Transmission structure of automatic regeneration device of low-temperature pump

Abstract

According to the transmission structure of the automatic regeneration device of the low-temperature pump, the motor drives the bearing assembly to rotate, so that the piston connecting frame is driven to move, the piston rod is driven to do linear reciprocating motion, the first-stage refrigeration unit and the second-stage refrigeration unit are driven to do synchronous motion, and compressed air is rapidly compressed for refrigeration; the motor rotates to drive the piston assembly to move linearly, so that equipment space and motor energy consumption are saved, and the displacement stroke of the piston assembly is reduced; radiated heat is reflected through the adsorption assembly, temperature rise is prevented, and water vapor and impurities in gas are adsorbed. The temperature sensor is arranged to monitor the temperature of the adsorption assembly in real time, and when the low-temperature pump is not used, gas in the vacuum cavity is diluted through the nitrogen introduction seat to recover normal atmospheric pressure, so that regeneration of the low-temperature pump is achieved.

Description

Technical Field

[0001] This utility model relates to the field of cryogenic pump technology, and more specifically, to a transmission structure for an automated regeneration device for cryogenic pumps. Background Art

[0002] Cryopumps are vacuum pumps that exhaust gas molecules by trapping them in a cryogenically cooled plate through condensation or adsorption. They are commonly used to create the clean vacuum environments required in semiconductor circuit manufacturing processes. They achieve the highest possible pumping speed and lowest ultimate pressure, making them widely used in semiconductor and integrated circuit research and production, as well as in molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, and space simulation devices.

[0003] The closest prior art to this application, patented invention with publication number CN 118407897 A, discloses a composite cryopump with a high ultimate vacuum degree, comprising: a refrigerator, a cryopump housing, a refrigeration unit, a first adsorption unit, and a second adsorption unit. The cryopump housing has an inner cavity, is connected to the refrigerator, and is equipped with a refrigeration unit extending into the inner cavity. The first adsorption unit is connected to the refrigeration unit and is capable of adsorbing gas condensed by the refrigeration unit. The second adsorption unit is connected to the cryopump housing and is capable of adsorbing active gas in the inner cavity. When the present invention is in use, the inner cavity is connected to an external container, the refrigerator is started, and the refrigerator rapidly cools and evacuates the air in the inner cavity and container through the refrigeration unit. The first adsorption unit adsorbs, condenses, and captures the gas. The second adsorption unit is started and, after being started, gradually adsorbs the remaining non-condensable gas in the vacuum cavity, thereby enabling the cryopump to continue to increase the vacuum degree in the inner cavity and container.

[0004] Current cryogenic pumps require regeneration after becoming saturated with a large number of water molecules and other gases. However, during the regeneration process, the amount of water molecules captured by condensation is too large to be completely removed by conventional regeneration methods, which affects the regeneration time and reduces production efficiency. Furthermore, the transmission is usually driven by cylinders, which results in a large equipment footprint, a long displacement stroke, and high energy consumption. Utility Model Content

[0005] In view of this, in order to solve the above problems, this utility model proposes a transmission structure for an automated regeneration device for a cryogenic pump. A motor 64 drives the bearing assembly 63 to rotate, which in turn drives the piston connecting frame 616 to move, which in turn drives the piston rod 611 to perform linear reciprocating motion. This, in turn, drives the primary refrigeration unit 7 and the secondary refrigeration unit 8 to move synchronously, enabling rapid compression and cooling of air. Furthermore, the linear motion of the piston assembly 61 driven by the rotation of the motor 64 saves equipment space and motor energy consumption, and reduces the displacement stroke of the piston assembly 61. The adsorption assembly 24 reflects the radiated heat, preventing temperature rise and adsorbing water vapor and impurities in the gas. A temperature sensor 3 monitors the temperature of the adsorption assembly 24 in real time. When not in use, nitrogen inlet seat 4 dilutes the gas in the vacuum chamber to restore it to normal atmospheric pressure, thus achieving the regeneration of the cryogenic pump 2.

