Double-basket HF tank
By designing the double basket HF tank, the solution in the circulating cooling water tank is used to solve the problem of uneven heat dissipation during wafer corrosion, the stable control of solution temperature is achieved, and the uniformity and stability of the corrosion process are improved.
Patent Information
- Application Number
- CN202421436503.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-23
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-06-23
AI Technical Summary
During wafer corrosion and etching processing, the heat generated by chemical corrosion liquids is difficult to effectively dissipate heat, resulting in uneven corrosion reactions, affecting the stability and repeatability of the corrosion process.
A double basket HF tank is designed, including a sink, an outer tank, a filter plate, a fixed bracket and a water pipe. By circulating the solution in the sink, the water pipe and arc-shaped hole design are used to uniformly distribute the water pipes to achieve uniform cooling and temperature control of the solution.
By circulating the solution in the cooling tank, stable control of the solution temperature is achieved, and the uniformity, stability and repeatability of the corrosion process are improved.
Smart Images
Figure CN222883496U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of cooling water tanks, in particular to a double-basket HF tank. Background Art
[0002] When the wafer is corroded and etched, chemical corrosive liquid is usually used to process the wafer surface. These chemical corrosion processes will generate a lot of heat, which needs to be dissipated to control the rate of the corrosion reaction and ensure uniform corrosion of the wafer. The temperature of the corrosive liquid and the wafer is controlled by circulating water or other cooling media to prevent uneven corrosion caused by overheating and the stability and repeatability of the corrosion process. Therefore, a double-basket HF tank is proposed to address the above problems. Utility Model Content
[0003] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a double-basket HF tank, comprising a water tank, an outer tank is arranged outside the water tank, the outer tank is arranged on the upper part of the water tank, and the bottom surface of the outer tank is connected and sealed with the side surface of the water tank, a filter plate is fixed on the bottom surface of the water tank by screws, a fixed bracket is arranged vertically on the inner wall of the water tank, the fixed bracket is arranged between the inner wall of the water tank and the filter plate, a support plate is connected between the two fixed brackets on the same plane of the water tank, a water inlet hole is arranged at a corner of the bottom surface of the water tank, a water outlet hole is arranged on the bottom surface of the outer tank, and the fixed bracket is clamped with a water pipe.
[0004] Furthermore, multiple arc holes are arranged in a vertical array on the outer sides of the multiple fixing brackets, the arc holes form a bayonet with the inner wall of the water tank, water pipes are arranged in the arc holes, and the water pipes pass through the arc holes on the same horizontal plane in sequence and gradually coil upwards.
[0005] Furthermore, the bottom surface of the outer groove is arranged to be inclined, and the water outlet is arranged at the center position of the bottom end of the bottom surface of the outer groove.
[0006] Furthermore, an overflow port is provided at the upper end of the side wall of the water tank.
[0007] Furthermore, a baffle is arranged above the fixed bracket, the baffle is arranged on the inner wall of the water tank and along the inner wall around the water tank, and the height of the baffle is lower than the height of the overflow port.
[0008] The utility model has the following beneficial effects:
[0009] In the utility model, cooling water is passed through the water pipe to reduce the temperature of the solution in the water tank 1, and the solution flows out from the water outlet and then enters from the water inlet to achieve circulation so that the solution maintains a certain temperature, thereby improving the uniformity of corrosion and the stability and repeatability of the corrosion process. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 This is a schematic diagram of the structure of a double-basket HF tank proposed by the utility model;
[0011] Figure 2 It is a cross-sectional view of a double-basket HF tank proposed by the utility model.
[0012] Legend:
[0013] 1. Water tank; 2. Outer tank; 3. Filter plate; 4. Fixed bracket; 5. Support plate; 6. Water inlet hole; 7. Water outlet hole; 8. Arc hole; 9. Overflow port; 10. Baffle. DETAILED DESCRIPTION
[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0015] Reference Figure 1-2 As shown, an embodiment of the utility model is: a double-basket HF tank, including a water tank 1, an outer tank 2 is arranged outside the water tank 1, the outer tank 2 is arranged on the upper part of the water tank 1, and the bottom surface of the outer tank 2 is connected and sealed with the side surface of the water tank 1, a filter plate 3 is fixedly arranged on the bottom surface of the water tank 1 by screws, and a fixed bracket 4 is arranged vertically on the inner wall of the water tank 1, and the fixed bracket 4 is arranged between the inner wall of the water tank 1 and the filter plate 3, and a support plate 5 is connected between two fixed brackets 4 on the same plane of the water tank 1, and the support plate 5 is used to support and fix the two fixed brackets 4, a water inlet hole 6 is arranged at a corner of the bottom surface of the water tank 1, and a water outlet hole 7 is arranged on the bottom surface of the outer tank 2, a water pump extracts liquid medicine from the water outlet hole 7 and then flushes the liquid medicine into the water tank 1 from the water inlet hole 6 to realize circulation, so that the temperature of the liquid medicine at different positions in the water tank 1 is kept consistent, the fixed bracket 4 is clamped with a water pipe, and a coolant is passed into the water pipe to cool the solution in the water tank 1 and continuously maintain a certain temperature.
