Detection device

Abstract

The utility model relates to electronic device detection equipment comprising a housing used for accommodating at least one group of aligned bearing trays, and each bearing tray is provided with a plurality of accommodating grooves used for storing electronic devices; the position sensor is used for detecting whether the at least one group of aligned bearing trays reach a preset vertical position in the vertical direction or not and generating a position indication signal; the light source is arranged on one side in the shell and is positioned to enable light rays emitted by the light source to penetrate through the plurality of accommodating grooves of the at least one group of aligned bearing trays; and the projection screen is arranged to be opposite to the light source and is used for receiving the light passing through the accommodating groove so as to form projection on the projection screen.

Description

Technical Field

[0001] The utility model relates to semiconductor detection, in particular to detection of leftover devices in the process of semiconductor device transfer. Background Art

[0002] In the semiconductor packaging and testing process, in order to improve the device processing efficiency, it is necessary to transfer and process multiple electronic devices or components such as wafers or bare chips at one time. For this purpose, a tray is usually used to carry and transfer multiple devices to be processed, wherein a plurality of receiving slots are provided on the tray, each receiving slot carrying one device, so that multiple devices can be processed simultaneously in one batch.

[0003] Usually, after all devices in a carrier tray are processed at a process node, these electronic devices need to be removed from the carrier tray so that the tray can continue to receive the next batch of devices to be processed. However, due to factors such as tool failure or misoperation, individual devices may be left in one or more receiving slots of the tray, so that when the tray is returned to receive the next batch of devices, two devices to be processed will be mistakenly placed in each slot of this or these receiving slots, which will cause damage to the devices and may even damage the operating equipment at the node.

[0004] Currently, a loading cart that complies with the JEDEC industry standard (hereinafter referred to as a 'JLP cart') is usually used to carry and transfer one or more sets of pallets, where the pallets in the JLP cart are in a slot-aligned state. Currently, it is usually necessary to use naked eye inspection or handheld tools to detect whether there are any leftover components in the slots of the returned one or more sets of pallets, but it is clear that this detection method can be more efficient. Summary of the invention

[0005] The utility model provides a detection device which can quickly detect whether there are residual devices in a carrying tray based on optical detection, and can detect multiple carrying trays at one time, thereby greatly improving the detection efficiency.

[0006] According to the utility model, a detection device is provided, comprising a shell for accommodating at least one group of aligned carrying trays, wherein each carrying tray is arranged with a plurality of receiving slots for storing electronic devices; a position sensor for detecting whether the at least one group of aligned carrying trays reaches a predetermined vertical position in the vertical direction; a light source, arranged on one side of the shell and positioned so that the light emitted from the light source passes through the plurality of receiving slots of the at least one group of aligned carrying trays; and a projection screen, arranged opposite to the light source and used to receive the light passing through the receiving slots to form a projection on the projection screen.

[0007] Preferably, the detection device also includes a first controller coupled to the position sensor to receive a position indication signal from the position sensor, and generates a motor drive signal when the position indication signal indicates that the at least one group of aligned carrying trays has not reached the predetermined vertical position in the vertical direction.

[0008] Preferably, the shell also includes a conveying mechanism, including a lifting plate for lifting the at least one group of aligned carrying trays; and a driving motor for driving the lifting plate to rise along a vertical track based on the motor driving signal so that the at least one group of aligned carrying trays reaches the predetermined vertical position.

[0009] Preferably, the detection device further includes a camera for photographing the projection to generate a projection image, and a second controller coupled to the camera for determining whether the electronic device is left in the receiving slot of the at least one group of aligned carrying trays based on the projection image.

[0010] Preferably, the second controller is integrated with the first controller, wherein when the position sensor detects that the predetermined vertical position is reached, the first controller controls the light source to emit the light and controls the camera to capture the projection image at the same time.

[0011] Preferably, the projection screen is selected from a material having a transmittance ranging from 50% to 90%, including one of the following: PE, PVC, PP and PC.

[0012] Preferably, the detection device further comprises an information prompting unit, including a display and / or a speaker, wherein when the second controller determines that the electronic device is left behind, the information prompting unit is controlled to present an alarm message.

[0013] Preferably, the first controller or the second controller is configured to generate a reset signal within a predetermined time since the carried tray reaches the predetermined vertical position; wherein the drive motor restores the lifting plate to the starting position based on the reset signal.

[0014] Preferably, the detection device further includes that the conveying mechanism also includes a limiting device for preventing the carrying tray from exceeding the vertical position when rising along the vertical track.

