Barrel cover roller shutter mechanism for wafer coating
By designing a barrel cover roller shutter mechanism including a frame, a roller shutter and a transmission mechanism in semiconductor wafer production, the problems of short service life and large space in the prior art are solved, and the barrel cover opening and closing effect with a stable, long life and small footprint are achieved.
Patent Information
- Application Number
- CN202421815759.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-07-30
AI Technical Summary
In the production of existing semiconductor wafers, the drum covers of the glued drum and cleaning drum have a short service life, and the spring-shrinked rolling shutter door drum covers are prone to lose their elasticity, and the fixed drum covers occupy a large space and affect each other.
A roller shutter mechanism for wafer coating is designed, including a frame, a roller shutter and a transmission mechanism. Components such as servo motors, transmission belts and reels are used to form openable and closed roller shutters instead of fixed and spring-type bucket covers.
By replacing the fixed and spring-type bucket covers by rolling shutter mechanism, the stability and long life of the bucket cover opening and closing are achieved, while reducing the floor area and avoiding the problem of the bucket covers affecting each other.
Smart Images
Figure CN222848131U_ABST
Abstract
Description
Technical field:
[0001] The utility model belongs to the technical field of semiconductor wafer production, and particularly relates to a barrel cover rolling curtain mechanism for wafer coating. Background technology:
[0002] Laser cutting is required in the production process of semiconductor wafers. In the laser cutting process, the wafer needs to be glued in a glue barrel and adhered to the cutting machine. After the wafer is cut, it needs to be cleaned in a cleaning barrel. A barrel cover is set on the top of the glue barrel and the cleaning barrel. The barrel cover is only opened when the wafer passes through to prevent debris from falling into the glue barrel and the cleaning barrel.
[0003] The existing barrel covers of glue barrels and cleaning barrels are generally spring-retracted rolling shutter door type or fixed type. Since the barrel cover needs to be opened and closed frequently, the spring of the spring-retracted rolling shutter door barrel cover gradually loses its elasticity after a period of use, and generally needs to be replaced every six months, with a short service life. In addition, due to the large release force of the spring tension, the barrel cover is easy to get stuck when opening and closing. Although the fixed barrel cover has stable performance and a long service life, it occupies a large space in the equipment. Since the glue barrel and the cleaning barrel are adjacent, the space between the two barrels is small, and the barrel covers of the two barrels are easy to affect each other.
[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility model content:
[0005] The utility model aims to provide a barrel cover rolling curtain mechanism for wafer coating, thereby overcoming the defects in the above-mentioned prior art.
[0006] To achieve the above-mentioned purpose, the utility model provides a rolling curtain mechanism for a barrel cover for wafer coating, comprising a frame, a rolling curtain member, and a transmission mechanism; the frame is arranged above a glue coating barrel and a cleaning barrel, a transmission mechanism is arranged on the frame, the transmission mechanism is connected to the rolling curtain member, and the glue coating barrel and the cleaning barrel both have corresponding rolling curtain members and transmission mechanisms; the transmission mechanism comprises a servo motor, a transmission belt mechanism, and a guide rail, the servo motor is arranged in the frame, the transmission belt mechanism and the guide rail are arranged on the frame on both sides of the glue coating barrel and the cleaning barrel, and the servo motor is connected to the transmission belt mechanism; the rolling curtain member comprises a reel, a film pulling member, and a fixing rod, the reel is arranged on the frame, both ends of the reel are respectively connected to the transmission belt mechanism, a film pulling member is wound on the reel, a fixing rod is arranged at the front end of the film pulling member, and both ends of the fixing rod are respectively arranged on the guide rails on both sides of the glue coating barrel and the cleaning barrel; through the cooperation of the servo motor, the transmission belt mechanism, the reel, the film pulling member, and the fixing rod, openable and closable rolling curtains are formed above the glue coating barrel and the cleaning barrel respectively.
