Sample holder and side-illuminated x-ray fluorescence analyzer

Abstract

The utility model provides a sample holder and a side illumination type X-ray fluorescence analysis device. According to the sample holder, the sample replacement operation is simple and convenient, the internal pollution of the device can be prevented, and high-precision analysis can be carried out. This sample holder is used in a side-illuminated X-ray fluorescence analysis device, and is provided with: a sample holder having a portion thereof in contact with the periphery of a primary X-ray irradiation portion of the surface of a sample that includes a sample and has a front surface and a back surface that are parallel to each other; and a spring which applies force to the object to be measured from the back side and presses the object to be measured on the object pressing piece.

Description

Technical Field

[0001] The utility model relates to a sample rack and a side-illumination type X-ray fluorescence analysis device. Background Art

[0002] As an apparatus for measuring an element contained in a sample or the concentration of the element, an X-ray fluorescence analyzer is known. Among the X-ray fluorescence analyzers, there are downward-illuminating X-ray fluorescence analyzers that irradiate a sample with X-rays once from the bottom and upward-illuminating X-ray fluorescence analyzers that irradiate a sample with X-rays once from the top.

[0003] When measuring using an X-ray fluorescence analyzer, a jig (such as a sample cell or a sample holder) with a sample may be used. For example, Patent Documents 1 and 2 below describe a sample holder in which a liquid sample is sealed with a resin film.

[0004] In addition, when using an X-ray fluorescence analyzer for measurement, there are cases where a sample holder is not used. For example, Patent Document 3 below describes an X-ray fluorescence liquid analyzer that has a valve for supplying and discharging a liquid sample on the back of a measurement cell and can replace the liquid sample inside the measurement cell each time a measurement is performed.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2005-345442

[0008] Patent Document 2: Japanese Patent Application Publication No. 2018-205290

[0009] Patent Document 3: Japanese Patent Application Publication No. 2011-127954 Utility Model Content

[0010] Issues to be Solved by Utility Models

[0011] According to the above-mentioned patent document 3, when replacing a sample, a part of the sample before replacement may remain in the measurement cell, resulting in a decrease in analysis accuracy. On the other hand, by using a sample holder such as the above-mentioned patent documents 1 and 2, it is possible to perform measurement without leaving the measurement sample used in the previous measurement at the measurement position. However, even if a sample holder is used, in the case of a downward-illuminating X-ray fluorescence analysis device, the resin film of the sample holder may be damaged by X-ray irradiation, causing contamination inside the device. In addition, in the case of an upward-illuminating X-ray fluorescence analysis device, it may become impossible to accurately irradiate one X-ray due to evaporation or volatilization of the sample, resulting in a decrease in analysis accuracy.

[0012] The present disclosure has been made in view of the above problems, and an object thereof is to provide a sample holder and a side-illuminated X-ray fluorescence analysis device, wherein the sample replacement operation of the sample holder is simple and contamination inside the device can be prevented, and high-precision analysis can be performed.

[0013] Solutions to Solve Problems

[0014] (1) One aspect of the present disclosure is a sample holder used in a side-illuminated X-ray fluorescence analysis device, and is characterized in that it comprises: an object pressing piece, a portion of which abuts against the periphery of a first X-ray irradiated portion of a surface of an object that includes a sample and has a surface and a back side of parallel flat plates; and a spring that applies force to the object from the back side to press the object against the object pressing piece.

[0015] (2) According to the above-mentioned aspect of the present disclosure, it is characterized by further comprising a bottom plate for supporting the bottom of the object to be measured.

[0016] (3) According to the above aspect of the present disclosure, it is characterized by further comprising a back plate that fixes the spring and the object pressing piece and is arranged on the back side of the object.

[0017] (4) According to the above aspect of the present disclosure, it is characterized by further comprising a spacer disposed between the object to be measured and the back plate.

[0018] (5) According to the above aspect of the present disclosure, the object pressing piece includes side walls arranged on both side surfaces of the object to be measured and a pressing portion that abuts against the object to be measured.

[0019] (6) According to the above-mentioned method of the present disclosure, it is characterized in that the object to be measured has: a mask, which has a hole formed at the position irradiated by one X-ray and is arranged on the surface side of the sample; and a support plate, which is arranged on the back side of the sample.