[0015] Preferably, the detection device further includes the shell further including a locking mechanism for locking the carrier when the carrier carrying the at least one group of aligned carrying trays enters the shell, so as to position the carrying trays at a predetermined horizontal position in the horizontal direction for a predetermined period of time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A block diagram schematically shows a structure of a detection device according to an example;

[0017] Figure 2A Schematically showing a top view of multiple groups of carrying trays TR loaded on a JLP vehicle;

[0018] Figure 2B Schematically showing projections of multiple groups of carrying trays;

[0019] Figure 3 A block diagram schematically shows a configuration of a detection device according to an example;

[0020] Figure 4 A block diagram schematically shows a configuration of a detection device according to another example. DETAILED DESCRIPTION

[0021] The detection device provided by the embodiment of the utility model is described in detail below in conjunction with the accompanying drawings. Although the preferred embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present disclosure more thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art.

[0022] Figure 1 1 shows a schematic diagram of the structure of the detection device 100. As shown in the figure, the detection device 100 includes a housing portion 200 located at the lower part and a main body portion 300 located at the upper part. The housing portion 200 provides a space for accommodating the JLP vehicle and a plurality of carrying trays carried thereon. Figure 2A The top view of a JLP vehicle carrying a carrier pallet is schematically shown. In this example, the JLP vehicle carries two groups of carrier pallets TR_A and TR_B. Each group of carrier pallets includes multiple layers or multiple stacked pallets. As shown in the figure, each pallet has multiple receiving slots PK. As shown in the figure, each pallet includes 2×9 slots in this example. In the JLP vehicle, the pallets in each group of pallets TR are fixed so that each slot PK is aligned. Therefore, when detecting whether there are residual devices on the pallets, the JLP vehicle loaded with two groups of carrier pallets can be pushed into the shell space 200, or the JLP vehicle can be sent into the shell space 200 through other transmission mechanisms.

[0023] like Figure 1As shown, a light source 201 is disposed on one side of the housing 200, such as the bottom side, and is embedded in a bracket 202. Thus, when the JLP vehicle enters a predetermined position in the housing 200, the bracket 202 can contact the lowest layer of the tray in the JLP vehicle, and the light emitted by the light source 201 disposed in the bracket 202 can just pass through the multiple layers of trays in the JLP vehicle and be emitted from each slot PK of the top layer of the tray. It should be pointed out here that in order to achieve a good illumination effect, the light source 201 according to the utility model may include multiple light sources or light points that can emit light simultaneously, such as Figure 1 In addition, a locking mechanism 203 is provided in the housing 200 for locking the JLP vehicle when the JLP vehicle carrying the loading tray enters the housing 200, thereby fixing the loading tray at a predetermined horizontal position in the horizontal direction, so that the light can pass through the slot PK at an optimal angle, such as a vertical angle.

[0024] A projection screen PD (not shown in the figure) and a start-stop switch 301 are arranged in the main body 300, which are opposite to the light source 201. The projection screen PD is used to receive the light emitted by the light source 201 and passing through the tray receiving slots PK. Therefore, when multiple groups of carrying trays are placed in the shell 200, the user can press the start-stop switch 301 to power on the detection device, so that the light emitted by the light source 201 will form a projection of the slots PK on the projection screen PD after passing through the slots PK of the multi-layer tray. When there are no remaining electronic devices in the slots of the multi-layer tray, the light can pass through all the slots PK on the tray and produce multiple slot projections with uniform brightness on the projection screen. Figure 2B However, when there is an electronic device left in the slot of any tray in the multi-layer tray, it is obvious that the light emitted from the light source 201 cannot penetrate the slot, so a dark projection of the slot will be generated on the projection screen, for example Figure 2B PK in TR_A group tray projection 16 As shown, the subscript represents the presence of a legacy device in the slot of the 6th column of the 1st row.

[0025] Therefore, according to this embodiment of the utility model, it is convenient to detect whether there are electronic devices left in multiple groups of pallets carried by the JLP vehicle through optical detection. In order to conveniently view the slot projection of the pallet, such as Figure 1 As shown, a display 302 is also provided on the main body 300. As an implementation, the display 302 may be an optical glass screen, which is optically coupled with the projection screen PD through an optical transmission path such as a lens group, so that the user can check whether there are any electronic devices ED left in the tray through the display 302. In another example, the display 302 may be an electronic display, such as a CRT display or an LED display. To this end, the main body 300 also includes a controller 303 and a camera 304 ( Figure 1(not shown in the figure), wherein the controller in the main body 300 controls the camera to capture the upper projection PRO of the projection screen PD, and presents the captured projection image ProImg through the display 302.

