Valve assembly and vacuum equipment

Abstract

The utility model discloses a valve assembly and vacuum equipment. The valve assembly is used for closing an opening of equipment. The valve assembly comprises a limiting part, a closing part, a driving part and a connecting part. The connecting portion has a first end and a second end. The driving part is connected to the first end, the first end is configured to be a bearing, and / or the closing part is connected to the second end, and the second end is configured to be a bearing. The closing part abuts against the limiting part at the first position, the driving part can move from the first position to the second position in the first direction so that the closing part can get close to and close the opening in the second direction, and the second direction intersects with the first direction. The connecting part can convert movement of the driving part in the first direction into movement of the closing part in the second direction. The first end is configured to be a bearing, and / or the second end is configured to be the bearing, friction among the connecting part, the driving part and the closing part is reduced, particles generated by the valve assembly are reduced, then fluid impurities are reduced, and the service life of the valve assembly can be prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of fluid control, in particular to a valve component and a vacuum device. Background Art

[0002] Valves play a vital role in industrial production and fluid control systems. Valves are responsible for accurately regulating and controlling the flow of fluids. In the prior art, there is often severe friction between the valve seal and the base and other parts that can move relative to each other, and the friction process will further lead to the generation of tiny particles. These particles will not only have a serious impact on the purity of the fluid and increase the impurity content in the fluid processing process, but may also cause secondary wear to the equipment, further aggravating the aging and damage of the valve. The prior art is difficult to meet the particle size requirements of valve friction in fluid control. Utility Model Content

[0003] The main purpose of the utility model is to provide a valve assembly and a vacuum device, which can reduce particles generated by friction during the opening and closing process of the valve.

[0004] To achieve the above-mentioned purpose, the utility model proposes a valve assembly, which is used to close the opening of the device. The valve assembly includes a limiting portion, a closing portion, a driving portion and a connecting portion. The driving portion and the limiting portion are arranged relatively to each other along a first direction. The connecting portion has a first end and a second end, the driving portion is connected to the first end, and the closing portion is connected to the second end; wherein the first end is configured as a bearing, and / or the second end is configured as a bearing. The driving portion has a first position and a second position relative to the limiting portion, the second position is located on a side of the first position close to the limiting portion, the closing portion abuts against the limiting portion in the first position, and the driving portion can move from the first position to the second position along the first direction, so that the closing portion approaches and closes the opening along the second direction, and the second direction intersects with the first direction.

[0005] In some embodiments, the first end is configured as a needle bearing.

[0006] In some embodiments, the second end is configured as a needle bearing.

[0007] In some embodiments, the driving part includes a first plate body and a first connecting column, the first connecting column is integrally formed with the first plate body, and the first connecting column is connected to the first end.

[0008] In some embodiments, the closing portion includes a second plate body and a second connecting column, the second connecting column is integrally formed with the second plate body, and the second connecting column is connected to the second end.

[0009] In some embodiments, the driving part includes a first plate body and a first connecting column, one end of the first connecting column is connected to the first plate body, and the other end is connected to the first end, and the connecting part also includes a first E-type retaining spring, which is arranged on the side of the first connecting column away from the first plate body and is clamped to the first connecting column.

[0010] In some embodiments, the closing portion includes a second plate body and a second connecting column, one end of the second connecting column is connected to the second plate body, and the other end is connected to the second end, and the connecting portion also includes a second E-type retaining spring, which is arranged on the side of the second connecting column away from the second plate body and is clamped to the second connecting column.

[0011] In some embodiments, the driving part includes a first plate body and a first connecting column, the first plate body has a first wall, the first wall is provided with a first connecting column, the first connecting column is connected to the first end, and along the direction perpendicular to the first wall, the first assembly gap a between the connecting part and the first wall satisfies: a≥1mm.