[0020] (7) According to the above aspect of the present disclosure, the spring is a leaf spring.

[0021] (8) One aspect of the present disclosure relates to a side-illuminated X-ray fluorescence analysis device characterized in that it comprises: an X-ray source that irradiates the object to be measured contained in any of the above-mentioned sample racks with a single X-ray; and a sample stage that is arranged at a position for single X-ray irradiation and on which the sample rack is uprightly mounted.

[0022] (9) According to the above-mentioned method of the present disclosure, it is characterized in that there is a turntable configured with a plurality of the sample stages, and the turntable has: an axis portion, which is rotatably supported by an axis inside the X-ray fluorescence analysis device and has a rotation axis in a horizontal plane; and a rotating portion, which is configured with a plurality of the sample stages and is fixed on the axis portion and rotates.

[0023] (10) According to the above-mentioned method of the present disclosure, it is characterized in that the rotating part supports the object to be measured so that the irradiation position of the object to be measured is located on the side of the truncated cone, and the object to be measured is configured so that one X-ray is irradiated to the specified object to be measured at the measurement position.

[0024] Effect of utility model

[0025] According to the present disclosure, it is possible to provide a sample rack that facilitates sample replacement and prevents the sample rack from becoming loose inside an X-ray fluorescence analysis device. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a top view of the sample holder.

[0027] Figure 2 A diagram for explaining each part of a sample holder.

[0028] Figure 3 A diagram showing the state of embedding the object to be measured.

[0029] Figure 4 A diagram representing the object being measured.

[0030] Figure 5 Schematic diagram of a side-illuminated X-ray fluorescence analysis device.

[0031] Figure 6 This is a diagram showing a side-illuminated X-ray fluorescence analysis device equipped with a sample holder.

[0032] Figure 7 A diagram showing a state where a sample holder is installed on a sample stage.

[0033] Figure 8 This is a diagram schematically showing a side-illumination X-ray fluorescence analyzer during measurement.

[0034] Fig. 9 It is a diagram schematically showing a side-illumination X-ray fluorescence analysis device according to a modification.

[0035] Fig.10 The top view and side view of the turntable.

[0036] Fig.11 This is a diagram showing the turntable with the sample rack removed.

[0037] Fig.12 It is a diagram schematically showing a side-illumination X-ray fluorescence analyzer according to a modification example during measurement.

[0038] Fig.13 A diagram showing an object to be measured according to a modification example.

[0039] Description of symbols

[0040] 100 sample holder, 102 object to be measured, 104 back plate, 106 object pressing member, 108 spacer, 110 side wall, 112 pressing portion, 202 spring, 204 bottom plate, 302 mask, 304 sample, 306 support plate, 402 first resin film, 404 second resin film, 406 resin film, 408 mask hole, 500 side-illuminated X-ray fluorescence analysis device, 502 cover, 504 sample chamber wall, 506 sample stage, 508 recess, 510 back side component, 512 surface side component, 802 X-ray source, 804 spectroscopic element, 806 detector, 900 turntable, 1002 shaft, 1004 rotating portion, 1006 first component, 1008 second component. DETAILED DESCRIPTION

[0041] Hereinafter, preferred embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described with reference to the drawings. Figure 1 This is a diagram showing the sample holder 100 as viewed from above. Figure 2 It is a diagram for explaining each part of the sample holder 100 in a state where the object to be measured 102 and the spacer 108 are removed. Figure 3 1 is a diagram showing a state where the object to be measured 102 is embedded in the sample holder 100. In addition, hereinafter, the surface where the object to be measured 102 can be observed is referred to as the surface side, the surface where the back plate 104 can be observed is referred to as the back side, the surface where the side wall 110 can be observed is referred to as the side side, and the surface where the bottom plate 204 can be observed is referred to as the bottom side. Figure 3 The orientation of the embedded object 102 is shown as being from the upper side toward the lower side.

[0042] like Figures 1 to 3 As shown, the sample holder 100 includes an object pressing member 106, a spring 202, a bottom plate 204, a back plate 104, and a spacer 108. An object 102 is disposed on the sample holder 100.

