is located. In order to control the cutting accuracy and the stability of the cutting process, the first cutting wire saw should be located in the plane where the first cutting wire groove for winding the first cutting wire is located; at the same time, during the cutting process, the force direction of the silicon rod on the first cutting wire must be parallel to the cutting wire groove, that is, the cutting wheel surface is parallel to the cutting direction. The cutting direction is the direction of the silicon rod axis in the first cutting operation, that is, the transfer direction (that is, the first direction X-axis).
[0072] The first silicon rod cutting device comprises two first wire cutting units arranged in parallel, each of which has a first cutting wire saw, so that the two first wire cutting units form two parallel cutting wire saws. Figure 3 In the embodiment shown, the first silicon rod cutting device includes two first wire cutting units arranged in parallel along the second direction, each first wire cutting unit has a first cutting wire saw, and the first cutting wire saw is arranged vertically. In this way, the two first cutting wire saws belonging to the two first wire cutting units are both arranged vertically.
[0073] In fact, the first cutting wire saw may still have other variations. In some embodiments, the first cutting wire saw is arranged along the vertical direction, but this is not limited to this. In other embodiments, the position of the first cutting wire saw may be located in a vertical plane and arranged at an angle to the vertical direction (i.e., the third direction), the vertical plane being composed of the first direction and the third direction, the angle being less than or equal to 10 degrees (≤10°), or the angle being less than or equal to 5 degrees (≤5°), or the angle being less than or equal to 3 degrees (≤3°), that is, the routing direction of the first cutting wire saw may be located in the vertical plane and form an angle with the third direction (i.e., the vertical direction) of less than or equal to 10 degrees (≤10°), or less than or equal to 5 degrees (≤5°), or less than or equal to 3 degrees (≤3°) with the third direction (i.e., the vertical direction). The angle here is not limited to an integer angle, and it may be any angle within a limited range, for example, 0.09°, 1.3°, 2.5°, 3°, etc. In certain embodiments, when two first cutting wheels are arranged above and below to form a first cutting wire saw, the upper first cutting wheel is in front in the first direction and the lower first cutting wheel is in the back in the first direction, and the first cutting wire saw thus formed may form a positive deflection angle with the vertical. In certain embodiments, when two first cutting wheels are arranged above and below to form a first cutting wire saw, the upper first cutting wheel is in the back in the first direction and the lower first cutting wheel is in the front in the first direction, and the first cutting wire saw thus formed may form a negative deflection angle with the vertical. The deflection angle (including positive and negative deflection angles) may be changed according to the cutting process requirements and the size specifications of the silicon rods. For example, the deflection angle may be adjusted by changing the position of one or both of the two first cutting wheels arranged above and below in relation to the first cutting wire saw.
[0074] In some embodiments, the first wire cutting unit further includes a first tension adjustment mechanism. During wire cutting, the wire tension affects the yield rate and processing accuracy of the cutting process. The first tension adjustment mechanism detects and adjusts the tension of the first wire so that the tension reaches a predetermined threshold and remains constant during cutting, or within a certain range of values centered on the constant value.
[0075] The first tension adjustment mechanism is associated with the first transition wheel 133 or the first cutting wheel. The first transition wheel 133 in the wire cutting unit serves as a tensioning wheel for adjusting the tension of the cutting wire while guiding and pulling the first cutting wire 134 .
[0076] A tensioner is used to adjust the tension of the cutting wire, reducing the chance of wire breakage and consumables. The cutting wire plays a crucial role in the cutting process, but even the best wire has limits to its elongation and wear resistance. This means that the wire will gradually become thinner during continuous operation, eventually breaking. Therefore, current wire-cutting equipment typically incorporates a tension compensation mechanism to compensate for the wire's elongation during its reciprocating motion. A tensioner is one such mechanism.
[0077] In some embodiments, taking the tensioning wheel as the transition wheel as an example, the tension adjustment mechanism includes at least: a tension sensor, a servo motor and a screw rod; the tension sensor is arranged on the transition wheel, continuously sensing the tension value of the cutting line on the transition wheel, and sending a drive signal when the tension value is less than a preset value; the servo motor is electrically connected to the tension sensor, and is used to start working after receiving the drive signal sent by the tension sensor; one end of the screw rod is connected to the transition wheel, and the other end is connected to the servo motor, and when the servo motor is working, it pulls the transition wheel for unidirectional displacement to adjust the tension of the cutting line.
[0078] In some embodiments, the tension adjustment mechanism includes: a connecting rod assembly and a tension drive unit, the connecting rod assembly is associated with a transition wheel serving as a tensioning wheel and the tension drive unit, and the connecting rod assembly is controlled by the tension drive unit, that is, the tension drive unit drives the connecting rod assembly to actuate the transition wheel to produce a position change to adjust the tension of the closed-loop cutting line.
[0079] Regarding the tension drive unit, in certain implementations, the tension drive unit may include a counterweight portion, which may be associated with a connecting rod assembly. For example, taking a transition wheel as a tensioning wheel, when the tension of the closed-loop cutting line is to be increased, the counterweight portion is released, the counterweight portion descends, and the connecting rod assembly, under the action of the weight of the counterweight portion, drives the associated tensioning wheel to move, thereby expanding the circumference of the shape enclosed by each cutting wheel and the transition wheel, and increasing the tension of the closed-loop cutting line. When the tension of the closed-loop cutting line is to be reduced, the counterweight portion is raised, and the connecting rod assembly, under the action of the weight of the counterweight portion, drives the associated tensioning wheel to move in the opposite direction, thereby expanding the circumference of the shape enclosed by each cutting wheel and the transition wheel, and reducing the tension of the closed-loop cutting line.
[0080] The counterweight portion may include counterweight blocks, wherein the number of the counterweight blocks may vary according to the requirements for adjusting the tension of the closed-loop cutting line. For example, when the tension of the closed-loop cutting line is increased, the number of counterweight blocks may be increased, and when the tension of the closed-loop cutting line is reduced, the number of counterweight blocks may be reduced.
[0081] In some embodiments, the counterweight may include a locking mechanism for locking the counterweight so that the counterweight is stationary relative to the cutting mounting structure, thereby switching the counterweight from an active state to a locked state with respect to the cutting mounting structure. In some examples, the locking mechanism may be, for example, a latch.
[0082] The tension driving unit may be modified in other ways. For example, in some implementations, the tension driving unit may include a tension cylinder.
[0083] In certain embodiments, the first silicon ingot cutting apparatus further includes at least one first spacing mechanism, disposed on the at least one first wire cutting unit, configured to drive the plurality of first cutting wheels in the first wire cutting unit to move perpendicularly to the cutting wheel surfaces. The first silicon ingot cutting apparatus can use the spacing mechanism to switch the first cutting wire between different cutting grooves of the first cutting wheel, or to adjust the position of the first cutting wire saw to change the cutting position (or processing specifications) relative to the silicon ingot.
[0084] In certain implementations, a first wire cutting unit in a first silicon rod cutting device is used as an example for description. The first wire cutting unit includes a plurality of first cutting wheels and a plurality of first transition wheels. The carrier for carrying the plurality of first cutting wheels and the first transition wheel is, for example, a first cutting mounting structure. The first distance adjustment mechanism can be used to drive the first cutting mounting structure as a whole to move along the perpendicular direction of the cutting wheel surface. The first transition wheel and the first cutting wheel move together with the first cutting mounting structure along the perpendicular direction of the first cutting wheel surface (i.e., the transposition direction or the second direction Y-axis). In this state, the plurality of first cutting wheels and the first transition wheel are relatively stationary, i.e., the positional relationship between the first transition wheel and the first cutting wheel remains unchanged. At this time, the first distance adjustment mechanism is used to adjust the cutting position of at least one first wire cutting saw in the at least one first wire cutting unit relative to the silicon rod.
[0085] In certain implementations, each first cutting wheel has at least two first cutting grooves, each of which is parallel to the other and has a cutting offset perpendicular to the surface of the first cutting wheel. When the first distance adjustment mechanism is used to drive the multiple first cutting wheels in the first wire cutting unit to move relative to the first cutting mounting structure, the position of the grooves around which the first cutting wire is wound on the first cutting wheel can be changed. In certain implementations, the multiple first cutting wheels in the first wire cutting unit can be connected to a bracket, for example, wherein the bracket is movably mounted on the first cutting mounting structure and driven by the first distance adjustment mechanism to move perpendicular to the surface of the first cutting wheel.
[0086] When the at least one first distance adjusting mechanism is used to realize the transformation of the first cutting wire wound around the cutting wire grooves of the plurality of first cutting wheels in the at least one first wire cutting unit, in an actual scenario, the first cutting wire grooves corresponding to the cutting wires before and after the groove change can be predetermined. For example, the position of the first cutting wire before the groove change is the first cutting wire groove a1, and the first cutting wire after the groove change is wound around the first cutting wire groove a2. The displacement amount of the plurality of first cutting wheels in the first wire cutting unit driven by the first distance adjusting mechanism is determined based on the cutting offset between the first cutting wire groove a1 and the first cutting wire groove a2, that is, the displacement amount is set as the first cutting wire groove. The cutting offset between the wire groove a1 and the first cutting wire groove a2 can be used to realize the replacement of the first cutting wire from the first cutting wire groove a1 to the first cutting wire groove a2; it should be noted that the at least one first distance adjustment mechanism drives the multiple first cutting wheels in the first wire cutting unit to move in the direction perpendicular to the wheel surface of the first cutting wheel in the direction in which the cutting wire groove a2 points to the cutting wire groove a1. After the groove is changed, the cutting position of the first cutting wire saw in space remains unchanged, and the step of further calibrating the position of the first cutting wheel or other components is omitted, and the silicon rod can be cut according to the preset cutting amount, so that the groove changing process is simplified.
[0087] To further illustrate how the at least one first distance adjustment mechanism achieves movement of the multiple first cutting wheels in the first wire-cutting unit in a direction perpendicular to the first cutting wheel surfaces, this application discloses the following embodiments. The specific form of the at least one first distance adjustment mechanism may vary accordingly when the number of first wire-cutting units in the first silicon ingot cutting apparatus varies.
[0088] In some embodiments, the first silicon ingot cutting device includes a single-wire cutting unit, which is a first wire cutting unit. The first spacing adjustment mechanism includes a screw disposed orthogonally to the first cutting wheel surface and threadedly connected to the single-wire cutting unit; and a screw drive source for driving the screw to rotate.
[0089] The single-wire cutting unit in the first silicon rod cutting device includes a plurality of first cutting wheels, and the first cutting wire is wound around the plurality of first cutting wheels to form at least one first cutting wire saw. The screw of the first distance adjustment mechanism has a distal end and a proximal end. In a specific implementation, for example, the proximal end of the screw can be connected to a screw drive source and rotated under the drive of the screw drive source, and the distal end of the screw is connected to the first single-wire cutting unit by a thread. Through the connection method at both ends of the screw, the screw can rotate based on the drive of the screw drive source and convert the screw rotation into axial displacement by means of the threaded connection. The axial displacement direction is the setting direction of the screw, that is, the orthogonal direction of the cutting wheel surface; the screw can be driven by the screw drive source in the first distance adjustment mechanism to rotate the screw to achieve the displacement of the single-wire cutting unit in the orthogonal direction of the first cutting wheel surface. The screw can be driven to rotate in different directions to achieve the forward or backward movement of the first cutting wheel of the single-wire cutting unit in the orthogonal direction of the first cutting wheel surface.
[0090] In certain embodiments, the first silicon rod cutting device includes a single-wire cutting unit, and here, the single-wire cutting unit is a first wire cutting unit. The first distance adjustment mechanism includes: a telescopic member, which is arranged along the orthogonal direction of the first cutting wheel surface and is associated with the single-wire cutting unit; a telescopic member driving source, which is used to drive the telescopic member to perform telescopic movement along the orthogonal direction of the first cutting wheel surface. Here, the telescopic member can be set as a rod structure and the extension direction of the rod body is the orthogonal direction of the first cutting wheel surface. The telescopic member can be telescopically moved along its extension direction under the drive of the telescopic member driving source. One end of the telescopic member can be connected to the telescopic member driving source, and the retractable free end is associated with the single-wire cutting unit, that is, the first cutting wheel of the single-wire cutting unit can be driven to move in the orthogonal direction of the first cutting wheel surface under the action of the telescopic member driving source. The telescopic member is, for example, an electric telescopic rod, or a connecting rod connected to a cylinder. The cylinder can be used as a telescopic member driving source, and this application does not impose any restrictions. The telescopic rod can be connected to the single-wire cutting unit via a linear or indirect connection, for example, directly to the first cutting mounting structure of the single-wire cutting unit, or indirectly to the first single-wire cutting unit via a support or bearing. It should be understood that the extension or retraction of the telescopic member corresponds to the advancement or retraction of the single-wire cutting unit in a direction orthogonal to the first cutting wheel surface.
[0091] Here, in the embodiments disclosed in the present application, the association can be achieved, for example, by one or more of snapping, screwing, bonding, and welding. For example, in the above embodiments, the telescopic rod can be associated with the first wire cutting unit by one or more of snapping, screwing, bonding, and welding; of course, the implementation method of the association is not limited to this, but is intended to achieve transmission in the second direction.
[0092] In certain embodiments, the first silicon ingot cutting device includes a single-wire cutting unit, which is a single wire cutting unit. The first spacing mechanism includes: a rack disposed on the first single-wire cutting unit in a direction perpendicular to the first cutting wheel surface; a transmission gear meshing with the rack; and a gear drive source for driving the transmission gear to rotate. Driven by the gear drive source, the transmission gear rotates, and the rack meshing with the transmission gear correspondingly moves in the direction of the rack. In this example, the rack and transmission gear cooperate to convert the rotational motion driven by the gear drive source into linear motion along the rack. The rack is disposed on the first single-wire cutting unit in a direction perpendicular to the first cutting wheel surface, thereby driving the first cutting wheel of the single-wire cutting unit to move in the direction perpendicular to the first cutting wheel surface. Simultaneously, the gear drive source controls the switching of the rotational direction of the transmission gear, thereby causing the multiple first cutting wheels of the single-wire cutting unit to advance or retract in the direction perpendicular to the first cutting wheel surface.
[0093] In certain embodiments, as Figure 4 As shown, the first silicon rod cutting device includes two first wire cutting units arranged in parallel and opposite to each other, and at least one of the two first wire cutting units can be driven by the at least one distance adjustment mechanism to move along the orthogonal direction of the first cutting wheel surface, so as to adjust the wire cutting saw spacing between the first cutting wire saws in the two first wire cutting units, or to change the cutting wire grooves of multiple first cutting wheels in a certain first wire cutting unit around which the first cutting wire is wound.
[0094] The at least one first distance adjustment mechanism can be configured to be connected to a certain first wire cutting unit, or to be associated with two first wire cutting units at the same time, so as to drive the multiple first cutting wheels in the connected or associated one or two first wire cutting units to move along the orthogonal direction of the first cutting wheel surface.
[0095] In certain embodiments, the first distance adjusting mechanism includes: a screw, which is arranged along the orthogonal direction of the first cutting wheel surface and is threadedly connected to a first wire cutting unit; and a screw drive source, which is used to drive the screw to rotate. The manner in which the multiple first cutting wheels in the first wire cutting unit to which the screw is driven and connected by the screw drive source move in the orthogonal direction of the first cutting wheel surface is similar to the aforementioned embodiment. The first cutting unit driven by the distance adjusting mechanism can be regarded as a single-wire cutting unit, which will not be described in detail here. It should be understood that by providing the first distance adjusting mechanism on any first wire cutting unit, the spacing between the parallel first cutting wire saws formed between the two first wire cutting units can be increased or decreased, and the first silicon rod cutting device can cut the silicon rods into different specifications.
[0096] In certain embodiments, the first distance adjustment mechanism includes: a telescopic member disposed orthogonally to the first cutting wheel surface and associated with a first linear cutting unit; and a telescopic member drive source for driving the telescopic member to telescope orthogonally to the first cutting wheel surface. Here, the first cutting unit equipped with the first distance adjustment mechanism can be considered a single linear cutting unit. The specific implementation method can be referred to in the previous embodiment and will not be further described here.
[0097] In certain embodiments, the first spacing mechanism includes: a spacing rack positioned perpendicular to the first cutting wheel surface and associated with a first linear cutting unit; a transmission gear meshing with the spacing rack; and a gear drive source configured to drive the transmission gear for rotation. Through the meshing transmission gear and spacing rack, the gear drive source can control the spacing rack to move along the rack line, and the first linear cutting unit associated with the spacing rack can drive the plurality of first cutting wheels, via the rack, to move perpendicular to the first cutting wheel surface.
[0098] In some embodiments, the distance adjustment mechanism includes: a bidirectional screw, which is arranged along the orthogonal direction of the first cutting wheel surface and is threadedly connected to the two first wire cutting units; and a screw drive source, which is used to drive the screw to rotate so that the two first wire cutting units move toward or away from each other along the orthogonal direction of the first cutting wheel surface. In one embodiment, the bidirectional screw is a double-threaded screw, and the two ends of the bidirectional screw are respectively provided with threads and the thread directions are opposite. The screw drive source can be set at either end of the bidirectional screw to drive the bidirectional screw to rotate along the screw shaft. Through the opposite threads at the two ends of the bidirectional screw, when the bidirectional screw rotates under the drive of the screw drive source, the movement of the two ends of the bidirectional screw is converted into axial linear motion in opposite directions. The axial direction is the orthogonal direction of the first cutting wheel surface on which the bidirectional screw is set. Under the drive of the screw drive source, the multiple first cutting wheels corresponding to the two first wire cutting units can move toward or away from each other.
[0099] In certain embodiments, the first distance adjustment mechanism includes a servo motor provided on at least one first wire cutting unit. In practical scenarios, a servo motor is provided on at least one or each first wire cutting unit of the first silicon ingot cutting apparatus, and the servo motor controls the displacement of the corresponding first wire cutting unit in a direction perpendicular to the first cutting wheel surface. The first wire cutting unit can predetermine the cutting offset for slot change or the adjustment amount for changing the cutting position of the cutting line. The servo motor's precise positioning function drives the multiple first cutting wheels in the first wire cutting unit to move in a direction perpendicular to the first cutting wheel surface by a predetermined displacement. For example, the first silicon ingot cutting apparatus may include two first wire cutting units, and at least one of the two first wire cutting units is driven by its corresponding servo motor to move relatively independently in a direction perpendicular to the first cutting wheel surface. In certain examples, the servo motor can also be replaced with a travel motor and a travel screw. It should be understood that the first distance adjustment mechanism is a drive device that drives the multiple first cutting wheels in the first wire cutting unit to move relative to each other, and this application is not limited to its specific form.
[0100] As previously described, in the first silicon rod cutting device, the first cutting wires of the two parallel first wire cutting units are arranged vertically or at an angle relative to the vertical, driving the first silicon rod transfer device and the silicon rods it carries to move along the transfer direction. The first wire cutting units and the first silicon rod transfer device move relative to each other along the transfer direction, and the first cutting wires in the two first wire cutting units perform a first cutting operation on the silicon rods carried by the first silicon rod transfer device. The first wire cutting units are used to cut the silicon rods to be cut, forming a cut surface and a side skin on the silicon rods. That is, when a cutting wire in a first wire cutting unit cuts the silicon rod, it forms a cut surface and leaves a side skin. Therefore, when the first cutting wires in the two parallel first wire cutting units in the first silicon rod cutting device perform a first cutting operation on a silicon rod with a circular cross-section, it forms two parallel first side cut surfaces on the silicon rod.
[0101] The silicon rod squaring device includes a first edge skin anti-collapse device that cooperates with the first silicon rod transferring device and is used to stabilize the edge skin when the first silicon rod cutting device performs the first cutting operation on the silicon rod.
[0102] It should be understood that the silicon rods carried by the first silicon rod transfer device are horizontal, i.e., the axis of the silicon rods is aligned with the transfer direction (i.e., the first direction X-axis). Therefore, the edge skin formed by the first silicon rod cutting device during the first cutting operation on the silicon rods is also horizontal.
[0103] In some embodiments, the first edge skin anti-collapse device includes a clamping support and an edge skin clamp, wherein the edge skin clamp is provided on the clamping support and is used to clamp the edge skin.
[0104] The edge skin clamp comprises: a clamping seat, at least a pair of end face clamps, and a clamp driving mechanism.
[0105] The at least one pair of end face clamps are arranged opposite to each other along the transfer direction and are used to clamp the two end faces of the silicon rod.
[0106] The first silicon rod transfer device includes a first edge skin anti-collapse device, which cooperates with the first silicon rod transfer device to clamp the end face of the silicon rod during the first cutting operation to prevent edge collapse.
[0107] In some embodiments, the first edge skin anti-collapse device includes: a clamping support and an edge skin clamp. Figure 4 and Figure 5 In the illustrated embodiment, the first edge skin anti-collapse device 16 includes a clamping support 161 and an edge skin clamp 162 .
[0108] The clamping support of the first edge skin anti-collapse device is associated with the first carrying platform of the first silicon rod transfer device, that is, the clamping support of the first edge skin anti-collapse device and the first carrying platform of the first silicon rod transfer device can move forward and backward together.
[0109] The edge skin clamp is arranged on the clamping support. In some embodiments, the edge skin clamp includes a clamping seat, at least one pair of end face clamps, and a clamp driving mechanism. Figure 5 In the illustrated embodiment, the edge skin clamp 162 includes a clamping seat 1621 , a pair of end face clamps 1622 arranged opposite to each other along the clamping direction, and a clamp driving mechanism.
[0110] The chuck driving mechanism is used to drive at least one end face chuck of at least one pair of end face chucks to move along the clamping direction to adjust the clamping distance between the at least one pair of end face chucks.
[0111] In some embodiments, the chuck driving mechanism includes: a chuck moving guide rail arranged along the clamping direction; and a chuck driving unit for driving at least one end face chuck of the at least one pair of end face chucks to move along the chuck moving guide rail.
[0112] In some embodiments, a chuck moving guide rail may be provided between the first end face chuck and the second end face chuck in at least one pair of end face chucks. Figure 5 As shown, a movable guide assembly is provided between the first end face chuck and the second end face chuck in at least one pair of end face chucks, and the movable guide assembly includes one or more movable guide rods or movable guide beams 1623, on which movable guide rails are provided.
[0113] In some embodiments, the chuck drive unit includes at least one chuck telescopic assembly. Figure 5As shown, the chuck telescopic assembly includes: a chuck telescopic rod and a chuck telescopic cylinder. The chuck telescopic rod is arranged along the clamping direction and is associated with a corresponding end face chuck, and the chuck telescopic cylinder is associated with the chuck telescopic rod. In certain embodiments, the chuck driving mechanism is used to drive two end face chucks in a pair of end face chucks to move toward or away from each other along the clamping direction. The chuck driving mechanism then includes a pair of chuck telescopic assemblies, wherein each chuck telescopic assembly corresponds to an end face chuck, the chuck telescopic rod in the chuck telescopic assembly is arranged along the clamping direction and is associated with a corresponding end face chuck, and the chuck telescopic cylinder in the chuck telescopic assembly is associated with the chuck telescopic rod. By using the chuck telescopic cylinders in the pair of chuck telescopic assemblies to control the corresponding chuck telescopic rod to retract or extend, the pair of end face chucks can be driven to move toward or away from each other along the movable guide rails on the movable guide rod or movable guide beam. In certain embodiments, a chuck driving mechanism is used to drive one end face chuck of a pair of end face chucks to move toward or away from the other end face chuck along a clamping direction. The chuck driving mechanism includes a chuck telescopic assembly corresponding to the end face chuck to be moved, wherein a chuck telescopic rod in the chuck telescopic assembly is arranged along the clamping direction and associated with the corresponding end face chuck, and a chuck telescopic cylinder in the chuck telescopic assembly is associated with the chuck telescopic rod. The chuck telescopic cylinder in the chuck telescopic assembly controls the corresponding chuck telescopic rod to retract or extend, thereby driving the corresponding end face chuck to move along a movable guide rail on a movable guide rod or movable guide beam toward or away from the other end face chuck.
[0114] In certain embodiments, the chuck drive unit includes: at least one pair of clamping racks, a drive gear, and a gear drive source. The at least one pair of clamping racks is respectively associated with the at least one pair of end face chucks, that is, the first clamping rack of the at least one pair of clamping racks is arranged along the clamping direction and associated with the first end face chuck of the at least one pair of end face chucks, the second clamping rack of the at least one pair of clamping racks is arranged along the clamping direction and associated with the second end face chuck of the at least one pair of end face chucks, and the first clamping rack and the second clamping rack of the at least one pair of clamping racks are arranged with teeth facing each other. The drive gear meshes with the pair of clamping racks, that is, the drive gear is located between the first clamping rack and the second clamping rack of the pair of clamping racks and meshes with the first clamping rack and the second clamping rack, respectively. The gear drive source is used to drive the drive gear to rotate so that the at least one pair of meshed clamping racks and the associated at least one pair of end face chucks move toward or away from each other along the clamping direction. The gear drive source can be, for example, a servo motor, the output shaft of which is associated with the drive gear. In practical applications, the servo motor as the gear drive source rotates forward, driving the associated drive gear to rotate forward, causing the first and second clamping racks meshed with the drive gear to move toward each other, i.e., the first end face chuck associated with the first clamping rack and the second end face chuck associated with the second clamping rack to move toward each other, thereby reducing the clamping distance between the first and second end face chucks. The servo motor as the gear drive source rotates reversely, driving the associated drive gear to rotate reversely, causing the first and second clamping racks meshed with the drive gear to move away from each other, i.e., the first end face chuck associated with the first clamping rack and the second end face chuck associated with the second clamping rack to move away from each other, thereby increasing the clamping distance between the first and second end face chucks.
