Carrying mechanism and vapor deposition system

Abstract

The utility model relates to a carrying mechanism and a vapor deposition system, and belongs to the technical field of displays. The carrying mechanism comprises an objective table. The objective table is arranged on the first magnetic track body, a first side wall and a second side wall are arranged below the first magnetic track body in a spaced mode, and a first containing groove structure is formed between the first side wall and the second side wall. A partition part is convexly arranged on the second magnetic track main body and is positioned in the first accommodating groove structure; the first magnet is arranged at the groove bottom of the first accommodating groove structure; the second magnet is arranged at the upper end of the partition part and is opposite to the first magnet, and the opposite magnetic poles of the first magnet and the second magnet have the same magnetism; the driving module is used for driving the first magnetic track body to move on the second magnetic track body in the length direction of the partition part. According to the utility model, the objective table moves on the magnetic track in a magnetic suspension manner, so that the frictional resistance is reduced, the abrasion of the objective table is reduced, the service life of the objective table is prolonged, and the production cycle of the glass display panel is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of displays, in particular to a conveying mechanism and a vapor deposition system. Background Art

[0002] In the manufacturing process of the glass display panel, a glass substrate is placed on a glass carrier plate 1 ', such as Figure 1 As shown, the glass carrier plate 1 ' is driven by the roller set 2 ' to move to the bottom of the vapor deposition device in the process chamber, and a target material layer is deposited on the glass substrate by vapor deposition.

[0003] However, in the prior art, since the friction between the roller set 2' and the bottom of the glass carrier 1' is used to drive the movement of the glass carrier 1', not only does the driving module need to overcome the large friction resistance, which increases energy consumption; but also after long-term use, the roller set 2' and the glass carrier 1' are easily worn to varying degrees, and it is necessary to stop the machine and replace new roller sets 2' and glass carrier 1', which increases the cost of use and prolongs the production cycle of the glass display panel. Utility Model Content

[0004] The purpose of the utility model is to provide a conveying mechanism and a vapor deposition system, which not only reduces the friction resistance of movement and saves energy; but also reduces the wear of the stage, extends the service life of the stage, shortens the production cycle of the glass display panel, and contributes to the mass production of the glass display panel.

[0005] In order to achieve the above objectives, the following technical solutions are provided:

[0006] On the one hand, the utility model provides a transport mechanism, including a loading platform, a first magnetic track body, a second magnetic track body, a first magnet, a second magnet and a driving module;

[0007] Among them, the loading platform is used to place the objects to be transported;

[0008] The stage is arranged on the first magnetic track body, a first side wall and a second side wall are arranged below the first magnetic track body, and a first accommodating groove structure is formed between the first side wall and the second side wall;

[0009] The second magnetic track body is located below the first magnetic track body, a partition portion is protruded from one side of the second magnetic track body facing the first magnetic track body, and the partition portion is located in the first accommodating groove structure;

[0010] The first magnet is symmetrically arranged at the bottom of the first accommodating groove structure;

[0011] The second magnet is symmetrically arranged at the upper end of the partition portion and is arranged opposite to the first magnet, and the magnetic properties of the opposite magnetic poles of the first magnet and the second magnet are the same;

[0012] The driving module is used to drive the first magnetic rail body to move on the second magnetic rail body along the track length direction of the second magnetic rail body.

[0013] As a further solution of the conveying mechanism, a plurality of guide wheels are rotatably provided on both sides of the partition portion close to the groove wall of the first accommodating groove structure, and the guide wheels are in rolling contact with the side walls of the first accommodating groove structure.

[0014] As a further solution of the conveying mechanism, a first side stop and a second side stop are provided on the second magnetic rail body, and the partition portion is located between the first side stop and the second side stop;

[0015] A second accommodating groove structure is formed between the partition portion and the first side blocking portion, and a first side wall of the first accommodating groove structure is located in the second accommodating groove structure;

[0016] A third accommodating groove structure is formed between the partition portion and the second side blocking portion, and the second side wall of the first accommodating groove structure is located in the third accommodating groove structure.

