Heater taking and placing device for producing single crystal by Czochralski method

Abstract

The utility model discloses a heater pick-and-place device for producing single crystals by a czochralski method, and particularly relates to the technical field of single crystal production, the heater pick-and-place device comprises a reinforcing support ring for supporting, a heating cylinder for heating is arranged in the middle of the reinforcing support ring, and a protective sleeve for limiting is sleeved on the outer side of the heating cylinder. Through corresponding cooperative use of all structures, the heating cylinder is placed in the middle of the reinforcing supporting ring, the first limiting grooves and the corresponding limiting extension rods are clamped together to position the protective sleeve and the heating cylinder, the stability when the heating cylinder is placed can be effectively guaranteed, the service life of the heating cylinder is prolonged, and the heating cylinder is convenient to use. And through the arrangement of a second limiting groove, the second limiting groove can be used as a limiting area to limit the limiting extension rod and the protective sleeve, so that the diversity and convenience of the reinforcing supporting ring during use are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, and more specifically to a heater taking and placing device for producing single crystals by a Czochralski method. Background Art

[0002] The heater pick-and-place device for producing single crystals by the Czochralski method is an auxiliary device used in single crystal growth equipment. Its main function is to take out or put the single crystal rod back into the melt at various growth stages. In the process of producing single crystals by the Czochralski method, the single crystal rod needs to be pulled out of the molten pool and kept constant within a certain temperature range. In order to achieve this process, a heater is needed to heat and keep the single crystal rod warm. At the same time, in some cases, the single crystal rod needs to be taken out of the molten pool or put back to achieve different growth conditions.

[0003] Among them, it was found through searching that the patent application number CN201120071850.2 discloses a device for removing and unloading a heater for single crystal direct pulling. The handle and the barb of the device are connected by a connecting rod to form an inverted T-shape. However, during the current operation, the heater cannot be evenly stressed when being taken away, resulting in deformation and fracture, which shortens the life of the heater. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a heater pick-up and placement device for producing single crystals by the Czochralski method, aiming to solve the problems raised in the above-mentioned background technology.

[0005] The utility model is implemented in this way. The utility model provides the following technical solutions: a heater pick-up and placement device for producing single crystals by a Czochralski method, comprising a reinforcing support ring for support, a heating cylinder for heating is arranged in the middle of the reinforcing support ring, and a protective sleeve for limiting is arranged on the outer side of the heating cylinder;

[0006] A plurality of limit extension rods for support are distributed on the outer side of the protective sleeve and along the circumference of the axial center point of the protective sleeve;

[0007] A plurality of first limiting grooves for limiting are arranged at the top of the reinforcing support ring and along the circumference of the axis point of the reinforcing support ring, and a plurality of second limiting grooves for limiting are arranged at the bottom of the reinforcing support ring and along the circumference of the axis point of the reinforcing support ring;

[0008] It can be seen that in the above technical solution, by placing the heating tube in the middle of the reinforced support ring, and by clamping the first limiting grooves with the corresponding limiting extension rods respectively to position the protective sleeve and the heating tube, the stability of the heating tube when placed can be effectively ensured. By setting the second limiting groove, the second limiting groove can be used as a limiting area to limit the limiting extension rod and the protective sleeve, so as to improve the diversity and convenience of the reinforced support ring when in use;

[0009] Optionally, in a possible implementation, a plurality of the limit extension rods are matched with the second limit groove and the first limit groove, the first limit groove and the second limit groove are clamped with the limit extension rod, the protective sleeve is detachably connected to the heating sleeve, and a plurality of the limit extension rods are detachably connected to the protective sleeve, support legs for support are arranged on both sides of the bottom of the reinforced support ring, and a limiting protrusion is arranged on the top of the two support legs and on the side facing the inner wall of the reinforced support ring, and a plurality of positioning frame openings that respectively match the corresponding limiting protrusions are opened on the side of the bottom of the inner wall of the reinforced support ring facing the limiting protrusion, and a plurality of the limiting protrusions respectively extend into the corresponding positioning frame openings and are clamped with the positioning frame openings, a supporting plate for lifting is arranged at the bottom of the supporting leg, the supporting plate is detachably connected to the supporting leg, and the vertical cross-sectional shape of the supporting leg and the supporting plate is combined into an L-shape;

[0010] It can be seen that in the above technical solution, the support plate and the support legs are used as support points for the reinforced support ring, providing a good support point for the reinforced support ring. Through the setting of the limiting protrusion and the positioning frame, the support legs are easy to remove, making it convenient to disassemble and replace the support legs.

