Laser light source connecting device

Abstract

The utility model discloses a laser light source connecting device which comprises an optical fiber flange extending in a first direction, and one end, in the first direction, of the optical fiber flange is used for being connected with a laser; the adjusting cylinder is provided with an adjusting hole extending in the first direction, and the adjusting hole is in threaded connection with one end, away from the laser, of the optical fiber flange; an elastic part is arranged between one end, away from the laser, of the optical fiber flange and the adjusting hole and applies acting force to the optical fiber flange, so that the optical fiber flange abuts against the adjusting cylinder in the first direction; the connecting mechanism is connected with one end, deviating from the laser, of the adjusting cylinder. According to the laser light source connecting device, the relative positions of all the components can be accurately fixed.

Description

Technical Field

[0001] This application relates to the field of semiconductor detection technology, and particularly to a laser light source connection device. Background Art

[0002] The surface inspection of semiconductor wafers is crucial in the semiconductor industry. Electron microscopes are a crucial part of wafer surface inspection. As an auxiliary laser irradiation system for electron microscopes, it is of course also a key focus in the industry. The laser irradiation system is an important means for real-time control of the working state of devices under the surface of the silicon wafer to be measured and for improving the contrast of voltage contrast images.

[0003] During the detection process, it is necessary to introduce laser light into a vacuum environment, which is roughly divided into two methods, namely, introducing it using a feedthrough flange and introducing it through an optical window. When introducing laser light into the vacuum through an optical window, a threaded connection is used between the precision adjustment mechanism and the laser protection structure. However, considering the tolerance and pitch of the thread, the precision adjustment mechanism and the laser protection structure may become loose and it is difficult to accurately fix their positions, thereby affecting the accuracy of semiconductor detection. Summary of the Invention

[0004] An embodiment of this application provides a laser light source connection device that can accurately fix the relative positions between various components.

[0005] An embodiment of this application provides a laser light source connection device, including: an optical fiber flange extending along a first direction, one end of the optical fiber flange along the first direction being used for connecting to a laser; an adjustment cylinder having an adjustment hole extending along the first direction, the adjustment hole being threadedly connected to the end of the optical fiber flange away from the laser; an elastic part is provided between the end of the optical fiber flange away from the laser and the adjustment hole, and the elastic part applies a force to the optical fiber flange so that the optical fiber flange abuts against the adjustment cylinder along the first direction; a connection mechanism connected to the end of the adjustment cylinder facing away from the laser.

[0006] According to an embodiment of this application, the optical fiber flange includes a connection part located at the end of the optical fiber flange facing away from the laser, and the connection part is threadedly connected to the adjustment hole, and the outer diameter of the connection part is greater than the outer diameter of other parts of the optical fiber flange; a spacer is provided at the end of the adjustment hole close to the laser, the spacer is detachably connected to the adjustment hole, and the spacer abuts against the connection part along the first direction.

[0007] According to an embodiment of this application, the adjustment hole includes a first section and a second section distributed along the first direction, the inner diameter of the first section is greater than the inner diameter of the second section; the connection part is provided with an external thread, the first section is provided with an internal thread, and the connection part is threadedly connected to the first section; the elastic part includes a spring, the inner diameter of the spring is greater than or equal to the inner diameter of the second section, one end of the elastic part along the first direction is connected to the connection part, and the other end is connected to the connection of the first section and the second section.

[0008] According to an embodiment of the present application, the connecting mechanism includes: a reflection component connected to an end of the adjustment cylinder facing away from the laser; the reflection component includes a reflecting mirror and a reflection bracket, the reflection bracket is connected to the adjustment cylinder, the reflecting mirror is disposed on the reflection bracket, and the reflecting mirror is configured to reflect light incident in a first direction toward a second direction, and the first direction and the second direction intersect; a sealed connection component connected to the reflection component; the sealed connection component includes a body portion, an optical window, and a sealing portion, the body portion is tubular, the optical window is disposed within the body portion, and the optical window and the body portion are sealed by the sealing portion.

[0009] According to an embodiment of the present application, the reflection bracket includes a first cylindrical portion and a second cylindrical portion, the axis of the first cylindrical portion is parallel to the first direction, the axis of the second cylindrical portion is parallel to the second direction, the first cylindrical portion is connected to the adjustment cylinder, and the second cylindrical portion is connected to the sealed connection component; the reflecting mirror is disposed at the connection of the first cylindrical portion and the second cylindrical portion.