[0006] A transmission structure for an automated regeneration device for a cryogenic pump includes a cryogenic pump 2 and a refrigerator 1. One side of the cryogenic pump 2 is connected to the refrigerator 1. The cryogenic pump 2 includes an outer shell 21, an inner cover 22, and an inner cavity 23. A sandwich structure is provided between the outer shell 21 and the inner cover 22. The inner cavity 23 is formed by the inner cover 22, with the inner cover 22 opening upwards. The upper part of the inner cover 22 communicates with a cavity to be evacuated. An adsorption assembly 24 is provided inside the inner cavity 23. The refrigerator 1 includes a primary refrigeration unit 7 and a secondary refrigeration unit 8. The primary refrigeration unit 7 is connected to one end of the outer shell 21. The secondary refrigeration unit 8 is located in the inner cavity 23, with one end connected to the primary refrigeration unit 7 and the other end connected to the adsorption assembly 24. Its features include… The refrigeration unit 1 has a transmission structure 6 at one end, which includes a piston assembly 61, a bearing assembly 63, and a motor 64. One end of the motor 64 is connected to the bearing assembly 63. The piston assembly 61 is located above the bearing assembly 63. The piston assembly 61 includes a piston rod 611 and a piston connecting frame 616, which are integrally formed. One end of the piston rod 611 is connected to the first-stage refrigeration unit 7. The piston connecting frame 616 abuts against the top of the bearing assembly 63. The motor 64 drives the bearing assembly 63 to rotate, thereby driving the piston connecting frame 616 to move, which in turn drives the piston rod 611 to perform linear reciprocating motion, thus rapidly compressing and cooling the air.

[0007] In some embodiments, a piston connecting block 62 is provided on the outer side of the end of the primary refrigeration unit 7 connected to the piston rod 611. A slot 622 is provided in the middle of the piston connecting block 622, and a countersunk hole 623 extends radially outward from the slot 622. A first fixing ring 612 is sleeved on the outer side of one end of the piston rod 611. A fixing pin 613 passes through the first fixing ring 612 and one end of the piston rod 611, so that the first fixing ring 612 and the piston rod 611 move synchronously.

[0008] In some embodiments, the first fixing ring 612 has a protrusion 614 extending radially outward, and the protrusion 614 corresponds to the countersunk hole 623 on the slot 622, so that when the piston rod 611 moves, the first fixing ring 612 and the piston rod 611 will not swing left and right in the piston connecting block 62, thereby making the piston connecting block 62 and the piston rod 611 move synchronously.

[0009] In some embodiments, the piston connecting block 62 is also provided with a positioning pin 621 extending toward the first fixed ring 612, and the positioning pin 621 is engaged with the protrusion 614, so that when the piston reciprocates, the piston connecting block 62 presses against the secondary refrigeration unit 8 and the first fixed ring 612 at the same time, so that the first fixed ring 612 will not produce rotational shaking with the secondary refrigeration unit 8.

[0010] In some embodiments, a second fixing ring 615 is sleeved on the outer side of the end of the piston rod 611 away from the primary refrigeration unit 7. The first fixing ring 612 and the second fixing ring 615 cooperate so that the center line of the piston rod 611 is located on a horizontal straight line. A sliding cavity 9 is provided at the tail end of the refrigerator 1. The reserved length of the sliding cavity 9 is the displacement stroke of the piston rod 611. A sealing block is provided at the outer end of the sliding cavity 9, so that the piston rod 611 can reciprocate in a closed chamber.

[0011] In some embodiments, the bearing assembly 63 includes an eccentric shaft 631, a bearing 636, and a rotating shaft 637. A through hole is provided inside the eccentric shaft 631. The rotating shaft 637 is arranged in the through hole and fits tightly with the inner wall of the through hole. The bearing 636 is sleeved on the outer side of the eccentric shaft 631. An eccentric rod 634 is provided above the eccentric shaft 631. A rotating block 635 is sleeved on the eccentric rod 634. The edge of the rotating block 635 abuts against the inner edge of the piston connecting frame 616. The motor 64 drives the rotating shaft 637 to rotate, and in turn drives the eccentric shaft 631, the bearing 636, and the rotating block 635 to move synchronously. The eccentric rod 634 rotates around the rotating shaft 637, causing the piston connecting frame to produce a forward and backward displacement, thereby causing the piston rod 611 to reciprocate back and forth.