[0012] In some embodiments, the closing portion includes a second plate body and a second connecting column, the second plate body has a second wall, the second wall is provided with a second connecting column, the second connecting column is connected to the second end, and along the direction perpendicular to the second wall, the second assembly gap b between the connecting portion and the second wall satisfies: b≥1mm.

[0013] In some embodiments, the valve assembly also includes an elastic part, the driving part has a first connecting column, the closing part also has a second connecting column and a third connecting column, the first end is hinged to the first connecting column, the second end is hinged to the second connecting column, the third connecting column is arranged on the side of the second connecting column away from the limiting part, one end of the elastic part is connected to the first connecting column, and the other end is connected to the third connecting column.

[0014] In some embodiments, the elastic portion is configured as a spring; wherein a wire diameter c of the spring satisfies: 0.8 mm ≤ c ≤ 2 mm; and / or a median diameter d of the spring satisfies: 7.2 mm ≤ d ≤ 12 mm.

[0015] In some embodiments, the elastic part is configured as a spring of stainless steel powder boronized material; or, the elastic part is configured as a spring of chromium-molybdenum alloy steel material; or, the elastic part is configured as a spring of silicon-manganese steel material.

[0016] In some embodiments, the valve assembly also includes a base, which limits a accommodating cavity and an opening, the accommodating cavity is connected to the opening, the driving part, the closing part and the connecting part are arranged in the accommodating cavity along a first direction, and the driving part also includes a first roller body, and the peripheral wall of the first roller body is used to abut against the base.

[0017] In some embodiments, the closing portion further comprises a second roller body, and a peripheral wall of the second roller body is used to abut against the limiting portion.

[0018] A second aspect of the present application further provides a vacuum device, which includes a valve assembly in any of the above embodiments.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] In the technical solution of the present application, the first end of the connecting part is connected to the driving part, and the other end is connected to the closing part, and the connecting part can convert the movement of the driving part along the first direction into the movement of the closing part along the second direction. The first end is configured as a bearing, and / or the second end is configured as a bearing, which can make the connection between the connecting part and the driving part and the closing part more stable, reduce the friction between the connecting part, the driving part and the closing part, and effectively reduce the particles generated by the valve assembly during the process of closing or releasing the opening of the closing part, thereby reducing fluid impurities and effectively improving the life of the valve assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the working principle of the valve assembly in one embodiment of the utility model;

[0023] Figure 2 It is a schematic diagram of the working principle of the valve assembly in one embodiment of the utility model, wherein the driving part is in the first position;

[0024] Figure 3 It is a schematic diagram of the working principle of the valve assembly in one embodiment of the utility model, wherein the driving part is in the second position;

[0025] Figure 4 It is a three-dimensional assembly schematic diagram of a partial structure of a valve assembly in an embodiment of the utility model from a first perspective, wherein the first plate body is fitted with the second plate body;

[0026] Figure 5 It is a three-dimensional assembly schematic diagram of a partial structure of a valve assembly in an embodiment of the utility model from a second viewing angle;

[0027] Figure 6 It is an exploded schematic diagram of a part of the structure of a valve assembly in one embodiment of the utility model;

[0028] Figure 7 It is a schematic diagram of the assembly structure of the valve assembly in one embodiment of the utility model from a third viewing angle;

[0029] Figure 8 This is a schematic diagram of the explosion structure of the valve assembly in one embodiment of the utility model;

[0030] Fig. 9 It is a schematic diagram of an exploded structure of a valve assembly in an embodiment of the utility model from a third perspective, wherein the sealing plate is connected to the second plate body;

[0031] Fig.10 It is a schematic diagram of an exploded structure of a valve assembly in an embodiment of the utility model from a fourth perspective, wherein the connecting plate is connected to the first plate body;

[0032] Fig.11 It is a three-dimensional schematic diagram of a partial structure of a closing portion in one embodiment of the utility model;

[0033] Fig.12 It is a three-dimensional schematic diagram of a partial structure of a driving part in an embodiment of the utility model.

