Bearing device suitable for placing wafer flower basket
By designing a load bearing device suitable for wafer baskets, automatic alignment is achieved using angle adjustment and positioning components, and abnormal detection is performed in combination with detectors and communication interfaces, the problem of manual operation time and single load plate model in the prior art is solved, and efficient and automatic wafer alignment and abnormal detection is achieved.
Patent Information
- Application Number
- CN202421631526.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-04-29
- Estimated Expiration
- 2034-07-11
AI Technical Summary
The prior art has problems such as time-consuming manual operation, difficulty in detecting minor bump abnormalities, and single load plate model leading to high adjustment costs.
A load bearing device suitable for the placement of wafer baskets is designed, including a device base, an angle adjustment device, a load bearing plate, a positioning assembly, a wafer tab detector and a flower basket detector. The device realizes automatic alignment of the wafer through angle adjustment and positioning components, and uses detectors and communication interfaces to perform abnormal detection and data transmission.
It realizes automatic alignment of wafers during storage of flower baskets, reduces manual operation costs, improves alignment efficiency, promptly detects and deals with convex abnormalities, reduces usage and adjustment costs, and is suitable for 8-inch and 6-inch flower baskets.
Smart Images
Figure CN222813566U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a bearing device, in particular to a bearing device suitable for placing a wafer flower basket. Background Art
[0002] For existing wafer processing, in order to meet the needs of subsequent batch processing, the wafers need to be temporarily stacked. The current conventional method seems to be to use a flower basket to achieve the layer-by-layer spacing of wafers. Specifically, it is necessary to place the wafers layer by layer manually. After placement, the wafers need to be manually aligned and calibrated, which is time-consuming. During this period, if there is a slight "convex" abnormality on the wafer, it is not easy to detect manually, which can easily affect subsequent processing procedures.
[0003] At the same time, for the transfer and placement of wafers, a carrier plate is often used to properly limit the bottom of the flower basket. At present, the carrier plate is a single model, and for conventional 8-inch flower baskets and 6-inch flower baskets, independent carrier plates are required. Therefore, if the positioning and feeding production lines need to be adjusted, the carrier plates need to be completely replaced, which has high implementation costs and requires a long wait time during the adjustment, which reduces the processing efficiency.
[0004] In view of the above-mentioned defects, the designer has actively carried out research and innovation in order to create a carrier device suitable for placing wafer flower baskets, making it more valuable for industrial use. Utility Model Content
[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a carrying device suitable for placing a wafer flower basket.
[0006] The utility model is a carrier device suitable for placing wafer flower baskets, comprising a device base, wherein: the device base is provided with an angle adjustment device, the angle adjustment device is provided with a carrier plate, an 8-inch positioning component and a 6-inch positioning component are respectively provided on the carrier plate, a wafer convex piece detector is provided on the carrier plate, and a flower basket detector is also provided on the carrier plate, and the wafer convex piece detector and the flower basket detector are configured with communication interfaces.
[0007] Furthermore, the above-mentioned supporting device suitable for placing wafer flower baskets, wherein the device base includes a base body, an angle adjustment device is provided at the lower end of the base body, a storage space is provided in the base body, a guide device is provided in the storage space, the guide device is a connecting rod, one end of the connecting rod is connected to the angle adjustment device, the other end of the connecting rod is connected to the supporting plate, a rotating shaft is provided on one side of the base body, and the supporting plate is connected to the rotating shaft.
[0008] Furthermore, in the above-mentioned supporting device suitable for placing wafer flower baskets, the angle adjustment device is a cylinder; or, the angle adjustment device is an electric cylinder.
[0009] Furthermore, in the above-mentioned supporting device suitable for placing wafer flower baskets, the 8-inch positioning assembly includes 8-inch rear blocks and 8-inch front blocks distributed in pairs; the 6-inch positioning assembly includes 6-inch rear blocks and 6-inch front blocks distributed in pairs.
[0010] Furthermore, in the above-mentioned supporting device suitable for placing wafer flower baskets, the 8-inch rear block and the 6-inch rear block are both rectangular blocks, and the rectangular blocks are connected to the supporting plate through positioning screws.
[0011] Furthermore, in the above-mentioned supporting device suitable for placing wafer flower baskets, the 8-inch front stop block and the 6-inch front stop block both include supporting blocks, the supporting blocks are connected to the supporting plate through positioning screws, and a protrusion is provided on one side of the supporting block.