[0026] Usually, the JLP cart will be fully loaded with pallets and sent to the inspection equipment 100 for device residue inspection. At this time, since the slots PK of the multiple pallets in each group of pallets form a sufficiently long light path, the light emitted from the light source 201 in the bracket 202 will reach the projection screen PD along the light path, so a clear projection can be formed on the projection screen PD, and a clear image can be formed on the display 302 accordingly. However, in practice, there may be a situation where the JLP cart is not fully loaded, that is, only a small number of pallets are loaded for inspection. Therefore, in this case, the light path formed by a small number of pallet slots becomes shorter, causing the light emitted from the top pallet to be projected onto the projection screen PD in a divergent form, thereby forming a possibly blurred image of the pallet slots on the projection screen PD. Obviously, the degree of blur depends on the height, that is, the number of pallets carried by the JLP cart. In order to avoid projection blur caused by insufficient light path length due to insufficient number of pallets on the JLP cart, such as Figure 1 As shown, a position sensor 204 and a controller 205 ( Figure 1 The lifting mechanism LM includes a bracket 202 and a driving mechanism 206, wherein the driving mechanism 206 includes a driving motor and a vertical guide rail such as a lead screw. In this example, the bracket 202 is a lifting plate or a lifting bracket that can move along the vertical guide rail.

[0027] Figure 3 The block diagram of the detection device for implementing projection blur control and detection according to an example of the utility model is described. According to this example, when the JLP vehicle is sent into the space of the housing 200, the locking mechanism 203 locks the JLP vehicle for a predetermined time T. For example, when the user presses the start-stop switch 301, the detection device 100 is powered on and the locking mechanism in the form of an electromagnetic latch is activated, thereby locking the JLP vehicle in the housing for a predetermined time, such as 5 seconds.

[0028] The position sensor 204 detects whether the carrying tray reaches a predetermined vertical height position P0 close to the projection screen PD in the vertical direction. As an example, the position sensor 204 can be a pair of photoelectric sensors TX / RX, wherein the light-emitting tube TX is configured to emit visible light or infrared light in the horizontal direction, and the light-sensitive sensor RX as the receiving end is configured to receive the light emitted by the light-emitting tube and generate a position indication signal LocSig indicating whether there is a target tray. In this example, it is assumed that the current JLP vehicle only carries trays less than the standard load capacity, so after the user turns on the switch 301 to power on, the position sensor 204 will not detect the presence of a tray at the current vertical position, so the sensor 204 outputs a position detection signal LocSig with a specific voltage value, such as a low level.

[0029] When the controller 205 receives the position detection signal LocSig from the sensor 204 and determines that the signal value is low, it generates a motor drive signal MotoSig and provides it to the drive motor in the drive mechanism 206, so that the motor works and drives the bracket 202 upward through a vertical track such as a lead screw, so that the bracket 202 drives the entire group of trays TR in the JLP car to move upward. During the upward movement, when the topmost tray among the multiple trays reaches the predetermined position P0 and blocks the light emitted by the photoelectric sensor TX, the photoelectric sensor RX will not receive the light at this time, so that a specific voltage, such as a high-level position detection signal LocSig, can be output. After receiving the high-level position detection signal LocSig, the controller 205 controls the drive motor in the drive mechanism 206 to stop running, thereby keeping the bracket 202 at the current predetermined position P0; at the same time, the controller 205 controls the power supply 201 to emit light, thereby forming a clear projection PRO of each receiving slot of each group of trays TR on the projection screen PD. In order to obtain a clearer and more stable projection PRO, the light emission time of the light source 201 is set to have a predetermined duration, such as between 0.1 and 1 second. In addition, if Figure 1 As shown, the housing 200 also includes a limiting mechanism 207 such as a limiting column, which is used to prevent the bracket 202 (the bracket indicated by the dotted line as shown in AA in the figure) from overshooting and damaging other components.

[0030] According to this example, the controller 303 in the main body 300 is also configured to receive the position detection signal LocSig from the position sensor 204, wherein after receiving the high-level position detection signal LocSig, the camera 304 is controlled to capture the projection PRO on the projection screen PD, thereby generating a projection image ProImg and storing it in the internal memory of the camera. According to this example, after the camera 304 captures the projection PRO, the controller 303 can generate a reset signal Reset and provide it to the controller 205, whereby the controller 205 can control the motor in the driving mechanism 206 to reverse, thereby causing the bracket 202 to descend and drive the tray to return to its initial position when the JLP vehicle enters. Of course, in another example, the controller 205 can also automatically generate a reset control signal after the light source 201 emits light for a predetermined period of time, thereby causing the tray to return to its initial position.