[0017] As a further solution of the conveying mechanism, the conveying mechanism further includes a plurality of third magnets and a plurality of fourth magnets;

[0018] The third magnets are arranged at intervals on the outer sides of the two side walls of the first magnetic track body;

[0019] The fourth magnet is disposed at intervals on the inner wall surfaces of the first side stopper and the second side stopper. The third magnet and the fourth magnet are disposed opposite to each other and the magnetic properties of the relative magnetic poles are opposite.

[0020] As a further solution of the conveying mechanism, the conveying mechanism further includes a plurality of third magnets and a plurality of fourth magnets;

[0021] The third magnets are arranged at intervals on the outer sides of the two side walls of the first magnetic track body;

[0022] The fourth magnet is disposed at intervals on the inner wall surfaces of the first side stopper and the second side stopper. The third magnet and the fourth magnet are disposed opposite to each other and the magnetic properties of the opposite magnetic poles are the same.

[0023] As a further solution of the conveying mechanism, a plurality of fifth magnets are sequentially installed on the side wall of the first accommodating groove structure along the track length direction of the first magnetic track body, and among two adjacent fifth magnets, the N-pole region and the S-pole region of one of the fifth magnets are respectively opposite to the S-pole region and the N-pole region of the other fifth magnet;

[0024] The driving module includes an annular body and a driving device for driving the annular body to rotate. The annular body is rotatably arranged in the partition part. The rotation axis of the annular body is parallel to the track length direction of the second magnetic track body. The annular body is alternately provided with N pole regions and S pole regions in the circumferential direction.

[0025] As a further solution of the conveying mechanism, the driving module also includes a rotating shaft connected to the driving device, the rotating shaft is rotatably connected to the partition part, a plurality of the annular bodies are fixedly sleeved on the rotating shaft, and the magnetic properties of the relatively arranged polar regions of two adjacent annular bodies are opposite.

[0026] As a further solution of the conveying mechanism, the driving module also includes a coupling, and a plurality of the rotating shafts are rotatably arranged in the partition portion. The plurality of the rotating shafts are arranged at intervals along the length direction of the partition portion, and two adjacent rotating shafts are connected by the coupling.

[0027] As a further solution of the conveying mechanism, the driving device includes a motor and a gear box, the input shaft of the gear box is coaxially connected to the driving shaft of the motor, and the output shaft of the gear box is coaxially connected to the rotating shaft.

[0028] On the other hand, the utility model provides a vapor deposition system, comprising a vapor deposition process chamber and a conveying mechanism as described in any one of the above items, wherein a material port of the vapor deposition process chamber is connected to the conveying mechanism.

[0029] Compared with the prior art, the utility model has the following beneficial effects:

[0030] The conveying mechanism provided by the utility model has a first receiving groove structure provided on the lower end surface of the first magnetic rail body, and a partition part provided on the upper end surface of the second magnetic rail body, and the partition part is inserted into the first receiving groove structure, and the repulsive force generated by the same magnetic pole of the second magnet on the partition part and the first magnet of the first receiving groove structure makes the first magnetic rail body below the stage be in a magnetic suspension state, eliminating the friction resistance during the movement, and making the stage suspend and move along the length direction of the partition part through the driving module. The conveying mechanism provided by the utility model not only saves energy, but also avoids the wear of the stage, prolongs the service life of the stage, shortens the production cycle of the glass display panel, and is conducive to the mass production of the glass display panel.

[0031] The vapor deposition system provided by the utility model transports the loading platform by means of magnetic suspension of the transport mechanism, thereby reducing friction resistance, extending the service life of the loading platform, and facilitating mass production of glass display panels. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The utility model is further described in detail below based on the drawings and embodiments.

[0033] Figure 1 It is a structural schematic diagram of a glass carrier plate being moved by a roller group in the prior art;

[0034] Figure 2 It is a schematic diagram of the assembly of the conveying mechanism in the embodiment of the utility model;

[0035] Figure 3 It is a schematic structural diagram of the first magnetic track main body and the annular body in the embodiment of the utility model;

[0036] Figure 4 This is a schematic structural diagram of the second magnetic track body in an embodiment of the utility model;

[0037] Figure 5 This is a schematic diagram of the structure of the driving module in the embodiment of the utility model;

[0038] Figure 6 This is a schematic diagram of the principle of the ring body pushing the fifth magnet to move in the embodiment of the utility model.