[0115] In certain embodiments, the chuck drive unit includes: at least one pair of clamping racks, a linkage gear, and a chuck drive source. The at least one pair of clamping racks is respectively associated with the at least one pair of end face chucks, that is, the first clamping rack of the at least one pair of clamping racks is arranged along the clamping direction and associated with the first end face chuck of the at least one pair of end face chucks, the second clamping rack of the at least one pair of clamping racks is arranged along the clamping direction and associated with the second end face chuck of the at least one pair of end face chucks, and the first clamping rack and the second clamping rack of the at least one pair of clamping racks are arranged with teeth facing each other. The linkage gear meshes with the pair of clamping racks, that is, the linkage gear is located between the first clamping rack and the second clamping rack of the pair of clamping racks and meshes with the first clamping rack and the second clamping rack, respectively. The chuck drive source is associated with the at least one pair of end face chucks and is used to cooperate with the at least one pair of clamping racks and the linkage gear to drive the at least one pair of end face chucks to move toward or away from each other along the clamping direction. The chuck drive source can be, for example, a telescopic cylinder, the two ends of which are respectively connected to the first end face chuck and the second end face chuck. In actual application, the telescopic cylinder serving as the chuck drive source contracts, and the contracted cylinder can drive the first clamping rack or the second clamping rack to move. Through the first clamping rack, the second clamping rack, and the linkage gear between the first clamping rack and the second clamping rack, the associated first end face chuck and the second end face chuck are driven to move toward each other, thereby reducing the clamping distance between the first end face chuck and the second end face chuck. The telescopic cylinder serving as the driving source of the chuck is extended, and the extended cylinder can drive the first clamping rack or the second clamping rack to move, and through the first clamping rack, the second clamping rack and the linkage gear between the first clamping rack and the second clamping rack, the associated first end face chuck and the second end face chuck are driven to move back to back, thereby increasing the clamping distance between the first end face chuck and the second end face chuck.
[0116] In some embodiments, the chuck drive unit includes: at least one chuck clamping assembly, the chuck clamping assembly including: a clamping screw and a screw drive source, the clamping screw being arranged along the clamping direction and associated with a corresponding end face chuck, and the screw drive source being associated with the clamping screw. In some embodiments, the chuck drive mechanism is used to drive two end face chucks in a pair of end face chucks to move toward or away from each other along the clamping direction, and the chuck drive mechanism includes a pair of chuck clamping assemblies, wherein each chuck clamping assembly corresponds to an end face chuck, the clamping screw in the chuck clamping assembly is arranged along the clamping direction and associated with a corresponding end face chuck, and the screw drive source in the chuck clamping assembly is associated with the clamping screw. In certain embodiments, the chuck drive mechanism is used to drive one end face chuck of a pair of end face chucks to move toward or away from the other end face chuck along a clamping direction. The chuck drive mechanism includes a chuck clamping assembly corresponding to the end face chuck to be moved, wherein a clamping screw in the chuck clamping assembly is arranged along the clamping direction and associated with the corresponding end face chuck, and a screw drive source in the chuck clamping assembly is associated with the clamping screw. The screw drive source can be, for example, a servo motor.
[0117] In certain embodiments, the chuck drive unit includes a bidirectional screw and a screw drive source, wherein the bidirectional screw is arranged along the clamping direction, and each end of the bidirectional screw is provided with a thread with opposite thread directions, and each end of the bidirectional screw is associated with at least one pair of end face chucks, and the screw drive source is associated with the bidirectional screw. In actual application, the bidirectional screw is driven by the screw drive source (e.g., a servo motor) to rotate so that the two associated opposite end face chucks move toward or away from each other along the clamping direction.
[0118] The at least one pair of end face clamps are arranged opposite to each other along the clamping direction, and are used for correspondingly clamping the two end faces of the silicon rod.
[0119] In some embodiments, for any one end face chuck of at least a pair of end face chucks, the end face chuck includes a clamping base and a side skin pressing member provided on the clamping base, and the side skin pressing member is used to press the side skin to be cut in the silicon rod.
[0120] The clamping base serves as the main body of the end face chuck and is used to provide a foundation for the edge skin pressing member. In some embodiments, the clamping base can be, for example, a clamping base plate, the size of which is adapted to the edge skin to be cut, that is, the clamping base plate at least partially or completely covers the edge skin to be cut.
[0121] In the end face chuck, the edge skin pressing member includes an edge skin pressing screw disposed on the clamping base. The number of the edge skin pressing screws may be one or more. In practical applications, the edge skin pressing screws are used to press the edge skin to be cut, thereby ensuring that the edge skin to be cut in the silicon ingot remains stable during the first cutting operation.
[0122] Of course, in some embodiments, in the end face chuck, the edge skin pressing member may also include an edge skin pressing elastic member provided on the clamping base. For example, the edge skin pressing elastic member includes an edge skin pushing rod, which is sleeved with a compression spring.
[0123] In this way, when the first silicon rod cutting device is used to perform the first cutting operation on the silicon rod, the first silicon rod transfer device carries the silicon rod to be cut, and the chuck driving mechanism in the first edge skin anti-collapse device drives at least one end face chuck of the at least one pair of end face chucks to move along the clamping direction, so that the at least one pair of end face chucks clamps the two end faces of the silicon rod, wherein the edge skin pressing member in the end face chuck presses on the edge skin to be cut in the silicon rod, which can ensure that the edge skin to be cut in the silicon rod remains stable during the first cutting operation, and can avoid the edge skin falling off or the edge skin and the silicon rod body being offset to cause edge collapse when the first cutting wire saw in the first wire cutting unit passes through the silicon rod to completely cut it off.
[0124] In certain embodiments, for any one of at least a pair of end face chucks, the end face chuck includes a silicon rod pressing member, a side skin pressing member, and a side skin clamping reinforcement member, wherein the silicon rod pressing member is used to press the main body of the silicon rod, the side skin pressing member is used to press the side skin to be cut in the silicon rod, and the side skin clamping reinforcement member is used to apply additional clamping force to the side skin. In the present application, a silicon rod with a circular cross-section is formed into a square silicon rod with a rectangular cross-section after a square cutting operation, wherein the main body of the silicon rod refers to the portion that at least includes the square silicon rod, that is, the main body of the silicon rod is relative to the side skin, and the main body of the silicon rod is the portion that includes the square silicon rod, and the main body of the silicon rod changes in different square cutting operations. In the following description, the main body of the silicon rod is referred to as the silicon rod main body.
[0125] See also Figure 6 , displayed as Figure 5 A schematic diagram of the structure of the middle edge leather clamp in one embodiment. Figure 5 and Figure 6 In the illustrated embodiment, the end face chuck includes a clamping base 1624 , a silicon rod pressing member 1625 and a side skin pressing member 1626 provided on the clamping base 1624 , and a side skin clamping reinforcement member 1627 that moves forward and backward relative to the clamping base 1624 along the clamping direction.
[0126] The clamping base 1624 serves as the main body of the end face chuck, and is used to provide a foundation for the installation of the silicon rod pressing piece 1625, the edge skin pressing piece 1626, and the edge skin clamping reinforcement piece 1627. In some embodiments, the clamping base may be, for example, a clamping substrate, the size of which is adapted to the end face of the silicon rod and the edge skin to be cut, that is, the clamping substrate at least covers part of the silicon rod body and part of the edge skin. The clamping substrate should cover part of the silicon rod body so that the silicon rod pressing piece provided thereon can act on the silicon rod body. The clamping substrate should also cover part of the edge skin so that the edge skin pressing piece and the edge skin clamping reinforcement provided thereon can act on the edge skin.
[0127] In such Figure 6 In the illustrated embodiment, in the end face chuck, the silicon rod pressing member 1625 includes a silicon rod pressing screw provided on the clamping base plate 1624, and the edge skin pressing member 1626 includes an edge skin pressing screw provided on the clamping base plate 1624. The number of the silicon rod pressing screws can be one or more, and the number of the edge skin pressing screws can be one or more. In actual applications, the silicon rod pressing screw is used to press the silicon rod body, and the edge skin pressing screw is used to press the edge skin to be cut. When the silicon rod pressing screw presses the silicon rod body and the edge skin pressing screw presses the edge skin to be cut, relative stability between the silicon rod body and the edge skin can be ensured, thereby preventing the edge skin from falling off or the edge skin from shifting from the silicon rod body when the cutting wire saw in the wire cutting unit passes through the silicon rod to completely cut it off, thereby preventing the edge skin from collapsing.
[0128] It is easy to know that in some cases, the end surface of the silicon rod is not an ideal flat surface, and one of the silicon rod pressing member and the side skin pressing member may not be able to effectively resist and press the corresponding silicon rod body or side skin.
[0129] In order to enable the silicon rod pressing member and the side skin pressing member arranged on the clamping base to adapt to the end face of the silicon rod to achieve an effective pressing effect, in some embodiments, the end face clamp further includes a bias fine-tuning structure for adjusting the position of the clamping base. The bias fine-tuning structure can be used to partially adjust the position of the clamping base, thereby changing the position of the silicon rod pressing member and the side skin pressing member arranged on the clamping base. Figure 6 In the embodiment shown, the end face chuck also includes a bias fine-tuning structure for adjusting the clamping substrate 1624. The bias fine-tuning structure can be used to locally adjust the position of the clamping substrate 1624, thereby changing the position of the silicon rod pressing screw and the side skin pressing screw arranged on the clamping substrate 1624.
[0130] In some embodiments, the deflection fine-tuning structure adopts a ball head structure or a similar structure, and the clamping base is arranged by the ball head structure. Figure 6As shown, the clamping substrate 1624 serving as the clamping base is arranged on the mounting structure through a ball head structure 1629. In this way, the clamping substrate 1624 can be fine-tuned to a certain extent relative to the mounting structure through the ball head structure 1629, changing the position of the clamping substrate 1624 and the silicon rod pressing screw 1625 and the side skin pressing screw 1626 arranged thereon, so as to adapt to the end face of the silicon rod, even if the end face of the silicon rod is uneven to a certain extent. In some embodiments, the ball head structure is a spherical steel ball, which is embedded in a receiving cavity and exposes a small half of the part in contact with the clamping substrate. In some embodiments, the ball head or hemisphere head is connected to the clamping substrate through a connecting rod, and the ball head or hemisphere head is embedded in a receiving cavity.
[0131] In some embodiments, the deflection fine-tuning structure is a hinged structure, and the clamping base is arranged via the hinged structure. For example, the clamping base is connected to the mounting structure via the hinged structure and can deflect relative to the mounting structure by a certain amplitude.
[0132] Furthermore, in certain embodiments, in the end face chuck, the silicon rod pressing member includes a silicon rod pressing elastic member provided on the clamping base, and the side skin pressing member includes a side skin pressing elastic member provided on the clamping base. For example, in certain embodiments, the silicon rod pressing elastic member includes a silicon rod push rod, which is provided with a compression spring; and the side skin pressing elastic member includes a side skin push rod, which is provided with a compression spring. In certain embodiments, the silicon rod pressing elastic member includes a silicon rod push block, whose rear end is provided with a compression spring; and the side skin pressing elastic member includes a side skin push block, whose rear end is provided with a compression spring.
[0133] The end face chuck further includes a skin edge clamping reinforcement member that can advance and retreat relative to the clamping base along a clamping direction. When the skin edge clamping reinforcement member advances relative to the clamping base, the skin edge clamping reinforcement member can provide a strong clamping force to the corresponding skin edge. Generally, the clamping force applied by the skin edge clamping reinforcement member to the skin edge is greater than the pressing force applied by the silicon rod pressing member to the silicon rod body and the pressing force applied by the skin edge pressing member to the skin edge.
[0134] In some embodiments, the edge skin clamping reinforcement comprises a telescopic top rod or a telescopic top block that is controlled to advance and retreat relative to the clamping base. Figure 6In the illustrated embodiment, the side skin clamping reinforcement includes a telescopic push rod or push block 1627 and a telescopic drive source 1628. The telescopic drive source 1628 drives the telescopic push rod or push block 1627 forward and backward relative to the clamping base 1624. In some embodiments, the clamping base 1624 has a through hole, and the telescopic drive source 1628 and the telescopic push rod or push block 1627 are disposed on a mounting structure. The telescopic drive source 1628 can drive the telescopic push rod or push block 1627 to extend from the clamping base 1624 and press against the corresponding side skin, or to drive the telescopic push rod or push block 1627 to retract from the clamping base 1624. The telescopic drive source can be, for example, a telescopic cylinder.
[0135] The end face chuck may be modified in other ways in other embodiments.
[0136] In some embodiments, the end face chuck includes: a first clamping base and a second clamping base, wherein a silicon rod pressing piece is provided on the first clamping base, and a side skin pressing piece and a side skin clamping reinforcement piece that moves forward and backward relative to the second clamping base along the clamping direction are provided on the second clamping base.
[0137] In certain embodiments, the first clamping base may be, for example, a clamping substrate, whose dimensions are adapted to the end face of the silicon rod body. That is, the first clamping substrate at least partially covers the silicon rod body, so that the silicon rod pressing member provided thereon can act on the silicon rod body. The second clamping base may be, for example, a clamping substrate, whose dimensions are adapted to the end face of the edge skin to be cut. That is, the first clamping substrate at least partially covers the edge skin, so that the edge skin pressing member provided thereon can act on the edge skin.
[0138] In the end face chuck, the silicon rod pressing member includes a silicon rod pressing screw provided on the first clamping substrate, and the number of the silicon rod pressing screws can be one or more. The edge skin pressing member includes an edge skin pressing screw provided on the second clamping substrate, and the number of the edge skin pressing screws can be one or more. In practical applications, the silicon rod pressing screw is used to press the silicon rod body, and the edge skin pressing screw is used to press the edge skin to be cut. Under the conditions where the silicon rod pressing screw presses the silicon rod body and the edge skin pressing screw presses the edge skin to be cut, relative stability between the silicon rod body and the edge skin can be ensured, thereby preventing the edge skin from falling off or the edge skin from being offset from the silicon rod body when the cutting wire saw in the wire cutting unit passes through the silicon rod to completely cut it off, thereby preventing the edge skin from being offset from the silicon rod body, thereby preventing the edge from being broken.
[0139] Furthermore, in certain embodiments, in the end face chuck, the silicon rod pressing member includes a silicon rod pressing elastic member provided on the first clamping base, and the side skin pressing member includes a side skin pressing elastic member provided on the second clamping base. For example, in certain embodiments, the silicon rod pressing elastic member includes a silicon rod push rod, which is provided with a compression spring; and the side skin pressing elastic member includes a side skin push rod, which is provided with a compression spring. In certain embodiments, the silicon rod pressing elastic member includes a silicon rod push block, whose rear end is provided with a compression spring; and the side skin pressing elastic member includes a side skin push block, whose rear end is provided with a compression spring.
[0140] The end face chuck further includes a side skin clamping reinforcement member that can advance and retreat relative to the second clamping base along a clamping direction. When the side skin clamping reinforcement member advances relative to the second clamping base, the side skin clamping reinforcement member can provide a strong clamping force to the corresponding side skin. Generally, the clamping force applied by the side skin clamping reinforcement member to the side skin is greater than the pressing force applied by the silicon rod pressing member to the silicon rod body and the pressing force applied by the side skin pressing member to the side skin.
[0141] In some embodiments, the side skin clamping reinforcement includes a telescopic top rod or a telescopic top block that is controlled to advance and retreat relative to the second clamping base. For example, the side skin clamping reinforcement includes a telescopic top rod or a telescopic top block and a telescopic drive source, and the telescopic drive source drives the telescopic top rod or the telescopic top block to advance and retreat relative to the second clamping base. In some embodiments, a through hole is provided on the second clamping base, and the telescopic drive source and the telescopic top rod or the telescopic top block are arranged on a mounting structure, and the telescopic drive source can drive the telescopic top rod or the telescopic top block to extend out of the second clamping base and press against the corresponding side skin, or drive the telescopic top rod or the telescopic top block to retract into the second clamping base. Wherein, the telescopic drive source can be, for example, a telescopic cylinder.
[0142] In this way, when the first silicon rod cutting device is used to perform the first cutting operation on the silicon rod, the first silicon rod transfer device carries the silicon rod to be cut, and the clamp driving mechanism in the first edge skin collapse prevention device drives at least one end face clamp of the at least one pair of end face clamps to move along the clamping direction, so that the at least one pair of end face clamps clamps the two end faces of the silicon rod, wherein the silicon rod pressing piece in the end face clamp presses on the main body of the silicon rod, and the edge skin pressing piece in the end face clamp presses on the edge skin to be cut in the silicon rod The edge skin clamping reinforcement in the end face chuck is in a retracted state (in the retracted state, the edge skin clamping reinforcement is recessed in the clamping base, or protrudes from the clamping base but the protrusion height relative to the clamping base is also smaller than the protrusion height of the silicon rod pressing member and the edge skin pressing member relative to the clamping base), so that the edge skin and the silicon rod body remain relatively stationary, which can prevent the edge skin from falling off or the edge skin from being offset from the silicon rod body when the cutting wire saw in the wire cutting unit passes through the silicon rod to be cut to completely cut it off, resulting in edge collapse. After the edge skin is cut, the edge skin clamping reinforcement in the end face chuck is driven to extend relative to the clamping base and press against the cut edge skin. The clamping force applied by the edge skin clamping reinforcement on the edge skin is greater than the pressing force applied by the silicon rod pressing member on the silicon rod body and the pressing force applied by the edge skin pressing member on the edge skin. At this time, the at least one pair of end face chucks can be operated to move the cut edge skin.
[0143] In the present application, the first edge skin anti-collapse device may further include an edge skin clamp advance and retreat mechanism for driving the edge skin clamp to advance and retreat along an advance and retreat direction.
[0144] In an embodiment in which the end face chuck includes a clamping base and a side skin pressing piece provided on the clamping base, after the side skin cutting is completed, the side skin clamp is driven to retreat in the forward and backward directions by the side skin clamp advance and retreat mechanism, and the pressing pressure applied to the side skin by the pressing piece can drive the clamped side skin to separate from the silicon rod body.
[0145] In an embodiment in which the end face chuck includes a clamping base, a silicon rod pressing member and a side skin pressing member provided on the clamping base, and a side skin clamping reinforcement member that advances and retreats relative to the clamping base in a clamping direction, after the side skin cutting is completed, the side skin clamping reinforcement member in the end face chuck is driven to extend relative to the clamping base and press against the cut side skin. At this time, the side skin clamp is driven to retreat in the advance and retreat direction by the side skin clamp advance and retreat mechanism, and the clamping force applied by the side skin clamping reinforcement member on the side skin is greater than the pressing force applied by the silicon rod pressing member on the silicon rod body and the pressing force applied by the side skin pressing member on the side skin, thereby driving the clamped side skin to separate from the silicon rod body.
[0146] In some embodiments, the edge skin clamp advance and retreat mechanism includes: a clamp advance and retreat guide rail arranged along the advance and retreat direction; and an edge skin clamp advance and retreat unit for driving the edge skin clamp to move along the clamp advance and retreat guide rail. Figure 5 In the illustrated embodiment, the edge skin clamp advance and retreat mechanism 163 includes: a clamp advance and retreat guide rail 1631 and an edge skin clamp advance and retreat unit.
[0147] In some embodiments, the edge skin clamp advance and retreat unit includes: a clamp seat telescopic rod and a clamp seat telescopic cylinder, the clamp seat telescopic rod is arranged along the advance and retreat direction and is associated with the clamp seat of the edge skin clamp, and the clamp seat telescopic cylinder is associated with the clamp seat telescopic rod. Figure 5 In the illustrated embodiment, the edge skin clamp advance and retreat unit includes: a clamp seat telescopic rod 1633 and a clamp seat telescopic cylinder 1635, wherein the clamp seat telescopic rod 1633 is arranged along the advance and retreat direction and is associated with the clamp seat 1621 of the edge skin clamp, and the clamp seat telescopic cylinder 1635 can be provided on a mounting structure and is associated with the clamp seat telescopic rod 1633. The clamp seat telescopic cylinder 1635 drives the clamp seat telescopic rod to extend, driving the edge skin clamp 162 to move toward the first silicon rod transfer device, so that the edge skin clamp 162 can clamp the end face of the silicon rod. In certain embodiments, the clamp seat telescopic cylinder 1635 drives the clamp seat telescopic rod to retract, driving the edge skin clamp 162 to move away from the first silicon rod transfer device, so that the edge skin clamp 162 drives the clamped edge skin to withdraw and separate from the silicon rod body.
[0148] In certain embodiments, the edge skin clamp advance and retreat unit includes: the edge skin clamp advance and retreat mechanism includes: a clamp seat rack, arranged along the advance and retreat direction and associated with the clamp seat of the edge skin clamp; a clamp seat gear, meshed with the clamp seat rack; a gear drive source, associated with the clamp seat gear, for driving the clamp seat gear to rotate so that the meshed edge skin clamp moves along the advance and retreat direction. Wherein, the gear drive source can be, for example, a servo motor. In actual application, the servo motor serving as the gear drive source rotates in the forward direction, driving the associated clamp seat gear to rotate in the forward direction, so that the edge skin clamp associated with the clamp seat gear moves on the meshed clamp seat rack toward the silicon rod transfer device, so that the edge skin clamp can clamp the end face of the silicon rod. On the contrary, the servo motor serving as the gear drive source rotates in the reverse direction, driving the associated clamping seat gear to rotate in the reverse direction, so that the side skin clamp associated with the clamping seat gear moves away from the silicon rod transfer device on the engaged clamping seat rack, so that the side skin clamp drives the clamped side skin to withdraw and disengage from the silicon rod body.
[0149] In some embodiments, the edge skin clamp advance and retreat unit includes: an exit screw and a screw drive source, wherein the exit screw is arranged along the advance and retreat direction and is associated with the clamping seat of the edge skin clamp, and the screw drive source is associated with the exit screw. The screw drive source may be, for example, a servo motor. In actual application, the servo motor serving as the screw drive source rotates forward, driving the exit screw to rotate forward, so that the edge skin clamp associated with the exit screw moves toward the silicon rod transfer device, so that the edge skin clamp can clamp the silicon rod end face. Conversely, the servo motor serving as the screw drive source rotates in the reverse direction, driving the exit screw to rotate in the reverse direction, so that the edge skin clamp associated with the exit screw moves away from the silicon rod transfer device, so that the edge skin clamp drives the clamped edge skin to withdraw to separate from the silicon rod body.
[0150] In the present application, the first edge skin anti-collapse device may further include a clamp lifting mechanism for driving the edge skin clamp to move vertically up and down. In certain embodiments, the edge skin clamp is moved vertically up or down by the clamp lifting mechanism to adapt to the size specifications of the silicon rods carried by the silicon rod transfer. For example, if the size of the silicon rod to be cut is large, the edge skin clamp is driven to move vertically up by the clamp lifting mechanism, and if the size of the silicon rod to be cut is small, the edge skin clamp is driven to move vertically down by the clamp lifting mechanism.
[0151] In some embodiments, the clamp lifting mechanism includes: a clamp lifting guide rail and a clamp lifting unit, wherein the clamp lifting guide rail is arranged vertically. The clamp lifting unit is used to drive the edge skin clamp to move up and down along the clamp lifting guide rail. Figure 5 In the illustrated embodiment, the fixture lifting mechanism 164 includes a fixture lifting guide rail 1641 and a fixture lifting unit.
[0152] In some embodiments, the edge clamp lifting unit includes: a lifting screw and a screw drive source, the lifting screw is arranged vertically and associated with the clamp seat of the edge clamp, and the screw drive source is associated with the lifting screw. Figure 5 In the illustrated embodiment, the edge clamp lifting unit includes: a lifting screw 1643 and a screw drive source, wherein the lifting screw 1643 is arranged in the vertical direction and is associated with the mounting structure of the clamp seat on which the edge skin clamp is provided, and the screw drive source is associated with the lifting screw 1643. The screw drive source may be, for example, a servo motor. In actual application, the servo motor serving as the screw drive source rotates in the forward direction, driving the lifting screw to rotate in the forward direction, so that the edge skin clamp associated with the lifting screw moves upward. Conversely, the servo motor serving as the screw drive source rotates in the reverse direction, driving the lifting screw to rotate in the reverse direction, so that the edge skin clamp associated with the lifting screw moves downward.
[0153] In some embodiments, the clamp lifting unit includes: a lifting rack, a lifting gear, and a gear drive source, wherein the lifting rack is arranged vertically and associated with the clamping seat of the side skin clamp, the lifting gear is engaged with the lifting rack, and the gear drive source is associated with the lifting gear, and is used to drive the lifting gear to rotate so that the engaged side skin clamp is lifted and lowered vertically. The gear drive source may be, for example, a servo motor. In actual applications, the servo motor serving as the gear drive source rotates forward, driving the associated lifting gear to rotate forward, so that the side skin clamp associated with the clamping seat gear is moved upward on the engaged clamping seat rack. Conversely, the servo motor serving as the gear drive source rotates reversely, driving the associated clamping seat gear to rotate reversely, so that the side skin clamp associated with the clamping seat gear is moved downward on the engaged clamping seat rack.