[0012] Furthermore, in the above-mentioned carrying device suitable for placing a wafer basket, the wafer convex chip detector is a photoelectric sensor; or, the wafer convex chip detector is a camera.
[0013] Furthermore, the above-mentioned supporting device suitable for placing wafer flower baskets, wherein the flower basket detector includes an 8-inch detection module and a 6-inch detection module, the distribution position of the 8-inch detection module overlaps with the placement area of the 8-inch flower basket, and the distribution position of the 6-inch detection module overlaps with the placement area of the 6-inch flower basket.
[0014] Furthermore, in the above-mentioned carrier device suitable for placing wafer flower baskets, the flower basket detector is a photoelectric sensor; or, the flower basket detector is a camera.
[0015] Furthermore, in the above-mentioned carrying device suitable for placing wafer baskets, the wafer convex detector and the basket detector are on the horizontal plane of the carrying plate, or are flush with the carrying plate.
[0016] By means of the above solution, the utility model has at least the following advantages:
[0017] 1. Gravity can be directly used to achieve automatic alignment of wafers during storage in the basket without the need for other external equipment, thus reducing the implementation cost of the alignment step.
[0018] 2. No manual operation is required during alignment, which improves alignment efficiency and reduces labor costs.
[0019] 3. It can timely check the abnormal "convex piece" phenomenon, so as to facilitate the intervention and treatment at the first time without affecting the subsequent processing.
[0020] 4. It has better adaptability and can meet the limit of 8-inch flower basket and 6-inch flower basket. There is no need to configure an independent bearing plate, which reduces the cost of use.
[0021] 5. The overall structure is simple and can be deployed on the wafer processing production line, with good versatility.
[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a structural schematic diagram of a carrier device suitable for placing a wafer flower basket.
[0024] Figure 2 This is a schematic diagram of the arrangement process of wafers in an 8-inch flower basket.
[0025] Figure 3 This is a schematic diagram of the arrangement of wafers in an 8-inch flower basket.
[0026] Figure 4 This is a diagram of loading a 6-inch flower basket.
[0027] The meanings of the reference numerals in the drawings are as follows.
[0028] 1 Device base 2 Angle adjustment device
[0029] 3 Carrier plate 4 Wafer bump detector
[0030] 5 guide device 6 8 inch rear stop
[0031] 7 8 inch front block 8 6 inch rear block
[0032] 9 6-inch front stopper 10 8-inch detection module
[0033] 11 6-inch detection module 12 shaft DETAILED DESCRIPTION
[0034] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0035] like Figures 1 to 4The carrier device suitable for placing wafer flower baskets includes a device base 1, which is different in that: an angle adjustment device 2 is arranged on the device base 1, and a carrier plate 3 is arranged on the angle adjustment device 2. In this way, after the flower basket 13 containing the wafers 14 is placed on the carrier plate 3, the angle of the carrier plate 3 can be adjusted to align the wafers 14 under the influence of gravity. At the same time, an 8-inch positioning component and a 6-inch positioning component are respectively arranged on the carrier plate 3. In this way, the positioning needs of the currently common 8-inch flower basket and 6-inch flower basket can be taken into account, and the flower basket 13 thereon will not accidentally slip when the carrier plate 3 is tilted. In addition, a wafer protrusion detector 4 is arranged on the carrier plate 3. Therefore, when the carrier plate 3 is reset, if the wafer 14 has an improper protrusion, it can be sensed in time to avoid the improper "protrusion" phenomenon. During the implementation, a flower basket 13 detector is also arranged on the carrier plate 3. In this way, it can be identified whether the currently placed flower basket 13 is 8 inches or 6 inches, which is convenient for the wafer convex detector 4 to better judge the current state of the wafer 14, and the angle adjustment device 2 can also provide different tilt angles according to the current state of the flower basket 13, so as to facilitate the alignment needs of different types of wafers. Furthermore, in order to realize convenient data communication with external control equipment, the wafer convex detector 4 and the flower basket 13 detector are equipped with a communication interface. In this way, convenient docking with external control equipment can be realized. The power supply port of the angle adjustment device 2 can be directly connected to the mains interface, or connected to the wafer 14 processing equipment where the utility model is located, which will not be repeated here.