[0016] Furthermore, multiple arc holes 8 are arranged in a vertical array on the outside of multiple fixed brackets 4, and the arc holes 8 form a bayonet with the inner wall of the water tank 1. The arc holes 8 can better clamp the water pipes without causing damage to the water pipes. Water pipes are arranged in the arc holes 8, and the water pipes pass through the arc holes 8 on the same horizontal plane in turn and gradually coil upward, so that the water pipes can be evenly distributed on the inner wall of the water tank 1, so that the temperature of the medicine liquid can be stabilized, and there will be no uneven temperature in the medicine liquid.
[0017] Furthermore, the bottom surface of the outer trough 2 is inclined, and the water outlet 7 is arranged at the center position of the bottom end of the bottom surface of the outer trough 2. When the liquid medicine flows from the water tank 1 into the outer trough 2, the liquid medicine will flow in one direction due to the inclined setting of the bottom surface of the outer trough 2, thereby reducing the accumulation of the liquid medicine in the outer trough 2 and improving the drainage efficiency.
[0018] Furthermore, an overflow port 9 is provided at the upper end of the side wall of the water tank 1, and a baffle 10 is provided above the fixed bracket 4. The baffle 10 is provided on the inner wall of the water tank 1 and along the inner wall around the water tank 1. The height of the baffle 10 is lower than the height of the overflow port 9. The baffle 10 enables the chemical liquid to be more evenly distributed around the overflow hole. The overflow port 9 can affect the discharge speed and flow rate of the liquid, so that the chemical liquid can flow more evenly and stably, reducing the impact on wafer corrosion.
[0019] Working principle: When etching the wafer, the staff first adds liquid medicine into the water tank 1 until the water tank 1 and the outer tank 2 are full, then passes the cooling liquid of suitable temperature into the water pipe, and then uses the water pump to extract the liquid medicine from the water outlet and then flush it into the water tank 1 from the water inlet, so as to realize the circulation of the liquid medicine in the water tank 1. When the liquid medicine re-enters the water tank 1, the water tank 1 flows into the outer tank 2 through the baffle 10 and the overflow port 9. By setting the horizontal baffle 10, the liquid can be more evenly distributed around the overflow hole. This helps to prevent the local pressure from being too high or too low.
[0020] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A double basket HF tank, characterized in that: The invention comprises a water tank (1), wherein an outer tank (2) is arranged outside the water tank (1), wherein the outer tank (2) is arranged at the upper part of the water tank (1), and the bottom surface of the outer tank (2) is connected and sealed with the side surface of the water tank (1), a filter plate (3) is fixedly arranged on the bottom surface of the water tank (1) by screws, and fixed brackets (4) are arranged vertically on the inner wall of the water tank (1), wherein the fixed brackets (4) are arranged between the inner wall of the water tank (1) and the filter plate (3), and a support plate (5) is connected between two fixed brackets (4) on the same plane of the water tank (1), a water inlet hole (6) is arranged at one corner of the bottom surface of the water tank (1), and a water outlet hole (7) is arranged on the bottom surface of the outer tank (2), and the fixed brackets (4) are clamped with a water pipe.
2. A double basket HF tank according to claim 1, characterized in that: A plurality of arc-shaped holes (8) are arranged in a vertical array on the outer sides of the plurality of fixed brackets (4), the arc-shaped holes (8) and the inner wall of the water tank (1) form a bayonet, and water pipes are arranged in the arc-shaped holes (8), which pass through the arc-shaped holes (8) on the same horizontal plane in sequence and gradually coil upwards.
3. A double basket HF tank according to claim 1, characterized in that: The bottom surface of the outer trough (2) is arranged obliquely, and the water outlet hole (7) is arranged at the center position of the bottom end of the bottom surface of the outer trough (2).
4. A double basket HF tank according to claim 1, characterized in that: An overflow port (9) is provided at the upper end of the side wall of the water tank (1).
5. A double basket HF tank according to claim 4, characterized in that: A baffle (10) is arranged above the fixed bracket (4); the baffle (10) is arranged on the inner wall of the water tank (1) and along the inner wall around the water tank (1); the height of the baffle (10) is lower than the height of the overflow port (9).