[0154] So, when applying Figure 5 When the first edge skin anti-collapse device 16 is shown, the silicon rod is placed horizontally on the silicon rod supporting platform of the silicon rod transfer device; the edge skin clamp 162 is driven by the clamp lifting mechanism 164 in the first edge skin anti-collapse device 16 to move up and down vertically to adjust the position; the edge skin clamp advance and retreat mechanism 163 in the first edge skin anti-collapse device 16 drives the edge skin clamp to advance and retreat and approach the silicon rod; the clamp driving mechanism 162 in the first edge skin anti-collapse device 16 drives at least one end face clamp of at least a pair of end face clamps to move along the clamping direction until the silicon rod pressing piece on the end face clamp presses against the silicon rod body and the edge skin pressing piece on the end face clamp presses against the edge skin to be cut (for details, see Figure 7 Afterwards, the silicon rod cutting device performs a square cutting operation on the silicon rod to form the silicon rod body and the edge skin (for details, see Figure 8 After the edge skin 101 is cut, the edge skin clamping reinforcement in the end face chuck is driven to extend relative to the clamping base and press against the cut edge skin 101. At this time, the edge skin clamp 162 is driven to retreat along the forward and backward direction by the edge skin clamp advance and retreat mechanism 163. The clamping force applied by the edge skin clamping reinforcement on the edge skin is greater than the pressing force applied by the silicon rod pressing piece on the silicon rod body and the pressing force applied by the edge skin pressing piece on the edge skin, thereby driving the clamped edge skin 101 to separate from the silicon rod body (see for details). Figure 9 status diagram shown).
[0155] In the present application, the first edge skin anti-collapse device also includes an edge skin unloading and conveying mechanism, which is connected to the edge skin clamp advance and retreat mechanism.
[0156] In some embodiments, the edge skin unloading and conveying mechanism may include an edge skin bearing structure and a conveying drive mechanism. Figure 4As shown, the edge skin unloading mechanism may include an edge skin supporting structure 167 and a conveying drive mechanism 168.
[0157] The edge skin supporting structure 167 is used to support the edge skin. As previously mentioned, the edge skin clamp advance and retreat mechanism is used to withdraw the edge skin held by the edge skin clamp in the advance and retreat direction, thereby driving the edge skin to separate from the silicon rod body. Thereafter, the chuck drive mechanism in the edge skin clamp drives the chuck to move, releasing the clamped edge skin and allowing it to rest on the edge skin supporting structure. In certain embodiments, the edge skin supporting structure may be, for example, an edge skin placement groove. The edge skin placement groove may, for example, be a U-shaped structure.
[0158] In some embodiments, the conveying drive mechanism is used to drive the edge skin bearing structure to move along the transfer direction to move between the first loading and unloading position and the first cutting position. Figure 4 In the illustrated embodiment, the edge skin unloading mechanism includes two edge skin support structures 167 and a conveying drive mechanism 168. The conveying drive mechanism 168 is associated with the two edge skin support structures 167 and is used to drive the two edge skin support structures 167 to move between the first loading and unloading area and the first cutting area. In some embodiments, the conveying drive mechanism 168 can be, for example, a chain conveying mechanism. Of course, in some embodiments, in the edge skin unloading conveying mechanism, a conveying drive mechanism can be configured for each edge skin support device, and the conveying drive mechanism drives the corresponding edge skin support structure. Taking the conveying drive mechanism as a chain conveying mechanism as an example, it includes a ring chain, a chain drive source, and a connecting piece, wherein the ring chain is a closed-loop chain, which is wound around multiple movable gears to form a preset shape, for example, an inverted triangle, a rectangle, or a trapezoid, etc. The side skin bearing structure is associated with the ring chain through a connecting piece. The chain drive source can be, for example, a servo motor, and the servo motor is associated with one of the movable gears. For example, the output shaft of the servo motor is connected to the gear shaft of the movable gear. When the ring chain is driven by the servo motor, the side skin bearing structure and the side skin it carries can be driven to move in the transfer direction through the connecting piece. In actual application, the servo motor works to drive the associated movable gear to rotate forward (or reverse), and the movable gear rotating forward (or reverse) drives the meshing circular chain to move forward (or reverse), and the circular chain moving forward (or reverse) can drive the side skin bearing structure from the first loading and unloading position to the first cutting position through the connecting piece; conversely, the servo motor works to drive the associated movable gear to rotate reversely (or forward), and the movable gear rotating reversely (or forward) drives the meshing circular chain to move reversely (or forward), and the circular chain moving reversely (or forward) can drive the side skin bearing structure and the side skin it carries to move from the first cutting position to the first loading and unloading position through the connecting piece.
[0159] In some embodiments, the conveying drive mechanism is used to convey the edge skin on the edge skin bearing structure. In some embodiments, the conveying drive mechanism is a chain conveying mechanism or a transmission belt mechanism. Taking the conveying drive mechanism as a chain conveying mechanism as an example, it includes an endless chain, a chain driving source, and a push-out member, wherein the endless chain is a closed-loop chain, which is wound around a plurality of movable gears to form a preset shape, for example, an inverted triangle, a rectangle, or a trapezoid, etc. The chain driving source can be, for example, a servo motor, and the servo motor is associated with one of the movable gears, for example, the output shaft of the servo motor is connected to the gear shaft of the movable gear, and the push-out member can be fixedly arranged on the endless chain. When the endless chain is driven by the servo motor, the push-out member will interfere with the edge skin carried by the edge skin bearing structure and push the edge skin. In actual application, the servo motor operates, driving the associated movable gear to rotate forward. The forward-rotating movable gear drives the meshed endless chain to move forward. The ejector on the forward-moving endless chain contacts the side skin and pushes the side skin to move relative to the side skin support structure until the material is unloaded. The ejector can be, for example, a lever or a bump.
[0160] In the present application, the edge skin unloading and conveying mechanism further includes an edge skin flipping mechanism for driving the edge skin supporting structure to flip. Each edge skin supporting structure is equipped with an edge skin flipping mechanism, which can drive the corresponding edge skin supporting structure and the edge skin it carries to flip. In some embodiments, please refer to Figure 10 and Figure 11 , in such Figure 10 and Figure 11 In the illustrated embodiment, the side skin flipping mechanism includes a pivot axis and a telescopic assembly, including a telescopic rod 1691 and a telescopic cylinder 1692. The side skin supporting structure 167 is pivotally mounted via the pivot axis. One end of the telescopic rod 1691 is associated with the corresponding side skin supporting structure 167, while the other end of the telescopic rod 1691 is associated with the telescopic cylinder 1692. In actual use, the telescopic cylinder 1692 drives the telescopic rod 1691 to retract, pulling the side skin supporting structure 167 toward the vertical direction along the pivot axis and disposing it vertically. The telescopic cylinder 1692 drives the telescopic rod 1691 to extend, pushing the side skin supporting structure 167 away from the vertical direction along the pivot axis and disposing it flat or at an angle. This allows the side skin supported by the side skin supporting structure 167 to lie flat or at an angle, facilitating subsequent unloading of the side skin.
[0161] When the first silicon rod cutting device in the silicon rod cutting and grinding machine of the present application is used to perform the first cutting operation on the silicon rod, the silicon rod to be cut is placed horizontally on the first silicon rod transfer device located at the first loading and unloading area; the first silicon rod carrying device and the silicon rod it carries are driven to transfer from the first loading and unloading area to the first cutting area along the transfer direction, the edge skin clamp is driven by the edge skin clamp advance and retreat mechanism to advance the edge skin clamp to the silicon rod along the advance and retreat direction, and the edge skin clamp of the first edge skin anti-collapse device is driven to clamp the silicon rod to be cut. At this time, the two first cutting wire saws arranged in parallel in the first silicon rod cutting device are located between the front edge skin clamp and the silicon rod; the first silicon rod transfer device is driven to carry the silicon rod and advance toward the first cutting area along the transfer direction, and the first silicon rod cutting device and the first silicon rod transfer device are relatively moved along the transfer direction so that the two first cutting wire saws arranged in parallel in the first silicon rod cutting device are circular in cross section. The silicon rod is subjected to a first cutting operation, so that two parallel first side cut surfaces are formed after the two side skins of the silicon rod are cut off; the side skin clamp advance and retreat mechanism in the first side skin collapse prevention device is utilized, that is, the side skin clamp is driven to retreat in the advance and retreat direction by the side skin clamp advance and retreat mechanism, so that the side skin clamped by the side skin clamp can be retreated in the advance and retreat direction to drive the clamped side skin to be separated from the silicon rod body; the side skin clamp and the side skin it holds are driven to descend by the clamp lifting mechanism, the side skin clamp is released, and the side skin is released to the side skin supporting structure, the side skin supporting structure is driven to transfer from the first cutting position to the first loading and unloading position along the transfer direction by the conveying drive mechanism, and the side skin supporting structure and the side skin it carries are driven to flip by the side skin flipping mechanism to unload the flipped side skin; the first silicon rod supporting device and the silicon rod body it carries are driven to transfer from the first cutting position to the first loading and unloading position along the transfer direction to complete the first cutting operation of the silicon rod.
[0162] The second cutting station includes a second loading and unloading position and a second cutting position. The second cutting station is equipped with a second silicon rod transferring device. The second silicon rod transferring device is used to carry the silicon rod having two first side cut surfaces and transfer it between the second loading and unloading position and the second cutting position along the transfer direction. The second silicon rod cutting device is arranged in the second cutting position. The second silicon rod cutting device is provided with at least one second cutting wire saw. The at least one second cutting wire saw is located in the vertical plane and arranged along the vertical direction or at an angle to the vertical. The second silicon rod cutting device and the second silicon rod transferring device are relatively moved along the transfer direction so that the at least one second cutting wire saw performs a second cutting operation on the silicon rod having two first side cut surfaces to obtain a square silicon rod with a rectangular cross-section.
[0163] The second silicon rod transfer device is used to carry the silicon rod and transfer it between the second loading and unloading area and the second cutting area of the second cutting station along the transfer direction, wherein the silicon rod (having two first side sections) is placed horizontally on the second silicon rod transfer device and the axis of the silicon rod is consistent with the transfer direction, and the transfer direction is consistent with the first direction.
[0164] In some embodiments, the second silicon rod transfer device may include: a second transfer channel, a second carrying platform, and a second transfer drive mechanism.
[0165] The second transfer channel is arranged along the transfer direction. In certain implementations, the second transfer channel includes a second transfer guide rail. The length of the second transfer channel in the transfer direction is greater than the length of the silicon rod to be cut.
[0166] The second carrying platform is provided on the second transfer channel for carrying the silicon rods. The silicon rods are placed horizontally on the second carrying platform, that is, the axis of the silicon rods is aligned with the transfer direction (ie, the first direction).
[0167] The second transfer drive mechanism is used to drive the second carrying platform and the silicon rods carried thereon to move along the transfer direction on the second transfer channel.
[0168] In some embodiments, the second carrying platform is mounted on the second transfer guide rail of the second transfer channel, and the second carrying platform is used to carry the silicon rod and is in contact with the first side section of the silicon rod.
[0169] The second transfer drive mechanism is used to drive the second carrying platform and the silicon rods carried thereon to move along the transfer direction on the second transfer channel.
[0170] In some embodiments, the second transfer drive mechanism includes: a second platform transfer guide rail arranged along the transfer direction; and a second transfer drive unit for driving the second carrying platform to move along the second platform transfer guide rail.
[0171] In some embodiments, the second transfer drive unit includes a transfer rack, a transfer gear, and a gear drive source. The transfer rack is disposed along a transfer direction. The transfer gear is associated with the second support platform and meshes with the transfer rack. The gear drive source is configured to drive the transfer gear to rotate, thereby moving the associated second support platform along the transfer direction. The gear drive source may be, for example, a servo motor.
[0172] In some embodiments, the second transfer drive unit includes a transfer screw and a screw drive source. The transfer screw is disposed along the transfer direction and is associated with the second support platform. The screw drive source is configured to drive the transfer screw to rotate, thereby moving the associated second support platform along the transfer direction. The screw drive source may be, for example, a servo motor.
[0173] The second silicon rod cutting device is arranged on the second cutting station, and is used to perform a second cutting operation on the silicon rod transferred by the second silicon rod transfer device at the second cutting position of the second cutting station, so that the silicon rod is obtained into a square silicon rod with a rectangular cross-section after forming two parallel second side cuts.
[0174] The second silicon ingot cutting device includes at least one second wire cutting unit, which includes multiple second cutting wheels and a second cutting wire. The second cutting wire is sequentially wound around the multiple second cutting wheels to form at least one second cutting wire saw. The second wire cutting unit moves relative to the second silicon ingot transfer device and the silicon ingots it carries at the second cutting station, so that the at least one second cutting wire saw performs a second cutting operation on the silicon ingots carried by the second silicon ingot transfer device. In certain embodiments, the second cutting wire is wound between the second cutting wheels in an end-to-end annular winding arrangement. In this case, the second cutting wire can also be referred to as a closed-loop cutting wire.
[0175] In certain embodiments, as Figure 1 As shown, the second silicon rod cutting device 15 includes two second wire cutting units arranged in parallel, each second wire cutting unit includes: a plurality of second cutting wheels and a second cutting wire, the second cutting wire is wound behind the plurality of second cutting wheels to form at least one second cutting wire saw, wherein the second cutting wire saw is arranged in the vertical direction or at an angle to the vertical direction.
[0176] The structure of the second silicon rod cutting device 15 is similar to that of the first silicon rod cutting device 13. Figures 4 to 11 and its related descriptions.
[0177] The second silicon ingot cutting device 15 includes two second wire cutting units. Each second wire cutting unit comprises a plurality of second cutting wheels and a second cutting wire. The second cutting wire is wound around the plurality of second cutting wheels to form at least one second cutting wire saw. The second cutting wire saw is arranged vertically or at an angle to the vertical. Furthermore, the second wire cutting unit may also include a second cutting mounting structure, on which the plurality of second cutting wheels are mounted.
[0178] In some embodiments, the multiple second cutting wheels in the second wire cutting unit are connected to the second cutting mounting structure, or the multiple second cutting wheels are arranged on the second cutting mounting structure through a bracket, a connecting plate, or a mounting frame. The second cutting mounting structure serves as a carrier for associating the multiple second cutting wheels in the second wire cutting unit with the second cutting frame or the second cutting seat. The specific form of the second cutting mounting structure can be a beam, a plate frame, a bracket, etc., which is not limited in this application.
[0179] In the silicon rod cutting and grinding machine of the present application, the second silicon rod cutting device includes a second cutting wire saw in a second wire cutting unit, which is arranged along the vertical direction or at an angle to the vertical direction.
[0180] In the second wire cutting unit, the second cutting wheel is provided with at least one second cutting wire groove for winding the cutting wire. The second cutting wire groove defines the position of the second cutting wire, thereby controlling cutting accuracy. Any second cutting wire is formed between two opposing second cutting wheels after the second cutting wire is wound around them. The positions of the two second cutting wheels and the positional relationship between the two cutting wheels can be used to determine the direction of the second cutting wire.
[0181] In certain embodiments, the second cutting mounting structure is an overall rectangular frame, and the second cutting unit includes a plurality of second cutting wheels, for example, four second cutting wheels, which are respectively arranged near the four corners of the second cutting mounting structure, and the wheel surface of each second cutting wheel is located in a vertical plane (the vertical plane is formed by the first direction and the third direction). Two second cutting wheels are located in front (relatively closer to the second loading and unloading location) and arranged vertically and parallel to each other, and the other two second cutting wheels are located in the back (relatively farther from the second loading location) and arranged vertically and parallel to each other. The second cutting wire is wound around these four second cutting wheels to form at least one second cutting wire saw (for example, a second cutting wire saw is formed between the two second cutting wheels arranged vertically and parallel to each other), and the second cutting wire saw is arranged along the third direction (i.e., the vertical direction). In addition, in order for the second cutting wire saw to effectively cut the silicon rod, the second cutting wire saw must interfere with the silicon rod in the vertical direction.
[0182] In some embodiments, the second cutting line is wound between each second cutting wheel in an end-to-end manner to form an annular cutting line (also referred to as a closed-loop cutting line). The second cutting line is wound between multiple second cutting wheels in an end-to-end manner to form an annular cutting line (also referred to as a closed-loop cutting line).
[0183] The multiple secondary cutting wheels in the second cutting unit are wound around an annular cutting wire. In this example, the second silicon ingot cutting device eliminates the need for a wire storage drum. Driven by a cutting wire drive, the annular cutting wire maintains high-speed operation and maintains a consistent direction during the cutting operation. This allows the second silicon ingot cutting device to achieve high-precision secondary cutting, avoiding issues such as ripples on the cut surface caused by reversing cutting wire direction or speed in existing cutting methods. Furthermore, the annular cutting wire effectively reduces the total cutting wire length required by the second wire cutting unit, lowering production costs.
[0184] In certain embodiments, the cutting line drive device is a motor having a power output shaft, and the power output shaft is connected to the second cutting wheel. In this way, the second cutting line can be driven by the wound second cutting wheel to run along the winding direction. Of course, in specific implementations, the cutting line drive device can also be another drive source, such as a hydraulic motor, as long as it can drive the second cutting line. This is not limited in this application.
[0185] The second wire cutting unit in the present application may further include a second transition wheel, which is used to change the direction or guide the second cutting wire, or the second transition wheel can be used to adjust the tension of the second cutting wire. The number of the second transition wheels can be one or more according to the layout requirements.
[0186] The second transition wheel, while guiding and pulling the second cutting line, also serves as a tension wheel for adjusting the tension of the second cutting line. The tension wheel is used to adjust the tension of the second cutting line, which can reduce the probability of the second cutting line breaking and thus reduce consumables.
[0187] For example, in some embodiments, in the second wire cutting unit, the second cutting mounting structure as a whole is a rectangular frame, and each second wire cutting unit includes multiple second cutting wheels and multiple second transition wheels, for example, two second cutting wheels and two second transition wheels, which are respectively arranged near the four corners of the second cutting mounting structure, and the wheel surfaces of the two second cutting wheels and the two second transition wheels are both located in the vertical plane, wherein the two second cutting wheels are in front and arranged in parallel up and down, and the two second transition wheels are in the back and arranged in parallel up and down, and the second cutting wire is wound around the two second cutting wheels and the two second transition wheels to form at least one second cutting wire saw (for example, a second cutting wire saw is formed between the two second cutting wheels), and at least one second cutting wire saw is arranged vertically.
[0188] As mentioned above, the second cutting wire is wound around a plurality of second cutting wheels or a plurality of second cutting wheels and a plurality of second transition wheels to form a second cutting wire saw between the two preceding second cutting wheels. Therefore, to adjust the wire length of the second cutting wire saw, the spacing between the two second cutting wheels can be adjusted, for example, by changing the position of at least one of the two second cutting wheels.
[0189] The second cutting wire saw is located in a vertical plane and is arranged along the vertical direction or at an angle to the vertical direction, and the silicon rod carried by the second silicon rod transfer device at the corresponding second cutting station is placed horizontally (the axis of the silicon rod is arranged along the transfer direction). Therefore, in order to achieve the cutting of the silicon rod, the length of the second cutting wire saw is adapted to the size of the end face of the silicon rod. For example, the length of the second cutting wire saw must be greater than or equal to the diameter of the silicon rod or the chord length of the silicon rod at the position to be cut.
[0190] The direction of the second cutting wheel surface corresponds to the direction of the second cutting wire saw. It should be understood that the second cutting wheel surface is parallel to the plane where any second cutting wire groove in the second cutting wheel is located. In order to control the cutting accuracy and the stability of the cutting process, the second cutting wire saw should be located in the plane where the second cutting wire groove for winding the second cutting wire is located; at the same time, during the cutting process, the force direction of the silicon rod on the second cutting wire must be parallel to the cutting wire groove, that is, the cutting wheel surface is parallel to the cutting direction. The cutting direction is the direction of the silicon rod axis in the second cutting operation, that is, the transfer direction (that is, the first direction X-axis).
[0191] The second silicon ingot cutting apparatus includes two second wire cutting units arranged in parallel, each second wire cutting unit having a second cutting wire saw, thereby forming two parallel cutting wire saws. In certain embodiments, the second silicon ingot cutting apparatus includes two second wire cutting units arranged in parallel along a second direction, each second wire cutting unit having a second cutting wire saw, and the second cutting wire saws are arranged in a vertical direction. Thus, the two second cutting wire saws belonging to the two second wire cutting units are both arranged in a vertical direction.
[0192] In fact, the second cutting wire saw may have other variations. In some embodiments, the second cutting wire saw is arranged along the vertical direction, but the present invention is not limited thereto. In other embodiments, the second cutting wire saw may be located in a vertical plane and arranged at an angle to the vertical direction (i.e., the third direction). The vertical plane is composed of the first direction and the third direction, and the angle is less than or equal to 10 degrees (≤10°), or the angle is less than or equal to 5 degrees (≤5°), or the angle is less than or equal to 3 degrees (≤3°). That is, the routing direction of the second cutting wire saw may be located in the vertical plane and form an angle with the third direction (i.e., the vertical direction) of less than or equal to 10 degrees (≤10°), less than or equal to 5 degrees (≤5°), or less than or equal to 3 degrees (≤3°). The angle here is not limited to an integer angle, and it may be any angle within a limited range, for example, 0.09°, 1.3°, 2.5°, 3°, etc. In certain embodiments, when two second cutting wheels are arranged above and below to form the second cutting wire saw, the upper second cutting wheel is located in front in the first direction and the lower second cutting wheel is located in the rear in the first direction, and the second cutting wire saw thus formed may form a positive deflection angle with the vertical. In certain embodiments, when two second cutting wheels are arranged above and below to form the second cutting wire saw, the upper second cutting wheel is located in the rear in the first direction and the lower second cutting wheel is located in the front in the first direction, and the second cutting wire saw thus formed may form a negative deflection angle with the vertical. The deflection angle (including positive and negative deflection angles) may be changed according to the cutting process requirements and the size specifications of the silicon rods. For example, the deflection angle may be adjusted by changing the position of one or both of the two second cutting wheels arranged above and below in relation to the second cutting wire saw.
[0193] In some embodiments, the second wire cutting unit further includes a second tension adjustment mechanism. During wire cutting, the wire tension affects the yield rate and processing accuracy during cutting. The second tension adjustment mechanism detects and adjusts the tension of the second cutting wire to ensure that the tension reaches a predetermined threshold and remains constant during cutting, or maintains the constant value within a certain range of values.
[0194] In some embodiments, the second tension adjustment mechanism is associated with the second transition wheel or the second cutting wheel. The second transition wheel in the wire cutting unit serves as a tensioning wheel for adjusting the tension of the cutting wire while guiding and pulling the second cutting wire.
[0195] A tensioner is used to adjust the tension of the cutting wire, reducing the chance of wire breakage and consumables. The cutting wire plays a crucial role in the cutting process, but even the best wire has limits to its elongation and wear resistance. This means that the wire will gradually become thinner during continuous operation, eventually breaking. Therefore, current wire-cutting equipment typically incorporates a tension compensation mechanism to compensate for the wire's elongation during its reciprocating motion. A tensioner is one such mechanism.
[0196] Taking the tensioning wheel as the transition wheel as an example, the tension adjustment mechanism includes at least: a tension sensor, a servo motor and a screw rod; the tension sensor is arranged on the transition wheel, continuously senses the tension value of the cutting line on the transition wheel, and sends a driving signal when the tension value is less than a preset value; the servo motor is electrically connected to the tension sensor, and is used to start working after receiving the driving signal sent by the tension sensor; one end of the screw rod is connected to the transition wheel, and the other end is connected to the servo motor, and when the servo motor is working, it pulls the transition wheel for unidirectional displacement to adjust the tension of the cutting line.
[0197] The tension adjustment mechanism includes: a connecting rod assembly and a tension drive unit. The connecting rod assembly is associated with a transition wheel serving as a tensioning wheel and the tension drive unit. The connecting rod assembly is controlled by the tension drive unit, that is, the tension drive unit drives the connecting rod assembly to actuate the transition wheel to produce a position change to adjust the tension of the closed-loop cutting line.
[0198] Regarding the tension drive unit, in certain implementations, the tension drive unit may include a counterweight portion, which may be associated with a connecting rod assembly. For example, taking a transition wheel as a tensioning wheel, when the tension of the closed-loop cutting line is to be increased, the counterweight portion is released, the counterweight portion descends, and the connecting rod assembly, under the action of the weight of the counterweight portion, drives the associated tensioning wheel to move, thereby expanding the circumference of the shape enclosed by each cutting wheel and the transition wheel, and increasing the tension of the closed-loop cutting line. When the tension of the closed-loop cutting line is to be reduced, the counterweight portion is raised, and the connecting rod assembly, under the action of the weight of the counterweight portion, drives the associated tensioning wheel to move in the opposite direction, thereby expanding the circumference of the shape enclosed by each cutting wheel and the transition wheel, and reducing the tension of the closed-loop cutting line.
[0199] The counterweight portion may include counterweight blocks, wherein the number of the counterweight blocks may vary according to the requirements for adjusting the tension of the closed-loop cutting line. For example, when the tension of the closed-loop cutting line is increased, the number of counterweight blocks may be increased, and when the tension of the closed-loop cutting line is reduced, the number of counterweight blocks may be reduced.