[0039] Reference numerals:

[0040] 1', glass slide; 2', roller set;

[0041] 1. stage; 2. first magnetic track body; 21. first receiving groove structure; 22. first side wall; 23. second side wall; 3. second magnetic track body; 31. partition part; 32. first side stop part; 33. second side stop part; 34. second receiving groove structure; 35. third receiving groove structure; 4. first magnet; 5. second magnet; 6. drive module; 61. annular body; 62. rotating shaft; 63. coupling; 64. motor; 641. drive shaft; 65. gear box; 7. guide wheel; 8. third magnet; 9. fourth magnet; 10. fifth magnet. DETAILED DESCRIPTION

[0042] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0043] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0044] In order to reduce the friction resistance of the stage movement, save energy, avoid wear of the stage, extend the service life of the stage, shorten the production cycle of the glass display panel, and facilitate the mass production of the glass display panel, this embodiment provides a conveying mechanism and a vapor deposition system, which are combined as follows Figures 2 to 6 The specific contents of this embodiment are described in detail.

[0045] like Figures 2 to 4 As shown, the conveying mechanism in this embodiment includes a stage 1, a first magnetic rail body 2, a second magnetic rail body 3, a first magnet 4, a second magnet 5 and a driving module 6. Among them, the stage 1 is used to place the object to be transported. The object to be transported is specifically described below by taking a glass substrate as an example. The stage 1 is arranged on the first magnetic rail body 2, and a first side wall 22 and a second side wall 23 are arranged at intervals below the first magnetic rail body 2, and a first receiving groove structure 21 is formed between the first side wall 22 and the second side wall 23. The second magnetic rail body 3 is located below the first magnetic rail body 2, wherein a partition portion 31 is protruding from the second magnetic rail body 3 toward the side of the first magnetic rail body 2, and the partition portion 31 is located in the first receiving groove structure 21. In this embodiment, two first magnets 4 are symmetrically arranged at the bottom of the groove of the first receiving groove structure 21. The two second magnets 5 are symmetrically arranged at the upper end of the partition 31 and are arranged opposite to the corresponding two first magnets 4. The relative magnetic poles of the first magnet 4 and the second magnet 5 are the same, which is used to make the first magnetic rail body 2 in a suspended state, reduce the influence of vibration, and help stabilize the transportation. Preferably, the first magnet 4 and the second magnet 5 can be fixed in an embedded manner. The driving module 6 is used to drive the first magnetic rail body 2 to move on the second magnetic rail body 3 along the track length direction of the second magnetic rail body 3.

[0046] Optionally, the track length directions of the first magnetic track body 2 and the second magnetic track body 3 are the same, wherein the length direction of the partition portion 31 is designed according to the track length direction of the second magnetic track body 3, and no excessive restrictions are made here.

[0047] Optionally, in some application scenarios, the driving module 6 may be, but is not limited to, a hydraulic cylinder, an electric push rod, a linear motor, a gear rack, or a lead screw nut and the like. The output end of the driving module 6 is connected to the first magnetic rail body 2 and can push the first magnetic rail body 2 to move.

[0048] The conveying mechanism provided in this embodiment is provided with a first receiving groove structure 21 on the lower end surface of the first magnetic rail body 2, and a partition part 31 is provided on the upper end surface of the second magnetic rail body 3, and the partition part 31 is inserted into the first receiving groove structure 21. The repulsive force generated by the same magnetic poles of the second magnet 5 on the partition part 31 and the first magnet 4 of the first receiving groove structure 21 can make the first magnetic rail body 2 under the stage 1 in a magnetic suspension state, eliminate the friction resistance during the movement, and make the stage 1 suspend and move along the length direction of the partition part 31 through the driving module 6. The conveying mechanism provided in this embodiment not only saves energy, but also avoids the wear of the stage 1, prolongs the service life of the stage 1, makes the conveying more stable, shortens the production cycle of the glass display panel, and is conducive to the mass production of the glass display panel.