[0034] Description of Figure Numbers:

[0035] Valve assembly 100;

[0036] Base 110; limiting portion 111; accommodating cavity 112; opening 113;

[0037] Closing portion 120; second plate body 121; second wall surface 1211; second connecting column 122; third connecting column 123; second roller body 124; sealing plate 125; sealing ring 126;

[0038] Driving unit 130; first plate 131; first wall 1311; first connecting column 132; first roller 133; driving source 134; connecting plate 135;

[0039] Connecting portion 140; first end 141; second end 142; first E-shaped retaining spring 143; second E-shaped retaining spring 144;

[0040] Elastic part 150;

[0041] First direction X;

[0042] The second direction Y;

[0043] First assembly gap a;

[0044] Second assembly gap b.

[0045] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0047] In industrial production and fluid control systems, valves play a vital role. Valves are used to accurately regulate and control the flow of fluids. In the prior art, there is often severe friction between the valve seal and the base and other parts that can move relative to each other, and the friction process will further lead to the generation of tiny particles. These particles will not only have a serious impact on the purity of the fluid, increase the impurity content in the fluid processing process, but may also cause secondary wear to the equipment, further aggravating the aging and damage of the valve. In addition, the accumulation of dust will also affect the operational flexibility and sealing performance of the valve, and may even cause system failures, threatening the stable operation of the entire production line. More seriously, these dusts may also pose a potential threat to the health of operators. Working in a dusty environment for a long time, operators are prone to inhaling a large amount of harmful substances, causing damage to the respiratory system. Therefore, solving the problems of severe valve friction and the generation of many tiny particles in the prior art is of great significance for improving industrial production efficiency, ensuring the stable operation of equipment, and protecting the health of operators.

[0048] To solve the above technical problems, Figures 1 to 12 As shown, the present application proposes a valve assembly 100, which is used to close an opening 113 of a device. The valve assembly 100 includes a limiting portion 111, a closing portion 120, a driving portion 130 and a connecting portion 140.

[0049] like Figure 7 as well as Figure 8 As shown, the valve assembly 100 may include a base 110 , and the base 110 is provided with a limiting portion 111 , and the limiting portion 111 is used to limit the movement of the closing portion 120 . Further, the limiting portion 111 may also limit the movement of the driving portion 130 .

[0050] like Figure 2 as well as Figure 3As shown, the driving part 130 has a first position and a second position relative to the limiting part 111, and the second position is located on the side of the first position close to the limiting part 111. In the first position, the closing part 120 abuts against the limiting part 111, and the driving part 130 can move from the first position to the second position along the first direction X, so that the closing part 120 approaches and closes the opening 113 along the second direction Y, and the second direction Y intersects with the first direction X. Specifically, according to different closing requirements of the opening 113, in some embodiments, such as Figure 2 As shown, in the initial state, the closing portion 120 can abut against the limiting portion 111. When the driving portion 130 moves from the first position to the second position, the closing portion 120 approaches and closes the opening 113 along the second direction Y. The limiting portion 111 can guide the movement of the closing portion 120 in the second direction Y. In some embodiments, as Figure 1 As shown, in the initial state, the closing portion 120 can be separated from the limiting portion 111, and the driving portion 130 can be located at the side of the first position away from the limiting portion 111. The driving portion 130 moves from the side of the first position away from the limiting portion 111 to the first position along the first direction X, and at the same time, the driving portion 130 drives the closing portion 120 to move along the first direction X and abut against the limiting portion 111. When the driving portion 130 further moves from the first position to the second position, the closing portion 120 approaches and closes the opening 113 along the second direction Y. The position of the driving portion 130 can be actively controlled by its driving source 134, and the limiting portion 111 can also assist in the positioning of the driving portion 130. Specifically, as shown in FIG. Figure 3 As shown, when the driving portion 130 approaches the limiting portion 111 along the first direction X, the driving portion 130 may also abut against the limiting portion 111 .

