Valve device and semiconductor process machine table
By using rolling bearings to roll in the U-shaped track groove in the V-TEX valve device, the problem of severe wear and jamming of the valve device is solved, the service life and production efficiency are improved, and the production cost is reduced.
Patent Information
- Application Number
- CN202421531171.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-06-28
AI Technical Summary
V-TEX valves are prone to wear during use, resulting in jamming and abnormal opening and closing, reducing service life and increasing production costs.
A valve device is designed, which adopts a first cylinder block and a second cylinder block to be arranged side by side. When the cylinder block moves up and down, the slider rolls in the U-shaped track groove through the first rolling bearing and the second rolling bearing to reduce friction.
It effectively reduces the friction between the slider and the cylinder, avoids abnormalities such as severe wear and jamming of the valve device, improves service life and production efficiency, and reduces the frequency of valve replacement.
Smart Images
Figure CN222811238U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor process manufacturing machines, in particular to a valve device and a semiconductor process machine. Background Art
[0002] ASM (ASML) equipment uses V-TEX valves, and each chamber is equipped with this valve. The function of this valve is to isolate the buffer chamber from the process chamber. When the V-TEX valve is closed, the buffer chamber is isolated from the process chamber; when the V-TEX valve is opened, the buffer chamber is connected to the process chamber, and the wafers temporarily stored in the buffer chamber can be transferred to the process chamber for some semiconductor process operations to be performed on the wafers.
[0003] The V-TEX valve uses air to control the piston movement of the cylinder body, which in turn controls the slider to move up and down relative to the cylinder body. There is sliding friction between the slider and the cylinder body. In the process of the slider moving up and down relative to the cylinder body, the part of the cylinder body that rubs against the slider is prone to wear, and the worn part becomes stuck.
[0004] Usually, the V-TEX valve needs to be opened and closed once for each wafer RUN. The cylinder body is usually made of aluminum, and the part of the cylinder body that rubs against the slider is prone to wear, causing a large amount of aluminum powder to fall off. Frequent movements cause the wear gap to continue to increase. Severe wear can cause the valve to open and close abnormally, causing it to not close tightly and leak, reducing the service life of the valve and even causing equipment downtime. In addition, the price of V-TEX valves is relatively expensive. If the valves are frequently replaced due to wear, the production cost will increase. Utility Model Content
[0005] The utility model aims to provide a valve device and a semiconductor process machine to solve at least one of the following problems: the valves in the process chamber are easily worn, stuck (abnormal opening and closing), etc., which affect production, and frequent replacement of valves leads to high production costs.
[0006] In order to solve the above technical problems, on the one hand, the utility model provides a valve device, including: a first cylinder body, a second cylinder body, a first U-shaped track groove, a second U-shaped track groove, a slider, a first rolling bearing and a second rolling bearing, wherein the first cylinder body and the second cylinder body are arranged side by side and spaced apart, the first U-shaped track groove is installed on the inner surface of the first cylinder body close to the second cylinder body, and the second U-shaped track groove is installed on the inner surface of the second cylinder body close to the first cylinder body, so that the first U-shaped track groove and the second U-shaped track groove are arranged opposite to each other, and an opening is formed between the first cylinder body and the second cylinder body;
[0007] A first protrusion and a second protrusion are respectively provided on two opposite sides of the slider, the first rolling bearing is sleeved on the first protrusion, and the second rolling bearing is sleeved on the second protrusion;
[0008] The slider can move up and down relative to the first cylinder body and the second cylinder body to realize opening and closing of the opening, wherein during the opening and closing process of the opening, the first rolling bearing rolls in the first U-shaped track groove, and the second rolling bearing rolls in the second U-shaped track groove.
[0009] Optionally, in the valve device, the slider is pneumatically driven to move up and down relative to the first cylinder body and the second cylinder body to achieve opening and closing of the opening.
[0010] Optionally, in the valve device, the valve device also includes: an air pump, a gas pipeline and a piston connecting rod, the gas pipeline is respectively connected to the first cylinder body and the second cylinder body, the air pump is connected to the gas pipeline, one end of the piston connecting rod is respectively connected to the first cylinder body and the second cylinder body, and the other end of the piston connecting rod is connected to the slider.
[0011] Optionally, in the valve device, the lateral width of the inner groove of the first U-shaped track groove is equal to the outer diameter of the first rolling bearing; the lateral width of the inner groove of the second U-shaped track groove is equal to the outer diameter of the second rolling bearing.
[0012] Optionally, in the valve device, the material of the first U-shaped track groove and the material of the second U-shaped track groove are both stainless steel.