[0010] According to an embodiment of the present application, it further includes: a collimating mirror, and the first cylindrical portion and the adjustment cylinder clamp and fix the collimating mirror.

[0011] According to an embodiment of the present application, the outer periphery of the adjustment cylinder is provided with a first flange portion, and the first cylindrical portion is provided with a blind hole; the laser light source connection device further includes a first fastener, and the first fastener passes through the first flange portion and penetrates into the blind hole.

[0012] According to an embodiment of the present application, it further includes: an adjustment portion penetrating through the first cylindrical portion, the extending direction of the adjustment portion intersects with the first direction, and one end of the adjustment portion abuts against the outer peripheral side surface of the adjustment cylinder.

[0013] According to an embodiment of the present application, the body portion includes a third section, a fourth section, and a fifth section, the fourth section and the fifth section are of an integral structure, and the third section is detachably connected to the fourth section; the inner diameter of the third section is smaller than the inner diameter of the fourth section, and the inner diameter of the fourth section is larger than the inner diameter of the fifth section; the optical window is located in the fourth section; there are multiple sealing portions, at least one sealing portion is disposed between the optical window and the end of the fifth section facing the fourth section, and at least one sealing portion is disposed between the optical window and the third section.

[0014] According to an embodiment of the present application, it further includes a first connecting member, the first connecting member penetrates through the fourth section and the fifth section along the second direction, and at least a part of the first connecting member protrudes from the end surface of the fifth section facing away from the fourth section.

[0015] In the laser light source connection device provided by the embodiment of the present application, the fiber optic flange is connected to the laser, the fiber optic flange is connected to the adjustment cylinder, the connection mechanism is connected to the adjustment cylinder, and the connection mechanism can be connected to the vacuum chamber, so that the light emitted by the laser can be introduced into the vacuum. The adjustment cylinder is used to adjust the relative position between the fiber optic flange and the connection structure. An elastic part in an elastic deformation state is provided between the fiber optic flange and the adjustment hole, so that the fiber optic flange is subjected to an axial thrust, so that the threaded connection between the fiber optic flange and the adjustment cylinder is in an axially compressed state, thereby reducing the influence of thread tolerance and pitch on the relative position between the fiber optic flange and the adjustment cylinder, and accurately fixing the relative position between the fiber optic flange and the connection mechanism. Brief Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. Obviously, the following described drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0017] Figure 1 It is a schematic structural diagram of a laser light source connection device according to an embodiment of the present application.

[0018] Figure 2 It is an exploded view of parts of a laser light source connection device according to an embodiment of the present application.

[0019] Figure 3 It is a schematic internal structure diagram of a laser light source connection device according to an embodiment of the present application.

[0020] Reference Signs:

[0021] 1. Laser

[0022] 2. Fiber Optic Flange; 21. Connection Part

[0023] 3. Adjustment Cylinder; 31. Adjustment Hole; 311. First Section; 312. Second Section; 33. First Flange Part

[0024] 4. Connection Mechanism; 41. Reflection Component; 411. Reflecting Mirror; 412. Reflection Bracket; 413. First Cylindrical Part; 414. Second Cylindrical Part; 42. Sealed Connection Component; 421. Body Part; 422. Optical Window; 423. Sealing Part; 424. Third Section; 425. Fourth Section; 426. Fifth Section; 43. First Fastener

[0025] 5. Elastic Part

[0026] 6. Spacer

[0027] 7. Collimating Mirror

[0028] 8. Adjusting part;

[0029] 9. First connecting piece;

[0030] X. First direction; Y. Second direction. Specific implementation manners

[0031] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, many specific details are set forth in order to provide a comprehensive understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0032] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The embodiments will be described in detail below with reference to the drawings.

[0033] Relative terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, the elements defined by the statement "including..." do not exclude the existence of additional identical elements in the process, method, article or device including the said elements.

[0034] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "above" or "over" another layer or another region, it may mean directly above the other layer or another region, or there may be other layers or regions between it and the other layer or another region. And if the component is turned over, this layer or region will be "below" or "beneath" the other layer or another region.

[0035] In addition, the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this article generally means that the associated objects before and after are in an "or" relationship.