[0051] The closing portion 120 is used to close the opening 113. The shape and size of the closing portion 120 are set to be suitable for closing the opening 113. In order to meet different sealing requirements of the opening 113, such as Figure 7 , Figure 8 as well as Fig.10 As shown, the closing part 120 may be provided with a sealing plate 125 and a sealing ring 126, the sealing ring 126 is provided on the sealing plate 125, the sealing plate 125 is connected to the second plate body 121 of the closing part 120, and the sealing plate 125 and the sealing ring 126 abut against the wall surface of the device defining the opening 113 to meet the sealing requirements of the opening 113. When the driving part 130 moves from the first position to the second position, the closing part 120 can approach and close the opening 113, and correspondingly, when the driving part 130 moves from the second position to the first position, the closing part 120 can move away from and release the opening 113. Furthermore, the driving part 130 can also move from the first position further to the side away from the limiting part 111, so that the closing part 120 is further away from the opening 113, which will not be repeated here.

[0052] like Figure 1, Figure 2 as well as Figure 3 As shown, the driving portion 130 and the limiting portion 111 are arranged relative to each other along the first direction X. The driving portion 130 can drive the closing portion 120 to move, and accordingly, the closing portion 120 can also be arranged relative to the limiting portion 111 along the first direction X. The closing portion 120 and the driving portion 130 can be located on the same side of the limiting portion 111. In the initial state, the driving portion 130 and the closing portion 120 can be fitted or separated. In some embodiments, in the initial state, the driving portion 130 and the closing portion 120 are arranged in a fitted manner to improve the movement stability of the closing portion 120 and the driving portion 130.

[0053] like Figure 4 , Figure 5 as well as Figure 6 As shown, the connecting part 140 has a first end 141 and a second end 142, the driving part 130 is connected to the first end 141, and the closing part 120 is connected to the second end 142; wherein the first end 141 is configured as a bearing, and / or the second end 142 is configured as a bearing. That is, at least one of the driving part 130 and the closing part 120 is hinged to the connecting part 140 through a bearing. The bearing can be fixed on a component respectively through the design of its inner ring and outer ring, and then the two components can achieve relative movement by rolling or sliding. The bearing has small friction, good transmission stability and high precision. The connecting part 140 can convert the movement of the driving part 130 along the first direction X into the movement of the closing part 120 along the second direction Y. The connecting part 140 is connected to the driving part 130 and the closing part 120 respectively through bearings, and the bearing can support the main body of the connecting part 140 and reduce the friction and wear between the connecting part 140, the driving part 130 and the closing part 120. Specifically, on the one hand, the application of the bearing reduces the friction between the connecting portion 140 and the driving portion 130, and the friction between the connecting portion 140 and the closing portion 120 is also reduced. On the other hand, the setting of the connecting portion 140 avoids the direct hinge between the driving portion 130 and the closing portion 120, and the friction between the driving portion 130 and the closing portion 120 can be reduced or completely eliminated. Both of the above aspects can greatly reduce the amount of particles generated by the valve assembly 100, and at the same time, the life and stability of the connecting portion 140, the driving portion 130 and the closing portion 120 can also be improved. In addition, when the driving portion 130 is hinged to the connecting portion 140 through a bearing, the closing portion 120 can be connected to the connecting portion 140 through a pin shaft or a slider. When the closing portion 120 is hinged to the connecting portion 140 through a bearing, the driving portion 130 can be connected to the connecting portion 140 through a pin shaft or a slider. In some embodiments, the driving portion 130 and the closing portion 120 can be connected to the connecting portion 140 through a bearing, which will not be repeated here.