[0043] The object to be measured 102 includes a sample 304 and has a surface and a back side of a parallel plate. Specifically, for example, Figure 4 (a) is a top view of the object 102 to be measured, Figure 4 (b) represents Figure 4(a) is a diagram of the IV-IV cross section. In the present embodiment, a case where the sample 304 is sealed in a liquid in a bag-shaped pool is described. The object to be measured 102 includes: a mask 302, a bag-shaped pool in which the sample 304 is sealed, and a support plate 306, wherein the bag-shaped pool is clamped and arranged between the mask 302 and the support plate 306. The mask 302 is formed with a hole 408 at a position irradiated with a single X-ray, and is arranged on the surface side of the bag-shaped pool. The hole 408 provided on the mask 302 is the portion of the surface of the object to be measured 102 irradiated with a single X-ray. The support plate 306 is arranged on the back side of the bag-shaped pool. The mask 302 is the surface of a parallel plate, and the support plate 306 is the back side of the parallel plate. The mask 302 and the support plate 306 are, for example, thin rectangular metal plates.

[0044] The bag-shaped cell includes a first resin film 402, a second resin film 404 and a resin film 406. The first resin film 402 is arranged on the irradiation side of the primary X-ray and has an analysis window that transmits the primary X-ray. Specifically, for example, the first resin film 402 is a film formed by resins such as aluminum laminate, polypropylene, polyester, etc. The material of the first resin film 402 is preferably a thermoplastic resin. The shape of the first resin film 402 is, for example, rectangular and has a circular hole. The circular hole is arranged at the approximate center of the first resin film 402. An extremely thin resin film 406 of polyimide or the like is arranged on the hole provided in the first resin film 402, and acts as an analysis window during measurement. In addition, the shape of the hole provided as the analysis window can be any shape. In addition, when the first resin film 402 is formed by a material that transmits the primary X-ray, the analysis window can be omitted.

[0045] The second resin film 404 is a resin film disposed opposite to the first resin film 402 across the sample 304. Specifically, for example, the second resin film 404 is a film formed of the same material as the first resin film 402. Although the second resin film 404 is different from the first resin film 402 and does not have holes, the outer shape is preferably a shape corresponding to the first resin film 402.

[0046] The second resin film 404 is bonded to the first resin film 402. Specifically, Figure 4 The dotted line in (a) shows an example of the region where the first resin film 402 and the second resin film 404 are bonded. After the sample 304 is injected between the first resin film 402 and the second resin film 404 while the lower, left, and right regions of the bonded region are bonded, the upper region is bonded. When bonding the upper region, the first resin film 402 and the second resin film 404 are airtightly sealed so that no air remains between them, thereby completing a bag-shaped cell enclosing the sample 304. In addition, although Figure 4The area where the first resin film 402 and the second resin film 404 are bonded is rectangular, but the bonded area may be set at other positions as long as it surrounds the analysis window. The bonding method may be any method, such as heat welding or adhesive coating. In addition, the sample sealed in the bag-shaped cell may be a powder or a solid in addition to a liquid.

[0047] In addition, the object to be measured 102 may be composed of only a bag-shaped pool, or one or both of the mask 302 and the support plate 306 may be omitted. For example, if the surface of the bag-shaped pool is pressed by the object-to-be-measured pressing member 106, the mask 302 may be omitted. In addition, for example, if the back of the bag-shaped pool is pressed to the object-to-be-measured pressing member 106 by the spring 202, the support plate 306 may be omitted.

[0048] A portion of the object pressing member 106 abuts against the periphery of the primary X-ray irradiated portion of the surface of the object 102. Specifically, for example, Figure 2 As shown, the object pressing piece 106 has a side wall 110 arranged on both sides of the object 102 to be measured and a pressing portion 112 abutting against the object 102 to be measured. The side wall 110 has a rectangular shape when viewed from the side, and is fixed to the back plate 104 with screws. The pressing portion 112 has a shape extending from the front end surface of the side wall 110 toward the central side of the object 102 to be measured, and abuts against a portion of the surface side of the object to be measured. That is, when the side wall 110 and the pressing portion 112 are combined together, the object pressing piece 106 has an L-shaped shape when viewed from the top side. In addition, although Figures 1 to 3 The pressing part 112 shown presses the object 102 without gap from the upper end to the lower end of the side end, but may also contact other parts around the 1st X-ray irradiated part. As long as the object pressing piece 106 can press the object 102, the shape of the pressing part 112 is arbitrary.