[0036] It should be understood that in the embodiments of the present application, "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0037] The applicant has found that when inspecting a semiconductor wafer, an electron microscope is usually used for inspection. If an optical window is used to introduce laser light into the vacuum environment where the semiconductor wafer is located, then the relative position of the laser light source and the optical window needs to be adjusted so that the laser light can enter the vacuum environment in the form of a parallel light beam. For precise adjustment, the adjustment mechanism and the protection mechanism are connected by a threaded connection. Considering the thread tolerance and pitch, when the adjustment mechanism and the protection mechanism are subjected to an external force, within the range of the thread tolerance and pitch, the adjustment mechanism and the protection mechanism have a certain displacement along the axial direction of the threaded connection, making it difficult to precisely fix the relative position of the adjustment mechanism and the protection mechanism, and small-scale loosening will occur, thereby affecting the reliability of the optical path and reducing the accuracy of semiconductor inspection.

[0038] In view of the above analysis, the applicant proposes a laser light source connection device, including an optical fiber flange, an adjustment cylinder, and a connection mechanism. The optical fiber flange is used to connect to a laser, the optical fiber flange is connected to the adjustment cylinder, the connection mechanism is connected to the adjustment cylinder, and the connection mechanism can be connected to a vacuum chamber, so that the light emitted by the laser can be introduced into the vacuum. The adjustment cylinder is used to adjust the relative position of the optical fiber flange and the connection structure. An elastic part in an elastically deformed state is provided between the optical fiber flange and the adjustment hole of the adjustment cylinder, so that the optical fiber flange receives an axial thrust, thereby making the threaded connection between the optical fiber flange and the adjustment cylinder in an axially compressed state, and further reducing the influence of the thread tolerance and pitch on the relative position between the optical fiber flange and the adjustment cylinder, and precisely fixing the relative position of the optical fiber flange and the connection mechanism.

[0039] Figure 1 is a schematic structural diagram of the laser light source connection device according to the embodiments of the present application. Figure 2 is an exploded view of the parts of the laser light source connection device according to the embodiments of the present application. Figure 3 is a schematic internal structure diagram of the laser light source connection device according to the embodiments of the present application.

[0040] Please refer to Figures 1 to 3, an embodiment of the present application provides a laser light source connection device, including: an optical fiber flange 2 extending along the first direction X, one end of the optical fiber flange 2 along the first direction X is used to connect to a laser 1; an adjusting cylinder 3 provided with an adjusting hole 31 extending along the first direction X, and the adjusting hole 31 is threadedly connected to the end of the optical fiber flange 2 away from the laser 1; an elastic part 5 is provided between the end of the optical fiber flange 2 away from the laser 1 and the adjusting hole 31, and the elastic part 5 applies a force to the optical fiber flange 2 so that the optical fiber flange 2 and the adjusting cylinder 3 are in contact along the first direction X; a connection mechanism 4 is connected to the end of the adjusting cylinder 3 facing away from the laser 1.

[0041] In the embodiment of the present application, the optical fiber flange 2 is used to connect to the laser 1, the optical fiber flange 2 is connected to the adjusting cylinder 3, and the connection mechanism 4 is connected to the adjusting cylinder 3. The connection mechanism 4 can be connected to a vacuum environment, such as connecting to a vacuum chamber. The laser 1 emits laser light along the first direction X, and the laser light sequentially passes through the optical fiber flange 2, the adjusting cylinder 3, and the connection mechanism 4, and enters the vacuum environment.

[0042] The adjusting cylinder 3 is used to adjust the distance from the optical fiber flange 2 to the connection mechanism 4 to adjust the laser light path to adapt to semiconductor detection. The adjusting cylinder 3 is provided with an adjusting hole 31, which is threadedly connected to the optical fiber flange 2, and the distance from the optical fiber flange 2 to the connection mechanism 4 is adjusted by the relative rotation of the adjusting cylinder 3 and the optical fiber flange 2. It can be understood that the distance between the optical fiber flange 2 and the connection mechanism 4 is related to the pitch and tolerance of the threaded connection.