[0012] In some embodiments, a temperature sensor 3 is provided outside the refrigerator 1 , and a sensing end of the temperature sensor 3 is connected to the adsorption component 24 inside the inner cavity 23 for sensing whether the adsorption component 24 reaches a set temperature.

[0013] In some embodiments, the refrigerator 1 is further provided with a nitrogen inlet seat 4, through which external nitrogen is supplied to the cryogenic pump 2 to restore it to normal atmospheric pressure.

[0014] In some embodiments, a safety valve 5 is further provided on the outside of the refrigerator 1 for opening the safety valve 5 for exhaust when the cryopump 2 is not needed.

[0015] The working principle of the present invention is as follows: the compressor is connected to the outside of the refrigerator, and the gaseous helium is compressed by the compressor. After entering the refrigerator, the rotation of the motor drives the bearing assembly to rotate, thereby driving the piston assembly to move back and forth in a straight line, so that the gaseous helium expands when passing through the primary refrigeration unit and the secondary refrigeration unit, thereby absorbing external heat, cooling the low-temperature pump cavity for the first time and evacuating the vacuum, which is mainly used to condense water vapor, and reflect the radiated temperature through the adsorption component to prevent the temperature from rising, and adsorb water vapor and impurities in the gas. After the pressure reaches 40Pa, the pressure is maintained for 5 minutes and the inner cavity pressure is always kept below 65Pa. This is normal, indicating that the cryopump is not leaking. If it is above 65Pa, it is leaking and needs to be pumped out again for inspection; after pressure maintenance, the secondary refrigeration unit is used to cool down and evacuate the cavity for the second time, which is mainly used to condense the gas with high vapor pressure of the saturated vapor body. The adsorption component condenses and adsorbs again, so that the pressure reaches below 10Pa and the temperature is below 20K. The vacuuming time is 1.5-2h.

[0016] Beneficial effects of the present invention: The present invention proposes a transmission structure for an automatic regeneration device for a cryogenic pump, in which the bearing assembly 63 is driven to rotate by the motor 64, thereby driving the piston connecting frame 616 to move, thereby driving the piston rod 611 to perform linear reciprocating motion, thereby driving the first-stage refrigeration unit 7 and the second-stage refrigeration unit 8 to move synchronously, so that the compressed air is quickly refrigerated; and the linear motion of the piston assembly 61 is driven by the rotation of the motor 64, which saves equipment space and motor energy consumption, and reduces the displacement stroke of the piston assembly 61; the radiated heat is reflected by the adsorption assembly 24 to prevent the temperature from rising and to adsorb water vapor and impurities in the gas; the temperature of the adsorption assembly 24 is monitored in real time by setting a temperature sensor 3, and the gas in the vacuum chamber is diluted by the nitrogen inlet seat 4 when not in use to restore it to normal atmospheric pressure, thereby realizing the regeneration of the cryogenic pump 2. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is the overall structural diagram of the cryopump automatic regeneration device of the present utility model.

[0018] Figure 2 This is a cross-sectional view of the automatic regeneration device for cryopumps of the present invention.

[0019] Figure 3 This is a partial cross-section of the transmission structure of the cryopump automatic regeneration device of the utility model. Figure 1 .

[0020] Figure 4 This is a partial cross-section of the transmission structure of the cryopump automatic regeneration device of the utility model. Figure 1 .

[0021] Figure 5 This is a partial cross-section of the transmission structure of the cryopump automatic regeneration device of the utility model. Figure 2 .