[0054] According to the connection rotation and support requirements between the connection part 140 and the driving part 130, and the connection rotation between the connection part 140 and the closing part and the requirements for closing the opening 113, the first end 141 and the second end 142 can be selected from ball bearings, roller bearings or needle bearings. In this embodiment, the first end 141 is configured as a needle bearing, and the second end 142 is also configured as a needle bearing. Needle bearings are equipped with thin and long rollers, and needle bearings have a compact structure, light weight, and small axial dimensions. The roller diameter of the needle bearing is small, and there are many contact points between the raceway and the needle roller, so the needle bearing has a high load-bearing capacity. The friction coefficient of the needle bearing is small, generally only 0.001 to 0.005. The roller in the needle bearing can move along the curved surface between the inner and outer rings, reducing the friction during movement, thereby reducing the friction between the connection part 140 and the driving part 130 and the closing part 120, and the movement is more stable, and the life of the valve assembly 100 is extended.

[0055] like Figure 4 , Figure 5 as well as Figure 6As shown, the first end 141 is configured as a bearing, and the driving part 130 is connected to the first end 141. Specifically, the driving part 130 may be provided with a connecting column, and the column body is interference-fitted with the inner ring of the bearing of the first end 141, so that the connecting part 140 can rotate relative to the driving part 130. In some embodiments, the connecting column of the driving part 130 may be configured as a pin, and the pin is passed through the body of the driving part 130. In some embodiments, the driving part 130 includes a first plate body 131 and a first connecting column 132, the first connecting column 132 is integrally formed with the first plate body 131, and the first connecting column 132 is connected to the first end 141. The integral formation of the first connecting column 132 with the driving part 130 can effectively avoid friction inside the driving part 130 and reduce particles generated by various components of the driving part 130 during movement. Similarly, in some embodiments, the closing portion 120 includes a second plate body 121 and a second connecting column 122, the second connecting column 122 is integrally formed with the second plate body 121, and the second connecting column 122 is connected to the second end 142. The second connecting column 122 is integrally formed with the second plate body 121 to avoid friction between the components inside the closing portion 120, and further reduce the generation of particles during the movement of the valve assembly 100. It should be noted that, in some embodiments, in order to improve the connection stability between the driving portion 130 and the closing portion 120, the valve assembly 100 can be provided with a plurality of connecting portions 140, each connecting portion 140 is parallel to each other, and accordingly, the connecting columns connected to each connecting portion 140 can be integrally formed with the driving portion 130 or the closing portion 120. Further, when the valve assembly 100 is provided with a plurality of connecting portions 140, some of the connecting portions 140 can also be connected to the third connecting column 123 at one end and connected to the driving portion 130 at the other end. In addition, in some embodiments, the driving part 130 may be provided with a driving source 134 and a connecting plate 135, and a plurality of first plates 131 may be provided on the connecting plate 135. The second plate 121 may be connected to the connecting plate 135 by bolts and gaskets to improve the connection stability, and the second plate 121 may also be integrally formed on the connecting plate 135. Correspondingly, the closing part 120 may also be provided with a plurality of second plates 121, and the sealing plate 125 may be connected to the side of the second plate 121 away from the first plate 131 to enhance the stability of the valve assembly 100 when closing the large-area opening 113. The connection method between the second plate 121 and the sealing plate 125 may be the same as the connection method between the first plate 131 and the connecting plate 135, which will not be repeated here.

[0056] like Figure 4 , Figure 5 as well as Figure 6As shown, the driving part 130 is connected to the first end 141 through the first connecting column 132. In order to limit the axial movement of the connecting part 140 along the first connecting column 132, in some embodiments, the driving part 130 includes a first plate body 131 and a first connecting column 132, one end of the first connecting column 132 is connected to the first plate body 131, and the other end is connected to the first end 141. The connecting part 140 also includes a first E-type retaining spring 143, which is arranged on the side of the first connecting column 132 away from the first plate body 131 and is clamped to the first connecting column 132. The E-type retaining spring has a simple structure, is easy to install, has good elasticity and toughness, can resist axial vibration and impact to a certain extent, and ensures the stability and reliability of the parts on the shaft. The E-type retaining spring has high wear resistance and produces less particles when it is rubbed and squeezed. In addition, the E-type retaining spring has good compression resistance and is convenient for long-term use. In some embodiments, the closing portion 120 includes a second plate body 121 and a second connecting column 122, one end of the second connecting column 122 is connected to the second plate body 121, and the other end is connected to the second end 142, and the connecting portion 140 further includes a second E-type snap ring 144, which is disposed on a side of the second connecting column 122 away from the second plate body 121 and is clamped to the second connecting column 122. The use of the second E-type snap ring can also reduce particles generated by the valve assembly 100 and improve fluid purity, which will not be repeated here.