[0007] Preferably, in the technical solution, the transmission belt mechanism includes a transmission belt, a driving wheel, a driven wheel, and an idler wheel. The driving wheel is connected to a servo motor, and the driven wheel and the idler wheel are respectively arranged at both ends of the guide rail, and the driven wheel is connected to the end of the reel. The driving wheel and the driven wheel, and the driven wheel and the idler wheel are respectively connected by transmission belts, and the transmission belt between the driven wheel and the idler wheel is passed through a fixed rod; the reel is driven to rotate by the servo motor, the driving wheel, and the driven wheel, and the fixed rod is driven to move along the guide rail by the transmission belt between the driven wheel and the idler wheel, which drives the film to be pulled open and closed, and openable and closable roller curtains are formed above the glue coating barrel and the cleaning barrel, respectively.
[0008] Preferably, in the technical solution, a limit switch is provided on the frame, the limit switch is provided on the sides at both ends of the guide rail, the limit switch is communicatively connected with the servo motor, and the opening and closing of the roller shutter can be controlled more accurately through the cooperation between the limit switch and the servo motor.
[0009] Preferably, in the technical solution, the pulling film is made of transparent film material, which is convenient for observing the conditions in the glue coating barrel and the cleaning barrel.
[0010] Compared with the prior art, the utility model has the following beneficial effects:
[0011] The fixed barrel cover is replaced by an openable and closable rolling shutter mechanism. When the barrel cover is opened, the film is stored on the reel. When the barrel cover is closed, the fixed rod drives the film to cover the glue barrel and the cleaning barrel, which greatly reduces the floor space. The rolling shutter mechanism replaces the spring barrel cover, and the barrel cover has good opening and closing stability and long service life. Description of the drawings:
[0012] Figure 1 This is a schematic diagram of the structure of the roller shutter mechanism of the barrel cover for wafer coating of the utility model;
[0013] Figure 2 This is a schematic diagram of the assembly of the barrel cover rolling curtain mechanism for wafer coating of the utility model. Specific implementation method:
[0014] The specific implementation modes of the present invention are described in detail below, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.
[0015] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.
[0016] like Figure 1-2As shown, a barrel cover rolling curtain mechanism for wafer coating comprises a frame 1, a rolling curtain member 2, and a transmission mechanism 3; the frame 1 is arranged above a glue coating barrel 4 and a cleaning barrel 5, and a transmission mechanism 3 is arranged on the frame 1, and the transmission mechanism 3 is connected to the rolling curtain member 2, and the glue coating barrel 3 and the cleaning barrel 4 each have a corresponding rolling curtain member 2 and a transmission mechanism 3; the transmission mechanism 3 comprises a servo motor 30, a transmission belt 31, a driving wheel 32, a driven wheel 33, an idler wheel 34, and a guide rail 35, the servo motor 30 is arranged in the frame 1, and the guide rail 35 is arranged on the frame 1 on both sides of the glue coating barrel 4 and the cleaning barrel 5, the servo motor 30 is connected to the driving wheel 32, the driven wheel 33 and the idler wheel 34 are respectively arranged at both ends of the guide rail 35, and the driving wheel 32 and the driven wheel 33 are arranged between the driving wheel 32 and the driven wheel 33. , the driven wheel 33 and the idler wheel 34 are connected respectively by a transmission belt 31; the rolling curtain member 2 includes a reel 20, a pulling film 21, and a fixed rod 22, the reel 20 is arranged on the frame 1, and the two ends of the reel 20 are respectively connected to the driven wheel 33, a pulling film 21 is wound on the reel 20, and the pulling film 21 is made of transparent film material, which is convenient for observing the conditions in the glue barrel 4 and the cleaning barrel 5. A fixed rod 22 is arranged at the front end of the pulling film 21, and the two ends of the fixed rod 22 are respectively arranged on the guide rails 35 on both sides of the glue barrel 4 and the cleaning barrel 5, and the transmission belt 31 between the driven wheel 33 and the idler wheel 34 is inserted into the fixed rod 22; a limit switch 6 is arranged on the frame 1, and the limit switch 6 is arranged on the side of the two ends of the guide rail 35, and the limit switch 6 is communicatively connected with the servo motor 30.