[0043] The elastic part 5 in the elastic deformation state of the first section 311 and the second section 312 is arranged between the end of the optical fiber flange 2 away from the laser 1 and the adjusting hole 31. The elastic part 5 is always in the elastic deformation state and has a tendency to recover the elastic deformation. It applies a force to the optical fiber flange 2 to make the threads of the optical fiber flange 2 and the adjusting cylinder 3 contact along the first direction X. Exemplarily, the elastic part 5 applies a thrust to the optical fiber flange 2 so that the threads of the optical fiber flange 2 and the adjusting cylinder 3 can be pressed tightly along the first direction X. When the force between the optical fiber flange 2 and the adjusting cylinder 3 is not greater than the force applied by the elastic part 5 to the optical fiber flange 2, the elastic part 5 will keep the threads of the optical fiber flange 2 and the adjusting cylinder 3 in a pressed state, hindering their relative movement along the first direction X, thereby reducing the influence of the thread pitch and tolerance on the relative position between the optical fiber flange 2 and the adjusting cylinder 3, and further reducing the influence of the thread pitch and tolerance on the laser light path, making the laser light path have higher reliability and improving the accuracy of semiconductor detection.

[0044] It can be understood that other optical devices for adjusting the light path can be arranged in the connection mechanism 4, for example, a reflector 411, a transmissive mirror, a beam splitter, etc.

[0045] Further, continue to refer to Figures 1 to 3The optical fiber flange 2 includes a connecting portion 21, which is located at the end of the optical fiber flange 2 away from the laser 1, and the connecting portion 21 is threadedly connected to the adjustment hole 31, and the outer diameter of the connecting portion 21 is larger than the outer diameter of other parts of the optical fiber flange 2; a spacer ring 6 is provided at the end of the adjustment hole 31 close to the laser 1, and the spacer ring 6 is detachably connected to the adjustment hole 31, and the spacer ring 6 abuts against the connecting portion 21 along the first direction X.

[0046] The embodiment of the present application adopts the form that the adjustment cylinder 3 is partially sleeved on the outer side of the fiber flange 2. The fiber flange 2 is connected to the adjustment cylinder 3 through the connecting portion 21. The outer diameter of the connecting portion 21 is larger than the outer diameter of the other parts of the fiber flange 2. When the connecting portion 21 is threadedly connected with the adjustment hole 31, the other parts of the fiber flange 2 will not interfere with the relative movement of the fiber flange 2 and the adjustment cylinder 3. A spacer 6 is provided at one end of the adjustment hole 31 close to the laser 1. The spacer 6 is located on the side of the connecting portion 21 away from the elastic portion 5. The spacer 6 and the elastic portion 5 can respectively fix the two sides of the connecting portion 21 along the first direction X, thereby fixing the relative position of the fiber flange 2 and the adjustment cylinder 3.

[0047] Optionally, in some alternative embodiments of the present application, the connecting portion 21 may be provided with a hole having an internal thread, the adjusting cylinder 3 may be provided with an external thread, and the connecting portion 21 is threadedly connected to the adjusting cylinder 3. Similarly, the relative position of the adjusting cylinder 3 and the optical fiber flange 2 along the first direction X can be adjusted by relative rotation of the connecting portion 21 and the adjusting cylinder 3.

[0048] For ease of understanding, the embodiment of the present application is described by taking the example that the connecting portion 21 of the optical fiber flange 2 has an external thread.

[0049] Further, see Figures 1 to 3 The adjusting hole 31 includes a first section 311 and a second section 312 distributed along the first direction X, and the inner diameter of the first section 311 is greater than the inner diameter of the second section 312; the connecting portion 21 is provided with an external thread, the first section 311 is provided with an internal thread, and the connecting portion 21 is threadedly connected to the first section 311; the elastic portion 5 includes a spring, the inner diameter of the spring is greater than or equal to the inner diameter of the second section 312, and one end of the elastic portion 5 along the first direction X is connected to the connecting portion 21, and the other end is connected to the connecting portion of the first section 311 and the second section 312.

[0050] In the embodiment of the present application, the adjustment hole 31 is in the form of a variable diameter hole, and the connection between the first section 311 and the second section 312 corresponds to the variable diameter step of the variable diameter hole, and the elastic part 5 is arranged between the step and the optical fiber flange 2. The external thread of the connecting part 21 is threadedly connected with the internal thread of the first section 311. In addition to connecting the optical fiber flange 2 and the adjustment cylinder 3, the relative position of the connecting part 21 and the first section 311 along the first direction X can be adjusted through the relative rotation of the connecting part 21 and the first section 311, that is, the relative position of the optical fiber flange 2 and the adjustment cylinder 3 can be adjusted.