[0049] The spring 202 applies force to the object 102 from the back side to press the object 102 onto the object pressing member 106. Specifically, for example, the spring 202 is fixed to the back plate 104 with a screw and applies force to the object 102 from the back side. The spring 202 may be a coil spring, but is preferably a leaf spring. Figure 2 As shown in FIG. 1 , the leaf spring has a shape that moves closer from the back plate 104 to the object 102 as it moves from the upper side to the lower side. Figure 3 As shown, the object 102 can be inserted into the sample holder 100 along the leaf spring, so it is easy to replace the sample 304. In addition, as long as the spring 202 can press the object 102 on the pressing portion 112, it can be fixed on the object pressing member 106 or the bottom plate 204 instead of the back plate 104.

[0050] The bottom plate 204 supports the bottom of the object 102. Specifically, for example, the bottom plate 204 is substantially rectangular when viewed from the bottom, and the back plate 104 and the object pressing member 106 are fixed on the top. The bottom plate 204 can prevent the object 102 from falling to the bottom.

[0051] The back plate 104 fixes the spring 202 and the object pressing member 106, and is arranged on the back side of the object 102. Specifically, for example, the back plate 104 is rectangular when viewed from the surface side, and is a metal plate with a fixed thickness. In addition, the back plate 104 has a hole at a position corresponding to the hole 408 of the mask 302. The hole can suppress the background effect caused by the transmission of the primary X-ray through the object 102. The hole of the back plate 104 can also be omitted.

[0052] The spacer 108 is arranged between the object to be measured 102 and the back plate 104. Specifically, for example, the spacer 108 is a metal plate arranged between the object to be measured 102 and the spring 202, and has a shape corresponding to the support plate 306. The spacer 108 is a component used to adjust the interval when the spring 202 is not in contact with the back side of the object to be measured 102, and is arranged when the distance between the back side of the object to be measured 102 and the back plate 104 is large. In addition, the spacer 108 may also be provided with a hole at a position corresponding to the hole 408 of the mask 302. In addition, Figure 2 The spacer 108 is omitted.

[0053] Next, a side-illumination X-ray fluorescence analysis apparatus 500 using the sample holder 100 will be described. Figure 5 (a) is a diagram showing the appearance of a side-illumination X-ray fluorescence analysis device 500 . Figure 5 (b) is an enlarged view of the sample stage 506 of the side-illuminated X-ray fluorescence analysis apparatus 500, and is a view showing a state in which the cover 502 is opened so that the sample stage 506 can be observed. The side-illuminated X-ray fluorescence analysis apparatus 500 has a structure in which the sample holder 100 is arranged upright on the sample stage 506. Here, the sample holder 100 is arranged upright, which means that the sample holder 100 is arranged so that the direction of gravity is within the surface of the sample holder 100 irradiated with the primary X-ray (i.e., within the surface of the mask 302).

[0054] Figure 6 (a) to Figure 6 (c) is to Figure 5 (b) is a further enlarged view of a space where the sample stage 506 is arranged (hereinafter referred to as a sample chamber), and is a view showing a state where the sample holder 100 is installed. Figure 6 (a) is a diagram showing the side-illuminated X-ray fluorescence analysis device 500 as viewed from the surface side. Figure 6 (b) represents Figure 6(a) is a diagram of the VI-VI section. Figure 6 (c) represents Figure 6 In the following, Figure 6 The sample chamber side of the sample chamber wall 504 in (a) is referred to as v, and the opposite side (in the depth direction of the paper) is referred to as the back side.

[0055] The sample chamber is a space surrounded by a cover 502 and a sample chamber wall 504, and is provided with a sample stage 506. The cover 502 and the sample chamber wall 504 are formed of a material containing heavy metals such as lead that are not transparent to X-rays. The sample chamber wall 504 has an opening in a portion where the sample stage 506 is provided, and has a recess 508 above the sample stage 506. The sample stage 506 has a back side component 510 fixed to the sample chamber side (surface side) of the sample chamber wall 504, and a surface side component 512 fixed to the back side (hereinafter, the space on the back side is referred to as a measurement chamber) of the sample chamber wall 504. The back side component 510 is as shown in FIG. Figure 6 As shown in (a) of FIG. 1 , the shape of the rectangle is observed from the surface side, and Figure 6 The front side member 512 is a member that supports the side of the sample holder 100 irradiated with the primary X-ray, and is arranged at a position away from the sample holder 100 irradiated with the primary X-ray.