[0031] The controller 303 reads the projection image ProImag captured by the camera 304 from the internal memory of the camera 304, and determines whether there are any remaining devices in the carrier tray in the current JLP vehicle by analyzing the projection image ProImag. As an example, the controller 303 can use a brightness contrast algorithm to confirm whether there are any remaining devices. As mentioned above, when there are no wafers in all slots of a group of carrier trays, light can pass through all slots PK unimpeded and be projected onto the projection screen PD, leaving a highlighted slot image ProImag with uniform brightness on the projection screen; and if there is a device left in any slot of a carrier tray in a group of carrier trays, for example Figure 2B The first row and sixth column of the pallet TR_A shown in FIG. 16 If the slot is PK, the light must be PK 16 The device in the slot blocks the projection onto the projection screen PD, thus 16 The area leaves a shadow. 16 The image brightness of the shadow area must be lower than that of other normal brightness areas, so the shadow area PK can be determined by brightness contrast. 16 , thereby determining which slot in the group of carrying trays has the remaining device. Any image analysis algorithm in the image field can be used to determine the shadow image.

[0032] According to an example of the present invention, when the controller 303 determines that there is no shadow area, that is, no legacy device, by analyzing the projection image ProImag, it outputs a prompt signal of normal detection, such as controlling the speaker to emit a "normal" prompt voice; or it can control the display 302 to change the color of the graphical interface or present a "normal" text message, etc. When the controller 303 determines that there is a legacy electronic device by analyzing the projection image, for example, it determines that the PK in the first group of carrier trays TR_A 16If there is a device in the slot, an alarm signal is issued through the speaker or display 302. The alarm signal may include the slot PK where the wafer is left. 16 The instruction information is used to prompt the operator to check the PK in the tray TR_A. 16 The slot at the location is further inspected.

[0033] Therefore, by using the detection device 100 of the present invention, pallets of various stacking heights in a JLP vehicle can be detected, that is, regardless of whether the JLP vehicle is fully loaded or partially loaded with pallets.

[0034] In the above example, the controller 205 and the controller 303 are respectively used to control the transmission mechanism LM and perform the omission detection; however, in another embodiment, the same control module can also be used to implement the same or similar functions of the controllers 205 and 303. Figure 4 A block diagram of the detection device of this example is shown.

[0035] like Figure 4 As shown, the control module 400 is electrically coupled to the position sensor 204, the camera 304, the light source 201 and the motor in the transmission mechanism LM. When the JLP vehicle is sent into the housing 200, the detection device 100 is powered on by pressing the start-stop switch 301, and the locking mechanism 203 in the form of an electromagnetic latch is activated, thereby locking the JLP vehicle in the housing for a predetermined time.

[0036] The position sensor 204 detects whether the carrying tray reaches a predetermined vertical position P0 in the vertical direction, and outputs a corresponding position indication signal LocSig. As an example, if the topmost tray of the delivered tray reaches the predetermined position P0, an indication signal LocSig of, for example, a high level is output. The control module 400 receives the position detection signal LocSig from the sensor 204, and when it is determined to be a high level, controls the camera 304 to shoot the projection PRO on the projection screen PD to generate a projection image ProImg, whereby the control module 400 can present the generated projection image ProImg on the display 302. In addition, the control module 400 analyzes the projection image ProImag by, for example, brightness contrast to determine whether there are any remaining devices in the carrying tray in the current JLP vehicle. Further, the control module 400 can present corresponding prompts or alarm information through a medium such as a speaker or display 302 based on the analysis results.

[0037] If the control module 400 determines that the position detection signal LocSig has a low level, a motor drive signal MotoSig is generated and provided to the drive motor of the transmission mechanism LM, thereby controlling the drive motor to operate and drive the bracket 202 upward through the vertical track, thereby the bracket 202 drives the entire group of pallets TR to move upward until the topmost pallet reaches the predetermined position P0 and triggers the position sensor 204 to output a position detection signal LocSig with an opposite level, such as a high level. After determining the level change of the position detection signal LocSig, the control module 400 controls the drive motor of the transmission mechanism LM to stop running, thereby keeping the bracket 202 at the current predetermined position P0; at the same time, the power supply 201 is controlled to emit light for a predetermined time, thereby forming a clear projection PRO of each slot in each group of pallets on the projection screen PD. While controlling the motor to stop running, the control module 400 controls the camera 304 to capture the projection image ProImg on the projection screen PD, and determines whether there is a leftover pallet in the pallets in the JLP vehicle by analyzing the projection image ProImg as described above. In addition, the control module 400 can generate a reset signal Reset to control the driving motor of the transmission mechanism LM to reverse after the camera completes the shooting operation or after the analysis result is determined, so that the bracket 202 descends and drives the tray to return to the initial position when the JLP vehicle enters.