[0051] The elastic part 5 is in the form of a spring, such as a column spring, and light can pass through the hollow space of the elastic part 5 without being blocked by the elastic part 5. The inner diameter of the spring is greater than or equal to the inner diameter of the second section 312, so that the spring can be against the variable diameter surface at the connection between the first section 311 and the second section 312. In the embodiment of the present application, the elastic part 5 can also be in the form of a rubber ring, similar to a spring, occupying a cylindrical space, and having elasticity itself, and can apply thrust to the adjustment tube 3.

[0052] Further, see Figures 1 to 3 The connection mechanism 4 includes: a reflection component 41, which is connected to the end of the adjustment tube 3 away from the laser 1, the reflection component 41 includes a reflector 411 and a reflection bracket 412, the reflection bracket 412 is connected to the adjustment tube 3, the reflector 411 is arranged on the reflection bracket 412, and the reflector 411 is configured to reflect the light incident along the first direction X toward the second direction Y, and the first direction X and the second direction Y intersect; a sealing connection component 42, which is connected to the reflection component 41; the sealing connection component 42 includes a main body 421, an optical window 422 and a sealing part 423, the main body 421 is tubular, the optical window 422 is arranged in the main body 421, and the optical window 422 and the main body 421 are sealed by the sealing part 423.

[0053] The connecting mechanism 4 changes the direction of the optical path in the form of reflection. When it is difficult for the laser to enter the vacuum environment along the first direction X, it can be reflected by the reflection component 41 so that the laser can enter the vacuum environment along the second direction Y. The second direction Y can be determined by the vacuum environment, and it can be understood that the second direction Y intersects with the first direction X. For ease of understanding, the first direction X and the second direction Y are perpendicular to each other in the embodiment of the present application.

[0054] The reflection component 41 reflects the laser through the reflection mirror 411, and the reflection bracket 412 is used to install the reflection mirror 411. In addition, the reflection bracket 412 is used to connect the adjustment tube 3 so that the light emitted by the adjustment tube 3 enters the reflection component 41 and is emitted toward the reflection mirror 411. Under the premise that the first direction X is determined, the angle between the reflection mirror 411 and the first direction X can be adjusted so that the reflected laser can enter the vacuum environment in an appropriate direction. The optical window 422 is arranged at the sealing connection component 42, serving as a window for the laser to enter the vacuum environment and separate the vacuum environment and the non-vacuum environment. The sealing part 423 is arranged between the optical window 422 and the main body 421 to achieve the separation of the vacuum environment and the non-vacuum environment. The end of the main body 421 away from the reflection bracket 412 can be connected to the vacuum environment.

[0055] Further, see Figures 1 to 3, the reflection bracket 412 includes a first cylindrical portion 413 and a second cylindrical portion 414. The axis of the first cylindrical portion 413 is parallel to the first direction X, and the axis of the second cylindrical portion 414 is parallel to the second direction Y. The first cylindrical portion 413 is connected to the adjustment cylinder 3, and the second cylindrical portion 414 is connected to the sealing connection assembly 42; the reflecting mirror 411 is disposed at the connection of the first cylindrical portion 413 and the second cylindrical portion 414.

[0056] The reflection bracket 412 can be in a bent cylindrical shape, corresponding to the first cylindrical portion 413 and the second cylindrical portion 414 respectively. The hollow part can avoid blocking light. The reflecting mirror 411 is disposed at the connection of the first cylindrical portion 413 and the second cylindrical portion 414, that is, at the bent part of the bent cylindrical shape. The first cylindrical portion 413 is fixedly connected to the adjustment cylinder 3, so that the relative position change between the fiber optic flange 2 and the adjustment cylinder 3 is the relative position change between the fiber optic flange 2 and the reflection bracket 412. The second cylindrical portion 414 can be detachably connected to the body portion 421, so that the reflected light can enter the vacuum environment.

[0057] Further, continue to refer to Figures 1 to 3 , the laser light source connection device of the embodiment of the present application further includes: a collimating mirror 7. The collimating mirror 7 is used to collimate the laser so that the laser forms a parallel light beam. The first cylindrical portion 413 and the adjustment cylinder 3 clamp and fix the collimating mirror 7, so the relative position change between the fiber optic flange 2 and the reflection is the relative position change between the fiber optic flange 2 and the collimating mirror 7, so that the transmitted light of the collimating mirror 7 can form a parallel light beam.