[0011] Technical effects and advantages of the utility model:

[0012] Through the corresponding coordination of various structures, the overall design is simple and the structure is reasonable. The support plate and the support legs are used as the support points of the strengthening support ring, providing a good support point for the strengthening support ring and ensuring the stability of the strengthening support ring when it is placed;

[0013] By placing the heating tube in the middle of the reinforcing support ring, and positioning the protective sleeve and the heating tube by clamping the first limiting grooves with the corresponding limiting extension rods, the stability of the heating tube during placement can be effectively ensured, and its service life can be extended;

[0014] By setting the second limiting groove, the second limiting groove can be used as a limiting area to limit the limiting extension rod and the protective sleeve, so as to improve the diversity and convenience of the reinforced support ring when in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present disclosure, the following briefly introduces the drawings required to be used in some embodiments of the present disclosure. Obviously, the drawings described below are only drawings of some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of the signal, etc.

[0016] Figure 1 It is the front view of the overall structure of the utility model.

[0017] Figure 2 It is a top view of the overall structure of the utility model.

[0018] Figure 3 It is a front view of the heating tube, protective sleeve and limit extension rod of the utility model.

[0019] Figure 4 This is a front view of the reinforced support ring, support legs and limiting protrusions of the utility model.

[0020] The accompanying drawings are marked as follows: 1. reinforced support ring; 2. heating tube; 3. protective sleeve; 4. limit extension rod; 5. first limit groove; 6. second limit groove; 7. support leg; 8. limit protrusion; 9. positioning frame mouth; 10. support plate. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] As attached Figure 1-4 The heater pick-up and placement device for producing single crystals by the Czochralski method shown in the figure is used in a corresponding coordinated manner by the various structures such as the strengthening support ring 1, the heating tube 2, the protective sleeve 3, the limit extension rod 4, the first limit groove 5 and the second limit groove 6. By placing the heating tube 2 in the middle of the strengthening support ring 1, the protective sleeve 3 and the heating tube 2 are positioned by clamping a plurality of first limit grooves 5 with the corresponding limit extension rods 4 respectively, so that the stability of the heating tube 2 when placed can be effectively ensured. By setting the second limit groove 6, the second limit groove 6 can be used as a limit area to limit the limit extension rod 4 and the protective sleeve 3, so as to improve the diversity and convenience of the strengthening support ring 1 when in use, and the specific structural arrangement of the assembly is as follows;

[0023] It comprises a reinforcing support ring 1 for supporting, a heating cylinder 2 for heating is arranged in the middle of the reinforcing support ring 1, and a protective sleeve 3 for limiting is sleeved on the outer side of the heating cylinder 2;

[0024] A plurality of limit extension rods 4 for support are distributed on the outer side of the protective sleeve 3 and along the circumference of the axial center point of the protective sleeve 3;

[0025] A plurality of first limiting grooves 5 for limiting are arranged at the top of the reinforcing support ring 1 and along the circumference of the axis point of the reinforcing support ring 1, and a plurality of second limiting grooves 6 for limiting are arranged at the bottom of the reinforcing support ring 1 and along the circumference of the axis point of the reinforcing support ring 1;

[0026] Multiple limit extension rods 4 are matched with the second limit groove 6 and the first limit groove 5, the first limit groove 5 and the second limit groove 6 are clamped with the limit extension rod 4, the protective sleeve 3 is detachably connected to the heating tube 2, and multiple limit extension rods 4 are detachably connected to the protective sleeve 3. Support legs 7 for support are provided on both sides of the bottom of the reinforced support ring 1, and limiting protrusions 8 are provided on the top of the two support legs 7 and on the side facing the inner wall of the reinforced support ring 1. A plurality of positioning frame openings 9 that match the corresponding limiting protrusions 8 are opened on the side of the bottom of the inner wall of the reinforced support ring 1 facing the limiting protrusions 8, and multiple limiting protrusions 8 extend into the corresponding positioning frame openings 9 and are clamped with the positioning frame openings 9, and a support plate 10 for lifting is provided at the bottom of the support leg 7, and the support plate 10 is detachably connected to the support leg 7, and the vertical cross-sectional shape of the support leg 7 and the support plate 10 is combined into an L-shape.