[0049] Furthermore, if Figure 2 Combination Figure 4 As shown, a plurality of guide wheels 7 are rotatably arranged on opposite sides of the partition portion 31 close to the groove wall of the first accommodating groove structure 21, and the guide wheels 7 are in rolling contact with the side walls of the first accommodating groove structure 21. This ensures that the first magnetic track body 2 always remains in the middle position of the partition portion 31, and avoids the first magnetic track body 2 from being offset during the movement process.

[0050] Furthermore, the second magnetic track body 3 is provided with a first side stopper 32 and a second side stopper 33, the partition part 31 is located between the first side stopper 32 and the second side stopper 33, a second receiving groove structure 34 is formed between the partition part 31 and the first side stopper 32, and the first side wall 22 of the first receiving groove structure 21 is located in the second receiving groove structure 34. A third receiving groove structure 35 is formed between the partition part 31 and the second side stopper 33, and the second side wall 23 of the first receiving groove structure 21 is located in the third receiving groove structure 35. By adding the first side stopper 32 and the second side stopper 33, the second magnetic track body 3 is made into an E-shaped structure, which can not only shield the lower part of the first magnetic track body 2 and play the role of a guardrail, but also prevent the first magnetic track body 2 from tilting and deviating and play the role of limiting.

[0051] Furthermore, if Figures 2 to 4As shown, the conveying mechanism also includes a plurality of third magnets 8 and a plurality of fourth magnets 9. The third magnets 8 are arranged at intervals on the outer side surfaces of the two side walls of the first magnetic track body 2 along the length direction of the partition 31. The fourth magnets 9 are arranged at intervals on the inner wall surfaces of the first side stop 32 and the second side stop 33 along the length direction of the partition 31. The third magnet 8 and the fourth magnet 9 are arranged opposite to each other, and the magnetism of the relative magnetic poles of the third magnet 8 and the fourth magnet 9 is opposite. Since the magnetism of the relative magnetic poles of the third magnet 8 and the fourth magnet 9 is opposite, by adding the third magnet 8 and the fourth magnet 9, the left side wall of the first magnetic track body 2 can be pulled to the left, and the right side wall of the first magnetic track body 2 can be pulled to the right, wherein the pulling force to the left is equal to the pulling force to the right, so that the first magnetic track body 2 is always in the middle position of the partition 31.

[0052] Furthermore, if Figures 2 to 4 As shown, the conveying mechanism also includes a plurality of third magnets 8 and a plurality of fourth magnets 9. The third magnets 8 are arranged at intervals on the outer side surfaces of the two side walls of the first magnetic track body 2 along the length direction of the partition 31; the fourth magnets 9 are arranged at intervals between the inner wall surfaces of the first side stop 32 and the second side stop 33 along the length direction of the partition 31. The third magnet 8 and the fourth magnet 9 are arranged opposite to each other and the magnetism of the relative magnetic poles of the two is the same. Since the magnetism of the relative magnetic poles of the third magnet 8 and the fourth magnet 9 is the same, the left side wall of the first magnetic track body 2 is pushed to the right, and the right side wall of the first magnetic track body 2 is pushed to the left, wherein the leftward thrust is equal to the rightward thrust, so that the first magnetic track body 2 is always in the middle position of the partition 31.