[0056] Furthermore, as long as the sample rack 100 is structured so as not to fall toward the measurement chamber, the surface side member 512 may be omitted. For example, by adopting a structure in which the opening of the sample chamber wall 504 is smaller than the sample rack 100 and a portion of the sample chamber wall 504 abuts against a portion of the sample rack 100, the sample rack 100 may be prevented from falling toward the measurement chamber.

[0057] Figure 7 (a) and Figure 7 (b) is a diagram showing a state where the sample holder 100 is set on the sample stage 506. Figure 7 As shown in (a), the user holds the sample holder 100 with his fingers, and makes the side of the sample holder 100 irradiated with the first X-ray face the measurement chamber, and arranges the sample holder 100 on the sample stage 506 while tilting it relative to the sample chamber wall 504. At this time, since the sample chamber wall 504 is provided with a recess 508, the sample holder 100 can be easily installed and removed by placing the fingers in the recess 508. Figure 6 (a) to Figure 6 (c) and Figure 7As shown in (b), the back plate 104 of the mounted sample holder 100 is supported by the back side member 510, the mask 302 is supported by the front side member 512, and the side wall 110 is supported by the sample chamber wall 504 having an opening. In addition, the opening of the sample chamber wall 504 exposes the position of the sample holder 100 irradiated with the first X-ray to the measurement chamber.

[0058] Figure 8 1 is a diagram schematically showing a side-illumination X-ray fluorescence analyzer 500 during measurement. Figure 8 1 is a cross-sectional view of the side-illuminated X-ray fluorescence analysis device 500 as viewed from the top. In addition, the side-illuminated X-ray fluorescence analysis device 500 is described as a wavelength dispersion type X-ray fluorescence analysis device, but the side-illuminated X-ray fluorescence analysis device 500 may be an energy dispersion type X-ray fluorescence analysis device. The side-illuminated X-ray fluorescence analysis device 500 includes an X-ray source 802, a spectroscopic element 804, and a detector 806. The X-ray source 802 irradiates the sample 304 contained in the object to be measured 102 contained in the sample rack 100 with a primary X-ray. Here, the X-ray source 802 is configured so that the traveling direction of the primary X-ray exists in a substantially horizontal plane. Therefore, the primary X-ray irradiates the upright sample rack 100 from the side. X-ray fluorescence is emitted from the sample 304 irradiated with the primary X-ray.

[0059] The spectroscopic element 804 spectroscopy the X-ray fluorescence. Specifically, for example, the spectroscopic element 804 spectroscopy only spectroscopy the X-ray fluorescence of a specific wavelength that satisfies the Bragg conditional expression among the X-ray fluorescence of multiple wavelengths generated from the sample 304. The incident angle between the traveling direction of the X-ray fluorescence generated from the sample 304 and the surface of the spectroscopic element 804 is θ.

[0060] The sample stage 506 is arranged at the position of the first X-ray irradiation, and the sample holder 100 is installed upright (see Figure 7 (a) and Figure 7 (b)).

[0061] The detector 806 is, for example, a scintillation counter. The detector 806 measures the intensity of X-ray fluorescence and outputs a pulse signal having a peak value corresponding to the energy of the measured X-ray fluorescence.

[0062] The spectroscopic element 804 and the detector 806 are rotated while maintaining a fixed angle relationship through a goniometer (not shown). Specifically, the spectroscopic element 804 is rotated through the goniometer so that the incident angle θ of the X-ray fluorescence relative to the surface of the spectroscopic element 804 changes within a specified range. The secondary X-ray is diffracted by the spectroscopic element 804, and the spectroscopic element 804 emits X-ray fluorescence that satisfies the Bragg condition (i.e., X-ray fluorescence at an emission angle θ). The detector 806 is moved to a position where the X-ray fluorescence emitted from the spectroscopic element 804 at an emission angle θ is incident through the goniometer.