[0200] In some embodiments, the counterweight may include a locking mechanism for locking the counterweight so that the counterweight is stationary relative to the cutting mounting structure, thereby switching the counterweight from an active state to a locked state with respect to the cutting mounting structure. In some examples, the locking mechanism may be, for example, a latch.
[0201] The tension driving unit may be modified in other ways. For example, the tension driving unit may include a tension cylinder.
[0202] In certain embodiments, the second silicon ingot cutting apparatus further includes at least one second spacing mechanism, disposed on the at least one second wire cutting unit, for driving the plurality of second cutting wheels in the second wire cutting unit to move perpendicularly to the cutting wheel surfaces. The second silicon ingot cutting apparatus can utilize the spacing mechanism to switch the second cutting wire between different cutting slots of the second cutting wheel, or to adjust the position of the second cutting wire saw to change the cutting position (or processing specifications) relative to the silicon ingot.
[0203] In certain implementations, a second wire cutting unit in a second silicon rod cutting device is used as an example for description. The second wire cutting unit includes multiple second cutting wheels and multiple second transition wheels. The carrier for carrying the multiple second cutting wheels and the second transition wheel is, for example, a second cutting mounting structure. The second distance adjustment mechanism can be used to drive the second cutting mounting structure as a whole to move along the perpendicular direction of the cutting wheel surface. The second transition wheel and the second cutting wheel move together with the second cutting mounting structure along the perpendicular direction of the second cutting wheel surface (i.e., the transposition direction or the second direction Y-axis). In this state, the multiple second cutting wheels and the second transition wheel are relatively stationary, that is, the positional relationship between the second transition wheel and the second cutting wheel remains unchanged. At this time, the second distance adjustment mechanism is used to adjust the cutting position of at least one second wire cutting saw in the at least one second wire cutting unit relative to the silicon rod.
[0204] In certain implementations, each second cutting wheel has at least two second cutting grooves, each of which is parallel to the other and has a cutting offset perpendicular to the surface of the second cutting wheel. The second distance adjustment mechanism is used to drive the multiple second cutting wheels in the second wire cutting unit to move relative to the second cutting mounting structure, thereby changing the position of the grooves around which the second cutting wire is wound on the second cutting wheel. In certain implementations, the multiple second cutting wheels in the second wire cutting unit can be connected to a bracket, for example, wherein the bracket is movably mounted on the second cutting mounting structure and driven by the second distance adjustment mechanism to move perpendicular to the surface of the second cutting wheel.
[0205] When the at least one second distance adjusting mechanism is used to realize the transformation of the second cutting wire wound around the cutting wire grooves of the plurality of second cutting wheels in the at least one second wire cutting unit, in an actual scenario, the second cutting wire grooves corresponding to the cutting wires before and after the groove change can be predetermined. For example, the position of the second cutting wire before the groove change is the second cutting wire groove a1, and the second cutting wire is wound around the second cutting wire groove a2 after the groove change. The displacement amount of the plurality of second cutting wheels in the second wire cutting unit driven by the second distance adjusting mechanism is determined based on the cutting offset between the second cutting wire groove a1 and the second cutting wire groove a2, that is, the displacement amount is set as the second cutting wire groove. The cutting offset between the wire groove a1 and the second cutting wire groove a2 can be used to realize the replacement of the second cutting wire from the second cutting wire groove a1 to the second cutting wire groove a2; it should be noted that the at least one second distance adjustment mechanism drives the multiple second cutting wheels in the second wire cutting unit to move in the direction perpendicular to the wheel surface of the second cutting wheel in the direction in which the cutting wire groove a2 points to the cutting wire groove a1. After the groove is changed, the cutting position of the second cutting wire saw in space remains unchanged, and the step of further calibrating the position of the second cutting wheel or other components is omitted, and the silicon rod can be cut according to the preset cutting amount, so that the groove changing process is simplified.
[0206] To further illustrate how the at least one second spacing adjustment mechanism achieves movement of multiple second cutting wheels in a second wire-cutting unit in a direction perpendicular to the second cutting wheel surfaces, this application discloses the following embodiments. The specific form of the at least one second spacing adjustment mechanism may vary accordingly when the number of second wire-cutting units in the second silicon ingot cutting apparatus varies.
[0207] In some embodiments, the second silicon ingot cutting device includes a single-wire cutting unit, which is a second wire cutting unit. The second spacing adjustment mechanism includes a screw disposed orthogonally to the second cutting wheel surface and threadedly connected to the single-wire cutting unit; and a screw drive source for driving the screw to rotate.
[0208] The single-wire cutting unit in the second silicon rod cutting device includes a plurality of second cutting wheels, and the second cutting wire is wound around the plurality of second cutting wheels to form at least one second cutting wire saw. The screw of the second distance adjustment mechanism has a distal end and a proximal end. In a specific implementation, for example, the proximal end of the screw can be connected to a screw drive source and rotated under the drive of the screw drive source, and the distal end of the screw is connected to the second single-wire cutting unit with a thread. Through the connection method at both ends of the screw, the screw can rotate based on the drive of the screw drive source and convert the screw rotation into axial displacement with the help of the threaded connection. The axial displacement direction is the setting direction of the screw, that is, the orthogonal direction of the cutting wheel surface; the displacement of the single-wire cutting unit in the orthogonal direction of the second cutting wheel surface can be achieved by driving the screw to rotate by the screw drive source in the second distance adjustment mechanism. The second cutting wheel of the single-wire cutting unit can be moved forward or backward in the orthogonal direction of the second cutting wheel surface by the different rotation directions of the screw.
[0209] In certain embodiments, the second silicon rod cutting device includes a single-wire cutting unit, and herein, the single-wire cutting unit is a second wire cutting unit. The second distance adjustment mechanism includes: a telescopic member, which is arranged along the orthogonal direction of the second cutting wheel surface and is associated with the single-wire cutting unit; a telescopic member driving source, which is used to drive the telescopic member to perform telescopic movement along the orthogonal direction of the second cutting wheel surface. Here, the telescopic member can be set as a rod structure and the extension direction of the rod body is the orthogonal direction of the second cutting wheel surface. The telescopic member can be telescopically moved along its extension direction under the drive of the telescopic member driving source. One end of the telescopic member can be connected to the telescopic member driving source, and the retractable free end is associated with the single-wire cutting unit, so that the second cutting wheel of the single-wire cutting unit can be driven to move in the orthogonal direction of the second cutting wheel surface under the action of the telescopic member driving source. The telescopic member is, for example, an electric telescopic rod, or a connecting rod connected to a cylinder. The cylinder can serve as a telescopic member driving source, and this application does not impose any restrictions. The telescopic rod can be connected to the single-wire cutting unit via a linear or indirect connection, for example, directly to the second cutting mounting structure of the single-wire cutting unit, or indirectly to the second single-wire cutting unit via a support or bearing. It should be understood that the extension or retraction of the telescopic member corresponds to the advancement or retraction of the single-wire cutting unit in a direction orthogonal to the surface of the second cutting wheel.
[0210] Here, in the embodiments disclosed in the present application, the association can be achieved, for example, by one or more of snapping, screwing, bonding, and welding. For example, in the above embodiments, the telescopic rod can be associated with the second wire cutting unit by one or more of snapping, screwing, bonding, and welding; of course, the implementation method of the association is not limited to this, but is intended to achieve transmission in the second direction.
[0211] In certain embodiments, the second silicon ingot cutting device includes a single-wire cutting unit, which is a single wire cutting unit. The second spacing mechanism includes: a rack disposed on the second single-wire cutting unit in a direction perpendicular to the second cutting wheel surface; a transmission gear meshing with the rack; and a gear drive source for driving the transmission gear to rotate. Driven by the gear drive source, the transmission gear rotates, and the rack meshing with the transmission gear correspondingly moves in the direction of the rack. In this example, the rack and transmission gear cooperate to convert the rotational motion driven by the gear drive source into linear motion along the rack. The rack is disposed on the second single-wire cutting unit in a direction perpendicular to the second cutting wheel surface, thereby driving the second cutting wheels of the single-wire cutting unit to move in the direction perpendicular to the second cutting wheel surface. Simultaneously, the gear drive source controls the switching of the rotational direction of the transmission gear, thereby causing the multiple second cutting wheels of the single-wire cutting unit to advance or retract in the direction perpendicular to the second cutting wheel surface.
[0212] In some embodiments, the second silicon rod cutting device includes two second wire cutting units arranged in parallel and opposite to each other, and at least one of the two second wire cutting units can be driven by the at least one distance adjustment mechanism to move along the orthogonal direction of the second cutting wheel surface, so as to adjust the wire cutting saw spacing between the second cutting wire saws in the two second wire cutting units, or to change the second cutting wire wound around the cutting wire grooves of multiple second cutting wheels in a certain second wire cutting unit.
[0213] The at least one second distance adjustment mechanism can be configured to be connected to a certain second wire cutting unit, or to be associated with two second wire cutting units at the same time, so as to drive the multiple second cutting wheels in the connected or associated one or two second wire cutting units to move along the orthogonal direction of the second cutting wheel surface.
[0214] In certain embodiments, the second distance adjusting mechanism includes: a screw, which is arranged along the orthogonal direction of the second cutting wheel surface and is threadedly connected to a second wire cutting unit; and a screw drive source, which is used to drive the screw to rotate. The manner in which the multiple second cutting wheels in the second wire cutting unit to which the screw is driven and connected by the screw drive source move in the orthogonal direction of the second cutting wheel surface is similar to the aforementioned embodiment. The second cutting unit driven by the distance adjusting mechanism can be regarded as a single-wire cutting unit, which will not be described in detail here. It should be understood that by providing the second distance adjusting mechanism on any second wire cutting unit, the spacing between the parallel second cutting wire saws formed between the two second wire cutting units can be increased and decreased, and the second silicon rod cutting device can cut the silicon rods into different specifications.
[0215] In certain embodiments, the second distance adjustment mechanism includes: a telescopic member disposed orthogonally to the second cutting wheel surface and associated with a second linear cutting unit; and a drive source for the telescopic member, configured to drive the telescopic member to telescope orthogonally to the second cutting wheel surface. Here, the second cutting unit equipped with the second distance adjustment mechanism can be considered a single linear cutting unit. The specific implementation method can be referred to in the previous embodiment and will not be further described here.
[0216] In some embodiments, the second spacing mechanism includes: a spacing rack positioned perpendicular to the second cutting wheel surface and associated with a second linear cutting unit; a transmission gear meshing with the spacing rack; and a gear drive source configured to drive the transmission gear for rotation. Through the meshing transmission gear and spacing rack, the gear drive source can control the spacing rack to move linearly along the rack direction, and the second linear cutting unit associated with the spacing rack can drive the plurality of second cutting wheels, via the rack, to move perpendicular to the second cutting wheel surface.
[0217] In some embodiments, the distance adjustment mechanism includes: a bidirectional screw, which is arranged along the orthogonal direction of the second cutting wheel surface and is threadedly connected to the two second wire cutting units; and a screw drive source, which is used to drive the screw to rotate so that the two second wire cutting units move toward or away from each other along the orthogonal direction of the second cutting wheel surface. In one embodiment, the bidirectional screw is a double-threaded screw, and the two ends of the bidirectional screw are respectively provided with threads and the thread directions are opposite. The screw drive source can be set at either end of the bidirectional screw to drive the bidirectional screw to rotate along the screw shaft. Through the opposite threads at the two ends of the bidirectional screw, when the bidirectional screw rotates under the drive of the screw drive source, the movement of the two ends of the bidirectional screw is converted into axial linear motion in opposite directions. The axial direction is the orthogonal direction of the second cutting wheel surface on which the bidirectional screw is set. Under the drive of the screw drive source, the multiple second cutting wheels corresponding to the two second wire cutting units can move toward or away from each other.
[0218] In certain embodiments, the second distance adjustment mechanism includes a servo motor mounted on the at least one second wire cutting unit. In practical scenarios, a servo motor is installed on at least one or each second wire cutting unit of the second silicon ingot cutting apparatus, controlling the displacement of the corresponding second wire cutting unit in a direction orthogonal to the second cutting wheel surface. The second wire cutting unit can adjust the cutting offset for slot changes or the cutting position of the cutting line by a predetermined amount. The servo motor's precise positioning function drives the multiple second cutting wheels in the second wire cutting unit to move orthogonally to the second cutting wheel surface by a predetermined displacement. For example, the second silicon ingot cutting apparatus includes two second wire cutting units, and at least one of the two second wire cutting units is driven by its corresponding servo motor to independently move orthogonally to the second cutting wheel surface. In certain examples, the servo motor can also be replaced with a travel motor and a travel screw. It should be understood that the second distance adjustment mechanism is a drive device that drives the multiple second cutting wheels in the second wire cutting unit to move relative to each other, and this application does not limit its specific form.
[0219] As previously described, in the second silicon rod cutting apparatus, the second cutting wires of the two parallel second wire cutting units are arranged vertically or at an angle to the vertical, driving the second silicon rod transfer apparatus and the silicon rods it carries to move in the transfer direction. The second wire cutting units and the second silicon rod transfer apparatus move relative to each other in the transfer direction, and the second cutting wires in the two second wire cutting units perform a second cutting operation on the silicon rods carried by the second silicon rod transfer apparatus. The second wire cutting units are used to cut the silicon rods, forming a cut surface and a side skin on the silicon rods. That is, a cutting wire in a second wire cutting unit can cut the silicon rods, forming a cut surface and leaving a side skin. Therefore, the second cutting wires in the two parallel second wire cutting units in the second silicon rod cutting apparatus perform a second cutting operation on a silicon rod with a circular cross-section, forming two parallel second side cut surfaces on the silicon rod.
[0220] The silicon rod squaring device includes a second edge skin anti-collapse device that cooperates with the second silicon rod transferring device and is used to stabilize the edge skin when the second silicon rod cutting device performs the second cutting operation on the silicon rod.
[0221] It should be understood that the silicon rods carried by the second silicon rod transfer device are horizontal, i.e., the axis of the silicon rods is aligned with the transfer direction (i.e., the first direction X-axis). Therefore, the edge skin formed by the second silicon rod cutting device during the second cutting operation on the silicon rods is also horizontal.
[0222] In some embodiments, the second edge skin anti-collapse device includes a clamping support and an edge skin clamp, wherein the edge skin clamp is provided on the clamping support and is used to clamp the edge skin.
[0223] The edge skin clamp comprises: a clamping seat, at least a pair of end face clamps, and a clamp driving mechanism.
[0224] The at least one pair of end face clamps are arranged opposite to each other along the transfer direction and are used to clamp the two end faces of the silicon rod.
[0225] The second silicon rod transfer device includes a second edge skin anti-collapse device, which cooperates with the second silicon rod transfer device to clamp the end face of the silicon rod during the second cutting operation to prevent edge collapse.
[0226] In the present application, the second edge skin anti-collapse device may be the same as the first edge skin anti-collapse device mentioned above. Therefore, for the specific structure and working principle of the second edge skin anti-collapse device, please refer to the description of the first edge skin anti-collapse device mentioned above, and only a brief description is given here.
[0227] In some embodiments, the second edge skin anti-collapse device includes: a clamping support and an edge skin clamp.
[0228] The clamping support of the second edge skin anti-collapse device is associated with the second carrying platform of the second silicon rod transfer device, that is, the clamping support of the second edge skin anti-collapse device and the second carrying platform of the second silicon rod transfer device can move forward and backward together.
[0229] The edge skin clamp is arranged on the clamping support. In some embodiments, the edge skin clamp includes a clamping seat, at least a pair of end face clamps, and a clamp driving mechanism.
[0230] The chuck driving mechanism is used to drive at least one end face chuck of at least one pair of end face chucks to move along the clamping direction to adjust the clamping distance between the at least one pair of end face chucks.
[0231] In certain embodiments, the chuck driving mechanism includes: a chuck moving guide rail arranged along the clamping direction; and a chuck driving unit configured to drive at least one of the at least one pair of end face chucks to move along the chuck moving guide rail. A chuck moving guide rail may be provided between the second end face chuck and the second end face chuck of the at least one pair of end face chucks.
[0232] In some embodiments, the chuck driving unit includes at least one chuck telescopic assembly. The chuck telescopic assembly includes: a chuck telescopic rod and a chuck telescopic cylinder, the chuck telescopic rod is arranged along the clamping direction and is associated with a corresponding end face chuck, and the chuck telescopic cylinder is associated with the chuck telescopic rod. In some embodiments, the chuck driving mechanism is used to drive two end face chucks in a pair of end face chucks to move toward or away from each other along the clamping direction, and the chuck driving mechanism includes a pair of chuck telescopic assemblies, wherein each chuck telescopic assembly corresponds to an end face chuck, the chuck telescopic rod in the chuck telescopic assembly is arranged along the clamping direction and is associated with a corresponding end face chuck, and the chuck telescopic cylinder in the chuck telescopic assembly is associated with the chuck telescopic rod. By using the chuck telescopic cylinders in a pair of chuck telescopic assemblies to control the corresponding chuck telescopic rod to retract or extend, a pair of end face chucks can be driven to move toward or away from each other along the movable guide rails on the movable guide rod or movable guide beam. In certain embodiments, the chuck driving mechanism is used to drive one end face chuck of a pair of end face chucks to move toward or away from the other end face chuck along a clamping direction. The chuck driving mechanism includes a chuck telescopic assembly corresponding to the end face chuck to be moved, wherein a chuck telescopic rod in the chuck telescopic assembly is arranged along the clamping direction and associated with the corresponding end face chuck, and a chuck telescopic cylinder in the chuck telescopic assembly is associated with the chuck telescopic rod. The chuck telescopic cylinder in the chuck telescopic assembly is used to control the corresponding chuck telescopic rod to retract or extend, thereby driving the corresponding end face chuck to move along a movable guide rail on a movable guide rod or movable guide beam toward or away from the other end face chuck.
[0233] The chuck driving unit includes at least one pair of clamping racks, a driving gear, and a gear driving source.
[0234] The chuck driving unit includes: at least one pair of clamping racks, a linkage gear, and a chuck driving source.
[0235] In some embodiments, the chuck driving unit includes: at least one chuck clamping assembly, and the chuck clamping assembly includes: a clamping screw and a screw driving source.
[0236] In some embodiments, the chuck drive unit includes: a bidirectional screw and a screw drive source, wherein the bidirectional screw is arranged along the clamping direction, and both ends of the bidirectional screw are respectively provided with threads and the thread directions are opposite, and the two ends of the bidirectional screw are respectively associated with at least one pair of end face chucks, and the screw drive source is associated with the bidirectional screw.
[0237] The at least one pair of end face clamps are arranged opposite to each other along the clamping direction, and are used for correspondingly clamping the two end faces of the silicon rod.
[0238] In some embodiments, for any one end face chuck of at least a pair of end face chucks, the end face chuck includes a clamping base and a side skin pressing member provided on the clamping base, and the side skin pressing member is used to press the side skin to be cut in the silicon rod.
[0239] In some embodiments, the clamping base may be, for example, a clamping substrate, the size of which is adapted to the edge to be cut, that is, the clamping substrate at least partially or completely covers the edge to be cut.
[0240] In certain embodiments, the edge skin pressing member includes one or more edge skin pressing screws disposed on the clamping base. In practical applications, the edge skin pressing screws are used to press the edge skin to be cut, thereby ensuring that the edge skin to be cut in the silicon ingot remains stable during the second cutting operation.
[0241] Of course, in the end face chuck, the side skin pressing member may also include a side skin pressing elastic member provided on the clamping base. For example, in some embodiments, the side skin pressing elastic member includes a side skin pushing rod, which is sleeved with a compression spring.
[0242] In this way, when the second silicon rod cutting device is used to perform the second cutting operation on the silicon rod, the second silicon rod transfer device carries the silicon rod, and the chuck driving mechanism in the second edge skin anti-collapse device drives at least one end face chuck of the at least one pair of end face chucks to move along the clamping direction, so that the at least one pair of end face chucks clamps the two end faces of the silicon rod, wherein the edge skin pressing member in the end face chuck presses on the edge skin to be cut in the silicon rod, which can ensure that the edge skin to be cut in the silicon rod remains stable during the second cutting operation, and can avoid the edge skin falling off or the edge skin and the silicon rod body being offset to cause edge collapse when the second cutting wire saw in the second wire cutting unit passes through the silicon rod to completely cut it off.
[0243] In certain embodiments, for any one of at least a pair of end face chucks, the end face chuck includes a silicon rod pressing member, a side skin pressing member, and a side skin clamping reinforcement member, wherein the silicon rod pressing member is used to press the main body of the silicon rod, the side skin pressing member is used to press the side skin to be cut in the silicon rod, and the side skin clamping reinforcement member is used to apply additional clamping force to the side skin. In the present application, a silicon rod with a circular cross-section is formed into a square silicon rod with a rectangular cross-section after a square cutting operation, wherein the main body of the silicon rod refers to the portion that at least includes the square silicon rod, that is, the main body of the silicon rod is relative to the side skin, and the main body of the silicon rod is the portion that includes the square silicon rod, and the main body of the silicon rod changes in different square cutting operations. In the following description, the main body of the silicon rod is referred to as the silicon rod main body.
[0244] In certain embodiments, the clamping base can be, for example, a clamping substrate, the dimensions of which are adapted to the end face of the silicon rod and the side skin to be cut. That is, the clamping substrate at least partially covers the main body of the silicon rod and the side skin. The clamping substrate should cover part of the main body of the silicon rod so that the silicon rod pressing member provided thereon can act on the main body of the silicon rod. The clamping substrate should also cover part of the side skin so that the side skin pressing member and side skin clamping reinforcement provided thereon can act on the side skin.
[0245] In certain embodiments, the silicon rod pressing member includes a silicon rod pressing screw provided on the clamping substrate, and the edge skin pressing member includes an edge skin pressing screw provided on the clamping substrate. The number of the silicon rod pressing screws may be one or more, and the number of the edge skin pressing screws may be one or more. In practical applications, the silicon rod pressing screw is used to press the main body of the silicon rod, and the edge skin pressing screw is used to press the edge skin to be cut. Under the condition that the silicon rod pressing screw presses the main body of the silicon rod and the edge skin pressing screw presses the edge skin to be cut, it can ensure that the main body of the silicon rod and the edge skin remain relatively stable, and can avoid the edge skin falling off or the edge skin and the silicon rod main body being offset and causing edge collapse when the cutting wire saw in the wire cutting unit passes through the silicon rod to completely cut off.
[0246] It is easy to know that in some cases, the end surface of the silicon rod is not an ideal flat surface, and one of the silicon rod pressing member and the side skin pressing member may not be able to effectively resist and press the corresponding silicon rod body or side skin.
[0247] To ensure that the silicon rod pressing members and the side skin pressing members disposed on the clamping base can adapt to the end face of the silicon rod and achieve effective pressing, in certain embodiments, the end face chuck further includes a biasing fine-tuning structure for adjusting the position of the clamping base. This biasing fine-tuning structure allows for local adjustment of the position of the clamping base, thereby changing the positions of the silicon rod pressing members and the side skin pressing members disposed on the clamping base.
[0248] In some embodiments, the deflection fine-tuning structure adopts a ball head structure or a similar structure, and the clamping base is provided by the ball head structure. In some embodiments, the ball head or hemispherical head is connected to the clamping base via a connecting rod, and the ball head or hemispherical head is embedded in a receiving cavity.
[0249] In some embodiments, the deflection fine-tuning structure is a hinged structure, and the clamping base is arranged via the hinged structure. For example, the clamping base is connected to the mounting structure via the hinged structure and can deflect relative to the mounting structure by a certain amplitude.
[0250] Furthermore, in certain embodiments, in the end face chuck, the silicon rod pressing member includes a silicon rod pressing elastic member provided on the clamping base, and the side skin pressing member includes a side skin pressing elastic member provided on the clamping base. For example, in certain embodiments, the silicon rod pressing elastic member includes a silicon rod push rod, which is provided with a compression spring; and the side skin pressing elastic member includes a side skin push rod, which is provided with a compression spring. In certain embodiments, the silicon rod pressing elastic member includes a silicon rod push block, whose rear end is provided with a compression spring; and the side skin pressing elastic member includes a side skin push block, whose rear end is provided with a compression spring.
[0251] The end face chuck further includes a skin edge clamping reinforcement member that can advance and retreat relative to the clamping base along a clamping direction. When the skin edge clamping reinforcement member advances relative to the clamping base, the skin edge clamping reinforcement member can provide a strong clamping force to the corresponding skin edge. Generally, the clamping force applied by the skin edge clamping reinforcement member to the skin edge is greater than the pressing force applied by the silicon rod pressing member to the silicon rod body and the pressing force applied by the skin edge pressing member to the skin edge.
[0252] In certain embodiments, the edge skin clamping reinforcement includes a telescopic push rod or a telescopic push block and a telescopic drive source. The telescopic push rod or the telescopic push block is controlled by the telescopic drive source to advance and retract relative to the clamping base. The clamping base plate has a through hole, and the telescopic drive source and the telescopic push rod or the telescopic push block are mounted on a mounting structure. The telescopic drive source can drive the telescopic push rod or the telescopic push block to extend from the clamping base plate and press against the corresponding edge skin, or drive the telescopic push rod or the telescopic push block to retract into the clamping base plate. The telescopic drive source can be, for example, a telescopic cylinder.
