Detection equipment for adjusting target with four degrees of freedom

Abstract

The utility model discloses a detection device for adjusting a target with four degrees of freedom, comprising an adjusting mechanism, one end of the adjusting mechanism is connected with the target, the target is connected with a rotating column, the rotating column is connected with a point light source, and the other end of the adjusting mechanism is sequentially connected with a connecting block; one end of the objective lens is connected with an objective lens mounting seat, the other end of the objective lens is connected with a focusing base, one end, far away from the objective lens mounting seat, of the focusing base is connected with a focusing block, and the focusing block is connected with the connecting block.

Description

Technical Field

[0001] The utility model relates to a detection device for a 4-degree-of-freedom adjustable target, belonging to the technical field of detection instruments in the electronics and semiconductor industries. Background Art

[0002] The existing adjustment mechanisms on the market can adjust the position in the xy direction horizontally, or can adjust the focal length by screw rotation; however, combining them through ordinary assembly means results in a relatively large volume and cannot be used in places with limited space. Moreover, they cannot meet the requirement of adjusting the rotation angle and it is difficult to add other functions.

[0003] Currently, for the method of image superposition detection, there is no good way to adjust the target in multiple dimensions. To use a similar test method, a more complex and larger optical system needs to be designed, increasing the operation difficulty and the cost of human resources and materials. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies in the prior art and provide a detection device for a 4-degree-of-freedom adjustable target.

[0005] A detection device for a 4-degree-of-freedom adjustable target includes:

[0006] An adjustment mechanism, one end of the adjustment mechanism is connected with a target, the target is connected with a rotating column, the rotating column is connected with a point light source, and the other end of the adjustment mechanism is sequentially connected with a connecting block;

[0007] An objective lens, one end of the objective lens is connected with an objective lens mounting base, the other end is connected with a focusing base, the end of the focusing base far from the objective lens mounting base is connected with a focusing block, and the focusing block is connected with the connecting block.

[0008] Further, it also includes a connecting base, one end of the connecting base is connected with a connecting column for fixing to the optical observation system, and the other end is sleeved on the objective lens mounting base.

[0009] Further, the adjustment mechanism includes a horizontal adjustment base, a moving seat and a cover plate. One end of the horizontal adjustment base is connected with the connecting block, and the other end is connected with the moving seat. The moving seat is connected with the rotating column through the cover plate.

[0010] Further, the moving seat is sleeved inside the horizontal adjustment base, and the two are connected on one side by a spring and a spring top block, and on the other side by a vertical spring and a knob nut.

[0011] Further, there are ball bearings between the horizontal adjustment base and the cover plate to separate the relative positions of the moving seat and the cover plate.

[0012] Further, there are four connecting columns.

[0013] Compared with the prior art, the beneficial effects achieved by the present utility model are as follows.

[0014] The structure space of the present utility model is compact, and it can simultaneously meet the all-directional adjustment required for observation. After being assembled, the occupied space is greatly reduced, and the space for the hand to adjust the position is larger, which is very convenient to use and is suitable for use in a narrow space;

[0015] By setting a four-degree-of-freedom adjustment target compared with the prior art adjustment mechanism, the adjustment amount of the mechanism of the present utility model is smaller, avoiding the need to repeatedly adjust the target position back and forth due to excessive adjustment amount during the observation process, and greatly reducing the time required by the observer.

[0016] Before there was such a convenient and compact multi-dimensional adjustment method, when trying to sense the same target from multiple directions, due to reasons such as structural lightness and adjustment accuracy, it was necessary to design a more complex and larger-volume optical system, which not only increased the operation difficulty but also greatly increased the human and material costs. Using this mechanism can make the optical path system simpler. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is an exploded view of the present utility model;

[0018] Figure 2 is a schematic diagram of the present utility model;

[0019] In the figure: 1. connecting base; 2. objective lens mounting seat; 3. objective lens; 4. focusing base; 5. focusing block; 6. connecting block; 7. moving seat; 8. spring top block; 9. spring; 10. ball; 11. cover plate; 12. rotating column; 13. point light source; 14. connecting column; 15. horizontal adjustment base; 16. vertical spring; 17. knob nut; 18. target. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0020] The present utility model will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present utility model and should not be used to limit the protection scope of the present utility model.

[0021] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, terms such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise stated, the meaning of "a plurality" is two or more.

[0022] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific circumstances.

[0023] As Figure 1 shown, a detection device for a 4-degree-of-freedom adjustable target includes:

[0024] An adjustment mechanism, one end of the adjustment mechanism is connected to a target 18, the target is connected to a rotating column 12, the rotating column is connected to a point light source 13, and the other end of the adjustment mechanism is sequentially connected to a connection block 6, where the rotating column serves to connect the light source and fix the target;

[0025] An objective lens 3, one end of the objective lens is connected to an objective lens mounting base 2 for fixing the objective lens, and the other end is connected to a focusing base 4 for connecting and holding the positions of other workpieces, forming a closed space and being able to adjust the clarity of the target imaging by adjusting its position and the position of the 005 focusing block; the end of the focusing base away from the objective lens mounting base is connected to a focusing block 5. By adjusting the position of the focusing block 5, the structure on it moves axially to achieve the purpose of focusing and clear imaging, and the focusing block is connected to the connection block.

