Semiconductor gate valve reliability inspection instrument

Abstract

The utility model relates to an inspection instrument, belongs to the technical field of inspection equipment, and particularly relates to a semiconductor gate valve reliability inspection instrument, which comprises a bottom plate, a vertical plate, an inspection bench, an electric push rod and a transverse plate, a motor I is fixedly mounted on the upper surface of the transverse plate, and a connecting shaft seat is rotatably mounted on the lower surface of the transverse plate; the top end of the connecting shaft seat penetrates through the upper surface of the transverse plate and is coaxially installed with the output end of the first motor, a rotating disc is fixedly connected to the lower surface of the connecting shaft seat, an angle adjusting mechanism is arranged on the lower surface of the rotating disc, and a CCD camera is arranged on the lower surface of the rotating disc through the angle adjusting mechanism. According to the utility model, the CCD camera is used for replacing manual detection, the detection efficiency and precision are improved, meanwhile, more comprehensive detection can be realized by utilizing angle adjustment, and the problems that errors exist and the efficiency is relatively low in the detection process as most of the existing detection methods are detected by manually using a microscope, a detection lamp and a magnifying glass are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of testing equipment, in particular to a semiconductor gate valve reliability testing instrument. Background Art

[0002] A semiconductor gate valve is a device used to control fluid switching. It is made of semiconductor materials and opens and closes fluid flow by adjusting the conductivity of the semiconductor material. The semiconductor gate valve inspection instrument is a device used to test and verify the performance and quality of semiconductor gate valves.

[0003] The structure of semiconductor gate valve generally includes valve body, valve core, valve seat and drive device. The valve body is the main body of semiconductor gate valve, fastened to the pipeline, used to control the flow of medium. The valve core is the key component of the valve, responsible for opening and closing the flow channel of the medium. The valve seat is the sealing part between the valve and the pipeline to prevent the leakage of the medium.

[0004] In the prior art, when inspecting a semiconductor gate valve, the appearance of the gate valve is first inspected to ensure that the appearance is intact and has no obvious damage, deformation or corrosion. However, most of the existing inspection methods are performed manually using microscopes, inspection lamps, and magnifying glasses. Not only are there errors in the inspection, but the efficiency is also low. Therefore, a semiconductor gate valve reliability inspection instrument is proposed to solve the above problem. Utility Model Content

[0005] In order to solve the above technical problems, the utility model proposes a semiconductor gate valve reliability inspection instrument, which improves the efficiency and accuracy of inspection by using a CCD camera instead of manual inspection. At the same time, more comprehensive inspection can be achieved by using angle adjustment.

[0006] The technical solution to achieve the purpose of the utility model is: a semiconductor gate valve reliability test instrument, comprising a base plate, the upper surface of the base plate is respectively fixedly connected with a vertical plate and a test bench, the upper surface of the vertical plate is provided with two mounting holes, and the inner walls of the two mounting holes are fixedly installed with electric push rods, the output ends of the two electric push rods are fixedly connected to the same horizontal plate, the upper surface of the horizontal plate is fixedly installed with a motor 1, the lower surface of the horizontal plate is rotatably installed with a connecting shaft seat, the top end of the connecting shaft seat passes through the upper surface of the horizontal plate and is coaxially installed with the output end of motor 1, the lower surface of the connecting shaft seat is fixedly connected with a turntable, the lower surface of the turntable is provided with an angle adjustment mechanism, and the lower surface of the turntable is provided with a CCD camera through the angle adjustment mechanism.

[0007] In some embodiments, the angle adjustment mechanism includes a second motor fixedly mounted on the surface of a turntable, a slide groove is provided on the lower surface of the turntable, a threaded rod is rotatably connected to the inner wall of the slide groove, one end of the threaded rod passes through the surface of the turntable and is coaxially mounted with the output end of the second motor.

[0008] In some embodiments, the inner wall of the slide groove is slidably connected to a movable seat, a threaded hole is penetrated through one side of the movable seat, the inner wall of the threaded hole is threadedly connected to the surface of the threaded rod, and the inner wall of the movable seat is rotatably connected to the upper surface of the CCD camera through a rotating shaft.

[0009] In some embodiments, a T-shaped plate is fixedly connected to the lower surface of the turntable, and two racks are fixedly connected to one side of the T-shaped plate.

[0010] In some embodiments, two gears are fixedly connected to the surface of the rotating shaft, and the two gears are respectively meshed with two corresponding racks.