[0063] By counting the pulse signals outputted from the detector 806 according to the peak value, the side-illuminated X-ray fluorescence analyzer 500 obtains a spectrum indicating the relationship between the intensity and energy of the X-ray fluorescence. Based on the spectrum, the elements contained in the sample 304 are analyzed. When only specific elements are analyzed, the side-illuminated X-ray fluorescence analyzer 500 may not have a goniometer, and the positions of the spectroscopic element 804 and the detector 806 may be fixed.

[0064] As described above, by arranging the sample rack 100 according to the present embodiment in an upright position, the replacement operation of the sample 304 is simple, contamination inside the device can be prevented, and high-precision analysis can be performed.

[0065] Next, a modification of the side-illumination X-ray fluorescence analysis apparatus 500 according to the above embodiment will be described. In this modification, the side-illumination X-ray fluorescence analysis apparatus 500 is different from the above embodiment in that it includes a turntable 900 on which a plurality of sample stages 506 are arranged. Fig. 9 FIG. 1 is a diagram schematically showing a side-illuminated X-ray fluorescence analysis device 500 according to a modified example, and replaces Figure 5 The sample stage 506 shown in (b) is provided with a turntable 900. Since the configuration other than the turntable 900 is the same, the description thereof is omitted.

[0066] Fig.10 (a) is a top view of the turntable 900. Fig.10 (b) is a side view of the turntable 900. In addition, Fig.11 (a) is a diagram showing a plan view of the turntable 900 , and is a diagram showing a state where the sample rack 100 is removed. The turntable 900 includes a shaft portion 1002 and a rotating portion 1004 .

[0067] The shaft 1002 is rotatably supported by the inside of the X-ray fluorescence analysis device, and has a rotation axis in a horizontal plane. Specifically, one end of the shaft 1002 is rotatably supported by the sample chamber wall 504, and a disk-shaped handle is provided at the other end. The shaft 1002 is supported by the sample chamber wall 504 so that the rotation axis exists in a horizontal plane and has a predetermined angle relative to the sample chamber wall 504. The user rotates the shaft 1002 by holding the handle, thereby rotating the turntable 900.

[0068] The rotating unit 1004 is provided with a plurality of sample stages 506, and is fixed to the shaft 1002 so as to rotate. Fig.11 1006 shown on the lower side and the second component 1008 shown on the upper side. The first component 1006 has a shape formed only by the top surface and side surface of a substantially truncated cone, and has six holes corresponding to the shape of the sample holder 100 at fixed intervals on the side surface. Numbers are marked near the holes as symbols for identifying the sample holder 100 arranged in each hole. In addition, the first component 1006 has a hole for the shaft 1002 to fit in the center of the top surface.

[0069] The second component 1008 has a sample holder pressing piece for pressing the sample holder 100 at a position corresponding to the position of the six holes of the first component 1006. That is, the second component 1008 has a structure in which the sample holder pressing pieces are connected at a predetermined interval with the rotation axis as the center. In addition, the second component 1008 has a hole in the center for the shaft 1002 to fit in, similarly to the first component 1006. The first component 1006 and the second component 1008 are fitted with the shaft 1002 through the holes in the center, so that they rotate along with the rotation of the shaft 1002.

[0070] Six sample stages 506 are formed by the circumference of the six holes provided in the first member 1006 and the six sample holder pressing pieces provided in the second member 1008. The sample holder 100 is placed on the sample stage 506 by being inserted into the holes provided in the side of the first member 1006 and fixed by the sample holder pressing pieces of the second member 1008.

[0071] Fig.12 1 is a diagram schematically showing a side-illumination X-ray fluorescence analyzer 500 during measurement in this modification. Fig.12 Except that a turntable 900 is provided instead of the sample stage 506, Figure 8 Same. Fig.12As shown, the rotating part 1004 supports the object 102 to be measured, so that the irradiation position of the object 102 is located on the side of the truncated cone, and the object 102 is arranged so that the first X-ray is irradiated to the specified object 102 at the measurement position. Specifically, the sample holder 100 supported by the side of the turntable 900 is arranged so that the surface of the sample 304 in the sample holder 100 is located at the position of the first X-ray irradiation. At this time, since the shaft part 1002 is supported on the sample chamber wall 504 and has a predetermined angle with respect to the sample chamber wall 504, the surface of the sample 304 in the sample holder 100 is approximately parallel to the sample chamber wall 504.