[0026] As Figure 2 shown, the detection device further includes a connection base 1. One end of the connection base is connected to a connection column for fixing in an optical observation system, and the other end is sleeved on the objective lens mounting base.

[0027] In this embodiment, the adjusting mechanism includes a horizontal adjusting base 15, a moving seat 7, and a cover plate 11. One end of the horizontal adjusting base is connected to a connecting block, and the other end is connected to the moving seat. The moving seat is connected to a rotating column through the cover plate. The moving seat is sleeved inside the horizontal adjusting base, and the two are connected by a spring 9 and a spring top block 8 on one side, and are connected by a vertical spring 16 and a knob nut 17 on the other side. A ball 10 is provided between the horizontal adjusting base and the cover plate to separate the relative positions of the moving seat and the cover plate.

[0028] In this embodiment, there are four connecting columns 14. The adjusting mechanism is connected to the installation part of the optical system through the 4 connecting columns 14, and the relative positions between the various connecting parts are maintained by the set screws on the side of the columns;

[0029] As Figure 1 and Figure 2 shown, the adjusting mechanism is connected to the installation part of the optical system through 4 columns 14, and the relative positions between the various connecting parts are maintained by the set screws on the side of the columns; these 4 columns are also the connection link between the optical system and our entire adjusting mechanism. At the top of the adjusting mechanism is a point light source 13, which is also the source of light required for the image of the target 18 and the object to be measured. The rotating column 12 on which the point light source 13 is installed is also the fixed position of the target 18, which plays a role in connecting the light source and fixing the target. The angle of the target 18 is manually adjusted by rotating it; it is nested on a moving seat 7 that can slide in the horizontal plane, and the sliding seat 7 relies on two sets of mutually perpendicular knobs 17 and springs 9 / 16 to maintain its position; the other direction of the knob is a spring, and the spring can provide the resilience for the knob to rotate in the reverse direction; by rotating these two mutually perpendicular knobs, the position of the target in the x and y directions on the light-receiving surface can be indirectly adjusted so that it can be moved to any required position. Connected to the lower part of this adjusting mechanism are a focusing base 4 and a focusing block 5 for adjusting the height by threads. They are both hollow. By rotating the focusing block 5, the relative position between the target 18 and the objective lens 3 can be adjusted, so that the scale on the target 18 can be clearly imaged on the light-receiving surface of the CCD.

[0030] In summary, the structure of the present utility model is compact in space, and can simultaneously meet the all-directional adjustment required for observation. After assembly, the occupied space is greatly reduced, and there is more space for adjusting the position by hand, making it very convenient to use and suitable for use in a narrow space;

[0031] The prior art often can only achieve one or two of the above adjustment functions, and the combined structure volume that can simultaneously meet the adjustment directions of this structure is more than 5 times that of this structure.

[0032] The adjustment amount of the mechanism of the utility model is smaller, and the minimum adjustment amount is only 0.02 mm, which avoids repeatedly adjusting the position of the target back and forth due to too large an adjustment amount during the observation process, and greatly reduces the time required by the observer.

[0033] The above are only the preferred embodiments of the utility model. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the utility model, several improvements and deformations can be made, and these improvements and deformations should also be regarded as the protection scope of the utility model.

Claims

1. A detection device for adjusting a target with 4 degrees of freedom, characterized in that: include: An adjusting mechanism, one end of which is connected to a target, which is connected to a rotating column, which is connected to a point light source, and the other end of which is connected in turn to a connecting block; An objective lens, one end of which is connected to an objective lens mounting seat, and the other end of which is connected to a focusing base, an end of the focusing base away from the objective lens mounting seat is connected to a focusing block, and the focusing block is connected to the connecting block.

2. The detection device for adjusting a target with 4 degrees of freedom according to claim 1, characterized in that: It also includes a connecting base, one end of which is connected to a connecting column for fixing on the optical observation system, and the other end of which is sleeved on the objective lens mounting seat.

3. The detection device for adjusting a target with 4 degrees of freedom according to claim 2, characterized in that: There are four connecting columns.

4. The detection device for adjusting a target with 4 degrees of freedom according to claim 1, characterized in that: The adjustment mechanism comprises a horizontal adjustment base, a movable base and a cover plate. One end of the horizontal adjustment base is connected to the connection block, and the other end is connected to the movable base. The movable base is connected to the rotating column through the cover plate.

5. The detection device for adjusting a target with 4 degrees of freedom according to claim 4, characterized in that: The movable seat sleeve is inside the horizontal adjustment base, one side of the two is connected by a spring and a spring top block, and the other side of the two is connected by a vertical spring and a knob nut.

6. The detection device for adjusting a target with 4 degrees of freedom according to claim 4, characterized in that: A ball bearing is arranged between the level adjustment base and the cover plate, and is used to separate the relative positions of the moving base and the cover plate.

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