[0022] Description of main component symbols

[0023] Refrigerator 1, transmission structure 6, piston assembly 61, piston rod 611, first fixing ring 612, fixing pin 613, protrusion 614, second fixing ring 615, piston connecting frame 616, piston connecting block 62, positioning pin 621, slot 622, countersunk hole 623, bearing assembly 63, eccentric shaft 631, eccentric rod 634, rotating block 635, bearing 636, rotating shaft 637, motor 64, primary refrigeration unit 7, secondary refrigeration unit 8, sliding cavity 9, cryopump 2, outer shell 21, inner cover 22, inner cavity 23, adsorption assembly 24, temperature sensor 3, nitrogen inlet seat 4, safety valve 5.

[0024] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. DETAILED DESCRIPTION

[0025] like Figure 1 The diagram shown is an overall structural diagram of the transmission structure of the automated regeneration device for cryogenic pumps of this utility model; as shown... Figure 2 As shown, it is a cross-sectional view of the transmission structure of the cryopump automatic regeneration device of the present invention; Figure 3 The image shown is a partial cross-section of the transmission structure of the automated regeneration device for cryogenic pumps according to this invention. Figure 1 ;like Figure 4 The figure shows a partial cross-section of the transmission structure of the cryopump automatic regeneration device of the present invention. Figure 1 ;like Figure 5 The image shown is a partial cross-section of the transmission structure of the automated regeneration device for cryogenic pumps according to this invention. Figure 2 . Example 1:

[0026] A transmission structure for an automated regeneration device for a cryogenic pump includes a cryogenic pump 2 and a refrigerator 1. One side of the cryogenic pump 2 is connected to the refrigerator 1. The cryogenic pump 2 includes an outer shell 21, an inner cover 22, and an inner cavity 23. A sandwich structure is provided between the outer shell 21 and the inner cover 22. The inner cavity 23 is formed by the inner cover 22, with the inner cover 22 opening upwards. The upper part of the inner cover 22 communicates with a cavity to be evacuated. An adsorption assembly 24 is provided inside the inner cavity 23. The refrigerator 1 includes a primary refrigeration unit 7 and a secondary refrigeration unit 8. The primary refrigeration unit 7 is connected to one end of the outer shell 21. The secondary refrigeration unit 8 is located in the inner cavity 23, with one end connected to the primary refrigeration unit 7 and the other end connected to the adsorption assembly 24. Its features include… The refrigeration unit 1 has a transmission structure 6 at one end, which includes a piston assembly 61, a bearing assembly 63, and a motor 64. One end of the motor 64 is connected to the bearing assembly 63. The piston assembly 61 is located above the bearing assembly 63. The piston assembly 61 includes a piston rod 611 and a piston connecting frame 616, which are integrally formed. One end of the piston rod 611 is connected to the first-stage refrigeration unit 7. The piston connecting frame 616 abuts against the top of the bearing assembly 63. The motor 64 drives the bearing assembly 63 to rotate, thereby driving the piston connecting frame 616 to move, which in turn drives the piston rod 611 to perform linear reciprocating motion, thus rapidly compressing and cooling the air.

[0027] A piston connecting block 62 is provided on the outer side of the end of the primary refrigeration unit 7 connected to the piston rod 611. A slot 622 is provided in the middle of the piston connecting block 622. A countersunk hole 623 extends radially outward from the slot 622. A first fixing ring 612 is sleeved on the outer side of one end of the piston rod 611. A fixing pin 613 passes through the first fixing ring 612 and one end of the piston rod 611, so that the first fixing ring 612 and the piston rod 611 move synchronously.

[0028] The first fixing ring 612 has a protrusion 614 extending radially outward. The protrusion 614 corresponds to the countersunk hole 623 on the slot 622, so that when the piston rod 611 moves, the first fixing ring 612 and the piston rod 611 will not sway left and right in the piston connecting block 62, thereby making the piston connecting block 62 and the piston rod 611 move synchronously.

[0029] The piston connecting block 62 is also provided with a positioning pin 621 extending towards the first fixed ring 612. The positioning pin 621 is engaged with the protrusion 614, so that when the piston reciprocates, the piston connecting block 62 abuts against the secondary refrigeration unit 8 and the first fixed ring 612 at the same time, so that the first fixed ring 612 will not rotate or shake with the secondary refrigeration unit 8.