[0017] In the wafer coating process, when the wafer needs to be coated, the rolling shutter mechanism on the glue barrel 4 is turned on, the servo motor 30 is started, and the servo motor 30, the driving wheel 32, and the driven wheel 33 drive the reel 20 to rotate, and the transmission belt 31 between the driven wheel 33 and the idler wheel 34 drives the fixed rod 22 to move along the guide rail 35, and drives the film 21 to be rolled up to the reel 20, until the fixed rod 22 passes the limit switch 6 near the driven wheel 33, the film 21 above the glue barrel 4 is completely rolled up, and the glue barrel 4 is opened; when the wafer coating is completed, the servo motor 30 is reversed, the fixed rod 22 moves in the opposite direction on the guide rail 35, the reel 20 rotates in the opposite direction, and the film 21 is pulled out from the reel 20, until the fixed rod 22 passes the limit switch 6 near the idler wheel 34, and the film 21 is completely covered above the glue barrel 4. When the wafer needs to be cleaned, the opening and closing steps of the rolling shutter above the cleaning barrel 5 are consistent with the opening and closing steps of the rolling shutter above the glue barrel 4.
[0018] The fixed barrel cover is replaced by an openable and closable rolling shutter mechanism. When the barrel cover is opened, the film is stored on the reel. When the barrel cover is closed, the fixed rod drives the film to cover the glue barrel and the cleaning barrel, which greatly reduces the floor space. The rolling shutter mechanism replaces the spring barrel cover, and the barrel cover has good opening and closing stability and long service life.
[0019] The foregoing description of specific exemplary embodiments of the utility model is for the purpose of illustration and illustration. These descriptions are not intended to limit the utility model to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the utility model and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the utility model and various different options and changes. The scope of the utility model is intended to be defined by the claims and their equivalents.
Claims
1. A barrel cover rolling curtain mechanism for wafer coating, characterized in that: It includes a frame, a rolling curtain member, and a transmission mechanism; the frame is arranged above the glue coating barrel and the cleaning barrel, and the transmission mechanism is arranged on the frame, and the transmission mechanism is connected to the rolling curtain member, and the glue coating barrel and the cleaning barrel have corresponding rolling curtain members and transmission mechanisms; the transmission mechanism includes a servo motor, a transmission belt mechanism, and a guide rail, the servo motor is arranged in the frame, the transmission belt mechanism and the guide rail are arranged on the frame on both sides of the glue coating barrel and the cleaning barrel, and the servo motor is connected to the transmission belt mechanism; the rolling curtain member includes a reel, a film pulling member, and a fixed rod, the reel is arranged on the frame, and the two ends of the reel are respectively connected to the transmission belt mechanism, a film pulling member is wound on the reel, a fixing rod is arranged at the front end of the film pulling member, and the two ends of the fixing rod are respectively arranged on the guide rails on both sides of the glue coating barrel and the cleaning barrel; the servo motor, the transmission belt mechanism, the reel, the film pulling member, and the fixing rod cooperate to form an openable and closable rolling curtain above the glue coating barrel and the cleaning barrel.
2. The barrel cover rolling curtain mechanism for wafer coating according to claim 1, characterized in that: The transmission belt mechanism includes a transmission belt, a driving wheel, a driven wheel, and an idler wheel. The driving wheel is connected to a servo motor. The driven wheel and the idler wheel are respectively arranged at two ends of the guide rail. The driven wheel is connected to the end of the reel. The driving wheel and the driven wheel, and the driven wheel and the idler wheel are respectively connected by transmission belts. The transmission belt between the driven wheel and the idler wheel is inserted into a fixed rod. The reel is driven to rotate by the servo motor, the driving wheel, and the driven wheel. The fixed rod is driven to move along the guide rail by the transmission belt between the driven wheel and the idler wheel, which drives the film pulling to open and close, and forms openable and closable roller curtains above the glue coating barrel and the cleaning barrel, respectively.
3. The wafer coating barrel cover rolling curtain mechanism according to claim 1, characterized in that: The frame is provided with limit switches, which are arranged on the sides of both ends of the guide rails, and the limit switches are communicatively connected with the servo motor.
4. The barrel cover rolling curtain mechanism for wafer coating according to claim 1, characterized in that: The pulling film is made of transparent film material.