[0038] In the present invention, in order to form a clear projection PRO on the projection screen PD, it is obvious that the selection of the projection screen material is also critical. According to an example of the present invention, the projection screen material can be selected based on the transmittance, where the transmittance is defined as:

[0039]

[0040] Where T represents transmittance, I0 = I a +I t +I r , where I0 represents the incident light flux entering slot PK, I r represents the luminous flux reflected in the slot, and I a Represents the luminous flux absorbed during the transmission of light; and I t Represents the luminous flux emitted from the slot. According to a preferred example of the utility model, a projection screen made of a material with a transmittance ranging from 50% to 90% is selected, such as PE board, PVC board, PP board and PC board, etc., wherein a PVC board with a transmittance of 75% is preferably selected, which can achieve a better balance in terms of brightness and sharpness.

[0041] The present invention is shown and described in detail above through the accompanying drawings and preferred embodiments. However, the present invention is not limited to these disclosed embodiments. Personnel in the art can make modifications based on the above embodiments, and these modified embodiments are also within the protection scope of the present invention.

Claims

1. A detection device, characterized in that: include: A housing for accommodating at least one set of aligned carrying trays, wherein each carrying tray is provided with a plurality of receiving slots for storing electronic devices; a position sensor for detecting whether the at least one set of aligned carrying trays reaches a predetermined vertical position in a vertical direction; a light source disposed on one side of the housing and positioned so that light emitted from the light source passes through the plurality of receiving slots of the at least one set of aligned carrying trays; A projection screen, arranged opposite to the light source and used to receive the light passing through the receiving slot to form a projection on the projection screen; as well as A first controller is coupled to the position sensor to receive a position indication signal from the position sensor, and generates a motor driving signal when the position indication signal indicates that the at least one group of aligned carrying trays does not reach the vertical position in a vertical direction.

2. The detection device according to claim 1, characterized in that The housing also includes a transmission mechanism, including: A lifting plate, used for lifting the at least one group of aligned carrying trays; The driving motor is used to drive the lifting plate to rise along a vertical track based on the motor driving signal so that the at least one group of aligned carrying trays reaches the vertical position.

3. The detection device according to claim 2, characterized in that Further including: A display is used to present the projection.

4. The detection device according to claim 2, characterized in that When the carrying tray reaches the predetermined vertical position, the first controller controls the light source to turn on to emit the light.

5. The detection device according to any one of claims 2 to 4, characterized in that: Further including: a camera for photographing the projection to generate a projection image, A second controller is coupled to the camera and acquires the projected image.

6. The detection device according to claim 5, characterized in that The second controller determines whether the electronic device is left in the receiving slot of the at least one group of aligned carrying trays based on the projected image.

7. The detection device according to claim 6, characterized in that It further comprises an information prompting unit, including a display and / or a speaker, wherein when the second controller determines that the electronic device is left behind, the information prompting unit is controlled to present an alarm message.

8. The detection device according to claim 6, characterized in that The first controller or the second controller is configured to generate a reset signal within a predetermined time after the carried tray reaches the predetermined vertical position; The driving motor restores the lifting plate to a starting position based on the reset signal.

9. The detection device according to claim 6, characterized in that: The conveying mechanism further comprises a limiting device for preventing the carrying tray from exceeding the vertical position when rising along the vertical track.

10. The detection device according to claim 9, characterized in that The housing further includes a locking mechanism for locking the vehicle when the vehicle carrying the at least one set of aligned carrying trays enters the housing so as to position the carrying trays at a predetermined horizontal position in the horizontal direction for a predetermined period of time.

11. The detection device according to claim 3, characterized in that: Further including: An optical transmission path is used to transmit the projection from the projection screen to the display.

12. The detection device according to claim 6, characterized in that: The second controller is integrated with the first controller, wherein when the position sensor detects that the carrying tray reaches the vertical position, the first controller controls the light source to emit the light and controls the camera to capture the projection image at the same time.

13. The detection device according to any one of claims 1 to 4, characterized in that: The projection screen is selected from a material with a transmittance ranging from 50% to 90%, including one of the following: PE, PVC, PP and PC.

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