[0030] A second fixing ring 615 is sleeved on the outer side of the piston rod 611 away from the first-stage refrigeration unit 7. The first fixing ring 612 and the second fixing ring 615 cooperate to make the center line of the piston rod 611 lie on a horizontal straight line. The tail end of the refrigeration unit 1 is provided with a sliding cavity 9. The length of the sliding cavity 9 is reserved for the displacement stroke of the piston rod 611. A sealing block is provided on one side of the sliding cavity 9, so that the piston rod 611 reciprocates in the sealed cavity.

[0031] The bearing assembly 63 includes an eccentric shaft 631, a bearing 636, and a rotating shaft 637. The eccentric shaft 631 has a through hole inside, and the rotating shaft 637 is disposed in the through hole and tightly fitted to the inner wall of the through hole. The bearing 636 is sleeved on the outer side of the eccentric shaft 631. An eccentric rod 634 is provided above the eccentric shaft 631, and a rotating block 635 is sleeved on the eccentric rod 634. The edge of the rotating block 635 abuts against the inner edge of the piston connecting frame 616. The motor 64 drives the rotating shaft 637 to rotate, and sequentially drives the eccentric shaft 631, the bearing 636, and the rotating block 635 to move synchronously. The eccentric rod 634 rotates around the rotating shaft 637, causing the piston connecting frame to move back and forth, thereby causing the piston rod 611 to reciprocate back and forth.

[0032] A temperature sensor 3 is provided outside the refrigerator 1 , and a sensing end of the temperature sensor 3 is connected to the adsorption component 24 inside the inner cavity 23 for sensing whether the adsorption component 24 reaches a set temperature.

[0033] A nitrogen inlet seat 4 is further provided on the outside of the refrigerator 1 , through which external nitrogen is introduced into the cryopump 2 to restore the cryopump 2 to normal atmospheric pressure.

[0034] A safety valve 5 is further provided on the outside of the refrigerator 1 , which is used to open the safety valve 5 for exhaust when the cryopump 2 is not needed.

[0035] Beneficial effects of the present invention: The present invention proposes a transmission structure for an automatic regeneration device for a cryogenic pump, in which the bearing assembly 63 is driven to rotate by the motor 64, thereby driving the piston connecting frame 616 to move, thereby driving the piston rod 611 to perform linear reciprocating motion, thereby driving the first-stage refrigeration unit 7 and the second-stage refrigeration unit 8 to move synchronously, so that the compressed air is quickly refrigerated; and the linear motion of the piston assembly 61 is driven by the rotation of the motor 64, which saves equipment space and motor energy consumption, and reduces the displacement stroke of the piston assembly 61; the radiated heat is reflected by the adsorption assembly 24 to prevent the temperature from rising and to adsorb water vapor and impurities in the gas; the temperature of the adsorption assembly 24 is monitored in real time by setting a temperature sensor 3, and the gas in the vacuum chamber is diluted by the nitrogen inlet seat 4 when not in use to restore it to normal atmospheric pressure, thereby realizing the regeneration of the cryogenic pump 2.