[0053] Furthermore, if Figure 2 , Figure 3 , Figure 5 Combination Figure 6 As shown, the side wall of the first accommodating groove structure 21 is sequentially installed with a plurality of fifth magnets 10 along the track length direction of the first magnetic track body 2. Among two adjacent fifth magnets 10, the N-pole region and the S-pole region of one fifth magnet 10 are respectively opposite to the S-pole region and the N-pole region of the other fifth magnet 10. The N-pole and the S-pole are alternately arranged in sequence on the side wall of the first magnetic track body 2 along the length direction of the partition 31. The driving module 6 includes an annular body 61 and a driving device for driving the annular body 61 to rotate. The annular body 61 is rotatably arranged in the partition 31. The rotation axis of the annular body 61 is parallel to the track length direction of the second magnetic track body 3. The annular body 61 is alternately arranged with the N-pole region and the S-pole region in sequence along the circumferential direction. In the process of the movement of the first magnetic track body 2, by rotating the annular body 61, the annular body 61 generates a forward or backward thrust on the first magnetic track body 2, thereby promoting the movement of the first magnetic track body 2 on the second magnetic track body 3.

[0054] Furthermore, the driving module 6 further comprises a rotating shaft 62 connected to the driving device, the rotating shaft 62 is rotatably connected to the partition portion 31, a plurality of annular bodies 61 are fixedly sleeved on the rotating shaft 62, and the magnetic properties of the oppositely arranged polar regions in two adjacent annular bodies 61 are opposite: that is, the N polar region of one of the annular bodies 61 is arranged opposite to the S polar region of the other annular body 61. Figure 3 Combination Figure 6 As shown, by adding multiple annular bodies 61, the total thrust on the first magnetic rail body 2 can be increased. Since multiple annular bodies 61 are arranged on the rotating shaft 62, the order of a group of N-pole regions, S-pole regions, N-pole regions and S-pole regions can be switched to the order of S-pole regions, N-pole regions, S-pole regions and N-pole regions by rotation. It should be explained that the suspension propulsion principle of the maglev train in the prior art is that the maglev train achieves the purpose of pushing the train to move by controlling the order of the N-pole regions and S-pole regions of the electromagnetic coil groups on both sides of the guide rail. In this embodiment, a plurality of annular bodies 61 with staggered N-pole regions and S-pole regions are installed on the rotating shaft 62, and the purpose of switching the order of the N-pole regions and the S-pole regions is achieved by rotating the rotating shaft 62.

[0055] Optionally, the driving module 6 further includes a coupling 63, and a plurality of rotating shafts 62 are rotatably arranged in the partition portion 31, and the plurality of rotating shafts 62 are arranged at intervals along the length direction of the partition portion 31, and two adjacent rotating shafts 62 are connected by the coupling 63. By adding a plurality of rotating shafts 62 with annular bodies 61, the thrust of the driving module 6 on the first magnetic rail body 2 can be further increased, and the pushing efficiency of the stage 1 can be accelerated.

[0056] Alternatively, if Figure 5 As shown, the driving module device includes a motor 64 and a gear box 65, and the motor 64 and the gear box 65 can be arranged inside the second magnetic rail body 3, wherein the input shaft of the gear box 65 is coaxially connected to the driving shaft 641 of the motor 64, and the output shaft of the gear box 65 is coaxially connected to the rotating shaft 62. In actual use, the rotation direction of the motor 64 is controlled to make the stage 1 move forward or backward. Exemplarily, the gear box 65 has an input shaft and two output shafts. Through the cooperation of the motor 64 and the gear box 65, the motor 64 can drive the rotation of two sets of rotating shafts 62, reducing the number of motors 64 used. In this embodiment, the motor 64 is connected to the middle section of the rotating shaft 62 through the gear box 65. In other embodiments, the motor 64 can also be connected to the head end or tail end of the rotating shaft 62 through the gear box 65, and no excessive restrictions are made here.

[0057] This embodiment also provides a vapor deposition system, which includes a vapor deposition process chamber and the above-mentioned conveying mechanism, wherein the material port of the vapor deposition process chamber is connected to the conveying mechanism for conveying the glass substrate in and out of the chamber. By conveying the stage 1 by magnetic suspension of the conveying mechanism, friction resistance is reduced, the service life of the stage 1 is extended, the influence of mechanical vibration is reduced, and the conveying is more stable, which is conducive to the mass production of glass display panels.