[0013] Optionally, in the valve device, a first recessed portion is provided on the inner surface of the first cylinder body close to the second cylinder body, and the first U-shaped track groove is mounted on and fits with the first recessed portion;
[0014] A second recessed portion is provided on the inner surface of the second cylinder body close to the first cylinder body, and the second U-shaped track groove is installed on the second recessed portion and fits with the second recessed portion.
[0015] On the other hand, the utility model also provides a semiconductor process machine, comprising: a buffer chamber, a process chamber and the valve device, wherein the buffer chamber is connected to the process chamber, and the valve device is arranged between the buffer chamber and the process chamber to control the isolation or connection between the buffer chamber and the process chamber.
[0016] The technical solution of this application has at least the following advantages:
[0017] The present application installs a first U-shaped track groove on the inner side of the first cylinder body and a second U-shaped track groove on the inner side of the second cylinder body, and installs a first rolling shaft and a second rolling bearing on two opposite sides of the slider respectively. When the slider moves up and down relative to the first cylinder body and the second cylinder body to open and close the opening, the first rolling bearing can roll in the first U-shaped track groove and the second rolling bearing can roll in the second U-shaped track groove, thereby reducing the friction between the slider and the first cylinder body and the second cylinder body, avoiding the situation where the valve device is severely worn, stuck or other abnormalities causing equipment downtime, increasing the service life of the valve device, improving production efficiency, avoiding frequent replacement of the valve device, and eliminating the need to increase production costs.
[0018] Furthermore, the materials of the first cylinder body and the second cylinder body are both stainless steel. During the up and down movement of the slider relative to the first cylinder body and the second cylinder body, a large amount of wear and tear of the first cylinder body and the second cylinder body, which results in the dropping of powder chips, is avoided, and the friction between the slider and the first cylinder body and the second cylinder body is further reduced, thereby avoiding the valve device from being severely worn, stuck, or other abnormalities that cause equipment downtime, thereby increasing the service life of the valve device and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a structural schematic diagram of the valve device of an embodiment of the utility model;
[0020] Figure 2 It is a top view schematic diagram of the valve device of an embodiment of the utility model;
[0021] FIG3( a ) is a schematic top view of a first cylinder body of an embodiment of the present utility model;
[0022] FIG3( b ) is a left side schematic diagram of the first cylinder body of the utility model embodiment;
[0023] Figure 4 It is a schematic structural diagram of a slider without the first rolling bearing and the second rolling bearing installed in an embodiment of the utility model;
[0024] Figure 5 yes Figure 4 A schematic diagram of the main view of the slider in FIG.
[0025] Figure 6 It is a structural schematic diagram of a sliding block after the first rolling bearing and the second rolling bearing are installed in an embodiment of the utility model;
[0026] The reference numerals are described as follows:
[0027] 11-first cylinder body, 12-second cylinder body, 21-first U-shaped track groove, 22-second U-shaped track groove, 30-slider, 31-first protrusion, 32-first rolling bearing, 33-second protrusion, 34-second rolling bearing, 40-first recess, 51-first air pipe connection hole, 52-second air pipe connection hole. DETAILED DESCRIPTION
[0028] The valve device and semiconductor process machine proposed by the utility model are further described in detail below in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different proportions are used.
[0029] The utility model provides a valve device, referring to Figure 1 , Figure 2 , Figure 3(a), Figure 3(b), Figure 4 , Figure 5 and Figure 6 The valve device includes: a first cylinder body 11, a second cylinder body 12, a first U-shaped track groove 21, a second U-shaped track groove 22, a slider 30, a first rolling bearing 32 and a second rolling bearing 34, wherein the first cylinder body 11 and the second cylinder body 12 are arranged side by side and at intervals, the first U-shaped track groove 21 is installed on the inner side surface of the first cylinder body 11 close to the second cylinder body 12, and the second U-shaped track groove 22 is installed on the inner side surface of the second cylinder body 12 close to the first cylinder body 11, so that the first U-shaped track groove 21 and the second U-shaped track groove 22 are arranged opposite to each other, and an opening is formed between the first cylinder body 11 and the second cylinder body 12.
[0030] Among them, Figure 1 and Figure 2 As shown, the first cylinder body 11 and the second cylinder body 12 are completely identical in structure and are axisymmetric.