[0011] Compared with the prior art, the present invention has the following significant advantages:

[0012] Firstly, the utility model starts a CCD camera to inspect the damage on the surface just above the semiconductor gate valve, and can convert the optical image into a digital signal and transmit it to an external controller, so as to detect the appearance quality of the semiconductor gate valve in real time;

[0013] Secondly: the utility model can drive the rotation of the threaded rod through the drive of motor 2, and the rotation of the threaded rod can realize the sliding of the moving seat inside the slide groove, thereby driving the CCD camera to move. During the movement, the gear arranged on the moving seat will mesh with the rack arranged on the T-shaped plate, thereby driving the gear to rotate. Through the rotation of the gear, the angle of the CCD camera can be adjusted to inspect the side of the semiconductor gate valve. After adjustment, start motor 1, and motor 1 drives the rotation of the turntable, thereby realizing the inspection around the semiconductor gate valve, thereby improving the efficiency and accuracy of the inspection.

[0014] The invention solves the problem that most of the existing inspection methods are to perform inspection manually using microscopes, inspection lamps and magnifying glasses, which not only causes errors in inspection but also has low efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model is further explained below in conjunction with the accompanying drawings and embodiments:

[0016] Figure 1 It is a schematic diagram of the overall three-dimensional structure provided by the utility model in one embodiment;

[0017] Figure 2 It is a schematic diagram of the structure of a testing device provided in one embodiment of the utility model;

[0018] Figure 3 It is a schematic diagram of the cutaway structure of a turntable provided in one embodiment of the utility model;

[0019] Figure 4 It is a structural schematic diagram of an angle adjustment device provided in one embodiment of the utility model.

[0020] Description of reference numerals:

[0021] 1. Bottom plate; 2. Vertical plate; 3. Inspection table; 4. Electric push rod; 5. Horizontal plate; 6. Connecting shaft seat; 7. Motor 1; 8. Turntable; 9. CCD camera; 10. Motor 2; 11. T-shaped plate; 12. Slide groove; 13. Threaded rod; 14. Rack; 15. Moving seat; 16. Rotating shaft; 17. Gear. DETAILED DESCRIPTION

[0022] The utility model is described in detail below, and the technical solutions in the embodiments of the utility model are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The utility model provides a semiconductor gate valve reliability testing instrument through improvement. The technical solution of the utility model is:

[0024] like Figure 1-4As shown, a semiconductor gate valve reliability test instrument comprises a bottom plate 1, the upper surface of the bottom plate 1 is respectively fixedly connected with a vertical plate 2 and a test bench 3, the upper surface of the vertical plate 2 is provided with two mounting holes, and the inner walls of the two mounting holes are fixedly installed with electric push rods 4, through the set electric push rods 4, it can adapt to semiconductor gate valves of different heights, and at the same time adapt to the best shooting height of a CCD camera 9, the output ends of the two electric push rods 4 are fixedly connected with the same horizontal plate 5, and the side where the horizontal plate 5 is connected to the electric push rods 4 is provided with reinforcing ribs to improve the strength of the horizontal plate 5, the upper surface of the horizontal plate 5 is fixedly installed with a motor 7, and the lower surface of the horizontal plate 5 is rotated The connecting shaft seat 6 is dynamically installed. The connecting shaft seat 6 is in an inverted T shape, which can increase the contact area with the turntable 8 and improve the stability of the turntable 8. The top of the connecting shaft seat 6 penetrates the upper surface of the horizontal plate 5 and is coaxially installed with the output end of the motor 7. The lower surface of the connecting shaft seat 6 is fixedly connected with the turntable 8. The lower surface of the turntable 8 is provided with an angle adjustment mechanism. The lower surface of the turntable 8 is provided with a CCD camera 9 through the angle adjustment mechanism. The CCD camera 9 is a device that converts optical images into digital signals and is commonly used in machine vision systems; it can detect whether there are certain specific features on the semiconductor gate valve, such as scratches, depressions, protrusions, etc. These features may be caused by defects or flaws in the manufacturing process. Feature judgment through database operation can evaluate the quality and qualification of the product.

[0025] like Figure 3 As shown, in one embodiment, the angle adjustment mechanism includes a motor 10 fixedly mounted on the surface of the turntable 8, a slide groove 12 is provided on the lower surface of the turntable 8, a threaded rod 13 is rotatably connected to the inner wall of the slide groove 12, one end of the threaded rod 13 passes through the surface of the turntable 8 and is coaxially mounted with the output end of the motor 10, and the position adjustment of the CCD camera 9 can be achieved by setting the threaded rod 13 and the motor 10, thereby achieving the angle adjustment.