[0058] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A conveying mechanism, characterized in that: include: A loading platform for placing objects to be transported; A first magnetic track body, the stage is arranged on the first magnetic track body, a first side wall and a second side wall are arranged below the first magnetic track body, and a first accommodating groove structure is formed between the first side wall and the second side wall; A second magnetic track body is located below the first magnetic track body, a partition portion is protruded on one side of the second magnetic track body facing the first magnetic track body, and the partition portion is located in the first accommodating groove structure; A first magnet is symmetrically arranged at the bottom of the first accommodating groove structure; A second magnet is symmetrically arranged at the upper end of the partition portion and is arranged opposite to the first magnet, and the magnetic properties of the opposite magnetic poles of the first magnet and the second magnet are the same; A driving module is used to drive the first magnetic rail body to move on the second magnetic rail body along the track length direction of the second magnetic rail body.

2. The conveying mechanism according to claim 1, characterized in that: A plurality of guide wheels are rotatably arranged on both sides of the partition portion close to the groove wall of the first accommodating groove structure, and the guide wheels are in rolling contact with the side walls of the first accommodating groove structure.

3. The conveying mechanism according to claim 1, characterized in that: The second magnetic rail body is provided with a first side stopper and a second side stopper, and the partition portion is located between the first side stopper and the second side stopper; A second accommodating groove structure is formed between the partition portion and the first side blocking portion, and a first side wall of the first accommodating groove structure is located in the second accommodating groove structure; A third accommodating groove structure is formed between the partition portion and the second side blocking portion, and the second side wall of the first accommodating groove structure is located in the third accommodating groove structure.

4. The conveying mechanism according to claim 3, characterized in that: The conveying mechanism further includes a plurality of third magnets and a plurality of fourth magnets; The third magnets are arranged at intervals on the outer sides of the two side walls of the first magnetic track body; The fourth magnet is disposed at intervals on the inner wall surfaces of the first side stopper and the second side stopper. The third magnet and the fourth magnet are disposed opposite to each other and the magnetic properties of the relative magnetic poles are opposite.

5. The conveying mechanism according to claim 3, characterized in that: The conveying mechanism further includes a plurality of third magnets and a plurality of fourth magnets; The third magnets are arranged at intervals on the outer sides of the two side walls of the first magnetic track body; The fourth magnet is disposed at intervals on the inner wall surfaces of the first side stopper and the second side stopper. The third magnet and the fourth magnet are disposed opposite to each other and the magnetic properties of the opposite magnetic poles are the same.

6. The conveying mechanism according to any one of claims 1 to 5, characterized in that: A plurality of fifth magnets are sequentially installed on the sidewall of the first accommodating groove structure along the track length direction of the first magnetic track body, and among two adjacent fifth magnets, the N-pole region and the S-pole region of one of the fifth magnets are respectively opposite to the S-pole region and the N-pole region of the other fifth magnet; The driving module includes an annular body and a driving device for driving the annular body to rotate. The annular body is rotatably arranged in the partition part. The rotation axis of the annular body is parallel to the track length direction of the second magnetic track body. The annular body is alternately provided with N pole regions and S pole regions in the circumferential direction.

7. The conveying mechanism according to claim 6, characterized in that: The driving module further comprises a rotating shaft connected to the driving device, the rotating shaft is rotatably connected to the partition part, a plurality of the annular bodies are fixedly sleeved on the rotating shaft, and the magnetic properties of oppositely disposed polar regions of two adjacent annular bodies are opposite.

8. The conveying mechanism according to claim 7, characterized in that: The driving module further includes a coupling. A plurality of rotating shafts are rotatably disposed in the partition portion. The plurality of rotating shafts are arranged at intervals along the length direction of the partition portion, and two adjacent rotating shafts are connected by the coupling.

9. The conveying mechanism according to claim 8, characterized in that: The driving device comprises a motor and a gear box, wherein an input shaft of the gear box is coaxially connected to a driving shaft of the motor, and an output shaft of the gear box is coaxially connected to the rotating shaft.

10. A vapor deposition system, characterized in that: It comprises a vapor deposition process chamber and a conveying mechanism as described in any one of claims 1 to 9, wherein a material port of the vapor deposition process chamber is connected to the conveying mechanism.

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