[0057] like Figure 5 As shown, the driving part 130 is hinged with the connecting part 140, and the main part of the driving part 130 can be spaced apart from the connecting part 140 to avoid the friction between the main body of the driving part 130 and the connecting part 140 to generate particles. In this embodiment, the driving part 130 includes a first plate body 131 and a first connecting column 132, the first plate body 131 has a first wall surface 1311, the first wall surface 1311 is provided with a first connecting column 132, the first connecting column 132 is connected to the first end 141, and along the direction perpendicular to the first wall surface 1311, the first assembly gap a between the connecting part 140 and the first wall surface 1311 satisfies: a≥1mm. The first plate body 131 is the main body of the driving part 130. The first assembly gap a can be 1mm, 1.5mm, 2mm or 3mm, which is not limited here. In some embodiments, the closing portion 120 includes a second plate body 121 and a second connecting column 122, the second plate body 121 has a second wall surface 1211, the second wall surface 1211 is provided with a second connecting column 122, the second connecting column 122 is connected to the second end 142, and along the direction perpendicular to the second wall surface 1211, the second assembly gap b between the connecting portion 140 and the second wall surface 1211 satisfies: b≥1mm. The spacing between the second plate body 121 and the connecting portion 140 can also effectively reduce the particles generated by the valve assembly 100. Specifically, the second assembly gap b can be 1mm, 1.5mm, 2mm or 3mm, which is not limited here.

[0058] like Figure 4 as well as Figure 6 As shown, since one end of the connecting portion 140 is connected to the driving portion 130 and the other end is connected to the closing portion 120, the driving portion 130 can drive the closing portion 120 to move. In order to further improve the stability of the movement of the closing portion 120 and facilitate the closing portion 120 to release the opening 113, in some embodiments, the valve assembly 100 further includes an elastic portion 150, the driving portion 130 has a first connecting column 132, the closing portion 120 also has a second connecting column 122 and a third connecting column 123, the first end 141 is hinged to the first connecting column 132, the second end 142 is hinged to the second connecting column 122, the third connecting column 123 is arranged on the side of the second connecting column 122 away from the limiting portion 111, and one end of the elastic portion 150 is connected to the first connecting column 132 and the other end is connected to the third connecting column 123. In the initial state, in order to facilitate the closing portion 120 to abut against the limiting portion 111, the elastic portion 150 can be in a stretched state so that the closing portion 120 is suspended on the driving portion 130. The driving portion 130 moves from the first position to the second position. Since the limiting portion 111 limits the movement of the closing portion 120, the closing portion 120 moves away from the driving portion 130 along the second direction Y, and the elastic portion 150 is further stretched. When the driving portion 130 returns to the first position from the second position, the elastic force of the elastic portion 150 can drive the closing portion 120 to release the opening 113.