[0253] The end face chuck may be modified in other ways in other embodiments.
[0254] In some embodiments, the end face chuck includes: a second clamping base and a second clamping base, wherein a silicon rod pressing piece is provided on the second clamping base, and a side skin pressing piece and a side skin clamping reinforcement piece which moves forward and backward relative to the second clamping base along the clamping direction are provided on the second clamping base.
[0255] In certain embodiments, the second clamping base may be, for example, a clamping base plate, whose dimensions are adapted to the end face of the silicon rod body. That is, the second clamping base plate at least partially covers the silicon rod body, so that the silicon rod pressing member provided thereon can act on the silicon rod body. The second clamping base may be, for example, a clamping base plate, whose dimensions are adapted to the end face of the edge skin to be cut. That is, the second clamping base plate at least partially covers the edge skin, so that the edge skin pressing member provided thereon can act on the edge skin.
[0256] In the end face chuck, the silicon rod pressing member includes a silicon rod pressing screw provided on the second clamping substrate, and the number of the silicon rod pressing screws can be one or more. The edge skin pressing member includes an edge skin pressing screw provided on the second clamping substrate, and the number of the edge skin pressing screws can be one or more. In practical applications, the silicon rod pressing screw is used to press the silicon rod body, and the edge skin pressing screw is used to press the edge skin to be cut. When the silicon rod pressing screw presses the silicon rod body and the edge skin pressing screw presses the edge skin to be cut, relative stability between the silicon rod body and the edge skin can be ensured, thereby preventing the edge skin from falling off or the edge skin from being offset from the silicon rod body when the cutting wire saw in the wire cutting unit passes through the silicon rod to completely cut it off, thereby preventing the edge skin from being offset from the silicon rod body to cause edge collapse.
[0257] Furthermore, in certain embodiments, in the end face chuck, the silicon rod pressing member includes a silicon rod pressing elastic member provided on the second clamping base, and the side skin pressing member includes a side skin pressing elastic member provided on the second clamping base. For example, in certain embodiments, the silicon rod pressing elastic member includes a silicon rod push rod, which is provided with a compression spring; and the side skin pressing elastic member includes a side skin push rod, which is provided with a compression spring. In certain embodiments, the silicon rod pressing elastic member includes a silicon rod push block, whose rear end is provided with a compression spring; and the side skin pressing elastic member includes a side skin push block, whose rear end is provided with a compression spring.
[0258] The end face chuck further includes a side skin clamping reinforcement member that can advance and retreat relative to the second clamping base along a clamping direction. When the side skin clamping reinforcement member advances relative to the second clamping base, the side skin clamping reinforcement member can provide a strong clamping force to the corresponding side skin. Generally, the clamping force applied by the side skin clamping reinforcement member to the side skin is greater than the pressing force applied by the silicon rod pressing member to the silicon rod body and the pressing force applied by the side skin pressing member to the side skin.
[0259] In some embodiments, the side skin clamping reinforcement includes a telescopic top rod or a telescopic top block that is controlled to advance and retreat relative to the second clamping base. For example, the side skin clamping reinforcement includes a telescopic top rod or a telescopic top block and a telescopic drive source, and the telescopic drive source drives the telescopic top rod or the telescopic top block to advance and retreat relative to the second clamping base. In some embodiments, a through hole is provided on the second clamping base, and the telescopic drive source and the telescopic top rod or the telescopic top block are arranged on a mounting structure, and the telescopic drive source can drive the telescopic top rod or the telescopic top block to extend out of the second clamping base and press against the corresponding side skin, or drive the telescopic top rod or the telescopic top block to retract into the second clamping base. Wherein, the telescopic drive source can be, for example, a telescopic cylinder.
[0260] In this way, when the second silicon rod cutting device is used to perform the second cutting operation on the silicon rod, the second silicon rod transfer device carries the silicon rod, and the clamp driving mechanism in the second edge skin collapse prevention device drives at least one end face clamp of the at least one pair of end face clamps to move along the clamping direction, so that the at least one pair of end face clamps clamps the two end faces of the silicon rod, wherein the silicon rod pressing piece in the end face clamp presses on the main body of the silicon rod, and the edge skin pressing piece in the end face clamp presses on the edge skin to be cut in the silicon rod The edge skin clamping reinforcement in the end face chuck is in a retracted state (in the retracted state, the edge skin clamping reinforcement is recessed in the clamping base, or protrudes from the clamping base but the protrusion height relative to the clamping base is also smaller than the protrusion height of the silicon rod pressing member and the edge skin pressing member relative to the clamping base), so that the edge skin and the silicon rod body remain relatively stationary, which can prevent the edge skin from falling off or the edge skin from being offset from the silicon rod body when the cutting wire saw in the wire cutting unit passes through the silicon rod to completely cut it off, resulting in edge collapse. After the edge skin is cut, the edge skin clamping reinforcement in the end face chuck is driven to extend relative to the clamping base and press against the cut edge skin. The clamping force applied by the edge skin clamping reinforcement on the edge skin is greater than the pressing force applied by the silicon rod pressing member on the silicon rod body and the pressing force applied by the edge skin pressing member on the edge skin. At this time, the at least one pair of end face chucks can be operated to move the cut edge skin.
[0261] In the present application, the second edge skin anti-collapse device may further include an edge skin clamp advance and retreat mechanism for driving the edge skin clamp to advance and retreat along an advance and retreat direction.
[0262] In an embodiment in which the end face chuck includes a clamping base and a side skin pressing piece provided on the clamping base, after the side skin cutting is completed, the side skin clamp is driven to retreat in the forward and backward directions by the side skin clamp advance and retreat mechanism, and the pressing pressure applied to the side skin by the pressing piece can drive the clamped side skin to separate from the silicon rod body.
[0263] In an embodiment in which the end face chuck includes a clamping base, a silicon rod pressing member and a side skin pressing member provided on the clamping base, and a side skin clamping reinforcement member that advances and retreats relative to the clamping base in a clamping direction, after the side skin cutting is completed, the side skin clamping reinforcement member in the end face chuck is driven to extend relative to the clamping base and press against the cut side skin. At this time, the side skin clamp is driven to retreat in the advance and retreat direction by the side skin clamp advance and retreat mechanism, and the clamping force applied by the side skin clamping reinforcement member on the side skin is greater than the pressing force applied by the silicon rod pressing member on the silicon rod body and the pressing force applied by the side skin pressing member on the side skin, thereby driving the clamped side skin to separate from the silicon rod body.
[0264] In some embodiments, the edge skin clamp advance and retreat mechanism includes: a clamp advance and retreat guide rail arranged along the advance and retreat direction; and an edge skin clamp advance and retreat unit for driving the edge skin clamp to move along the clamp advance and retreat guide rail.
[0265] In some embodiments, the edge skin clamp advance and retreat unit includes: a clamp seat telescopic rod and a clamp seat telescopic cylinder, the clamp seat telescopic rod is arranged along the advance and retreat direction and is associated with the clamp seat of the edge skin clamp, and the clamp seat telescopic cylinder is associated with the clamp seat telescopic rod.
[0266] In certain embodiments, the edge skin clamp advance / retract unit includes: the edge skin clamp advance / retract mechanism includes: a clamping seat rack arranged along the advance / retract direction and associated with the clamping seat of the edge skin clamp; a clamping seat gear meshing with the clamping seat rack; and a gear drive source associated with the clamping seat gear for driving the clamping seat gear to rotate so as to move the meshed edge skin clamp along the advance / retract direction. The gear drive source may be, for example, a servo motor.
[0267] In some embodiments, the edge skin clamp advance and retreat unit includes: an exit screw and a screw drive source, wherein the exit screw is arranged along the advance and retreat direction and is associated with the clamp seat of the edge skin clamp, and the screw drive source is associated with the exit screw. The screw drive source can be, for example, a servo motor.
[0268] In the present application, the second edge skin anti-collapse device may further include a clamp lifting mechanism for driving the edge skin clamp to move vertically up and down. In certain embodiments, the edge skin clamp is moved vertically up or down by the clamp lifting mechanism to adapt to the size of the silicon rods carried during the transfer. For example, if the silicon rods are large, the edge skin clamp is driven vertically up by the clamp lifting mechanism, and if the silicon rods are small, the edge skin clamp is driven vertically down by the clamp lifting mechanism.
[0269] In some embodiments, the clamp lifting mechanism includes: a clamp lifting guide rail and a clamp lifting unit, wherein the clamp lifting guide rail is arranged vertically. The clamp lifting unit is used to drive the edge skin clamp to move up and down along the clamp lifting guide rail.
[0270] In some embodiments, the edge clamp lifting unit includes: a lifting screw and a screw drive source, the lifting screw is arranged vertically and associated with the clamping seat of the edge skin clamp, and the screw drive source is associated with the lifting screw.
[0271] In certain embodiments, the fixture lifting unit includes a lifting rack, a lifting gear, and a gear drive source. The lifting rack is arranged vertically and associated with the clamping seat of the edge skin fixture. The lifting gear meshes with the lifting rack. The gear drive source is associated with the lifting gear and is used to drive the lifting gear to rotate so that the meshed edge skin fixture moves vertically. The gear drive source can be, for example, a servo motor.
[0272] Thus, when the second edge skin collapse prevention device is used, the silicon rod is placed horizontally on the silicon rod supporting platform of the silicon rod transfer device; the clamp lifting mechanism in the second edge skin collapse prevention device drives the edge skin clamp to move vertically up and down to adjust its position; the edge skin clamp advance and retreat mechanism in the second edge skin collapse prevention device drives the edge skin clamp to advance and retreat and approach the silicon rod; the chuck driving mechanism in the second edge skin collapse prevention device drives at least one of the at least one pair of end face chucks to move in the clamping direction until the silicon rod pressing member on the end face chuck presses against the silicon rod body and the edge skin pressing member on the end face chuck presses against the edge skin to be cut. Thereafter, the silicon rod cutting device performs a square cutting operation on the silicon rod to form the silicon rod body and the edge skin. After the edge skin is cut, the edge skin clamping reinforcement in the end face chuck is driven to extend relative to the clamping base and press against the cut edge skin. At this time, the edge skin clamp is driven to retreat along the forward and backward directions by the edge skin clamp advance and retreat mechanism. The clamping force applied by the edge skin clamping reinforcement on the edge skin is greater than the pressing force applied by the silicon rod pressing piece on the silicon rod body and the pressing force applied by the edge skin pressing piece on the edge skin, thereby driving the clamped edge skin to separate from the silicon rod body.
[0273] In the present application, the second edge skin anti-collapse device also includes an edge skin unloading and conveying mechanism, which is connected to the edge skin clamp advance and retreat mechanism.
[0274] In some embodiments, the edge skin unloading and conveying mechanism may include an edge skin bearing structure and a conveying drive mechanism.
[0275] The edge peel supporting structure is used to support the edge peel. As previously mentioned, the edge peel clamp advance and retreat mechanism is used to withdraw the edge peel held by the edge peel clamp in the advance and retreat direction, thereby driving the edge peel to separate from the silicon rod body. Thereafter, the chuck drive mechanism in the edge peel clamp drives the chuck to move, releasing the clamped edge peel and allowing it to rest on the edge peel supporting structure. In certain embodiments, the edge peel supporting structure may be, for example, an edge peel placement groove. The edge peel placement groove may, for example, be a U-shaped structure.
[0276] In some embodiments, the conveying drive mechanism is used to drive the side skin bearing structure to move along the transfer direction to move between the second loading and unloading area and the second cutting area. In some embodiments, the conveying drive mechanism may be, for example, a chain conveying mechanism, which includes an endless chain, a chain drive source, and a connector, wherein the loop chain is a closed-loop chain, which is wound around a plurality of movable gears to form a preset shape, such as an inverted triangle, a rectangle, or a trapezoid, etc. The side skin bearing structure is associated with the loop chain through a connector, and the chain drive source may be, for example, a servo motor, and the servo motor is associated with one of the movable gears, for example, the output shaft of the servo motor is connected to the gear shaft of the movable gear, and when the loop chain is driven by the servo motor, the side skin bearing structure and the side skin it carries can be driven to move in the transfer direction through the connector. In actual application, the servo motor works to drive the associated movable gear to rotate forward (or reverse), and the movable gear rotating forward (or reverse) drives the meshing circular chain to move forward (or reverse), and the circular chain moving forward (or reverse) can drive the side skin bearing structure from the second loading and unloading area to the second cutting area through the connecting piece; conversely, the servo motor works to drive the associated movable gear to rotate reversely (or forward), and the movable gear rotating reversely (or forward) drives the meshing circular chain to move reversely (or forward), and the circular chain moving reversely (or forward) can drive the side skin bearing structure and the side skin it carries to move from the second cutting area to the second loading and unloading area through the connecting piece.
[0277] In the present application, the side skin unloading and conveying mechanism further includes a side skin flipping mechanism for driving the side skin supporting structure to flip. Each side skin supporting structure is equipped with a side skin flipping mechanism, which can drive the corresponding side skin supporting structure and the side skin it supports to flip. In certain embodiments, the side skin flipping mechanism includes a pivot axis and a telescopic assembly, wherein the telescopic assembly includes a telescopic rod and a telescopic cylinder. The side skin supporting structure is pivotally mounted via the pivot axis, one end of the telescopic rod is associated with the corresponding side skin supporting structure, and the other end of the telescopic rod is associated with the telescopic cylinder. In actual use, the telescopic cylinder drives the telescopic rod to retract, pulling the side skin supporting structure toward the vertical direction via the pivot axis and disposing it vertically. The telescopic cylinder drives the telescopic rod to extend, pushing the side skin supporting structure away from the vertical direction via the pivot axis and disposing it flat or at an angle, so that the side skin supported by the side skin supporting structure lies flat or at an angle, facilitating subsequent unloading of the side skin.
[0278] When the second silicon rod cutting device in the silicon rod cutting and grinding machine of the present application is used to perform the second cutting operation on the silicon rod, the silicon rod with two first side sections is placed horizontally on the second silicon rod transfer device located at the second loading and unloading area (the first side section of the silicon rod is in contact with the second silicon rod transfer device); the second silicon rod carrying device and the silicon rod it carries are driven to transfer from the second loading and unloading area to the second cutting area along the transfer direction, the edge skin clamp is driven by the edge skin clamp advance and retreat mechanism to advance to the silicon rod along the advance and retreat direction, and the edge skin clamp of the second edge skin anti-collapse device is driven to clamp the silicon rod. At this time, the two second cutting wire saws arranged in parallel in the second silicon rod cutting device are located between the front edge skin clamp and the silicon rod; the second silicon rod transfer device is driven to carry the silicon rod and advance toward the second cutting area along the transfer direction, and the second silicon rod cutting device and the second silicon rod transfer device are relatively moved along the transfer direction so that the two second cutting wire saws arranged in parallel in the second silicon rod cutting device perform the second cutting on the silicon rod with a circular cross-section. The operation comprises the following steps: using two second cutting wire saws to cut off the two side skins of the silicon rod so that the silicon rod forms two parallel second side sections to obtain a square silicon rod with a rectangular cross-section, wherein the second side section is perpendicular to the first side section; utilizing the side skin clamp advance and retreat mechanism in the second side skin collapse prevention device, that is, the side skin clamp is driven to retreat along the advance and retreat direction by the side skin clamp advance and retreat mechanism, so that the side skin clamped by the side skin clamp can be retreated along the advance and retreat direction to drive the clamped side skin to be separated from the silicon rod body; driving the side skin clamp and the side skin it holds to descend by the clamp lifting mechanism, releasing the side skin clamp and releasing the side skin onto the side skin supporting structure; driving the side skin supporting structure to transfer from the second cutting position to the second loading and unloading position along the transfer direction by the conveying drive mechanism; driving the side skin supporting structure and the side skin it carries to flip by the side skin flipping mechanism to unload the flipped side skin; driving the second silicon rod supporting device and the silicon rod body it carries to transfer from the second cutting position to the second loading and unloading position along the transfer direction to complete the second cutting operation of the silicon rod.
[0279] The silicon rod cutting and grinding machine of the present application also includes a silicon rod loading and unloading device, which is used to load silicon rods with circular cross-sections onto the first silicon rod transfer device, unload silicon rods that have completed the first cutting from the first silicon rod transfer device and load them onto the second silicon rod transfer device, and unload square silicon rods that have completed the second cutting operation from the second silicon rod transfer device and load them onto the silicon rod grinding equipment.
[0280] In certain embodiments, the silicon rod loading and unloading device includes: a silicon rod mounting frame, a silicon rod clamp, and a clamp shifting mechanism, wherein the silicon rod mounting frame is arranged across the cutting machine base along the shifting direction, the silicon rod clamp is used to clamp the two end faces of the silicon rod, and the clamp shifting mechanism is used to drive the silicon rod clamp to move along the shifting direction to move the silicon rod clamp on the silicon rod mounting frame.
[0281] In such Figure 1 and Figure 2 In the illustrated embodiment, the silicon rod squaring device includes a silicon rod loading and unloading device 17 , and the silicon rod loading and unloading device 17 includes: a silicon rod mounting frame 171 , a silicon rod clamp 172 , and a clamp replacement mechanism.
[0282] The silicon rod mounting frame is mounted across the cutting machine base along the transposition direction. The silicon rod mounting frame is mounted across the cutting machine base along the transposition direction, and the transposition direction is consistent with the second direction. The length of the silicon rod mounting frame should be able to cover the entire cutting processing platform of the cutting machine base. When the cutting processing platform is provided with one or more cutting station groups, each cutting station group includes multiple cutting stations extending along the second direction, the length of the silicon rod mounting frame should be long enough to cover the multiple cutting stations.
[0283] The silicon rod clamp is used to clamp the two end faces of the silicon rod. In some embodiments, the silicon rod clamp includes a clamp mounting frame and a silicon rod clamping member. Figure 2 , which is a schematic diagram showing the structure of a silicon rod fixture in one embodiment. Figure 1 and Figure 2 In the illustrated embodiment, the silicon rod clamp 172 includes a clamp mounting frame 173 and a silicon rod clamp 174 .
[0284] The clamp mounting frame is arranged on the silicon rod mounting frame.
[0285] The clamp mounting frame is used to set the silicon rod clamping parts. Here, the specific structure of the clamp mounting frame can be set to different forms based on the layout requirements of the silicon rod clamping parts, such as a beam body, a frame, a plate frame, etc.
[0286] The silicon rod clamping member is arranged on the fixture mounting frame. In some embodiments, the silicon rod clamping member is lifted and lowered relative to the fixture mounting frame by a fixture lifting mechanism.
[0287] The silicon rod clamp is used to clamp the silicon rod. In some embodiments, the silicon rod clamp includes: a clamp arm mounting seat, at least one pair of clamp arms, and a clamp arm driving mechanism.
[0288] The clamp arm mounting seat is arranged on the clamp mounting frame.
[0289] As mentioned above, the silicon rod clamping piece is moved up and down relative to the clamp mounting frame by the clamp lifting mechanism.
[0290] In some embodiments, the clamp lifting mechanism includes: a lifting guide rod and a lifting drive unit. The lifting guide rod is arranged along the lifting direction and is used to set the silicon rod clamp. Specifically, the lifting guide rod is associated with the clamp arm mounting seat. The lifting drive unit is used to drive the silicon rod clamp to move up and down along the lifting guide rod. In some implementations, the lifting drive unit includes: a drive motor and a screw rod assembly arranged along the lifting direction and driven by the drive motor. The drive motor can be arranged at one end of the screw rod assembly and is arranged on the clamp mounting frame. The screw rod assembly is controlled by the drive motor and is screwed to the clamp arm mounting seat of the silicon rod clamp. In this way, when the clamp lifting mechanism is used, the drive motor drives the screw rod assembly to rotate forward, thereby driving the silicon rod clamp connected to the screw rod assembly to move upward along the lifting guide rod, or the drive motor drives the screw rod assembly to rotate in the opposite direction, thereby driving the silicon rod clamp connected to the screw rod assembly to move downward along the lifting guide rod.
[0291] The at least one pair of clamping arms are arranged on the clamping arm mounting seat opposite to each other along the transfer direction, and are used to clamp the two end faces of the silicon rod. Any one of the at least one pair of clamping arms is provided with a clamping portion for directly contacting and clamping the silicon rod. In some embodiments, the clamping arm extends downward from the clamping arm mounting seat, that is, the bottom of the clamping arm is provided on the clamping arm seat, and the top of the clamping arm is provided with a clamping portion for contacting and clamping the end face of the silicon rod. In the present application, for the silicon rod to be cut, the silicon rod to be cut is a cylindrical structure with a certain length, and its length direction is placed along the transfer direction (i.e., the first direction), and the end faces are the faces at both ends of the length direction. For the cut square silicon rod, the square silicon rod is a rectangular parallelepiped structure with a certain length (its cross-section is rectangular or quasi-rectangular), and its length direction is placed along the transfer direction (i.e., the first direction), and the end faces are the faces at both ends of the length direction.
[0292] The silicon ingot clamp further includes a clamp arm drive mechanism that drives at least one of the at least one pair of clamp arms to move along the transfer direction to adjust the clamping distance between the pair of opposing clamp arms. In this manner, the clamping portions of the at least one pair of clamp arms can be moved closer or further away from each other by the clamp arm drive mechanism to clamp or release the silicon ingot.
[0293] In certain embodiments, the clamp arm drive mechanism includes a movable guide rail and a clamp arm drive unit, wherein the movable guide rail is arranged along a transfer direction (i.e., a first direction) and is used to position at least one pair of clamp arms. In certain implementations, a guide groove structure matching the movable guide rail is provided at the bottom of at least one clamp arm of the at least one pair of clamp arms. The clamp arm drive unit is associated with at least one clamp arm of the at least one pair of clamp arms and is used to drive the associated clamp arm to move along the movable guide rail.
[0294] In certain embodiments, the clamp arm drive unit includes: a movable rack disposed on the clamp arm mounting base along the transfer direction; a drive gear disposed on the associated clamp arm and meshing with the movable rack; and a gear drive source configured to drive the drive gear to rotate and thereby move the associated clamp arm along the transfer direction. The movable rack may be configured as a rack, and the gear drive source may be, for example, a servo motor. In the above embodiments, the movable rack, drive gear, and gear drive source in the clamp arm drive unit may be implemented in various ways.
[0295] In certain implementations, when driving a clamping arm, a clamping arm driving unit may be provided, the clamping arm driving unit comprising a movable rack, a driving gear, and a gear driving source. In actual use, the gear driving source drives the driving gear to rotate so that the associated clamping arm moves along the movable rack, for example, moving closer to the other clamping arm (reducing the clamping distance between the two clamping arms) or moving away from the other clamping arm (increasing the clamping distance between the two clamping arms).
[0296] In certain implementations, when driving a pair of clamping arms, two clamping arm drive units may be provided, each of which includes a movable rack, a drive gear, and a gear drive source. In actual use, for each clamping arm, the gear drive source drives the drive gear to rotate so that the associated clamping arm moves along the movable rack. In this way, by using the two clamping arm drive units to drive their respective clamping arms, the two clamping arms can be driven to move toward each other (the two clamping arms move closer together to reduce the clamping distance between the two clamping arms) or away from each other (the two clamping arms move away from each other to increase the clamping distance between the two clamping arms) along the movable rack.
[0297] In certain embodiments, the clamp arm drive unit includes: a movable rack disposed on the associated clamp arm along the transfer direction; a drive gear disposed on the clamp arm mounting base and meshing with the movable rack; and a gear drive source configured to rotate the drive gear to move the associated clamp arm along the transfer direction. The movable rack may be configured as a rack, and the gear drive source may be, for example, a servo motor. In the above embodiments, the movable rack, drive gear, and gear drive source in the clamp arm drive unit may be implemented in various ways.
[0298] In certain implementations, when driving a clamping arm, a clamping arm driving unit may be provided, the clamping arm driving unit comprising a movable rack, a driving gear, and a gear driving source. In actual use, the gear driving source drives the driving gear to rotate so that the associated clamping arm moves along the movable rack, for example, moving closer to the other clamping arm (reducing the clamping distance between the two clamping arms) or moving away from the other clamping arm (increasing the clamping distance between the two clamping arms).
[0299] In certain implementations, when driving a pair of clamping arms, two clamping arm drive units may be provided, each of which includes a movable rack, a drive gear, and a gear drive source. In actual use, for each clamping arm, the gear drive source drives the drive gear to rotate so that the associated clamping arm moves along the movable rack. In this way, by using the two clamping arm drive units to drive their respective clamping arms, the two clamping arms can be driven to move toward each other (the two clamping arms move closer together to reduce the clamping distance between the two clamping arms) or away from each other (the two clamping arms move away from each other to increase the clamping distance between the two clamping arms) along the movable rack.
[0300] In certain implementations, when a pair of clamping arms is to be driven, a clamping arm drive unit may be provided, the clamping arm drive unit comprising two movable racks, a drive gear, and a gear drive source, wherein each movable rack is associated with a corresponding clamping arm, and the drive gear is disposed on the clamping arm mounting base and is located between the two movable racks and simultaneously engages with the two movable racks. In actual application, the drive gear is driven by a servo motor to rotate so that the associated two opposing clamping arm mounting bases and their clamping arms move toward each other (the two clamping arms move closer to each other to reduce the clamping distance between the two clamping arms) or away from each other (the two clamping arms move away from each other to increase the clamping distance between the two clamping arms) along the movable racks.