[0036] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A transmission structure of a cryopump automatic regeneration device, comprising a cryopump (2) and a refrigerator (1), wherein one side of the cryopump (2) is connected to the refrigerator (1), the cryopump (2) comprises an outer shell (21), an inner cover (22), and an inner cavity (23), an interlayer is left between the outer shell (21) and the inner cover (22), the inner cavity (23) is surrounded by the inner cover (22), the inner cover (22) opens upward, the upper part of the inner cover (22) is communicated with a cavity to be evacuated, an adsorption component (24) is arranged inside the inner cavity (23), the refrigerator (1) comprises a primary refrigeration unit (7) and a secondary refrigeration unit (8), the primary refrigeration unit (7) is connected to one end of the outer shell (21), the secondary refrigeration unit (8) is arranged in the inner cavity (23), one end of the secondary refrigeration unit (8) is connected to the primary refrigeration unit (7), and the other end is connected to the adsorption component (24), characterized in that: A transmission structure (6) is provided at one end of the refrigerator (1), the transmission structure (6) comprising a piston assembly (61), a bearing assembly (63), and a motor (64); one end of the motor (64) is connected to the bearing assembly (63); a piston assembly (61) is provided above the bearing assembly (63); the piston assembly (61) comprises a piston rod (611) and a piston connecting frame (616); the piston rod (611) and the piston connecting frame (616) are an integrally formed structure; one end of the piston rod (611) is connected to the primary refrigeration unit (7); the piston connecting frame (616) is in contact with the top of the bearing assembly (63); the bearing assembly (63) is driven to rotate by the motor (64), thereby driving the piston connecting frame (616) to move, thereby driving the piston rod (611) to perform linear reciprocating motion, so that the compressed air is rapidly refrigerated.

2. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A piston connecting block (62) is provided on the outer side of one end of the primary refrigeration unit (7) connected to the piston rod (611); a slot (622) is provided in the middle of the piston connecting block (62); a countersunk hole (623) extends radially outward from the slot (622); a first fixing ring (612) is sleeved on the outer side of one end of the piston rod (611); a fixing pin (613) penetrates the first fixing ring (612) and one end of the piston rod (611), so that the first fixing ring (612) and the piston rod (611) move synchronously.

3. The transmission structure of the cryopump automatic regeneration device according to claim 2, characterized in that: The first fixing ring (612) has a protrusion (614) extending radially outward, and the protrusion (614) corresponds to the countersunk hole (623) on the slot (622), so that when the piston rod (611) moves, the first fixing ring (612) and the piston rod (611) will not shake left and right in the piston connecting block (62), thereby allowing the piston connecting block (62) and the piston rod (611) to move synchronously.

4. The transmission structure of the cryopump automatic regeneration device according to claim 2, characterized in that: The piston connection block (62) is also provided with a positioning pin (621) extending toward the first fixing ring (612), and the positioning pin (621) is engaged with the protrusion (614), so that when the piston reciprocates, the piston connection block (62) abuts against the secondary refrigeration unit (8) and the first fixing ring (612) at the same time.

5. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A second fixing ring (615) is sleeved on the outer side of the end of the piston rod (611) away from the primary refrigeration unit (7); the first fixing ring (612) and the second fixing ring (615) cooperate so that the center line of the piston rod (611) is located on a horizontal straight line; a sliding cavity (9) is provided at the rear end of the refrigerator (1); the reserved length of the sliding cavity (9) is the displacement stroke of the piston rod (611); and a sealing block is provided at the outer end of the sliding cavity (9).

6. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: The bearing assembly (63) comprises an eccentric shaft (631), a bearing (636), and a rotating shaft (637). A through hole is provided inside the eccentric shaft (631). The rotating shaft (637) is arranged in the through hole and is tightly fitted with the inner wall of the through hole. The bearing (636) is sleeved on the outer side of the eccentric shaft (631). An eccentric rod (634) is provided above the eccentric shaft (631). A rotating block (635) is sleeved on the eccentric rod (634). The edge of the rotating block (635) abuts against the inner edge of the piston connection frame (616). The motor (64) drives the rotating shaft (637) to rotate, and in turn drives the eccentric shaft (631), the bearing (636), and the rotating block (635) to move synchronously. The eccentric rod (634) rotates around the rotating shaft (637), so that the piston connection frame is displaced forward and backward, thereby causing the piston rod (611) to reciprocate forward and backward.

7. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A temperature sensor (3) is provided outside the refrigerator (1), and a sensing end of the temperature sensor (3) is connected to an adsorption component (24) inside the inner cavity (23).

8. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A nitrogen inlet seat (4) is also provided outside the refrigerator (1).

9. The transmission structure of the cryopump automatic regeneration device according to claim 1, characterized in that: A safety valve (5) is also provided outside the refrigerator (1).

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