[0036] In combination with a preferred embodiment of the utility model, the device base 1 includes a base body, and an angle adjustment device 2 is provided at the lower end of the base body. At the same time, a storage space is provided in the base body, and a guide device 5 is provided in the storage space. In order to allow the carrying plate 3 to be opened at a certain angle, the guide device 5 is a connecting rod, one end of the connecting rod is connected to the angle adjustment device 2, and the other end of the connecting rod is connected to the carrying plate 3. In addition, a rotating shaft 12 is provided on one side of the base body, and the carrying plate 3 is connected to the rotating shaft 12.
[0037] Therefore, when the carrying plate 3 is adjusted in angle, it will not have unnecessary displacement and shaking. During the implementation, in order to achieve convenient angle adjustment, shorten the response time, and stably carry the flower basket 13 with the wafer 14, the angle adjustment device 2 used is a cylinder or an electric cylinder. Of course, it can also be other driving devices that can achieve angle adjustment, which will not be described here.
[0038] Furthermore, in order to adapt to the placement and positioning of conventional 8-inch flower baskets and 6-inch flower baskets, the 8-inch positioning assembly used includes an 8-inch rear stopper 6 and an 8-inch front stopper 7 distributed in pairs. Similarly, the 6-inch positioning assembly includes a 6-inch rear stopper 8 and a 6-inch front stopper 9 distributed in pairs. Specifically, the 8-inch rear stopper 6 and the 6-inch rear stopper 8 are both rectangular stops, which are connected to the bearing plate 3 by positioning screws. In this way, the rear end of the corresponding model of the flower basket 13 can be appropriately clamped and limited. At the same time, the 8-inch front stopper 7 and the 6-inch front stopper 9 both include a bearing block, which is connected to the bearing plate 3 by positioning screws, and a protrusion is provided on one side of the bearing block. In this way, the front end of the corresponding model of the flower basket 13 can be limited, and when it is out because the bearing plate 3 is tilted, it will not slide, and the existence of the protrusion can be used to prevent it from sliding down.
[0039] In combination with actual implementation, the wafer convex detector 4 is a photoelectric sensor or a camera. In this way, the stacking state of the wafers 14 inside the basket 13 can be checked in time. If a "convex" phenomenon occurs on the wafer 14, it can be detected in time and transmitted to the corresponding control device to issue an alarm, so that the operation and maintenance personnel can conduct manual inspection or the control device can be calibrated through an external device.
[0040] Looking further, in order to be able to timely and effectively sense the model of the currently placed flower basket 13, the flower basket 13 detector used in the utility model includes an 8-inch detection module 10 and a 6-inch detection module 11. During implementation, the distribution position of the 8-inch detection module 10 overlaps with the placement area of the 8-inch flower basket, and the distribution position of the 6-inch detection module 11 overlaps with the placement area of the 6-inch flower basket. At the same time, considering the convenience of rapid identification, the flower basket 13 detector used is a photoelectric sensor or a camera. In this way, after the 8-inch flower basket is correctly placed on the supporting plate 3, it is limited by the 8-inch rear stopper 6 and the 8-inch front stopper 7, and just blocks the 8-inch detection module 10. Moreover, the 6-inch detection module 11 is not blocked at this time. Therefore, the connected control device uses this to determine that an 8-inch flower basket is placed at this time. The installation determination of the 6-inch flower basket is similar and will not be repeated here.
[0041] At the same time, in order to avoid affecting the placement of the bottom of the flower basket 13, the wafer bump detector 4 and the flower basket 13 detector are aligned with the horizontal surface of the carrier plate 3 or flush with the carrier plate 3. In this way, there will be no raised parts, ensuring that the bottom of the flower basket 13 is smoothly combined with the carrier plate 3 during use.
[0042] The working principle of the utility model is as follows:
[0043] In the standby state, the angle adjustment device 2 makes the carrier plate 3 open at a certain angle through the guide device 5. The external feeding device loads the flower basket 13 of the corresponding size and the corresponding wafer 14 onto the carrier plate 3. Taking the 8-inch flower basket as an example, after installation, the 8-inch detection module 10 is blocked by the bottom of the flower basket 13. The control device knows that the current placement is an 8-inch flower basket.