[0301] In certain embodiments, the clamp arm drive unit includes: a movable screw disposed along the transfer direction and associated with the corresponding clamp arm; and a screw drive source configured to drive the movable screw to rotate so as to move the associated clamp arm along the transfer direction. The screw drive source may be, for example, a servo motor. In the above embodiments, the movable screw and screw drive source in the clamp arm drive unit may be implemented in various ways.
[0302] In certain implementations, when driving a clamping arm, a clamping arm driving unit may be provided, the clamping arm driving unit comprising a movable screw and a screw driving source, wherein the movable screw is arranged along a transfer direction and is associated with the corresponding clamping arm. In actual application, the movable screw is driven by the screw driving source to rotate so that the associated clamping arm moves along the transfer direction, for example, moves closer to the other clamping arm (reducing the clamping distance between the two clamping arms) or moves away from the other clamping arm (increasing the clamping distance between the two clamping arms).
[0303] In certain implementations, when driving a pair of clamping arms, two clamping arm driving units may be provided, each clamping arm driving unit including a movable lead screw and a lead screw driving source, wherein each movable lead screw is associated with a corresponding clamping arm. In actual application, for each clamping arm, the lead screw driving source drives the movable lead screw to rotate so as to move the associated clamping arm along the transfer direction. In this way, by utilizing the two clamping arm driving units to respectively drive the movement of their respective clamping arms, the two clamping arms can be driven to move toward each other (the two clamping arms approach each other to reduce the clamping distance between the two clamping arms) or away from each other (the two clamping arms move away from each other to increase the clamping distance between the two clamping arms) along the movable rack.
[0304] In certain implementations, when a pair of clamping arms is to be driven, a clamping arm driving unit may be provided, the clamping arm driving unit comprising a movable screw and a screw drive source, wherein the movable screw may be, for example, a bidirectional screw having threads at both ends thereof and threads in opposite directions, and the two ends of the bidirectional screw being associated with a pair of opposing clamping arms. In actual application, the screw drive source drives the bidirectional screw to rotate so that the associated opposing clamping arms move toward each other (the two clamping arms approach each other to reduce the clamping distance between the two clamping arms) or move away from each other (the two clamping arms move away from each other to increase the clamping distance between the two clamping arms) along the movable rack.
[0305] Of course, the clamp arm drive unit may be modified in other ways. For example, in some embodiments, the clamp arm drive unit may include a telescopic cylinder, with both ends of the telescopic cylinder respectively associated with a pair of opposing clamp arms. Alternatively, in some embodiments, the clamp arm drive unit includes a clamp arm telescopic assembly, wherein the clamp arm telescopic assembly includes a clamp arm telescopic rod and a clamp arm telescopic cylinder, wherein the clamp arm telescopic rod is associated with a corresponding clamp arm, and the chuck head telescopic cylinder is associated with the chuck head telescopic rod.
[0306] Furthermore, in some embodiments, the clamping arm is a rotating structure. For example, the silicon rod clamp further includes a clamping arm rotation mechanism for driving the clamping arm to rotate. In some implementations, the clamping arm rotation mechanism is provided on at least one clamping arm of the at least one pair of clamping arms, and any one clamping portion of the at least one pair of clamping arms, or both clamping portions of a pair of clamping arms, is provided with a rotatable structure. Driven by the clamping arm rotation mechanism, the clamping portion of the clamping arm rotates in the direction of the axis of the silicon rod, causing the clamped silicon rod to rotate accordingly in the direction of the axis of the silicon rod. For example, in some examples, the clamping arm rotation mechanism may be a rotating motor, and the clamping parts of the two clamping arms in the pair of clamping arms are provided with a rotatable structure, and the clamping parts of the two clamping arms or the clamping parts of one of the clamping arms are connected to the output shaft of the rotating motor. For example, the clamping parts of the two clamping arms are respectively connected to a rotating motor, and the two rotating motors respectively drive the clamping parts of the corresponding clamping arms to rotate, or the clamping part of one of the clamping arms is connected to the rotating motor, and the rotating motor drives the clamping part of the corresponding clamping arm to rotate, and uses friction to conduct through the clamped silicon rod to drive the clamping part of the other clamping arm to rotate.
[0307] In certain implementations of this embodiment, the clamping portion of the at least one pair of clamping arms has a contact surface for clamping a silicon rod or a square silicon rod. The contact surface is disposed on a rotatable platform, and the cross-section of the platform can be configured to have a custom regular or irregular geometric shape.
[0308] In some embodiments, the rotatable platform may be configured as a whole hinged by a hinge device having a locking function, and may be rotated along an axis in the transfer direction. The axis of the rotation axis is connected to the clamp arm rotation mechanism.
[0309] In certain embodiments, the clamping portion of the clamping arm may be configured as a rotatable truncated cone, with the circular plane of the cone contacting the end face of the silicon ingot and remaining stationary relative to the end face of the silicon ingot after being in close contact with the end face of the silicon ingot. The clamping portion also includes a locking structure that locks the clamping portion when performing a corresponding processing operation on the silicon ingot (such as cutting). When switching the silicon ingot, such as switching the cutting position, the clamping portion rotates along the center of the truncated cone driven by the clamping arm rotation mechanism.
[0310] In certain embodiments, the clamping portion of the clamping arm includes a rotatable truncated cone and a series of protruding contacts disposed on the truncated cone, each of which has a contact surface. The truncated cone rotates driven by the clamping arm rotation mechanism. In one implementation of this embodiment, the protruding length of the contacts, i.e., their position in the transfer direction, is adjustable. This allows for the adjustment of the protruding length of the contacts in accordance with the end surface of the silicon rod during the clamping process, for silicon rods with less flat end surfaces, so that each contact surface is in close contact with the end surface of the silicon rod. The protruding length refers to the length in the transfer direction from the circular surface of the truncated cone to the contact surface of the contacts.
[0311] In some embodiments, the clamping portion of the silicon rod clamp is provided with a pressure sensor to adjust the protruding length of the contact based on the detected pressure state. Generally, in the process of clamping the silicon rod, the pair of clamping arms of the silicon rod clamp are driven by the clamping arm driving mechanism to approach each other along the transfer direction until the contact surface of the clamping portion contacts the end face of the silicon rod to be clamped. When the clamping portion is provided with multiple contacts and the pressure value of the contact between some contacts and the end face of the silicon rod is detected to be less than a set value or a set range, the protruding length of the contact can be adjusted (generally in the direction of approaching the end face of the silicon rod) to change the clamping degree; or, each clamping portion of the pair of clamping arms of the silicon rod clamp is provided with a contact surface. In the process of clamping the silicon rod, the clamping arm driving mechanism drives the end faces of the pair of clamping arms facing the two ends of the silicon rod to approach each other to achieve, after the clamping portion contacts the end face of the silicon rod, the pressure sensor detects the clamping degree of the silicon rod. When the set pressure range is reached, the clamping arm driving mechanism controls the stop of the relative movement of the pair of clamping arms.
[0312] The clamp arm rotation mechanism may be provided on one of the pair of clamp arms (the other clamp arm having only a rotation function) to drive the clamping portion of the pair of clamp arms and the clamped silicon rod or square silicon rod to rotate; or the clamp arm rotation mechanism may be provided on each clamp arm of the pair of clamp arms and coordinately control the two clamping portions of the pair of clamp arms to rotate at the same angle and direction. In certain implementations, the clamp arm rotation mechanism may include a drive motor.
[0313] When the silicon ingot cutting device is used to cut the silicon ingot, the clamping portion can be driven to rotate by the clamping arm rotation mechanism. Typically, when cutting a single crystal silicon ingot, the clamping arm rotation mechanism controls the clamping portion to rotate by a certain angle, such as 90 degrees, so that the silicon ingot cutting device can cut one side or two opposite sides of the silicon ingot.
[0314] In the silicon rod cutting and grinding machine of the present application, the silicon rod loading and unloading device further includes a centering adjustment mechanism for adjusting the position of the silicon rod so that the axis of the silicon rod corresponds to the predetermined center line. Figure 2In the illustrated embodiment, the centering adjustment mechanism 175 includes at least two clamping assemblies spaced apart along the transfer direction. Each clamping assembly includes two clamping members disposed relative to each other on the clamping arm mounting base along the clamping direction, and a telescopic drive unit associated with the two clamping members. The telescopic drive unit is configured to cause the two clamping members to telescopically move relative to the clamping arm mounting base in the clamping direction. The clamping direction is perpendicular to the transfer direction and forms a horizontal plane, i.e., the clamping direction is the second direction. The clamping members may be, for example, clamping plates or clamping bars, and the telescopic drive unit may be, for example, a telescopic cylinder or a servo motor with a screw. In actual application, when the silicon rod needs to be centered before being placed horizontally on the first silicon rod transfer device for the first cutting operation or before being placed on the second silicon rod transfer device for the second cutting operation, it is sufficient to operate at least two clamping components in the centering adjustment mechanism, that is, the telescopic drive unit in the clamping component drives the two clamping parts to retract and move relative to the clamping arm mounting seat in the clamping direction, and the silicon rod between the two is clamped to complete the centering operation. The operation is simple and fast.
[0315] The fixture transposition mechanism is used to drive the silicon rod fixture to move along the transposition direction.
[0316] In some embodiments, the fixture transposition mechanism includes: a fixture transposition guide rail and a fixture transposition drive unit, wherein the fixture transposition guide rail is arranged on the silicon rod mounting frame along the transposition direction, and the fixture transposition drive unit is associated with the silicon rod fixture and is used to drive the associated silicon rod fixture to move along the fixture transposition guide rail. The transposition direction is perpendicular to the transfer direction and forms a horizontal plane, that is, Figure 1 The second direction Y axis in .
[0317] In some embodiments, the fixture transposition drive unit includes: a transposition rack, a driving gear, and a gear drive source. The transposition rack is arranged along the transposition direction, the driving gear is provided on the silicon rod fixture and engages with the transposition rack, and the gear drive source is used to drive the driving gear to rotate so that the associated silicon rod fixture moves along the transposition direction.
[0318] In such Figure 1 and Figure 2In the embodiment shown, the fixture transposition drive unit includes: a transposition rack, a drive gear, and a gear drive source. The transposition rack is arranged along the transposition direction, and the length range of the transposition guide rail in the transposition direction at least covers the positions of the respective cutting stations and silicon rod cutting devices in the silicon rod squaring equipment, so as to ensure that the silicon rod fixture can be transferred to cover the respective cutting stations. The movable rack can adopt a rack structure. The drive gear is arranged on the fixture mounting frame of the silicon rod fixture and meshes with the transposition rack. The gear drive source is arranged on the fixture mounting frame of the silicon rod fixture and is associated with the drive gear. In actual application, the gear drive source can be used to drive the drive gear to rotate to drive the silicon rod fixture to move along the transposition direction through the transposition rack. For example, the gear driving source drives the driving gear to rotate forward, and through the cooperation between the driving gear and the transposition rack, the associated silicon rod clamp is driven to move forward in the transposition direction; the gear driving source drives the driving gear to rotate reversely, and through the cooperation between the driving gear and the transposition rack, the associated silicon rod clamp is driven to move backward in the transposition direction.
[0319] Of course, the structure of the clamp transposition drive unit can still be modified. For example, in some embodiments, the clamp transposition drive unit may include: a transposition screw, arranged along the transposition direction and associated with the clamp mounting frame of the silicon rod clamp; and a screw drive source, for driving the transposition screw to rotate so as to move the associated silicon rod clamp along the transposition direction. In some embodiments, the chain conveying mechanism includes an endless chain and a chain drive source, wherein the endless chain is associated with the clamp mounting frame of the silicon rod clamp. The endless chain may be, for example, a closed-loop chain, which is wound around a plurality of movable gears to form a predetermined shape. The chain drive source may be, for example, a servo motor.
[0320] In the present application, the silicon rod squaring device includes a side skin unloading device for unloading the cut side skin.
[0321] In some embodiments, the edge skin unloading device includes: an edge skin mounting frame, an edge skin adsorption member, and an adsorption member shifting mechanism, wherein the edge skin mounting frame is arranged across the cutting machine base along the shifting direction, the edge skin adsorption member is used to adsorb the edge skin, and the adsorption member shifting mechanism is used to drive the adsorption member to move on the edge skin mounting frame along the shifting direction.
[0322] In such Figure 1 and Figure 3 In the illustrated embodiment, the silicon ingot squaring apparatus 1 includes a shavings unloading device 18 . The shavings unloading device 18 can be located at a loading and unloading area of the cutting platform to unload the cut shavings from the cutting station (either the first cutting station or the second cutting station) of the cutting platform. The loading and unloading area is located on the side of the cutting platform.
[0323] The edge skin unloading device 18 includes: an edge skin mounting frame 181, an edge skin adsorption member 182, and an adsorption member replacement mechanism.
[0324] The edge skin mounting bracket is arranged across the cutting machine base along the transposition direction. In some embodiments, the edge skin mounting bracket is arranged across the cutting machine base along the transposition direction, and the transposition direction is consistent with the second direction. The length of the edge skin mounting bracket is required to cover the entire cutting processing platform of the cutting machine base. When the cutting processing platform is provided with a first cutting station and a second cutting station extending along the second direction, the length of the edge skin mounting bracket is required to be long enough to cover each cutting station.
[0325] The edge skin suction member is used to suction the edge skin. In some embodiments, the edge skin unloading device includes a suction member mounting structure, on which a plurality of edge skin suction members are provided along the transfer direction (i.e., the length direction of the edge skin). In some embodiments, the edge skin suction member includes a suction cup.
[0326] Wherein, the edge skin adsorption component is lifted and lowered relative to the edge skin mounting frame through an adsorption component lifting mechanism.
[0327] In some embodiments, the adsorption component lifting mechanism includes: a lifting guide rod and a lifting drive unit. The lifting guide rod is arranged along the lifting direction and is used to set the side skin adsorption component. Specifically, the lifting guide rod is associated with the adsorption component mounting structure of the side skin adsorption component. The lifting drive unit is used to drive the side skin adsorption component to move up and down along the lifting guide rod. In some implementations, the lifting drive unit includes: a drive motor and a screw rod assembly arranged along the lifting direction and driven by the drive motor, the drive motor and the screw rod assembly can be arranged on the adsorption component mounting structure, wherein the drive motor can be arranged at one end of the screw rod assembly, the screw rod assembly is controlled by the drive motor and is associated with the adsorption component mounting frame of the side skin adsorption component. In this way, when the side skin lifting mechanism is used, the drive motor drives the screw rod assembly to rotate in the forward direction, thereby driving the adsorption component mounting frame and the side skin adsorption component thereon to move up along the lifting guide rod, or the drive motor drives the screw rod assembly to rotate in the reverse direction, thereby driving the adsorption component mounting frame and the side skin adsorption component thereon to move down along the lifting guide rod.
[0328] The adsorption member shifting mechanism is used to drive the edge skin adsorption member to move along the shifting direction so as to switch between multiple cutting stations.
[0329] In some embodiments, the adsorption member transposition mechanism includes: an adsorption member transposition guide rail and an adsorption member transposition drive unit, wherein the adsorption member transposition guide rail is arranged on the side skin mounting frame along the transposition direction, and the adsorption member transposition drive unit is associated with the side skin adsorption member and is used to drive the associated side skin adsorption member to move along the adsorption member transposition guide rail. wherein the transposition direction is perpendicular to the transfer direction and forms a horizontal plane, i.e. Figure 1 The second direction Y axis in .
[0330] In some embodiments, the adsorption member transposition drive unit includes: a transposition rack, a driving gear, and a gear drive source. The transposition rack is arranged along the transposition direction, is provided on the side skin adsorption member and is engaged with the transposition rack. The gear drive source is used to drive the driving gear to rotate so that the associated side skin adsorption member moves along the transposition direction.
[0331] In such Figure 1 and Figure 2 In the embodiment shown, the adsorption member transposition drive unit includes: a transposition rack, a driving gear, and a gear drive source. The transposition rack is arranged along the transposition direction, and the length range of the transposition guide rail in the transposition direction at least covers the positions of the corresponding cutting stations and silicon rod cutting devices in the silicon rod cutting and grinding machine, so as to ensure that the adsorption member can be transferred to cover the various cutting stations. The movable rack can adopt a rack structure. The driving gear is provided on the adsorption member mounting frame of the edge skin adsorption member and meshes with the transposition rack. The gear drive source is provided on the adsorption member mounting frame of the edge skin adsorption member and is associated with the drive gear. In actual application, the gear drive source can be used to drive the drive gear to rotate to drive the edge skin adsorption member to move along the transposition direction through the transposition rack. For example, the gear driving source drives the driving gear to rotate forward, and through the cooperation between the driving gear and the transposition rack, the associated silicon rod clamp is driven to move forward in the transposition direction; the gear driving source drives the driving gear to rotate reversely, and through the cooperation between the driving gear and the transposition rack, the associated silicon rod clamp is driven to move backward in the transposition direction.
[0332] Of course, the structure of the adsorption member transposition drive unit can still be changed in other ways. For example, in some embodiments, the adsorption member transposition drive unit may include: a transposition screw, which is arranged along the transposition direction and is associated with the adsorption member mounting frame of the side skin adsorption member; a screw drive source, which is used to drive the transposition screw to rotate so that the associated side skin adsorption member moves along the transposition direction. In some embodiments, the chain conveying mechanism includes an annular chain and a chain drive source, and the annular chain is associated with the adsorption member mounting frame of the side skin adsorption member. The ring chain may be, for example, a closed-loop chain, which is wound around a plurality of movable gears to form a preset shape, and the chain drive source may be, for example, a servo motor.
[0333] In certain embodiments, the silicon rod squaring apparatus of the present application may further include a peeling recovery box or a peeling recovery vehicle, and the peeling unloading device 18 is used to unload the peelings into the peeling recovery box or the peeling recovery vehicle.
[0334] The silicon rod squaring device of the present application may also include a material unloading conveying device, which is located at the unloading area and is used to convey the square silicon rods that have been ground. In some embodiments, the material unloading conveying device may be, for example, a conveyor belt device, including a conveyor belt, which is wound around two conveyor rollers arranged opposite to each other in the front and back directions, and at least one of the two conveyor rollers is connected to a material unloading drive source, which may be, for example, a servo motor. Figure 1 and Figure 2 In the illustrated embodiment, the silicon rod grinding apparatus further includes a material unloading conveying device 179 .
[0335] The silicon rod cutting and grinding machine of the present application also includes a crystal line detection device.
[0336] In some embodiments, the crystal line detection device includes: at least two supporting structures arranged at a distance from each other, the supporting structure having a supporting roller group arranged along the transfer direction for supporting the silicon rod to be cut; a roller driving source for driving each supporting roller in the supporting roller group to rotate to drive the silicon rod to be cut to rotate; and a crystal line measuring probe located between the at least two supporting structures.
[0337] The at least two support structures are spaced apart along the transfer direction, and each support structure comprises a support roller assembly. The support roller assembly includes two or more rollers arranged along the transfer direction, and the rollers in the same support roller assembly are connected by a rotating shaft arranged along the transfer direction. When the support roller assembly supports the silicon rods to be cut, the roller surfaces of the rollers in the support roller assembly contact the silicon rods to be cut. Furthermore, in this embodiment, the at least two support structures spaced apart along the transfer direction may be movable, i.e., at least one of the supporting structures of the at least two support structures may be movable along the transfer direction to adjust the support spacing between the at least two support structures, thereby accommodating the support of silicon rods of various sizes to be cut.
[0338] The roller driving source is used to drive each supporting roller in the supporting roller group to rotate, wherein the roller driving source can be, for example, a servo motor, and the servo motor can be associated with at least one supporting roller group through, for example, a chain (group) or a gear group.
[0339] In actual application, when the silicon rod to be cut with a circular cross-section is placed in a horizontal state on the supporting structure of the crystal line detection device, the axis of the silicon rod to be cut is consistent with the transfer direction. After that, the roller driving source can drive each supporting roller in the supporting roller group to rotate so as to utilize the friction between the supporting roller and the silicon rod to be cut to drive the silicon rod to be cut to rotate, thereby completing the crystal line detection operation.
[0340] When using the Figure 1 When the silicon ingot squaring device in the silicon ingot cutting and grinding machine of the embodiment shown performs squaring and cutting operations, the specific process can be roughly as follows:
[0341] First, a silicon rod to be cut with a circular cross-section is placed horizontally on a crystal line detection device, and the crystal line detection device drives the silicon rod to be cut to rotate to complete the crystal line detection operation.
[0342] Next, the silicon rod to be cut is clamped from the crystal line detection device using a silicon rod loading and unloading device and transferred to the first silicon rod transfer device corresponding to the first loading and unloading area of the first cutting station. The silicon rod to be cut is placed horizontally and the axis of the silicon rod is consistent with the transfer direction.
[0343] Then, the edge skin clamp is driven by the advance and retreat mechanism to advance the edge skin clamp to the silicon rod along the advance and retreat direction, and the edge skin clamp of the edge skin anti-collapse device corresponding to the first silicon rod transfer device is driven to clamp the silicon rod to be cut; the first silicon rod transfer device is driven to carry the silicon rod from the first loading and unloading area to the first cutting area along the transfer direction, and the first silicon rod cutting device and the first silicon rod transfer device are moved relative to each other along the transfer direction. The two first cutting wire saws arranged opposite to each other in the first silicon rod cutting device (the first cutting wire saws are arranged vertically or at an angle to the vertical) perform the first cutting operation on the silicon rod to be cut carried by the first silicon rod transfer device, so that the silicon rod to be cut forms two parallel first side sections and two edge skins.
[0344] Next, the edge skin clamp advance and retreat mechanism in the edge skin collapse prevention device is utilized, that is, the edge skin clamp advance and retreat mechanism drives the edge skin clamp to retreat in the advance and retreat direction, so that the edge skin clamped by the edge skin clamp can be retreated in the advance and retreat direction to drive the clamped edge skin to separate from the silicon rod body; the chuck driving mechanism in the edge skin clamp drives the chuck to move to release the clamped edge skin and make it fall on the edge skin bearing structure, and drives the edge skin bearing structure to drive the edge skin bearing structure and the edge skin carried by it to move from the first cutting position to the first loading and unloading position; the edge skin flipping mechanism is utilized to drive the edge skin bearing structure to flip; and the cut edge skin is unloaded by the edge skin unloading device.
[0345] Next, the first silicon rod transfer device is driven to carry the silicon rod after the first cutting operation and retreat away from the first cutting position along the transfer direction to the first loading and unloading position. The silicon rod loading and unloading device is used to clamp the silicon rod from the first silicon rod transfer device and move it along the conversion direction to the second cutting station. After the silicon rod is rotated 90°, the silicon rod is placed on the second silicon rod transfer device located at the second loading and unloading position. The silicon rod is placed horizontally and the axis of the silicon rod is consistent with the transfer direction.
[0346] Next, the position of the silicon rod is adjusted using a centering adjustment mechanism in the silicon rod loading and unloading device so that the axis of the silicon rod corresponds to the predetermined center line.
[0347] Then, the edge skin clamp is driven by the advance and retreat mechanism to advance the edge skin clamp to the silicon rod along the advance and retreat direction, and the edge skin clamp of the edge skin anti-collapse device corresponding to the second silicon rod transfer device is driven to clamp the silicon rod; the second silicon rod transfer device is driven to carry the silicon rod from the second loading and unloading area along the transfer direction to the second cutting area, and the second silicon rod cutting device and the second silicon rod transfer device are moved relative to each other along the transfer direction. The two second cutting wire saws arranged opposite to each other in the second silicon rod cutting device (the second cutting wire saws are arranged vertically or at an angle to the vertical) perform a second cutting operation on the silicon rod carried by the second silicon rod transfer device, so that the silicon rod is obtained as a square silicon rod with a rectangular cross-section after forming two parallel second side sections.
[0348] Next, the edge skin clamp advance and retreat mechanism in the edge skin collapse prevention device is utilized, that is, the edge skin clamp advance and retreat mechanism drives the edge skin clamp to retreat in the advance and retreat direction, so that the edge skin clamped by the edge skin clamp can be retreated in the advance and retreat direction to drive the clamped edge skin to separate from the silicon rod body; the chuck driving mechanism in the edge skin clamp drives the chuck to move to release the clamped edge skin and make it fall on the edge skin bearing structure, and drives the edge skin bearing structure to drive the edge skin bearing structure and the edge skin supported by it to move from the second cutting position to the second loading and unloading position; the edge skin flipping mechanism is utilized to drive the edge skin bearing structure to flip; and the cut edge skin is unloaded by the edge skin unloading device.
[0349] Next, the second silicon rod transfer device is driven to carry the square silicon rod after the second cutting operation and retreat along the transfer direction away from the first cutting area to the first loading and unloading area. The silicon rod loading and unloading device is used to clamp the square silicon rod from the second silicon rod transfer device and move it along the conversion direction, and the square silicon rod is loaded onto the silicon rod grinding equipment.
[0350] Regarding the silicon rod grinding equipment, the silicon rod grinding equipment 2 includes: a grinding machine base, a grinding device, a chamfering device, and a square silicon rod transporting device.