[0026] The inner wall of the slide groove 12 is slidably connected with a moving seat 15 , a threaded hole is penetrated through one side of the moving seat 15 , the inner wall of the threaded hole is threadedly connected to the surface of the threaded rod 13 , and the inner wall of the moving seat 15 is rotatably connected to the upper surface of the CCD camera 9 through a rotating shaft 16 .

[0027] like Figure 3 and 4 As shown, in one embodiment, a T-shaped plate 11 is fixedly connected to the lower surface of the turntable 8 , and two racks 14 are fixedly connected to one side of the T-shaped plate 11 .

[0028] Two gears 17 are fixedly connected to the surface of the rotating shaft 16, and the two gears 17 are respectively meshed with the corresponding two racks 14. The set gears 17 can cooperate with the work of the racks 14 to realize the angle adjustment of the CCD camera 9. The distance between the positions where the two racks 14 are set is greater than the diameter of the CCD camera 9, so as to avoid motion interference between the racks 14 and the CCD camera 9 when adjusting the angle.

[0029] The specific working method is: when in use, first place the semiconductor gate valve to be inspected on the inspection table 3, start the electric push rod 4, adjust the horizontal plate 5 to a suitable height, after adjustment, start the CCD camera 9 to inspect the surface damage directly above the semiconductor gate valve, and the optical image can be converted into a digital signal and transmitted to the external controller to detect the appearance quality of the semiconductor gate valve in real time. After the inspection directly above is completed, start the motor 2 10, and through the drive of the motor 2 10, the threaded rod 13 can be driven to rotate. The rotation of the threaded rod 13 can realize the sliding of the moving seat 15 in the slide groove 12, thereby driving the CCD camera 9 to move. During the movement, the gear 17 provided on the moving seat 15 will mesh with the rack 14 provided on the T-shaped plate 11, thereby driving the gear 17 to rotate. Through the rotation of the gear 17, the angle adjustment of the CCD camera 9 can be realized, and the side of the semiconductor gate valve can be inspected. After adjustment, start the motor 17, and the motor 17 drives the rotation of the turntable 8, thereby realizing the inspection around the semiconductor gate valve, improving the efficiency and accuracy of the inspection.

[0030] The technical means disclosed in the utility model are not limited to the technical means disclosed in the above technical means, but also include technical solutions composed of equivalent replacement of the above technical features. Matters not covered in the utility model belong to the common knowledge of those skilled in the art.

Claims

1. A semiconductor gate valve reliability testing instrument, comprising a base plate (1), characterized in that: The upper surface of the base plate (1) is fixedly connected to a vertical plate (2) and an inspection table (3), respectively; the upper surface of the vertical plate (2) is provided with two mounting holes, and the inner walls of the two mounting holes are fixedly installed with electric push rods (4); the output ends of the two electric push rods (4) are fixedly connected to the same horizontal plate (5); a motor (7) is fixedly installed on the upper surface of the horizontal plate (5); a connecting shaft seat (6) is rotatably installed on the lower surface of the horizontal plate (5); the top end of the connecting shaft seat (6) passes through the upper surface of the horizontal plate (5) and is coaxially installed with the output end of the motor (7); the lower surface of the connecting shaft seat (6) is fixedly connected to a turntable (8); an angle adjustment mechanism is arranged on the lower surface of the turntable (8); and a CCD camera (9) is arranged on the lower surface of the turntable (8) through the angle adjustment mechanism.

2. A semiconductor gate valve reliability testing instrument according to claim 1, characterized in that: The angle adjustment mechanism comprises a second motor (10) fixedly mounted on the surface of a turntable (8); a slide groove (12) is provided on the lower surface of the turntable (8); a threaded rod (13) is rotatably connected to the inner wall of the slide groove (12); one end of the threaded rod (13) passes through the surface of the turntable (8) and is coaxially mounted with the output end of the second motor (10).

3. A semiconductor gate valve reliability testing instrument according to claim 2, characterized in that: The inner wall of the slide groove (12) is slidably connected to a movable seat (15), one side of the movable seat (15) is penetrated by a threaded hole, the inner wall of the threaded hole is threadedly connected to the surface of the threaded rod (13), and the inner wall of the movable seat (15) is rotatably connected to the upper surface of the CCD camera (9) via a rotating shaft (16).

4. A semiconductor gate valve reliability testing instrument according to claim 2, characterized in that: A T-shaped plate (11) is fixedly connected to the lower surface of the rotating disk (8), and two racks (14) are fixedly connected to one side of the T-shaped plate (11).

5. The semiconductor gate valve reliability testing instrument according to claim 3, characterized in that: Two gears (17) are fixedly connected to the surface of the rotating shaft (16), and the two gears (17) are respectively meshed with the corresponding two racks (14).

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