[0044] At the same time, the 8-inch rear stopper 6 just clamps the outer edge of the rear end of the flower basket 13. In addition, the 8-inch front stopper 7 abuts against the limit bar at the front end of the flower basket 13. Thus, the flower basket 13 is placed stably at a certain angle.
[0045] During this period, due to the effect of gravity, the wafers 14 loaded in the basket 13 begin to slide downward and align with each other.
[0046] Afterwards, the degree adjustment device restores the carrier plate 3 to a horizontal position through the guide device 5. Next, the wafer convex detector 4 starts to work to check whether the current wafer 14 is neatly arranged. When an abnormal "convex" phenomenon is found, an alarm is sent to the control device, and the maintenance personnel can intervene manually or use the external robot arm to participate in the adjustment to ensure that the wafer 14 is placed correctly.
[0047] Afterwards, subsequent processing operations can be carried out.
[0048] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:
[0049] 1. Gravity can be directly used to achieve automatic alignment of wafers during storage in the basket without the need for other external equipment, thus reducing the implementation cost of the alignment step.
[0050] 2. No manual operation is required during alignment, which improves alignment efficiency and reduces labor costs.
[0051] 3. It can timely check the abnormal "convex piece" phenomenon, so as to facilitate the intervention and treatment at the first time without affecting the subsequent processing.
[0052] 4. It has better adaptability and can meet the limit of 8-inch flower basket and 6-inch flower basket. There is no need to configure an independent bearing plate, which reduces the cost of use.
[0053] 5. The overall structure is simple and can be deployed on the wafer processing production line, with good versatility.
[0054] In addition, the indicated orientations or positional relationships described in the present invention are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as a limitation on the present invention.
[0055] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.
Claims
1. A carrier device for placing a wafer basket, comprising a device base, characterized in that: The device base is provided with an angle adjustment device, and a carrying plate is provided on the angle adjustment device. An 8-inch positioning component and a 6-inch positioning component are respectively provided on the carrying plate. A wafer convex detector is provided on the carrying plate, and a flower basket detector is also provided on the carrying plate. The wafer convex detector and the flower basket detector are configured with a communication interface.
2. The carrying device suitable for placing wafer baskets according to claim 1, characterized in that: The device base includes a base body, an angle adjustment device is arranged at the lower end of the base body, a storage space is arranged in the base body, a guide device is arranged in the storage space, the guide device is a connecting rod, one end of the connecting rod is connected to the angle adjustment device, and the other end of the connecting rod is connected to the supporting plate, a rotating shaft is arranged on one side of the base body, and the supporting plate is connected to the rotating shaft.
3. The carrying device for placing wafer baskets according to claim 1, characterized in that: The angle adjustment device is a pneumatic cylinder; or, the angle adjustment device is an electric cylinder.
4. The carrying device suitable for placing wafer baskets according to claim 1, characterized in that: The 8-inch positioning assembly includes an 8-inch rear stopper and an 8-inch front stopper distributed in pairs; the 6-inch positioning assembly includes a 6-inch rear stopper and a 6-inch front stopper distributed in pairs.
5. The carrying device for placing wafer baskets according to claim 4, characterized in that: The 8-inch rear stopper and the 6-inch rear stopper are both rectangular stops, and the rectangular stops are connected to the bearing plate via positioning screws.
6. The carrying device for placing wafer baskets according to claim 4, characterized in that: The 8-inch front stopper and the 6-inch front stopper both include a bearing block, the bearing block is connected to the bearing plate via a positioning screw, and a protrusion is provided on one side of the bearing block.
7. The carrying device for placing wafer baskets according to claim 1, characterized in that: The wafer convex detector is a photoelectric sensor; Alternatively, the wafer bump detector is a camera.
8. The carrying device for placing wafer baskets according to claim 1, characterized in that: The flower basket detector includes an 8-inch detection module and a 6-inch detection module. The distribution position of the 8-inch detection module overlaps with the placement area of the 8-inch flower basket, and the distribution position of the 6-inch detection module overlaps with the placement area of the 6-inch flower basket.
9. The carrying device for placing wafer baskets according to claim 1, characterized in that: The flower basket detector is a photoelectric sensor; or, the flower basket detector is a camera.
10. The carrying device for placing wafer baskets according to claim 1, characterized in that: The wafer convex detector and the flower basket detector are horizontal to the carrying plate, or flush with the carrying plate.