[0351] The grinding machine base is the main component of the silicon rod grinding equipment and is used to provide a processing platform. In actual applications, the size and weight of the grinding machine base are relatively large to provide a large installation surface and a strong stability of the whole machine. It should be understood that the grinding machine base can be used as the base of different structures or components that perform processing operations in the silicon rod grinding equipment, and the specific structure of the grinding machine base can be changed based on different functional requirements or structural requirements. In some examples, the grinding machine base includes a fixed structure or a limiting structure for supporting different components in the silicon rod grinding equipment, such as a base, a column, a frame, etc., which are all grinding machine bases described in this application.
[0352] Meanwhile, in some examples, the grinding machine base may be an integrated base, and in some examples, the grinding machine base may include a plurality of independent bases.
[0353] The grinding machine base has a grinding processing platform, which can be divided into multiple functional areas according to the specific work content of the square silicon rod grinding operation. For example, in some embodiments, the grinding processing platform includes a grinding area and a chamfering area. In some embodiments, the grinding processing platform includes a loading area, a grinding area, a chamfering area, and an unloading area. In some embodiments, the grinding processing platform includes a loading and unloading area, a grinding area, and a chamfering area. It should be noted that in the examples provided in this application, the functional areas are defined by the travel path and range of the processing device at the functional area. For example, the grinding device of the silicon rod grinding equipment is located at the grinding area, and the range of the grinding area is the range occupied by the grinding device during the grinding operation; similarly, the chamfering device of the silicon rod grinding equipment is located at the chamfering area, and the range of the chamfering area is the range occupied by the chamfering device during the chamfering operation. The shape of the grinding processing platform can be determined according to the grinding machine base, or it can be determined based on the processing requirements of the grinding machine base, the grinding device, and the chamfering device.
[0354] In some embodiments, the grinding processing platform is provided with a grinding area and a chamfering area, the grinding area is provided with a grinding device, the grinding device includes at least one grinding tool, and the chamfering area is provided with a chamfering device, the chamfering device includes at least one chamfering tool.
[0355] The surface grinding device is arranged at the surface grinding area of the grinding processing platform and is used to grind the side surfaces of the square silicon rod located at the surface grinding area. The square silicon rod has four sides, so the surface grinding device is used to grind the four sides of the square silicon rod.
[0356] In the present application, the square silicon rod is placed horizontally on the grinding surface area of the grinding processing platform. To ensure that the square silicon rod can be stably placed on the grinding surface area, the silicon rod grinding apparatus of the present application includes a first square silicon rod clamping device.
[0357] The first square silicon rod clamping device is arranged at the grinding surface area and is used to clamp the end portion of the square silicon rod along the length direction.
[0358] The first square silicon rod clamping device is intended to clamp square silicon rods.
[0359] In some embodiments, the first square silicon rod clamping device includes: a first bearing mounting seat and a first square silicon rod clamp.
[0360] The first bearing mounting seat is arranged on the grinding machine seat. In some embodiments, the first bearing mounting seat is arranged on the grinding machine seat along a first direction and is used to set the first square silicon rod clamp.
[0361] The first square silicon rod clamp is used to clamp the square silicon rod. In some embodiments, the first square silicon rod clamp may include a first clamping seat, at least one pair of first clamping members, and a first clamping member driving mechanism, wherein the at least one pair of first clamping members is provided with a first clamping portion and a first clamping portion rotating mechanism.
[0362] The at least one pair of first clamping members are arranged on opposite sides of the first clamping seat and arranged along the first direction. The at least one pair of first clamping members are controlled by the first clamping member driving mechanism to clamp the two end faces of the square silicon rod so that the clamped square silicon rod is placed horizontally along the first direction.
[0363] The first clamping member driving mechanism is configured to drive at least one of the at least one pair of first clamping members to move along a first direction to adjust the clamping distance between the pair of first clamping members. In certain embodiments, two first clamping members of the pair of first clamping members are disposed opposite each other along the first direction, and the first clamping member driving mechanism can drive at least one of the pair of first clamping members to move along the first direction to adjust the clamping distance between the pair of oppositely disposed first clamping members.
[0364] In certain embodiments, the first clamping member driving mechanism may include: an opening and closing guide rod and an opening and closing drive unit, wherein the opening and closing guide rod is provided on the clamping seat along the first direction, for setting a pair of first clamping members, and the opening and closing drive unit is used to drive two first clamping members in the pair of first clamping members to move toward or away from each other along the opening and closing guide rod provided in the first direction. In order to ensure the stability of the first clamping member in being able to move horizontally along the first direction, the number of the opening and closing guide rods may be multiple, for example, there are two opening and closing guide rods. Of course, the number of the opening and closing guide rods may also be other numbers, for example, three, five, six, or more. Taking three as an example, the three opening and closing guide rods may be provided in the form of an isosceles triangle or an equilateral triangle, for example.
[0365] In some embodiments, the opening and closing drive unit includes a horizontal telescopic rod and a telescopic cylinder, one end of the horizontal telescopic rod is associated with a first clamping member, and the other end of the horizontal telescopic rod is associated with the telescopic cylinder, and the telescopic cylinder is provided on the first clamping seat. In actual application, the telescopic cylinder can drive the horizontal telescopic rod to extend and retract. For example, the telescopic cylinder drives the horizontal telescopic rod to retract inward, drives one of the pair of first clamping members to move toward the other first clamping member along the opening and closing guide rod provided in the first direction, or drives the two first clamping members of the pair of first clamping members to move toward each other along the opening and closing guide rod provided in the first direction, thereby reducing the clamping distance between the two first clamping members, so as to clamp the square silicon rod located between the two first clamping members. Accordingly, the telescopic cylinder can drive the horizontal telescopic rod to extend outward, driving one of the pair of first clamping members to move away from the other first clamping member along the opening and closing guide rod provided in the first direction, or driving both first clamping members in the pair of first clamping members to move away from each other along the opening and closing guide rod provided in the first direction, thereby increasing the clamping distance between the two first clamping members and releasing the clamped square silicon ingot. The telescopic cylinder can also be a telescopic oil cylinder.
[0366] In some embodiments, the opening and closing drive unit includes a screw and an opening and closing motor, one end of the screw (for example, a threaded end) is associated with a first clamping member, and the other end of the screw is associated with the opening and closing motor, and the opening and closing motor is provided on the first clamping seat. In practical applications, the opening and closing motor can drive the screw to rotate. For example, the opening and closing motor drives the screw to rotate in the forward direction (or drives the screw to rotate in the reverse direction), drives one of the pair of first clamping members to move toward the other first clamping member along the opening and closing guide rod provided in the first direction, or drives the two first clamping members in the pair of first clamping members to move toward each other along the opening and closing guide rod provided in the first direction, thereby reducing the clamping distance between the two first clamping members to clamp the square silicon rod located between the two first clamping members. Correspondingly, the opening and closing motor drives the screw to rotate in the opposite direction (or drives the screw to rotate in the forward direction), drives one of the pair of first clamping members to move back toward the other first clamping member along the opening and closing guide rod set in the first direction, or drives two first clamping members in the pair of first clamping members to move back toward each other along the opening and closing guide rod set in the first direction, thereby increasing the clamping distance between the two first clamping members to release the clamped square silicon rod.
[0367] In some embodiments, the opening and closing drive unit includes a bidirectional screw and an opening and closing motor, wherein the bidirectional screw is arranged along a first direction, and the bidirectional screw is a left-handed screw, which has two sections of thread on the rod body, and the rotation directions of the two sections of thread are opposite, that is, one section of thread is a left-handed thread, and the other section of thread is a right-handed thread, wherein one section of thread can be associated with a first clamping member and the other section of thread can be associated with another first clamping member (for example, the left-handed thread is associated with the first first clamping member and the right-handed thread is associated with the second first clamping member, or the right-handed thread is associated with the first first clamping member and the left-handed thread is associated with the second first clamping member), and the opening and closing motor is associated with the bidirectional screw, and is used to drive the bidirectional screw to rotate so that the two associated first clamping members move toward or away from each other along the opening and closing guide rod set in the first direction. In practical applications, for example, by using an opening and closing motor to drive the bidirectional screw to rotate forward (or driving the bidirectional screw to rotate reversely), the two associated first clamping members are driven to move toward each other (i.e., approach each other) along the opening and closing guide rod set in the first direction, reducing the clamping distance between the two first clamping members to clamp the square silicon rod located between the two first clamping members; or, by using an opening and closing motor to drive the bidirectional screw to rotate reversely (or driving the bidirectional screw to rotate forward), the two associated first clamping members are driven to move away from each other (i.e., away from each other) along the opening and closing guide rod set in the first direction, increasing the clamping distance between the two first clamping members to release the clamped square silicon rod. The opening and closing motor can be provided at the middle section or a terminal of the bidirectional screw.
[0368] Thus, in the present application, after the end of the square silicon rod along the length direction is clamped by the first square silicon rod clamping device, at least one side surface to be polished is exposed.
[0369] In some embodiments, in the first square silicon rod clamping device, the first bearing mount is provided at the bottom, the clamping seat of the first square silicon rod clamp is provided above the first bearing mount, and the at least one pair of first clamping members are provided on the first clamping seat and are arranged upward. In some embodiments, after the at least one pair of first clamping members clamp the square silicon rod, the side surface located at the top is fully exposed, and the side surface located at the top is used as the side surface to be ground. Therefore, the grinding device at the grinding area may include at least one grinding tool (for example, one grinding tool or two parallel grinding tools), and the grinding surface of the at least one grinding tool is horizontally facing downward. In some embodiments, after the at least one pair of first clamping members clamps the square silicon rod, the other three side surfaces except the bottom side surface adjacent to the clamping seat can be fully exposed, that is, the top side surface and its adjacent left and right side surfaces. Therefore, the three exposed side surfaces are used as the sides to be ground. Therefore, the grinding device at the grinding area may include multiple grinding tools, some of which have grinding surfaces facing horizontally downward, and some of which have grinding surfaces facing horizontally to the left or right.
[0370] In some embodiments, in the first square silicon rod clamping device, the first bearing mount is provided at the bottom and extends upward or is provided at the side, the first clamping seat of the first square silicon rod clamp is provided at one side of the first bearing mount, and the at least one pair of first clamping members are provided at the first clamping seat and are arranged to the left or right. In some embodiments, after the at least one pair of first clamping members clamp the square silicon rod, the side located on the far left (or far right) can be fully exposed, and the side located on the far left (or far right) is used as the side to be ground. Therefore, the grinding device at the grinding area may include at least one grinding tool (for example, one grinding tool or two parallel grinding tools), and the grinding surface of the at least one grinding tool is horizontally facing right (or horizontally facing left). In some embodiments, after the at least one pair of first clamping members clamps the square silicon rod, the other three side surfaces except the side surface located on the far right (or far left) adjacent to the clamping seat can be fully exposed, that is, the side surface located on the far left and its adjacent upper and lower side surfaces. Therefore, the three exposed side surfaces are used as the sides to be ground. Therefore, the grinding device at the grinding area may include multiple grinding tools, some of which have grinding surfaces facing horizontally to the right, and some of which have grinding surfaces facing horizontally downward or upward.
[0371] In the foregoing description, with respect to the unexposed side surfaces of the square silicon rod, in certain embodiments, other auxiliary jigs (e.g., a square silicon rod transfer device, etc.) can be used to rotate or flip the silicon rod placed above the first square silicon rod clamping device to change the position of the square silicon rod so as to expose the previously unexposed side surfaces.
[0372] In addition, in the present application, the first square silicon rod clamping device may still have other changes. For example, in some embodiments, the first square silicon rod clamping device includes: a first clamping portion provided on the first clamping piece and a first clamping portion rotating mechanism for driving the first clamping portion of the first clamping piece to rotate. The first clamping portion is driven to rotate by the first clamping portion rotating mechanism, which can drive the square silicon rod clamped between the first clamping pieces to rotate to adjust the position of each side surface.
[0373] In some embodiments, in the first square silicon rod clamping device, the first bearing mount is provided at the bottom, the first clamping seat of the first square silicon rod clamp is provided above the first bearing mount, and the at least one pair of first clamping members are provided on the first clamping seat and are arranged upward. In some embodiments, after the at least one pair of first clamping members clamp the square silicon rod, the side surface located at the top can be fully exposed, and the side surface located at the top is used as the side surface to be ground. Therefore, the grinding device at the grinding area may include at least one grinding tool (for example, one grinding tool or two parallel grinding tools), and the grinding surface of the at least one grinding tool is horizontally facing downward. After the top side surface is ground by the grinding tool and completed, the first clamping part rotation mechanism is used to drive the first clamping part to rotate (for example, 90° or 180°), which can drive the square silicon rod to rotate (for example, 90° or 180°) to expose other side surfaces. The other exposed side surfaces can still be ground by the grinding tool. In this way, when the grinding tool does not change its position, the first clamping portion rotation mechanism drives the square silicon rod to rotate, thereby completing the grinding operation of each side surface of the square silicon rod.
[0374] In some embodiments, in the first square silicon rod clamping device, the first bearing mount is provided at the bottom and extends upward or is provided at the side, the first clamping seat of the first square silicon rod clamp is provided at one side of the first bearing mount, and the at least one pair of first clamping members are provided at the first clamping seat and are arranged to the left or right. In some embodiments, after the at least one pair of first clamping members clamp the square silicon rod, the side located on the far left (or far right) can be fully exposed, and the side located on the far left (or far right) is used as the side to be ground. Therefore, the grinding device at the grinding area may include at least one grinding tool (for example, one grinding tool or two parallel grinding tools), and the grinding surface of the at least one grinding tool is horizontally facing right (or horizontally facing left). After the leftmost (or rightmost) side surface is ground by the grinding tool and completed, the first clamping part rotation mechanism is used to drive the first clamping part to rotate (for example, 90° or 180°), which can drive the square silicon rod to rotate (for example, 90° or 180°) to expose other side surfaces. The other exposed side surfaces can still be ground by the grinding tool. In this way, without changing the position of the grinding tool, the first clamping part rotation mechanism drives the rotation of the square silicon rod to complete the grinding of each side surface of the square silicon rod.
[0375] In some embodiments, the first clamping portion is a multi-point contact clamping head. It is understandable that the contact method between the multi-point contact clamping head and the end face of the square silicon rod is not limited to point contact. For example, the first clamping portion has multiple protrusions to contact the end face of the square silicon rod, wherein each protrusion can be in surface contact with the end face of the square silicon rod.
[0376] In certain embodiments, the first clamping portions of the pair of first clamping members that contact the square silicon rod are configured as rigid structures to prevent the clamped square silicon rod from being disturbed during the grinding operation and thus affecting the machining accuracy.
[0377] In practical applications, the first clamping portion rotation mechanism may include a rotatable structure provided on two first clamping portions of a pair of first clamping members and a driving source for driving at least one of the two rotatable structures to rotate.
[0378] In certain embodiments of the present application, the first clamping portion of the first clamping member may be configured as a rotatable truncated cone, with the circular plane of the truncated cone contacting the end face of the square silicon rod and remaining stationary relative to the end face of the square silicon rod after being in close contact with the end face of the square silicon rod. The first clamping portion also includes a locking structure, which is locked when grinding a selected surface. When switching between different grinding surfaces, the first clamping portion rotates along the center of the truncated cone driven by the first clamping portion's rotation mechanism.
[0379] In some implementations, the first clamping portion of the first clamping member includes a rotatable truncated cone and a series of protruding contacts arranged on the truncated cone, wherein each contact has a contact plane for contacting the clamped square silicon rod, and the truncated cone rotates driven by the rotation mechanism of the first clamping portion. Regarding the contacts, in some implementations, the protruding length of the contacts, that is, the position of the horizontal line, can be adjusted, so that in the process of clamping the square silicon rod, for the square silicon rod with lower end face flatness, the protruding length of the contacts can be adjusted according to the end face of the square silicon rod, so that the contact surface of each contact is in a close contact state with the end face of the square silicon rod. The protruding length is the length of the horizontal line from the circular plane of the truncated cone to the contact plane of the contact.
[0380] The first clamping portion rotation mechanism may be provided on one of the pair of first clamping members to drive the first clamping portion of the pair of first clamping members and the clamped square silicon ingot to rotate; alternatively, the first clamping portion rotation mechanism may be provided on both first clamping members of the pair of first clamping members to coordinate movement and control the two first clamping portions of the pair of first clamping members to rotate at the same angle and in the same direction. The driving source of the first clamping portion rotation mechanism may be, for example, a drive motor.
[0381] Regarding the surface grinding device, the surface grinding device includes a surface grinding frame and a surface grinding unit movably arranged on the surface grinding frame or a pair of surface grinding units arranged opposite to each other, and each surface grinding unit has at least one surface grinding tool. In some embodiments, the square silicon rod placed on the first square silicon rod clamping device only exposes one side surface, or the square silicon rod exposes multiple sides but only one side surface needs to be ground at a time, then the surface grinding device may include a surface grinding frame and a surface grinding unit movably arranged on the surface grinding frame, and the surface grinding unit corresponds to the exposed side surface or the side surface that needs to be ground. In some embodiments, the square silicon rod placed on the first square silicon rod clamping device exposes at least a pair of side surfaces arranged opposite to each other, and both of the pair of side surfaces can be ground, then the surface grinding device may include a surface grinding frame and a pair of surface grinding units movably arranged on the surface grinding frame, and the pair of surface grinding units corresponds to the exposed pair of side surfaces.
[0382] For a certain surface grinding unit, the surface grinding unit includes a surface grinding support movably arranged on the surface grinding frame and at least one surface grinding tool arranged on the surface grinding support.
[0383] In some embodiments, the grinding surface of the grinding tool is horizontally facing downward (or horizontally facing upward), and the grinding unit includes a grinding support vertically movable on the grinding frame and at least one grinding tool provided on the grinding support, and the at least one grinding tool is used to grind the side of the square silicon rod clamped by the first square silicon rod clamping device.
[0384] The grinding surface support can be arranged on the grinding surface frame in a vertical direction (i.e., a third direction) via a grinding surface support lifting mechanism. The grinding surface support can be raised and lowered relative to the grinding surface frame by means of the grinding surface support lifting mechanism. In some embodiments, the grinding surface support lifting mechanism may include: a grinding surface lifting guide rail and a grinding surface lifting drive unit, wherein the grinding surface lifting guide rail is arranged vertically on the grinding surface frame, and the grinding surface lifting drive unit is used to drive the grinding surface support and at least one grinding tool arranged thereon to move up and down along the grinding surface lifting guide rail. In some embodiments, the grinding surface lifting drive unit may include a grinding surface lifting screw and a driving source, wherein the grinding surface lifting screw is arranged vertically and associated with the grinding surface support, and the driving source is used to drive the grinding surface lifting screw to rotate so that the associated grinding surface support and at least one grinding tool arranged thereon can move up and down along the grinding surface lifting guide rail. In some examples, the driving source may be, for example, a driving motor. In certain embodiments, the grinding surface support lifting mechanism may include: a grinding surface lifting rack, a drive gear, and a drive source, wherein the grinding surface lifting rack is vertically disposed on the grinding surface frame and parallel to the grinding surface lifting guide rail. The drive gear is disposed on the grinding surface support (e.g., at the bottom of the grinding surface support) and meshes with the grinding surface lifting rack. The drive source is associated with the drive wheel and is configured to drive the drive wheel to rotate so that the associated grinding surface support and at least one grinding tool mounted thereon are moved up and down along the grinding surface lifting guide rail. In certain examples, the drive source may be, for example, a drive motor.
[0385] In some embodiments, the grinding surface of the grinding tool is vertically facing left (or vertically facing right), and the grinding unit includes a grinding support arranged on a grinding frame along a horizontal movement and at least one grinding tool arranged on the grinding support, and the at least one grinding tool is used to grind the side of the square silicon rod clamped by the first square silicon rod clamping device.
[0386] The grinding surface support can be arranged on the grinding surface frame horizontally (for example, in the second direction) through a grinding surface support advance and retreat mechanism. The grinding surface support can move forward and backward relative to the grinding surface frame using the grinding surface support advance and retreat mechanism. In some embodiments, the grinding surface support advance and retreat mechanism may include: a grinding surface advance and retreat guide rail and a grinding surface advance and retreat drive unit, wherein the grinding surface advance and retreat guide rail is arranged horizontally on the grinding surface frame, and the grinding surface advance and retreat drive unit is used to drive the grinding surface support and at least one grinding tool arranged thereon to move forward and backward along the grinding surface advance and retreat guide rail. In some embodiments, the grinding surface advance and retreat drive unit may include a grinding surface lifting screw and a drive source, wherein the grinding surface advance and retreat screw is arranged horizontally and associated with the grinding surface support, and the drive source is used to drive the grinding surface advance and retreat screw to rotate so that the associated grinding surface support and at least one grinding tool arranged thereon can move forward and backward along the grinding surface advance and retreat guide rail. In some examples, the drive source may be, for example, a drive motor. In certain embodiments, the grinding surface support advance and retreat mechanism may include: a grinding surface advance and retreat rack, a drive gear, and a drive source, wherein the grinding surface advance and retreat rack is horizontally arranged on the grinding surface frame and is parallel to the grinding surface advance and retreat guide rail. The drive gear is arranged on the grinding surface support (e.g., the bottom of the grinding surface support) and meshes with the grinding surface advance and retreat rack. The drive source is associated with the drive wheel and is used to drive the drive wheel to rotate so that the associated grinding surface support and at least one grinding tool provided thereon move forward and backward along the grinding surface advance and retreat guide rail. In certain examples, the drive source may be, for example, a drive motor.
[0387] The surface grinding tool includes at least one grinding wheel. For example, in some embodiments, the surface grinding device includes a surface grinding tool, the surface grinding tool includes a grinding wheel, and the grinding wheel is a rough grinding wheel or a fine grinding wheel. In some embodiments, the surface grinding device may include two surface grinding tools arranged along a first direction, each surface grinding tool includes a grinding wheel, for example, the front surface grinding tool includes a rough grinding wheel, and the rear surface grinding tool includes a fine grinding wheel. In some embodiments, the surface grinding device includes a surface grinding tool, the surface grinding tool includes a rough grinding wheel and a fine grinding wheel nested in each other, for example, the rough grinding wheel is nested in the fine grinding wheel, or, the fine grinding wheel is nested in the rough grinding wheel. The abrasive size of the fine grinding wheel is smaller than the abrasive size of the rough grinding wheel, and the abrasive density of the fine grinding wheel is greater than the abrasive density of the rough grinding wheel.
[0388] When the surface grinding tool includes a rough grinding wheel and a fine grinding wheel, the surface grinding tool can be used to perform rough grinding and fine grinding operations on the side of the square silicon rod. Therefore, at least one of the rough grinding wheel and the fine grinding wheel is provided with a telescopic drive mechanism. For example, when the rough grinding wheel is nested within the fine grinding wheel, the rough grinding wheel can be provided with a telescopic drive mechanism. When performing the rough grinding operation, the telescopic drive mechanism is used to drive the rough grinding wheel to extend and protrude from the fine grinding wheel, so that the protruding rough grinding wheel can be used to perform the rough grinding operation on the side of the square silicon rod. When performing the fine grinding operation, the telescopic drive mechanism is used to drive the rough grinding wheel to retract and be recessed into the fine grinding wheel, so that the fine grinding wheel can be used to perform the fine grinding operation on the side of the square silicon rod. Alternatively, when the rough grinding wheel is nested within the fine grinding wheel, the fine grinding wheel may be provided with a telescopic drive mechanism, and during the rough grinding operation, the telescopic drive mechanism is used to drive the fine grinding wheel to retract and be recessed in the rough grinding wheel, so that the rough grinding wheel can be used to perform rough grinding on the side of the other silicon rod, and during the fine grinding operation, the telescopic drive mechanism is used to drive the fine grinding wheel to extend and protrude from the rough grinding wheel, so that the protruding fine grinding wheel can be used to perform fine grinding on the side of the other silicon rod. For example, when the fine grinding wheel is nested within the rough grinding wheel, the rough grinding wheel may be provided with a telescopic drive mechanism, and during the rough grinding operation, the telescopic drive mechanism is used to drive the rough grinding wheel to extend and protrude from the fine grinding wheel, so that the protruding rough grinding wheel can be used to perform rough grinding on the side of the other silicon rod, and during the fine grinding operation, the telescopic drive mechanism is used to drive the rough grinding wheel to retract and be recessed in the fine grinding wheel, so that the fine grinding wheel can be used to perform fine grinding on the side of the other silicon rod. Alternatively, when the fine grinding wheel is nested in the rough grinding wheel, the fine grinding wheel may be provided with a telescopic drive mechanism. When performing the rough grinding operation, the telescopic drive mechanism is utilized to drive the fine grinding wheel to retract and be recessed into the rough grinding wheel, so that the rough grinding wheel can be used to perform the rough grinding operation on the side of the other silicon rod. When performing the fine grinding operation, the telescopic drive mechanism is utilized to drive the fine grinding wheel to extend and protrude from the rough grinding wheel, so that the protruding fine grinding wheel can be used to perform the fine grinding operation on the side of the other silicon rod.
[0389] In the present application, when the side surface of the square silicon rod is subjected to the surface grinding operation, the surface grinding device and the first square silicon rod clamping device are driven to move relative to each other in the first direction so that the surface grinding device performs the surface grinding operation on the side surface of the square silicon rod clamped by the first square silicon rod clamping device. Therefore, in some embodiments, the surface grinding device is a mobile surface grinding device and the first square silicon rod clamping device is a fixed square silicon rod clamping device. In some embodiments, the surface grinding device is a fixed surface grinding device and the first square silicon rod clamping device is a mobile square silicon rod clamping device. In some embodiments, the surface grinding device is a mobile surface grinding device and the first square silicon rod clamping device is a mobile square silicon rod clamping device.