[0058] Further, continue to refer to Figures 1 to 3 , the outer periphery of the adjustment cylinder 3 is provided with a first flange portion 33, and the first cylindrical portion 413 is provided with a blind hole; the laser light source connection device further includes a first fastener 43, and the first fastener 43 passes through the first flange portion 33 and penetrates into the blind hole.

[0059] In the embodiment of the present application, the collimating mirror 7 is clamped and fixed by the adjustment cylinder 3 and the reflection bracket 412. The first fastener 43 passes through the first flange portion 33 on the outer periphery of the adjustment cylinder 3 and penetrates into the blind hole of the first cylindrical portion 413 to fix the adjustment cylinder 3 and the reflection bracket 412 together, thereby fixing the collimating mirror 7.

[0060] Further, continue to refer to Figures 1 to 3 , the laser light source connection device of the embodiment of the present application further includes: an adjustment portion 8, which penetrates the first cylindrical portion 413. The extending direction of the adjustment portion 8 intersects with the first direction X, and one end of the adjustment portion 8 abuts against the outer peripheral side surface of the adjustment cylinder 3.

[0061] The adjusting part 8 is used to adjust the relative positions of the first cylinder part 413 and the adjusting cylinder 3, improve the coaxiality of the first cylinder part 413 and the adjusting cylinder 3, so that the laser can be incident along the optical axis of the collimating mirror 7. The adjusting cylinder 3 can be in the form of a bolt, penetrate along the radial direction of the first cylinder part 413 and abut against the outer periphery of the adjusting cylinder 3. The coaxiality of the first cylinder part 413 and the adjusting cylinder 3 is adjusted by adjusting the length of the extending part of the adjusting part 8.

[0062] Further, continue to refer to Figures 1 to 3 , the body part 421 includes a third section 424, a fourth section 425 and a fifth section 426. The fourth section 425 and the fifth section 426 are of an integral structure, and the third section 424 is detachably connected to the fourth section 425; the inner diameter of the third section 424 is smaller than that of the fourth section 425, and the inner diameter of the fourth section 425 is larger than that of the fifth section 426; the optical window 422 is located in the fourth section 425; a plurality of sealing parts 423 are provided, at least one sealing part 423 is arranged between the optical window 422 and the end of the fifth section 426 facing the fourth section 425, and at least one sealing part 423 is arranged between the optical window 422 and the third section 424.

[0063] The body part 421 has three sections. Among them, the third section 424 is a separate component, and the fourth section 425 and the fifth section 426 are of an integral structure. The inner diameter of the fourth section 425 is the largest and can accommodate the optical window 422. The stepped surface formed at the connection of the fourth section 425 and the fifth section 426 and the third section 424 clamp and fix the optical window 422. Sealing parts 423 are provided on both sides of the optical window 422 so that the optical window 422 can separate the vacuum environment and the non-vacuum environment.

[0064] Further, continue to refer to Figures 1 to 3 , the laser light source connection device of the embodiment of the present application further includes a first connecting piece 9. The first connecting piece 9 penetrates through the fourth section 425 and the fifth section 426 along the second direction Y, and at least part of the first connecting piece 9 protrudes from the end surface of the fifth section 426 facing away from the fourth section 425.

[0065] The first connecting piece 9 is used to connect the laser light source connection device of the embodiment of the present application to the vacuum environment. The first connecting piece 9 protrudes from the end surface of the fifth section 426 and can be connected to the vacuum environment, such as a vacuum chamber. The first connecting piece 9 can be in the form of a bolt, and the nut of the first connecting piece 9 can be embedded in the end surface of the fourth section 425 facing away from the fifth section 426 to prevent the first connecting piece 9 from falling off.

[0066] In summary, the embodiment of the present application provides a laser light source connection device. The fiber optic flange is connected to the laser, the fiber optic flange is connected to the adjustment cylinder, the connection mechanism is connected to the adjustment cylinder, and the connection mechanism can be connected to the vacuum chamber, so that the light emitted by the laser can be introduced into the vacuum. The adjustment cylinder is used to adjust the relative position between the fiber optic flange and the connection structure. An elastic part in an elastic deformation state is provided between the fiber optic flange and the adjustment hole of the adjustment cylinder, so that the fiber optic flange receives an axial thrust, thereby making the threaded connection between the fiber optic flange and the adjustment cylinder in an axially compressed state, and further reducing the influence of thread tolerance and pitch on the relative position between the fiber optic flange and the adjustment cylinder, and accurately fixing the relative position between the fiber optic flange and the connection mechanism.