[0031] For further reference, Figure 4-Figure 6The two opposite sides of the slider 30 (the two sides respectively attached to the first cylinder body and the second cylinder body) are respectively provided with a first protrusion 31 and a second protrusion 32, the first rolling bearing 32 is sleeved on the first protrusion 31, and the second rolling bearing 34 is sleeved on the second protrusion 33; the slider 30 can move up and down in a certain space between the first cylinder body 11 and the second cylinder body 12, and the slider 30 can move up and down relative to the first cylinder body 11 and the second cylinder body 12 to realize the opening and closing of the opening, wherein, during the opening and closing process of the opening, the first rolling bearing 32 rolls in the first U-shaped track groove 21, and the second rolling bearing 34 rolls in the second U-shaped track groove 22. When the slider 30 moves up relative to the first cylinder body 11 and the second cylinder body 12, the opening is gradually opened; when the slider 30 moves down relative to the first cylinder body 11 and the second cylinder body 12, the opening is gradually closed.
[0032] In this embodiment, during the gradual closing process of the opening, the inner side surface of the first cylinder body 11 except the first U-shaped track groove 21 is fitted with one side surface of the slider 30, and there is sliding friction between the inner side surface of the first cylinder body 11 except the first U-shaped track groove 21 and one side surface of the slider 30; similarly, on the other side, the inner side surface of the second cylinder body 12 except the second U-shaped track groove 22 is fitted with the other side surface of the slider 30, and there is sliding friction between the inner side surface of the second cylinder body 12 except the second U-shaped track groove 22 and the other side surface of the slider 30.
[0033] Among them, the friction of the first rolling bearing 32 in the first U-shaped track groove 21 and the friction of the second rolling bearing 34 in the second U-shaped track groove 22 are both rolling frictions, which can reduce the friction between the slider and the first cylinder body and the second cylinder body, avoid the valve device from being severely worn, stuck, and other abnormalities that cause equipment downtime, increase the service life of the valve device, and improve production efficiency.
[0034] Preferably, the slider 30 is pneumatically driven to move up and down relative to the first cylinder body 11 and the second cylinder body 12 to open and close the opening.
[0035] In this embodiment, the valve device also includes: an air pump, a gas pipeline and a piston connecting rod (not shown in the figure). The first cylinder body 11 is also provided with a first gas pipe connecting hole 51, and the second cylinder body 12 is also provided with a second gas pipe connecting hole 52. One end of the gas pipeline has a plurality of branch pipelines, and each branch pipeline is respectively connected to the first gas pipe connecting hole 51 on the first cylinder body 11 and the second gas pipe connecting hole 52 on the second cylinder body 12. The air pump is connected to the other end of the gas pipeline, one end of the piston connecting rod is respectively connected to the piston in the first cylinder body and the piston in the second cylinder body, and the other end of the piston connecting rod is connected to the slider.
[0036] Among them, there is a sealed air cavity inside the first cylinder body and between the piston of the first cylinder body, and a vacuum or pressure is alternately generated in the first cylinder body through an air pump, and the piston in the first cylinder body reciprocates in the first cylinder body; similarly, there is a sealed air cavity inside the second cylinder body and between the piston of the second cylinder body, and a vacuum or pressure is alternately generated in the second cylinder body through an air pump, and the piston in the second cylinder body reciprocates in the second cylinder body; the piston in the first cylinder body and the piston in the second cylinder body drive the slider to move up or down through the piston connecting rod to realize the opening and closing of the opening, thereby realizing the opening and closing of the valve device.
[0037] Preferably, the lateral width of the inner groove of the first U-shaped track groove 21 is equal to the outer diameter of the first rolling bearing 32 ; the lateral width of the inner groove of the second U-shaped track groove 22 is equal to the outer diameter of the second rolling bearing 34 .
[0038] Preferably, the material of the first U-shaped track groove 21 and the material of the second U-shaped track groove 22 are both stainless steel.
[0039] Further, referring to Figure 3(a), the inner surface of the first cylinder body 11 close to the second cylinder body 12 is provided with a first recessed portion 40, and the first U-shaped track groove 21 is installed on the first recessed portion 40 and fits with the first recessed portion 40; similarly, the inner surface of the second cylinder body close to the first cylinder body is provided with a second recessed portion, and the second U-shaped track groove is installed on the second recessed portion and fits with the second recessed portion.
[0040] In this embodiment, referring to FIG. 3( b ), the bottom wall of the first U-shaped track groove 21 is semicircular and completely fits with the arc surface of half of the first rolling bearing 32; the side wall of the first U-shaped track groove 21 is flat and fits with the side of the first rolling bearing 32. Similarly, the bottom wall of the second U-shaped track groove 22 is semicircular and completely fits with the arc surface of half of the second rolling bearing 34; the side wall of the second U-shaped track groove 34 is flat and fits with the side of the second rolling bearing 34.