[0390] Taking a mobile surface grinding device as an example, the surface grinding device includes a surface grinding frame travel mechanism, and the surface grinding frame and the surface grinding unit provided thereon are driven to move along a first direction by the surface grinding frame travel mechanism.
[0391] In some embodiments, the grinding frame travel mechanism includes: a grinding travel guide rail and a grinding travel drive unit, wherein the grinding travel guide rail is arranged on the grinding machine base along the first direction, and the grinding travel drive unit is used to drive the grinding frame and the grinding unit provided therewith to move along the grinding travel guide rail.
[0392] In certain embodiments, the grinding surface advancing drive unit includes a grinding surface advancing rack, a driving gear, and a driving source. The grinding surface advancing rack is disposed on the grinding machine base along a first direction, parallel to the grinding surface advancing guide rail. The driving gear is disposed on the grinding frame (e.g., at the bottom of the grinding frame) and meshes with the grinding surface advancing rack. The driving gear is driven to rotate by the driving source, and the teeth of the driving gear mesh with the grinding surface advancing rack. Following the movement of the grinding surface advancing rack, the grinding frame connected to the driving gear and the grinding surface unit therein move along the grinding surface advancing guide rail. The driving source is, for example, a driving motor.
[0393] In certain embodiments, the surface grinding drive unit includes a surface grinding screw and a drive source, wherein the surface grinding screw is arranged along a first direction and associated with a surface grinding frame, and the drive source is used to drive the surface grinding screw to rotate so that the associated surface grinding frame and the surface grinding unit provided therein move along the surface grinding guide rail. The drive source is, for example, a drive motor.
[0394] When the side surfaces of the square silicon rods at the grinding area are ground using the grinding device, the grinding frame travel mechanism drives the grinding frame and the grinding unit provided therewith to move in a first direction so as to achieve relative movement with the square silicon rods clamped by the first square silicon rod clamping device at the grinding area so that the grinding tools in the grinding unit can grind the side surfaces of the square silicon rods clamped by the first square silicon rod clamping device at the grinding area.
[0395] Taking the movable square silicon rod clamping device as an example, the first square silicon rod clamping device includes a first clamping and traveling mechanism, which drives the first square silicon rod clamping device and the clamped square silicon rod to move along a first direction.
[0396] In some embodiments, the first clamping and traveling mechanism includes: a first clamping and traveling guide rail and a first clamping and traveling drive unit, wherein the first clamping and traveling guide rail is arranged on a first bearing mounting seat along a first direction, and the first clamping and traveling drive unit is used to drive the first square silicon rod clamp and the square silicon rod clamped therein to move along the first clamping and traveling guide rail.
[0397] In some embodiments, the first clamping and traveling drive unit includes a first clamping and traveling rack, a driving gear, and a driving source. The first clamping and traveling rack is arranged on the first bearing mounting seat along the first direction, parallel to the first clamping and traveling guide rail. The driving gear is arranged on the first square silicon rod clamp and meshes with the first clamping and traveling guide rail. The driving gear is driven to rotate by the driving source, and the gear teeth of the driving gear mesh with the first clamping and traveling guide rail. The first square silicon rod clamp connected to the driving gear and the square silicon rod clamped therein move along the first clamping and traveling guide rail in accordance with the movement of the first clamping and traveling guide rail. The driving source is, for example, a driving motor.
[0398] In certain embodiments, the first clamping and traveling drive unit includes a first clamping and traveling screw and a drive source, wherein the first clamping and traveling screw is arranged along a first direction and is associated with a first square silicon ingot clamp, and the drive source is used to drive the first clamping and traveling screw to rotate so that the associated first square silicon ingot clamp and the clamped square silicon ingot move along the first clamping and traveling guide rail. The drive source is, for example, a drive motor.
[0399] When the side surfaces of the square silicon rods at the grinding area are ground using the grinding device, the first square silicon rod clamp and the square silicon rods clamped therein are driven by the first clamping and moving mechanism to move in a first direction to achieve relative movement with the grinding unit in the grinding device so that the grinding tool in the grinding unit can grind the side surfaces of the first square silicon rod clamp and the square silicon rods clamped therein.
[0400] The chamfering device is located in the chamfering area of the grinding platform and is used to chamfer the edges of the square silicon rod located in the chamfering area. The square silicon rod has four edges, so the chamfering device is used to chamfer the four edges of the square silicon rod.
[0401] In the present application, the square silicon rod is placed horizontally at the chamfered area of the grinding processing platform.
[0402] In certain embodiments, the silicon rod grinding apparatus of the present application includes a third silicon rod clamping device, which is disposed in the chamfering area and is used to clamp the end of the square silicon rod along the length direction.
[0403] The third silicon rod clamping device is intended to clamp square silicon rods.
[0404] In certain embodiments, the third-party silicon rod clamping device includes: a third bearing mount and a third-party silicon rod clamp. In certain embodiments, the third-party silicon rod clamping device clamps the square silicon rod such that the square silicon rod is placed horizontally and its length is aligned with the first direction. In certain embodiments, the third-party silicon rod clamping device clamps the square silicon rod such that the square silicon rod is placed horizontally and its length is aligned with the second direction.
[0405] In the following description, an example is given in which the square silicon rod is horizontally placed at the chamfered area and the length direction of the square silicon rod is consistent with the first direction.
[0406] The third bearing mounting seat is arranged on the grinding machine base. In some embodiments, the third bearing mounting seat is arranged on the grinding machine base along the first direction, and is used to set a third silicon rod clamp.
[0407] The third silicon rod clamp is used to clamp the square silicon rod. In some embodiments, the third silicon rod clamp may include a third clamping seat, at least one pair of third clamping members, and a third clamping member driving mechanism, wherein the at least one pair of third clamping members is provided with a third clamping portion and a third clamping portion rotating mechanism.
[0408] The at least one pair of third clamping members are arranged on opposite sides of the third clamping seat and arranged along the first direction. The at least one pair of third clamping members are controlled by the third clamping member driving mechanism to clamp the two end faces of the square silicon rod so that the clamped square silicon rod is placed horizontally along the first direction.
[0409] The third clamping member driving mechanism is configured to drive at least one of the at least one pair of third clamping members to move along the first direction to adjust the clamping distance between the pair of third clamping members. In certain embodiments, two third clamping members of the pair of third clamping members are disposed opposite each other along the first direction, and the third clamping member driving mechanism can drive at least one of the pair of third clamping members to move along the first direction to adjust the clamping distance between the pair of third clamping members disposed opposite each other.
[0410] In certain embodiments, the third clamping member driving mechanism may include: an opening and closing guide rod and an opening and closing drive unit, wherein the opening and closing guide rod is provided on the clamping seat along the first direction, and is used to set a pair of third clamping members, and the opening and closing drive unit is used to drive two third clamping members in the pair of third clamping members to move toward or away from each other along the opening and closing guide rod provided in the first direction. In order to ensure the stability of the third clamping member in being able to move horizontally along the first direction, the number of the opening and closing guide rods may be multiple, for example, there are two opening and closing guide rods. Of course, the number of the opening and closing guide rods may also be other numbers, for example, three, five, six, or more. Taking three as an example, the three opening and closing guide rods may be provided in the form of an isosceles triangle or an equilateral triangle, for example.
[0411] In some embodiments, the opening and closing drive unit includes a horizontal telescopic rod and a telescopic cylinder, one end of the horizontal telescopic rod is associated with a third clamping member, and the other end of the horizontal telescopic rod is associated with the telescopic cylinder, and the telescopic cylinder is provided on the third clamping seat. In actual application, the telescopic cylinder can drive the horizontal telescopic rod to extend and retract. For example, the telescopic cylinder drives the horizontal telescopic rod to retract inward, drives one of the pair of third clamping members to move toward the other third clamping member along the opening and closing guide rod provided in the first direction, or drives two third clamping members in the pair of third clamping members to move toward each other along the opening and closing guide rod provided in the first direction, thereby reducing the clamping distance between the two third clamping members, so as to clamp the square silicon rod located between the two third clamping members. Accordingly, the telescopic cylinder can drive the horizontal telescopic rod to extend outward, driving one of the pair of third clamping members to move away from the other third clamping member along the opening and closing guide rod provided in the first direction, or driving both of the pair of third clamping members to move away from each other along the opening and closing guide rod provided in the first direction, thereby increasing the clamping distance between the two third clamping members and releasing the clamped square silicon ingot. The telescopic cylinder can also be a telescopic oil cylinder.
[0412] In some embodiments, the opening and closing drive unit includes a screw and an opening and closing motor, one end of the screw (for example, a threaded end) is associated with a third clamping member, and the other end of the screw is associated with the opening and closing motor, and the opening and closing motor is provided on the third clamping seat. In practical applications, the opening and closing motor can drive the screw to rotate. For example, the opening and closing motor drives the screw to rotate in the forward direction (or drives the screw to rotate in the reverse direction), drives one of the pair of third clamping members to move toward the other third clamping member along the opening and closing guide rod set in the first direction, or drives two third clamping members in the pair of third clamping members to move toward each other along the opening and closing guide rod set in the first direction, thereby reducing the clamping distance between the two third clamping members to clamp the square silicon rod located between the two third clamping members. Correspondingly, the opening and closing motor drives the screw to rotate in the opposite direction (or drives the screw to rotate in the forward direction), drives one of the pair of third clamping members to move back toward the other third clamping member along the opening and closing guide rod set in the first direction, or drives two of the pair of third clamping members to move back toward each other along the opening and closing guide rod set in the first direction, thereby increasing the clamping distance between the two third clamping members to release the clamped square silicon rod.
[0413] In some embodiments, the opening and closing drive unit includes a bidirectional screw and an opening and closing motor, wherein the bidirectional screw is arranged along a first direction, and the bidirectional screw is a left-handed screw, which has two sections of thread on the rod body, and the rotation directions of the two sections of thread are opposite, that is, one section of thread is a left-handed thread, and the other section of thread is a right-handed thread, wherein one section of thread can be associated with a third clamping member and the other section of thread can be associated with another third clamping member (for example, the left-handed thread is associated with the first third clamping member and the right-handed thread is associated with the second third clamping member, or the right-handed thread is associated with the first third clamping member and the left-handed thread is associated with the second third clamping member), and the opening and closing motor is associated with the bidirectional screw, and is used to drive the bidirectional screw to rotate so that the two associated third clamping members move toward or away from each other along the opening and closing guide rod set in the first direction. In practical applications, for example, by using an opening and closing motor to drive the bidirectional screw to rotate forward (or driving the bidirectional screw to rotate reversely), the two associated third clamping members are driven to move toward each other (i.e., approach each other) along the opening and closing guide rod set in the first direction, reducing the clamping distance between the two third clamping members to clamp the square silicon rod located between the two third clamping members; or, by using an opening and closing motor to drive the bidirectional screw to rotate reversely (or driving the bidirectional screw to rotate forward), the two associated third clamping members are driven to move away from each other (i.e., away from each other) along the opening and closing guide rod set in the first direction, increasing the clamping distance between the two third clamping members to release the clamped square silicon rod. The opening and closing motor can be provided at the middle section or a terminal of the bidirectional screw.
[0414] Thus, in the present application, after the end of the square silicon rod along the length direction is clamped by the third silicon rod clamping device, at least one edge portion to be chamfered is exposed.
[0415] In some embodiments, in the third-party silicon rod clamping device, the third bearing mount is provided at the bottom, the clamping seat of the third-party silicon rod clamp is provided above the third bearing mount, and the at least one pair of third clamping members is provided on the third clamping seat and is arranged upward. In some embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the uppermost edge portion can be fully exposed, and the uppermost edge portion is used as the edge portion to be chamfered. Therefore, the chamfering device at the chamfering position may include at least one chamfering grinder (for example, one chamfering grinder or two parallel chamfering grinders), and the chamfering surface of the at least one chamfering grinder is horizontally facing downward. In some embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the two upper left and right edges can be fully exposed (in this case, the side surfaces of the square silicon rod are arranged horizontally or vertically), that is, the two exposed edges are used as the edges to be chamfered. Therefore, the chamfering device at the chamfering position may include a pair of chamfering grinders arranged at an angle. For example, in one embodiment, one of the pair of chamfering grinding tools is angled at 45° relative to the horizontal or vertical, and the other of the pair of chamfering grinding tools is angled at 45° relative to the horizontal or vertical. Of course, the above angles are not limited to these. In different embodiments, other angles may be selected. For example, the angle may be any angle between 40° and 60°, and is not limited to an integer degree.
[0416] In some embodiments, in the third-party silicon rod clamping device, the third bearing mount is provided at the bottom and extends upward or is provided at the side, the third clamping seat of the third-party silicon rod clamp is provided at one side of the third bearing mount, and the at least one pair of third clamping members is provided at the third clamping seat and is arranged to the left or right. In some embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the edge located on the far left (or far right) can be fully exposed, and the edge on the far left (or far right) is used as the edge to be chamfered. Therefore, the chamfering device at the chamfering position may include at least one chamfering grinder (for example, one chamfering grinder or two parallel chamfering grinders), and the chamfering surface of the at least one chamfering grinder is horizontally facing right (or horizontally facing left). In certain embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the two upper and lower edges located on the left side (or right side) can be fully exposed (in this case, the side surface of the square silicon rod is arranged horizontally or vertically), that is, the two exposed edges are used as edges to be chamfered. Therefore, the chamfering device at the chamfering area may include a pair of chamfering grinders arranged at an angle. For example, in a certain example, one of the pair of chamfering grinders is at a 45° angle to the horizontal line or the vertical, and the other chamfering grinder in the pair of chamfering grinders is at a 45° angle to the horizontal line or the vertical. Of course, the above-mentioned angle is not limited to this. In different embodiments, other angles may be selected. For example, the inclination angle may be any angle between 40° and 60°, and is not limited to integer degrees.
[0417] In the foregoing description, regarding the unexposed edges of the square silicon rod, in certain embodiments, other auxiliary fixtures (such as a square silicon rod transfer device, etc.) can be used to rotate or flip the silicon rod placed on a third-party silicon rod clamping device to change the position of the square silicon rod so as to expose the previously unexposed edges.
[0418] In addition, in the present application, the third-party silicon rod clamping device may still have other changes. For example, in some embodiments, the third-party silicon rod clamping device includes: a third clamping portion provided on the third clamping piece and a third clamping portion rotating mechanism for driving the third clamping portion of the third clamping piece to rotate. The third clamping portion is driven to rotate by the third clamping portion rotating mechanism, which can drive the square silicon rod clamped between the third clamping pieces to rotate to adjust the position of each edge.
[0419] In some embodiments, in the third-party silicon rod clamping device, the third bearing mount is provided at the bottom, the third clamping seat of the third-party silicon rod clamp is provided above the third bearing mount, and the at least one pair of third clamping members is provided on the third clamping seat and is arranged upward. In some embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the top edge portion can be fully exposed, and the top edge portion is used as the edge portion to be chamfered. Therefore, the chamfering device at the chamfering position may include at least one chamfering grinder (for example, a chamfering grinder or two parallel chamfering grinders), and the chamfering surface of the at least one chamfering grinder is horizontally facing downward. After the top edge portion is chamfered by the chamfering grinder and the operation is completed, the third clamping member rotation mechanism is used to drive the third clamping member to rotate, which can drive the square silicon rod to rotate to expose other edges. The other exposed edges can still be chamfered by the chamfering grinder. In this way, when the chamfering grinding tool does not change its position, the square silicon rod is driven to rotate by the third clamping part rotation mechanism to complete the chamfering operation of each edge portion of the square silicon rod.
[0420] In some embodiments, in the third-party silicon rod clamping device, the third bearing mount is provided at the bottom and extends upward or is provided at the side, the third clamping seat of the third-party silicon rod clamp is provided on one side of the third bearing mount, and the at least one pair of third clamping members is provided on the third clamping seat and is arranged to the left or right. In some embodiments, after the at least one pair of third clamping members clamps the square silicon rod, the edge portion located on the far left (or far right) can be fully exposed, and the edge portion on the far left (or far right) is used as the edge portion to be chamfered. Therefore, the chamfering device at the chamfering position may include at least one chamfering grinder (for example, a chamfering grinder or two paralle...
Claims
1. A silicon rod cutting and grinding machine, characterized in that: include: A silicon rod squaring device, used for squaring a silicon rod with a circular cross section to form a square silicon rod with a rectangular cross section, comprising: a cutting machine base and a first and a second silicon rod cutting device arranged on the cutting machine base; the first silicon rod cutting device is used for performing a first cutting operation on the silicon rod with a circular cross section, so that the silicon rod forms two parallel first side sections; the second silicon rod cutting device is used for performing a second cutting operation on the silicon rod with the two first side sections, so that the silicon rod forms two parallel second side sections to obtain a square silicon rod with a rectangular cross section, and the second side section is perpendicular to the first side section; as well as The silicon rod grinding equipment is connected with the silicon rod squaring equipment and is used for grinding and chamfering the square silicon rods transferred from the silicon rod squaring equipment, comprising: a grinding processing platform provided with a grinding area and a chamfering area, a grinding device for grinding the side surfaces of the square silicon rods located at the grinding area, and a chamfering device for chamfering the edges of the square silicon rods located at the chamfering area.
2. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The cutting machine seat is provided with a cutting processing platform of one or more cutting station groups; each cutting station group includes a first cutting station equipped with the first silicon rod cutting device and a second cutting station equipped with the second silicon rod cutting device.
3. The silicon rod cutting and grinding machine according to claim 2, characterized in that: The first cutting station includes a first loading and unloading position and a first cutting position, and the first cutting station is equipped with a first silicon rod transfer device for carrying a silicon rod with a circular cross-section and transferring it between the first loading and unloading position and the first cutting position along a transfer direction, and the first silicon rod cutting device is arranged at the first cutting position; the second cutting station includes a second loading and unloading position and a second cutting position, and the second cutting station is equipped with a second silicon rod transfer device for carrying a silicon rod with two first side cut surfaces and transferring it between the second loading and unloading position and the second cutting position along a transfer direction, and the second silicon rod cutting device is arranged at the second cutting position.
4. The silicon rod cutting and grinding machine according to claim 3, characterized in that: The first silicon rod cutting device is provided with at least one first cutting wire saw, and the at least one first cutting wire saw is located in a vertical plane and arranged along the vertical direction or arranged at an angle to the vertical. The first silicon rod cutting device and the first silicon rod transferring device are relatively moved along the transfer direction so that the at least one first cutting wire saw performs a first cutting operation on the silicon rod with a circular cross-section; the second silicon rod cutting device is provided with at least one second cutting wire saw, and the at least one second cutting wire saw is located in a vertical plane and arranged along the vertical direction or arranged at an angle to the vertical. The second silicon rod cutting device and the second silicon rod transferring device are relatively moved along the transfer direction so that the at least one second cutting wire saw performs a second cutting operation on the silicon rod with two first side cut surfaces.
5. The silicon rod cutting and grinding machine according to claim 3, characterized in that: The silicon rod squaring equipment includes a silicon rod loading and unloading device, which is used to load silicon rods with circular cross-sections onto a first silicon rod transfer device, unload silicon rods that have completed the first cutting from the first silicon rod transfer device and load them onto a second silicon rod transfer device, and unload square silicon rods that have completed the second cutting from the second silicon rod transfer device and load them onto the silicon rod grinding equipment.
6. The silicon rod cutting and grinding machine according to claim 3, characterized in that: The first or second silicon rod transfer device comprises: a transfer channel arranged along a transfer direction, a carrying platform for carrying silicon rods, and a transfer drive mechanism for driving the carrying platform and the silicon rods carried by the carrying platform to move on the transfer channel along the transfer direction.
7. The silicon rod cutting and grinding machine according to claim 6, characterized in that: The silicon rod squaring device comprises: a first edge skin anti-collapse device matched with the first silicon rod transfer device, and a second edge skin anti-collapse device matched with the second silicon rod transfer device.
8. The silicon rod cutting and grinding machine according to claim 6, characterized in that: The silicon rod squaring equipment includes a side skin unloading device including: a side skin mounting frame straddling the cutting machine base along the transposition direction, a side skin adsorption member for adsorbing the side skin, and an adsorption member transposition mechanism for driving the adsorption member to move on the side skin mounting frame along the transposition direction.
9. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The first silicon rod cutting device includes two first wire cutting units arranged in parallel, each of which is formed with a first cutting wire saw, and the second silicon rod cutting device includes two second wire cutting units arranged in parallel, each of which is formed with a second cutting wire saw.
10. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The silicon rod squaring equipment includes a crystal line detection device, including: at least two supporting structures arranged at a distance, each of the supporting structures has a supporting roller group arranged along the transfer direction for supporting the silicon rod to be cut; and a roller driving source for driving each supporting roller in the supporting roller group to rotate so as to drive the silicon rod to be cut to rotate.
11. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The silicon rod grinding equipment comprises a grinding machine base with a grinding processing platform, a grinding device comprising at least one grinding mold is provided at the grinding area, and a chamfering device comprising at least one chamfering tool is provided at the chamfering area.
12. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The grinding processing platform is provided with a first type of grinding area, a second type of grinding area, and a chamfering area which are arranged in parallel. The first type of grinding area is provided with a first type of grinding device for grinding a pair of first side surfaces of the opposing silicon rod, and the first type of grinding device includes at least one first grinding tool. The second type of grinding area is provided with a second type of grinding device for grinding a pair of second side surfaces of the opposing silicon rod, and the second type of grinding device includes at least one second grinding tool. The chamfering area is provided with a chamfering device, and the chamfering device includes at least one chamfering tool.
13. The silicon rod cutting and grinding machine according to claim 1, characterized in that: The processing platform is provided with two first-type grinding areas, one second-type grinding area, and one chamfering area arranged in parallel, wherein any of the first-type grinding areas is provided with a first-type grinding device for grinding one of a pair of first side surfaces of the other silicon rod, the first-type grinding device includes at least one first grinding tool, the second-type grinding area is provided with a second-type grinding device for grinding a pair of second side surfaces of the other silicon rod, the second-type grinding device includes at least one second grinding tool, and the chamfering area is provided with a chamfering device, the chamfering device includes at least one chamfering tool.
14. The silicon rod cutting and grinding machine according to claim 13, characterized in that: The silicon rod grinding equipment includes: a first square silicon rod clamping device arranged in the first type of grinding surface area for clamping the end of the square silicon rod along the length direction and exposing a first side surface of the square silicon rod; and a second square silicon rod clamping device arranged in the second type of grinding surface area for clamping the end of the square silicon rod along the length direction and exposing a pair of second side surfaces of the square silicon rod.
15. The silicon rod cutting and grinding machine according to claim 13, characterized in that: The first type of surface grinding device comprises a first surface grinding frame and at least one first surface grinding unit movably arranged on the first surface grinding frame, and each first surface grinding unit has at least one first surface grinding tool.
16. The silicon rod cutting and grinding machine according to claim 13, characterized in that: A second type of grinding device is provided at the second type of grinding area, the second type of grinding device includes a second grinding frame and at least one pair of second grinding units movably arranged on the second grinding frame and arranged opposite to each other, each grinding unit has at least one second grinding tool; or a pair of second type of grinding devices are provided at the second type of grinding area, the second type of grinding device includes a second grinding frame and at least one second grinding unit movably arranged on the second grinding frame, each second grinding unit has at least one second grinding tool.
17. The integrated silicon rod cutting and grinding machine according to claim 11, 12 or 13, characterized in that: The silicon rod grinding equipment includes a third silicon rod clamping device arranged in the chamfering area for clamping the end of the square silicon rod along the length direction; the chamfering device includes a chamfering frame and at least one chamfering unit movably arranged on the chamfering frame, and each chamfering unit has at least one chamfering grinding tool.
18. The integrated silicon rod cutting and grinding machine according to claim 11, 12 or 13, characterized in that: The silicon rod grinding equipment includes a square silicon rod supporting device arranged in the chamfering area for supporting the square silicon rod, and the bottom of the square silicon rod supporting device is provided with a groove for exposing at least one edge of the square silicon rod; the chamfering device includes a chamfering frame and at least one chamfering unit movably arranged on the chamfering frame, each chamfering unit has at least one chamfering grinder, and the chamfering surface of the chamfering grinder is arranged upward.
19. The integrated silicon rod cutting and grinding machine according to claim 11, 12 or 13, characterized in that: The silicon rod grinding equipment includes a square silicon rod supporting device arranged in the chamfering area for supporting horizontally placed square silicon rods; the chamfering device includes a chamfering frame and at least one pair of chamfering units movably arranged on the chamfering frame, and each chamfering unit has at least one chamfering grinding tool.
20. The silicon rod cutting and grinding machine according to claim 11, characterized in that: The silicon rod grinding equipment includes a square silicon rod transfer device for transferring the square silicon rods between various functional positions, including a transfer mounting frame arranged on the grinding machine base, a transfer clamp having a clamp seat, at least a pair of clamp arms arranged on opposite sides of the clamp seat, and a clamp arm driving mechanism, a transfer lifting mechanism for driving the transfer clamp to be lifted vertically on the transfer mounting frame, and a transfer translation mechanism for driving the transfer clamp to be translated on the transfer mounting frame.
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