[0072] That is, the sample rack 100 is arranged so that the position of the sample 304 in the sample rack 100 is Figure 8 The positional relationship of the sample 304 shown is the same. In addition, by rotating the shaft 1002, the other sample holders 100 are moved to the position irradiated by the first X-ray. The turntable 900 is configured to rotate once every 60 degrees, and the sample holders 100 inserted into the holes marked with symbols 1 to 6 can be arranged at the irradiation position of the first X-ray.

[0073] According to this modification, by placing the sample holder 100 on the turntable 900, a plurality of samples 304 can be measured without replacement. In addition, the shape of the turntable 900 shown in the modification can be arbitrary, and as long as the sample holder 100 can be placed at a position for irradiation of one X-ray by rotation, it can also be other shapes (such as a truncated pyramid shape, etc.). In addition, the number of sample holders 100 that can be placed on one turntable 900 is not limited to 6, and can also be other numbers.

[0074] In addition, in the above description, the case where the sample 304 is sealed in the liquid of the bag-shaped pool is described, but the sample holder 100 can perform various measurements of the sample 304. For example, Fig.13 As shown in (a) of FIG. 3 , the sample 304 may be a plate-like sample 304 such as a film or a substrate. Fig.13 As shown in (b), the sample 304 may be a sample 304 having an irregular shape obtained by solidifying a metal ingot or powder by pressing. Furthermore, the sample 304 may be a substrate or a powder sample sealed in a bag-shaped cell or the like.

[0075] In this case, the object to be measured 102 may be composed of only the sample 304, and one or both of the mask 302 and the support plate 306 may be omitted. For example, the mask 302 may be omitted as long as the surface of the sample 304 has a flat surface and is pressed by the object to be measured pressing member 106. In addition, for example, as long as the back side of the sample 304 is pressed against the object to be measured pressing member 106 by the spring 202, the support plate 306 may also be omitted.

Claims

1. A sample holder used in a side-illuminated X-ray fluorescence analysis device, characterized in that: have: a sample pressing piece, a part of which abuts against the periphery of the primary X-ray irradiated portion of the surface of the sample having a front surface and a back surface of parallel flat plates including a sample; and A spring applies force to the object to be measured from the back side to press the object to be measured onto the object to be measured pressing piece.

2. The sample holder according to claim 1, characterized in that: The device also comprises a bottom plate for supporting the bottom of the object to be measured.

3. The sample holder according to claim 1 or 2, characterized in that: The device also comprises a back plate which fixes the spring and the object-to-be-measured pressing piece and is arranged on the back of the object-to-be-measured.

4. The sample holder according to claim 3, characterized in that: A spacer is also provided between the object to be measured and the back plate.

5. The sample holder according to claim 1 or 2, characterized in that: The object-under-test pressing piece includes side walls disposed on both side surfaces of the object-under-test and a pressing portion abutting against the object-under-test.

6. The sample holder according to claim 1 or 2, characterized in that: The object to be measured has: a mask having a hole formed at a position irradiated with the primary X-ray and provided on the surface side of the sample; and A support plate is arranged on the back side of the sample.

7. The sample holder according to claim 1 or 2, characterized in that: The spring is a leaf spring.

8. A side-illuminated X-ray fluorescence analysis device, characterized in that: have: An X-ray source that irradiates the object to be measured contained in the sample holder according to claim 1 or 2 with a single X-ray; and The sample stage is arranged at a position for primary X-ray irradiation and has the sample holder installed upright.

9. The side-illuminated X-ray fluorescence analysis device according to claim 8, characterized in that: A turntable is provided with a plurality of the sample stages, The turntable has: a shaft portion that is rotatably supported by a shaft in the X-ray fluorescence analysis device and has a rotation axis in a horizontal plane; and The rotating part is provided with a plurality of the sample stages and is fixed to the shaft part so as to rotate.

10. The side-illuminated X-ray fluorescence analysis device according to claim 9, characterized in that: The rotating unit supports the object to be measured so that the irradiation position of the object to be measured is located on the side surface of the truncated cone, and arranges the object to be measured so that a single X-ray is irradiated to a predetermined object to be measured at a measurement position.

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