[0059] In some embodiments, the elastic part 150 is configured as a spring. In order to reduce the friction between the spring and the driving part 130, the closing part 120 and the connecting plate 135, the spring is spaced apart from the first wall 1311 and the second wall 1211. Preferably, the wire diameter c of the spring satisfies: 0.8mm≤c≤2mm; and / or, the middle diameter d of the spring satisfies: 7.2mm≤d≤12mm. Specifically, the wire diameter c can be 0.8mm, 0.9mm, 1mm or 2mm, and the middle diameter d can be 7.2mm, 8.5mm, 10mm or 12mm. Further, the elastic part 150 is configured as a spring of stainless steel powder boronized material. Preferably, the spring is made of SWPB material (i.e., stainless steel powder boronized material). Stainless steel powder, as a basic material, has the advantages of corrosion resistance, wear resistance, high strength, etc. Stainless steel powder is mixed with boron, sintered and other processes to make the boron element evenly distributed in the stainless steel matrix, further improving the mechanical properties of the material. Boron can significantly improve the hardenability of steel, and at the same time enhance the strength, toughness, fatigue performance and temper brittleness of steel. The addition of boron can also replace a certain amount of expensive alloy elements such as manganese, nickel, chromium, molybdenum, etc., improving the economy of steel. Boron, as a trace element, helps to inhibit intergranular corrosion in stainless steel, thereby improving the corrosion resistance of stainless steel. This allows the boronized stainless steel spring to maintain good performance and life in harsh environments. Boronization can also improve the wear resistance of stainless steel, so that the spring can still maintain a low wear rate under high-frequency and high-load working conditions, extending the service life. In addition, boronization can also improve the fatigue resistance of stainless steel, so that the spring can still maintain stable performance when subjected to long-term alternating loads, reducing safety accidents caused by fatigue fracture. The elastic part 150 can also be nickel-plated for rust prevention. In some embodiments, the elastic part 150 can also be configured as wear-resistant materials such as chromium-molybdenum alloy steel, silicon-manganese steel, stainless steel spring, alloy steel spring, silicon bronze and beryllium bronze, which are not limited here.

[0060] like Figure 7 , Figure 8 , Fig. 9 as well as Fig.10 As shown, during the movement of the driving part 130 along the first direction X and the closing part 120 along the first direction X or the second direction Y, in order to improve the movement stability of the driving part 130 and the closing part 120, the valve assembly 100 may be provided with a wall for guiding, and the driving part 130 and the closing part 120 may be provided with a roller or other component with low friction with the guiding wall and stable operation. Figure 8 as well as Fig.12As shown, in some embodiments, the valve assembly 100 further includes a base 110, which limits a receiving cavity 112 and an opening 113, the receiving cavity 112 is in communication with the opening 113, the driving portion 130, the closing portion 120 and the connecting portion 140 are arranged in the receiving cavity 112 along the first direction X, and the driving portion 130 further includes a first roller 133, the peripheral wall of the first roller 133 is used to abut against the base 110, specifically, the first roller 133 can abut against the wall defining the receiving cavity 112 to guide the movement of the driving portion 130 along the first direction X. Fig.11 As shown, in some embodiments, the closing portion 120 further has a second roller 124, and the peripheral wall of the second roller 124 is used to abut against the limiting portion 111. When the driving portion 130 moves to the first position, the second roller 124 of the closing portion 120 abuts against the limiting portion 111, and the driving portion 130 continues to move along the first direction X. The connecting portion 140 pushes the closing portion 120 to move along the second direction Y, and the second roller 124 abuts against the limiting portion 111 to guide the closing portion 120 to move along the second direction Y. The arrangement of the first roller 133 and the second roller 124 greatly reduces the movement resistance of the driving portion 130 and the closing portion 120, reduces the friction between the closing portion 120 and the limiting portion 111, and reduces the generation of particles of the valve assembly 100. The first roller 133 and the second roller 124 may also be provided with bearings to further reduce the risk of generating particles during the rotation of the first roller 133 and the second roller 124.

[0061] The second aspect of the present application further provides a vacuum device (not shown in the figure), which includes the valve assembly 100 of any of the above embodiments. Thanks to the improvement of the above valve assembly 100, the vacuum device of this embodiment also has the same technical effect as the above valve assembly 100, which will not be described in detail here. For other components of the vacuum device, reference can be made to the prior art, which will not be described in detail here.

