Three-dimensional X-
ray imaging
system (5) configured to generate a
transmission image of a
region of interest (31) in an object (30), the
system (5) comprising: at least one position-sensitive X-
ray detector (50) comprising at least one active element (52); an X-
ray source (20) comprising an X-ray-transparent vacuum window (29) with an outer surface (27), wherein the outer surface (27) is located at a distance of less than 70 millimeters from the
region of interest (31), wherein the X-ray source (20) comprises at least one X-ray target (28) configured for bombardment with an
electron beam (24) to produce diverging X-rays (60), wherein the diverging X-rays (60) extend from an X-ray focal spot having a width in a cross-
sectional plane, the cross-
sectional plane comprising the
electron beam (24) and an X-ray propagation axis (10) extending from the X-ray focal spot through the
region of interest (31) of the object (30) to the at least one active element (52) of the at least one position-sensitive X-ray
detector (50), wherein at least some of the diverging X-rays (60) exit the vacuum window (29) and propagate along the X-ray propagation axis (10), wherein the diverging X-rays (60) are received by the at least one active element (52) and have propagation paths within a
divergence angle (12) centered on the X-ray propagation axis (10) of more than 1 degree, wherein the X-ray propagation axis (10) forms a first angle (11) with the outer surface (27) of the vacuum window (29), wherein the first angle (11) is in a range of 3 degrees to 45 degrees, wherein the X-ray focal spot has an effective width in the cross-
sectional plane along the X-ray propagation axis (10), wherein the effective width is less than the width; at least one sample movement stage (80) configured to rotate the object (30) about a rotation axis (19) and configured such that the rotation axis (19) has a second angle (16) relative to the X-ray propagation axis (10), the second angle (16) being in a range of 45 degrees to 90 degrees; and a sample holder (85) on the at least one sample movement table (80), wherein the sample holder (85) is configured to hold the object (30), the sample holder (85) comprising a first section (86) in the propagation paths of at least some of the diverging X-rays (60) that propagate through the object (30) to the at least one position-sensitive X-ray
detector (50), wherein the first section (86) has an X-ray transmission of more than 30% for X-rays with energies of more than 50% of a maximum X-ray energy of an X-ray spectrum of the diverging X-rays (60), wherein the
system (5) further comprises a thermal cooling mechanism configured to reduce the heating of the object (30) by the heat generated by the X-ray source (20), wherein the thermal cooling mechanism comprises an
infrared (IR) reflective material between the vacuum window (29) and the object (30), wherein the IR reflective material has a thickness of less than 1,500 micrometers and is configured to reflect the heat generated by the X-ray source (20) so that it does not reach the object (30) and the sample holder (85).