[0041] Based on the same concept, the utility model also provides a semiconductor process machine, including: a buffer chamber, a process chamber and the valve device, wherein the buffer chamber is connected to the process chamber, and the valve device is arranged between the buffer chamber and the process chamber to control the isolation or connection between the buffer chamber and the process chamber. When the slider 30 of the valve device moves up relative to the first cylinder body 11 and the second cylinder body 12, the opening between the buffer chamber and the process chamber is gradually opened, thereby realizing the connection between the buffer chamber and the process chamber, and wafers can be transferred through the opening; when the slider 30 moves down relative to the first cylinder body 11 and the second cylinder body 12, the opening between the buffer chamber and the process chamber is gradually closed, thereby realizing the isolation between the buffer chamber and the process chamber.
[0042] The present application installs a first U-shaped track groove on the inner side of the first cylinder body and a second U-shaped track groove on the inner side of the second cylinder body, and installs a first rolling shaft and a second rolling bearing on two opposite sides of the slider, respectively. When the slider moves up and down relative to the first cylinder body and the second cylinder body to open and close the opening, the first rolling bearing can roll in the first U-shaped track groove, and the second rolling bearing can roll in the second U-shaped track groove, thereby reducing the friction between the slider and the first cylinder body and the second cylinder body, avoiding the situation where the valve device is severely worn, stuck, and other abnormalities causing equipment downtime, increasing the service life of the valve device, improving production efficiency, avoiding frequent replacement of the valve device, and not increasing production costs. Further, the first cylinder body and the second cylinder body are made of stainless steel. When the slider moves up and down relative to the first cylinder body and the second cylinder body, the first cylinder body and the second cylinder body are avoided from being worn a lot and falling powder, further reducing the friction between the slider and the first cylinder body and the second cylinder body, avoiding the situation where the valve device is severely worn, stuck, and other abnormalities causing equipment downtime, increasing the service life of the valve device, and improving production efficiency.
[0043] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.
Claims
1. A valve device, characterized in that: include: A first cylinder body, a second cylinder body, a first U-shaped track groove, a second U-shaped track groove, a slider, a first rolling bearing and a second rolling bearing, wherein the first cylinder body and the second cylinder body are arranged side by side and spaced apart, the first U-shaped track groove is installed on the inner side of the first cylinder body close to the second cylinder body, and the second U-shaped track groove is installed on the inner side of the second cylinder body close to the first cylinder body, so that the first U-shaped track groove is arranged opposite to the second U-shaped track groove, and an opening is formed between the first cylinder body and the second cylinder body; A first protrusion and a second protrusion are respectively provided on two opposite sides of the slider, the first rolling bearing is sleeved on the first protrusion, and the second rolling bearing is sleeved on the second protrusion; The slider can move up and down relative to the first cylinder body and the second cylinder body to realize opening and closing of the opening, wherein during the opening and closing process of the opening, the first rolling bearing rolls in the first U-shaped track groove, and the second rolling bearing rolls in the second U-shaped track groove.
2. The valve device according to claim 1, characterized in that Through pneumatic driving, the slide block moves up and down relative to the first cylinder body and the second cylinder body to realize opening and closing of the opening.
3. The valve device according to claim 2, characterized in that The valve device also includes: an air pump, a gas pipeline and a piston connecting rod, the gas pipeline is connected to the first cylinder body and the second cylinder body respectively, the air pump is connected to the gas pipeline, one end of the piston connecting rod is connected to the first cylinder body and the second cylinder body respectively, and the other end of the piston connecting rod is connected to the slider.
4. The valve device according to claim 1, characterized in that The lateral width of the inner groove of the first U-shaped track groove is equal to the outer diameter of the first rolling bearing; the lateral width of the inner groove of the second U-shaped track groove is equal to the outer diameter of the second rolling bearing.
5. The valve device according to claim 1, characterized in that The material of the first U-shaped track groove and the material of the second U-shaped track groove are both stainless steel.
6. The valve device according to claim 1, characterized in that A first recessed portion is provided on the inner surface of the first cylinder body close to the second cylinder body, and the first U-shaped track groove is installed on the first recessed portion and fits with the first recessed portion; A second recessed portion is provided on the inner surface of the second cylinder body close to the first cylinder body, and the second U-shaped track groove is installed on the second recessed portion and fits with the second recessed portion.
7. A semiconductor process machine, characterized in that: include: A buffer chamber, a process chamber and a valve device as described in any one of claims 1-6, wherein the buffer chamber is connected to the process chamber, and the valve device is arranged between the buffer chamber and the process chamber to control the isolation or connection between the buffer chamber and the process chamber.