[0067] As described above, the above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A laser light source connection device, characterized in that: include: An optical fiber flange extends along a first direction, and one end of the optical fiber flange along the first direction is used to connect to a laser; An adjustment cylinder having an adjustment hole extending along the first direction, wherein the adjustment hole is threadedly connected to an end of the optical fiber flange away from the laser; an elastic portion is provided between the end of the optical fiber flange away from the laser and the adjustment hole, wherein the elastic portion applies a force to the optical fiber flange so that the optical fiber flange abuts against the adjustment cylinder along the first direction; The connecting mechanism is connected to the end of the adjusting tube away from the laser.

2. The laser light source connection device according to claim 1, characterized in that: The optical fiber flange comprises a connecting portion, the connecting portion is located at an end of the optical fiber flange away from the laser, and the connecting portion is threadedly connected to the adjustment hole, and the outer diameter of the connecting portion is greater than the outer diameter of other parts of the optical fiber flange; A spacer is provided at one end of the adjustment hole close to the laser, the spacer is detachably connected to the adjustment hole, and the spacer abuts against the connecting portion along the first direction.

3. The laser light source connection device according to claim 2, characterized in that: The adjusting hole comprises a first section and a second section distributed along the first direction, and the inner diameter of the first section is greater than the inner diameter of the second section; The connecting portion is provided with an external thread, the first section is provided with an internal thread, and the connecting portion is threadedly connected to the first section; The elastic part includes a spring, the inner diameter of the spring is greater than or equal to the inner diameter of the second section, one end of the elastic part along the first direction is connected to the connecting part, and the other end is connected to the connecting point of the first section and the second section.

4. The laser light source connection device according to claim 1, characterized in that: The connecting mechanism comprises: a reflective assembly connected to an end of the adjustment tube away from the laser, the reflective assembly comprising a reflector and a reflective bracket, the reflective bracket being connected to the adjustment tube, the reflector being disposed on the reflective bracket, and the reflector being configured to reflect light incident along the first direction toward a second direction, the first direction and the second direction intersecting; A sealing connection component is connected to the reflection component; the sealing connection component includes a main body, an optical window and a sealing part, the main body is tubular, the optical window is arranged in the main body, and the optical window and the main body are sealed by the sealing part.

5. The laser light source connection device according to claim 4, characterized in that: The reflective bracket includes a first cylinder portion and a second cylinder portion, the axis of the first cylinder portion is parallel to the first direction, the axis of the second cylinder portion is parallel to the second direction, the first cylinder portion is connected to the adjustment cylinder, and the second cylinder portion is connected to the sealing connection assembly; the reflector is arranged at the connection between the first cylinder portion and the second cylinder portion.

6. The laser light source connection device according to claim 5, characterized in that: Also includes: A collimator mirror, wherein the first barrel portion and the adjusting barrel clamp and fix the collimator mirror.

7. The laser light source connection device according to claim 6, characterized in that: The outer periphery of the adjusting cylinder is provided with a first flange portion, and the first cylinder portion is provided with a blind hole; The laser light source connection device also includes a first fastener, which passes through the first flange portion and penetrates into the blind hole.

8. The laser light source connection device according to claim 5, characterized in that: Also includes: The adjusting portion penetrates the first tube portion, the extending direction of the adjusting portion intersects with the first direction, and one end of the adjusting portion abuts against the outer peripheral side surface of the adjusting tube.

9. The laser light source connection device according to claim 4, characterized in that: The main body comprises a third section, a fourth section and a fifth section, the fourth section and the fifth section are in an integrated structure, the third section is detachably connected to the fourth section; the inner diameter of the third section is smaller than the inner diameter of the fourth section, and the inner diameter of the fourth section is larger than the inner diameter of the fifth section; the optical window is located in the fourth section; There are multiple sealing parts, at least one sealing part is arranged between the optical window and the end of the fifth section facing the fourth section, and at least one sealing part is arranged between the optical window and the third section.

10. The laser light source connection device according to claim 9, characterized in that: It also includes a first connecting member, which passes through the fourth section and the fifth section along the second direction, and at least a portion of the first connecting member protrudes from the end surface of the fifth section away from the fourth section.

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