[0027] According to the above structure, when in use, the device is installed at a designated position, and the support plate 10 and the support legs 7 are used as support points for the reinforcing support ring 1 to provide a good support point for the reinforcing support ring 1. Then, a pick-and-place manipulator is used to place the gripping device of the manipulator on the single crystal rod, take it out of the molten pool, and transport it to the heating cylinder 2.

[0028] Then, the heating tube 2 is placed in the middle of the reinforcing support ring 1 by means of a grabbing device of the manipulator, and the protective sleeve 3 and the heating tube 2 are positioned by clamping a plurality of first limiting grooves 5 with corresponding limiting extension rods 4, so as to effectively ensure the stability of the heating tube 2 when it is placed;

[0029] Subsequently, a pick-and-place robot is used to carefully place the heated single crystal rod back into the molten pool;

[0030] At the same time, through the setting of the limiting protrusion 8 and the positioning frame mouth 9, it is easy to remove the support leg 7, and the disassembly and replacement of the support leg 7 is convenient. Through the setting of the second limiting groove 6, the second limiting groove 6 can be used as a limiting area to limit the limiting extension rod 4 and the protective sleeve 3, so as to improve the diversity and convenience of the reinforced support ring 1 when in use.

[0031] Different from the prior art, the present application discloses a heater placement device for producing single crystals by the direct pulling method. By placing the heating tube 2 in the middle of the reinforcing support ring 1, the protective sleeve 3 and the heating tube 2 are positioned by respectively locking together a plurality of first limiting grooves 5 with corresponding limiting extension rods 4, thereby effectively ensuring the stability of the heating tube 2 when placed. By setting the second limiting groove 6, the second limiting groove 6 can be used as a limiting area to limit the limiting extension rod 4 and the protective sleeve 3, so as to improve the diversity and convenience of the reinforcing support ring 1 when in use.

[0032] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A heater pick-and-place device for producing single crystals by the Czochralski method, characterized in that: It comprises a reinforcing support ring (1) for supporting, a heating cylinder (2) for heating is arranged in the middle of the reinforcing support ring (1), and a protective sleeve (3) for limiting is sleeved on the outer side of the heating cylinder (2); A plurality of position-limiting extension rods (4) for support are distributed on the outer side of the protective sleeve (3) and along the circumference of the axis point of the protective sleeve (3); A plurality of first limiting grooves (5) for limiting are arranged at the top of the reinforcing support ring (1) and along the circumference of the axis point of the reinforcing support ring (1), and a plurality of second limiting grooves (6) for limiting are arranged at the bottom of the reinforcing support ring (1) and along the circumference of the axis point of the reinforcing support ring (1).

2. A heater pick-and-place device for producing single crystals by the Czochralski method according to claim 1, characterized in that: The plurality of limit extension rods (4) are matched with the second limit slot (6) and the first limit slot (5), and the first limit slot (5) and the second limit slot (6) are both snap-connected with the limit extension rod (4).

3. The heater pick-and-place device for producing single crystals by the Czochralski method according to claim 1, characterized in that: The protective sleeve (3) is detachably connected to the heating sleeve (2), and the plurality of limit extension rods (4) are detachably connected to the protective sleeve (3).

4. The heater pick-and-place device for producing single crystals by the Czochralski method according to claim 1, characterized in that: Support legs (7) for support are provided on both sides of the bottom of the reinforcement support ring (1), and limiting protrusions (8) are provided on the tops of the two support legs (7) and on the sides facing the inner wall of the reinforcement support ring (1).

5. The heater pick-and-place device for producing single crystals by the Czochralski method according to claim 4, characterized in that: A plurality of positioning frame openings (9) respectively matching the corresponding limiting protrusions (8) are provided on the side of the bottom of the inner wall of the reinforcing support ring (1) facing the limiting protrusions (8).

6. The heater pick-and-place device for producing single crystals by the Czochralski method according to claim 5, characterized in that: The plurality of limiting protrusions (8) respectively extend into corresponding positioning frame openings (9) and are snap-fitted with the positioning frame openings (9).

7. The heater pick-and-place device for producing single crystals by the Czochralski method according to claim 4, characterized in that: A supporting plate (10) for lifting is provided at the bottom of the supporting leg (7); the supporting plate (10) is detachably connected to the supporting leg (7); and the vertical cross-sections of the supporting leg (7) and the supporting plate (10) are combined into an L-shape.

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