[0062] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0063] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0064] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A valve assembly for closing an opening of a device, characterized in that: The valve assembly comprises: Limiting part; Closure; A driving portion, arranged opposite to the limiting portion along a first direction; The connecting part has a first end and a second end, the driving part is connected to the first end, and the closing part is connected to the second end; wherein the first end is configured as a bearing, and / or the second end is configured as a bearing; The driving part has a first position and a second position relative to the limiting part. The second position is located on a side of the first position close to the limiting part. In the first position, the closing part abuts against the limiting part. The driving part can move from the first position to the second position along the first direction so that the closing part approaches and closes the opening along the second direction. The second direction intersects with the first direction.

2. The valve assembly according to claim 1, characterized in that The first end is configured as a needle bearing; and / or the second end is configured as a needle bearing.

3. The valve assembly according to claim 1, characterized in that The driving part includes a first plate body and a first connecting column, wherein the first connecting column is integrally formed with the first plate body and connected to the first end; and / or, The closing portion includes a second plate body and a second connecting column, the second connecting column is integrally formed with the second plate body, and the second connecting column is connected to the second end.

4. The valve assembly according to claim 1, characterized in that The driving part includes a first plate body and a first connecting column, one end of the first connecting column is connected to the first plate body, and the other end is connected to the first end, and the connecting part also includes a first E-shaped clip spring, which is arranged on a side of the first connecting column away from the first plate body and is clamped to the first connecting column; and / or, The closing portion includes a second plate body and a second connecting column, one end of the second connecting column is connected to the second plate body, and the other end is connected to the second end, and the connecting portion also includes a second E-type retaining spring, which is arranged on the side of the second connecting column away from the second plate body and is clamped to the second connecting column.

5. The valve assembly according to claim 1, characterized in that The driving part includes a first plate body and a first connecting column, the first plate body has a first wall surface, the first wall surface is provided with the first connecting column, the first connecting column is connected to the first end, and along a direction perpendicular to the first wall surface, a first assembly gap a between the connecting part and the first wall surface satisfies: a≥1mm; and / or, The closing portion includes a second plate body and a second connecting column, the second plate body has a second wall surface, the second wall surface is provided with the second connecting column, the second connecting column is connected to the second end, and along the direction perpendicular to the second wall surface, the second assembly gap b between the connecting portion and the second wall surface satisfies: b≥1mm.

6. The valve assembly according to claim 1, characterized in that The valve assembly also includes an elastic part, the driving part has a first connecting column, the closing part also has a second connecting column and a third connecting column, the first end is hinged to the first connecting column, the second end is hinged to the second connecting column, the third connecting column is arranged on the side of the second connecting column away from the limiting part, one end of the elastic part is connected to the first connecting column, and the other end is connected to the third connecting column.

7. The valve assembly according to claim 6, characterized in that The elastic part is configured as a spring; Wherein, the wire diameter c of the spring satisfies: 0.8mm≤c≤2mm; and / or, the median diameter d of the spring satisfies: 7.2mm≤d≤12mm.

8. The valve assembly according to claim 6, characterized in that The elastic part is configured as a spring made of stainless steel powder boronized material; or, the elastic part is configured as a spring made of chromium-molybdenum alloy steel; or, the elastic part is configured as a spring made of silicon-manganese steel.

9. The valve assembly according to claim 1, characterized in that The valve assembly further includes a base, the base defines a receiving cavity and the opening, the receiving cavity is communicated with the opening, the driving part, the closing part and the connecting part are arranged in the receiving cavity along the first direction, the driving part further includes a first roller body, and the peripheral wall of the first roller body is used to abut against the base; and / or, The closing portion further comprises a second roller body, and a peripheral wall of the second roller body is used for abutting against the limiting portion.

10. A vacuum device, characterized in that: A valve assembly comprising any one of claims 1 to 9.

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